JPH11179913A - Ink-jet head cartridge, and ink-jet apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent a meniscus of a sealing resin from being formed at a boundary part between a common liquid chamber and a liquid chamber wall as a result of the conveyance of the sealing resin through a gap by a capillary force by arranging a projecting part at the wall in the periphery of the liquid chamber set at a grooved top plate at the side of a unite face to a substrate and engaging the projecting part with a groove on the substrate. SOLUTION: When a sealing resin 250 is to be filled in a separation groove 130 between liquid chambers of an ink-jet head, a grooved top plate is united on a silicon substrate and a projecting part of the grooved top plate is fitted in a recessed part of the silicon substrate. Then, the grooved top plate is retained by a spring member and heated at a predetermined temperature, whereby a warp, etc., of the grooved top plate are corrected. In this state, the sealing resin 250 is filled by a dispenser in the separation groove 130 of a common liquid chamber. At this time, the sealing resin is filled in the separation groove 130 between the liquid chambers by a capillary force, conveyed through the separation groove 130 to reach an orifice plate having a hole 120 and at the same time, filled in a gap of the silicon substrate and a wall of the liquid chamber of each color of the grooved top plate.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ink jet recording apparatus which performs recording by discharging a recording liquid (ink or the like) as flying droplets from a discharge port (orifice) and attaching the liquid to a recording medium. The present invention relates to an ink jet recording head and an ink jet recording apparatus equipped with the same, and more particularly to an ink jet recording head and an ink jet recording apparatus for color printing.

[0002]

2. Description of the Related Art Conventionally, in an ink jet recording head, as described in JP-A-55-132253, an electric / heat converter formed on a silicon substrate and a recording ink discharge port on the silicon substrate are provided. An ink flow path having a heat acting portion by the electrothermal transducer, and a grooved top plate having a recess for forming a common liquid chamber for supplying ink to the ink flow path. ing.

In an ink jet recording head, a driving circuit for driving an electric / heat converter disposed on the silicon substrate is built in the silicon substrate.

There is provided a wiring board for drawing out wiring from a driving circuit of the silicon substrate, and the silicon substrate having the driving circuit formed therein and the wiring board are disposed adjacent to the heat radiating member.

[0005] The electrical connection between the terminal provided on the silicon substrate provided with the electrothermal converter and having the drive circuit formed therein is electrically connected to one of the aluminum wirings drawn out from the thermal converter. The other aluminum wiring is connected to the power supply terminal on the wiring board by wire bonding and led out to the end of the silicon substrate by a two-layer wiring.

Further, as shown in FIG. 8, the color ink jet recording head performs multi-color printing using an ink jet unit in which a plurality of ink jet recording heads are arranged. According to the above-described conventional example, when a plurality of ink jet recording heads are arranged, it is difficult to reduce the size of the ink jet recording heads, and although there is a merit of increasing the speed, the cost is multiplied by the number of the ink jet recording heads and the cost is increased.

Therefore, the common liquid chamber of the grooved top plate joined on the same silicon substrate in which the driving circuit is formed is divided into a plurality of liquid chambers, and a plurality of kinds of ink are supplied to each of the divided liquid chambers. Proposals have been made to enable multicolor printing with one inkjet head, to make the inkjet head compact, and to provide an inexpensive color inkjet head.

[0008]

However, in the case of the above configuration, it is necessary to reliably separate a plurality of common liquid chambers of the top plate. When separating a plurality of common liquid chambers, a groove (hereinafter referred to as a separation groove) into which a resin for separation is poured between each common liquid chamber of a grooved top plate having a plurality of common liquid chambers and the same silicon substrate on which a drive circuit is formed. And the separation groove extends between the ink discharge nozzles between the liquid chambers.

Further, when resin for separation is poured between the common liquid chambers, it is necessary to ensure that the resin stops at the separation groove and does not flow into the ink discharge nozzle.

As a result of a detailed study, it has been found that the gap between the silicon substrate and the groove must be 10 μm or less. The reason is that the resin transmitted by the capillary force through the gap forms a meniscus at the boundary between the common liquid chamber and the liquid chamber wall and flows to the tip of the separation groove, so that the gap between the silicon substrate and the grooved top plate is formed. It has been found that when the size of the liquid crystal becomes large, the meniscus becomes large, the amount of the resin flowing into the tip of the separation groove increases, and the resin overflows from the separation groove, thereby lowering the yield in the step of separating the liquid chambers.

In view of the above results, the present invention has been studied with the object of improving the yield of the step of separating the liquid chambers.

[0012]

Means for Solving the Problems The inventor of the present application has made intensive studies to solve the above-mentioned problems, and has arrived at the present invention. That is, the present application includes the following inventions and embodiments.

A substrate provided with a plurality of energy generators for generating ejection energy, a recording ink ejection port, a nozzle serving as an ink flow path, and a plurality of common liquid chambers for supplying ink to the nozzle; The intervals between the liquid chambers are equal to an integral multiple of the nozzle pitch and are equal to each other. The liquid chamber separation grooves are formed by joining the substrate and the grooved top plate having a plurality of common liquid chamber recesses, and the liquid chamber separation grooves are filled with resin. In the ink jet recording head that separates the liquid chambers by this, a convex portion is arranged on the side of the liquid chamber surrounding the liquid chamber provided on the grooved top plate, on the bonding surface side with the substrate, and the convex portion is An ink jet recording head, wherein the ink jet recording head is in a groove provided on the substrate.

[0014] On the wall side around the liquid chamber provided on the grooved top plate, a convex portion arranged on the side of the joint surface with the substrate surrounds the outside of the common liquid chamber except for the nozzle portion. An ink jet recording head according to any one of the preceding claims.

[0015] On the wall side around the liquid chamber provided on the grooved top plate, a convex portion disposed on a joint surface with the substrate,
The ink jet recording head according to claim 1, wherein the ink jet recording head is located at an outer peripheral portion of the common liquid chamber except for a rear end side of the nozzle section and the common liquid chamber, and is bent toward the common liquid chamber from a middle of a side wall of the liquid chamber. .

A substrate provided with a plurality of energy generators for generating ejection energy, a recording ink ejection port, a nozzle serving as an ink flow path, and a plurality of common liquid chambers for supplying ink to the nozzle; The intervals of the liquid chambers are equal intervals at an integral multiple of the nozzle pitch, and are configured by joining a top plate having a plurality of common liquid chamber recesses and the substrate, and filling the liquid chamber separation grooves with resin. An ink jet recording apparatus comprising an ink jet recording head for separating a liquid chamber, wherein the ink jet recording head according to any one of the above is mounted.

[0017]

According to the present invention, in an ink jet recording head in which a resin filling groove for separation is provided between common liquid chambers, a liquid chamber separating groove extends in the filling groove portion which is aligned with an ink discharge nozzle. In addition, a convex portion is provided on the side of the joint surface with the silicon substrate below the liquid chamber wall disposed across the liquid chamber separation groove around the common liquid chamber, and the convex portion is disposed around the common liquid chamber. A concave portion corresponding to the convex portion is provided on the silicon substrate side, the convex portion on the grooved top plate side is fitted with the concave portion provided on the silicon substrate, and the convex portion is heated by moderately heating the silicon substrate side. It reaches the bottom of the recess provided on the substrate side.

By doing so, the resin meniscus formed at the boundary between the common liquid chamber and the liquid chamber wall, which is formed by the sealing resin filled in the sealing step and transmitted through the gap by capillary force, is prevented. Alternatively, by stopping the resin at a place where the ink ejection nozzle is not affected, the resin does not flow into the ink ejection nozzle, and the plurality of common liquid chambers on the top plate can be reliably produced with good yield. It is possible to separate them.

Further, a groove connected to the separation groove is formed on the silicon substrate side below the through hole formed in the orifice plate or the orifice plate side on the substrate side, which has been conventionally proposed. In addition, the resin can be reliably filled between the silicon substrate and the orifice plate, and the liquid chamber can be reliably separated.

The size of the projection is, for example, 12
Approximately 15 μm, width about 5 μm, and fitted by heat and pressure. The protrusions are arranged on the lower surface of the walls on both sides of the groove for filling the resin for separating the liquid chamber, outside the liquid chamber frame.

The resin used in the method of the present invention can be used as long as it is used for sealing. For example, TES399, manufactured by Toshiba Silicone Co., Ltd. is exemplified.

The following apparatus is exemplified as a color ink jet recording apparatus to which the ink cartridge of the present invention is mounted.

FIG. 9 is a schematic view of an ink jet recording apparatus IJRA to which the four color integrated color ink jet cartridge of the present invention is applied. Here, the carriage HC engages with a lead screw 5004 and a threaded groove 5005 that rotates via driving force transmission gears 5011 and 5009 in conjunction with forward and reverse rotation of the drive motor 5013. The carriage HC has a pin (not shown). And is reciprocated in the directions of arrows a and b. The print head unit 502 is mounted on the carriage HC.
5. The ink tank unit 5026 is mounted.

Reference numeral 5002 denotes a paper pressing plate, which presses the paper against the platen 5000 in the moving direction of the carriage. Reference numerals 5007 and 5008 denote home position detecting means for confirming the presence of the lever 5006 of the carriage in this area and switching the rotation direction of the motor 5013. Reference numeral 5016 denotes a member for supporting a cap member 5022 for capping the front surface of the recording head. Reference numeral 5015 denotes suction means for suctioning the inside of the cap. In this case, one cap simultaneously sucks four color nozzles. Reference numeral 5017 denotes a cleaning blade, and reference numeral 5019 denotes a member capable of moving the blade in the front-rear direction. These members are indicated on the main body support plate 5018. Reference numeral 5012 denotes a lever for starting suction for suction recovery. The lever 5012 moves with the movement of the cam 5020 that engages with the carriage, and the driving force from the drive motor moves by a known transmission means such as clutch switching. Controlled.

The capping, cleaning, and suction recovery are configured so that when the carriage HC is positioned in the home position side area, desired operations can be performed at the corresponding positions by the action of the lead screw 5005. If a desired operation is performed at a known timing, any of the embodiments can be applied.

According to the present invention, there is provided a means (for example, an electrothermal converter or a laser beam) for generating thermal energy as energy used for performing ink ejection, particularly in an ink jet recording system. The present invention provides an excellent effect in a recording head and a recording apparatus of a type that causes a change in the state of ink.

The typical configuration and principle are described in, for example, US Pat. Nos. 4,723,129 and 4,740.
It is preferable to use the basic principle disclosed in the specification of Japanese Patent No. 796. This method can be applied to both the so-called on-demand type and the continuous type. In particular, in the case of the on-demand type, liquid (ink)
By applying at least one drive signal corresponding to the recorded information and providing a rapid temperature rise exceeding the boiling point, to an electrothermal transducer arranged corresponding to the sheet or liquid path in which , Heat energy is generated in the electrothermal transducer, and the film is boiled on the heat-acting surface of the recording head.
As a result, air bubbles in the liquid (ink) can be formed in one-to-one correspondence with the drive signal, which is effective. The growth of this bubble,
By discharging the liquid (ink) through the discharge opening by contraction, at least one liquid is formed. When the drive signal is formed into a pulse shape, the growth and shrinkage of the bubble are immediately and appropriately performed, so that a liquid (ink) having excellent responsiveness can be discharged, which is more preferable. The driving signal in the form of a pulse is disclosed in U.S. Pat.
Suitable are those described in 345262.

By employing the conditions described in US Pat. No. 4,313,124 of the invention relating to the rate of temperature rise of the heat acting surface, further excellent recording can be performed. As a configuration of the recording head, in addition to the combination configuration (a linear liquid flow path or a right-angled liquid flow path) of a discharge port, a liquid path, and an electrothermal converter as disclosed in each of the above-mentioned specifications, a heat acting section U.S. Pat. No. 4,558,333, and U.S. Pat.
A configuration using the specification of Japanese Patent No. 600 is also included in the present invention. In addition, Japanese Unexamined Patent Publication (Kokai) No. 123670/1984 discloses a configuration in which a common slit is used as a discharge portion of an electrothermal converter for a plurality of electrothermal converters, and an aperture for absorbing pressure waves of thermal energy. The present invention is also effective as a configuration based on Japanese Patent Application Laid-Open No. 59-138461, which discloses a configuration corresponding to a discharge unit.

It is preferable to add recovery means for the printhead, preliminary auxiliary means, and the like provided as components of the printing apparatus of the present invention since the effects of the present invention can be further stabilized. Specifically, pre-heating of the recording head by a camping unit, a cleaning unit, a pressure or suction unit, an electrothermal converter, another heating element, or a combination thereof. It is also effective to perform a preliminary ejection mode in which ejection is performed separately from the means and printing to perform stable printing.

[0030]

Embodiment 1 FIG. 1 is a diagram of a grooved top plate according to a first embodiment of the present invention. FIG. 2 is an enlarged view of a liquid chamber separation groove of only the nozzle portion of the grooved top plate of FIG. 1 according to the present invention, and FIG. 3 is a view of an ink jet recording head according to the first embodiment of the present invention. It is. FIG. 4 is a schematic diagram illustrating the wraparound of the sealing resin of the present embodiment.

In FIG. 1, reference numeral 100 denotes an ink discharge nozzle, 110 denotes an orifice plate groove connected to a common liquid chamber separation groove, 130 denotes a common liquid chamber separation groove, and 140 denotes a wall of the common liquid chamber separation groove. Convex portion provided on the silicon substrate side, 15
0 is a common liquid chamber separation groove wall, 160 is an orifice plate,
170 is a sealing resin filling port of the common liquid chamber separation groove, and 180 is a common liquid chamber.

In FIG. 2, reference numeral 120 denotes a hole formed in the orifice plate of the dummy nozzle, and the groove 11 is formed in the orifice plate connected to the common liquid chamber separation groove.
Open to 0.

FIG. 3 is a view of an ink-jet head chip, 200 is a grooved top plate of FIG. 1, 190 is a silicon substrate provided with an electrothermal converter in which a driving circuit is built, and Has been joined. Further, reference numeral 210 denotes an aluminum plate for radiating heat from the silicon substrate. The silicon substrate is bonded to the aluminum plate with an adhesive having good thermal conductivity. 240 is an ink flow path member.

FIG. 4 is a schematic view of the encircling of the sealing resin, and reference numeral 250 denotes a sealing resin between the separation groove and the convex portion formed on the groove top side in the gap between the groove top and the silicon substrate. Is filled.

When the sealing resin is filled in the separation groove between the liquid chambers of the ink jet head, the grooved top plate shown in FIG. 1 is joined onto a silicon substrate, and the projection on the grooved top plate side is connected to the silicon substrate side. Into the recess. Then, the grooved top plate is pressed by a spring member and heated at 80 ° C. for about 30 minutes to correct the warp or the like of the grooved top plate and to securely fit the convex portion to the concave portion on the silicon substrate side. In this state, the common liquid chamber separation groove is filled with a sealing resin with a dispenser.

When filling the sealing resin with a dispenser, the resin is applied onto the silicon substrate at the rear end of the sealing resin filling port of the grooved top plate. Alternatively, there is a method in which a sealing resin flow path in the vertical direction is provided on the grooved top plate side, the sealing resin is applied on the grooved top plate, and the sealing resin is filled through the flow paths.

The applied sealing resin is filled in the separation groove between the liquid chambers by capillary force, and reaches the orifice plate through the separation groove. At the same time, the space between the silicon substrate and the liquid chamber wall between the colors of the grooved top plate is also filled. Thereafter, the ink flow path member is attached, and the periphery of the ink flow path member is sealed with a sealing resin, whereby an ink jet recording head is completed.

Accordingly, the sealing resin is formed in the common liquid chamber by fitting the projections on the side of the top plate provided with grooves on both sides of the separation groove provided on the liquid chamber wall between the colors in the recesses on the silicon substrate side. The sealing resin is filled between the convex portions on the side of the top plate with grooves provided on both sides of the separation grooves provided on the inter-liquid-chamber wall for each color without forming a meniscus at the boundary between the liquid chamber walls. The liquid ink head is reliably reached to the orifice plate, the liquid resin chambers can be reliably separated without the sealing resin sneaking to the ink discharge nozzle side, the yield can be improved, and the color inkjet head can be manufactured more cheaply. It becomes possible.

Embodiment 2 FIG. 5 is a view of a grooved top plate according to a second embodiment of the present invention. FIG. 6 is an enlarged view of the liquid chamber separation groove only in the nozzle portion of the grooved top plate of FIG. 6 according to the present invention, and FIG. 7 is a schematic diagram showing the encircling of the sealing resin of this embodiment. .

In FIG. 5, reference numeral 100 denotes an ink discharge nozzle, 110 denotes a groove of an orifice plate connected to the common liquid chamber separation groove, 130 denotes a common liquid chamber separation groove, and 140 denotes a wall of the common liquid chamber separation groove. Convex portion provided on the silicon substrate side, 14
5 is a convex portion bent toward the common liquid chamber, 150 is a common liquid chamber separation groove wall, 160 is an orifice plate, 170 is a sealing resin filling port of the common liquid chamber separation groove, and 180 is a common liquid chamber.

In FIG. 6, reference numeral 120 denotes a hole formed in the orifice plate of the separation groove, and is formed in the groove 110 engraved in the orifice plate connected to the common liquid chamber separation groove.

FIG. 7 is a schematic diagram of the encircling of the sealing resin. Reference numeral 250 denotes a sealing resin between the separation groove and the gap between the groove top and the silicon substrate. Is filled. 260 is a meniscus of the sealing resin formed in the common liquid chamber.

When filling the separation groove between the liquid chambers of the ink jet recording head with a sealing resin, the grooved top plate shown in FIG. 5 is bonded onto a silicon substrate, and the projection on the grooved top plate side is formed on the silicon substrate. Into the side recess. Thereafter, the grooved top plate is pressed by a spring member and heated at 80 ° C. for about 30 minutes to correct the warp and the like of the grooved top plate, and the projections are fitted into the recesses on the silicon substrate side. After that, the grooved top plate is pressed by the spring member, and in this state, the common liquid chamber separation groove is filled with a sealing resin by a dispenser.

When filling the sealing resin with a dispenser, the resin is applied on the silicon substrate at the rear end of the sealing resin filling port of the grooved top plate. The applied sealing resin is filled in the separation groove between the liquid chambers by capillary force, and reaches the orifice plate through the separation groove. At the same time, the space between the silicon substrate and the wall between the liquid chambers between the colors of the groove is also filled. Thereafter, the ink flow path member is attached, and the periphery of the ink flow path member is sealed with a sealing resin, whereby an ink jet recording head is completed.

In this case, it is necessary to press the nozzle portion of the grooved top plate with a spring and press the convex portion around the common liquid chamber. However, if it is attempted to press the entire periphery of the common liquid chamber, it is necessary to press both the front nozzle and the rear end of the grooved top plate at the same time, which complicates the shape of the press spring and increases the cost of parts. become.

Therefore, by bending the convex portion toward the liquid chamber on the way near the nozzle around the common liquid chamber, the portion where the sealing resin forms a meniscus in the liquid chamber is changed to a portion which does not affect the nozzle. By stopping, without forming a meniscus of the sealing resin in the vicinity of the nozzle, and also on the top plate side convex portions provided on both sides of the separation groove provided in the liquid chamber inter-wall between the colors in the nozzle arrangement portion The sealing resin is filled in between, and reaches the orifice plate securely, without impairing the design flexibility of the shape of the presser spring, and ensuring that the sealing resin does not go around the ink ejection nozzle side. Separation can be reliably performed, yield can be improved, and a color inkjet head can be manufactured at lower cost.

[0047]

Thus, according to the present invention, in an ink jet recording head provided with a sealing resin filling groove for separation between common liquid chambers, an ink discharging nozzle is provided in the filling groove portion which is aligned with the ink discharging nozzle. A liquid chamber separation groove is provided at a similar interval and height, and a convex portion is provided around a common liquid chamber below a liquid chamber wall arranged with the liquid chamber separation groove interposed therebetween, and the convex portion is formed around the common liquid chamber. And the protrusion is fitted to the recess provided on the silicon substrate, and the silicon substrate is heated so that the protrusion reaches the bottom of the recess provided on the silicon substrate.

With the above arrangement, it is possible to prevent or reduce the sealing resin meniscus formed at the boundary between the common liquid chamber and the liquid chamber wall, which can be caused by the sealing material transmitting through the gap by the capillary force. By doing so, it is possible to reliably separate the plurality of common liquid chambers of the top plate with good yield without causing the sealing resin to flow into the ink discharge nozzles.

[Brief description of the drawings]

FIG. 1 is a view of a grooved top plate according to a first embodiment.

FIG. 2 is an enlarged view of a plurality of liquid chamber separation grooves in a nozzle portion of the grooved top plate of FIG. 1;

FIG. 3 is a configuration diagram of an ink jet recording head according to a first embodiment.

FIG. 4 is a state in which the sealing resin of the first embodiment is wrapped around.

FIG. 5 is a view of a grooved top plate according to a second embodiment.

FIG. 6 is an enlarged view of a plurality of liquid chamber separation grooves in a nozzle portion of the grooved top plate of FIG. 5;

FIG. 7 shows a state in which a sealing resin of the second embodiment is wrapped around.

FIG. 8 shows an ink jet unit in which a plurality of conventional ink jet recording heads are arranged.

FIG. 9 is an inkjet recording apparatus to which a color inkjet cartridge is applied.

[Explanation of symbols]

REFERENCE SIGNS LIST 100 Ink discharge nozzle 110 Orifice plate side groove connected to liquid chamber separation groove 120 Orifice plate holes of multiple liquid chamber separation grooves in nozzle section 130 Common liquid chamber separation groove 140 Convex part around common liquid chamber 145 Common liquid Convex portion bent toward chamber 150 Common liquid chamber separation groove wall 160 Orifice plate 170 Sealing resin filling port for common liquid chamber separation groove 180 Common liquid chamber 190 Silicon substrate 200 Grooved top plate 210 Aluminum plate 250 Sealing resin 240 Ink Flow path member 260 Meniscus of sealing resin

Claims (4)

[Claims] 1. A substrate on which a plurality of energy generators for generating ejection energy are arranged, a recording ink ejection port, a nozzle serving as an ink flow path, and a plurality of common liquid chambers for supplying ink to the nozzle. The liquid chamber spacing is an integer multiple of the nozzle pitch and is equal, and is configured by joining a grooved top plate having a plurality of common liquid chamber recesses and the substrate, and forming a resin in the liquid chamber separation groove. In an ink jet recording head that separates a liquid chamber by filling, a convex portion is arranged on a wall side around the liquid chamber provided on the grooved top plate, on a bonding surface side with the substrate, and the convex portion is provided. An ink jet recording head, wherein the portion is in a groove provided on the substrate. 2. A projection disposed on a wall side around the liquid chamber provided on the grooved top plate and on a joint surface side with the substrate,
2. The ink jet recording head according to claim 1, wherein the ink jet recording head surrounds the outside of the common liquid chamber except for a nozzle portion. 3. On the wall side around the liquid chamber provided on the grooved top plate, a convex portion disposed on a joint surface with the substrate excludes the nozzle portion and the rear end side of the common liquid chamber. 2. The ink jet recording head according to claim 1, wherein the ink jet recording head is located on an outer peripheral portion of the common liquid chamber and is bent toward the common liquid chamber from a middle of a side wall of the liquid chamber. 4. A substrate on which a plurality of energy generators for generating ejection energy are arranged, a recording ink ejection port, a nozzle serving as an ink flow path, and a plurality of common liquid chambers for supplying ink to the nozzle. The liquid chamber spacing is equal to an integer multiple of the nozzle pitch and is equal, and is configured by joining a top plate having a plurality of common liquid chamber recesses and the substrate, and filling the liquid chamber separation groove with resin. 4. An ink jet recording apparatus provided with an ink jet recording head for separating a liquid chamber thereby, wherein the ink jet recording head according to claim 1 is mounted.