JPH11169874A - Waste liquid treating device and waste liquid incineration device - Google Patents
Waste liquid treating device and waste liquid incineration deviceInfo
- Publication number
- JPH11169874A JPH11169874A JP34748797A JP34748797A JPH11169874A JP H11169874 A JPH11169874 A JP H11169874A JP 34748797 A JP34748797 A JP 34748797A JP 34748797 A JP34748797 A JP 34748797A JP H11169874 A JPH11169874 A JP H11169874A
- Authority
- JP
- Japan
- Prior art keywords
- waste liquid
- water
- waste
- incinerator
- organic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 title claims abstract description 137
- 239000002699 waste material Substances 0.000 title claims abstract description 123
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 55
- 239000010815 organic waste Substances 0.000 claims abstract description 28
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims abstract description 26
- 239000003513 alkali Substances 0.000 claims abstract description 13
- 229910021529 ammonia Inorganic materials 0.000 claims abstract description 12
- 238000002485 combustion reaction Methods 0.000 claims abstract description 9
- 238000006065 biodegradation reaction Methods 0.000 claims description 13
- 239000012752 auxiliary agent Substances 0.000 claims description 8
- 244000005700 microbiome Species 0.000 claims description 5
- 238000006243 chemical reaction Methods 0.000 abstract description 15
- 238000001704 evaporation Methods 0.000 abstract description 14
- 239000002253 acid Substances 0.000 abstract description 8
- 238000010438 heat treatment Methods 0.000 abstract description 5
- 238000000354 decomposition reaction Methods 0.000 abstract description 3
- 230000008020 evaporation Effects 0.000 abstract description 3
- 239000002351 wastewater Substances 0.000 abstract description 3
- 239000012141 concentrate Substances 0.000 abstract 1
- 230000007613 environmental effect Effects 0.000 abstract 1
- 238000004321 preservation Methods 0.000 abstract 1
- 239000003921 oil Substances 0.000 description 11
- BFNBIHQBYMNNAN-UHFFFAOYSA-N ammonium sulfate Chemical compound N.N.OS(O)(=O)=O BFNBIHQBYMNNAN-UHFFFAOYSA-N 0.000 description 10
- 229910052921 ammonium sulfate Inorganic materials 0.000 description 10
- 235000011130 ammonium sulphate Nutrition 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 4
- 230000002159 abnormal effect Effects 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000010802 sludge Substances 0.000 description 4
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- 239000003350 kerosene Substances 0.000 description 3
- 230000000630 rising effect Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 230000002745 absorbent Effects 0.000 description 2
- 239000002250 absorbent Substances 0.000 description 2
- LFYJSSARVMHQJB-QIXNEVBVSA-N bakuchiol Chemical compound CC(C)=CCC[C@@](C)(C=C)\C=C\C1=CC=C(O)C=C1 LFYJSSARVMHQJB-QIXNEVBVSA-N 0.000 description 2
- YCIMNLLNPGFGHC-UHFFFAOYSA-N catechol Chemical compound OC1=CC=CC=C1O YCIMNLLNPGFGHC-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000446 fuel Substances 0.000 description 2
- 239000000295 fuel oil Substances 0.000 description 2
- 239000002828 fuel tank Substances 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 241000196324 Embryophyta Species 0.000 description 1
- 241000127225 Enceliopsis nudicaulis Species 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000001784 detoxification Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 150000002989 phenols Chemical class 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 229910021642 ultra pure water Inorganic materials 0.000 description 1
- 239000012498 ultrapure water Substances 0.000 description 1
- 238000004065 wastewater treatment Methods 0.000 description 1
Landscapes
- Treatment Of Biological Wastes In General (AREA)
- Heat Treatment Of Water, Waste Water Or Sewage (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、廃液処理装置及び
廃液焼却装置に関する。The present invention relates to a waste liquid treatment device and a waste liquid incineration device.
【０００２】[0002]
【従来の技術】従来、施設内で発生した放流できない廃
液は、液体のままタンクローリで廃棄物処理業者が引き
取って処理を行っていた。また、敷地内で処理する場合
でも、濃縮または生物処理を行い、処理できないものを
液体のまま廃棄物処理業者が搬出していた。2. Description of the Related Art Conventionally, waste liquid generated in a facility that cannot be discharged has been treated by a waste disposal company using a tank lorry as a liquid. Also, when treating on site, concentration or biological treatment is performed, and waste treatment companies carry out liquids that cannot be treated as liquids.
【０００３】この様に、廃液を液体のまま施設外に搬出
することは、搬出に要する労力、費用が多大になる一
方、廃液が環境汚染の原因となり、また、廃液に見合う
水の消費が水資源に影響を及ぼす等の不具合が生じてい
た。As described above, transporting the waste liquid out of the facility as a liquid requires a large amount of labor and cost for the transport, but the waste liquid causes environmental pollution, and the consumption of water corresponding to the waste liquid requires water. Problems such as affecting resources have occurred.
【０００４】図４には、公知の純水供給装置を有する製
造装置１Ａの水処理システムの構成が示されている。供
給側は、市水Ｗが前処理システムＸを介して、１次純水
システムＹ及び超純水システムＺを経て製造装置１Ａに
供給され、製造装置１Ａからは１次純水システムＹに戻
されて循環されている。そして、排水側は、濃厚排水処
理システムＳで処理され、そこから一部が補給水として
スクラバー、冷却塔、ボイラＴに供給され、さらに蒸発
濃縮装置８で濃縮されてドライヤ９で乾燥され、固形状
（ケーキ）にされて外部処理設備Ｌに搬出されている。
また、蒸発濃縮装置８の蒸発水は廃液処理プロセスＶで
処理され、一部はスクラバー等Ｔの補給水として還流さ
れている。FIG. 4 shows the configuration of a water treatment system of a production apparatus 1A having a known pure water supply apparatus. On the supply side, the city water W is supplied to the manufacturing apparatus 1A via the pretreatment system X via the primary pure water system Y and the ultrapure water system Z, and returned from the manufacturing apparatus 1A to the primary pure water system Y. Have been circulating. Then, the drainage side is treated by the concentrated wastewater treatment system S, from which a part is supplied to a scrubber, a cooling tower, and a boiler T as makeup water, further concentrated by an evaporative concentration device 8, dried by a dryer 9, and solidified. It is formed into a shape (cake) and carried out to the external processing equipment L.
Further, the evaporating water of the evaporating and concentrating device 8 is treated in the waste liquid treatment process V, and a part of the evaporating water is refluxed as replenishing water for a scrubber or the like T.
【０００５】そして、製造装置１Ａからの廃液は、種類
毎に分けられて排出されており、酸・アルカリ系廃液
は、複数の酸・アルカリ系廃液タンク２に貯留され、反
応槽５に供給されて加熱反応させ、アンモニア成分を蒸
発分離する。そして、蒸発したアンモニア成分に吸収剤
として硫酸を添加し、アンモニア吸収塔６でアンモニア
ガスを硫安として固定し、硫安タンク７に貯留されて適
宜、外部処理設備Ｌに搬出されて処理される。[0005] The waste liquid from the manufacturing apparatus 1A is discharged separately for each type, and the acid / alkali waste liquid is stored in a plurality of acid / alkali waste liquid tanks 2 and supplied to the reaction tank 5. To cause a heating reaction, and evaporate and separate the ammonia component. Then, sulfuric acid is added as an absorbent to the evaporated ammonia component, and the ammonia gas is fixed as ammonium sulfate in the ammonia absorption tower 6, stored in the ammonium sulfate tank 7, and appropriately carried out to the external processing equipment L for processing.
【０００６】前記反応槽５からの処理液は、蒸発濃縮装
置８において熱交換ユニットで加熱し、蒸発濃縮され
る。その処理液は蒸発水と濃縮水とに分離され、蒸発水
は補給水として給水装置１０に送って再利用され、濃縮
水はドライヤ９に送って加熱蒸発され、固形化されたケ
ーキは廃棄物として外部処理設備Ｌに搬出される。[0006] The processing liquid from the reaction tank 5 is heated by a heat exchange unit in the evaporator / concentrator 8 to be evaporated and concentrated. The treated liquid is separated into evaporated water and concentrated water, the evaporated water is sent to the water supply device 10 as make-up water for reuse, and the concentrated water is sent to the dryer 9 to be heated and evaporated, and the solidified cake is converted to waste. And is carried out to the external processing equipment L.
【０００７】また、排出された有機系廃液は、複数の有
機系廃液タンク３に貯留され、そして、生物分解処理装
置１１で微生物により分解処理して無害化され、その処
理水は給水装置１２に送って再利用され、汚泥は外部処
理設備Ｌに搬出される。[0007] The discharged organic waste liquid is stored in a plurality of organic waste liquid tanks 3, decomposed by microorganisms in a biodegradation treatment device 11 and rendered harmless, and the treated water is supplied to a water supply device 12. The sludge is sent and reused, and the sludge is carried out to the external treatment facility L.
【０００８】また、特開平９−４７７５０号公報には半
導体製造装置等に用いられる水処理システムに関する技
術が開示されており、酸・アルカリ廃液は中和・還元処
理してアンモニア成分を取出し、残りの廃液を蒸発濃縮
装置で濃縮さらに乾燥して固形物として搬出し、また、
有機廃液は微生物に不純物を取り込ませて水と汚泥とに
分離して廃水を処理する技術が示されている。[0008] Japanese Patent Application Laid-Open No. 9-47750 discloses a technology relating to a water treatment system used for semiconductor manufacturing equipment and the like. The waste liquid is concentrated by an evaporating concentrator and further dried and carried out as a solid.
There is disclosed a technique of treating organic waste liquid by incorporating impurities into microorganisms, separating the liquid into water and sludge, and treating the waste water.
【０００９】しかし、この技術では特殊有機系廃液、例
えば、アミン系やベンゼン系有機系廃液、あるいはカテ
コール等フェノール類を含む廃液等を処理することがで
きない。However, this technique cannot treat a special organic waste liquid, for example, an amine-based or benzene-based organic waste liquid, or a waste liquid containing phenols such as catechol.
【００１０】他方、廃液または廃油の焼却処理を行う廃
液焼却装置においては、灯油、重油、及びガス等の助燃
剤を炉内に供給して燃焼させ、加熱された炉内に廃液あ
るいは廃油を定量噴射して焼却していた。そして、炉内
温度は助燃剤の供給量を増減して制御していた。On the other hand, in a waste liquid incinerator that incinerates waste liquid or waste oil, an auxiliary agent such as kerosene, heavy oil, and gas is supplied into the furnace and burned, and the waste liquid or waste oil is quantified in the heated furnace. It had been sprayed and incinerated. The furnace temperature was controlled by increasing or decreasing the amount of the auxiliary agent supplied.
【００１１】したがって、廃液または廃油に含まれる可
燃物の濃度が変化した場合に炉内温度が変化し、著しい
温度上昇、または不完全燃焼あるいは停止といった不具
合が生じ、炉体の損傷、周辺への危険性等の恐れがあっ
た。特に、このような不具合は、半導体工場のような廃
液濃度が変動しやすい場合に発生することが多く、ま
た、運転立上げ時に発生することが多い。Therefore, when the concentration of the combustibles contained in the waste liquid or waste oil changes, the temperature in the furnace changes, causing a problem such as a remarkable temperature rise, incomplete combustion or shutdown, and damage to the furnace body and surroundings. There was a risk of danger. In particular, such a problem often occurs when the concentration of the waste liquid tends to fluctuate, such as in a semiconductor factory, and often occurs when the operation is started.
【００１２】[0012]
【発明が解決しようとする課題】したがって、本発明
は、施設内で発生した廃液を場内で完全に処理または再
利用し、排水の放流を無くして環境の保全を図ると共
に、搬出に伴う労力、費用を低減する廃液処理装置を提
供することを目的としている。SUMMARY OF THE INVENTION Accordingly, the present invention is to completely treat or reuse the waste liquid generated in the facility in the plant, to eliminate the discharge of waste water, to protect the environment, and to reduce the labor involved in carrying out. It is an object of the present invention to provide a waste liquid treatment device that reduces costs.
【００１３】また、本発明は上記の他に、廃液または廃
油に含まれる可燃物の濃度が変化して炉内温度が変化
し、著しい温度上昇または不完全燃焼あるいは停止とい
った不具合が生じないような廃液焼却装置を提供するこ
とを目的としている。[0013] In addition to the above, the present invention provides a method in which the concentration of combustibles contained in a waste liquid or waste oil changes and the furnace temperature changes, so that a problem such as a remarkable temperature rise, incomplete combustion or shutdown does not occur. It aims to provide a waste liquid incinerator.
【００１４】[0014]
【課題を解決するための手段】本発明の廃液処理装置に
よれば、発生した廃液を酸・アルカリ系廃液と有機系廃
液と特殊有機系廃液とに分けそれぞれを貯留する廃油タ
ンクを設け、前記酸・アルカリ系廃液を加熱反応させて
アンモニア分を蒸気として分離する反応槽とその反応後
の水を蒸発濃縮しさらに乾燥固化する蒸発濃縮装置及び
ドライヤとを設け、前記有機系廃液を微生物によって分
解無害化処理する生物分解処理装置と、前記特殊有機系
廃液を助燃剤を用いて焼却処理する廃液焼却装置とを設
け、前記蒸発濃縮装置で発生する蒸発水と前記生物分解
処理装置で無害化された水とを補給水として給水装置に
供給する様に構成している。According to the waste liquid treatment apparatus of the present invention, a waste oil tank for separating generated waste liquid into acid / alkali waste liquid, organic waste liquid, and special organic waste liquid is provided. A reaction tank for heating and reacting the acid / alkali waste liquid to separate ammonia as vapor, and an evaporator and dryer for evaporating and condensing the water after the reaction and drying and solidifying the water are provided, and the organic waste liquid is decomposed by microorganisms. A biodegradation treatment device for detoxifying and a waste liquid incineration device for incinerating the special organic waste liquid using a combustion aid are provided, and the evaporating water generated by the evaporative concentration device and the detoxification by the biodegradation treatment device are provided. The water is supplied to the water supply device as makeup water.
【００１５】したがって、本発明によれば、酸・アルカ
リ系廃液は反応槽で加熱反応されてアンモニア分が蒸発
分離され、硫安にされて搬出され、また、反応後の水は
蒸発濃縮装置で濃縮され、さらに乾燥されて固形化され
て搬出される。有機系廃液は生物分解処理装置で無害化
され、特殊有機系廃液は廃液焼却装置で焼却されて大気
放出される。そして、蒸発濃縮装置で発生する蒸発水と
前記生物分解処理装置で無害化された水とは補給水とし
て給水装置に供給され、再利用される。この様に、従来
の蒸発濃縮装置及び生物分解処理装置で処理できなかっ
た廃液も処理することができ、施設内からの廃液は全て
再利用または濃縮化、固形化されて減量され、外部への
放流を無くすことができる。Therefore, according to the present invention, the acid-alkali waste liquid is heated and reacted in the reaction tank to evaporate and separate the ammonia component, and is discharged as ammonium sulfate, and the water after the reaction is concentrated by the evaporator and concentrator. It is further dried, solidified, and carried out. Organic waste liquid is detoxified by a biodegradation treatment device, and special organic waste liquid is incinerated by a waste liquid incineration device and released to the atmosphere. Then, the evaporating water generated in the evaporative concentration device and the water detoxified by the biodegradation treatment device are supplied to the water supply device as makeup water and reused. In this way, waste liquids that could not be treated by conventional evaporative concentration equipment and biodegradation treatment equipment can also be treated, and all waste liquids from the facility are reused or concentrated, solidified, reduced in volume, and sent to the outside. Discharge can be eliminated.
【００１６】本発明の廃液焼却装置によれば、助燃剤を
用いて廃液または廃油を燃焼処理する廃液焼却装置にお
いて、焼却炉本体に廃液または廃油を供給する配管に流
量調整バルブとそのバルブを駆動するモータとを設け、
焼却炉本体内の温度を検出する温度検出器を設けてい
る。According to the waste liquid incineration apparatus of the present invention, in a waste liquid incineration apparatus for burning waste liquid or waste oil using an auxiliary agent, a flow rate adjusting valve and a valve for driving the valve are provided to a pipe for supplying the waste liquid or waste oil to the incinerator body. And a motor to
A temperature detector for detecting the temperature inside the incinerator body is provided.
【００１７】したがって、本発明によれば、炉内温度が
所定値を越えたのを温度検出器が検出した場合、モータ
を作動して流量調整バルブを絞り、廃液供給量を減少さ
せて炉内温度の異常な上昇を防止することができる。Therefore, according to the present invention, when the temperature detector detects that the temperature in the furnace has exceeded a predetermined value, the motor is actuated to throttle the flow control valve to reduce the amount of waste liquid supplied to the furnace. An abnormal rise in temperature can be prevented.
【００１８】また、本発明の廃液焼却装置によれば、助
燃剤を用いて廃液または廃油を燃焼処理する廃液焼却装
置において、焼却炉本体に廃液または廃油を供給する配
管に流量調整バルブとそのバルブを駆動するモータとを
設け、前記バルブ駆動用モータを起動から所定経過時間
まで制御するためのタイマを設けている。Further, according to the waste liquid incinerator of the present invention, in a waste liquid incinerator for burning waste liquid or waste oil by using an auxiliary agent, a flow rate adjusting valve and a valve for supplying the waste liquid or waste oil to the incinerator main body are provided. And a timer for controlling the valve driving motor from the start until a predetermined elapsed time is provided.
【００１９】したがって、本発明によれば、焼却装置の
起動立上がり時に流量調整バルブを閉じ、タイマの信号
によって徐々に開いて、運転開始時に高濃度の廃液が供
給されても、炉内温度が異常に上昇するようなことが防
止される。Therefore, according to the present invention, the flow control valve is closed when the incinerator is started up and gradually opened by the signal of the timer, so that the furnace temperature is abnormal even if a high concentration waste liquid is supplied at the start of operation. Is prevented from rising.
【００２０】[0020]
【発明の実施の形態】図１には、本発明を実施する廃液
処理装置の一実施形態の構成が示されている。例えば、
半導体装置を製造している製造装置１からの廃液は、そ
の種類毎に分けられて排出されている。その内の酸・ア
ルカリ系廃液は、複数の酸・アルカリ系廃液タンク２に
貯留されており、それらの各タンク２からの酸・アルカ
リ系廃液が供給されて加熱反応させ、アンモニア成分を
蒸発分離する反応槽５が設けられ、そして、反応槽５で
蒸発したアンモニア成分に吸収剤として硫酸を添加し、
アンモニアガスを硫安として固定するアンモニア吸収塔
６と、その硫安を貯留する硫安タンク７とが設けられて
いる。硫安タンク７に貯留された硫安は適宜、外部処理
設備Ｌに搬出されて処理されている。FIG. 1 shows the configuration of an embodiment of a waste liquid treatment apparatus for carrying out the present invention. For example,
The waste liquid from the manufacturing apparatus 1 that manufactures the semiconductor device is discharged according to its type. The acid-alkali waste liquid is stored in a plurality of acid-alkali waste liquid tanks 2, and the acid-alkali waste liquid from each of the tanks 2 is supplied to cause a heating reaction to evaporate and separate the ammonia component. A reaction tank 5 is provided, and sulfuric acid is added as an absorbent to the ammonia component evaporated in the reaction tank 5,
An ammonia absorption tower 6 for fixing ammonia gas as ammonium sulfate and an ammonium sulfate tank 7 for storing the ammonium sulfate are provided. The ammonium sulfate stored in the ammonium sulfate tank 7 is appropriately carried out to the external processing facility L for processing.
【００２１】また、前記反応槽５からの処理液を熱交換
ユニットで加熱して蒸発濃縮する蒸発濃縮装置８が設け
られており、処理液は蒸発水と濃縮水に分離され、蒸発
水は補給水として給水装置１０に送られて再利用されて
いる。そして、濃縮水はドライヤ９に送られて加熱蒸発
され、固形化されたケーキは廃棄物として外部処理設備
Ｌに搬出されている。An evaporating and concentrating device 8 is provided for heating and evaporating and concentrating the processing liquid from the reaction tank 5 in a heat exchange unit. The processing liquid is separated into evaporated water and concentrated water, and the evaporated water is supplied. The water is sent to the water supply device 10 and reused. Then, the concentrated water is sent to the dryer 9 where it is heated and evaporated, and the solidified cake is carried out to the external processing facility L as waste.
【００２２】また、装置１から排出された有機系廃液
は、複数の有機系廃液タンク３に貯留されている。そし
て、微生物により分解処理し無害化する生物分解処理装
置１１が設けられ、タンク３からの有機系廃液が供給さ
れて分解処理が行われており、処理水は給水装置１２に
送られて再利用され、汚泥は外部処理設備Ｌに搬出され
ている。The organic waste liquid discharged from the apparatus 1 is stored in a plurality of organic waste liquid tanks 3. Then, a biodegradation treatment apparatus 11 for decomposing and detoxifying by microorganisms is provided, an organic waste liquid is supplied from the tank 3 to perform a decomposition treatment, and the treated water is sent to a water supply apparatus 12 for reuse. Then, the sludge is carried out to the external treatment facility L.
【００２３】そして、特殊有機系廃液は、特殊有機系廃
液タンク４に貯留されており、廃液焼却装置２０が設け
られて、特殊有機系廃液が灯油、ガス等の助燃剤を用い
て焼却処理されている。The special organic waste liquid is stored in the special organic waste liquid tank 4, and a waste liquid incinerator 20 is provided, and the special organic waste liquid is incinerated using a combustion aid such as kerosene or gas. ing.
【００２４】以上の構成により、製造装置１からの廃液
は、処理方法別に酸・アルカリ系廃液、有機系廃液、及
び特殊有機系廃液に分けられてタンク２、３、４に貯留
され、酸・アルカリ系廃液は反応槽５で加熱反応されて
アンモニア分が蒸発分離され、吸収塔６で硫安にされて
搬出され、反応後の水は蒸発濃縮装置８で濃縮され、ド
ライヤ９で乾燥され、固形化されて搬出され、蒸発水は
補給水として再利用される。そして、有機系廃液は生物
分解処理装置１１で無害化されて補給水として再利用さ
れ、特殊有機系廃液は廃液焼却装置２０で焼却されて大
気放出される。この様に、従来の蒸発濃縮装置及び生物
分解処理装置で処理できなかった廃液も処理することが
でき、施設内からの廃液は全て再利用または濃縮化、固
形化されて減量され、外部への放流を無くすことができ
る。With the above structure, the waste liquid from the manufacturing apparatus 1 is separated into acid / alkali waste liquid, organic waste liquid, and special organic waste liquid according to the treatment method, stored in the tanks 2, 3, and 4, and stored in the tanks 2, 3, and 4. The alkaline waste liquid is heated and reacted in the reaction tank 5 to evaporate and separate the ammonia content, converted into ammonium sulfate in the absorption tower 6 and carried out. The water after the reaction is concentrated in the evaporative concentrator 8, dried in the drier 9, and solidified. The evaporating water is recycled as makeup water. The organic waste liquid is detoxified in the biodegradation treatment device 11 and reused as makeup water, and the special organic waste liquid is incinerated in the waste liquid incineration device 20 and released to the atmosphere. In this way, waste liquids that could not be treated by conventional evaporative concentration equipment and biodegradation treatment equipment can also be treated, and all waste liquids from the facility are reused or concentrated, solidified, reduced in volume, and sent to the outside. Discharge can be eliminated.
【００２５】したがって、廃液が環境に与える影響を抑
制し、再利用によって省資源化を図ることができる。そ
して、廃棄物処理に要した労力、費用を削減することが
できる。Therefore, the influence of the waste liquid on the environment can be suppressed, and the resource can be saved by reuse. And the labor and cost required for waste disposal can be reduced.
【００２６】次に、図２及び３には、請求項２及び３に
係る発明を実施する廃液焼却装置が示されている。図２
において、焼却炉本体２１と、廃液または廃油を貯留す
る廃液タンク２５と、灯油、重油等の助燃剤を貯留する
助燃剤タンク２７が設けられている。そして、廃液タン
ク２５から、廃液圧送ポンプ２６及び流量調整バルブ２
３を介装した配管が炉本体２１に連通されており、その
配管の炉本体２１寄りには高圧エアーＡが混入されて廃
液が炉本体２１内に噴射されるようなっている。また、
助燃剤タンク２７からは助燃剤圧送ポンプ２８を介装し
た配管が、炉本体２１の側部に設けられたバーナ２９内
に連通され、そのバーナ２９により燃焼した助燃剤と空
気とを炉内に送込んで廃液を燃焼させる様になってい
る。Next, FIGS. 2 and 3 show a waste liquid incinerator for carrying out the invention according to the second and third aspects. FIG.
, An incinerator main body 21, a waste liquid tank 25 for storing waste liquid or waste oil, and an auxiliary fuel tank 27 for storing an auxiliary agent such as kerosene or heavy oil. Then, from the waste liquid tank 25, the waste liquid pressure feeding pump 26 and the flow control valve 2
3 is connected to the furnace main body 21, and high-pressure air A is mixed into the pipe near the furnace main body 21 so that waste liquid is injected into the furnace main body 21. Also,
From the auxiliary fuel tank 27, a pipe provided with an auxiliary fuel pump 28 is communicated with a burner 29 provided on the side of the furnace main body 21, and the auxiliary fuel and air burned by the burner 29 are introduced into the furnace. The waste liquid is sent in and burned.
【００２７】そして、流量調整バルブ２３はモータ２４
によって駆動され、炉本体２１内には温度検出器３１が
挿入されて検出された温度信号によってモータ２４が駆
動され、廃液の流量が制御されている。The flow control valve 23 is connected to a motor 24.
The motor 24 is driven by a temperature signal detected by inserting the temperature detector 31 into the furnace main body 21 to control the flow rate of the waste liquid.
【００２８】すなわち、温度検出器３１が炉内温度が所
定値を越えたのを検出すると、モータ２４を作動して流
量調整バルブ２３を絞り、廃液供給量を減少させて炉内
温度の異常な上昇を防止する。したがって、従来の制御
法である助燃剤による調整範囲を越えた場合においても
安定した運転を行うことができる。なお、炉内温度が低
下した場合に、廃油供給量を増加する様な制御を行って
も良い。That is, when the temperature detector 31 detects that the furnace temperature has exceeded a predetermined value, the motor 24 is operated to throttle the flow control valve 23 to reduce the amount of waste liquid supplied, thereby causing the furnace temperature to become abnormal. Prevent rise. Therefore, a stable operation can be performed even when the adjustment range by the auxiliary agent, which is the conventional control method, is exceeded. In addition, when the temperature in the furnace decreases, control may be performed so as to increase the supply amount of waste oil.
【００２９】図３には請求項３に係る発明の実施形態が
示されている。なお、前記図２と同様な構成部材は同じ
符号を付して重複説明は省略する。符号３５は、起動ボ
タン３６と連結された起動からの経過時間を計測するタ
イマを示し、そのタイマ３５の信号によって、モータ２
４が作動され、流量調整バルブ２３が制御されている。FIG. 3 shows an embodiment of the third aspect of the present invention. The same components as those in FIG. 2 are denoted by the same reference numerals, and redundant description will be omitted. Reference numeral 35 denotes a timer connected to the start button 36 for measuring an elapsed time from the start, and the signal of the timer 35 indicates the motor 2
4 is operated, and the flow control valve 23 is controlled.
【００３０】すなわち、焼却装置の起動立上がり時に
は、流量調整バルブ２３を閉じておき、タイマ３５の信
号によってバルブ２３を徐々に開いて行く。したがっ
て、運転開始時に高濃度の廃液が供給されて炉内温度が
異常に上昇する様なことが防止でき、安全性が確保され
る。That is, when the incinerator is started up, the flow control valve 23 is closed, and the valve 23 is gradually opened by the signal of the timer 35. Therefore, it is possible to prevent the furnace temperature from abnormally rising due to the supply of high-concentration waste liquid at the start of operation, thereby ensuring safety.
【００３１】[0031]
【発明の効果】本発明は、以上説明したように構成さ
れ、以下に示す効果を奏する。The present invention is configured as described above and has the following effects.
【００３２】（１） 従来の蒸発濃縮装置及び生物分解
処理装置で処理できなかった廃液も処理することがで
き、施設内からの廃液は全て再利用または濃縮化、固形
化されて減量され、外部への放流を無くすことができ
る。そして、廃液が環境に与える影響を抑制し、再利用
によって省資源化を図ることができ、廃棄物処理に要し
た労力、費用を削減することができる。(1) Waste liquid that could not be treated by the conventional evaporative concentration apparatus and biodegradation treatment apparatus can also be treated, and all waste liquid from the facility is reused or concentrated, solidified, reduced in volume, and externally treated. Can be eliminated. In addition, the effect of the waste liquid on the environment can be suppressed, resource saving can be achieved by reuse, and labor and cost required for waste disposal can be reduced.
【００３３】（２） 廃液焼却装置の炉内温度が所定値
を越えた場合に、廃液供給量を減少させて炉内温度の異
常な上昇を防止し、従来の制御法である助燃剤による調
整範囲を越えた場合においても安定した運転を行うこと
ができる。(2) When the temperature in the furnace of the waste liquid incinerator exceeds a predetermined value, the supply amount of the waste liquid is reduced to prevent an abnormal rise in the temperature in the furnace, and the conventional control method using an auxiliary agent is used. Even when the range is exceeded, stable operation can be performed.
【００３４】（３） また、運転開始時に高濃度の廃液
が供給されて炉内温度が異常に上昇する様なことが防止
できて安全性が確保される。(3) In addition, it is possible to prevent the furnace temperature from abnormally rising due to the supply of high-concentration waste liquid at the start of operation, thereby ensuring safety.
【図１】本発明の廃液処理装置の一実施形態の構成を示
す図。FIG. 1 is a diagram showing a configuration of an embodiment of a waste liquid treatment apparatus of the present invention.
【図２】本発明の廃液焼却装置の一実施形態の構成を示
す図。FIG. 2 is a diagram showing a configuration of an embodiment of a waste liquid incinerator according to the present invention.
【図３】本発明の廃液焼却装置の別の実施形態の構成を
示す図。FIG. 3 is a diagram showing a configuration of another embodiment of the waste liquid incinerator of the present invention.
【図４】従来の水処理システムの構成を示す図。FIG. 4 is a diagram showing a configuration of a conventional water treatment system.
２・・・酸・アルカリ系廃液タンク ３・・・有機系廃液タンク ４・・・特殊有機系廃液タンク ５・・・反応槽 ６・・・アンモニア吸収塔 ７・・・硫安タンク ８・・・蒸発濃縮装置 ９・・・ドライヤ １０、１２・・・給水装置 １１・・・生物分解処理装置 ２０・・・廃液焼却装置 ２１・・・焼却炉本体 ２３・・・流量調整バルブ ２４・・・モータ ２５・・・廃液タンク ２６・・・廃液圧送ポンプ ２７・・・助燃剤タンク ２８・・・助燃剤圧送ポンプ ２９・・・バーナ ３１・・・温度検出器 ３５・・・タイマ ３６・・・起動ボタン 2 ... Acid / alkaline waste liquid tank 3 ... Organic waste liquid tank 4 ... Special organic waste liquid tank 5 ... Reaction tank 6 ... Ammonia absorption tower 7 ... Ammonium sulfate tank 8 ... Evaporation concentrator 9 ... Drier 10, 12 ... Water supply device 11 ... Biodegradation treatment device 20 ... Waste liquid incineration device 21 ... Incinerator main body 23 ... Flow control valve 24 ... Motor 25 ... waste liquid tank 26 ... waste liquid pumping pump 27 ... combustion aid tank 28 ... combustion aid pumping pump 29 ... burner 31 ... temperature detector 35 ... timer 36 ... start button
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.6 識別記号 ＦＩ Ｆ２３Ｇ 7/05 ＺＡＢ Ｆ２３Ｇ 7/05 ＺＡＢＺ (71)出願人 000106597 サンレー冷熱株式会社 大阪府枚方市招提田近３丁目25番地 (72)発明者 西 村 匡 史 兵庫県西脇市高田井町99 (72)発明者 高 岡 清 兵庫県川西市大和東５丁目９−44 (72)発明者 崎 田 満 雄 兵庫県加東郡社町木梨1107−１ (72)発明者 水 野 義 一 兵庫県小野市神明町610 (72)発明者 市 野 雅 之 東京都港区元赤坂一丁目２番７号 鹿島建 設株式会社内 (72)発明者 白 石 晧 二 神奈川県横浜市緑区霧が丘４丁目１−11− 102 (72)発明者 柴 田 正 克 千葉県流山市南流山７−11−11 (72)発明者 北 川 博 哉 大阪府枚方市招堤田近３丁目25番地 サン レー冷熱株式会社内──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. 6 Identification code FI F23G 7/05 ZAB F23G 7/05 ZABZ (71) Applicant 000106597 Sunray Refrigerating and Heating Co., Ltd. Inventor Masafumi Nishimura 99, Takataicho, Nishiwaki-shi, Hyogo (72) Inventor Kiyoshi Kiyoshi 5-9-14-Yamatohigashi, Kawanishi-shi, Hyogo -1 (72) Inventor Yoshikazu Mizuno 610 Shinmeicho, Ono-shi, Hyogo (72) Inventor Masayuki Ichi 2-7-1 Moto-Akasaka, Minato-ku, Tokyo Kashima Construction Co., Ltd. (72) Inventor Koji Shiraishi 4-1-1-102, Kirigaoka, Midori-ku, Yokohama-shi, Kanagawa Prefecture (72) Inventor Masakatsu Shibata 7-11-11, Minamiruyama, Nagareyama-shi, Chiba (72) Inventor Hiroya Kitagawa Hirakata-shi, Osaka 3-25, Chikushida Chi, Sa Inside Rayleigh Co., Ltd.
Claims (3)
機系廃液と特殊有機系廃液とに分けそれぞれを貯留する
廃油タンクを設け、前記酸・アルカリ系廃液を加熱反応
させてアンモニア分を蒸気として分離する反応槽とその
反応後の水を蒸発濃縮しさらに乾燥固化する蒸発濃縮装
置及びドライヤとを設け、前記有機系廃液を微生物によ
って分解無害化処理する生物分解処理装置と、前記特殊
有機系廃液を助燃剤を用いて焼却処理する廃液焼却装置
とを設け、前記蒸発濃縮装置で発生する蒸発水と前記生
物分解処理装置で無害化された水とを補給水として給水
装置に供給する様に構成していることを特徴とする廃液
処理装置。1. A waste oil tank for separating generated waste liquid into an acid-alkali waste liquid, an organic waste liquid, and a special organic waste liquid is provided, and the acid-alkali waste liquid is heated and reacted to vaporize ammonia. A biodegradation treatment device for decomposing and detoxifying the organic waste liquid by using microorganisms; and A waste liquid incinerator for incinerating waste liquid using an auxiliary agent is provided, and the evaporated water generated by the evaporative concentration apparatus and the water detoxified by the biodegradation processing apparatus are supplied to a water supply apparatus as makeup water. A waste liquid treatment apparatus, comprising:
理する廃液焼却装置において、焼却炉本体に廃液または
廃油を供給する配管に流量調整バルブとそのバルブを駆
動するモータとを設け、焼却炉本体内の温度を検出する
温度検出器を設けていることを特徴とする廃液焼却装
置。2. A waste liquid incinerator for burning waste liquid or waste oil using a combustion aid, comprising: a pipe for supplying a waste liquid or waste oil in an incinerator main body; and a flow control valve and a motor for driving the valve. A waste liquid incinerator characterized by comprising a temperature detector for detecting a temperature inside the main body.
理する廃液焼却装置において、焼却炉本体に廃液または
廃油を供給する配管に流量調整バルブとそのバルブを駆
動するモータとを設け、前記バルブ駆動用モータを起動
から所定経過時間まで制御するためのタイマを設けてい
ることを特徴とする廃液焼却装置。3. A waste liquid incinerator for burning waste liquid or waste oil using a combustion aid, comprising: a pipe for supplying waste liquid or waste oil to an incinerator main body; and a flow control valve and a motor for driving the valve. A waste liquid incinerator characterized by comprising a timer for controlling a drive motor from a start until a predetermined elapsed time.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP34748797A JP3260313B2 (en) | 1997-12-17 | 1997-12-17 | Waste liquid treatment equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP34748797A JP3260313B2 (en) | 1997-12-17 | 1997-12-17 | Waste liquid treatment equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH11169874A true JPH11169874A (en) | 1999-06-29 |
| JP3260313B2 JP3260313B2 (en) | 2002-02-25 |
Family
ID=18390561
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP34748797A Expired - Fee Related JP3260313B2 (en) | 1997-12-17 | 1997-12-17 | Waste liquid treatment equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3260313B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106524187A (en) * | 2016-12-13 | 2017-03-22 | 江苏帕斯玛环境科技有限公司 | Generating device for liquid waste disposal |
| CN109539280A (en) * | 2019-01-09 | 2019-03-29 | 大连市昊通环保工程技术有限公司 | A kind of ammonia process of desulfurization waste liquid heat accumulating type incineration produces SO2Process Gas technique and system |
| CN110902745A (en) * | 2019-12-12 | 2020-03-24 | 江苏新河农用化工有限公司 | System and method for treating m-phthalodinitrile production wastewater |
| CN112390447A (en) * | 2020-11-04 | 2021-02-23 | 赤峰制药股份有限公司 | Harmless treatment method for oxytetracycline waste liquid |
-
1997
- 1997-12-17 JP JP34748797A patent/JP3260313B2/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106524187A (en) * | 2016-12-13 | 2017-03-22 | 江苏帕斯玛环境科技有限公司 | Generating device for liquid waste disposal |
| CN109539280A (en) * | 2019-01-09 | 2019-03-29 | 大连市昊通环保工程技术有限公司 | A kind of ammonia process of desulfurization waste liquid heat accumulating type incineration produces SO2Process Gas technique and system |
| CN109539280B (en) * | 2019-01-09 | 2024-02-09 | 大连昊通节能环保工程技术有限公司 | Ammonia desulfurization waste liquid heat accumulating type incineration SO preparation 2 Process gas technology and system |
| CN110902745A (en) * | 2019-12-12 | 2020-03-24 | 江苏新河农用化工有限公司 | System and method for treating m-phthalodinitrile production wastewater |
| CN112390447A (en) * | 2020-11-04 | 2021-02-23 | 赤峰制药股份有限公司 | Harmless treatment method for oxytetracycline waste liquid |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3260313B2 (en) | 2002-02-25 |
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