JPH11169795A - Sorter - Google Patents

Abstract

PROBLEM TO BE SOLVED: To classify lump-shaped products automatically by size without troubles such as clogging and biting and to facilitate the replacement of sorting rolls. SOLUTION: This sorter is provided with Numbers of sorting rolls 1 and a advance driving means which is independent of these rolls 1 and advances the rolls 1 while expanding the clearances between the rolls 1 continuously. The driving means, spiral feed grooves 6 in which a groove pitch changes continuously are formed in the screw shafts 4L, 4R of a pair in the roll advance direction, cam followers 50L, 50R are attached to both ends of the sorting roll 1, and the sorting rolls 1, with the followers 50L, 50R inserted into the groves 6 slidably, are set on the screw shafts 4L, 4R of a pair a attachably/ detachably.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to an apparatus for sorting semiconductor polysilicon products and the like.

[0002]

2. Description of the Related Art Polysilicon used for a semiconductor device substrate or the like is required to have high purity, and it is important that no contamination occurs even in a classification process. This polysilicon has a very high hardness. For example, in the case of classifying with a vibrating sieve, a large amount of metal contamination is given to the polysilicon due to abrasion and adhesion of a metal as a screen material. In order to classify semiconductor polysilicon products, conventionally, as shown in FIG. 6, a semiconductor polysilicon product 81 flowing on a belt conveyor 80 is visually judged by an operator 82 to have a nugget ( Maximum piece length: 20mm
１１０110 mm, weight: equivalent to 10 g to 400 g), and those less than the nugget were automatically classified by a vibrating sieve 84 employing a polyester resin as a screen material. However, the conventional semiconductor polysilicon product 81 is classified and classified mainly by manual work so that the nugget is classified by an operator 82 and the less than the nugget is automatically classified by a vibrating sieve 84 at a subsequent stage. However, there has been a problem that the workability is extremely inefficient. Therefore, application of a sorting apparatus that mechanically sorts, rather than manually, the sorting and sorting of the semiconductor polysilicon products 81 is being studied. Conventionally known sorting devices that mechanically perform sorting by omitting such manual operations are disclosed in JP-A-55-24587, JP-A-57-156081, and JP-A-57-156081. There is a sorter for sorting onions, potatoes, fruits, and the like described in JP-A-6-296411.

[0003]

However, when the sorting apparatus described in each of the above publications is applied to the sorting and classification of semiconductor polysilicon products, the following problems occur. That is, when the conventional sorting apparatus is applied to the sorting and classification of semiconductor polysilicon products, the metal in the portion that comes into contact with the polysilicon products at the time of classification is abraded and adhered, and the polysilicon products are contaminated with metals. In order to prevent this, a common material (polysilicon) or a resin must be adopted as a material of a portion that comes into contact with a polysilicon product during classification.
However, since the polysilicon to be sorted is extremely hard, the contacting portion is more likely to be damaged than the sorting of the fruits and the like. In this case, in such a mode that the common material is used,
Even if the common material in contact with the polysilicon product is damaged during classification, it is a common material, so there is no problem of polysilicon contamination.However, classification due to clogging, biting, etc. caused by damage The problem of reduced accuracy remains.
The same problem remains when resin is used as the material.

In such a case, if a portion damaged by contact with a polysilicon product can be easily repaired after the damage,
It becomes possible to apply a sorting device that performs sorting mechanically to the sorting and classification of semiconductor polysilicon products. However, in each of the conventional sorting apparatuses, a large number of sorting rolls, etc., which are parts that come into contact with the polysilicon product at the time of classification, are connected in series to the drive unit, and only some of the sorting rolls are damaged However, the repair is not easy, and the frequency of breakage due to contact with polysilicon products during classification is not small, so it is practical to apply such conventional sorting equipment to the sorting and classification of semiconductor polysilicon products. Was impossible.

[0005] The present invention has been made in view of the above problems in the prior art.
It is required to have high purity like semiconductor polysilicon products, and it can be applied to classification objects where contamination is important even in the classification process, and can improve the classification efficiency of such classification objects It is to provide a device.

[0006]

In order to achieve the above-mentioned object, a sorting apparatus of the present invention is provided with a plurality of sorting rolls and independent of these sorting rolls, while widening a gap between the sorting rolls. A traveling drive means for advancing the sorting rolls, wherein the products are classified according to size in a gap between the sorting rolls.

[0007] With this configuration, since the sorting roll is independent of the advancing driving means, even if the sorting roll is damaged by contact with the sorting target, the damaged sorting roll can be easily replaced. It can be performed, and problems such as a decrease in classification accuracy due to breakage of the sorting roll do not occur. In addition, since the sorting roll advances while widening the gap, a lump and irregular-shaped product can be automatically clogged and classified by size without causing a problem such as biting, thereby improving work efficiency. be able to.

In order to achieve the above object, a sorting apparatus according to the present invention includes a plurality of sorting rolls and a traveling drive means for advancing the sorting rolls while widening a gap between the sorting rolls. It is characterized in that it is separately attached and detached from the traveling drive means.

With this configuration, each of the sorting rolls is separately attached to and detached from the advancing drive means. Therefore, even if the sorting roll is damaged by contact with the sorting target, repair can be performed by replacing only the damaged sorting roll. Once completed, problems such as a decrease in classification accuracy due to breakage of the sorting roll can be avoided. In addition, since the sorting roll advances while widening the gap, a lump and irregular-shaped product can be automatically clogged and classified by size without causing a problem such as biting, thereby improving work efficiency. be able to.

Further, in order to achieve the above object, a sorting apparatus according to the present invention comprises: a sorting roll horizontal transfer means having a traveling drive means for moving the separation roll while expanding a gap between the plurality of sorting rolls; A sorting roll lowering means for sequentially transporting the sorting rolls conveyed to the terminal side of the means downward, and the sorting rolls sequentially lowered by the sorting roll lowering means are transferred onto a return rail in a direction opposite to the roll advancing direction. The sorting roll returned by the sorting roll return means and the sorting roll returned by the sorting roll return means are sequentially moved upward in the direction opposite to the roll advancing direction, and are loaded into the loading side of the sorting roll horizontal transfer unit at the highest position. A sorting roll raising means, wherein each sorting roll is separately attached to and detached from the traveling drive means.

[0011] With this configuration, the sorting roll advances by widening the gap by the sorting roll horizontal conveying means, classifies the bulk and irregular-shaped products according to size, and then sequentially sorts the sorting rolls by the sorting roll lowering means. It is conveyed downward, and thereafter, the sorting roll is moved on the return rail in a direction opposite to the roll traveling direction by the sorting roll return means, and then the sorting roll is sequentially raised by the sorting roll raising means, and At the loading side of the sorting roll horizontal transport unit. Therefore, the sorting roll can be automatically circulated endlessly, and labor saving and rationalization can be achieved. Also, as for this sorting device, since each sorting roll is separately attached and detached from the traveling drive means,
Even if the sorting roll is damaged by contact with the sorting target, the repair is completed by replacing only the damaged sorting roll, and problems such as a decrease in classification accuracy due to the damage of the sorting roll can be avoided.

[0012] A pair of screw shafts along the roll advancing direction are disposed as the advancing drive means, and a spiral feed groove having a groove pitch that changes continuously or stepwise is provided on the screw shafts. A cam follower that is slidably inserted into the feed groove so that the cam follower scans the feed groove with the rotation of the pair of screw shafts so that the sorting roll advances.

With this configuration, the cam follower scans the feed groove by the rotation of the pair of screw shafts, and the sorting roll advances while continuously widening the gap, thereby automatically forming a lump and irregularly shaped product. It can be classified by size.

[0014] The sorting roll may be formed in a cylindrical shape, and provided with a rotation imparting means for rotating the sorting roll.

[0015] The rotation imparting means can impart rotation to the selection roll, and while remaining on the selection roll,
That is, there is no product that passes through the sorting device without being classified, and the classification efficiency can be increased.

A gear is provided on the sorting roll, and the gear is continuously or intermittently engaged with a gear installed in parallel with the screw shaft so that the sorting roll can be arbitrarily given rotation in the same direction. be able to.

As described above, by continuously or intermittently meshing the gear provided on the sorting roll with the gear installed in parallel with the screw shaft, it is possible to arbitrarily impart rotation to the sorting roll in the same direction as its traveling direction. it can.

In addition, a vertical load receiving means for receiving a vertical load of the sorting roll is provided, and the vertical load receiving means is made independent of the advancing drive means for advancing the sorting roll, thereby dispersing the load, and Feeding can be smoothed. In addition, it is possible to alleviate the partial contact strength of each part and to prevent breakage of each contact part. In particular, when the classification target is a semiconductor polysilicon product, etc., in which it is necessary to avoid contamination during the classification process as much as possible, contamination of the classification product due to contamination of metal pieces etc. caused by breakage of each contact part Can be reduced.

A guide rail is provided at the start end of the feed groove of the screw shaft so as to guide the cam follower of the sorting roll into the feed groove. The guide rail is inclined downward in the roll traveling direction, and the feed groove of the cam follower is provided. By providing a sensor that detects a misset to the machine and outputs a device stop command signal, the sorting roll sets the cam follower of this sorting roll in the feed groove using the thrust rolling on the guide rail toward the roll traveling direction. it can. Further, when a missetting occurs, the device can be stopped by detecting it with a sensor.

A guide rail is provided at the terminal end of the feed groove of the screw shaft, which is inclined downward in the roll advancing direction, and guides a sorting roll, and at the terminal end of the feed groove of the screw shaft, the sorting roll is provided. Is released from the feed groove so that the sorting roll advances on a guide rail that is inclined downward in the roll advancing direction.

With this configuration, at the end of the feed groove of the screw shaft, when the sorting roll is released from the feed groove to be in a free state, the sorting roll advances on the guide rail, and the gap between the sorting rolls becomes The product is larger than the final sorting size of the product and the product is free to fall without restriction and is collected, for example, in a container placed below.

Therefore, it is possible to avoid adverse effects on the subsequent process such as breakage of the sorting roll caused by passing the nonstandard product through the sorting device without being discharged.

Further, by providing a labyrinth means between the sorting portion and the driving portion of the sorting roll, debris and fine powder generated in the sorting portion are scattered to the driving portion, causing the driving portion or the sorting portion. The breakage of the roll can be avoided.

Gears are provided at both ends of the sorting roll, and the sorting roll return means tilts downward in a direction opposite to the roll advancing direction to rotate the sorting roll in a direction opposite to the roll advancing direction. By comprising a rail and a rack member having a rack tooth portion that meshes with the gear, the sorting roll return means moves the sorting roll on the return rail in a direction opposite to the roll advancing direction, and the sorting roll raising means In this case, it is possible to prevent the on-going sorting roll from meandering and coming off or stopping on the return rail.

Further, by providing an auxiliary means for blowing air to the sorting roll, there is no product remaining on the sorting roll, that is, there is no product that passes through the sorting device without being sorted, so that the sorting efficiency can be improved.

By providing a guide rail for pressing the sorting roll from above, the progress of the sorting roll can be stabilized. Further, by mixing at least the material of the sorting roll with the same material as the object to be classified or at least the surface of the sorting roll with a wear-resistant resin, it is possible to prevent impurities from being mixed into the object to be classified. Polyetheretherketone (PEEK), polyethersulfone (PES), and the like are preferable as the vapor abrasion resistant resin.

Further, by selecting at least a material composed of polysilicon or an abrasion-resistant resin as a material of the sorting roll and classifying the semiconductor polysilicon product, it is possible to select a metal used for classifying the semiconductor polysilicon product. Pollution can be prevented.

[0028]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A sorting device according to the present invention will be described below with reference to the drawings. 1 is a plan view of the sorting apparatus, FIG. 2 is a side view of the sorting apparatus, FIG. 3 is a cross-sectional view taken along the line ZZ of FIG. 1, FIG. FIG. 5 is a schematic configuration explanatory view of a sorting device according to the present invention. Note that a direction perpendicular to the roll advancing direction X is defined as a left-right direction.

As shown in FIGS. 1 and 2, the sorting apparatus according to the present invention comprises an apparatus frame A, a plurality of sorting rolls 1,
A sorting roll circulating transport mechanism B that is provided on the apparatus frame A and circulates and transports the sorting roll 1;
The sorting roll circulating transport mechanism B includes a sorting roll horizontal transporting unit (selecting roll horizontal transporting unit) C and a sorting roll lowering mechanism (selecting roll lowering unit) located on the sorting roll unloading side of the sorting roll horizontal transporting unit C. D, a sorting roll raising mechanism (selecting roll raising means) located on the sorting roll loading side of the sorting roll horizontal transporting section C, and a sorting roll raising mechanism E that separates the sorting roll 1 lowered by the sorting roll lowering mechanism D. Roll return mechanism (selection roll return means) F and supply conveyor or shooter G to be transported to
And

The device frame A is constituted by providing leg frames 3 at four corners of a flat rectangular frame 2.

Further, as shown in FIG.
Is provided with a sorting roll portion 20 which is a sorting portion having a circular cross section. On the left and right end sides of the sorting roll portion 20, a labyrinth portion 23L composed of a plurality of ring grooves 21 and partitions 22 between the ring grooves 21 is provided. 23R are formed, and
The labyrinth part 23 is on the left and right end sides of the sorting roll part 20.
L, 23R and a driving unit (driving unit) 24
L and 24R are provided. The drive units 24L, 24R are provided with guide rollers 25L, 25R and pinion gears 26L, 2L.
6R, and the guide rollers 25L, 25R
And the pinion gears 26L, 26R are formed by rail guide portions 27L, 27R. Further, pin-shaped cam followers 50L and 50R are fixed to the left and right end faces of the sorting roll section 20, respectively.

As shown in FIGS. 1 and 3, the sorting roll horizontal transfer section C has left and right screw shafts 4L and 4R, and a peripheral surface of a shaft body 5 of the screw shafts 4L and 4R. Is formed with a feed groove 6 in a spiral shape.
Is set so that the groove pitch gradually increases from one end side 6a toward the other end side 6b. In the above screw shafts 4L and 4R, the left screw shaft 4
L is rotatably held at both ends thereof by bearing devices 8L and 9L fixed on the frame 2.
The right screw shaft 4R is rotatably held by bearing devices 8R and 9R fixed on the frame 2 in such a manner that the right screw shaft 4R is rotatable. The left and right screw shafts 4L and 4R are provided on the frame A along the roll advancing direction X and are parallel to each other.

The left screw shaft 4L is driven by the left rotary drive mechanism (progressive drive means) 10L to drive the right screw shaft 4L.
The shaft 4R is synchronously rotated by a right rotation drive mechanism (progression drive means) 10R. Left rotation drive mechanism 10L
Has a drive motor 12L installed in the device frame A, and the shaft end of the left screw shaft 4L is connected to the output shaft 12a of the drive motor 12L via a coupling 13L. The right rotation drive mechanism 10R has a drive motor 12R installed on the device frame A, and a right screw is attached to an output shaft 12a of the drive motor 12R.
The shaft end of the shaft 4R is connected via a coupling 13R. In the above embodiment, one drive motor may be used, and the left and right drive mechanisms may be driven by a power transmission mechanism such as a gear.

In the frame 2 of the apparatus frame A, a left guide rail 5L is shifted toward the left screw shaft 4L, and a right guide rail 5R is shifted toward the right screw shaft 4R. Each is fixed in parallel to the roll traveling direction X. At the start end side of the left and right guide rails 5L, 5R, there is a start end side inclined portion 7 inclined downward in the roll traveling direction X, and at the end side, an end side inclined downward in the roll traveling direction X. Each of the inclined portions 14 is formed.

As shown in FIGS. 3 and 4, the sorting roll horizontal transport section C is positioned inside each of the left and right guide rails 5L and 5R, and the left and right fixed labyrinth sections 1 are provided.
5L, 15R and left and right chutes 16L, 16R are arranged on the apparatus frame A via a support member (not shown). The left and right fixed labyrinth portions 15L and 15R are configured by projecting a plurality of partitions 28 downward. These partitions 28 are inserted into the plurality of ring grooves 21 of the roll-side labyrinth portions 23L and 23R of the sorting roll 1. The left and right chutes 16L, 16R
Partitions 29 are formed on the upper end side of the labyrinth portions 23L, 2L of the sorting roll 1 described above.
It is inserted into the plurality of ring grooves 21 of 3R from below.

The sorting roll lowering mechanism D includes an upper rotating shaft 31 provided above the apparatus frame A via bearings 30L and 30R, and the apparatus frame A
And a lower rotating shaft 32 provided via a bearing device (not shown) at a lower portion of the upper rotating shaft 31. Sprockets 33L and 33R are fixed to left and right of the upper rotating shaft 31, respectively. Sprockets 34L, 34R are fixed to the left and right of the shaft 32. A left endless chain 35L is interposed between the left sprockets 33L, 34L, and a right sprocket 33R,
A right endless chain 35R is hung between each of the 34Rs, and a plurality of plate-shaped transfer tables 36 are attached to the left and right endless chains 35L and 35R at predetermined intervals.

An intermediate sprocket 56 is fixed to the right end of the upper rotating shaft 31.
, A rotary drive motor 57 is fixedly mounted, and an endless chain 59 is looped between a drive sprocket 58 fixed to an output shaft 57 a of the rotary drive motor 57 and the intermediate sprocket 56.

The sorting roll raising mechanism E includes an upper rotating shaft 38 provided on the upper part of the apparatus frame A via bearings 37L and 37R, and the apparatus frame A
And a lower rotating shaft 39 provided via a bearing device (not shown) at a lower portion of the upper rotating shaft 38. Sprockets 40L and 40R are fixed to the left and right of the upper rotating shaft 38, respectively. Sprockets 41L and 41R are fixed to the left and right of the shaft 39. A left endless chain 42L is interposed between the left sprockets 40L and 41L, and a right sprocket 40R,
A right endless chain 42R is hung between 41R, respectively, and a plurality of plate-shaped transfer tables 43 are attached to the left and right endless chains 42L and 42R at predetermined intervals.

An intermediate sprocket 60 is fixed to the right end of the upper rotating shaft 38.
A rotary drive motor 61 is fixedly mounted on the shaft, and an endless chain 63 is wound around a drive sprocket 62 fixed to an output shaft 61a of the rotary drive motor 61 and the intermediate sprocket 60. Sorting roll lowering mechanism D
And the sorting roll raising mechanism E is not limited to the above embodiment,
Other mechanisms having the function of lowering or raising a single roll are employed without any particular limitation.

The sorting roll return mechanism F has left and right return rails 45L and 45R that are held by brackets 44L and 44R fixed to the leg frame 3 of the device frame A and that extend in the roll advancing direction X. The upper surfaces of the return rails 45L and 45R are inclined in the direction opposite to the roll traveling direction X. Also, rack members 46 are provided on the outer surfaces of the left and right return rails 45L and 45R.
L and 46R are fixed, and these rack members 46
The rack teeth 47 of L and 46R are inclined in the direction opposite to the roll traveling direction X.

Further, in the above configuration, the left and right rail guides 27L and 27R of the large number of sorting rolls 1 are mounted on the left and right guide rails 5L and 5R of the sorting roll horizontal transfer unit C, and the left and right cam followers 50L and 50R
Is a spiral feed groove 6 of the left and right screw shafts 4L, 4R.
Is slidably inserted in Further, the partitions 28 of the left and right fixed-side labyrinth portions 15L, 15R are formed by the plurality of ring grooves 21 of the labyrinth portions 23L, 23R of the sorting roll 1.
And the left and right chutes 16L, 16R
Is inserted from below into a plurality of ring grooves 21 of the labyrinth portions 23L and 23R of the sorting roll 1, and these constitute a labyrinth means.

Below the sorting roll horizontal transport section C,
As a preferable mode for automatically supplying and discharging the container, the accumulator 51 extending in a direction perpendicular to the roll advancing direction X, that is, in the left-right direction, has a predetermined interval in a direction perpendicular to the roll advancing direction X. These accumulation conveyors 51 are provided with container positioning stoppers 52 and 53 which are located below the sorting roll 1. A sensor 76 for detecting a missetting of the sorting roll 1 and outputting a device stop command signal is disposed on the loading side of the sorting roll horizontal transport unit C.

Next, the operation of the sorting device configured as described above will be described. In the sorting roll horizontal transport section C, the left and right screw shafts 4L and 4R are rotated in the sorting roll feeding direction by synchronously driving the left and right drive motors 12L and 12R. By the rotation of the left and right screw shafts 4L and 4R, the sorting roll 1 is fed in the roll advancing direction X by feeding the cam followers 50L and 50R at the left and right ends through the feed grooves 6. In this case, the labyrinth portions 23L and 23R of the sorting roll 1 and the left and right fixed labyrinth portions 15L and 15R are engaged with a gap therebetween.

The feed groove 6 extends from one end 6a to the other end 6a.
Since the pitch gradually increases toward b, as the roller moves in the roll traveling direction X,
The interval between the adjacent sorting rolls 1 gradually increases.

As described above, the left and right screw shafts 4L, 4L
The sorting roll 1 moved in the roll advancing direction X by the rotation of R has the left and right end cam followers 50L and 50R released from the terminal end 6b of the feed groove 6 and provided on the terminal end sides of the left and right guide rails 5L and 5R. It is moved to the end-side inclined portion 14. Since the end side inclined portion 14 is inclined downward in the roll traveling direction X, the sorting roll 1 rolls on the end side inclined portion 14 with the left and right guide rails 5L and 5R, and the sorting roll lowering mechanism portion Move to the loading side of D.

In this sorting roll lowering mechanism D,
The drive sprocket 58 is driven by the rotation drive motor 57.
The upper rotating shaft 31 is rotated via the endless chain 59 and the intermediate sprocket 56, and the left sprocket 33 is rotated.
A left endless chain 35L hung between L and 34L;
The right endless chain 35R hung between the right sprockets 33R, 34R is rotated in the direction of arrow H shown in FIG. 2 to send the plurality of transport tables 36 downward.

Therefore, the sorting rolls 1 which have been moved and carried in to the loading side of the sorting roll lowering mechanism section D are successively placed on the transport table 36 coming to the loading side, and sequentially descend by the lowering of the transport table 36, so that the lowermost position is obtained. Is moved onto the return rails 45L and 45R of the sorting roll return mechanism F.
In this case, the rail guide portions 27L, 27 of the sorting roll 1
R comes into contact with the upper surfaces of the return rails 45L and 45R, and the pinion gears 26L and 26R of the sorting roll 1 mesh with the rack teeth 47 of the rack members 46L and 46R.

Since the upper surfaces of the return rails 45L and 45R are inclined downward in a direction opposite to the roll advancing direction X, the sorting roll 1 rolls by its own weight, and the sorting roll lifting mechanism E Move to the loading side.

In the sorting roll raising mechanism E,
The drive sprocket 62 is driven by the rotation drive motor 61.
The upper rotating shaft 38 is rotated via the endless chain 63 and the intermediate sprocket 60, and the left sprocket 40
L, an endless chain 42L hung between 41L,
The right endless chain 42R hung between the right sprockets 40R, 41R is rotated in the direction of arrow I shown in FIG. 2 to feed the plurality of transport tables 43 upward.

Therefore, the sorting rolls 1 which have been moved and carried in to the loading side of the sorting roll raising mechanism E are successively placed on the transport platform 43 coming to the loading side, and are sequentially raised by the rise of the transport platform 43, so that the uppermost Is moved to the loading side of the sorting roll horizontal transport section C.

In the left and right guide rails 5L, 5R of the sorting roll horizontal transport section C, the respective starting ends are inclined toward the leading end side 7 in the direction of roll advance X.
Therefore, the sorting roll 1 moved to the loading side of the sorting roll horizontal transport unit C rolls on the starting end side inclined part 7,
The left and right end cam followers 50L and 50R are inserted into the start ends 6a of the feed grooves 6 of the left and right screw shafts 4L and 4R. At that time, the cam followers 50L, 50
If R is not properly inserted into the starting end side 6a of the feed groove 6 of the left and right screw shafts 4L and 4R and a mis-set occurs in any manner, the sensor 76 detects the mis-set, A control unit (not shown) issues a device stop command signal to stop synchronous driving of the drive motors 12L and 12R and stop rotation of the screw shafts 4L and 4R. Thereafter, as described above, the sorting roll 1 is transported again in the roll advancing direction X in the sorting roll horizontal transport section C, and by repeating such a process, the classification operation by the present classification device is substantially endless unless there is a particular problem. Is done.

Next, a classification operation of a semiconductor polysilicon product using the above-described sorting apparatus will be described. Below the sorting roll horizontal transport section C, all the accumulators 51 arranged in a direction orthogonal to the roll traveling direction X are arranged.
, The container 71 is stopped by being positioned before and after by the container positioning stoppers 52 and 53.

As shown in FIG. 5, a large number of bulk and amorphous semiconductor products 70 having different sizes crushed by the rod crushing table 73 are supplied to a supply conveyor or a shooter disposed on the loading side of the sorting device. From G, it is supplied onto the sorting roll 1 on the loading side of the sorting roll horizontal transfer section C of this sorting device. In this case, the feed conveyor or shooter G
Is vibrated, and the polysilicon product 70 for semiconductors is evenly distributed.
Is supplied to the sorting roll horizontal transport section C.

The sorting roll 1 has left and right cam followers 51L, 51R that are connected to the left and right screw shafts 4L, 4L.
Feed groove 6 continuously changing groove pitch while rotating R
, The distance between the sorting rolls 1 is initially small, and the distance increases in the roll advancing direction X.

Accordingly, in a region where the distance between the separation rolls 1 is small, the semiconductor polysilicon product 70-1 having a smaller size than the specified size is classified, dropped from the gap and collected in the container 71. Next, in a region where the interval between the sorting rolls 1 is appropriate, the semiconductor polysilicon product 70-2 having a size within the specified range is classified, dropped from the gap, and collected in the container 71. Next, the semiconductor polysilicon product 70-3 larger than the unspecified size is classified, falls from the gap, and is collected in the container 71.

Next, the container positioning stopper 52 in front of the container 71 is removed, and the container 71 is carried out.

As described above, since the sorting roll 1 advances while widening its interval, there is no clogging or biting of the polysilicon product 70 for a semiconductor, and the sorting product 1 remains on the sorting roll 1, that is, is classified. Since there is no polysilicon product 70 for a semiconductor that passes through the sorting device without any problem, the classification efficiency can be improved.

Further, the sorting roll 1 is cylindrical, and a rotation imparting means for rotating the sorting roll 1 may be provided. For example, as shown in FIG. 4, the rotation applying means may be configured by fixing a rack member 74 to the guide rails 5L, 5R. When the pinion gears 26 </ b> L and 26 </ b> R provided mesh with each other, rotation can be given to the sorting roll 1. The rack member 74
Does not need to be provided in the entire traveling range of the sorting roll 1, but may be provided partially and intermittently engaged to rotate the sorting roll 1 in the same direction arbitrarily.

By applying rotation to the sorting roll 1 in this manner, there is no product remaining on the sorting roll 1, that is, there is no product that passes through the sorting device without being classified, and the classification efficiency can be increased.

Further, as shown in FIG.
A guide rail 75 that presses from above may be provided. By pressing the sorting roll 1 from above with the guide rail 75, the progress of the sorting roll 1 can be stabilized. Further, the sorting roll 1 may have a prismatic shape.

Guide rails 5L, 5R as vertical load receiving means for receiving the vertical load of the sorting roll 1
Is separated from the advancing drive means for advancing the sorting roll 1, so that the load is dispersed and
Feed can be smoothed.

On the starting end 6a side of the feed groove 6 of the screw shafts 4L, 4R, the sorting roll 1 sorts using the thrust rolling on the guide rails 5L, 5R inclined downward in the roll traveling direction X. Cam follower 5 for roll 1
0L and 50R can be set in the feed groove 6. At this time, if the cam followers 50L, 50R of the sorting roll 1 are not properly inserted into the starting end 6a of the feed groove 6 of the left and right screw shafts 4L, 4R, the sensor 76 detects this and detects the mis-set. Motor 12L, 1
Since the 2R is stopped and the rotation of the screw shafts 4L and 4R is stopped, accidents do not occur in classification errors, breakage of the sorting roll, and the like due to continued driving while being set incorrectly.

On the end 6b side of the feed groove 6 of the screw shafts 4L and 4R, the separation roll 1 is released from the feed groove 6, and the selection roll 1 is inclined downward in the roll traveling direction X. 5R, on the end 6b side of the feed groove 6 of the screw shafts 4L, 4R, when the separation roll 1 is released from the feed groove 6 to be in a free state, the separation roll 1 is guided. Rail 5
L, 5R, the gap between the sorting rolls 1 becomes larger than the final sorting size of the product, and the product freely falls without any restrictions, and the container 71 installed below.
Collected inside. Therefore, the sorting roll 1 is formed by passing the nonstandard product through the sorting device without being discharged.
It is possible to avoid an influence on a post-process such as breakage of the metal.

Further, since the labyrinth means is provided between the sorting portion of the sorting roll 1 and the driving portion, debris and fine powder generated in the sorting portion are scattered on the driving portion, causing bite and the like. The drive part or the sorting roll 1 can be prevented from being damaged.

When the sorting roll 1 rolls on the return rails 45L and 45R of the sorting roll return means F, the pinion gears 26L and 26R are
By meshing with the rack teeth 47 of the L and 46R,
Ongoing sorting roll 1 meanders and returns rail 45
L, 45R can be prevented from coming off or stopping.

Further, auxiliary means such as a nozzle for partially blowing air to the sorting roll 1 may be provided. In this case, by partially blowing air to the sorting roll 1, no product remains on the sorting roll 1, that is, passes through the sorting device without being classified, and the classification efficiency can be increased.

According to the above-described embodiment of the present invention, the advancing drive means is provided with a spiral feed groove 6 in which a groove pitch changes continuously on a pair of screw shafts 4L, 4R along the roll advancing direction X. The cam followers 50L, 50R are provided at both ends of the sorting roll 1, and the cam followers 50L, 50R are provided.
R is slidably inserted into the feed groove 6 so that each of the sorting rolls 1 can be detachably attached to the pair of screw shafts 4L and 4R.
The cam followers 50L and 50R scan the feed groove 6 with the rotations of L and 4R, so that the separation roll 1 advances while continuously widening the gap between the separation rolls 1 to block a lump and irregularly shaped product. Classification can be performed by size without causing problems such as biting. In addition, since each of the sorting rolls 1 is independent of the traveling drive means, replacement of the sorting rolls 1 is facilitated.

Further, the sorting roll 1 is advanced by the sorting roll horizontal transport mechanism C while continuously widening the gap to classify the lump and irregular-shaped products by size. D, the sorting roll 1 is sequentially conveyed downward, and thereafter, the sorting roll return mechanism F
, The sorting roll 1 is returned to the return rail 45L, 45R.
The upper part is moved in the direction opposite to the roll advancing direction X, and then the sorting roll 1 is sequentially raised by the sorting roll raising mechanism E, and is loaded into the loading side of the sorting roll horizontal transfer part C at the highest position. The repetition of the process of circulating the sorting roll 1 allows the classification operation to be continued virtually endlessly.

[0069]

According to the sorting apparatus of the present invention constructed as described above, the sorting roll advances while continuously widening the gap, thereby automatically clogging a lump and irregular-shaped product. , Can be classified by size without causing problems such as biting, etc., and can improve work efficiency. In addition, the sorting roll is independent of the traveling drive means, and can be individually attached and detached. Therefore, it is possible to easily replace the sorting roll, to promptly deal with the damage of the sorting roll, and to avoid a decrease in classification accuracy due to the damage of the sorting roll. Therefore, for example, high purity is required as in the case of semiconductor polysilicon products, and the present invention can be applied to a classification target in which no contamination is important even in the classification process. The material or at least the surface is made of a wear-resistant resin to enable high-purity classification, and when the separation roll, which is the common material, is damaged, the selection roll can be easily replaced to reduce the classification accuracy. Since it can be avoided, the classification efficiency of the classification target, which has conventionally been mainly performed manually, can be improved.

Further, according to the sorting apparatus of the present invention, the sorting rolls are moved by the sorting roll horizontal conveying means while continuously widening the gap, and the bulk and irregular-shaped products are classified by size. Later, the sorting rolls are sequentially conveyed downward by the sorting roll lowering means, and thereafter, the sorting rolls are moved by the sorting roll return means on the return rail in a direction opposite to the roll advancing direction. As a result, the sorting rolls are sequentially raised, and the sorting rolls can be transported at the uppermost position to the loading side of the sorting roll horizontal transport unit, and the sorting rolls can be circulated.

[Brief description of the drawings]

FIG. 1 is a plan view of a sorting device shown in an embodiment of a sorting device according to the present invention.

FIG. 2 is a side view of the sorting device.

FIG. 3 is a sectional view taken along the line ZZ in FIG. 2;

FIG. 4 is an explanatory diagram of a rotation applying mechanism in the sorting apparatus.

FIG. 5 is a schematic configuration explanatory view showing an embodiment of a sorting device according to the present invention.

FIG. 6 is an explanatory diagram of conventional classification and sorting of semiconductor polysilicon products.

[Explanation of symbols]

1 Sorting Roll 4L Screw Shaft 4R Screw Shaft 6 Feed Groove 50L Cam Follower 50R Cam Follower A Equipment Frame B Sorting Roll Circulation Conveying Mechanism C Sorting Roll Horizontal Conveying Mechanism (Sorting Roll Horizontal Conveying Means) D Separating Roll Lowering Mechanism (Sorting Roll Lowering) Means) E Sorting roll raising mechanism (sorting roll raising means) F Sorting roll return mechanism (sorting roll return means)

Claims (5)

[Claims] 1. A method according to claim 1, further comprising: a plurality of sorting rolls; and a traveling drive unit for advancing the sorting rolls while widening a gap between the sorting rolls, wherein each of the sorting rolls is separately attached to and detached from the traveling drive unit. Sorting equipment. 2. A sorting roll horizontal transporting means having a traveling drive means for advancing while widening a gap between a plurality of sorting rolls, and the sorting rolls transferred to an end side of the sorting roll horizontal transporting means are sequentially lowered. Sorting roll lowering means for conveying, sorting roll return means for moving the sorting rolls sequentially lowered by the sorting roll lowering means on a return rail and moving in a direction opposite to the roll advancing direction, and the sorting roll return means. Sorting roll raising means for sequentially raising the sorting rolls transferred in a direction opposite to the roll advancing direction, and loading the sorting rolls at the uppermost position into the loading side of the sorting roll horizontal transport unit; A sorting device that is separately attached to and detached from each other. 3. A pair of screw shafts along the roll advancing direction are arranged as the advancing driving means, and a spiral feed groove having a groove pitch that changes continuously or stepwise is provided on the screw shafts. A cam follower which is slidably inserted into said feed groove at both ends, and said cam follower scans said feed groove with the rotation of said pair of screw shafts to advance said sorting roll. 3. The sorting device according to 2. 4. A guide rail, which is inclined downward in the roll advancing direction so as to guide the cam follower of the sorting roll into the feed groove, is provided at the start end side of the feed groove of the screw shaft, and the cam follower is fed. 4. The sorting device according to claim 1, further comprising a sensor that detects a misset in the groove and outputs a device stop command signal. 5. The sorting apparatus according to claim 1, wherein at least the surface of the roll is made of a wear-resistant resin.