JPH1116846A5 - - Google Patents

Info

Publication number
JPH1116846A5
JPH1116846A5 JP1997171441A JP17144197A JPH1116846A5 JP H1116846 A5 JPH1116846 A5 JP H1116846A5 JP 1997171441 A JP1997171441 A JP 1997171441A JP 17144197 A JP17144197 A JP 17144197A JP H1116846 A5 JPH1116846 A5 JP H1116846A5
Authority
JP
Japan
Prior art keywords
seal cap
furnace
purge gas
gas supply
supply pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997171441A
Other languages
English (en)
Japanese (ja)
Other versions
JP3785247B2 (ja
JPH1116846A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP17144197A priority Critical patent/JP3785247B2/ja
Priority claimed from JP17144197A external-priority patent/JP3785247B2/ja
Publication of JPH1116846A publication Critical patent/JPH1116846A/ja
Publication of JPH1116846A5 publication Critical patent/JPH1116846A5/ja
Application granted granted Critical
Publication of JP3785247B2 publication Critical patent/JP3785247B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP17144197A 1997-06-27 1997-06-27 半導体製造装置 Expired - Fee Related JP3785247B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17144197A JP3785247B2 (ja) 1997-06-27 1997-06-27 半導体製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17144197A JP3785247B2 (ja) 1997-06-27 1997-06-27 半導体製造装置

Publications (3)

Publication Number Publication Date
JPH1116846A JPH1116846A (ja) 1999-01-22
JPH1116846A5 true JPH1116846A5 (enrdf_load_stackoverflow) 2005-05-12
JP3785247B2 JP3785247B2 (ja) 2006-06-14

Family

ID=15923186

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17144197A Expired - Fee Related JP3785247B2 (ja) 1997-06-27 1997-06-27 半導体製造装置

Country Status (1)

Country Link
JP (1) JP3785247B2 (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100835102B1 (ko) 2002-12-16 2008-06-03 동부일렉트로닉스 주식회사 보트 회전체
JP6180276B2 (ja) * 2013-10-25 2017-08-16 光洋サーモシステム株式会社 熱処理装置
KR102680412B1 (ko) * 2018-11-27 2024-07-02 삼성전자주식회사 반도체 처리 장치 및 반도체 처리 시스템
CN115132624B (zh) * 2022-07-13 2025-10-10 北京北方华创微电子装备有限公司 半导体工艺设备

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