JPH1116841A5 - - Google Patents

Info

Publication number
JPH1116841A5
JPH1116841A5 JP1997168603A JP16860397A JPH1116841A5 JP H1116841 A5 JPH1116841 A5 JP H1116841A5 JP 1997168603 A JP1997168603 A JP 1997168603A JP 16860397 A JP16860397 A JP 16860397A JP H1116841 A5 JPH1116841 A5 JP H1116841A5
Authority
JP
Japan
Prior art keywords
reaction chamber
gas
supplies
supplying
manufacturing apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1997168603A
Other languages
English (en)
Japanese (ja)
Other versions
JPH1116841A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP16860397A priority Critical patent/JPH1116841A/ja
Priority claimed from JP16860397A external-priority patent/JPH1116841A/ja
Publication of JPH1116841A publication Critical patent/JPH1116841A/ja
Publication of JPH1116841A5 publication Critical patent/JPH1116841A5/ja
Pending legal-status Critical Current

Links

JP16860397A 1997-06-25 1997-06-25 半導体製造装置のガス供給方法 Pending JPH1116841A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16860397A JPH1116841A (ja) 1997-06-25 1997-06-25 半導体製造装置のガス供給方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16860397A JPH1116841A (ja) 1997-06-25 1997-06-25 半導体製造装置のガス供給方法

Publications (2)

Publication Number Publication Date
JPH1116841A JPH1116841A (ja) 1999-01-22
JPH1116841A5 true JPH1116841A5 (https=) 2005-02-24

Family

ID=15871129

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16860397A Pending JPH1116841A (ja) 1997-06-25 1997-06-25 半導体製造装置のガス供給方法

Country Status (1)

Country Link
JP (1) JPH1116841A (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111916328B (zh) * 2019-05-10 2024-02-27 北京北方华创微电子装备有限公司 流路互锁结构、进气装置及半导体加工设备

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