JPH11166476A5 - - Google Patents

Info

Publication number
JPH11166476A5
JPH11166476A5 JP1997331897A JP33189797A JPH11166476A5 JP H11166476 A5 JPH11166476 A5 JP H11166476A5 JP 1997331897 A JP1997331897 A JP 1997331897A JP 33189797 A JP33189797 A JP 33189797A JP H11166476 A5 JPH11166476 A5 JP H11166476A5
Authority
JP
Japan
Prior art keywords
passage
fins
tube portion
rectangular tube
rectangular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997331897A
Other languages
English (en)
Japanese (ja)
Other versions
JP4008080B2 (ja
JPH11166476A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP33189797A priority Critical patent/JP4008080B2/ja
Priority claimed from JP33189797A external-priority patent/JP4008080B2/ja
Publication of JPH11166476A publication Critical patent/JPH11166476A/ja
Publication of JPH11166476A5 publication Critical patent/JPH11166476A5/ja
Application granted granted Critical
Publication of JP4008080B2 publication Critical patent/JP4008080B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP33189797A 1997-12-02 1997-12-02 差動排気型クライオポンプ Expired - Lifetime JP4008080B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP33189797A JP4008080B2 (ja) 1997-12-02 1997-12-02 差動排気型クライオポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP33189797A JP4008080B2 (ja) 1997-12-02 1997-12-02 差動排気型クライオポンプ

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2007180371A Division JP4854614B2 (ja) 2007-07-09 2007-07-09 イオン注入方法

Publications (3)

Publication Number Publication Date
JPH11166476A JPH11166476A (ja) 1999-06-22
JPH11166476A5 true JPH11166476A5 (enExample) 2005-05-19
JP4008080B2 JP4008080B2 (ja) 2007-11-14

Family

ID=18248860

Family Applications (1)

Application Number Title Priority Date Filing Date
JP33189797A Expired - Lifetime JP4008080B2 (ja) 1997-12-02 1997-12-02 差動排気型クライオポンプ

Country Status (1)

Country Link
JP (1) JP4008080B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7482598B2 (en) * 2005-12-07 2009-01-27 Varian Semiconductor Equipment Associates, Inc. Techniques for preventing parasitic beamlets from affecting ion implantation
JP4854614B2 (ja) * 2007-07-09 2012-01-18 アルバック・クライオ株式会社 イオン注入方法

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