JPH11163098A - Positional difference measuring apparatus for arm, carrier, substrate processor and jig - Google Patents

Abstract

PROBLEM TO BE SOLVED: To lessen burden onto an operator and to eliminate the difference among a plurality of arms accurately and efficiently in a short time. SOLUTION: A centering jig having a part to be detected is set at a spin chuck part by means of a lower arm 31b. The position at the time of setting the centering jig by means of the lower arm 31b is stored as first positional information. Access is gained under a state where an upper arm 31a holds a sensing jig for the centering jig set at the spin chuck part. The sensing jig comprises photosensors 230, 240 sensitive to the the part to be detected of the centering jig. The upper arm 31a is moved in the ±θ, ±X and ±Z directions and a second position where the photosensors 230, 240 are turned on/off is stored as second positional information. Difference between the upper and lower arms 31a, 31b is then determined based on the first and second positional information.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an arm position deviation measuring device for measuring a mechanical position deviation of a plurality of arms of a transfer robot in which a plurality of arms are provided at different heights. The present invention relates to a transfer device that performs transfer, a substrate processing apparatus including the transfer device, and a jig used for these devices.

[0002]

2. Description of the Related Art Conventionally, a substrate processing apparatus for processing a thin plate-like substrate (hereinafter, simply referred to as a "substrate") such as a semiconductor wafer or a glass substrate for a liquid crystal is provided with a plurality of processing units. Different processing is performed on the substrate in each processing unit. Such a conventional substrate processing apparatus is provided with a transfer device for transferring a substrate between processing units.

In a conventional transfer device, an arm for transferring a substrate, which is called a so-called double arm, is provided vertically.
There are things to prepare. In such a double-arm transfer device, each arm carries a substrate into and out of a plurality of processing units. Then, for example, the upper arm may carry in the substrate to be processed into a certain processing unit, and the lower arm may carry out the processed substrate from the processing unit.

Therefore, when the two arms access each processing unit, it is necessary that the two arms, the upper arm and the lower arm, access the same position.

However, due to the processing error of the members constituting each arm, the mounting error when mounting each member, and the assembly error when assembling the transfer device, the mechanical position is set at the position where the upper and lower arms access. A deviation (hereinafter, simply referred to as “deviation”) occurs, and the access position is not the same position. As a result, there is a problem that the substrate cannot be transported normally in the substrate processing apparatus.

Therefore, in the conventional substrate processing apparatus,
In order to eliminate the deviation between the upper arm and the lower arm, an operator performs a teaching operation on each arm. This teaching operation is performed in the following procedure.

First, a substrate is loaded into one of a plurality of processing units by using one reference arm.
Then, the operator visually adjusts the other arm while moving the other arm little by little. Then, the adjusted position is stored as an access position. As a result, the position accessed by one arm as a reference matches the position accessed by the other arm, and the deviation between the upper arm and the lower arm is eliminated.

By the way, after operating the substrate processing apparatus for a certain period, the operator may remove the arm from the substrate transfer robot and clean the arm. In such a case, it is necessary to attach the arm again every time the arm is washed, and an attachment error occurs each time, so that a deviation occurs between the upper arm and the lower arm. Therefore, in the conventional substrate processing apparatus, the operator needs to perform the above-described teaching work every time maintenance such as cleaning of the arm is performed.

[0009]

In the above-described teaching operation of the arm in the conventional substrate processing apparatus, it is necessary for the operator to visually adjust the arm while gradually moving the other arm as described above. It was a very tedious and time-consuming task. In addition, the accuracy and accuracy of the teaching work are greatly different depending on the experience and technical ability of the operator.

[0010] Accordingly, the teaching work imposes a burden on the operator, and the time required for the teaching work and the variation in accuracy are preferable in terms of efficient and accurate operation of the substrate processing apparatus. is not.

SUMMARY OF THE INVENTION The present invention has been made in consideration of the above problems, and has been made in consideration of the above problems, and has been made in consideration of the above circumstances, and has been made in view of the above circumstances. It is an object to provide an apparatus, a transfer apparatus, a substrate processing apparatus including the transfer apparatus, and a jig used for these apparatuses.

[0012]

According to a first aspect of the present invention, a plurality of arms are provided at different heights, and an arm position for measuring a mechanical positional deviation of the plurality of arms is provided. A deviation measuring device, comprising: (a) mounting a first jig at a predetermined place by a first arm of a plurality of arms, and a position of the first arm when the mounting is performed; (B) holding the second jig by the second arm of the plurality of arms, and setting the first jig held at a predetermined place in a state where the second jig is held by the second arm of the plurality of arms. The second jig is brought close to the jig until a predetermined relative positional relationship is established, and the second arm is moved in each of a plurality of different directions in the close state, whereby each of the plurality of directions is moved. The first jig is detected and the second
Second control means for acquiring as position information; and (c) calculating means for calculating a mechanical position deviation of the first arm with respect to the second arm based on the first position information and the second position information. ing.

According to a second aspect of the present invention, a plurality of arms are provided at different heights, and the plurality of arms access respective positions designated by teaching in a predetermined order to transfer a transferred object. (A) placing a first jig in a predetermined place by a first arm of a plurality of arms, and setting a position of the first arm when the placement is performed to a first position; (B) a first control unit that acquires the position information as one position information, and (b) a first control unit that is mounted on a predetermined place while being held by a second arm of the plurality of arms.
By bringing the second jig closer to the jig until a predetermined relative positional relationship is established, and moving the second arms in a plurality of different directions in the approach state,
A second control means for detecting a first jig in each of a plurality of directions and acquiring the first jig as second position information; and (c) detecting a first jig for the first arm based on the first position information and the second position information. A calculating means for calculating a mechanical position deviation with respect to the second arm; and (d) a correcting means for setting the mechanical position deviation as an offset value for the first arm.

According to a third aspect of the present invention, in the transporting device of the second aspect, at least one of the first and second jigs is provided with a detected portion having a predetermined shape. The other of the first and second jigs is provided with a sensor responsive to the detected part.
The control means (b-1) moves the second arm so that the detection point of the sensor moves along the forward direction of a predetermined trajectory crossing each of the pair of edges of the detected part, and (B-2) a detection point of the sensor moves along a reverse direction of a predetermined trajectory, and a forward direction detecting means for acquiring a position when each of the edges is detected by the sensor as a pair of forward edge detection positions. Reverse direction detecting means for moving the second arm so as to obtain a position when each of the pair of edges is detected by the sensor as a pair of reverse edge detection positions, and (b-3) a pair of forward direction Means for obtaining second position information based on the edge detection position and the pair of reverse edge detection positions.

According to a fourth aspect of the present invention, in the transport device of the third aspect, each of the forward direction detecting means and the backward direction detecting means is moved by the sensor while moving the second arm in parallel with the movement. It is characterized by taking in the detection output of the detection unit.

According to a fifth aspect of the present invention, there is provided any one of the second to fourth aspects, further comprising a processing unit for performing a predetermined process on the substrate, and a substrate transfer unit for carrying the substrate in and out of the processing unit. It is characterized by having such a transfer device.

According to a sixth aspect of the present invention, there is provided a transfer apparatus in which a plurality of arms capable of holding an object to be transferred are provided at different heights, which is used for obtaining a mechanical positional relationship between the plurality of arms. (A) a main body that can be held by at least one of the plurality of arms, and (b) a detected body formed at a predetermined position of the main body and having a shape that can be detected by a predetermined non-contact sensor. And at least a part of the outer shape of the main body is shaped to be positioned and held by the arm.

According to a seventh aspect of the present invention, a transfer device in which a plurality of arms capable of holding an object to be transferred are provided at different heights is used for determining a mechanical positional relationship between the plurality of arms. Jig, (a) a main body that can be held by at least one of the plurality of arms, and (b) formed at a predetermined position of the main body, the position of a predetermined target outside the jig in a non-contact manner. And a detectable sensor, wherein at least a part of the outer shape of the main body is shaped to be positioned and held by the arm.

According to an eighth aspect of the present invention, in the jig according to the sixth or seventh aspect, the transferred object is a circular substrate, and each of the plurality of arms supports an edge of the circular substrate. The main body has a thin plate shape in which at least a part of its outer shape is circular or arcuate.

[0020]

DESCRIPTION OF THE PREFERRED EMBODIMENTS <1. Overall Configuration of Substrate Processing Apparatus>
First, the overall configuration of the substrate processing apparatus according to the present invention will be described. FIG. 1 is a schematic diagram showing a substrate processing apparatus according to this embodiment. FIG. 1A is a plan view of the substrate processing apparatus, and FIG. 1B is a front view of the substrate processing apparatus.

As shown in FIG. 1, in this embodiment, a substrate processing apparatus includes an indexer ID for carrying in / out a substrate, a plurality of processing units for performing a process on the substrate, and a substrate for transporting the substrate to each processing unit. It comprises a unit arrangement section MP in which a transport device is arranged, and an interface IF provided for carrying in / out a substrate between an exposure apparatus (not shown) and the unit arrangement section MP.

The unit disposition portion MP has a chemical cabinet 11 at the lowermost portion for storing a tank for storing a medicine, a pipe, and the like. As processing units, there are disposed coating processing units SC1 and SC2 (spin coater) for performing a resist coating process while rotating the substrate, and development processing units SD1 and SD2 (spin developer) for performing a developing process on the exposed substrate. . Further, above these liquid processing units, a multi-stage heat treatment unit 20 for performing heat treatment on the substrate is disposed at the front and rear of the apparatus. In addition, between the two coating processing units SC1 and SC2 of the apparatus, as a substrate processing unit, a cleaning processing unit SS for supplying a cleaning liquid such as pure water to the substrate and rotatingly cleaning the substrate.
(Spin scrubber). Note that these coating processing units SC1 and SC2 and developing processing unit SD
1, SD2 and the cleaning unit SS are collectively called a spin unit.

At the center of the apparatus sandwiched between the coating units SC1 and SC2 and the developing units SD1 and SD2,
A transport device TR1 for accessing all the surrounding processing units and transferring the substrate to and from them is arranged. The transport device TR1 is movable in the vertical direction and is rotatable around a central vertical axis.
The transport device TR1 will be further described later.

Incidentally, at the top of the unit arrangement part MP,
A filter fan unit FFU for forming a clean air downflow is provided. Immediately below the multi-stage heat treatment unit 20, a filter fan unit FFU that forms a downflow of clean air is provided on the liquid treatment unit side.

FIG. 2 is a diagram showing the arrangement of the processing units shown in FIG. Above the coating unit SC <b> 1, a six-stage heat treatment unit is disposed as the multi-stage heat treatment unit 20. Of these, a cool plate portion CP1 for cooling the substrate is provided at the position of the first stage counted from the lowest stage, and the cool plate portions CP2 and CP3 are similarly provided for the second and third stages. Is provided. The fourth stage is provided with an adhesion strengthening portion AH for performing an adhesion strengthening process on the substrate, and the fifth and sixth stages are provided with a hot plate portion H for heating the substrate.
P1 and HP2 are provided.

A heat treatment unit having a six-stage structure is arranged above the coating treatment unit SC2 as the multi-stage heat treatment unit 20. Of these, cool plate portions CP4 to CP6 are provided at the first to third positions from the bottom, and hot plate portions HP3 to HP5 are provided at the fourth to sixth positions. ing.

Above the development processing unit SD1, a four-stage heat treatment unit is disposed as the multi-stage heat treatment unit 20. Of these, cool plate portions CP7 and CP8 are provided at the first and second positions from the bottom, and hot plate portions HP6 and HP7 are provided at the third and fourth positions. I have. It should be noted that the uppermost 2
Although the stage is empty in the case of the apparatus of the present embodiment, a hot plate unit, a cool plate unit, or another heat treatment unit can be incorporated depending on the use and purpose.

Above the development processing unit SD2, a two-stage heat treatment unit is disposed as the multi-stage heat treatment unit 20. Of these, a cool plate portion CP9 is provided at the first stage position from the lowermost stage, and a post-exposure bake plate portion PEB for performing post-exposure baking processing on the substrate is provided at the second stage position. Is provided.
Also in this case, the upper side of the post-exposure bake plate portion PEB is empty, but a hot plate portion, a cool plate portion, or another heat treatment unit can be incorporated according to the application and purpose.

Then, a predetermined process can be performed on the substrate by sequentially transporting the substrate by the transport device TR1 provided at the center of the unit arrangement section MP between the liquid processing unit and the heat treatment unit. .

The interface IF has a function of temporarily stocking the substrate on which the resist application has been completed in the unit arrangement section MP so that the substrate can be transferred to the exposure apparatus or the exposed substrate can be received from the exposure apparatus. Although not shown, the robot includes a robot for transferring a substrate to and from the transport device TR1, and a buffer cassette for mounting the substrate.

<2. Configuration of transport device> Next, transport device T
R1 will be described. FIG. 3 is an external perspective view of the transport device TR1. The transfer device TR1 includes a pair of upper arm 31a and lower arm 31b that hold a substrate W, a horizontal movement mechanism (X-axis movement mechanism) that independently moves these arms in a horizontal direction, and a vertical movement mechanism that expands and contracts vertically. It has a telescopic elevating mechanism (Z-axis moving mechanism) for moving in the direction, and a rotation driving mechanism (θ-axis rotating mechanism) for rotating around a vertical axis.
The upper arm 31a and the lower arm 31b can move three-dimensionally by these mechanisms.

The telescopic elevating mechanism of the transport device TR1 of the substrate processing apparatus in this embodiment is a telescopic type telescopic mechanism, which will be described later. The cover 41d can be accommodated in the cover 41c, and the cover 41c can be moved to the cover 41b.
And the cover 41b can be stored in the cover 41a. When lowering the upper and lower arms 31a and 31b, the covers can be sequentially stored. Conversely, when raising and lowering the upper and lower arms 31a and 31b, the stored covers are sequentially pulled out. Is realized as follows. In addition, the upper arm 31 is moved by the telescopic elevating mechanism.
The vertical direction in which a and the lower arm 31b move is defined as a Z-axis direction.

The transport device TR1 is installed on a base 44, and a rotary drive mechanism is configured to rotate about the center of the base 44 as an axis. Here, the rotation center rotated by the rotation drive mechanism is defined as the θ axis. It should be noted that the fixed cover 4 is fixed to the base 44.
3 is attached.

4 and 5 are side sectional views for explaining the operation of the transport device TR1, FIG. 4 shows a state in which the telescopic elevating mechanism is extended, and FIG. This shows a contracted state. As shown in the drawing, the inside of the transport device TR1 has a telescopic type multi-stage nest structure as described above. At the time of contraction, the lifting member 42a is stored in the lifting member 42b, and the lifting member 42b is stored in the lifting member 42c.
“c” is stored in a lifting member 42d, and the lifting member 42d is configured to be stored in a fixed member 42e.

For example, the lifting member 42a and the lifting member 42b
In view of the relationship, the lifting member 42a is stored in the lifting member 42b, so the lifting member 42b is a storage member, and the lifting member 42a is a stored member. In addition, looking at the relationship between the lifting member 42b and the lifting member 42c, the lifting member 42b is housed in the lifting member 42c.
2c is a storage member, and the elevating member 42b is a stored member.

The lifting members 42b, 42c, 42d
Are provided with pulleys 47a, 47b, 47c, respectively. Belts L3, L2, L1 are hung on these pulleys 47a, 47b, 47c. One end of the belt L1 is fixed to the upper part of the fixing member 42e, and the other end is fixed to the lower part of the elevating member 42c. Similarly, the belt L2 is fixed to the upper part of the elevating member 42d and the lower part of the elevating member 42b, and the belt L3 is fixed to the upper part of the elevating member 42c and the lower part of the elevating member 42a.

By driving a Z-axis driving unit D1 such as a motor installed on the turntable 45, the supporting member 4
8 goes up and down, and the elevating member 4 fixed to the support member 48
2d goes up and down. Here, a case where the upper and lower arms 31a and 31b are raised by extending the telescopic elevating mechanism will be described. First, the driving of the Z-axis driving unit D1 causes the support member 48 to rise, and at the same time, the lifting member 42d to rise. When the lifting member 42d rises, the pulley 47c attached to it rises at the same time. As described above, since one end of the belt L1 is fixed to the fixing member 42e and the length of the belt L1 is constant, when the pulley 47c rises, the lifting member 42c rises so as to be pulled up by the belt L1. When the lifting member 42c rises, the pulley 47b attached thereto rises, and the lifting member 42b rises so as to be pulled up by the belt L2. When the lifting member 42b rises, the pulley 47a attached thereto rises, and the lifting member 42a rises so as to be pulled up by the belt L3. Thus, the upper arm 31a and the lower arm 31b installed above the elevating member 42a can be raised.

Further, the transport device TR is provided by a telescopic elevating mechanism.
When the upper and lower arms 31a and 31b are lowered by contracting the Z-axis drive unit 1, the Z-axis drive unit D
If the support member 48 is moved down by the drive of 1, the elevating members are sequentially lowered in conjunction with each other, and the elevating member serving as the storage member accommodates the elevating member serving as the storage member inside thereof.

The covers 41a to 41d are attached to elevating members 42a to 42d, respectively, and the elevating operation of the covers 41a to 41d is performed by the elevating members 42a to 42d.
It is linked to the operation of 42d.

The θ-axis rotation drive unit D2 is connected to the turntable 4
5 is a driving means for rotating the base 5 about the axis θ of the base 44, and is constituted by a motor or the like. Accordingly, the rotation of the rotary table 45 about the axis θ allows the upper arm 31a and the lower arm 31b to rotate about the axis θ.

Next, the upper arm 31a,
The lower arm 31b will be described. FIG. 6 shows the upper arm 3
It is a figure which shows the structure of 1a and lower arm 31b.

On the stage 35, two upper arms 31a and lower arms 31b having substantially the same structure are mounted. The upper arm 31a and the lower arm 31b each bend and extend along the X axis, and the first arm segments 34a and 34b connected to the distal ends of the respective arms are in the horizontal direction while maintaining their postures with respect to the stage 35, respectively. X
Go straight in the axial direction. The first arm segment 34
a and 34b are connected to the second arm segments 33a and 33b, and the second arm segments 33a and 33b are connected to the third arm segments 32a and 32b. Each arm segment is configured to form a vertical positional relationship in the vertical direction (Z-axis direction) so as not to interfere with each other in the operation of the upper arm 31a and the lower arm 31b. In other words, the upper arm 31a and the lower arm 31b
Are provided at different height positions. Then, if the upper arm 31a and the lower arm 31b are alternately bent and stretched,
The processed substrate W in the processing unit at the front can be taken out, and the unprocessed substrate W can be carried into the processing unit.

Each of the upper arm 31a and the lower arm 31b has a configuration as shown in FIG. FIG. 7 is a side sectional view showing the internal structure of the lower arm 31b. It goes without saying that the upper arm 31a has the same configuration. The lower arm 31b includes a first arm segment 34b on the distal end side on which the substrate W is placed, a second arm segment 33b that rotatably supports the first arm segment 34b in a horizontal plane, and a second arm segment 33b. Arm segment 32b that rotatably supports the third arm segment 32b in a horizontal plane, an X-axis drive unit D3 that rotates the third arm segment 32b in a horizontal plane, and the third arm segment 32b by the X-axis drive unit D3. A power transmitting means 46 is provided which is a bending and stretching mechanism for transmitting power to the second arm segment 33b and the first arm segment 34b when rotated to control the posture and the moving direction.

At the base end of the first arm segment 34b, a first rotating shaft 51 is vertically fixed downward. In addition, a first bearing hole 52 for rotatably bearing the first rotation shaft 51 is formed in the distal end portion of the second arm segment 33b. Further, a second rotating shaft 53 is vertically fixed downward at the base end of the second arm segment 33b. The third arm segment 32b is set to have the same length as the second arm segment 33b, and a second bearing hole 54 for rotatably bearing the second rotation shaft 53 is formed at the distal end thereof. Have been. A third rotating shaft 55 to which the rotational force of the X-axis driving unit D3 is transmitted is vertically fixed to the base end of the third arm segment 32b.

The power transmission means 46 includes a first pulley 61 fixed to the lower end of the first rotation shaft 51 and a second pulley 62 fixed to the second rotation shaft 53 on the upper surface side of the second bearing hole 54. , A first belt 63 suspended between the first pulley 61 and the second pulley 62, a third pulley 64 fixed to a lower end of the second rotating shaft 53, and a third arm segment 32 b
Pulley 65 fixed to the third shaft and loosely fitted with the third rotation shaft 55
And a second belt 66 suspended between the third pulley 64 and the fourth pulley 65.

Here, the diameter of the first pulley 61 and the diameter of the second pulley 62 are set to two to one.
And the diameter of the fourth pulley 65 are set to 1: 2. The distance from the first rotation shaft 51 to the second rotation shaft 53 and the distance from the second rotation shaft 53 to the third rotation shaft 55 are set to the same length R.

FIG. 8 is a diagram conceptually illustrating the operation of the lower arm 31b. The operation will be described with reference to FIGS. 7 and 8. When the X-axis driving unit D <b> 3
When the arm segment 32b is rotated counterclockwise by the angle α, the second rotation shaft 53 bearing at the distal end of the third arm segment 32b makes a third rotation through the second belt 66 and the third pulley 64. It rotates clockwise by twice the angle β = 2α of the shaft 55. As a result, the first rotating shaft 51 supported by the distal end of the second arm segment 33b
Goes straight in the X-axis direction. At this time, the first rotating shaft 51 is
The rotation angle is controlled through the second pulley 62 and the first belt 63. Here, with reference to the second arm segment 33b, the first rotation shaft 51 is one of the second rotation shafts 53.
Although the second arm segment 33b itself is rotated counterclockwise by an angle γ = α twice as large, the first arm segment 34b is rotated by the X-axis driving unit D3. To the X-axis direction while maintaining the posture with respect to.

As described above, the transport device TR1 has a horizontal movement mechanism for moving the upper arm 31a and the lower arm 31b along the horizontal X-axis, and a mechanism for extending and contracting along the vertical Z-axis. The upper arm 31a and the lower arm 31b can be three-dimensionally moved by these mechanisms. The upper arm 31a and the lower arm 31b can move three-dimensionally. It can be transported to any processing unit while it is supported.

<3. Jig used for teaching process>
In the above-described configuration, teaching processing is automatically performed to eliminate a deviation between the upper arm 31a and the lower arm 31b due to an attachment error or the like.

For example, if the upper arm 31a has been adjusted in advance so that it can properly access each processing unit of the unit arrangement section MP and transfer a substrate to and from the processing units, the upper arm 31a If the position information of the lower arm 31b is corrected based on the position information of the lower arm 31a,
The deviation between the upper arm 31a and the lower arm 31b is eliminated, and both the upper and lower arms 31a and 31b can properly access each processing unit.

Then, in order to perform the teaching process,
In this embodiment, two types of jigs are used. Here, these two types of jigs will be described.

First, the first jig (hereinafter referred to as "centering jig") has a structure as shown in FIG. FIG. 9A is a plan view of the centering jig as viewed from above, and FIG. 9B is a plan view of A in FIG. 9A.
It is -A sectional drawing. As shown in FIG. 9, the centering jig includes a thin plate-shaped main body 110 having substantially the same shape as a substrate to be conveyed by the conveyance device, and a main body 11.
And a detection pin 120 provided at a center position of 0. For example, when the substrate to be processed is a disk having a diameter of 300 mm, the main body 110 of the centering jig is also circular with a diameter of 300 mm. However, the present invention is not limited to such a shape, and any shape may be used as long as the upper and lower arms 31a and 31b can be held. Any shape may be used as long as it corresponds to the arrangement of the substrate support portion of each arm that actually contacts and supports the substrate. For example, the shape may be along the outer shape of the substrate.

Above the detection pin 120, a columnar detection part 122 having a predetermined diameter is provided. Further, the joint between the detection pin 120 and the main body 110 has a predetermined diameter smaller than the diameter of the detected part 122, and a concave portion 121 is formed between the main body 110 and the detected part 122. I have. Note that the shapes and dimensions of the detected portion 122 and the concave portion 121 of the detection pin 120 are determined in advance.

Next, the second jig (hereinafter referred to as "sensing jig") has a configuration as shown in FIG. FIG. 10A is a plan view of the sensing jig as viewed from above, and FIG. 10B is a cross-sectional view taken along a line BB in the plan view of FIG.

As shown in FIG. 10, the sensing jig is
Like the centering jig, it has a thin plate-shaped main body 210 having a circular shape substantially the same shape as the substrate. The main body 210 is provided with a circular opening 220 having a predetermined diameter. The center of the opening 220 and the main body 21
It is configured to coincide with the center of 0. The main body 210 of the sensing jig is not limited to a circular shape as long as it can hold the upper and lower arms 31a and 31b.
a, 31b may be any shape as long as the shape corresponds to the arrangement of the substrate support of each arm that supports the substrate by actually contacting the peripheral edge of the back surface of the substrate. Shape may be sufficient.

The main body 210 has a light projecting section 23
1 and 241 and light receiving units 232 and 242 are provided. One light sensor is formed by the light projecting unit 231 and the light receiving unit 232, and similarly, another one is formed by the light projecting unit 241 and the light receiving unit 242.
To form two optical sensors. The dotted lines shown in FIG. 10 indicate the optical axes of these optical sensors, and the two optical axes of the two optical sensors are configured to be orthogonal to each other at the center of the opening 220. These optical axes are shown in FIG.
As shown in (b), it is provided at a position substantially flush with the lower surface of the main body 210. When the upper arm 31a or the lower arm 31b transports the sensing jig, the sensing jig is transported while holding the lower surface of the main body 210. The same applies to the actual transfer of the substrate to be processed. Therefore, the position detected by the optical sensor coincides with the lower surface of the substrate.

The light projecting units 231 and 241 and the light receiving unit 23
2, 242 connected to drive
0 is connected to a connector provided on the upper arm 31a or the lower arm 31b.

<4. Control Mechanism of Transfer Apparatus for Performing Teaching Process> Next, the upper arm 31a and the lower arm 31
A control mechanism for performing the teaching process for eliminating the deviation from b will be described. FIG. 11 is a block diagram illustrating a control mechanism for performing a teaching process. In addition,
FIG. 11 shows that the above-described sensing jig includes the upper arm 31.
a or a block diagram in the case of being installed on the lower arm 31b.

As shown in FIG. 11, the control unit 100 includes a CPU 101 for issuing a drive command for the upper arm 31a and the lower arm 31b, and an RO in which a program is written in advance.
M102, a RAM 103 for storing user programs, position information, and the like, an interface 104, and a servo control unit 105. Then, the ROM 102, RA
M103, interface 104 and servo controller 10
5 are all connected to the CPU 101.

The interface 104 includes the connector 27
0 is connected to the optical sensors 230 and 240 of the sensing jig. The optical sensor 230 is an optical sensor including a light projecting unit 231 and a light receiving unit 232, and the optical sensor 240 is an optical sensor including a light projecting unit 241 and a light receiving unit 242.

The servo control unit 105 includes a Z-axis driving unit D1,
θ-axis rotation drive unit D2, X-axis drive unit D3, and encoder E
1, E2 and E3. Here, the encoder E1 indicates the driving amount of the Z-axis driving unit D1, and the encoder E2 indicates the driving amount of θ.
The encoder E3 is provided to detect the drive amount of the shaft rotation drive unit D2, and the encoder E3 is provided to detect the drive amount of the X-axis drive unit D3. Therefore, each encoder E1, E2, E3
Is obtained via the servo control unit 105,
The CPU 101 can detect the operated displacement amount of the transport device TR1, and thereby, the CPU 101 can obtain the position information of each arm. In addition, the CPU 10
1 can control the drive of the transport device TR1 by outputting the respective drive amounts of the Z axis, the θ axis, and the X axis to the servo control unit 105.

Further, the CPU 101 is provided with a display unit 111 for displaying information to the operator, and an operation input unit 112 for the operator to input a processing command or the like.

Further, the CPU 101 is also connected to each of the spin units (SC1, SC2, SD1, SD2, SS). Each spin unit is provided with a suction sensor CS for detecting that the substrate has been sucked by the spin chuck unit. The CPU 101 is configured to be able to monitor the output of the suction sensor CS of each spin unit.

<5. Teaching process 1> Transport device TR
1 upper arm 31a and lower arm 31b are connected to any spin unit (coating processing unit SC1, SC1) of the substrate processing apparatus.
SC2, the development processing units SD1 and SD2, or the cleaning processing unit SS) are stored in advance for each coordinate. Originally, the upper arm 31a
And the coordinates of the lower arm 31b are set to be the same position on the data, but the access position of each arm is They are not the same and produce deviations. Teaching is performed to eliminate this deviation.

The teaching process for eliminating the deviation between the upper arm 31a and the lower arm 31b of the transport device TR1 is performed in an arbitrary spin unit. And
The centering jig is held by one of the upper arm 31a and the lower arm 31b, and the centering jig is transferred to an arbitrary spin unit. Then, with the sensing jig installed on the other arm, the other arm is extended with respect to the spin unit, and the optical sensors 230, 24
Position information is taken in based on the output of 0. Then, the position information of one arm is corrected based on the position information obtained from the optical sensors 230 and 240, and the deviation between the upper arm 31a and the lower arm 31b is eliminated. Hereinafter, details of such teaching processing will be described. Hereinafter, a case will be described in which the upper arm 31a is appropriately adjusted in advance, and the lower arm 31b is fitted to the upper arm 31a.

In the teaching processing in this embodiment, first, as shown in FIG.
0) is performed, and then the actual automatic teaching processing is performed.

The pre-processing (step S100) is performed according to a procedure as shown in FIG. As shown in FIG. 13, first, the operator inputs a command for executing the teaching process from the operation input unit while confirming the display content of the display unit 111 (step S101). At this time, a spin unit for performing the teaching process is selected and specified.

Then, the CPU 101 issues a command to the servo controller 105 to extend the upper arm 31a to the designated spin unit. Here, the operation of extending the upper arm 31a and the lower arm 31b of the transport device TR1 with respect to each spin unit is limited to two height positions.

The two height positions are a height position PH and a height position PL shown in FIG. For example, when installing the substrate W on the spin chuck unit 115 of the spin unit,
The arm is extended while holding the substrate W at the height position PH. Then, the substrate W is transferred to the spin chuck 115 at the height position PM by lowering the arm. Thereafter, the arm is further lowered, and the arm extended at the height position PL is contracted and returned. Conversely, the spin chuck 1
In order to take out the substrate W above the arm 15, the arm is extended at the height position PL, and then the arm is raised.
Receives the substrate W. And raise the arm further,
The arm on which the substrate W is placed at the height position PH is contracted and returned to the original position. The height position PM is the height position of the back surface (lower surface) of the substrate W when the substrate W is suction-held by the spin chuck unit 115.

Therefore, the servo control unit 105
When the above command is received from 01, the Z-axis drive unit D1 is driven so that the upper arm 31a is at the height position PH, and the X-axis drive unit D3 corresponding to the upper arm 31a is driven to move the upper arm 31a. Extend (Step S10
2).

Then, in step S103, the operator sets a sensing jig on the upper arm 31a extended to the designated spin unit. At this time, the optical sensor 230 or 240 of the sensing jig is installed such that one optical axis substantially coincides with the X-axis direction in which the upper arm 31a bends and stretches. Thus, the optical axis of the other optical sensor substantially coincides with the tangential direction of the circular motion about the θ axis. Here, the optical sensor 230 is set so that the optical axis thereof substantially coincides with the X-axis direction, and the optical axis of the optical sensor 240 substantially coincides with the tangential direction of a circle centered on the θ axis. When the operator sets the sensing jig on the upper arm, the operator inputs from the operation input unit 112 that the sensing jig has been set.

Then, the CPU 101 sets the upper arm 31a.
And then instructs the servo controller 105 to extend the lower arm 31b. The servo control unit 105
By driving the X-axis drive unit D3 corresponding to the upper arm 31a based on the command from the PU 101, the upper arm 3
1a is contracted and returned to the original position, and the Z-axis drive unit D1 is driven so that the lower arm 31b is at the height position PH.
The X-axis driving unit D3 corresponding to the lower arm 31b is driven to extend the lower arm 31b above the spin chuck unit 115 (Step S104).

Then, in step S105, the operator sets the centering jig on the lower arm 31b extended to the designated spin unit. At this time, the detection pin 120 of the centering jig is installed so as to be higher than the main body 110.

Since the preprocessing involving the operator has been described above, the operator inputs from the operation input unit 112 that the preprocessing has been completed in order to actually start the automatic teaching processing (step S106).

The above preprocessing (step S100)
In the operation performed by the operator, the operation input unit 112
Since it is only necessary to input a command and set a jig on each arm, the skill of the operator is not required at all.

The pre-processing (step S10)
When 0) is completed, the automatic teaching process (step S200) in FIG. 12 is started. In the automatic teaching process (step S200), the processes shown in FIG. 15 are sequentially performed.

By the processing up to this point, the lower arm 31b is extended with respect to the designated spin unit.
A centering jig is set on the lower arm 31b. Then, in this state, the CPU 101 instructs the spin unit to start the suction operation by the spin chuck unit 115 (step S201).

Then, in step S202, the CP
U101 issues a command to drive the Z-axis drive unit D1, lowers the lower arm 31b, monitors the output of the suction sensor CS of the spin unit, and turns the output “ON”.
Wait until Here, the output of the adsorption sensor CS is “O
The value "N" is obtained when the spin chuck 115 sucks and holds the centering jig. Therefore, when the output of the suction sensor indicates "ON", the lower surface of the centering jig conveyed by the lower arm 31b is at the height position PM.

Therefore, when the CPU 101 receives a report of "ON" from the suction sensor CS in step S203, the CPU 101 stops the Z-axis driving unit D1, and in step S204, based on the information from the encoder E3, determines the current position of the Z-axis. It is stored in the RAM 103 as information ZP. This position information ZP is the height position PM of the lower arm 31b.
Is shown.

Thereafter, the lower arm 31b is further lowered to the height position PL, and the lower arm 31b is returned to the original return position (step S205). By this operation, the centering jig is brought into a state of being sucked and held by the spin chuck portion 115 of the designated spin unit.

Up to this point, the procedure for automatically operating the lower arm 31b has been described. In the processing of steps S201 to S205, the CPU 101 functions as the first control means. Thereafter, the procedure is to automatically operate the upper arm 31a.

In step S205, CPU 101
Is the upper arm 31 holding the sensing jig
a is raised to the height position PH, and a command is issued to extend the upper arm 31a. The servo control unit 105 includes the CPU 10
1 and the upper arm 31 based on a command from
The X-axis driving unit D3 corresponding to a is driven.

Then, in step S207, the CP
U101 commands the servo control unit 105 to lower the upper arm 31a by a predetermined amount. Servo control unit 105
Lowers the upper arm 31a holding the sensing jig based on a command from the CPU 101. Here, the predetermined amount by which the upper arm 31a is lowered is determined by the detection pin 120 of the centering jig having two optical sensors 230 and 240.
The amount is such that the optical axis of the light is blocked. Therefore, by executing step S207, the centering jig and the sensing jig have a positional relationship as shown in FIG. As shown in FIG. 16A, in step S207, the state is such that the detection pin 120 of the centering jig enters the opening 220 provided in the sensing jig, and the light emitted from the light emitting units 231 and 241 is detected. The light is blocked by the pin 120 and no light is received by the light receiving units 232 and 242. When this state is viewed from the side in the CC section, it becomes as shown in FIG. Note that in the optical sensors 230 and 240, the output is “OFF” when the light receiving units 232 and 242 are receiving light from the respective light projecting units 231 and 241; It is assumed that

In step S207, if one of the two outputs of the optical sensors 230 and 240 is "OFF" when the upper arm is lowered, an alarm is issued and the operator is taught. Informs that processing cannot be continued, and ends the processing. In this case, the operator restarts the teaching process after reattaching each arm and the like. Such a restart has to be performed when the mounting of each arm or the like is largely displaced. Therefore, normally, the outputs of the two optical sensors 230 and 240 are “ON”, and such a restart is performed. It does not mean an alarm / stop, and the process proceeds to step S210.

At the time when step S207 is completed, the transport device TR1 is in a state as shown in FIG.

Then, in step S210, position information on the θ axis is detected. Specifically, the position information of the θ axis is detected by a procedure as shown in FIG. First, step S
At 211, the CPU 101
Command to move the θ-axis in the + θ direction at a low speed. Accordingly, the servo control unit 105 starts driving the θ axis in the + θ direction. As shown in FIG. 17, the upper arm 31a
Moves in the + θ direction, the detection pin 120 blocking the optical axis of the optical sensor 230 moves relatively in the −θ direction, and eventually the output of the optical sensor 230 becomes “OFF”. Therefore, the CPU 101 monitors the output of the optical sensor 230 until it detects that the output of the optical sensor 230 is “OFF”.

Then, in step S212, when the output of the optical sensor 230 is turned “OFF”, the servo controller 105 is instructed to stop the θ axis. The servo control unit 105 sends the θ-axis rotation drive unit D2
To stop.

Then, in step S213, the CP
U101 acquires the current position of the θ axis obtained from the encoder E2 via the servo control unit 105, and obtains position information θF
And stored in the RAM 103.

The processing up to this point will be described with reference to FIG.
FIG. 19 is an enlarged view of the detection pin 120 of the centering jig. As shown in FIG. 19, first, the light (detection point) from the light projecting unit 231 of the optical sensor 230 is applied to the detection pin 1
20 is located at the position indicated by G1 of the detected part 122.
This detection point moves in the + θ direction as the upper arm 31a moves in the + θ direction. And the optical sensor 23
The position information θF obtained when 0 is “OFF” is shown in FIG.
9 shows the right edge position in FIG.

Next, in step S214, the CP
U101 commands the servo control unit 105 to return the position of the θ-axis of the upper arm 31a. For example, since the radius of the detected portion 122 is known in advance, the detected portion 122 is moved in the −θ direction by an amount corresponding to the radius. Then, the optical sensor 2
The 30 detection points return to the position of G1 of the detected portion 122.

Alternatively, the amount of movement in the + θ direction to obtain the position information θF may be detected, and the amount of movement in the −θ direction may be equal to the amount of movement in the + θ direction. This also returns to the position of G1 before the movement in the + θ direction.

After the θ axis is returned in this way, in step S215, the upper arm 31a is moved in a direction opposite to that in step S211. The CPU 101 issues a command to the servo control unit 105 to move the θ axis at a low speed in the −θ direction. As a result, the servo control unit 105 starts driving the θ axis in the −θ direction. Then, the CPU 101 monitors the output of the optical sensor 230 until it detects that the output of the optical sensor 230 is “OFF”.

When the output of the optical sensor 230 is turned "OFF" in step S216, the CPU 1
01 instructs the servo control unit 105 to stop the θ axis. The servo control unit 105 sends θ
The shaft rotation drive unit D2 is stopped.

Then, in step S217, the CP
U101 acquires the current position of the θ axis obtained from the encoder E2 via the servo control unit 105, and obtains the position information θR
And stored in the RAM 103.

In the processing in steps S215 to S217, as shown in FIG. 19, as the upper arm 31a moves in the -θ direction, the detection point at the position indicated by G1 of the detected portion 122 becomes -θ. Move in the direction. Then, the position information θ obtained when the optical sensor 230 is turned “OFF”
R indicates the left edge position in FIG.

Then, in step S218, the CP
U101 sets the position of the θ axis to ｛θR + (θF−θR) /
Move to position 2 位置. This position is the center of the detected part 122. Therefore, step S218
Is performed, the light from the light projecting unit 231 is applied to the central part of the detected part 122. Thus, the process of detecting the position information of the θ axis in step S210 of FIG. 15 is completed.

Then, in step S220, the X-axis position information is detected. Specifically, FIG.
The position information of the X axis is detected by the procedure shown in FIG. First, in step S221, the CPU 101 issues a command to the servo control unit 105 to move the upper arm 31a in the + X direction at a low speed. Accordingly, the servo control unit 105 drives the X-axis driving unit D3 corresponding to the upper arm 31a, and starts driving the upper arm 31a in the + X direction (that is, the direction in which the upper arm 31a is extended). As shown in FIG. 17, when the upper arm 31a moves in the + X direction, the detection pin 120 blocking the optical axis of the optical sensor 240 relatively moves to-.
It will move in the X direction, and eventually the output of the optical sensor 240 will be “OFF”. Therefore, the CPU 101 monitors the output of the optical sensor 240 until it detects that the output of the optical sensor 240 is “OFF”.

Then, in step S222, when the output of the optical sensor 240 becomes "OFF", the servo controller 105 is instructed to stop the movement of the upper arm 31a in the + X direction. The servo control unit 105 stops the X-axis driving unit D3 corresponding to the upper arm 31a according to this command.

Then, in step S223, the CP
U101 is the upper arm 31 obtained from the encoder E3.
The current position on the X axis for a is acquired via the servo control unit 105 and stored in the RAM 103 as position information XF.

The processing up to this point will be described with reference to FIG. 19. First, the detection point of the optical sensor 240 is located at the position indicated by G1 of the detection target 122 on the detection pin 120. This detection point moves in the + X direction as the upper arm 31a moves in the + X direction. The position information XF obtained when the optical sensor 240 is turned “OFF”
Indicates the left edge position in FIG.

Next, in step S224, the CP
U101 instructs the servo control unit 105 to return the position of the X-axis of the upper arm 31a. Also in this case, as in the case of the θ axis, for example, the radius of the detected portion 122 is known in advance, and thus, the amount corresponding to the radius is −X
Move in the direction. Then, the detection point of the optical sensor 240 returns to the position G1 of the detected portion 122.

Alternatively, the amount of movement in the + X direction to obtain position information XF may be detected, and the amount of movement in the −X direction may be equal to the amount of movement in the + X direction. This also returns to the position of G1 before the movement in the + X direction.

After returning the X axis in this way, in step S225, the upper arm 31a is moved in the direction opposite to that of step S221 (that is, in the -X direction). C
PU 101 controls upper arm 3 with respect to servo control unit 105.
1a is issued at a low speed in the -X direction. Accordingly, the servo control unit 105 drives the X-axis driving unit D3 corresponding to the upper arm 31a, and starts driving the upper arm 31a in the −X direction (that is, the direction in which the upper arm 31a contracts). Then, the CPU 101 determines whether or not the output of the optical sensor 240 is “OFF”.
Monitor the output of

When the output of the optical sensor 240 is turned "OFF" in step S226, the CPU 1
01 instructs the servo control unit 105 to stop the upper arm 31a. The servo control unit 105 stops the X-axis driving unit D3 corresponding to the upper arm 31a according to this command.

Then, in step S227, the CP
U101 is the upper arm 31 obtained from the encoder E3.
The current position of the X axis for a is acquired via the servo control unit 105 and stored in the RAM 103 as position information XR.

In the processing in steps S225 to S227, as shown in FIG. 19, as the upper arm 31a moves in the −X direction, the detection point at the position indicated by G1 of the detection target 122 becomes −X Move in the direction. Then, the position information X obtained when the optical sensor 240 is turned “OFF”
R indicates the right edge position in FIG.

Then, in step S228, the CP
U101 sets the position of the X axis to [｛XR + (XF−XR) /
2｝ -k]. Here, using the radius r of the detection pin 120 in the concave portion 121 and the radius R in the detected portion 122, the constant k is a number that satisfies “r <k <R”. Accordingly, when the upper arm 31a is moved to the position shown in step S228, the light from the light projecting unit 241 is applied to the position G2 shown in FIG.
Thus, the process of detecting the X-axis position information in step S220 in FIG. 15 is completed.

Next, in step S230, position information of the Z axis is detected. Specifically, FIG.
The Z-axis position information is detected by the procedure shown in FIG. First, in step S231, the CPU 101 issues a command to the servo control unit 105 to lower the upper arm 31a at a low speed. As a result, the servo control unit 105
The Z-axis drive unit D1 is driven to start driving in the direction of lowering the upper arm 31a (that is, the −Z direction shown in FIG. 19). When the upper arm 31a moves in the -Z direction, the output of the optical sensors 230 and 240 will be turned "OFF". Here, the timing at which both optical sensors 230 and 240 are turned “OFF” is substantially the same. Therefore, the CPU 101 monitors the output of the optical sensor 240 until it detects that the output of one of the optical sensors 230 and 240 is “OFF”. In this embodiment, the optical sensor 230
Shall be monitored.

Then, in step S232, when the output of the optical sensor 230 is turned "OFF", the servo controller 105 is instructed to stop the movement in the -Z direction. The servo control unit 105 stops the Z-axis drive unit D1 according to this command.

Then, in step S233, the CP
U101 is an upper arm 31 obtained from the encoder E1.
The current position of the Z axis for a is acquired via the servo control unit 105 and stored in the RAM 103 as position information ZR.

The processing up to this point will be described with reference to FIG. 19. First, the detection point of the optical sensor 230 is located at the position indicated by G2 of the detection target 122 on the detection pin 120. This detection point moves in the -Z direction as the upper arm 31a moves in the -Z direction. Then, the position information ZR obtained when the optical sensor 230 is turned “OFF”
Indicates the lower edge position of the detected portion 122 in FIG.

Next, in step S234, the CP
U101 instructs the servo control unit 105 to return the position of the upper arm 31a on the Z axis. For example, since the height of the detected portion 122 is known in advance, the detected portion 122 is moved in the + Z direction by an amount corresponding to の of the height. Then, the detection point of the optical sensor 230 returns to the position of G2 of the detected part 122.

Alternatively, the amount of movement in the −Z direction to obtain position information ZR may be detected, and the amount of movement in the + Z direction may be equal to the amount of movement in the −Z direction. . This also returns to the position of G1 before the movement in the -Z direction.

After the Z-axis is returned in this way, in step S235, the upper arm 31a is moved in the direction for raising (ie, the + Z direction). CPU 101
Issues an instruction to the servo controller 105 to move the upper arm 31a in the + Z direction at a low speed. As a result, the servo control unit 105 drives the Z-axis driving unit D1, and the upper arm 3
1a starts to be driven in the + Z direction. And the CPU 101
Monitors the output of the optical sensor 230 until it detects that the output of the optical sensor 230 is “OFF”.

When the output of the optical sensor 230 is turned "OFF" in step S236, the CPU 1
01 instructs the servo control unit 105 to stop the movement about the Z axis. The servo control unit 105 stops the Z-axis drive unit D1 according to this command.

Then, in step S237, the CP
U101 is an upper arm 31 obtained from the encoder E1.
The current position of the Z axis for a is acquired via the servo control unit 105 and stored in the RAM 103 as position information ZF.

In the processing in steps S235 to S237, as shown in FIG. 19, as the upper arm 31a moves in the + Z direction, the detection point at the position indicated by G2 of the detected portion 122 is moved in the + Z direction. Moving. Then, the position information Z obtained when the optical sensor 230 is turned “OFF”
F indicates the upper edge position of the detected part 122 in FIG. This is the end of the processing for detecting the Z-axis position information in step S230 in FIG.

Note that steps S206 to S206 in FIG.
When performing the process of S230, the CPU 101 functions as a second control unit.

Steps S210 and S22 shown in FIG.
0, the positional information on the θ axis, the X axis, and the Z axis obtained in S230 is based on the sensing jig mounted on the upper arm 31a with the detection pin 120 of the centering jig mounted on the spin chuck 115 by the lower arm 31b. Information detected by the tool. The upper arm 31a is appropriately adjusted in advance as described above. Therefore, the position information about each axis can be said to be the position information about the lower arm 31b expressed with the appropriate position information of the upper arm 31a. Therefore, the position information of the lower arm 31b can be corrected based on the position information about the θ axis, the X axis, and the Z axis.

Therefore, as shown in FIG. 15, in the next step S240, a deviation correction calculation process is performed to correct the lower arm 31b. Specifically, the appropriate position value (coordinate) at the height position PM when the upper arm 31a places the substrate on the spin chuck unit 115 is (Xa, Za,
θa), and assuming that the deviation that the lower arm 31b has with respect to the upper arm 31a is (ΔX, ΔZ, Δθ), ΔX, Δ
Z and Δθ are respectively

[0121]

(Equation 1)

[0122]

(Equation 2)

[0123]

(Equation 3)

Is represented as Here, the constant h in Equation 2 is a difference between the height positions where the upper arm 31a and the lower arm 31b are attached. Therefore, the constant h is a known value such as 30 mm because it is set in advance in design. Also, regarding ΔZ, in addition to Equation 2,

[0125]

(Equation 4)

However, it can be obtained. In Equation 4,
The constant d is a height from the lower surface of the main body 110 of the centering jig to the center of the detection portion 122 of the detection pin 120.

Then, in step S240, the CPU
Reference numeral 101 denotes a function as a calculating means, and position information ZP, θF, θR, XF, XR, ZR, ZF stored in the RAM 103.
Are read out, and these are calculated based on Equations 1 to 4 to obtain the lower arm 31b in each axial direction.
Deviations ΔX, ΔZ, Δθ can be obtained.

Equation 1 is an equation for determining how much the X-axis deviation between the center of the centering jig and the center of the upper arm 31a when the centering jig is set on the lower arm 31b.

Equation 2 indicates that the height position when the centering jig is actually installed on the lower arm 31b is equal to the upper arm 31.
This is a formula for determining how much a deviation from the appropriate position value of “a” takes into account the positional relationship between the upper and lower arms.

Equation 3 is similar to Equation 1 in that lower arm 3
Numeral 1b is an equation for determining how much the center of the centering jig and the center of the upper arm 31a when the centering jig is installed has a deviation with respect to the θ axis.

Further, in Equation 4, ΔZR + (ZF−
ZR) / 2−d｝ is obtained by subtracting the height of the detected portion 122 from the center. When the centering jig is placed on the spin chuck portion 115 by the lower arm 31b, the position of the detected portion 122 shifts in the horizontal plane according to the deviation of the lower arm 31b, but does not shift in the Z-axis direction. Therefore, {ZR + (ZF−ZR) / 2−d} in Equation 4 is the height position PM (ie, Za) of the upper arm 31a.
Is represented by an operation. Therefore, Equation 4 is an equation for determining how much the height position PM of the lower arm 31b and the height position PM of the upper arm 31a when the lower arm 31b is provided with the centering jig has a deviation about the Z axis. It is.

Here, in the case where the deviation about the Z axis is calculated using Equation 2, the deviation of the Z axis is obtained without performing the Z axis position information detection processing in step S230 shown in the flowchart of FIG. You can do it.

As described above, after deriving the deviation of the lower arm 31b with respect to the upper arm 31a with respect to the θ axis, the X axis, and the Z axis, the CPU 101 functions as a correction unit, and calculates the deviation of each axis by the lower arm 31b. Is registered as an offset value when driving. The registration of the offset value may be performed by a main controller (not shown) that can communicate with the control unit 100 and manages the entire substrate processing apparatus.

When the above processing is completed, the sensing jig and the centering jig are arbitrarily removed. Then, the teaching process ends.

By performing the processing described above, the burden on the operator can be reduced, and the deviation between the upper and lower arms can be eliminated accurately and efficiently in a short time.

<6. Teaching process 2> By the way, in the above-described teaching process, when driving the upper arm 31a for each axis, it is necessary to drive at a low speed in order to accurately obtain each position information. Further, since the upper arm 31a is moved only in one direction in order to obtain each position information, the detected portion 122 may be moved due to a slight displacement of the optical axis or the like.
Edge may shift. Therefore, in order to perform the above-described teaching process more efficiently and accurately, the following method may be performed.

The overall processing procedure of the teaching processing is as follows.
This is the same as the flowchart of FIG. And FIG.
Steps S210, S220, S230, S24
0, the position information is fetched without stopping the upper arm 31a, and the detected portion 12
The upper arm 31a is reciprocated in the plus direction and the minus direction along a predetermined trajectory crossing each of the two pairs of edges to acquire the position information of four points. By averaging the position information of these four points, the detection pin 12
By guiding the center of 0 and the lower surface of the centering jig, the speed can be increased and the accuracy can be increased.

In this case, step S210 shown in FIG.
The process of detecting the position information of the θ axis of the above has a procedure as shown in FIG. First, in step S311, the upper arm 31a is moved in the −θ direction about the θ axis, and the output of the optical sensor 230 is turned “OFF”. Then, the upper arm 31a is further moved in the −θ direction by about 5 mm from the position where the optical sensor 230 is turned “OFF”. Therefore, the detection point by the optical sensor 230 is G3 shown in FIG.
Will be located.

Then, in step S312, the upper arm 31a is started to move in the + θ direction, and the position where the optical sensor 230 is turned “ON” is set as the position information θF1 in the RAM 103.
To be stored. The position of θF1 at this time is the left edge position of the detected portion 122 shown in FIG. Even when the position information θF1 is taken in, the upper arm 31a continues to move in the + θ direction.

Then, in step S313, the position where the optical sensor 230 is turned “OFF” is stored in the RAM 103 as position information θF2. The position of θF2 at this time is
This is the right edge position of the detected part 122 shown in FIG. This means that edge detection in the forward direction has been performed on a pair of edges of the detected portion 122. When the position information θF1 is taken in, the upper arm 31
a keeps moving in the + θ direction.

Then, in step S314, the optical sensor 230 is moved by about 5 mm from the position where the optical sensor 230 was turned "OFF". If the turning point when the upper arm 31a is reciprocated is the position where the optical sensor 230 is "OFF", the ON / OFF switching point of the optical sensor 230 becomes the turning point, which is not preferable. Therefore, 5 mm from the position where the optical sensor 230 was turned "OFF" in step S314.
It is to be moved to the extent, and is not limited to 5 mm.

In step S315, the upper arm 31a starts moving in the -θ direction, and the position where the optical sensor 230 is turned “ON” is set as the position information θR1 in the RAM 103.
To be stored. The position of θR1 at this time is the right edge position of the detected part 122 shown in FIG.

The upper arm 31a keeps moving in the -θ direction,
In step S316, the optical sensor 230 sets “OF”
The position “F” is stored in the RAM 103 as position information θR2. The position of θR2 at this time is the left edge position of the detected part 122 shown in FIG. This means that edge detection in the opposite direction has been performed on the pair of edges of the detected portion 122.

Then, in step S317, the position of the upper arm 31a with respect to the θ axis is set to ｛(θF1 + θF2
+ ΘR1 + θR2) / 4 °. This position is the center position of the detected part 122 as can be seen from FIG.

As described above, step S shown in FIG.
The process of detecting the position information of the θ axis 210 is ended.

Next, at step S220 shown in FIG.
The process of detecting the position information of the axis has a procedure as shown in FIG. First, in step S321, the upper arm 31a is moved in the −X direction about the X axis,
The output of 40 is set to “OFF”. And the upper arm 31
a is 5 from the position where the optical sensor 240 is “OFF”.
It is further moved in the −X direction by about mm. Therefore, the detection point by the optical sensor 240 is located at the position G3 shown in FIG. 23, as in the case of the θ axis.

Then, in step S322, the upper arm 31a is started to move in the + X direction, and the position where the optical sensor 240 is turned "ON" is set as the position information XF1 in the RAM 103.
To be stored. The position of XF1 at this time is the left edge position of the detected part 122 shown in FIG. Even when the position information XF1 is taken in, the upper arm 31a keeps moving in the + X direction.

Then, in step S323, the position where the optical sensor 240 is turned "OFF" is stored in the RAM 103 as position information XF2. The position of XF2 at this time is
This is the right edge position of the detected part 122 shown in FIG. This means that edge detection in the forward direction has been performed on a pair of edges of the detected portion 122. When the position information XF1 is taken in, the upper arm 31 is also used.
a keeps moving in the + X direction. Then, step S32
5 from the position where the optical sensor 240 was turned “OFF” in 4
Move about mm.

Then, in step S325, the upper arm 31a starts moving in the -X direction, and the position where the optical sensor 240 is turned "ON" is set as the position information XR1 in the RAM 103.
To be stored. The position of XR1 at this time is the right edge position of the detected part 122 shown in FIG.

The upper arm 31a continues to move in the -X direction,
In step S326, the optical sensor 240 outputs “OF
The position of “F” is stored in the RAM 103 as position information XR2. The position of XR2 at this time is the left edge position of the detected part 122 shown in FIG. This means that edge detection in the opposite direction has been performed on the pair of edges of the detected portion 122.

In step S327, the position of the upper arm 31a with respect to the X axis is set to ｛(XF1 + XF2
+ XR1 + XR2) / 4−k}. Here, k is the same as above.

As described above, step S shown in FIG.
The process of detecting the X-axis position information at 220 ends.

Next, Z in step S230 shown in FIG.
The process of detecting the position information of the axis has a procedure as shown in FIG. First, in step S331, the upper arm 31a is moved in the −Z direction about the Z axis,
30 is set to “OFF”. And the upper arm 31
a is 5 from the position where the optical sensor 230 is “OFF”.
It is moved further in the −Z direction by about mm. Therefore, the detection point by the optical sensor 230 is located at the position G4 shown in FIG.

Then, in step S332, the upper arm 31a is started to move in the + Z direction, and the position where the optical sensor 230 is turned “ON” is set as the position information ZF1 in the RAM 103.
To be stored. The position of ZF1 at this time is the lower edge position of the detected part 122 shown in FIG. Even when the position information ZF1 is taken in, the upper arm 31a keeps moving in the + Z direction.

Then, in step S333, the position where the optical sensor 230 is turned “OFF” is stored in the RAM 103 as position information ZF2. The position of ZF2 at this time is
This is the upper edge position of the detected part 122 shown in FIG. This means that edge detection in the forward direction has been performed on a pair of edges of the detected portion 122. When the position information ZF1 is taken in, the upper arm 31 is also used.
a keeps moving in the + Z direction. Then, step S33
5 from the position where the optical sensor 230 was “OFF” in 4
Move about mm.

Then, in step S335, the upper arm 31a starts to move in the -Z direction, and the position where the optical sensor 230 is turned "ON" is set as the position information ZR1 in the RAM 103.
To be stored. The position of ZR1 at this time is the upper edge position of the detected part 122 shown in FIG.

The upper arm 31a continues to move in the -Z direction,
In step S336, the optical sensor 230 sets “OF”
The position of “F” is stored in the RAM 103 as position information ZR2. The position of ZR2 at this time is the lower edge position of the detected part 122 shown in FIG. This means that edge detection in the opposite direction has been performed on the pair of edges of the detected portion 122.

As described above, step S shown in FIG.
The process of detecting the Z-axis position information at 230 ends. By the above-described processing, four points of position information have been acquired for all of the θ axis, the X axis, and the Z axis.

Then, the next step S24 shown in FIG.
0, a deviation correction calculation process is performed, and the lower arm 31b
Is corrected. Specifically, ΔX, ΔZ, and Δθ are respectively

[0160]

(Equation 5)

[0161]

(Equation 6)

[0162]

(Equation 7)

Are represented as Therefore, step S24
At 0, the CPU 101 stores the 12
By reading out the pieces of position information and calculating them based on Equations 2, 5 to 7, deviations ΔX, ΔZ, Δθ of the lower arm 31b in the respective axial directions can be obtained.

Here, when the deviation on the Z axis is calculated using Equation 2, it is not necessary to obtain the position information for Equation 6, so that the Z axis in Step S230 shown in the flowchart of FIG. The deviation of the Z-axis can be obtained without performing the position information detection processing (the processing in FIG. 25).

Then, the deviation of each axis is
1b is registered as an offset value when driving.

When the position information is taken in while operating the upper arm 31a at a high speed, as shown in FIG. 26, there is a case where the position is slightly shifted from the original ON / OFF position.
For example, considering the θ axis, as shown in FIG.
Assuming that the output of the optical sensor 230 when the upper arm 31a is moved at a high speed in the + θ direction is SGN1, the position where the optical sensor 230 is turned ON / OFF may be delayed from the original position where the ON / OFF should be performed. Similarly, assuming that the output of the optical sensor 230 when the upper arm 31a is moved at a high speed in the -θ direction is SGN2, the ON / OFF position of the optical sensor 230 may be delayed from the original ON / OFF position. is there. Although these also depend on the response characteristics of the optical sensor 230, if the moving speed of the upper arm 31a in the + θ direction and in the −θ direction is made equal, the delay in the + θ direction and in the −θ direction becomes equal.

Therefore, by performing the four-point measurement as described above and deriving the average of the four points, it is possible to eliminate such a delay in the output of the optical sensor. As a result, when such four-point measurement is performed, it is not necessary to use an expensive optical sensor having excellent response characteristics, and the measurement can be performed with high accuracy using a relatively inexpensive optical sensor.

As described above, by performing the four-point measurement for each axis, the upper arm 31a can be moved at a relatively high speed, the teaching process can be speeded up, and the average of the four points is calculated. Therefore, the accuracy in teaching can be improved.

The teaching process as described above is a process for taking in positional information while moving the upper arm 31a, and is a so-called multitask process in which a plurality of tasks can be executed simultaneously. For example,
There are a plurality of tasks such as a task of sequentially executing each step of the program as described above, a task of calculating a command value for the drive units D1 to D3 of each axis in real time, and a task of monitoring the output from the optical sensor in real time. Task is C
By performing the parallel processing by the PU 101, it is possible to capture each position information while moving the upper arm 31a.

By performing the processing described above, the burden on the operator can be reduced, and the deviation between the upper and lower arms can be eliminated accurately and efficiently in a short time.

<7. Modified Example> In the above description, it has been described that the lower arm 31b installs a centering jig on the spin chuck portion 115 of an arbitrary spin unit and the upper arm 31a senses this centering jig. In addition, the upper arm 31a connects the centering jig to the spin chuck portion 11 of an arbitrary spin unit.
5, the centering jig may be sensed by the lower arm 31b.

In addition, it goes without saying that the same result can be obtained even if the plus direction and the minus direction are exchanged for the movement direction of each axis in the above description, and the number of arms is not limited to two. Absent. However, a condition is that a plurality of arms are provided at different height positions.

Further, in the above description, the teaching of the transport device TR1 in the substrate processing apparatus has been described. However, such teaching processing can be applied to transport devices other than the transport device for transporting substrates. That is, as long as the plurality of arms are provided at different heights, the transfer target object to be transferred is not limited to the substrate.

Considering the application of the contents of the teaching process described above, a device in which a plurality of arms are provided at different heights can be applied as a device for simply measuring the positional deviation of the arms. is there.

[0175]

As described above, according to the first aspect of the present invention, the first jig is placed at a predetermined place by the first arm of the plurality of arms, and The position of the first arm at the time of setting is acquired as first position information, and the second jig is moved to the second arm of the plurality of arms.
The second jig is brought close to a first jig placed in a predetermined place until a predetermined relative positional relationship is established, and the second jig is placed in the proximity state. By moving the arm in a plurality of different directions, the first jig is detected in each of the plurality of directions to obtain the second position information, and the second jig is obtained based on the first position information and the second position information. Since the mechanical position deviation of one arm with respect to the second arm is calculated, the deviation between a plurality of arms can be accurately and efficiently obtained in a short time.

According to the second aspect of the present invention, the first jig is mounted on a predetermined place by the first arm of the plurality of arms, and the first jig when the mounting is performed is performed.
The position of the arm is obtained as the first position information, and the second jig is held by the second arm of the plurality of arms, and the first jig placed at a predetermined place is Second
The first jig is detected in each of a plurality of directions by moving the second arm in each of a plurality of different directions in the proximity state until the jig is brought into a predetermined relative positional relationship. To obtain a second position information, calculate a mechanical position deviation of the first arm with respect to the second arm based on the first position information and the second position information, and calculate the mechanical position deviation by the first position information. Since the offset value is set for the arm, the burden on the operator can be reduced, and the deviation between the plurality of arms can be eliminated accurately and efficiently in a short time.

According to the third aspect of the present invention, the second control means causes the detection point of the sensor to move along the forward direction of the predetermined trajectory crossing each of the pair of edges of the detected portion. The second arm is moved to obtain a pair of forward edge detection positions for the pair of edges, and the second arm is moved so that the detection point of the sensor moves along the reverse direction of the predetermined trajectory. To obtain a pair of reverse edge detection positions for a pair of edges,
Since the second position information is obtained based on the pair of forward edge detection positions and the pair of reverse edge detection positions, the second arm can be moved at a high speed and the accuracy can be increased. It is possible to eliminate a deviation between a plurality of arms with high accuracy.

According to the fourth aspect of the present invention, each of the forward direction detecting means and the backward direction detecting means moves the second arm and outputs the detection output of the detected portion by the sensor in parallel with the movement. Since the position information is captured, the position information can be obtained efficiently.

According to the fifth aspect of the present invention, in the substrate processing apparatus, the deviation between a plurality of arms for transferring the substrate between the processing units can be accurately and efficiently eliminated in a short time.

According to the sixth and seventh aspects of the present invention, at least a part of the outer shape of the main body is shaped so as to be positioned and held by the arm. The shape is suitable for

According to the eighth aspect of the present invention, since the main body has a thin plate shape in which at least a part of its outer shape is circular or arcuate, the main body portion carries the substrate in the substrate processing apparatus. It will be suitable for the device.

[Brief description of the drawings]

FIG. 1 is a schematic diagram showing a substrate processing apparatus according to an embodiment of the present invention.

FIG. 2 is a conceptual diagram showing an arrangement configuration of a processing unit of the substrate processing apparatus according to the embodiment of the present invention.

FIG. 3 is an external perspective view of a transfer device provided in the substrate processing apparatus according to the embodiment of the present invention.

FIG. 4 is a side cross-sectional view showing a state where a telescopic elevating mechanism of the transport device according to the embodiment of the present invention is extended.

FIG. 5 is a side cross-sectional view showing a state where a telescopic elevating mechanism of the transport device according to the embodiment of the present invention is contracted.

FIG. 6 is a diagram illustrating a structure of an upper arm and a lower arm of the transfer device according to the embodiment of the present invention.

FIG. 7 is a side sectional view showing the internal structure of the lower arm of the transfer device according to the embodiment of the present invention.

FIG. 8 is a diagram conceptually illustrating the operation of the lower arm of the transport device in the embodiment of the present invention.

FIG. 9 is a diagram showing a centering jig (first jig) according to the embodiment of the present invention.

FIG. 10 is a diagram showing a sensing jig (second jig) according to the embodiment of the present invention.

FIG. 11 is a block diagram showing a control mechanism for performing a teaching process in the embodiment of the present invention.

FIG. 12 is a flowchart showing an overall process of a teaching process in the embodiment of the present invention.

FIG. 13 is a flowchart showing a pre-process of a teaching process in the embodiment of the present invention.

FIG. 14 is a diagram illustrating a height position of the spin chuck unit according to the embodiment of the present invention.

FIG. 15 is a flowchart showing an automatic teaching process of the teaching process according to the embodiment of the present invention.

FIG. 16 is a diagram showing a positional relationship between a centering jig and a sensing jig when acquiring position information in the embodiment of the present invention.

FIG. 17 is a diagram illustrating one state and an operation direction of the transport device during a teaching process according to the embodiment of the present invention.

FIG. 18 is a flowchart illustrating a θ-axis position information detection process of the teaching process according to the embodiment of the present invention.

FIG. 19 is a diagram illustrating a moving direction of a detection point by an optical sensor during a teaching process according to the embodiment of the present invention.

FIG. 20 is a flowchart illustrating X-axis position information detection processing in the teaching processing according to the embodiment of the present invention.

FIG. 21 is a flowchart illustrating Z-axis position information detection processing in the teaching processing according to the embodiment of the present invention.

FIG. 22 is a flowchart showing a θ-axis position information detection process different from FIG. 18 in the teaching process in the embodiment of the present invention.

FIG. 23 is a diagram illustrating a moving direction of a detection point by an optical sensor during a teaching process according to the embodiment of the present invention.

FIG. 24 is a flowchart showing X-axis position information detection processing different from FIG. 20 in the teaching processing in the embodiment of the present invention.

FIG. 25 is a flowchart showing a Z-axis position information detecting process different from FIG. 21 in the teaching process in the embodiment of the present invention.

FIG. 26 is an explanatory diagram showing an output of the optical sensor when the upper arm is moved at a high speed in the embodiment of the present invention.

[Explanation of symbols]

 31a Upper arm 31b Lower arm 100 Control unit 110, 210 Main unit 115 Spin chuck unit 120 Detecting pin 122 Detected unit 230, 240 Optical sensor 231, 241 Light emitting unit 232, 242 Light receiving unit TR1 Transport unit D1 Z-axis driving unit D2 θ axis rotation drive unit D3 X axis drive unit E1, E2, E3 Encoder W board

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Yasuhiko Hashimoto 1-1, Kawasaki-cho, Akashi-shi, Hyogo Kawasaki Heavy Industries, Ltd. Inside the Akashi Plant (72) Inventor Masatoshi Sano 1-1-1, Kawasaki-cho, Akashi-shi, Hyogo Kawasaki Heavy Industries Akashi Factory Co., Ltd.

Claims (8)

[Claims] 1. A plurality of arms are provided at different heights,
An apparatus for measuring a mechanical position deviation of the plurality of arms, comprising: (a) placing a first jig in a predetermined place by a first arm of the plurality of arms; And (b) holding a second jig by a second arm of the plurality of arms. In this state, the second jig is brought close to the first jig placed in the predetermined place until a predetermined relative positional relationship is established, and the second arm is moved in the close state. By moving in a plurality of different directions, the first jig is detected in each of the plurality of directions and acquired as second position information.
Control means; and (c) calculating means for calculating the mechanical position deviation of the first arm with respect to the second arm based on the first position information and the second position information. An arm position deviation measuring device characterized by the above-mentioned. 2. A plurality of arms are provided at different heights,
A transfer device in which the plurality of arms access each position designated by teaching in a predetermined order to transfer an object to be transferred, and (a) a first arm of the plurality of arms controls a first one of the plurality of arms. (B) a second control means for mounting the jig at a predetermined place and acquiring the position of the first arm as the first position information when the mounting is performed; Is held by the second arm of the plurality of arms, and the second jig is placed in a predetermined relative positional relationship with the first jig placed in the predetermined place. By moving the second arm in each of a plurality of different directions in the proximity state, thereby detecting the first jig in each of the plurality of directions and acquiring the first jig as second position information. Second
Control means; (c) calculating means for calculating the mechanical position deviation of the first arm with respect to the second arm based on the first position information and the second position information; (d) Correction means for setting the mechanical position deviation as an offset value for the first arm. 3. The transporting device according to claim 2, wherein at least one of the first and second jigs has a portion to be detected having a predetermined shape formed therein. The other of the first and second jigs is provided with a sensor responsive to the detected part, and the second control means includes: (b-1) a pair of edges of the detected part. The second arm is moved so that a detection point of the sensor moves along a forward direction of a predetermined trajectory crossing each other, and a position when each of the pair of edges is detected by the sensor is set as a pair. (B-2) moving the second arm so that a detection point of the sensor moves along a reverse direction of the predetermined trajectory; Each of a pair of edges is detected by the sensor. Reverse direction detecting means for acquiring the position at which it was performed as a pair of reverse edge detection positions, and (b-3) the second direction based on the pair of forward edge detection positions and the pair of reverse edge detection positions. 2. A transport device comprising: means for obtaining position information. 4. The transport device according to claim 3, wherein each of the forward direction detecting unit and the backward direction detecting unit moves the second arm while moving the second arm in parallel with the movement. A conveyance device characterized by taking in the detection output of the. 5. The transfer device according to claim 2, further comprising a processing unit for performing a predetermined process on the substrate, and a transfer device for transferring the substrate into and out of the processing unit. A substrate processing apparatus comprising: 6. A jig used for obtaining a mechanical positional relationship between a plurality of arms provided with a plurality of arms capable of holding a transferred object at different heights, comprising: a) a main body that can be held by at least one of the plurality of arms; and (b) a detected part formed at a predetermined position of the main body and having a shape that can be detected by a predetermined non-contact sensor,
A jig, wherein at least a part of the outer shape of the main body is shaped to be positioned and held by the arm. 7. A jig used for determining a mechanical positional relationship between a plurality of arms capable of holding an object to be transferred, the plurality of arms being provided at different heights, comprising: a) a main body that can be held by at least one of the plurality of arms, and (b) formed at a predetermined position of the main body, and capable of detecting a position of a predetermined target outside the jig in a non-contact manner. Sensors and
A jig, wherein at least a part of the outer shape of the main body is shaped to be positioned and held by the arm. 8. The jig according to claim 6, wherein the transferred object is a circular substrate, and each of the plurality of arms is an arm that supports an edge of the circular substrate. The jig is characterized in that the main body has a thin plate shape in which at least a part of its outer shape is circular or arcuate.