JPH11163084A - Transfer apparatus, substrate carry-in/carry-out apparatus, substrate processor and jig therefor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To eliminate positional shift of an arm accurately and efficiently in a short time when a carrier is accessed by a transfer apparatus while lessening the burden on the operator. SOLUTION: A centering jig 100 provided with a detection pin 120 of specified shape is set at the specified containing position of a carrier C. The arm 31 of a transfer apparatus provided with a sensing jig 200 enters into the carrier C from the first stage thereof. The sensing jig 200 comprises a photosensor provided with a light projecting part 231, and a photosensor provided with a light projecting part 241 arranged while intersecting the optical axes orthogonally. The arm 31 is then elevated to bring about a state for detecting the detection pin 120 by means of two photosensors. The arm 31 is moved for Y-axis, X-axis and Z-axis, respectively, and positional information is acquired from each photosensor. Positional shift of the arm is eliminated based on the positional information.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a transfer device for transferring a transferred object to a storage container, a substrate loading / unloading device,
The present invention relates to a substrate processing apparatus and a jig used for these apparatuses.

[0002]

2. Description of the Related Art Conventionally, a substrate processing apparatus for processing a thin plate-like substrate (hereinafter, simply referred to as a "substrate") such as a semiconductor wafer or a glass substrate for a liquid crystal is provided with a plurality of processing units. Different processing is performed on each of the substrates in each processing unit. Such a conventional substrate processing apparatus includes:
A transfer device for transferring the substrates is provided, and an arm of the transfer device takes out the substrates one by one from a carrier accommodating a plurality of substrates and transfers the substrates to a processing unit provided with a plurality of processing units.

In such a transfer apparatus, it is necessary for the arm to always access an accurate position with respect to the carrier, transfer the substrate to a predetermined position formed on the carrier, or take out the substrate from the predetermined position. It is said. Here, if the position accessed by the arm is deviated from the correct storage position, the substrate may be damaged or unnecessary particles may adhere to the substrate, which is not preferable.

However, in reality, various errors such as a processing error of a member constituting an arm for holding a substrate, a mounting error when mounting each member, and an assembly error when assembling a transport device are caused. The arm of the transfer device does not access the correct storage position, and shifts from the correct storage position.

[0005] In order to eliminate the positional deviation due to such an error or the like, an operator has conventionally performed a teaching operation on the transfer device before actually transferring the substrate. This teaching operation needs to be performed each time the apparatus is maintained.

[0006]

In the teaching operation of the transfer device in the conventional substrate processing apparatus as described above, the substrate is actually placed on the arm, and the operator manually moves the arm little by little while moving the predetermined amount of the carrier. The arm was approached to the storage position, and adjustment was visually performed. Therefore, the conventional teaching operation is a very troublesome and time-consuming operation. In addition, the accuracy and accuracy of the teaching work are greatly different depending on the experience and technical ability of the operator.

When the carrier is a substrate storage container called a pod (POD) that does not expose the substrate to the outside air, since the airtightness is required, the carrier is configured to have no gap. Therefore, when performing the teaching work visually, it is very difficult to confirm the positional relationship between the arm and the storage position.

As described above, the teaching work imposes a burden on the operator, and the time required for the teaching work and the variation in accuracy are preferable from the viewpoint of operating the substrate processing apparatus efficiently and accurately. Not something.

In view of the above, the present invention has been made in view of the above-mentioned problems, and a transfer apparatus and a substrate loading apparatus capable of reducing the burden on an operator and eliminating the positional deviation accurately and efficiently in a short time. An object is to provide a carry-out device, a substrate processing device, and a jig used for these devices.

[0010]

Means for Solving the Problems In order to achieve the above object, the invention according to claim 1 is a transfer device for storing or taking out an object to be transferred from a storage container by an arm, wherein (a) In a state where the first jig is installed at a predetermined position of the storage container and the arm holds the second jig, the second jig is moved relative to the first jig in a predetermined relative position. A control unit that detects the first jig in each of the plurality of directions and obtains the information as position information by moving the arm in a plurality of different directions in the proximity state until the positional relationship is established; (b) setting means for setting, based on the position information, a reference position when the arm stores or removes the transported object from the storage container.

According to a second aspect of the present invention, in the transport apparatus according to the first aspect, at least one of the first and second jigs has a detected part having a predetermined shape. Is formed, and the other of the first and second jigs is provided with a sensor responsive to the detected portion, and the control means includes: (a-1) a pair of the detected portions; Move the arm so that the detection point of the sensor moves along the forward direction of a predetermined trajectory crossing each of the edges of
(A-2) a forward detection means for obtaining a position when each of the pair of edges is detected by the sensor as a pair of forward edge positions, and (a-2) a detection point of the sensor moves along a reverse direction of a predetermined locus. Backward detecting means for moving the arm so that each of the pair of edges is detected by the sensor as a pair of backward edge positions;
-3) means for obtaining position information based on a pair of forward edge positions and a pair of reverse edge positions.

According to a third aspect of the present invention, in the apparatus according to the second aspect, each of the forward direction detecting means and the backward direction detecting means moves the arm while detecting the portion to be detected by the sensor in parallel with the movement. It is characterized by taking in the detection output of.

According to a fourth aspect of the present invention, there is provided a mounting table for mounting a storage container for storing a plurality of substrates, and a substrate transfer for loading and unloading the substrate to and from the storage container mounted on the mounting table. As means, a transport device according to any one of claims 1 to 3 is provided.

According to a fifth aspect of the present invention, there is provided a processing unit for performing a predetermined process on a substrate, taking out the substrate from the storage container, transporting the substrate to the processing unit, and completing the predetermined process in the processing unit. The transfer device according to any one of claims 1 to 3 is provided as a substrate transfer unit that receives the substrate from the processing unit and stores the substrate in a storage container.

According to a sixth aspect of the present invention, for a transfer device provided with an arm capable of holding an object to be conveyed, the arm acquires position information when the arm accesses a storage container for storing the object to be conveyed. A jig to be used, (a) a main body that can be stored at a predetermined position of a storage container, and (b) formed at a predetermined portion of the main body, having a shape that can be detected by a predetermined non-contact sensor. And a detection portion, wherein at least a part of the outer shape of the main body portion is shaped to conform to the outer shape of the transported object.

According to a seventh aspect of the present invention, there is provided a transfer apparatus provided with an arm capable of holding a transferred object, for obtaining position information when the arm accesses a storage container storing the transferred object. A jig to be used, (a) a plurality of sensors for detecting the position of a predetermined detection target outside the jig in different directions, and (b) a plurality of sensors are provided at predetermined positions, A main body that can be held by the arm, wherein a portion of the main body that contacts the arm when held by the arm is shaped to be positioned and held by the arm.

According to an eighth aspect of the present invention, in the jig of the sixth or seventh aspect, the transferred object is a circular substrate, and at least a part of the outer shape of the main body is circular or It is characterized in that it is in the shape of an arc-shaped thin plate.

[0018]

DESCRIPTION OF THE PREFERRED EMBODIMENTS <1. Overall Configuration of Substrate Processing Apparatus>
First, the overall configuration of the substrate processing apparatus according to the present invention will be described. FIG. 1 is a schematic plan view showing a substrate processing apparatus according to this embodiment.

As shown in FIG. 1, in this embodiment, the substrate processing apparatus includes an indexer ID, a unit arrangement section MP, and an interface IF.

The indexer ID is provided with a transporting device TR1 for transporting the substrate W. The transporting device TR1 takes out the substrate W from the carrier C, which is a storage container, and carries out the substrate W to the unit placement section MP. The processed substrate W is received from the unit placement unit MP and stored in the carrier C. As described above, the indexer ID functions as a substrate loading / unloading device in relation to the unit placement unit MP.

The unit disposition portion MP includes coating processing units SC1 and SC2 (spin coaters) for performing a resist coating process while rotating the substrate as liquid processing units for processing the substrate with the processing liquid at the four corners thereof. Are provided with developing units SD1 and SD2 (spin developers) for performing the developing process on the substrate, and supplying a cleaning liquid such as pure water to the substrate between the coating units SC1 and SC2 to rotate and clean the substrate. A processing unit SS (spin scrubber) is provided. Further, a plurality of heat treatment units for performing heat treatment such as a cool plate unit for cooling the substrate and a hot plate unit for heat treatment are arranged above these liquid treatment units. A transfer device TR2 is provided at the center of the unit arrangement section MP, and the transfer device TR2 performs a predetermined process on the substrate W by sequentially transferring the substrate W between the liquid processing unit and the heat treatment unit. be able to.

The interface IF is provided for transferring the substrate on which resist application has been completed to the exposure apparatus (not shown) or receiving the exposed substrate from the exposure apparatus in the unit arrangement section MP. Inside the interface IF, a substrate is placed in the unit placement section MP.
And a transfer device TR3 for transferring the substrate after exposure to the unit arrangement section, and a carrier C which is a storage container for temporarily stocking the substrate.

In the substrate processing apparatus having the above-described configuration, with respect to the transfer device for transferring the substrate to the carrier C, the arm of the transfer device always accesses an accurate position with respect to the carrier C, and transfers the substrate to the carrier C. It is necessary to transfer the substrate to the formed predetermined position (shelf) or take out the substrate from the predetermined position (shelf). However, by automatically performing the teaching of these transfer devices, the burden on the operator is increased. A description will be given below of how to reduce the positional deviation due to the assembling error and the like of the transfer device accurately and efficiently in a short time.

<2. Next, the transport device TR1 in the indexer ID will be described. FIG.
Is an external perspective view of the transport device TR1. The transfer device TR1 includes an arm 31 for holding a circular substrate, a horizontal movement mechanism (X-axis movement mechanism) for bending and extending the arm 31 in a horizontal direction, and a telescopic elevating mechanism (X-axis moving mechanism) for moving the arm 31 in a vertical direction while expanding and contracting. A Z-axis drive mechanism) and a parallel movement mechanism (Y-axis movement mechanism) are provided to move the transport device TR1 along a ball screw 77 and a guide rail 76 provided in the Y-axis direction. Further, the transport device TR1 includes:
In order to take out the substrate W of the carrier C shown in FIG. 1 and transport the substrate W to the unit arrangement section MP, a rotation drive mechanism for rotating the transport device TR1 around a vertical axis at the center thereof is also provided.

First, the bending and extension movement of the arm 31 will be described. The arm 31 has a configuration as shown in FIG. FIG. 3 is a side sectional view showing the internal structure of the arm 31. The arm 31 includes a first arm segment 34 on the distal end side on which the substrate W is placed, and the first arm segment 34
Arm segment 33 that rotatably supports the second arm segment 33 in the horizontal plane, third arm segment 32 that rotatably supports the second arm segment 33 in the horizontal plane, and this third arm segment 32 in the horizontal plane. An X-axis driving unit D3 to be rotated, and when the third arm segment 32 is rotated by the X-axis driving unit D3, power is transmitted to the second arm segment 33 and the first arm segment 34 to change the posture and Power transmission means 46, which is a bending and stretching mechanism for controlling the moving direction, is provided.

At the base end of the first arm segment 34,
The first rotating shaft 51 is vertically fixed downward. In addition, a first rotating shaft 51 is provided at the tip of the second arm segment 33.
A first bearing hole 52 is provided for rotatably bearing the bearing. Also, at the base end of the second arm segment 33,
The second rotating shaft 53 is vertically fixed downward. The third arm segment 32 is set to have the same length as the second arm segment 33, and a second bearing hole 54 for rotatably supporting the second rotation shaft 53 is formed at the end thereof. Have been. Further, a third rotating shaft 55 to which the rotational force of the X-axis driving unit D3 is transmitted is fixed vertically downward to the base end of the third arm segment 32.

The power transmission means 46 includes a first pulley 61 fixed to the lower end of the first rotation shaft 51 and a second pulley 62 fixed to the second rotation shaft 53 on the upper surface side of the second bearing hole 54. , A first belt 63 suspended between the first pulley 61 and the second pulley 62, a third pulley 64 fixed to the lower end of the second rotating shaft 53, and fixed to the third arm segment 32. Pulley 65 into which the third rotating shaft 55 is loosely fitted.
And a second belt 66 suspended between the third pulley 64 and the fourth pulley 65.

Here, the diameter of the first pulley 61 and the diameter of the second pulley 62 are set to 2: 1, and the third pulley 64
And the diameter of the fourth pulley 65 are set to 1: 2. The distance from the first rotation shaft 51 to the second rotation shaft 53 and the distance from the second rotation shaft 53 to the third rotation shaft 55 are set to the same length R.

FIG. 4 is a diagram conceptually explaining the operation of the arm 31. The operation will be described with reference to FIGS. 3 and 4. When the X-axis driving unit D3 rotates the third arm segment 32b counterclockwise by the angle α via the third rotation shaft 55, the third arm segment 32 The second rotating shaft 53 bearing at the distal end portion has a second belt 66 and a third pulley 64.
Through the third rotation shaft 55 clockwise by an angle β = 2α. As a result, the first rotation shaft 51 supported by the distal end of the second arm segment 33 moves straight in the X-axis direction. At this time, the rotation angle of the first rotation shaft 51 is controlled through the second pulley 62 and the first belt 63. Here, on the basis of the second arm segment 33, the first rotating shaft 51 rotates counterclockwise by an angle γ = α that is 倍 times the second rotating shaft 53. Second
The arm segment 33 itself is rotating, and as a result,
The first arm segment 34 moves straight in the X-axis direction while maintaining the attitude with respect to the X-axis drive unit D3. In this manner, the arm 31 of the transport device TR1 performs the bending and extending movement along the X axis.

Next, the telescopic elevating mechanism and the rotary drive mechanism of the transport device TR1 will be described. The telescopic elevating mechanism of the transport device TR1 illustrated in FIG. 2 is a so-called telescopic type telescopic mechanism, in which the cover 41d can be stored in the cover 41c, the cover 41c can be stored in the cover 41b, and the cover 41b can be stored in the cover 41a. It can be stored. Then, when the arm 31 is lowered, the covers can be sequentially stored, and conversely, when the arm 31 is raised, the stored covers are sequentially pulled out. .

The transport device TR1 is installed on a base 44, and a rotary drive mechanism is configured to rotate about the center of the base 44 as an axis. The lower portion of the base 44 is attached to the ball screw 77 and the guide rail 76.

FIG. 5 is a side sectional view for explaining the operation of the transport device TR1. As shown in FIG. 5, the inside of the transport device TR1 has a so-called telescopic type multi-stage nesting structure.
2a is housed in an elevating member 42b, the elevating member 42b is housed in an elevating member 42c, and the elevating member 42c is
The lifting member 42d is housed in the fixing member 42e.

The lifting members 42b, 42c, 42d
Are provided with pulleys 47a, 47b, 47c, respectively. Belts L3, L2, L1 are hung on these pulleys 47a, 47b, 47c. One end of the belt L1 is fixed to the upper part of the fixing member 42e, and the other end is fixed to the lower part of the elevating member 42c. Similarly, the belt L2 is fixed to the upper part of the elevating member 42d and the lower part of the elevating member 42b, and the belt L3 is fixed to the upper part of the elevating member 42c and the lower part of the elevating member 42a.

Then, by driving a Z-axis drive unit D1 such as a motor installed on the turntable 45, the support member 4
8 goes up and down, and the elevating member 4 fixed to the support member 48
2d goes up and down. Here, a case where the arm 31 is raised by extending the telescopic elevating mechanism will be described.
First, the driving of the Z-axis driving unit D1 causes the support member 48 to rise, and at the same time, the lifting member 42d to rise. Lifting member 4
When 2d rises, the pulley 47 attached to it rises
c also rises at the same time. As described above, since one end of the belt L1 is fixed to the fixing member 42e and the length of the belt L1 is constant, when the pulley 47c rises, the lifting member 42c rises so as to be pulled up by the belt L1. When the lifting member 42c rises, the pulley 47b attached thereto rises, and the lifting member 42b rises so as to be pulled up by the belt L2. When the lifting member 42b rises, the pulley 4 attached to it
7a rises, and the lifting member 42a rises as it is pulled up by the belt L3. Thus, the arm 31 installed above the elevating member 42a can be raised.

The transport device TR is extended by a telescopic elevating mechanism.
In the case where the arm 31 is moved downward by contracting the support member 1, the supporting member 48 is moved downward by driving the Z-axis driving unit D1. Then, the arm 31 installed above the elevating member 42a can be lowered.

The covers 41a to 41d are attached to elevating members 42a to 42d, respectively, and the elevating operation of the covers 41a to 41d is performed by the elevating members 42a to 41d.
It is linked to the operation of 42d.

The θ-axis rotation drive unit D 4
5 is a driving means for rotating the base 5 about the axis θ of the base 44, and is constituted by a motor or the like. Accordingly, the rotation of the turntable 45 about the axis θ allows the arm 31 to rotate about the axis θ.

Further, in order to move the transport device TR1 along the Y-axis, a Y-axis driving unit D2 (not shown) for rotating the ball screw 77 is provided.

With the above configuration, the transport device TR1
Is movable in three dimensions of the X, Y, and Z axes, allows the arm 31 to access any carrier C among the plurality of carriers C provided in the indexer ID, and allows any arm in the carrier. The arm 31 can also be accessed at the position.

Note that the transport device TR3 provided in the interface IF is also configured to be able to operate three-dimensionally, and the carrier C in the interface IF is operated.
Can be made to access the arm.

<3. Jig used for teaching process>
In the configuration as described above, the arm 31 always accesses an accurate position with respect to the carrier C and transports the substrate to a predetermined position formed on the carrier, or automatically removes the substrate from the predetermined position. Perform a teaching process.

In this embodiment, two kinds of jigs are used to automatically perform the teaching process. Here, these two types of jigs will be described.

First, the first jig (hereinafter referred to as "centering jig") has a structure as shown in FIG. FIG. 6A is a plan view of the centering jig 100 as viewed from below, and FIG. 6B is a sectional view taken along line AA in FIG. 6A. As shown in FIG. 6, a centering jig 100 is a thin plate-shaped main body 110 having a circular shape substantially the same shape as a substrate to be transferred by a transfer device.
And a detection pin 12 provided at a center position of the main body 110.
0. For example, if the substrate to be processed has a diameter of 30
In the case of a disk shape of 0 mm, the main body 110 of the centering jig is a circle having a diameter several mm larger than the diameter of 300 mm. However, the shape is not limited to such a shape, and may be any shape as long as it can be stored in the carrier C, and at least a part may have a shape along the outer shape of the substrate.

As shown in FIG. 6B, below the detection pin 120, a columnar detection part 122 having a predetermined diameter is provided. Further, the joint between the detection pin 120 and the main body 110 has a predetermined diameter smaller than the diameter of the detected part 122, and a concave portion 121 is formed between the main body 110 and the detected part 122. I have. In addition,
The shape of the detected portion 122 and the concave portion 121 of the detection pin 120
The dimensions are predetermined.

Next, the second jig (hereinafter referred to as "sensing jig") has a configuration as shown in FIG.
FIG. 7A is a plan view of the sensing jig 200 as viewed from above, and FIG. 7B is a side view of the sensing jig 200. As shown in FIG. 7, the sensing jig has a thin plate-shaped main body 210 like the centering jig. The main body 210 includes light emitting units 231 and 231.
41, light receiving units 232 and 242 are provided, and one light sensor is formed by the light projecting unit 231 and the light receiving unit 232.
Similarly, another light sensor is formed by the light projecting part 241 and the light receiving part 242. The optical axes of these optical sensors are shown in FIG.
As shown in FIG. 7, it is provided so as to be substantially orthogonal, and as shown in FIG. 7B, it is provided at a position at a predetermined height from the lower surface of the main body 210. Further, the position where the two optical axes of these optical sensors intersect is located on the distal end side of the arm 31 by a distance a from the position corresponding to the center of the substrate.

The main body 210 of the sensing jig 200
May be any shape that can hold the arm 31.
Any shape may be used as long as at least a part of the arm 31 is positioned and held by the arm 31, that is, a shape corresponding to the arrangement of the substrate supporting portion of the arm 31 that supports the substrate by actually contacting the back edge of the substrate. May be shaped along the outer shape of the substrate.

The arm 31 is connected to the sensing jig 200
Is transported while the main body 210 is held. Therefore, when the sensing jig 200 is set on the arm 31, the sensing jig 200 is fixed to a position where the sensing jig 200 always has a predetermined positional relationship with the arm 31.

The light projecting units 231 and 241 and the light receiving unit 23
A cable (not shown) connected to drive the arm 2 and 242 is connected to a connector provided on the arm 31.

<4. Control Mechanism of Transfer Apparatus for Performing Teaching Process> Next, a control mechanism for performing the teaching process at the position where the arm 31 accesses will be described. FIG. 8 is a block diagram illustrating a control mechanism for performing a teaching process. FIG. 8 is a block diagram in the case where the above-described sensing jig 200 is installed on the arm 31.

As shown in FIG. 8, the control unit 130 includes a CPU 101 for issuing a drive command to the arm 31, a ROM 102 in which a program is written in advance, a RAM 103 for storing a user program and position information, an interface 104, And a servo control unit 105.
The ROM 102, the RAM 103, the interface 104, and the servo controller 105 are all connected to the CPU 101.

The interface 104 includes the connector 27
0 is connected to the optical sensors 230 and 240 of the sensing jig. The optical sensor 230 is an optical sensor including a light projecting unit 231 and a light receiving unit 232, and the optical sensor 240 is an optical sensor including a light projecting unit 241 and a light receiving unit 242.

The servo control unit 105 includes a Z-axis driving unit D1,
It is connected to a Y-axis driving unit D2, an X-axis driving unit D3, a θ-axis rotation driving mechanism, and encoders E1, E2, E3, and E4. Here, the encoder E1 indicates the driving amount of the Z-axis driving unit D1, the encoder E2 indicates the driving amount of the Y-axis driving unit D2, the encoder E3 indicates the driving amount of the X-axis driving unit D3, and the encoder E
Numeral 4 is provided for detecting the drive amount of the θ-axis rotation drive unit D4. Therefore, each encoder E
By obtaining the outputs of E1, E2, E3, and E4 via the servo control unit 105, the CPU 101
Can be detected, whereby the CPU 101 can obtain the position information of each arm. Further, the CPU 101 can output driving amounts of the Z-axis, the Y-axis, the X-axis, and the θ-axis to the servo control unit 105 to control the driving of the transport device TR1.

The θ-axis rotation driving unit D4 mainly includes
As shown in FIG. 1, the transport device TR1 is a mechanism for rotating the transport device TR1 in order to transport the substrate received from the carrier C to the unit placement unit MP side.
The teaching process for the position to access
This is performed for the three axes of axis, Y axis, and Z axis.

The CPU 101 of the control unit 130 is provided with a main controller MC for controlling the substrate processing apparatus in an integrated manner.
Is connected. The main controller MC has a display unit 1 for displaying information to the operator.
11 and an operation input unit 112 for an operator to input a processing command and the like.

<5. Teaching process 1> Transport device TR
A teaching process for correcting the one arm 31 to access the correct storage position of the carrier C will be described. An outline of such teaching processing is as follows. An operator sets the centering jig 100 at an arbitrary storage position (shelf) of the carrier C in advance,
After setting the sensing jig 200 on the top, the arm 31
Automatically accesses the carrier C on which the centering jig 100 is set, and the detected portion 12 formed on the centering jig 100 by the sensing jig 200.
In this process, position information on each axis is acquired by detecting the position No. 2 and an accurate position of the arm 31 to be accessed is obtained based on the position information. Hereinafter, the details of the teaching process will be described.

In the teaching process in this embodiment, first, as shown in FIG.
0) is performed, and then the actual automatic teaching processing (step S200) is performed.

The pre-processing (step S100) is performed according to a procedure as shown in FIG. As shown in FIG. 10, first, the operator specifies and inputs a command for executing the teaching process from the operation input unit 112 while checking the display content of the display unit 111 (step S101). At this time, the carrier C for performing the teaching process is selected, the number of the storage position where the teaching process is to be performed is determined, and the input is performed at the same time.

In step S102, upon receiving the command for the teaching process, the main controller MC instructs the CPU 101 to execute a predetermined program for the teaching process, and accesses the arm 31 to the carrier C for performing the teaching process. The base value of the position to be performed is transmitted to the CPU 101.

In step S103, the transport device TR
The sensing jig 200 is set on one arm 31.
Then, in step S104, step S101
The centering jig 100 is set at the determined storage position of the carrier C selected in step. At this time, the centering jig 100 is installed so as to contact the inside of the carrier C, and the detection pin 120 is installed in a state of protruding downward.

Since the preprocessing involving the operator is as described above, the operator inputs from the operation input unit 112 that the preprocessing has been completed in order to actually start the automatic teaching processing (step S105).

The above pre-processing (step S100)
In the operation performed by the operator, the operation input unit 112
Since it is only necessary to input a command and set a jig on each arm, the skill of the operator is not required at all.

The preprocessing (step S10)
When 0) is completed, the automatic teaching process (step S200) in FIG. 9 is started. In the automatic teaching process (step S200), the processes shown in FIG. 11 are sequentially performed.

First, in step S201, the CPU
101 drives a drive unit for each axis, and an arm 31
Is positioned at a predetermined height position of the first stage of the carrier C to be taught. Then, the CPU 101 instructs the servo control unit 105 to extend the arm 31 toward the near side by a distance a from the position indicated by the base value on the X axis. Accordingly, the servo control unit 105 drives the X-axis driving unit D3 to extend the arm 31 to that position. This state is as shown in FIG. In other words, the position where the optical axes of the optical sensors 230 and 240 intersect is near the position where the optical axis hangs down from the detection pin 120 provided on the centering jig 100.

Then, in step S202, the CP
U101 issues a command to drive the Z-axis drive unit D1, and raises the arm 31 in the + Z direction. The amount of movement to be raised here is such that the optical axes of the optical sensors 230 and 240 are blocked by the detection pins 120 of the centering jig 100. In which stage of the carrier C the centering jig 100 is stored,
The movement amount in the + Z direction can be obtained by calculation because it is known by the above input operation. Then, based on the amount of movement obtained by the calculation, the servo control unit 1
Reference numeral 05 drives the arm 31 in the + Z direction to drive the Z-axis drive unit D1.

Then, in step S203, the CP
U101 monitors both outputs of the optical sensors 230 and 240, and if either one of the outputs is "OFF", issues an alarm and notifies the operator that the teaching process cannot be continued. Then, the process ends.

Here, the output of the optical sensors 230 and 240 is "OFF" when the light emitted from each of the light projecting units 231 and 241 is received by the light receiving units 232 and 242. The outputs of the sensors 230 and 240 are “ON” when the light emitted from each of the light projecting units 231 and 241 is not received by the light receiving units 232 and 242 (ie,
Light is blocked).

Accordingly, the arm 31 is moved from the state shown in FIG.
Either one is “OFF” when it is raised in the Z direction
If it does, it is judged that it is not within the range that can be taught,
The operator is to be notified. In this case, after re-attaching the arm 31 and the like, the operator
The teaching process will be restarted. It is arm 3 that must be restarted like this.
Since it is a case where the attachment etc. of 1 is greatly shifted,
Normally, when the processing up to step S202 is performed, the outputs of both optical sensors 230 and 240 are turned “ON”, and such an alarm / stop does not occur.
Proceed to.

Then, in step S204, the CPU 1
01 issues a command to the servo control unit 105 to move the arm 31 at a low speed in the −Z direction (that is, the direction in which the arm 31 is lowered). Then, the CPU 101 issues a command and monitors that the output of the optical sensor 230 is “OFF”. The servo control unit 105 includes the CPU 10
The Z-axis drive unit D1 is driven in response to the command from 1 to lower the arm 31 at a low speed. The CPU 101 includes the arm 31
When the optical sensor 230 detects that the optical sensor 230 has been turned "OFF" during the downward movement of the arm 31, the servo control unit 105 is instructed to immediately stop the downward movement of the arm 31. Accordingly, the servo control unit 105 stops the Z-axis driving unit D1, and the arm 31 stops.

Then, in step S205, the arm 31 is raised, and the detection point (that is, the position of the light) by the optical sensor 230 is positioned substantially at the center of the detected portion 122. The position where the arm 31 has stopped in step S204 is the position of the lower end of the detected portion 122 of the detection pin 120. Further, the shape and dimensions of the detected portion 122 of the detection pin 120 are known in design. Therefore, this step S
In 205, the height of the portion to be detected 122 is raised by an amount corresponding to one half of the height of the portion.

By the processing up to step S205, the detection point by the optical sensor 230 becomes the position P shown in FIG.
The position shown in FIG.

Then, the Y-axis position information detecting process in step S210 is performed, and the position information on the Y-axis is detected. Specifically, the procedure shown in FIG. 14 is performed. First, in step S211, the CPU 101
Commands the Y-axis to move in the + Y direction at a low speed, and monitors that the output of the optical sensor 230 is “OFF”. The servo control unit 105 drives the Y-axis driving unit D2 according to a command from the CPU 101, and moves the arm 31 in the + Y direction at a low speed. By this operation, FIG.
As shown in (2), the detection point of the optical sensor 230 at the position P1 also moves in the + Y direction.

Then, in step S212, the CP
When U101 recognizes that the optical sensor 230 has been turned "OFF", the servo control unit 105 immediately stops the Y axis.
To order. The servo control unit 105 uses this command to
The shaft driving unit D2 is stopped. Then, the CPU 101
The current position of the Y-axis obtained from the encoder E2 is obtained via the servo control unit 105, and is stored in the RAM as position information YF.
103.

This state will be described with reference to FIG. 13. The detection point of the optical sensor 230 moves rightward with the movement of the arm 31 in the + Y direction, and the optical sensor 230 moves to the right edge of the detected portion 122. "OFF" at the position,
The CPU 101 acquires the position information YF.

Then, in step S213, the CP
U101 moves the Y axis in the −Y direction. The movement in the -Y direction in step S213 is performed by the optical sensor 23.
The position of the detection point of 0 is released from the edge position of the detected portion 122, and any position may be used as long as the output of the optical sensor 230 is stably turned to the "ON" state.

Then, in step S214, the CP
U101 instructs to move the Y axis at a low speed in the −Y direction, and the output of the optical sensor 230 is “OFF”.
Watch for The servo control unit 105 includes the CPU 1
The Y-axis driving unit D2 is driven according to the command from 01, and the arm 31 is moved at a low speed in the -Y direction. By this operation, the detection point of the optical sensor 230 also moves in the −Y direction in FIG.

Then, in step S215, the CP
When U101 recognizes that the optical sensor 230 has been turned "OFF", the servo control unit 105 immediately stops the Y axis.
To order. The servo control unit 105 uses this command to
The shaft driving unit D2 is stopped. Then, the CPU 101
The current position of the Y-axis obtained from the encoder E2 is obtained via the servo control unit 105, and is stored in the RAM as position information YR.
103.

This state will be described with reference to FIG. 13. When the detection point of the optical sensor 230 moves to the left along with the movement of the arm 31 in the −Y direction, the optical sensor 230 moves to the left of the detected portion 122. "OFF" at the edge position,
The CPU 101 acquires the position information YR.

Then, in step S216, the CP
U101 sets the position of the Y axis to “YR + (YF−YR) /
2 ”position. This position is the center of the detected part 122. Therefore, step S216
Is performed, the light from the light projecting unit 231 is applied to the central part of the detected part 122. This is the end of the processing for detecting the Y-axis position information in step S210 in FIG.

Then, an X-axis position information detection process (step S220) shown in FIG. 11 is performed, and position information on the X-axis is detected. Specifically, the procedure shown in FIG. 15 is performed. First, in step S221, C
The PU 101 instructs to move the X axis in the + X direction at a low speed, and the output of the optical sensor 240 is “OF”.
F ". The servo control unit 105 controls the CP
The X-axis driving unit D3 is driven according to a command from U101,
The arm 31 is moved at a low speed in the + X direction. By this operation, the optical sensor 2 located at the position P1 as shown in FIG.
The 40 detection points also move in the + X direction.

Then, in step S222, the CP
When U101 recognizes that the optical sensor 240 has been turned "OFF", the servo control unit 105 immediately stops the X axis.
To order. The servo control unit 105 sends X
The shaft driving unit D3 is stopped. Then, the CPU 101
The current position of the X-axis obtained from the encoder E3 is obtained via the servo control unit 105, and is stored in the RAM as position information XF.
103.

This state will be described with reference to FIG. 13. When the detection point of the optical sensor 240 moves to the left along with the movement of the arm 31 in the + X direction, the optical sensor 240 moves to the left edge of the detected portion 122. "OFF" at the position,
The CPU 101 acquires the position information XF.

Then, in step S223, the CP
U101 moves the X axis in the −X direction. The movement in the -X direction in step S223 is performed by the optical sensor 24.
The position of the detection point of 0 is released from the edge position of the detected portion 122, and any position may be used as long as the output of the optical sensor 240 is stably turned to the "ON" state.

Then, in step S224, the CP
U101 instructs the X-axis to move in the −X direction at a low speed, and the output of the optical sensor 240 is “OFF”.
Watch for The servo control unit 105 includes the CPU 1
The X-axis driving unit D3 is driven according to the command from 01, and the arm 31 is moved at a low speed in the -X direction. By this operation, the detection point of the optical sensor 240 also moves in the −X direction in FIG.

Then, in step S225, the CP
When U101 recognizes that the optical sensor 240 has been turned "OFF", the servo control unit 105 immediately stops the X axis.
To order. The servo control unit 105 sends X
The shaft driving unit D3 is stopped. Then, the CPU 101
The current position of the X-axis obtained from the encoder E3 is obtained via the servo control unit 105, and is stored in the RAM as position information XR.
103.

This state will be described with reference to FIG. 13. When the detection point of the optical sensor 240 moves rightward with the movement of the arm 31 in the −X direction, the optical sensor 240 moves to the right of the detected portion 122. "OFF" at the edge position,
The CPU 101 acquires the position information XR.

Then, in step S226, the CP
U101 sets the position of the X axis to “XR + (XF−XR) / 2”.
-K ". Here, using the radius r of the detection pin 120 in the concave portion 121 and the radius R in the detected portion 122, the constant k is a number that satisfies “r <k <R”. Therefore, by step S226, the detection point of the optical sensor 240 is changed to the detected part 122 shown in FIG.
Is located at the position P2. Thus, the process of detecting the X-axis position information in step S220 in FIG. 11 is completed.

Then, a Z-axis position information detection process (step S230) shown in FIG. 11 is performed, and position information on the Z-axis is detected. Specifically, the procedure shown in FIG. 16 is performed. First, in step S231, C
The PU 101 instructs to move the Z axis at a low speed in the + Z direction (that is, the direction in which the arm 31 is raised), and monitors that the output of the optical sensor 240 is “OFF”. The servo control unit 105 drives the Z-axis driving unit D1 in response to a command from the CPU 101, and moves the arm 31 at a low speed in the + Z direction. By this operation, FIG.
As shown in the figure, the detection point of the optical sensor 240 at the position P2 also moves in the + Z direction.

Then, in step S232, the CP
When U101 recognizes that the optical sensor 240 has been turned “OFF”, the servo control unit 105 immediately stops the Z axis.
To order. The servo control unit 105 sends Z
The shaft driving unit D1 is stopped. Then, the CPU 101
The current position of the Z-axis obtained from the encoder E1 is obtained via the servo control unit 105, and is stored in the RAM as position information ZF.
103.

This state will be described with reference to FIG. 13. When the detection point of the optical sensor 240 moves upward along with the movement of the arm 31 in the + Z direction, the optical sensor 240 moves to the upper edge of the detected portion 122. "OFF" at the position,
The CPU 101 acquires the position information ZF.

Then, in step S233, the CP
U101 moves the Z axis in the −Z direction (the direction in which the arm 31 is lowered). In this step S233,
The movement in the Z direction is to release the position of the detection point of the optical sensor 240 from the edge position of the detected part 122, and to move it to a position where the output of the optical sensor 240 is stably turned to the “ON” state. Is fine.

Then, in step S234, the CP
U101 instructs to move the Z axis in the −Z direction at a low speed, and the output of the optical sensor 240 is “OFF”.
Watch for The servo control unit 105 includes the CPU 1
The Z-axis drive unit D1 is driven according to the command from 01, and the arm 31 is moved at a low speed in the -Z direction. By this operation, the detection point of the optical sensor 240 also moves in the −Z direction in FIG.

Then, in step S235, the CP
When U101 recognizes that the optical sensor 240 has been turned “OFF”, the servo control unit 105 immediately stops the Z axis.
To order. The servo control unit 105 sends Z
The shaft driving unit D1 is stopped. Then, the CPU 101
The current position of the Z-axis obtained from the encoder E1 is obtained via the servo control unit 105, and is stored in the RAM as position information ZR.
103.

This state will be described with reference to FIG. 13. The detection point of the optical sensor 240 moves downward with the movement of the arm 31 in the −Z direction, and the optical sensor 240 Becomes "OFF" at the edge position of
The CPU 101 acquires the position information ZR.

Then, in step S236, the CP
U101 commands to lower the position of the Z axis to the position of the first stage of the carrier C. As a result, the servo control unit 105 lowers the arm 31 to bring it into a state as shown in FIG. Thereafter, the CPU 101 commands the X-axis to return to the origin, and the X-axis driving unit D of the servo control unit 105
By driving the arm 3, the arm 31 is retracted from the inside of the carrier C. Thus, the process of detecting the Z-axis position information in step S230 of FIG. 11 is completed.

As described above, the position information about the three axes of the Y axis, the X axis, and the Z axis is detected. Next, in step S240 shown in FIG. 11, the position information YF, YR, XF acquired by the above processing is obtained. , XR, ZF, ZR, a deviation correction calculation process is performed. In the deviation correction calculation processing, a difference (deviation amount) between a base value obtained from the main controller MC and an accurate storage position obtained by the optical sensor is obtained based on each position information. Specifically, the X held by the main controller MC in advance is
The base values for the X, Y, and Z axes are Xa,
Ya and Za, and the displacement amount of the arm 31 is ΔX,
Assuming that ΔY, ΔZ, ΔX, ΔY, ΔZ are respectively

[0096]

(Equation 1)

[0097]

(Equation 2)

[0098]

(Equation 3)

Is represented as Here, the constant h in Equation 3 is a value corresponding to the position where the centering jig 100 is stored, and is a value obtained from the storage position and the dimensions of the detection pins 120 of the centering jig 100 and the like.

Then, in step S240, the CPU
101 is the position information YF, Y stored in the RAM 103
R, XF, XR, ZF, ZR are read out, and
By performing calculations based on Equations (3), displacement amounts ΔX, ΔY, ΔZ of the arm 31 in the respective axial directions can be obtained.

Equation 1 represents the difference between the preset base value Xa for the X-axis and the position of the arm serving as the center of the detected portion 122 detected in the X-axis position information detection processing (step S220). Since the detected position is detected at a position shifted by a distance a from the original center position of the substrate, the distance a is also considered.

Equation 2 represents the relationship between the preset base value Ya for the Y axis and the position of the arm serving as the center of the detected part 122 detected in the Y axis position information detection processing (step S210). This is an expression for calculating the difference.

Further, Equation 3 represents the difference between the preset base value Za for the Z axis and the height position of the lower surface of the main body 110 of the centering jig 100 at the position where the centering jig 100 is stored. Is an expression for obtaining

Based on the formulas (1) to (3), based on the amount of displacement obtained for each axis, an accurate storage position serving as a reference position when the arm 31 accesses the carrier C and stores or removes a substrate. Can be requested.

Then, after the calculation for each axis is performed in step S240, in step S250, the reference position is used for accurately storing or taking out the substrate of the arm 31 based on the value obtained in step S240. Set the storage position. The CPU 101 calculates the deviation amount Δ
X, ΔY, and ΔZ are output to the main controller MC, and the main controller MC sets an accurate storage position for the carrier C based on these values. For example, the main controller MC registers the deviation amounts ΔX, ΔY, ΔZ for the X-axis, Y-axis, and Z-axis as offset values of the base values Xa, Ya, Za.

In the teaching process,
Although the position information is acquired for one of the storage positions in the arbitrary carrier C, the position information is acquired for one of the storage positions because the plurality of storage positions are formed at predetermined regular intervals. For example, for other storage positions, an accurate storage position can be obtained by calculation. In the above-described teaching process, the teaching process is performed on one carrier C among the plurality of carriers C. However, since the plurality of carriers C are arranged at equal intervals along the Y axis, one teaching process is performed. If the position information is acquired for the carrier C, an accurate storage position can be obtained for the other carriers C by calculation.

As described above, with respect to the X-axis, the Y-axis, and the Z-axis, the teaching about the storage position serving as the reference position when the arm 31 of the transport device TR1 accesses the carrier C and stores or unloads the substrate. The process ends.
Note that in the flowchart of FIG.
Functions as a control unit for acquiring position information when performing the processing in steps S201 to S230, and performs arm 3 processing when performing the processing in steps S240 and S250.
1 functions as a setting unit for setting an accurate storage position as a reference position when storing or removing a substrate by accessing the carrier C.

By performing the above processing, it is possible to accurately and efficiently set an accurate storage position where the arm 31 of the transport device TR1 should access the carrier in a short period of time. Deviation can be eliminated.

Further, even when the carrier is a storage container called a pod (POD) that does not expose the substrate to the outside air, the teaching process can be automatically performed. It is not necessary to confirm the positional relationship with the position, and the burden on the operator can be reduced.

<6. Teaching process 2> By the way, in the above-described teaching process, when driving the arm 31 for each axis, it is necessary to drive the arm 31 at a low speed in order to accurately obtain each position information. Further, since the arm 31 is moved only in one direction in order to obtain each position information, the detected portion 122 which detects by a slight deviation of the optical axis or the like.
Edge may shift. Therefore, in order to perform the above-described teaching process more efficiently and accurately, the following method may be performed.

The overall processing procedure of the teaching processing is as follows.
This is the same as the flowchart of FIG. And FIG.
When performing the processing of steps S210, S220, and S230 shown in FIG. 5, the position information is taken in without stopping the arm 31, and when detecting the detection target 122 for each axis, a pair of edges of the detection target The arm 31 is reciprocated in the plus direction and the minus direction along a predetermined trajectory that crosses, and the position information of four points is captured. Then, by averaging the position information of these four points, the detected part 1
By guiding the center of the arm 22, the speed at which the arm is moved can be increased, and the accuracy of the detected position information can be increased.

In this case, step S210 shown in FIG.
The process of detecting the Y-axis position information is performed as shown in FIG. FIG. 18 shows the locus of the movement of the detection point of the optical sensor 230 in the procedure shown in FIG.

First, in step S311, the Y-axis is moved in the −Y direction, and the optical sensor 230 stabilizes “OF”.
The detection point of the optical sensor 230 is moved to the position "F". By this step S311, the detection point of the optical sensor 230 moves to the position P3 shown in FIG.

Then, in step S312, the arm 31 is started to move in the + Y direction, and the position where the optical sensor 230 is turned "ON" is set as the position information YF1 in the RAM 103.
To be stored. That is, first, the detection point at the position P3 in FIG.
When moving toward 22 and detecting the left edge of the detected part 122, the edge position is acquired as the position information YF1. The arm 31 continues to move in the + Y direction even when the position information YF1 is taken.

Then, in step S313, the position where the optical sensor 230 is turned "OFF" is stored in the RAM 103 as position information YF2. The position of YF2 at this time is
This is the right edge position of the detected part 122 shown in FIG. This means that edge detection in the forward direction has been performed on a pair of edges of the detected portion 122. The arm 31 continues to move in the + Y direction even when the position information YF2 is taken.

Then, the optical sensor 230 is moved by about 5 mm from the position where the optical sensor 230 is turned "OFF" in step S314. Assuming that the turning point when the arm 31 is reciprocated is the position where the optical sensor 230 is “OFF”, the optical sensor 2
The switching point of ON / OFF 30 is a turning point, which is not preferable. Therefore, the optical sensor 230 is moved about 5 mm from the position where the optical sensor 230 is turned “OFF” in step S314, and is not limited to 5 mm.

Then, in step S315, the movement of the arm 31 in the −Y direction is started, and the optical sensor 230
The position "N" is stored in the RAM 103 as position information YR1. The position of YR1 at this time is the right edge position of the detected part 122 shown in FIG.

The arm 31 continues to move in the -Y direction, and in step S316, the position where the optical sensor 230 is turned "OFF" is stored in the RAM 103 as position information YR2. The position of YR2 at this time is the left edge position of the detected part 122 shown in FIG. This means that edge detection in the opposite direction has been performed on the pair of edges of the detected portion 122.

In step S317, the position of the arm 31 with respect to the Y axis is set to "(YF1 + YF2 + Y
R1 + YR2) / 4 ". This position is the center position of the detected part 122 as can be seen from FIG.

Thus, step S shown in FIG.
The process of detecting the Y-axis position information at 210 ends.

Next, at step S220 shown in FIG.
The process of detecting the position information of the axis has a procedure as shown in FIG. In the procedure shown in FIG. 19, the locus of movement of the detection point of the optical sensor 240 refers to FIG. 18 similarly to the above.

First, in step S321, the X-axis is moved in the −X direction, and the optical sensor 240 stabilizes “OF”.
The detection point of the optical sensor 240 is moved to the position "F". By this step S321, the detection point of the optical sensor 240 moves to the position P3 shown in FIG.

Then, in step S322, the arm 31 is started to move in the + X direction, and the position where the optical sensor 240 is turned “ON” is set as the position information XF1 in the RAM 103.
To be stored. That is, first, the detection point at the position P3 in FIG.
When moving toward 22 and detecting the left edge of the detected portion 122, the edge position is acquired as position information XF1. The arm 31 continues to move in the + X direction even when the position information XF1 is taken.

Then, in step S323, the position where the optical sensor 240 is turned "OFF" is stored in the RAM 103 as position information XF2. The position of XF2 at this time is
This is the right edge position of the detected part 122 shown in FIG. This means that edge detection in the forward direction has been performed on a pair of edges of the detected portion 122. The arm 31 continues to move in the + X direction even when the position information XF2 is taken.

Then, in step S324, the optical sensor 240 is moved about 5 mm from the position where the optical sensor 240 is turned "OFF". The meaning of the processing in step S324 is the same as that in step S314 for the Y axis.

Then, in step S325, the arm 31 starts to move in the -X direction, and the optical sensor 240
The position "N" is stored in the RAM 103 as position information XR1. The position of XR1 at this time is the right edge position of the detected part 122 shown in FIG.

The arm 31 continues to move in the -X direction, and in step S326, the position where the optical sensor 240 is turned "OFF" is stored in the RAM 103 as position information XR2. The position of XR2 at this time is the left edge position of the detected part 122 shown in FIG. This means that edge detection in the opposite direction has been performed on the pair of edges of the detected portion 122.

In step S327, the position of the arm 31 with respect to the X axis is set to "(XF1 + XF2 + X
R1 + XR2) / 4 + k ". Here, as described above, the constant k is a number that satisfies “r <k <R”, as described above, using the radius r of the detection pin 120 in the concave portion 121 and the radius R of the detected portion 122. .

As described above, step S shown in FIG.
The process of detecting the X-axis position information at 220 ends.

Next, Z in step S230 shown in FIG.
The process of detecting the position information of the axis has a procedure as shown in FIG. Also, in the procedure shown in FIG. 20, the locus of movement of the detection point of the optical sensor 240 is shown in FIG.

First, in step S331, the Z axis is moved in the −Z direction (ie, the direction in which the arm 31 is lowered), and the detection point of the optical sensor 240 is moved to a position where the optical sensor 240 is stably turned “OFF”. Let it. By this step S331, the detection point of the optical sensor 240 moves to the position P4 shown in FIG.

Then, in step S332, the movement of the arm 31 in the + Z direction (that is, the direction in which the arm 31 is raised) is started, and the position where the optical sensor 240 is turned "ON" is stored in the RAM 103 as position information ZF1.
That is, first, the detection point at the position P4 in FIG.
When the lower edge is detected, the edge position is acquired as position information ZF1. The arm 31 continues to move in the + Z direction even when the position information ZF1 is taken.

Then, in step S333, the position where the optical sensor 240 is turned "OFF" is stored in the RAM 103 as position information ZF2. The position of ZF2 at this time is
This is the upper edge position of the detected part 122 shown in FIG. As a result, the edge detection in the forward direction has been performed on the pair of edges in the vertical direction of the detection target 122. The arm 31 continues to move in the + X direction even when the position information ZF2 is taken.

Then, in step S334, the optical sensor 240 is moved by several mm from the position where the optical sensor 240 is turned "OFF". The meaning of the process in step S324 is also a process for stabilizing the output of the optical sensor 240 to “OFF”.

Then, in step S335, the arm 31 starts to move in the -Z direction, and the optical sensor 240
The position "N" is stored in the RAM 103 as position information ZR1. The position of ZR1 at this time is the upper edge position of the detected part 122 shown in FIG.

The arm 31 continues to move in the -Z direction, and in step S336, the position where the optical sensor 240 is turned "OFF" is stored in the RAM 103 as position information ZR2. The position of ZR2 at this time is the lower edge position of the detected part 122 shown in FIG. This means that the edge detection in the opposite direction has been performed on the pair of edges in the up-down direction of the detected portion 122.

In step S337, the position of the Z axis is lowered to the position of the first stage of the carrier C, and the X axis is returned to the origin. Thereby, the arm 31 is retracted from the inside of the carrier C.

As described above, step S shown in FIG.
The process of detecting the Z-axis position information at 230 ends.

By the above processing, four points of position information are obtained for each of the X axis, Y axis, and Z axis.

Then, the next step S24 shown in FIG.
At 0, a deviation correction calculation process is performed to determine the amount of displacement of the arm 31. Specifically, ΔX, ΔY, and ΔZ are respectively

[0141]

(Equation 4)

[0142]

(Equation 5)

[0143]

(Equation 6)

Are represented as Therefore, step S24
At 0, the CPU 101 stores the 12
Pieces of position information XF1, XF2, XR1, XR2, YF
1, YF2, YR1, YR2, ZF1, ZF2, ZR
1 and ZR2 are read out and calculated based on Equations 4 to 6, whereby the displacement amounts ΔX, ΔY, and ΔZ of the arm 31 in the respective axial directions can be obtained.

Then, after deriving the amount of displacement for each axis in step S240, in step S250, the correct storage position of the arm 31 to be accessed is set based on the value obtained in step S240. CPU1
No. 01 outputs the deviation amounts ΔX, ΔY, ΔZ to the main controller MC, and the main controller MC sets an accurate storage position based on these values.

As described above, the teaching process for the storage position when the arm 31 of the transport device TR1 accesses the carrier C is completed for the X axis, the Y axis, and the Z axis.

Here, when the position information is taken in while operating the arm 31 at a high speed, there is a case where the position is slightly shifted from the original ON / OFF position. For example, considering the Y axis, as shown in FIG.
The output of the optical sensor 230 when moving at high speed in the direction
If N1 is set, the ON / OFF position of the optical sensor 230 may be delayed from the original ON / OFF position (that is, the edge position of the detected portion 122). Similarly, if the output of the optical sensor 230 when the arm 31 is moved at a high speed in the −Y direction is SGN2, the ON / OFF position of the optical sensor 230 may be delayed from the original ON / OFF position. . These are optical sensors 230
There is a portion that also depends on the response characteristics of
If the moving speed of the arm 31 in the direction is made equal, the delay in the + Y direction becomes equal to the delay in the -Y direction.

Therefore, by performing the four-point measurement as described above and deriving the average of the four points, it is possible to eliminate such a delay in the output of the optical sensor. As a result, when such four-point measurement is performed, it is not necessary to use an expensive optical sensor having excellent response characteristics, and the measurement can be performed with high accuracy using a relatively inexpensive optical sensor.

As described above, by performing the four-point measurement for each axis, the arm 31 can be moved at a relatively high speed, the teaching process can be sped up, and the four points are averaged. Since the deviation is induced, the accuracy in teaching can be improved.

The teaching process as described above is a process for taking in positional information while moving the arm 31, and is a so-called multitask process in which a plurality of tasks can be executed simultaneously. For example, a task for sequentially executing each step of the program as described above, a task for calculating a command value for the drive units D1 to D3 of each axis in real time, a task for monitoring the output from the optical sensor in real time, and the like. Multiple tasks run on the CPU
The parallel processing by the
, And each position information can be taken in.

By performing the above-described processing, the burden on the operator is reduced, and the accurate storage position where the arm 31 of the transport device TR1 should access the carrier accurately and quickly is set. It is possible,
A deviation due to an assembly error or the like can be eliminated. Also,
Furthermore, as compared with the above “teaching process 1”, the arm 31 can be moved at a higher speed, and the teaching accuracy can be increased.

<7. Modified Example> The teaching process in the above description is not applied only to the transport device TR1 provided in the indexer ID (see FIG. 1), but is applied to a transport device that stores or removes a substrate from a carrier such as a pod. It goes without saying that it is applicable. For example, the transport device TR3 provided in the interface IF
And so on.

It is needless to say that the same result can be obtained even if the plus direction and the minus direction are exchanged for the movement direction about each axis in the above description.

Further, in the above description, the teaching of the transport device TR1 in the substrate processing apparatus has been described, but such teaching processing can be applied to transport devices other than the transport device for transporting the substrate. That is, with the arm holding the transferred object,
For a general transport device that transports and conveys an object to and from a predetermined storage container, the present invention can also be applied as a teaching process that allows an arm to accurately access a predetermined storage position. Therefore, the transferred object is not limited to the substrate.

[0155]

As described above, according to the first aspect of the present invention, the first jig is installed at a predetermined position of the storage container, and the second jig is held by the arm. In the state,
The second jig is brought close to the first jig until a predetermined relative positional relationship is established, and the arms are moved in a plurality of different directions in the close state, so that the second jig is moved in each of the plurality of directions. The first jig is detected and acquired as position information, and based on the position information, a reference position for the arm to store or remove the transported object with respect to the storage container is set. In addition to the reduction, it is possible to eliminate the positional deviation of the position accessed by the transport device accurately and efficiently in a short time.

According to the second aspect of the present invention, the arm is moved so that the detection point of the sensor moves along the forward direction of the predetermined trajectory crossing each of the pair of edges of the detected portion. The position when each of the edges is detected by the sensor is acquired as a pair of forward edge positions, and the arm is moved so that the detection point of the sensor moves along the direction opposite to the forward direction. An arm for acquiring a position when each of the pair of edges is detected by the sensor as a pair of reverse edge positions, and obtaining position information based on the pair of forward edge positions and the pair of reverse edge positions; Can be moved at a high speed, and the accuracy can be improved, so that the positional deviation of the position accessed by the transfer device with high efficiency and high accuracy can be eliminated.

According to the third aspect of the present invention, while the arm is moved, the detection output of the detection target by the sensor is taken in parallel with the movement, so that the position information can be efficiently acquired.

According to the fourth aspect of the present invention, in the substrate loading / unloading device, the displacement of the arm of the transfer device for accessing the storage container mounted on the mounting table can be accurately and efficiently performed in a short time. Can be eliminated.

According to the fifth aspect of the present invention, in the substrate processing apparatus, the displacement of the arm of the transfer device for accessing the storage container storing the substrate can be accurately and efficiently eliminated in a short time. Can be.

According to the sixth aspect of the present invention, since at least a part of the outer shape of the main body is formed in a shape following the outer shape of the object to be conveyed, it is suitable for installing the jig on the arm. Shape.

According to the seventh aspect of the present invention, since the portion of the main body that comes into contact with the arm when held by the arm is shaped to be positioned and held by the arm,
The shape is suitable for installing the jig on the arm.

According to the eighth aspect of the present invention, since the main body is formed in a thin plate shape in which at least a part of its outer shape is circular or arc-shaped, it carries a circular substrate in the substrate processing apparatus. It is suitable for a transport device.

[Brief description of the drawings]

FIG. 1 is a schematic diagram showing a substrate processing apparatus according to an embodiment of the present invention.

FIG. 2 is an external perspective view of a transfer device provided in an indexer of the substrate processing apparatus according to the embodiment of the present invention.

FIG. 3 is a side sectional view showing an internal structure of an arm of the transfer device according to the embodiment of the present invention.

FIG. 4 is a diagram conceptually illustrating an operation of an arm of the transfer device according to the embodiment of the present invention.

FIG. 5 is a side sectional view for explaining a telescopic elevating mechanism of the transport device according to the embodiment of the present invention.

FIG. 6 is a diagram showing a centering jig (first jig) according to the embodiment of the present invention.

FIG. 7 is a diagram showing a sensing jig (second jig) according to the embodiment of the present invention.

FIG. 8 is a block diagram showing a control mechanism for performing a teaching process in the embodiment of the present invention.

FIG. 9 is a flowchart showing an overall teaching process in the embodiment of the present invention.

FIG. 10 is a flowchart showing a pre-process of a teaching process in the embodiment of the present invention.

FIG. 11 is a flowchart showing an automatic teaching process of the teaching process according to the embodiment of the present invention.

FIG. 12 is a diagram showing a state where the arm has accessed the carrier in the embodiment of the present invention.

FIG. 13 is a diagram showing a moving direction of a detection point by an optical sensor during a teaching process according to the embodiment of the present invention.

FIG. 14 is a flowchart illustrating Y-axis position information detection processing in the teaching processing according to the embodiment of the present invention.

FIG. 15 is a flowchart showing X-axis position information detection processing in the teaching processing according to the embodiment of the present invention.

FIG. 16 is a flowchart illustrating Z-axis position information detection processing in the teaching processing according to the embodiment of the present invention.

FIG. 17 is a flowchart showing a Y-axis position information detection process different from FIG. 14 in the teaching process in the embodiment of the present invention.

FIG. 18 is a diagram illustrating a moving direction (trajectory) of a detection point by an optical sensor during a teaching process according to the embodiment of the present invention.

FIG. 19 is a flowchart illustrating X-axis position information detection processing different from FIG. 15 in the teaching processing in the embodiment of the present invention.

FIG. 20 is a flowchart showing Z-axis position information detection processing different from that in FIG. 16 in the teaching processing in the embodiment of the present invention.

FIG. 21 is an explanatory diagram showing an output of the optical sensor when the arm is moved at a high speed in the embodiment of the present invention.

[Explanation of symbols]

 31 Arm 101 CPU 130 Control unit 100 Centering jig (first jig) 200 Sensing jig (second jig) 122 Detected unit 110, 210 Main unit 230, 240 Optical sensor 231, 241 Light emitting unit 232 , 242 Light receiving unit TR1 Transport device D1 Z-axis driving unit D2 Y-axis rotation driving unit D3 X-axis driving unit D4 θ-axis rotation driving unit E1, E2, E3, E4 Encoder W substrate

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Yasuhiko Hashimoto 1-1, Kawasaki-cho, Akashi-shi, Hyogo Kawasaki Heavy Industries, Ltd. Inside the Akashi Plant (72) Inventor Masatoshi Sano 1-1-1, Kawasaki-cho, Akashi-shi, Hyogo Kawasaki Heavy Industries Akashi Factory Co., Ltd.

Claims (8)

[Claims] 1. A transfer device for storing or removing an object to be transferred from a storage container by an arm, wherein: (a) a first jig is provided at a predetermined position of the storage container;
And, in a state where the second jig is held by the arm, the second jig is brought close to the first jig until a predetermined relative positional relationship is established. A control unit that detects the first jig in each of the plurality of directions and obtains the information as position information by moving the arm in a plurality of different directions, and (b) based on the position information, Setting means for setting a reference position when the arm stores or removes the transferred object from or to the storage container. 2. The transfer device according to claim 1, wherein at least one of the first and second jigs has a detected portion having a predetermined shape formed at least in part thereof. The other of the first and second jigs is provided with a sensor responsive to the detected portion, and the control means includes: (a-1) a pair of edges of the detected portion; The arm is moved so that the detection point of the sensor moves along the forward direction of a predetermined trajectory crossing with each other, and the position when each of the pair of edges is detected by the sensor is moved in a pair of forward directions. Forward direction detecting means for acquiring as an edge position, (a-2) moving the arm so that a detection point of the sensor moves along a reverse direction of the predetermined trajectory, and each of the pair of edges is Position when detected by sensor (A-3) means for obtaining the position information based on the pair of forward edge positions and the pair of reverse edge positions. A transfer device characterized by the above-mentioned. 3. The apparatus according to claim 2, wherein each of the forward direction detecting means and the backward direction detecting means detects the detected portion by the sensor in parallel with the movement while moving the arm. A transport device characterized by taking in output. 4. A storage means for mounting a storage container for storing a plurality of substrates thereon, wherein said mounting table is provided as substrate transfer means for loading and unloading a substrate to and from the storage container mounted on the mounting table. A substrate loading / unloading device comprising the transport device according to any one of claims 1 to 3. 5. A processing unit for performing a predetermined process on the substrate, wherein the substrate is taken out of the storage container, transported to the processing unit, and the substrate on which the predetermined process is completed is processed by the processing unit. 4. A substrate processing apparatus, comprising: the transfer device according to claim 1 as a substrate transfer unit that receives from a processing unit and stores the substrate in the storage container. 6. A jig used for acquiring position information when the arm accesses a storage container storing an object to be transported, wherein the arm is provided with an arm capable of holding the object to be transported. (A) a main body portion that can be stored at a predetermined position of the storage container; and (b) a detected portion formed at a predetermined portion of the main body portion and having a shape that can be detected by a predetermined non-contact sensor. ,
A jig, wherein at least a part of the outer shape of the main body is shaped to conform to the outer shape of the transferred object. 7. A transfer device provided with an arm capable of holding a transferred object, a jig used for acquiring positional information when the arm accesses a storage container storing the transferred object. (A) a plurality of sensors for detecting the position of a predetermined detected portion outside the jig in different directions, and (b) the plurality of sensors are provided at predetermined positions and can be held by the arm. A jig, wherein a portion of the main body, which is in contact with the arm when held by the arm, is positioned and held by the arm. 8. The jig according to claim 6, wherein the transferred object is a circular substrate, and at least a part of an outer shape of the main body has a circular or arc shape. A jig having a thin plate shape.