JPH11160387A - Ic tester, ic testing method and storage medium - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve efficiency and reduce cost, by detecting abnormal parameters when they are inputted, and saving overlapped processes in an application program for IC test execution. SOLUTION: A controlling/processing equipment 9 analyzes the measured values inputted by an input equipment 3, judges whether the values are effective values which a device to be measured can process or abnormal values, and outputs the result of judgement to a setting equipment 7. In the case of effective measured values, the measured values are updated, and the test of the divice to be measured is performed by an IC tester 5, on the basis of the measured values.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an IC test method for testing a semiconductor integrated circuit, and more particularly, to detecting an error in a test parameter input to a device under test when testing the device under test. It relates to an IC test method.

[0002]

2. Description of the Related Art In recent years, the use of ICs (Integrated Circuits) in circuits used in various electronic devices has been rapidly advanced. IC, LSI (Large Scale Integrated circuit)
For example, the function of each element such as a resistor, a capacitor, and a transistor is realized by a circuit formed by a method such as printing or vapor deposition. Therefore, such an IC
A test is performed to determine whether or not the characteristics of the LSI or the LSI satisfy the standard.

In general, in an IC test, a method is used in which a device under test, which is a test object, actually executes processing and the presence or absence of an abnormal operation is determined by referring to the processing result. In this method, by inputting parameters for which the result after the normal processing has already been clarified to the device under test and executing the processing, and referencing the obtained result to the result of normal operation, The presence or absence of abnormal operation is determined. The input parameters vary depending on the purpose of the test, such as the measurement of the processing speed and the occurrence rate of malfunction, and different parameters are used depending on the type of the device under test.

[0004]

However, the above-mentioned IC
The parameters input for the test are input by the operator performing the test every time the test is performed, and therefore, an abnormal parameter may be input due to an input error. In this case, it cannot be determined whether the device under test is normal or not, which may lead to an abnormal operation.

Therefore, conventionally, a function of detecting an abnormal parameter is provided in an application program for executing an IC test. That is, in order to perform various tests as described above, an application program corresponding to each test purpose is executed in the IC test apparatus. By providing a function of detecting an abnormal parameter to the application program, a test is not executed based on the abnormal parameter.

FIG. 5 is a flowchart showing an abnormal value detection process included in an application program executed in a conventional IC test apparatus. As shown in FIG. 5, when a measured value as a test parameter is input (step S21), the measured value is analyzed (step S22) to determine whether it is a valid measured value or an inappropriate abnormal value. Is determined (step S23).

As a result of the judgment, if the input measured value is valid, the updating process is performed as a new measured value (step S2).
4) If it is an inappropriate abnormal value, an error is displayed (step S25).

However, if the above-mentioned processing is included in all the application programs for the IC test, the size of each application program increases,
There is a problem that the cost is increased in order to use a storage medium or the like provided in the IC test apparatus. Further, there is a problem that the development work of each application program is complicated. Further, it is inefficient that a plurality of application programs each include the same processing.

The present invention has been made in order to solve the above problems.
An IC test that can detect an abnormal parameter when the parameter is input, and can reduce the number of processes that are duplicated in the application program for executing the IC test, thereby improving efficiency and reducing costs. It is an object to provide an apparatus, an IC test method, and a storage medium.

[0010]

According to a first aspect of the present invention, there is provided an input unit for inputting a test parameter, and an input unit for inputting a test parameter based on the test parameter input by the input unit. Test signal generating means for generating a test signal, test means for outputting the test signal generated by the test signal generating means to the device under test, and causing the device under test to execute processing; and A test means for determining a result obtained by causing the device under test to execute a process, wherein the test parameter is an abnormal value outside a range in which the device under test can operate normally. Independently having an abnormal value detecting means for determining whether or not there is,
It is characterized by.

According to the first aspect of the present invention, a test parameter is input by the input means, a test signal is generated by the test signal generation means based on the input test parameter, and the test means generates the test signal. An IC test apparatus that outputs the generated test signal to the device under test, causes the device under test to execute the process, and determines the result obtained by causing the device under test to execute the process by the determining unit. Independently provided abnormal value detection means determines whether or not the test parameter is an abnormal value that is out of a range in which the device under test can operate normally.

According to a third aspect of the present invention, a test signal is generated based on an input test parameter, the test signal is output to a device under test, and the test signal is output to the device under test based on the test signal. IC for judging the result obtained by executing processing and testing the device under test
In the test method, an abnormal value detection process for determining whether or not the test parameter is an abnormal value that does not conform to a range in which the device under test can operate normally is independently executed.

According to the third aspect of the present invention, a test signal is generated based on the input test parameters, the test signal is output to the device under test, and the test signal is generated based on the test signal. In an IC test method for testing a device under test by judging a result obtained by causing a device to execute a process, whether a test parameter is an abnormal value that does not conform to a range in which the device under test can normally operate. The abnormal value detection processing for judging is performed independently.

According to a fifth aspect of the present invention, there is provided a computer-executable program code for inputting a test parameter, and a computer-executable program code for generating a test signal based on the input test parameter. And outputting a generated test signal to the device under test, a program code executable by a computer for causing the device under test to execute the process, and a result obtained by causing the device under test to execute the process. A storage medium storing a first program including a program code executable by a computer to be determined, wherein the test parameter is an abnormal value that is out of a range in which the device under test can operate normally. The second program including the program code executable by the computer for determining whether It is characterized in that.

According to the fifth aspect of the present invention, the computer code for inputting the test parameters and the computer for generating the test signal based on the input test parameters are executable. A program code, a program code that outputs the generated test signal to the device under test, and is executable by a computer that causes the device under test to execute a process, and a result obtained by causing the device under test to execute the process. A computer-executable program code for determining whether the test parameter is an abnormal value that is out of a range in which the device under test can operate normally. And storing a second program including a program code executable by a computer for determining whether or not the program is executable.

Therefore, the processing for determining whether or not the test parameter is an abnormal value can be executed independently. For example, the setting is performed in accordance with the type of the test or the type of the device under test. It is not necessary to incorporate the processing for determining the test parameters into the setting application program, and the processing duplicated from the conventional setting application program can be omitted. As a result, efficiency and cost reduction can be achieved in the development work of the application program and in a device or the like that executes the application program.

According to a second aspect of the present invention, there is provided the method according to the first aspect.
In the C test apparatus, the abnormal value detecting means outputs only the parameter determined to be not an abnormal value to the signal generating means, and the test signal generating means determines that the parameter is not an abnormal value by the abnormal value detecting means. The test signal is generated based only on the test parameter.

According to the second aspect of the present invention, in the IC test apparatus according to the first aspect, the abnormal value detecting means outputs only the parameter determined not to be an abnormal value to the signal generating means, and outputs the test signal generating means. Generates a test signal based only on the test parameters determined not to be abnormal values by the abnormal value detecting means.

The invention according to claim 4 is the invention according to claim 3.
In the C test method, the test signal is generated based on only the test parameter determined to be not an abnormal value by the abnormal value detection processing.

According to the fourth aspect of the present invention, in the IC test method according to the third aspect, a test signal is generated based only on the test parameter determined not to be an abnormal value by the abnormal value detection processing. You.

Therefore, it is possible to prevent the test signal generation means from trying to generate a test signal based on an abnormal value of the test parameter. As a result, the efficiency can be further improved, including the improvement of the processing speed.

According to a sixth aspect of the present invention, there is provided the storage medium according to the fifth aspect, wherein the first program reads data indicating a result obtained by executing the second program by a computer. Further includes an executable program code.

According to a sixth aspect of the present invention, in the storage medium of the fifth aspect, the first program stores the second program.
The program further includes a computer-executable program code for reading data indicating a result obtained by executing the program by the computer.

Therefore, efficiency is improved by independently executing the judgment processing for judging whether or not the test parameter is an abnormal value, and when executing other processing, the result of the judgment processing is determined. , And can respond more quickly.

[0025]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described below with reference to FIGS.

First, the configuration will be described.

FIG. 1 shows an IC according to an embodiment of the present invention.
FIG. 2 is a block diagram illustrating a configuration of a test system. This figure 1
The IC test system 1 includes a control / processing unit 2, an input device 3, an output device 4, and an IC test device 5. The control / processing unit 2 further includes a program storage device 6,
It comprises a setting device 7, a communication management device 8, and a control / processing device 9.

The input device 3 and the output device 4 are connected to the setting device 7 respectively.
The communication management device 8 and the control / processing device 9 and the control / processing device 9 and the IC test device 5 are connected to each other so that data and the like can be transmitted.

Each part of the setting device 7, communication management device 8, and control / processing device 9 provided in the control / processing portion 2
Each of them is connected to the program storage device 6 and can read and execute various programs stored in the program storage device 6.

The input device 3 comprises a keyboard having cursor keys, numeric input keys, and various function keys. When each key is pressed when inputting measured values as test parameters and various data, The key press signal is output to the setting device 7. Note that this input device 3
Pointing Device such as mouse
) May be provided.

The output device 4 is a CRT (Cathode Ray Tub).
e) and a display screen constituted by an LCD (Liquid Crystal Display), and displays measured values and the like on the display screen in accordance with a display signal input from the setting device 7.

The IC test apparatus 5 is connected to a device under test (not shown) to be tested, generates a test signal based on a measurement value input from the control / processing unit 2, and generates a test signal. , And a process is executed based on the test signal. Then, a test result output from the device under test is detected by this process, and the performance of each device under test is determined based on the value of the process result to test each device under test. Further, the result of the test of the device under test is transmitted to the output device 4 via the control / processing section 2 and displayed on the display screen.

The setting device 7 reads and executes an application program stored in the program storage device 6, and performs various settings for testing the device under test executed by the IC test device 5, for the purpose of the test and the This is performed for each type of measurement device. In addition, the measured / input value input from the input device 3 is transmitted to the control / processing device 9 via the communication management device 8.
When the control / processing device 9 inputs a result of determining whether the measured value is a valid value or an abnormal value, display information for displaying a measured value or a measured value error display is displayed. Is generated, output to 4, and output on the display screen.

The communication management device 8 includes a program storage device 6
For example, one measurement value is input via the setting device 7 and another instruction or measurement value is input during execution of the processing. In some cases, the setting device 7 is the program storage device 6
For example, when data relating to a plurality of settings are input by a plurality of application programs read from the IC, the transmission of these data is controlled to prevent a malfunction of the IC test apparatus 5.

The control / processing device 9 reads and executes the control / processing program stored in the program storage device 6, and executes the measurement value input by the input device 3
It is determined whether the value is a valid value or an abnormal value that deviates from the processable range of a device under test (not shown) connected to the IC test apparatus 5, and the result of this determination is transmitted via the communication management apparatus 8. And outputs it to the setting device 7.

The program storage device 6 has a storage medium composed of a magnetic or optical recording medium or a semiconductor memory. The storage medium is either fixedly provided in the program storage device 6 or detachable. It is mounted freely, and stores various programs and the like as shown in FIG.

FIG. 2 is a diagram schematically showing an internal configuration of the program storage device 6. As shown in the figure, the program storage device 6 includes a setting device 7, a communication management device 8,
Various programs such as various application programs, communication management programs, and control / processing programs to be executed by the processing device 9 are stored, and according to read signals input from the setting device 7, the communication management device 8, and the control / processing device 9, Output various programs.

Next, the operation will be described.

FIG. 3 is a flowchart showing the measured value input processing executed by the setting device 7.

First, when it is detected that a measured value has been input from the input device 3 (step S1), a measured value update request for setting this measured value as a new measured value is controlled via the communication management device 8 through the communication management device 8. / Output to the processing device 9 (step S2).

The control / processing unit 9 determines whether the measured value output to the control / processing unit 9 is a valid value or an abnormal value that cannot be used for a test. When notified from the processing device 9 (step S
3) Referring to the contents of the notification (step S4), if the notification is that the measured value is valid, the measured value is displayed on the display screen (step S5), and the fact that the measured value is an abnormal value is displayed. Is displayed, a measurement value error display is displayed on the display screen (step S6).

FIG. 4 is a flowchart showing the measurement value judgment processing executed by the control / processing device 9.

When a request for updating the measured value is transmitted from the setting device 7 (step S2), the control / processing device 9 detects the request for updating the measured value in step S11, and proceeds to step S12 to change the measured value. The analysis is performed, and in step S13, it is determined whether the measured value is a valid value or an abnormal value.

If the result of determination in step S13 is that the input measured value is a valid value, step S1
The process proceeds to step S4, where the measured value is updated to the newly input measured value, and the process proceeds to step S15 to output a measured value update notification to the setting device 7.

If it is determined in step S13 that the input measured value is an abnormal value, the flow shifts to step S16 to output a measured value error notification to the setting device 7.

As described above, according to the IC test system 1 according to the embodiment of the present invention, the measured values as the test parameters input from the input device 3 can be processed by the device under test (not shown). If the abnormal value is out of the range, the control / processing device 9 determines that the value is abnormal, and the output value of the measured value is displayed by the output device 4 without updating the measured value. It is possible to prevent abnormal measurement values from being transmitted to the test apparatus 5. Further, since the setting device 7 does not execute the measurement value determination process, various application programs executed by the setting device 7 do not need to include the measurement value determination process.
This makes it possible to omit the measurement value determination processing in a program executed by a device other than the control / processing device 9.

In the above-described embodiment, the setting device 7 is configured to execute the setting for various tests for each purpose of the test and each type of the device to be measured. However, the present invention is not limited to this. It is not something to be done. Further, in the IC test system 1, a storage device for storing the measured values and various data may be further provided, a printing device may be provided as an output device, and other details of the gist of the present invention. It can be changed as appropriate without departing from the scope.

[0048]

According to the first, third and fifth aspects of the present invention, it is possible to independently execute a process of determining whether or not a test parameter is an abnormal value. There is no need to incorporate a process for determining a test parameter into a setting application program for making settings in accordance with the type or the type of the device under test, and it is possible to eliminate duplicate processing from the conventional setting application program. As a result, efficiency and cost reduction can be achieved in the development work of the application program and in a device or the like that executes the application program.

According to the second and fourth aspects of the present invention, it is possible to prevent the test signal generating means from trying to generate a test signal based on a test parameter having an abnormal value. As a result, the efficiency can be further improved, including the improvement of the processing speed.

According to the sixth aspect of the present invention, the determination process for determining whether or not the test parameter is an abnormal value is independently executed, thereby improving efficiency and executing other processes. At this time, the determination can be performed based on the result of the determination process, so that even if the test parameter is an abnormal value, it is possible to respond more quickly.

[Brief description of the drawings]

FIG. 1 is a block diagram showing a configuration of an IC test system as an embodiment of the present invention.

FIG. 2 is a diagram schematically showing an internal configuration of a program storage device of FIG. 1;

FIG. 3 is a flowchart showing a measurement value input process executed by the setting device of FIG. 1;

FIG. 4 is a flowchart showing a measurement value determination process executed by the control / processing device of FIG. 1;

FIG. 5 is a flowchart showing an abnormal value detection process included in an application program executed in a conventional IC test apparatus.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 IC test system 2 Control / processing part 3 Input device 4 Output device 5 IC test device 6 Program storage device 7 Setting device 8 Communication management device 9 Control / processing device

Claims (6)

[Claims] 1. An input means for inputting a test parameter, a test signal generating means for generating a test signal based on the test parameter input by the input means, and a test signal generated by the test signal generating means. Testing means for outputting the test signal to the device under test and causing the device under test to execute processing; and determining means for determining a result obtained by causing the device under test to execute processing by the testing means. I comprising
In the C test apparatus, an abnormal value detection unit that determines whether the test parameter is an abnormal value that is out of a range in which the device under test can operate normally is independently provided. IC test equipment. 2. The abnormal value detecting means outputs only the parameter determined not to be an abnormal value to the signal generating means, and the test signal generating means determines that the parameter is not an abnormal value by the abnormal value detecting means. The IC test apparatus according to claim 1, wherein the test signal is generated based only on the test parameter. 3. A test signal is generated based on an input test parameter, the test signal is output to a device under test, and the device under test executes a process based on the test signal. An IC test method for determining the obtained result and testing the device under test, comprising: an abnormality for determining whether the test parameter is an abnormal value that does not conform to a range in which the device under test can operate normally. Performing an independent value detection process. 4. The IC test method according to claim 3, wherein the test signal is generated based only on the test parameter determined not to be an abnormal value by the abnormal value detection processing. 5. A computer-executable program code for inputting test parameters, a computer-executable program code for generating a test signal based on the input test parameters, and a generated test Output a signal to the device under test,
A first program including: a program code executable by a computer that causes the device under test to execute a process; and a program code executable by a computer that determines a result obtained by causing the device under test to execute a process. A second storage medium storing computer-executable program code for determining whether or not the test parameter is an abnormal value outside a range in which the device under test can operate normally. A storage medium characterized by further storing the program. 6. The computer-readable storage medium according to claim 1, wherein the first program further includes a computer-executable program code for reading data indicating a result obtained by executing the second program by a computer. 5. The storage medium according to 5.