JPH11157063A - Ink jet type recording head - Google Patents
Ink jet type recording headInfo
- Publication number
- JPH11157063A JPH11157063A JP32482497A JP32482497A JPH11157063A JP H11157063 A JPH11157063 A JP H11157063A JP 32482497 A JP32482497 A JP 32482497A JP 32482497 A JP32482497 A JP 32482497A JP H11157063 A JPH11157063 A JP H11157063A
- Authority
- JP
- Japan
- Prior art keywords
- dummy
- pressure chamber
- supply port
- recording head
- ink jet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明はノズルプレート、流
路基板、振動板を接着することによってノズル、圧力
室、供給口、共通インク室を形成し、振動板に接着され
た圧電素子をアクチュエータとし、圧力室を膨張収縮さ
せてインク滴をノズルから吐出させるインクジェット式
記録ヘッドに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention forms a nozzle, a pressure chamber, a supply port, and a common ink chamber by bonding a nozzle plate, a flow path substrate, and a vibration plate, and uses a piezoelectric element bonded to the vibration plate as an actuator. In addition, the present invention relates to an ink jet type recording head that expands and contracts a pressure chamber to discharge ink droplets from nozzles.
【０００２】[0002]
【従来の技術】ノズルプレート、流路基板、振動板を接
着することで構成されるインクジェット式記録ヘッド
は、図７に示すように複数のノズルＡが形成されたノズ
ルプレートＢと、圧力室Ｃ、供給口Ｄ、共通インク室Ｅ
が形成された流路基板Ｆと、振動板Ｇを接着しインクの
流路を構成している。さらに圧電素子Ｈが支持基板Ｉに
取り付けられ、支持基板ＩがケースＪに取り付けられて
いる。また、圧電素子Ｈは振動板Ｇと接着されて圧電素
子Ｈの動きを圧力室Ｃに伝える構造になっている。2. Description of the Related Art An ink jet recording head constituted by bonding a nozzle plate, a flow path substrate and a vibration plate has a nozzle plate B in which a plurality of nozzles A are formed as shown in FIG. , Supply port D, common ink chamber E
The diaphragm G is adhered to the flow path substrate F on which the ink is formed to form an ink flow path. Further, the piezoelectric element H is mounted on the support substrate I, and the support substrate I is mounted on the case J. Further, the piezoelectric element H is bonded to the vibration plate G so as to transmit the movement of the piezoelectric element H to the pressure chamber C.
【０００３】このノズルプレートＢ、流路基板Ｆ、振動
板Ｇの接着の際に両端の圧力室Ｋに接着剤が流れ込み、
両端の圧力室Ｋの寸法が変化する。そこで両端の圧力室
Ｋをダミーとしてインクの吐出には使用しないようにし
ていた。At the time of bonding the nozzle plate B, the flow path substrate F, and the diaphragm G, the adhesive flows into the pressure chambers K at both ends,
The dimensions of the pressure chambers K at both ends change. Therefore, the pressure chambers K at both ends are not used as inks for discharging ink.
【０００４】[0004]
【発明が解決しようとする課題】従来の流路基板の形状
では接着したときに両端の圧力室に接着剤が浸入するた
め両端のノズルをダミーノズルとし、吐出には使用しな
いことで問題を解決してきた。しかし、1つのノズルプ
レートから複数の色のインクを吐出するとき、共通イン
ク室と連通したダミーノズルが存在するとそのノズルか
ら混合したインクが浸入し圧力室、供給口を通り共通イ
ンク室まで浸入する。それで、本来のインクの色が変化
してしまい、印字したときに色の再現性が悪化してしま
う。With the conventional flow path substrate, the adhesive penetrates into the pressure chambers at both ends when bonded, so that the nozzles at both ends are dummy nozzles, and the problem is solved by not using the nozzles for discharge. I've been. However, when discharging a plurality of colors of ink from one nozzle plate, if there is a dummy nozzle communicating with the common ink chamber, the mixed ink enters from the nozzle and penetrates to the common ink chamber through the pressure chamber and the supply port. . Therefore, the original color of the ink changes, and the color reproducibility deteriorates when printing is performed.
【０００５】本発明はこのような問題に鑑みてなされた
ものであって、その目的とするところは流路基板の形状
を最適化することによって圧力室の両端に接着剤の浸入
を防ぎ、混色の原因となるダミーノズルのないインクジ
ェット式記録ヘッドを提供することである。The present invention has been made in view of such a problem. It is an object of the present invention to optimize the shape of a flow path substrate so as to prevent infiltration of an adhesive into both ends of a pressure chamber and achieve color mixing. An object of the present invention is to provide an ink jet recording head without a dummy nozzle which causes the above problem.
【０００６】[0006]
【課題を解決するための手段】このような問題を解決す
るために、本発明においては、インク滴を吐出する列設
された複数のノズルと、該ノズルにそれぞれ連通する列
設された複数の圧力室と、該圧力室にそれぞれ連通する
複数の供給口と、該供給口に連通する共通インク室とを
備えたインクジェット式記録ヘッドにおいて、列設され
た前記圧力室の両端にダミー圧力室と、該ダミー圧力室
に連通するダミー供給口を備え、該ダミー圧力室及びダ
ミー供給口は、前記圧力室及び前記共通インク室と分離
して形成されていることを特徴とする。In order to solve such a problem, according to the present invention, a plurality of nozzles arranged in a row for discharging ink droplets and a plurality of nozzles arranged in a row communicating with the nozzles are provided. In an ink jet recording head including a pressure chamber, a plurality of supply ports each communicating with the pressure chamber, and a common ink chamber communicating with the supply port, dummy pressure chambers are provided at both ends of the pressure chambers arranged in a row. And a dummy supply port communicating with the dummy pressure chamber, wherein the dummy pressure chamber and the dummy supply port are formed separately from the pressure chamber and the common ink chamber.
【０００７】また、前記ダミー圧力室と両端の圧力室の
隔壁の厚さと各々の圧力室の隔壁の厚さを等しくし、両
端の圧力室に連通する供給口と前記ダミー供給口の隔壁
の厚さと前記共通インク室と前記ダミー供給口の隔壁の
厚さを各々の圧力室の隔壁の厚さ以下にするようにし
た。Further, the thickness of the partition walls of the dummy pressure chamber and the pressure chambers at both ends is made equal to the thickness of the partition walls of each pressure chamber, and the thickness of the supply port communicating with the pressure chambers at both ends and the thickness of the partition wall of the dummy supply port are made equal. The thickness of the partition wall of the common ink chamber and the dummy supply port is set to be equal to or less than the thickness of the partition wall of each pressure chamber.
【０００８】また、前記ダミー供給口の幅を前記供給口
の幅以下にした。また、前記ダミー圧力室に大気に連通
する大気開放口を設けた。あるいはダミー供給口を大気
に連通させ、大気開放口とした。また、前記ダミー圧力
室に連通するダミーノズルを形成し、大気開放口とし
た。Further, the width of the dummy supply port is set to be smaller than the width of the supply port. The dummy pressure chamber is provided with an atmosphere opening port communicating with the atmosphere. Alternatively, the dummy supply port was communicated with the atmosphere to form an atmosphere opening port. In addition, a dummy nozzle communicating with the dummy pressure chamber was formed to serve as an air opening port.
【０００９】[0009]
【発明の実施の形態】以下に本発明における実施例の詳
細を図に基づいて説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The embodiments of the present invention will be described below in detail with reference to the drawings.
【００１０】図1は本発明の第一実施例を示すもので、
ノズル１を複数配列しているノズルプレート２と、圧力
室３、供給口４、共通インク室５、ダミー圧力室８、ダ
ミー供給口１５、接着逃げ溝１１が形成された流路基板
６と、振動板７とを接着することでインクの流路を形成
する。この時、振動板には縦振動あるいは横振動の圧電
素子がアクチュエータとして接着されており、この圧電
素子の振動が振動板６から圧力室３に伝えられ、圧力室
３内の圧力を変動させることでノズル１からインクを吐
出させる。FIG. 1 shows a first embodiment of the present invention.
A nozzle plate 2 in which a plurality of nozzles 1 are arranged, a pressure chamber 3, a supply port 4, a common ink chamber 5, a dummy pressure chamber 8, a dummy supply port 15, and a flow path substrate 6 in which an adhesive relief groove 11 is formed; The ink flow path is formed by bonding the vibration plate 7. At this time, a piezoelectric element of longitudinal vibration or lateral vibration is bonded to the diaphragm as an actuator, and the vibration of the piezoelectric element is transmitted from the diaphragm 6 to the pressure chamber 3 to change the pressure in the pressure chamber 3. Ejects ink from the nozzle 1.
【００１１】この実施例では流路基板６に形成されてい
るダミー圧力室８とそれに連通するダミー供給口１５
は、共通インク室５、圧力室３とは分離されている。従
来ダミー圧力室８はノズル１と連通し供給口４を通じ共
通インク室５と連通していた。このためノズル１から浸
入したインクが共通インク室５まで浸入して混色が起こ
っていた。そこで、図１のようにノズル１と連通してい
ないダミー圧力室８を形成することにより混色を防止す
ることができる。さらに、ダミー圧力室８をはさみ圧力
室３の反対の領域から浸入してきた接着剤をダミー圧力
室８で止めて圧力室３への浸入を防止することが出来
る。さらに、ダミー供給口１５の長さを供給口４の長さ
より長くすることで、接着剤がダミー供給口１５に入り
やすくなり、圧力室３への接着剤の浸入の防止能力が高
まる。また両端の圧力室３とダミー圧力室８の隔壁１６
は各々の圧力室３の隔壁９と厚さを等しくすることで、
両端の圧力室のインクの吐出特性とその他の圧力室のイ
ンク吐出特性とが変わらないようになっている。このよ
うな流路基板６をシリコンの異方性エッチングによって
形成することで高い寸法精度を得ることが出来る。In this embodiment, a dummy pressure chamber 8 formed in a flow path substrate 6 and a dummy supply port 15 communicating therewith are provided.
Are separated from the common ink chamber 5 and the pressure chamber 3. Conventionally, the dummy pressure chamber 8 communicates with the nozzle 1 and with the common ink chamber 5 through the supply port 4. For this reason, the ink that has entered from the nozzle 1 has entered the common ink chamber 5 and color mixing has occurred. Therefore, color mixing can be prevented by forming the dummy pressure chamber 8 not communicating with the nozzle 1 as shown in FIG. Further, the dummy pressure chamber 8 is sandwiched between the pressure chamber 3 and the adhesive that has entered from the area opposite to the pressure chamber 3 can be stopped by the dummy pressure chamber 8 to prevent the adhesive from entering the pressure chamber 3. Furthermore, by making the length of the dummy supply port 15 longer than the length of the supply port 4, the adhesive easily enters the dummy supply port 15, and the ability to prevent the adhesive from entering the pressure chamber 3 is increased. In addition, the partition 16 of the pressure chamber 3 at both ends and the dummy pressure chamber 8
By making the thickness equal to the partition 9 of each pressure chamber 3,
The ink ejection characteristics of the pressure chambers at both ends and the ink ejection characteristics of the other pressure chambers are not changed. High dimensional accuracy can be obtained by forming such a flow path substrate 6 by anisotropic etching of silicon.
【００１２】本発明の第二の実施例を図２で説明する。
流路基板６には圧力室３、供給口４、共通インク室５、
ダミー圧力室８、ダミー供給口１５、接着逃げ溝１１が
形成されている。このとき両端の圧力室３に連通する供
給口４とダミー圧力室８に連通するダミー供給口１５の
隔壁１７の厚さと共通インク室５とダミー供給口１５の
隔壁１７の厚さが各々の圧力室３の隔壁９の厚さ以下と
なっている。この厚さは接着強度を保てる限界まで薄く
する。この実施例の場合厚さを15μｍまで薄くすること
が出来る。このことによって流路基板６とノズルプレー
ト２、振動板７を接着する際に共通インク室をはさみ圧
力室の反対側の領域にある接着剤がダミー供給口１５と
共通インク室５の隔壁を通る量を減らすことができる。
またこの時、ダミー供給口１５の幅を供給口４の幅以下
とすることでダミー供給口１５側の毛管力を高めること
が出来、ダミー供給口１５と共通インク室５の隔壁を通
ってくる接着剤がダミー圧力室８へ流れやすくなり、両
端の圧力室３への接着剤の浸入を防止できる。さらに、
ダミー圧力室８にはダミー圧力室８をはさみ両端の圧力
室３に対向する領域からの接着剤の流れ込みを防止する
という効果がある。A second embodiment of the present invention will be described with reference to FIG.
A pressure chamber 3, a supply port 4, a common ink chamber 5,
A dummy pressure chamber 8, a dummy supply port 15, and an adhesive escape groove 11 are formed. At this time, the thickness of the partition 17 of the supply port 4 communicating with the pressure chambers 3 at both ends and the dummy supply port 15 communicating with the dummy pressure chamber 8 and the thickness of the partition 17 of the common ink chamber 5 and the dummy supply port 15 are determined by the respective pressures. It is less than the thickness of the partition 9 of the chamber 3. This thickness is reduced to the limit that can maintain the adhesive strength. In the case of this embodiment, the thickness can be reduced to 15 μm. Thus, when the flow path substrate 6 is bonded to the nozzle plate 2 and the vibrating plate 7, the adhesive in the area opposite to the pressure chamber with the common ink chamber therebetween passes through the dummy supply port 15 and the partition wall of the common ink chamber 5. The amount can be reduced.
Also, at this time, by setting the width of the dummy supply port 15 to be equal to or less than the width of the supply port 4, the capillary force on the dummy supply port 15 side can be increased, and the dummy supply port 15 and the partition wall of the common ink chamber 5 come through. The adhesive easily flows into the dummy pressure chamber 8, and the intrusion of the adhesive into the pressure chambers 3 at both ends can be prevented. further,
The dummy pressure chamber 8 has the effect of sandwiching the dummy pressure chamber 8 and preventing the flow of the adhesive from the region opposed to the pressure chamber 3 at both ends.
【００１３】また、本発明の第三の実施例を図３で示
す。流路基板６には圧力室３、供給口４、共通インク室
５、ダミー圧力室８、ダミー供給口１５、接着逃げ溝１
１が形成されている。ダミー圧力室８ａには大気と連通
するように大気開放口１０を持たせている。大気開放口
１０が無いとダミー圧力室８に接着剤がある程度浸入す
るとダミー圧力室の内圧が高くなり、接着剤がダミー圧
力室８に入っていかなくなる。大気開放口１０を持たせ
ることでダミー圧力室８に接着剤が浸入しても大気開放
口１０から空気が流れ出るのでダミー圧力室８の内圧が
高くならず、接着剤がダミー圧力室８に流れ込みやすく
なる。さらに、大気開放口１０の深さが、流路基板６の
厚みに等しくすることで、接着剤によって大気開放口１
０が埋まってしまうということがなくなる。よって、ダ
ミー圧力室８をはさんで圧力室３に対向する領域から接
着剤が圧力室３の方向に流れ込んできたときに接着剤が
ダミー圧力室８に入っていくことで圧力室３への接着剤
の浸入を防ぐことが出来る。FIG. 3 shows a third embodiment of the present invention. In the flow path substrate 6, the pressure chamber 3, the supply port 4, the common ink chamber 5, the dummy pressure chamber 8, the dummy supply port 15, the adhesive escape groove 1
1 is formed. The dummy pressure chamber 8a has an atmosphere opening port 10 so as to communicate with the atmosphere. If the adhesive does not enter the dummy pressure chamber 8 to some extent without the air opening 10, the internal pressure of the dummy pressure chamber increases and the adhesive does not enter the dummy pressure chamber 8. By providing the air opening 10, even if the adhesive enters the dummy pressure chamber 8, air flows out from the air opening 10, so that the internal pressure of the dummy pressure chamber 8 does not increase, and the adhesive flows into the dummy pressure chamber 8. It will be easier. Further, by making the depth of the air opening 10 equal to the thickness of the flow path substrate 6, the air opening 1
Zeros will not be buried. Therefore, when the adhesive flows in the direction of the pressure chamber 3 from the region facing the pressure chamber 3 with the dummy pressure chamber 8 interposed therebetween, the adhesive enters the dummy pressure chamber 8 and Adhesive intrusion can be prevented.
【００１４】図４に本発明の第四の実施例を示す。流路
基板６には圧力室３、供給口４、共通インク室５、ダミ
ー圧力室８、ダミー供給口１５、接着逃げ溝１１が形成
されている。ダミー圧力室８ａには大気と連通するよう
に大気開放口１０を持たせている。この時、大気開放口
１０の深さは流路基板６の厚さより小さく、幅はダミー
圧力室８ａの幅以上としている。大気開放口１０の深さ
を流路基板６の厚さと等しくするとその付近の強度が弱
くなるという問題がある。そこで大気開放口１０の深さ
を流路基板６の厚さより小さくすることで、十分な強度
をもたせることができ、さらに幅をダミー圧力室の幅以
上とすることで大気開放口１０が接着剤で埋まってしま
うことを防ぐことが出来る。FIG. 4 shows a fourth embodiment of the present invention. A pressure chamber 3, a supply port 4, a common ink chamber 5, a dummy pressure chamber 8, a dummy supply port 15, and an adhesive escape groove 11 are formed in the flow path substrate 6. The dummy pressure chamber 8a has an atmosphere opening port 10 so as to communicate with the atmosphere. At this time, the depth of the air opening 10 is smaller than the thickness of the flow path substrate 6, and the width is equal to or larger than the width of the dummy pressure chamber 8a. When the depth of the air opening 10 is made equal to the thickness of the flow path substrate 6, there is a problem that the strength in the vicinity thereof becomes weak. Therefore, by making the depth of the air opening 10 smaller than the thickness of the flow path substrate 6, sufficient strength can be provided, and by making the width not less than the width of the dummy pressure chamber, the air opening Can be prevented from being buried.
【００１５】次に本発明の第五の実施例を図５で示す。
流路基板６には圧力室３、供給口４、共通インク室５、
ダミー圧力室８、複数のダミー供給口１５、接着逃げ溝
１１が形成されている。そのとき前記複数のダミー供給
口１５を流路基板６の端面まで延伸し、大気と連通させ
大気開放口１０として機能させる。これにより、一方の
大気開放口１０が接着剤によって塞がれても、他方の大
気開放口１０が開いていれば、そこから空気が流れでる
のでダミー圧力室８をはさみ圧力室３の反対の領域から
浸入してきた接着剤をダミー圧力室８で止めて圧力室３
への浸入を防止することが出来る。Next, a fifth embodiment of the present invention is shown in FIG.
A pressure chamber 3, a supply port 4, a common ink chamber 5,
A dummy pressure chamber 8, a plurality of dummy supply ports 15, and an adhesive escape groove 11 are formed. At this time, the plurality of dummy supply ports 15 extend to the end face of the flow path substrate 6 and communicate with the atmosphere to function as the atmosphere release port 10. Thus, even if one of the air opening ports 10 is closed by the adhesive, if the other air opening port 10 is open, air flows from there, so that the dummy pressure chamber 8 is sandwiched and the opposite of the pressure chamber 3 is provided. The adhesive invading from the area is stopped at the dummy pressure chamber 8 and the pressure chamber 3 is stopped.
Can be prevented from invading.
【００１６】次に本発明の第六の実施例を図６で示す。Next, a sixth embodiment of the present invention is shown in FIG.
【００１７】流路基板６には圧力室３、供給口４、共通
インク室５、ダミー圧力室８、ダミー供給口１５が形成
されている。またノズルプレート２にはノズル１とダミ
ーノズル２０が形成されている。前記ダミーノズル２０
を大気開放口とすることでダミー圧力室８をはさみ圧力
室３の反対の領域から浸入してきた接着剤をダミー圧力
室８で止めて圧力室３への浸入を防止することが出来
る。さらに、ノズルプレート２側のダミー圧力室８と振
動板７側のダミー圧力室８を連通するように貫通孔２１
を設けることで両方のダミー圧力室８が大気開放口を持
つことになり、接着剤の圧力室３への浸入防止効果が高
くなる。このとき前記ダミーノズル２０と連通するダミ
ー圧力室８は共通インク室５と分離しているため混色は
起こらない。In the flow path substrate 6, a pressure chamber 3, a supply port 4, a common ink chamber 5, a dummy pressure chamber 8, and a dummy supply port 15 are formed. The nozzle plate 2 is provided with a nozzle 1 and a dummy nozzle 20. The dummy nozzle 20
Is used as the opening to the atmosphere, so that the dummy pressure chamber 8 is sandwiched between the pressure chambers 3 and the adhesive that has entered from the opposite area is stopped by the dummy pressure chambers 8 to prevent the adhesive from entering the pressure chambers 3. Further, through holes 21 are provided so as to communicate the dummy pressure chambers 8 on the nozzle plate 2 side and the dummy pressure chambers 8 on the diaphragm 7 side.
Is provided, both the dummy pressure chambers 8 have an opening to the atmosphere, and the effect of preventing the adhesive from entering the pressure chamber 3 is enhanced. At this time, since the dummy pressure chamber 8 communicating with the dummy nozzle 20 is separated from the common ink chamber 5, color mixing does not occur.
【００１８】[0018]
【発明の効果】本発明のインクジェット式記録ヘッドに
よれば、両端の圧力室への接着剤の浸入を防止でき、混
色の原因となるダミーノズルをなくすことが出来る。According to the ink jet recording head of the present invention, it is possible to prevent the adhesive from penetrating into the pressure chambers at both ends, and to eliminate a dummy nozzle which causes color mixing.
【図１】本発明の一実施例を示す。ノズルプレート、流
路基板、振動板の斜視図である。FIG. 1 shows an embodiment of the present invention. FIG. 3 is a perspective view of a nozzle plate, a flow path substrate, and a diaphragm.
【図２】本発明の一実施例を示す。流路基板の平面図で
ある。FIG. 2 shows an embodiment of the present invention. It is a top view of a flow path board.
【図３】本発明の一実施例を示す。（イ）は流路基板の
一実施例の斜視図である。（ロ）は圧力室の配列方向の
大気開放口付近の断面図。FIG. 3 shows an embodiment of the present invention. (A) is a perspective view of an embodiment of the flow path substrate. (B) is a cross-sectional view of the vicinity of the air opening in the direction in which the pressure chambers are arranged.
【図４】本発明の一実施例を示す。（イ）は流路基板の
一実施例の斜視図である。（ロ）は圧力室の配列方向の
大気開放口付近の断面図。FIG. 4 shows an embodiment of the present invention. (A) is a perspective view of an embodiment of the flow path substrate. (B) is a cross-sectional view of the vicinity of the air opening in the direction in which the pressure chambers are arranged.
【図５】本発明の一実施例を示す。（イ）は流路基板の
一実施例の斜視図である。（ロ）は圧力室の配列方向の
大気開放口付近の断面図。FIG. 5 shows an embodiment of the present invention. (A) is a perspective view of an embodiment of the flow path substrate. (B) is a cross-sectional view of the vicinity of the air opening in the direction in which the pressure chambers are arranged.
【図６】本発明の一実施例を示す。ノズルプレート、流
路基板、振動板の斜視図である。FIG. 6 shows an embodiment of the present invention. FIG. 3 is a perspective view of a nozzle plate, a flow path substrate, and a diaphragm.
【図７】従来のインクジェット式記録ヘッドの構成の一
例を示す斜視図である。FIG. 7 is a perspective view showing an example of a configuration of a conventional ink jet recording head.
１ ノズル ２ ノズルプレート ３ 圧力室 ４ 供給口 ５ 共通インク室 ６ 流路基板 ７ 振動板 ８ ダミー圧力室 １０ 大気開放口 １５ ダミー供給口 ２０ ダミーノズル DESCRIPTION OF SYMBOLS 1 Nozzle 2 Nozzle plate 3 Pressure chamber 4 Supply port 5 Common ink chamber 6 Flow path board 7 Vibration plate 8 Dummy pressure chamber 10 Atmospheric release port 15 Dummy supply port 20 Dummy nozzle
Claims (12)
ズルと、該ノズルにそれぞれ連通する列設された複数の
圧力室と、該圧力室にそれぞれ連通する複数の供給口
と、該供給口に連通する共通インク室とを備えたインク
ジェット式記録ヘッドにおいて、 列設された前記圧力室の両端にダミー圧力室と、該ダミ
ー圧力室に連通するダミー供給口を備え、該ダミー圧力
室及びダミー供給口は、前記圧力室及び前記共通インク
室と分離して形成されていることを特徴とするインクジ
ェット式記録ヘッド。A plurality of nozzles arranged in a row for discharging ink droplets, a plurality of pressure chambers arranged in a row communicating with the nozzles, a plurality of supply ports respectively communicating with the pressure chambers, and the supply In an ink jet recording head having a common ink chamber communicating with an opening, a dummy pressure chamber is provided at both ends of the pressure chambers arranged in a row, and a dummy supply port communicating with the dummy pressure chamber. An ink jet recording head, wherein the dummy supply port is formed separately from the pressure chamber and the common ink chamber.
ンク室となる凹部または貫通孔が形成された流路基板
と、該流路基板の一方の面を封止する前記ノズル開口が
形成されたノズルプレートと、前記流路基板の他方の面
を封止する振動板とを備え、 前記流路基板がシリコンの異方性エッチングにより形成
されたことを特徴とする請求項１記載のインクジェット
式記録ヘッド。2. A flow path substrate in which a depression or a through-hole serving as the pressure chamber, the supply port and the common ink chamber is formed, and the nozzle opening for sealing one surface of the flow path substrate is formed. 2. An ink jet system according to claim 1, further comprising: a nozzle plate provided with a vibration plate for sealing the other surface of the flow path substrate, wherein the flow path substrate is formed by anisotropic etching of silicon. Recording head.
長さよりも長いことを特徴とする請求項１記載のインク
ジェット式記録ヘッド。3. The ink jet recording head according to claim 1, wherein the length of the dummy supply port is longer than the length of the supply port.
の厚さが各々の圧力室の隔壁の厚さと等しいことを特徴
とする請求項１記載のインクジェット式記録ヘッド。4. The ink jet recording head according to claim 1, wherein the thickness of the partition walls of the dummy pressure chamber and the pressure chambers at both ends is equal to the thickness of the partition walls of each pressure chamber.
記ダミー供給口の隔壁の厚さと前記共通インク室と前記
ダミー供給口の隔壁の厚さが各々の圧力室の隔壁の厚さ
以下であることを特徴とする請求項1記載のインクジェ
ット式記録ヘッド。5. The partition wall thickness of the supply port and the dummy supply port communicating with the pressure chambers at both ends, and the thickness of the partition wall of the common ink chamber and the dummy supply port is equal to or less than the thickness of the partition wall of each pressure chamber. 2. The ink jet recording head according to claim 1, wherein
以下であることを特徴とする請求項１記載のインクジェ
ット式記録ヘッド。6. The ink jet recording head according to claim 1, wherein the width of the dummy supply port is smaller than the width of the supply port.
気開放口を備えたことを特徴とする請求項１記載のイン
クジェット式記録ヘッド。7. The ink jet recording head according to claim 1, further comprising an atmosphere opening port for communicating the dummy pressure chamber with the atmosphere.
厚みに等しいことを特徴とする請求項７記載のインクジ
ェット式記録ヘッド。8. The ink jet recording head according to claim 7, wherein the depth of the air opening is equal to the thickness of the flow path substrate.
厚み未満であり、前記大気開放口の幅がダミー圧力室以
上であることを特徴とする請求項７記載のインクジェッ
ト式記録ヘッド。9. The ink jet recording head according to claim 7, wherein the depth of the air opening is less than the thickness of the flow path substrate, and the width of the air opening is not less than the dummy pressure chamber. .
伸された複数のダミー供給口であることを特徴とする請
求項７記載のインクジェット式記録ヘッド。10. The ink jet recording head according to claim 7, wherein the air opening ports are a plurality of dummy supply ports extending to an end surface of the flow path substrate.
ことを特徴とする請求項７記載のインクジェット式記録
ヘッド。11. The ink jet recording head according to claim 7, wherein the air opening is a dummy nozzle.
振動板側の供給口が連通した貫通孔を持つことを特徴と
する請求項１または９記載のインクジェット式記録ヘッ
ド。12. The ink jet recording head according to claim 1, wherein a supply port on the nozzle plate side and a supply port on the diaphragm side communicate with each other.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32482497A JP3387402B2 (en) | 1997-11-26 | 1997-11-26 | Ink jet recording head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32482497A JP3387402B2 (en) | 1997-11-26 | 1997-11-26 | Ink jet recording head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH11157063A true JPH11157063A (en) | 1999-06-15 |
| JP3387402B2 JP3387402B2 (en) | 2003-03-17 |
Family
ID=18170095
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP32482497A Expired - Lifetime JP3387402B2 (en) | 1997-11-26 | 1997-11-26 | Ink jet recording head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3387402B2 (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006281603A (en) * | 2005-03-31 | 2006-10-19 | Seiko Epson Corp | Bonding method, manufacturing method of liquid jetting head, bonded substrate, liquid jetting head, and liquid jetting device |
| JP2007290214A (en) * | 2006-04-24 | 2007-11-08 | Ricoh Co Ltd | Liquid droplet jet head, method for manufacturing pressurizing liquid chamber forming member, liquid cartridge, and liquid droplet jet recorder |
| JP2007320171A (en) * | 2006-06-01 | 2007-12-13 | Seiko Epson Corp | Liquid jet head |
| JP2008087488A (en) * | 2007-12-25 | 2008-04-17 | Seiko Epson Corp | Liquid ejection device |
| US7360875B2 (en) | 2003-08-12 | 2008-04-22 | Brother Kogyo Kabushiki Kaisha | Inkjet head |
| JP2014172321A (en) * | 2013-03-11 | 2014-09-22 | Seiko Epson Corp | Flow passage unit, liquid ejection head, liquid ejection device, and method of manufacturing flow passage substrate |
| JP2020011405A (en) * | 2018-07-13 | 2020-01-23 | 株式会社リコー | Liquid ejection head, liquid ejection unit, and device for ejecting liquid |
| US11273643B2 (en) | 2019-12-25 | 2022-03-15 | Ricoh Company, Ltd. | Liquid discharge head, liquid discharge device, and liquid discharge apparatus |
-
1997
- 1997-11-26 JP JP32482497A patent/JP3387402B2/en not_active Expired - Lifetime
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7360875B2 (en) | 2003-08-12 | 2008-04-22 | Brother Kogyo Kabushiki Kaisha | Inkjet head |
| JP2006281603A (en) * | 2005-03-31 | 2006-10-19 | Seiko Epson Corp | Bonding method, manufacturing method of liquid jetting head, bonded substrate, liquid jetting head, and liquid jetting device |
| JP2007290214A (en) * | 2006-04-24 | 2007-11-08 | Ricoh Co Ltd | Liquid droplet jet head, method for manufacturing pressurizing liquid chamber forming member, liquid cartridge, and liquid droplet jet recorder |
| JP2007320171A (en) * | 2006-06-01 | 2007-12-13 | Seiko Epson Corp | Liquid jet head |
| JP2008087488A (en) * | 2007-12-25 | 2008-04-17 | Seiko Epson Corp | Liquid ejection device |
| JP2014172321A (en) * | 2013-03-11 | 2014-09-22 | Seiko Epson Corp | Flow passage unit, liquid ejection head, liquid ejection device, and method of manufacturing flow passage substrate |
| JP2020011405A (en) * | 2018-07-13 | 2020-01-23 | 株式会社リコー | Liquid ejection head, liquid ejection unit, and device for ejecting liquid |
| US11273643B2 (en) | 2019-12-25 | 2022-03-15 | Ricoh Company, Ltd. | Liquid discharge head, liquid discharge device, and liquid discharge apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3387402B2 (en) | 2003-03-17 |
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