JPH11148736A - Electromagnetically-driven reciprocating mechanism - Google Patents
Electromagnetically-driven reciprocating mechanismInfo
- Publication number
- JPH11148736A JPH11148736A JP31530897A JP31530897A JPH11148736A JP H11148736 A JPH11148736 A JP H11148736A JP 31530897 A JP31530897 A JP 31530897A JP 31530897 A JP31530897 A JP 31530897A JP H11148736 A JPH11148736 A JP H11148736A
- Authority
- JP
- Japan
- Prior art keywords
- suspension spring
- electromagnetic actuator
- magnetic
- piston
- compressor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2309/00—Gas cycle refrigeration machines
- F25B2309/001—Gas cycle refrigeration machines with a linear configuration or a linear motor
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】この発明は、例えば赤外線検
出素子を極低温に冷却するクライオクーラに適用するス
ターリング冷凍機を対象に、その圧縮機，膨張機に内蔵
した往復動式のピストン，およびディスプレーサを駆動
する電磁駆動式往復動機構に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a Stirling refrigerator applied to, for example, a cryocooler for cooling an infrared detecting element to a cryogenic temperature, a reciprocating piston built in a compressor and an expander, and a displacer. The present invention relates to an electromagnetically driven reciprocating mechanism for driving a motor.
【０００２】[0002]
【従来の技術】まず、頭記したスターリング冷凍機の構
成を図３(a),(b) に示す。図において、１はハウジング
１ａのシリンダ部に往復動式のピストン１ｂを内蔵した
圧縮機、２はハウジング２ａのシリンダ部に蓄冷器２ｂ
を備えた往復動式のディスプレーサ２ｃを内蔵した膨張
機（クーリングフィンガ）、３は圧縮機１の圧縮空間と
膨張機２との間に配管した冷媒（ヘリウムガス）の接続
管である。また、圧縮機１のピストン１ａ，および膨張
機２のディスプレーサ２ｂはハウジング１ｂ，２ｂの内
部に組み込んだリニアモータ式の電磁アクチュエータ４
により軸方向に往復駆動するようにしている。2. Description of the Related Art First, the configuration of the Stirling refrigerator described above is shown in FIGS. 3 (a) and 3 (b). In the figure, reference numeral 1 denotes a compressor having a reciprocating piston 1b built in a cylinder portion of a housing 1a, and 2 denotes a regenerator 2b provided in a cylinder portion of a housing 2a.
An expansion device (cooling finger) 3 having a reciprocating displacer 2c provided with a refrigerant pipe 3 is a connection pipe for refrigerant (helium gas) piped between the compression space of the compressor 1 and the expansion device 2. A piston 1a of the compressor 1 and a displacer 2b of the expander 2 are a linear motor type electromagnetic actuator 4 incorporated in the housings 1b and 2b.
To reciprocate in the axial direction.
【０００３】ここで、電磁アクチュエータ４は永久磁石
４ａと該永久磁石４ａの磁極端面に結合して閉磁路を形
成するヨーク４ｂ，４ｃからなる固定子と、前記ヨーク
４ｂと４ｃの間の隙間（磁路開口部）に側方から出入す
るソレノイドコイル４ｄを備えた可動子とからなる一種
のリニアモータであり、、固定子は圧縮機１，膨張機２
のハウジング１ａ，２ａの内部に、また可動子は圧縮機
１のピストン１ｂに連結したピストンロッド１ｃ，およ
び膨張機２のディスプレーサ２ｃに連結したピストンロ
ッド２ｄにそれぞれ固定されている。[0003] The electromagnetic actuator 4 includes a stator comprising a permanent magnet 4a, yokes 4b and 4c which form a closed magnetic path by being coupled to a pole face of the permanent magnet 4a, and a gap between the yokes 4b and 4c. And a mover provided with a solenoid coil 4d that enters and exits from the side of the magnetic path (opening of the magnetic path).
And the mover is fixed to a piston rod 1c connected to a piston 1b of the compressor 1 and a piston rod 2d connected to a displacer 2c of the expander 2, respectively.
【０００４】また、前記のピストンロッド１ｃ，２ｄは
電磁アクチュエータ４の両側２箇所に配したサスペンシ
ョンばね５を介して軸方向へ変位可能に案内支持されて
いる。このサスペンションばね５は、図３(b) に示すよ
うに、高弾性の薄金属板（例えばベリリウム銅合金）で
作られたリング状の板ばねを基体としてその板面に複数
の渦状スリット５ａを形成し、スリット５ａの間に板面
と垂直方向へ撓み自在なアーム部５ｂを形成した構造に
なり、平行に並ぶ複数枚の板ばねの内外周にスペーサを
挟んで一体に組立てた上で、その内周端部が圧縮機１の
ピストンロッド１ｃ，膨張機２のディスプレーサロッド
２ｄに、また外周端部は電磁アクチュエータ４の可動子
の外周側に配した支持胴６の端面に結合され、該支持胴
６の基部が電磁アクチュエータ４のヨーク端面に固定支
持されている。The piston rods 1c and 2d are supported so as to be displaceable in the axial direction via suspension springs 5 arranged at two places on both sides of the electromagnetic actuator 4. As shown in FIG. 3 (b), the suspension spring 5 has a ring-shaped leaf spring made of a highly elastic thin metal plate (for example, beryllium copper alloy) as a base and has a plurality of spiral slits 5a on its plate surface. The arm 5b is formed between the slits 5a so as to be able to flex in the vertical direction with respect to the plate surface. After being assembled integrally with the inner and outer peripheries of a plurality of parallel plate springs with a spacer interposed therebetween, The inner peripheral end is connected to the piston rod 1c of the compressor 1 and the displacer rod 2d of the expander 2, and the outer peripheral end is connected to the end surface of the support cylinder 6 arranged on the outer peripheral side of the mover of the electromagnetic actuator 4. The base of the support cylinder 6 is fixedly supported on the yoke end surface of the electromagnetic actuator 4.
【０００５】なお、１ｄはピストン１ｂの位置検出器、
２ｅはディスプレーサ２ｂの位置検出器、２ｆは膨張機
２に付設したアクティブバランサである。また、前記し
た圧縮機１，膨張機２のハウジング１ａ，２ａ、サスペ
ンションばね５の支持胴６などは軽量化を図るためにア
ルミ合金材で作られている。かかる構成になるスターリ
ング冷凍機の動作原理は周知であり、前記した電磁アク
チュエータ４のソレノイドコイル４ｄを交流電源（図示
せず）から所定の周波数で励磁すると、ソレノイドコイ
ル４ｄに流れる励磁電流と固定子のヨーク４ｂ／４ｃ間
の空隙磁界との相互作用による電磁力、およびサスペン
ションばね５のスプリング作用により共振してピストン
１ｂ，ディスプレーサ２ｃがシリンダ内で往復運動し、
シリンダ内の作動空間に封入した作動ガス（ヘリウムガ
ス）を圧縮，膨張させる。これにより、膨張機２のシリ
ンダ端面２ｇにはケルビン温度７０Ｋ程度の冷熱が発生
し、この冷熱発生部位に設置した被冷却体である赤外線
検出素子（光電型素子：ＩｎＳｂ，ＨｇＣｄＴｅなど)
を極低温に冷却し、高いＳ／Ｎ比で微小な熱放射信号を
検出するようにしている。[0005] Incidentally, 1d is a position detector of the piston 1b,
2e is a position detector of the displacer 2b, and 2f is an active balancer attached to the expander 2. The housings 1a and 2a of the compressor 1 and the expander 2 and the support body 6 of the suspension spring 5 are made of an aluminum alloy material to reduce the weight. The principle of operation of the Stirling refrigerator having such a configuration is well known. When the solenoid coil 4d of the electromagnetic actuator 4 is excited at a predetermined frequency from an AC power supply (not shown), the exciting current flowing through the solenoid coil 4d and the stator The piston 1b and the displacer 2c reciprocate in the cylinder by resonating due to the electromagnetic force due to the interaction with the air gap magnetic field between the yokes 4b / 4c and the spring action of the suspension spring 5,
The working gas (helium gas) sealed in the working space in the cylinder is compressed and expanded. As a result, cold heat having a Kelvin temperature of about 70 K is generated on the cylinder end surface 2 g of the expander 2, and an infrared detecting element (photoelectric element: InSb, HgCdTe, or the like) which is a cooled object installed at the cold heat generating site.
Is cooled to an extremely low temperature, and a minute heat radiation signal is detected at a high S / N ratio.
【０００６】[0006]
【発明が解決しようとする課題】ところで、前記した赤
外線検出素子のクライオクーラに適用するスターリング
冷凍機において、電磁アクチュエータ４の固定子を構成
するヨーク４ｂと４ｃの間には可動子のソレノイドコイ
ル４ｄが出入する隙間（磁路開口部）があり、このため
にこの磁路開口部から周域に漏れ磁束が発生し、これが
原因で次に記すような磁気擾乱を引き起こす。すなわ
ち、電磁アクチュエータ４の漏れ磁束は膨張機２のシリ
ンダ先端に設置した赤外線検出素子で検出した微小な信
号に対してノイズとして作用するほか、圧縮機１，膨張
機２の周辺に配線した信号線（電磁アクチュエータ駆動
用の制御回路，ピストン，ディスプレーサの位置検出用
回路なども含む）を流れる電気信号に対してもノイズと
して作用する。このために電磁アクチュエータ４の漏れ
磁束をそのまま放置すると、その磁気擾乱により赤外線
センサの測定精度を低下させるのみならず、クライオク
ーラとしての冷凍機の運転制御にも支障を来すおそれが
ある。In the Stirling refrigerator applied to the above-described cryocooler of the infrared detecting element, a movable element solenoid coil 4d is provided between the yokes 4b and 4c constituting the stator of the electromagnetic actuator 4. There is a gap (magnetic path opening) through which magnetic flux leaks from the magnetic path opening, causing magnetic disturbance as described below. That is, the leakage magnetic flux of the electromagnetic actuator 4 acts as a noise for a minute signal detected by the infrared detecting element installed at the end of the cylinder of the expander 2, and a signal line wired around the compressor 1 and the expander 2. (Including the control circuit for driving the electromagnetic actuator, the circuit for detecting the position of the piston and the displacer, etc.), it also acts as noise on the electric signal flowing therethrough. For this reason, if the leakage magnetic flux of the electromagnetic actuator 4 is left as it is, the magnetic disturbance may not only reduce the measurement accuracy of the infrared sensor, but also hinder the operation control of the refrigerator as a cryocooler.
【０００７】そこで、電磁アクチュエータの漏れ磁束に
起因する磁気擾乱の防止対策として、圧縮機，膨張機の
ハウジングを例えばパーマロイなどの高透磁率材料で包
囲して磁気遮へいする方法、あるいはハウジング自身を
軟鉄などの高透磁率の磁性材で構成するなどの方法が考
えられるが、いずれの方法でも往復動機構（スターリン
グ冷凍機の圧縮機，膨張機）が大型化したり、重量が増
加する難点がある。Therefore, as a measure for preventing magnetic disturbance due to leakage magnetic flux of the electromagnetic actuator, a method of enclosing a housing of a compressor or an expander with a high magnetic permeability material such as permalloy or shielding the housing itself with a soft iron is used. However, any of these methods is disadvantageous in that the reciprocating mechanism (compressor and expander of the Stirling refrigerator) becomes large and the weight increases.
【０００８】この発明は上記の点に鑑みなされたもので
あり、頭記した赤外線検出素子のクライオクーラに適用
する電磁駆動式のスターリング冷凍機などを実施対象
に、装置の大型化，重量増加を招くことなく、かつ基本
構造を変えずに電磁アクチュエータの漏れ磁束を抑制で
きるように改良した電磁駆動式往復動機構を提供するこ
とを目的とする。SUMMARY OF THE INVENTION The present invention has been made in view of the above points, and is intended to reduce the size and weight of an apparatus for an electromagnetically driven Stirling refrigerator applied to a cryocooler of an infrared detecting element. An object of the present invention is to provide an electromagnetically driven reciprocating mechanism improved so that leakage magnetic flux of an electromagnetic actuator can be suppressed without inviting and without changing the basic structure.
【０００９】[0009]
【課題を解決するための手段】上記目的を達成するため
に、本発明によれば、スターリング冷凍機などの圧縮
機，膨張機に内蔵したピストン，ディスプレーサの駆動
部として、圧縮機，膨張機のハウジング内に往復動式の
電磁アクチュエータを組み込み、かつピストン，ディス
プレーサのロッドを前記の電磁アクチュエータに並置し
てハウジング内に組み込んだサスペンションばねを介し
て軸方向に可動に支持した構成になる電磁駆動式往復動
機構において、電磁アクチュエータの漏れ磁束に対する
磁気遮へい手段としてアクチュエータの磁路開口部近傍
に位置する前記サスペンションばね，ないしサスペンシ
ョンばねの支持部材を高透磁率材料で構成するものとし
（請求項１）、具体的にはサスペンションばねを析出硬
化形ステンレス鋼で構成し（請求項２）、またサスペン
ションばねの支持部材を電磁軟鉄，低炭素鋼，もしくは
珪素鋼で構成する（請求項３）。According to the present invention, a compressor such as a Stirling refrigerating machine, a piston incorporated in an expander, and a drive unit for a displacer are provided by the present invention. An electromagnetic drive type in which a reciprocating electromagnetic actuator is incorporated in a housing, and a piston and a displacer rod are juxtaposed to the electromagnetic actuator and supported axially movably via a suspension spring incorporated in the housing. In the reciprocating mechanism, the suspension spring or a suspension spring support member located near the magnetic path opening of the actuator is made of a material having high magnetic permeability as a magnetic shielding means against leakage magnetic flux of the electromagnetic actuator. Specifically, the suspension spring is made of precipitation hardened stainless steel. Form (claim 2), also constitutes a supporting member of the suspension spring by an electromagnetic soft iron, low carbon steel or silicon steel (claim 3).
【００１０】上記の構成により、往復動機構の基本構造
はそのままに、かつ新たに磁気遮へい材を追加装備した
り、電磁アクチュエータを組み込んだ圧縮機，膨張機の
ハウジングの材質を軽量なアルミ合金から重量の重い軟
鉄などに変更することなしに、電磁アクチュエータの磁
路開口部近傍に位置するサスペンションばね，ないしサ
スペンションばねの支持部材（往復動機構の構成部材の
一部）の材質を高透磁率材料，電磁軟鉄（比透磁率μo
＝２００〜３００），珪素鋼（μo ≒５００）などに変
更するだけで電磁アクチュエータの漏れ磁束を遮へいし
て外部の電気信号系に与える磁気擾乱を効果的に防ぐこ
とができる。With the above structure, the basic structure of the reciprocating mechanism is kept as it is, and a new magnetic shielding material is additionally provided, and the housing of the compressor and the expander incorporating the electromagnetic actuator is made of a lightweight aluminum alloy. Without changing to heavy soft iron etc., the material of the suspension spring located near the magnetic path opening of the electromagnetic actuator or the supporting member of the suspension spring (a part of the component of the reciprocating mechanism) is made of a high magnetic permeability material. , Electromagnetic soft iron (Relative permeability μ o
= 200-300), silicon steel (μ o ≒ 500), etc., it is possible to shield the magnetic flux leaking from the electromagnetic actuator and effectively prevent magnetic disturbance applied to an external electric signal system.
【００１１】[0011]
【発明の実施の形態】以下、この発明の実施の形態を図
１の実施例に基づいて説明する。なお、図１において図
３に対応する同一部材には同じ符号が付してある。図１
は図３におけるスターリング冷凍機の圧縮機を示したも
のであり、その基本構造は図３と同様である。ここで、
電磁アクチュエータ４の磁路開口部近傍に配置して圧縮
機１のハウジング１ａに組み込んだサスペンションばね
５について、その材質を従来のベリリウム銅合金から高
透磁率材料である析出硬化型ステンレス鋼に変えて構成
している。また、サスペンションばね５の支持部材であ
る支持胴６も同じく高透磁率材料である電磁軟鉄，ある
いは低炭素鋼，珪素鋼などで構成している。DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the embodiment shown in FIG. In FIG. 1, the same members as those in FIG. 3 are denoted by the same reference numerals. FIG.
FIG. 3 shows the compressor of the Stirling refrigerator in FIG. 3, and its basic structure is the same as that of FIG. here,
The material of the suspension spring 5 disposed near the magnetic path opening of the electromagnetic actuator 4 and incorporated in the housing 1a of the compressor 1 is changed from a conventional beryllium copper alloy to a precipitation hardening stainless steel which is a high magnetic permeability material. Make up. The support body 6 which is a support member of the suspension spring 5 is also made of magnetically soft iron which is also a high magnetic permeability material, low carbon steel, silicon steel or the like.
【００１２】これにより、サスペンションばね５，およ
びその支持胴６が電磁アクチュエータ４の磁路開口部に
対して磁気シールドとして機能し、周囲への磁束漏れを
抑制する。図２はこの磁気シールドの効果を評価，確認
するために、圧縮機１の周域における磁界を三次元磁気
モーメント法で解析した結果を表した特性図である。こ
こで、横軸は図１におけるＰ点（ハウジング１ａの外周
面）を漏れ磁束密度の測定基準点とした半径方向の距離
Ｌ，縦軸は磁束密度であり、特性線Ａは図示実施例，特
性線Ｂは従来構造（サスペンションばね５がベリリウム
胴合金製，支持胴６がアルミ合金製）の場合を表してい
る。As a result, the suspension spring 5 and the support cylinder 6 function as a magnetic shield for the magnetic path opening of the electromagnetic actuator 4 to suppress leakage of magnetic flux to the surroundings. FIG. 2 is a characteristic diagram showing a result of analyzing a magnetic field in a peripheral region of the compressor 1 by a three-dimensional magnetic moment method in order to evaluate and confirm the effect of the magnetic shield. Here, the horizontal axis represents the distance L in the radial direction with the point P (the outer peripheral surface of the housing 1a) in FIG. 1 as the measurement reference point of the leakage magnetic flux density, and the vertical axis represents the magnetic flux density. A characteristic line B represents the case of the conventional structure (the suspension spring 5 is made of a beryllium body alloy and the support body 6 is made of an aluminum alloy).
【００１３】図２に表した磁束分布の解析図から判るよ
うに、電磁アクチュエータ４の磁路開口部近傍に配置し
たサスペンションばね５，支持胴６を高透磁率材料であ
る電磁軟鉄（比透磁率μo ＝２００〜３００）で構成す
ることにより、従来構造と較べてハウジング周域の漏れ
磁束密度が約１／５〜１／７に減少する。As can be seen from the analysis diagram of the magnetic flux distribution shown in FIG. 2, the suspension spring 5 and the support body 6 arranged near the magnetic path opening of the electromagnetic actuator 4 are made of an electromagnetic soft iron (relative magnetic permeability) which is a high magnetic permeability material. μ o = 200 to 300), the leakage magnetic flux density in the peripheral region of the housing is reduced to about 1/5 to 1/7 as compared with the conventional structure.
【００１４】[0014]
【発明の効果】以上述べたように、この発明によれば、
赤外線検出素子のクライオクーラに適用するスターリン
グ冷凍機などを対象に、その圧縮機，膨張機に内蔵した
ピストン，ディスプレーサを往復動させる電磁駆動式往
復動機構として、圧縮機，膨張機のハウジング内に往復
動式の電磁アクチュエータを組み込み、かつピストン，
ディスプレーサのロッドを前記の電磁アクチュエータに
並置してハウジング内に組み込んだサスペンションばね
を介して軸方向に可動に支持したものにおいて、電磁ア
クチュエータの漏れ磁束に対する磁気遮へい手段として
アクチュエータの磁路開口部近傍に位置する前記サスペ
ンションばね，ないしサスペンションばねの支持部材を
高透磁率材料で構成したことにより、装置全体の大型
化，重量の大幅な増加を招くことなく、電磁アクチュエ
ータから外部周域に漏れる磁束を効果的に低減でき、こ
れにより膨張機で冷却する赤外線検出素子，および圧縮
機，膨張機の周辺に配置した電気回路などに対する磁気
擾乱を防止できる。As described above, according to the present invention,
An electromagnetically driven reciprocating mechanism that reciprocates a piston and a displacer built into the compressor and expander for a Stirling refrigerator applied to a cryocooler with an infrared detection element. Built-in reciprocating electromagnetic actuator and piston,
A rod of a displacer is juxtaposed to the electromagnetic actuator and supported movably in the axial direction via a suspension spring incorporated in a housing. As a magnetic shielding means against leakage magnetic flux of the electromagnetic actuator, the rod is disposed near a magnetic path opening of the actuator. Since the suspension spring or the supporting member of the suspension spring is made of a material having a high magnetic permeability, the magnetic flux leaking from the electromagnetic actuator to the outer peripheral region can be effectively prevented without increasing the size and weight of the entire apparatus. Thus, magnetic disturbance to the infrared detecting element cooled by the expander, the electric circuit disposed around the compressor and the expander, and the like can be prevented.
【図１】この発明の実施例によるスターリング冷凍機の
圧縮機の構成断面図FIG. 1 is a sectional view showing the configuration of a compressor of a Stirling refrigerator according to an embodiment of the present invention.
【図２】図１の実施例と従来例とを対比して表した圧縮
機周域における漏れ磁界の解析結果を表す図FIG. 2 is a diagram showing an analysis result of a leakage magnetic field in a compressor peripheral region in which the embodiment of FIG. 1 is compared with a conventional example.
【図３】この発明の実施対象となるスターリング冷凍機
の構成図であり、(a) は冷凍機全体の構成断面図、(b)
は冷凍機に組み込んだサスペンションばねの平面図FIGS. 3A and 3B are configuration diagrams of a Stirling refrigerator to which the present invention is applied, where FIG. 3A is a configuration sectional view of the entire refrigerator, and FIG.
Is a plan view of the suspension spring installed in the refrigerator
１ スターリング冷凍機の圧縮機 １ａ ハウジング １ｂ ピストン １ｃ ピストンロッド ２ スターリング冷凍機の膨張機 ２ａ ハウジング ２ｃ ディスプレーサ ２ｄ ディスプレーサロッド ４ 電磁アクチュエータ ５ サスペンションばね ６ 支持胴 DESCRIPTION OF SYMBOLS 1 Compressor of Stirling refrigerator 1a Housing 1b Piston 1c Piston rod 2 Expander of Stirling refrigerator 2a Housing 2c Displacer 2d Displacer rod 4 Electromagnetic actuator 5 Suspension spring 6 Support body
Claims (3)
に内蔵したピストン，ディスプレーサを往復動させる電
磁駆動式往復動機構であり、ピストン，ディスプレーサ
の駆動部として圧縮機，膨張機のハウジング内に往復動
式の電磁アクチュエータを組み込み、かつピストン，デ
ィスプレーサのロッドを前記の電磁アクチュエータに並
置してハウジング内に組み込んだサスペンションばねを
介して軸方向に可動に支持したものにおいて、電磁アク
チュエータの漏れ磁束に対する磁気遮へい手段としてア
クチュエータの磁路開口部近傍に位置する前記サスペン
ションばね，ないしサスペンションばねの支持部材を高
透磁率材料で構成したことを特徴とする電磁駆動式往復
動機構。An electromagnetically driven reciprocating mechanism for reciprocating a piston and a displacer built in a compressor such as a Stirling refrigerator or an expander, wherein the piston and the displacer are driven in a housing of the compressor and the expander. A reciprocating electromagnetic actuator is incorporated, and a piston and a displacer rod are juxtaposed to the electromagnetic actuator and supported movably in the axial direction through a suspension spring incorporated in a housing. An electromagnetically driven reciprocating mechanism, wherein the suspension spring or a support member of the suspension spring, which is located near a magnetic path opening of the actuator, is made of a material having high magnetic permeability as magnetic shielding means.
ペンションばねを析出硬化型ステンレス鋼で構成したこ
とを特徴とする電磁駆動式往復動機構。2. The electromagnetically driven reciprocating mechanism according to claim 1, wherein the suspension spring is made of precipitation hardening stainless steel.
ペンションばねの支持部材を電磁軟鉄，低炭素鋼，もし
くは珪素鋼で構成したことを特徴とする電磁駆動式往復
動機構。3. An electromagnetically driven reciprocating mechanism according to claim 1, wherein said suspension spring support member is made of soft magnetic iron, low carbon steel or silicon steel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31530897A JP3635897B2 (en) | 1997-11-17 | 1997-11-17 | Electromagnetic drive type reciprocating mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31530897A JP3635897B2 (en) | 1997-11-17 | 1997-11-17 | Electromagnetic drive type reciprocating mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH11148736A true JPH11148736A (en) | 1999-06-02 |
| JP3635897B2 JP3635897B2 (en) | 2005-04-06 |
Family
ID=18063843
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP31530897A Expired - Fee Related JP3635897B2 (en) | 1997-11-17 | 1997-11-17 | Electromagnetic drive type reciprocating mechanism |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3635897B2 (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2356203A (en) * | 1999-09-29 | 2001-05-16 | Brandauer & Co Ltd C | Electromagnetic shielding |
| JP2007278663A (en) * | 2006-04-11 | 2007-10-25 | Fuji Electric Holdings Co Ltd | Vibration type compressor |
| JP2011169446A (en) * | 2010-02-22 | 2011-09-01 | Mitsumi Electric Co Ltd | Plate spring and lens driving device |
| US8503119B2 (en) | 2010-02-22 | 2013-08-06 | Mitsumi Electric Co., Ltd. | Leaf spring with high vickers hardness |
| WO2018045710A1 (en) * | 2016-09-12 | 2018-03-15 | 珠海格力节能环保制冷技术研究中心有限公司 | Linear compressor |
-
1997
- 1997-11-17 JP JP31530897A patent/JP3635897B2/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2356203A (en) * | 1999-09-29 | 2001-05-16 | Brandauer & Co Ltd C | Electromagnetic shielding |
| JP2007278663A (en) * | 2006-04-11 | 2007-10-25 | Fuji Electric Holdings Co Ltd | Vibration type compressor |
| JP2011169446A (en) * | 2010-02-22 | 2011-09-01 | Mitsumi Electric Co Ltd | Plate spring and lens driving device |
| US8503119B2 (en) | 2010-02-22 | 2013-08-06 | Mitsumi Electric Co., Ltd. | Leaf spring with high vickers hardness |
| US8531789B2 (en) | 2010-02-22 | 2013-09-10 | Mitsumi Electric Co., Ltd. | Leaf spring with high thrust |
| WO2018045710A1 (en) * | 2016-09-12 | 2018-03-15 | 珠海格力节能环保制冷技术研究中心有限公司 | Linear compressor |
| US10876524B2 (en) | 2016-09-12 | 2020-12-29 | Gree Green Refrigeration Technology Center Co., Ltd. Of Zhuhai | Linear compressor |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3635897B2 (en) | 2005-04-06 |
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