JPH1114600A - Eddy current flaw-detecting device - Google Patents
Eddy current flaw-detecting deviceInfo
- Publication number
- JPH1114600A JPH1114600A JP9180615A JP18061597A JPH1114600A JP H1114600 A JPH1114600 A JP H1114600A JP 9180615 A JP9180615 A JP 9180615A JP 18061597 A JP18061597 A JP 18061597A JP H1114600 A JPH1114600 A JP H1114600A
- Authority
- JP
- Japan
- Prior art keywords
- coil
- coils
- flaw
- eddy current
- excitation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は渦流探傷装置に関
し、特にマルチチャンネル型探傷装置において、探傷感
度のバラツキを防止するための装置改良に関するもので
ある。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an eddy current flaw detector, and more particularly to an improvement in a multi-channel flaw detector for preventing variations in flaw detection sensitivity.
【0002】[0002]
【従来の技術】渦流探傷装置は励磁コイルにより被探傷
体たる鋼板等の表層に渦電流を生じさせ、鋼板表面の線
状傷等による渦電流の変化に応じて検出コイルに現れる
電圧変化より上記線状傷等の存在を検出するものであ
る。この種の渦流探傷装置のうち、搬送される鋼板等の
幅方向の探傷を効率良く行うために、検出コイルを鋼板
等の幅方向へ複数並べた、いわゆるマルチチャンネル型
探傷装置が知られている。その一例を図6に示し、矩形
ブロック状のフェライト製コア体1には外周に励磁コイ
ル4が巻回されるとともに、鋼板Pの表面に対向するコ
ア体1の下面には、複数(図では3つ)の検出コイル3
が一列に設けられている。各検出コイル3は公知のプリ
ント配線により絶縁フィルム基板(図示略)上に形成さ
れている。2. Description of the Related Art An eddy current flaw detector uses an exciting coil to generate an eddy current on a surface layer of a steel plate or the like, which is a member to be inspected. It detects the presence of a linear scratch or the like. Among such eddy current flaw detection devices, a so-called multi-channel flaw detection device in which a plurality of detection coils are arranged in the width direction of a steel plate or the like in order to efficiently perform flaw detection in a width direction of a conveyed steel plate or the like is known. . An example is shown in FIG. 6. An exciting coil 4 is wound around the outer periphery of a ferrite core body 1 having a rectangular block shape, and a plurality of (in FIG. 3) detection coils 3
Are provided in a line. Each detection coil 3 is formed on an insulating film substrate (not shown) by known printed wiring.
【0003】[0003]
【発明が解決しようとする課題】ところで、発明者の実
験によると、上記従来の渦流探傷装置では、鋼板Pに生
じる渦電流Eは、図6に示すように、コア体1下面の外
周部に対向する鋼板領域に強く流れ、コア体1下面の内
周部に対向する鋼板領域では殆ど流れない。したがっ
て、図6の場合、コア体1下面の左右両端に設けた検出
コイル3では十分な探傷感度が得られるが、中央に設け
た検出コイル3では探傷感度が十分でない。なお、この
ことは、図7に示すコア体1直下の磁束分布からも明ら
かであり、コア体1の下面内周部に対応する下方位置で
は磁束密度が小さくなっている。なお、図7の磁束密度
はその最大値を1.00とした相対値で示してある。According to an experiment conducted by the inventor, in the above-described conventional eddy current flaw detection apparatus, the eddy current E generated in the steel plate P is, as shown in FIG. It flows strongly in the opposed steel plate region, and hardly flows in the steel plate region facing the inner peripheral portion of the lower surface of the core body 1. Therefore, in the case of FIG. 6, the detection coils 3 provided at the left and right ends of the lower surface of the core body 1 can obtain sufficient flaw detection sensitivity, but the detection coil 3 provided at the center does not have sufficient flaw detection sensitivity. This is clear from the magnetic flux distribution just below the core body 1 shown in FIG. 7, and the magnetic flux density is small at a lower position corresponding to the inner peripheral portion of the lower surface of the core body 1. Note that the magnetic flux density in FIG. 7 is shown as a relative value with its maximum value being 1.00.
【0004】そこで、例えば図8に示すように、鋼板の
幅方向へ複数のコア体1を設けて、各コア体1の下面に
それぞれ励磁コイル5および検出コイル6をプリント配
線により積層形成し、各励磁コイル5に順次通電を切り
換えて互いに他の干渉を避けることにより、各コア体1
の直下の鋼板に独立した渦電流を生じさせることが考え
られる。これによると、検出コイル6間の探傷感度のバ
ラツキはある程度抑えることができるが、切換回路を設
ける必要があるため通電系が複雑化するとともに、各コ
ア体1の設置位置が上下にずれると、やはり探傷感度に
大きなバラツキを生じるおそれがある。Therefore, as shown in FIG. 8, for example, a plurality of core members 1 are provided in the width direction of the steel plate, and an excitation coil 5 and a detection coil 6 are formed on the lower surface of each core member 1 by printed wiring, respectively. By sequentially switching the energization to each excitation coil 5 to avoid interference with each other, each core 1
It is conceivable that an independent eddy current is generated in the steel plate immediately below the steel sheet. According to this, the variation in the flaw detection sensitivity between the detection coils 6 can be suppressed to some extent. However, since the switching circuit needs to be provided, the energization system becomes complicated, and if the installation position of each core body 1 is shifted up and down, Again, there is a possibility that a large variation occurs in the flaw detection sensitivity.
【0005】本発明はこのような課題を解決するもの
で、励磁コイルへの通電系を複雑化させることなく、複
数の検出コイル間の探傷感度のバラツキを効果的に抑え
ることができる渦流探傷装置を提供することを目的とす
る。The present invention solves such a problem, and an eddy current flaw detection apparatus capable of effectively suppressing a variation in flaw detection sensitivity among a plurality of detection coils without complicating a current supply system to an excitation coil. The purpose is to provide.
【0006】[0006]
【課題を解決するための手段】上記目的を達成するた
め、本第1発明では、励磁コイル(2)により被探傷体
(P)の表層に渦電流を生じさせ、被探傷体(P)表面
の傷による渦電流(E)の変化に応じた検出コイル(3
A〜3C)の電圧変化より傷の存在を検出する渦流探傷
装置において、被探傷体(P)に対向するコア体(1)
の端面に、励磁コイル(2)と検出コイル(3A〜3
C)の対を複数配置するとともに、隣り合った励磁コイ
ル(2)の極性を交互に異ならせてある。なお、励磁コ
イルと検出コイルの対は、プリント配線等により積層形
成しても、あるいはコア体の端面に複数の突起部を形成
して両コイルのコイル線を重ね巻きしても良い。In order to achieve the above object, according to the first aspect of the present invention, an eddy current is generated in the surface layer of the test object (P) by the exciting coil (2), and the surface of the test object (P) is generated. Detection coil (3) according to the change of the eddy current (E)
A to 3C) In an eddy current flaw detection device for detecting the presence of a flaw based on a voltage change, a core body (1) facing a body to be flawed (P)
Excitation coil (2) and detection coil (3A to 3A)
A plurality of pairs C) are arranged, and the polarities of the adjacent exciting coils (2) are alternately changed. The pair of the excitation coil and the detection coil may be laminated by printed wiring or the like, or may be formed by forming a plurality of protrusions on the end surface of the core body and winding the coil wires of both coils in a superposed manner.
【0007】本第1発明においては、隣り合った励磁コ
イルの極性を交互に異ならせてあるから、これら励磁コ
イルによって被探傷体表面に生じる渦電流は、隣り合う
ものの電流渦方向が逆になる。この結果、隣り合う渦電
流はその境界域で互いに電流方向が一致するため、弱め
あうことなく各励磁コイル直下の被探傷体表面にそれぞ
れ十分な強さの独立した渦電流が生じる。これにより、
励磁コイルと対となった各検出コイルはほぼ同一かつ十
分な感度で傷を検出することができ、検出コイル間の探
傷感度のバラツキが解消される。本第1発明によれば、
励磁コイルの全てに同時に通電することができるから、
従来のように励磁コイルに順次切り換え通電する必要は
なく、通電系の回路構成が簡素化される。In the first aspect of the present invention, the polarities of the adjacent exciting coils are alternately made different, so that the eddy currents generated on the surface of the inspection object by these exciting coils have opposite current eddy directions. . As a result, the current directions of the adjacent eddy currents coincide with each other in the boundary area, and independent eddy currents of sufficient strength are generated on the surface of the test object directly below each excitation coil without weakening. This allows
Each detection coil paired with the excitation coil can detect a flaw with substantially the same and sufficient sensitivity, and the variation in flaw detection sensitivity between the detection coils is eliminated. According to the first invention,
Since all the excitation coils can be energized simultaneously,
It is not necessary to sequentially switch and energize the exciting coil as in the conventional case, and the circuit configuration of the energizing system is simplified.
【0008】本第2発明では、各励磁コイル(2)のコ
イル線(21)の密度をコイル外周部で密に、コイル内
周部で疎にする。本第2発明においては、各励磁コイル
内の広い範囲で磁束密度が一様になるから、励磁コイル
と対となった各検出コイル内で、傷の位置による探傷感
度のバラツキが解消される。According to the second aspect of the present invention, the density of the coil wire (21) of each exciting coil (2) is made dense at the coil outer periphery and sparse at the coil inner periphery. According to the second aspect of the present invention, since the magnetic flux density becomes uniform in a wide range in each excitation coil, the variation in the flaw detection sensitivity due to the position of the flaw in each detection coil paired with the excitation coil is eliminated.
【0009】本第3発明では、励磁コイル(2)のコイ
ル線(21)をコイル外周部にのみ設ける。本第3発明
においては、磁束密度の一様性は本第2発明に対してや
や劣るが、励磁コイルのコイル線の形成がより容易とな
る。In the third aspect of the present invention, the coil wire (21) of the exciting coil (2) is provided only on the outer periphery of the coil. In the third invention, the uniformity of the magnetic flux density is slightly inferior to that of the second invention, but the formation of the coil wire of the exciting coil becomes easier.
【0010】[0010]
(第1実施形態)図1に本発明の渦流探傷装置の斜視図
を示す。図において、矩形ブロック状のフェライト製コ
ア体1の、鋼板Pに対向する下面には、各3つの励磁コ
イル2が長手方向へ互いに位置をずらして三列設けられ
ている。図2は上記コア体1の下面を下方から見たもの
で、各励磁コイル2の直下(図面の手前側)にはそれぞ
れ一対のコイル部31,32よりなる検出コイル3A〜
3Cが設けられている。これら励磁コイル2および検出
コイル3A〜3Cは、公知の構造によって絶縁フィルム
基板(図示略)上にプリント配線により渦巻き状に成形
されて(図1、図2では同心状に描いてある)積層され
ている。そして、各励磁コイル2は、図2のN、Sで示
すように、隣り合うものの極性が交互に異ならせてあ
る。極性を異ならせるためには、励磁コイル2の渦巻き
方向を逆にするか、あるいは逆方向へ通電する。なお、
本実施形態では、あらゆる方向の傷の検出を可能にする
ために、第1列および第2列の検出コイル3A,3Bの
コイル部31,32は90°異なる方向へ斜めに形成し
てある。(First Embodiment) FIG. 1 is a perspective view of an eddy current flaw detector according to the present invention. In the figure, on the lower surface of a rectangular block-shaped ferrite core body 1 opposed to a steel plate P, three exciting coils 2 are provided in three rows shifted from each other in the longitudinal direction. FIG. 2 is a view of the lower surface of the core body 1 viewed from below. The detection coils 3 </ b> A to 3 </ b> A each including a pair of coil portions 31 and 32 are provided immediately below each excitation coil 2 (on the front side in the drawing).
3C is provided. The excitation coil 2 and the detection coils 3A to 3C are spirally formed by printed wiring on an insulating film substrate (not shown) by a known structure (concentrically drawn in FIGS. 1 and 2) and laminated. ing. Then, as shown by N and S in FIG. 2, the polarity of the adjacent ones of the exciting coils 2 is alternately changed. In order to make the polarities different, the spiral direction of the exciting coil 2 is reversed or power is supplied in the opposite direction. In addition,
In the present embodiment, the coil portions 31 and 32 of the detection coils 3A and 3B in the first and second rows are formed obliquely in directions different from each other by 90 ° in order to enable detection of flaws in all directions.
【0011】このように、隣り合う励磁コイル2の極性
を交互に異ならせたことにより、各励磁コイル2によっ
て鋼板P上に生じる渦電流Eは、図1に示すように、そ
れぞれの励磁コイル2の直下で互いに逆方向の渦を描く
(図は最も手前側の列の3つの励磁コイル2による渦電
流のみを示す)。これらの渦電流はその境界域で互いに
電流方向が一致するため互いに弱めあうことがなく、各
励磁コイル2直下の渦電流はいずれも独立にほぼ同様の
強さの渦を描く。したがって、いずれの検出コイル3A
〜3Cにおいても探傷感度はほぼ等しくなり、複数の検
出コイル3A〜3C間の探傷感度のバラツキが解消され
る。As described above, since the polarities of the adjacent exciting coils 2 are alternately changed, the eddy current E generated on the steel sheet P by each exciting coil 2 is, as shown in FIG. Eddies are drawn in the opposite directions immediately below the right side of the drawing (the figure shows only the eddy currents generated by the three exciting coils 2 in the frontmost row). These eddy currents do not weaken each other because their current directions coincide with each other in the boundary area, and the eddy currents immediately below the respective exciting coils 2 independently draw eddies having almost the same strength. Therefore, any of the detection coils 3A
3C, the flaw detection sensitivities are substantially the same, and variations in the flaw detection sensitivities among the plurality of detection coils 3A to 3C are eliminated.
【0012】本実施形態では更に、図3(A)に示すよ
うに、上記各励磁コイル2は、コイル線21がコイル外
周部にのみ形成されている。このような励磁コイル2に
よる磁束密度を、励磁コイル2直下の、コイルを横断す
るX−X´線上で測定したものを図3(B)に示す。図
より明らかなようにコイル内周部の広い範囲で磁束密度
がほぼ同程度の十分大きな値となっている。この結果、
励磁コイル2のコイル内周部の広い範囲に対向する鋼板
P上で、密度が大きく均一な渦電流が生じるから、各検
出コイル3A〜3C毎にその直下の鋼板P上のいずれの
位置に傷があっても十分な感度でこれを検出することが
できる。したがって、各検出コイル3A〜3C内での、
傷の位置による探傷感度のバラツキも解消される。Further, in this embodiment, as shown in FIG. 3A, in each of the exciting coils 2, a coil wire 21 is formed only on the outer peripheral portion of the coil. FIG. 3B shows the magnetic flux density measured by the exciting coil 2 measured on the line XX ′ crossing the coil immediately below the exciting coil 2. As is clear from the figure, the magnetic flux density has a sufficiently large value of substantially the same level over a wide range of the inner peripheral portion of the coil. As a result,
Since a uniform eddy current having a large density is generated on the steel plate P facing a wide range of the coil inner peripheral portion of the exciting coil 2, any position on the steel plate P immediately below each of the detection coils 3A to 3C is damaged. Even if there is, this can be detected with sufficient sensitivity. Therefore, in each of the detection coils 3A to 3C,
Variations in flaw detection sensitivity depending on the position of the flaw are also eliminated.
【0013】これに対して図5(A)に示す従来の励磁
コイル2´のように、コイル線21がコイル全域に形成
されているものでは、励磁コイル2´直下の、コイルを
横断するZ−Z´線上で測定された磁束密度は、図5
(B)に示すように、コイル中心部で最大値を示すとと
もに、これより外周部へ向かうにつれて急速に小さくな
る。したがって、励磁コイル2´のコイル内周部に対向
する鋼板P上に生じる渦電流の密度は均一とはならず、
傷が各検出コイル3A〜3Cの中心部から外れると、十
分大きな検出感度は得られない。On the other hand, in the case where the coil wire 21 is formed over the entire area of the coil as in the conventional excitation coil 2 'shown in FIG. The magnetic flux density measured on the −Z ′ line is shown in FIG.
As shown in (B), the maximum value is shown at the center of the coil, and the value rapidly decreases toward the outer periphery. Therefore, the density of the eddy current generated on the steel plate P facing the inner peripheral portion of the exciting coil 2 'is not uniform,
If the scratches deviate from the center of each of the detection coils 3A to 3C, a sufficiently high detection sensitivity cannot be obtained.
【0014】このように、本実施形態では、検出コイル
間の探傷感度のバラツキのみならず、各検出コイル内の
探傷感度のバラツキをも解消することができる。As described above, in the present embodiment, it is possible to eliminate not only the variation in the flaw detection sensitivity between the detection coils but also the variation in the flaw detection sensitivity in each detection coil.
【0015】(第2実施形態)上記第1実施形態のよう
に励磁コイル2のコイル線21をコイル外周部にのみ形
成するのに代えて、図4(A)に示すように、コイル線
21を内周部で疎に、外周部で密になるように形成すれ
ば、励磁コイル2直下の、コイルを横断するY−Y´線
上で測定される磁束密度は、図4(B)に示すように、
励磁コイル2のコイル内周部の広い範囲に対向する鋼板
P上でさらに均一なものとなる。この結果、より均一な
渦電流を得ることができるから、各検出コイル3A〜3
C内での、傷の位置による探傷感度のバラツキをさらに
小さくすることができる。(Second Embodiment) Instead of forming the coil wire 21 of the exciting coil 2 only on the outer peripheral portion of the coil as in the first embodiment, as shown in FIG. Is formed sparsely in the inner peripheral portion and dense in the outer peripheral portion, the magnetic flux density measured on the YY ′ line crossing the coil immediately below the exciting coil 2 is shown in FIG. like,
It becomes even more uniform on the steel plate P facing a wide range of the inner peripheral portion of the exciting coil 2. As a result, a more uniform eddy current can be obtained.
The variation in the flaw detection sensitivity depending on the position of the flaw in C can be further reduced.
【0016】第1実施形態では、励磁コイルと検出コイ
ルの対を幅方向へ位置をずらして三列設けたものについ
て説明したが、対の数が複数であれば、その配置は特に
限定されない。In the first embodiment, a description has been given of a case in which pairs of excitation coils and detection coils are provided in three rows with their positions shifted in the width direction. However, the arrangement is not particularly limited as long as the number of pairs is plural.
【0017】上記各実施形態における、励磁コイルのコ
イル線をコイル外周部にのみ形成する構成、あるいはコ
イル線を内周部で疎に、外周部で密になるように形成す
る構成は、これらを単独で採用しても特有の効果を奏す
るものである。In each of the above embodiments, the configuration in which the coil wire of the exciting coil is formed only on the outer peripheral portion of the coil, or the configuration in which the coil wire is formed sparsely in the inner peripheral portion and dense in the outer peripheral portion, are as follows. Even when employed alone, a special effect is achieved.
【0018】[0018]
【発明の効果】以上のように、本発明の渦流探傷装置に
よれば、励磁コイルへの通電切り換えを要することな
く、複数の検出コイル間の探傷感度のバラツキを効果的
に抑えることができる。As described above, according to the eddy current flaw detection apparatus of the present invention, it is possible to effectively suppress the variation in the flaw detection sensitivity among a plurality of detection coils without having to switch the power supply to the excitation coil.
【図1】本発明の第1実施形態における、渦流探傷装置
のコア体の斜視図である。FIG. 1 is a perspective view of a core body of an eddy current testing device according to a first embodiment of the present invention.
【図2】コア体の下面の平面図である。FIG. 2 is a plan view of a lower surface of a core body.
【図3】励磁コイルの平面図とその磁束密度分布のグラ
フである。FIG. 3 is a plan view of an exciting coil and a graph of its magnetic flux density distribution.
【図4】本発明の第2実施形態における、励磁コイルの
平面図とその磁束密度分布のグラフである。FIG. 4 is a plan view of an exciting coil and a graph of its magnetic flux density distribution in a second embodiment of the present invention.
【図5】従来の励磁コイルの平面図とその磁束密度分布
のグラフである。FIG. 5 is a plan view of a conventional excitation coil and a graph of its magnetic flux density distribution.
【図6】従来の渦流探傷装置のコア体の斜視図である。FIG. 6 is a perspective view of a core body of a conventional eddy current testing device.
【図7】従来の渦流探傷装置のコア体直下の磁束密度分
布を示す立体グラフである。FIG. 7 is a three-dimensional graph showing a magnetic flux density distribution immediately below a core body of a conventional eddy current flaw detector.
【図8】従来の渦流探傷装置のコア体の分解斜視図であ
る。FIG. 8 is an exploded perspective view of a core body of the conventional eddy current testing device.
1…コア体、2…励磁コイル、21…コイル線、3A,
3B,3C…検出コイル、E…渦電流、P…鋼板(被探
傷体)。DESCRIPTION OF SYMBOLS 1 ... Core body, 2 ... Exciting coil, 21 ... Coil wire, 3A,
3B, 3C: detection coil, E: eddy current, P: steel plate (object to be inspected).
Claims (3)
流を生じさせ、被探傷体表面の傷による渦電流の変化に
応じた検出コイルの電圧変化より傷の存在を検出する渦
流探傷装置において、被探傷体に対向するコア体の端面
に、励磁コイルと検出コイルの対を複数配置するととも
に、隣り合った励磁コイルの極性を交互に異ならせたこ
とを特徴とする渦流探傷装置。An eddy current flaw detection device that generates an eddy current in a surface layer of a flaw-detected object by an excitation coil and detects the presence of the flaw based on a voltage change of a detection coil according to a change in the eddy current caused by a flaw on the surface of the flaw-detected body. An eddy current flaw detection device, wherein a plurality of pairs of excitation coils and detection coils are arranged on an end face of a core body facing a flaw detection target, and the polarities of adjacent excitation coils are alternately changed.
外周部で密に、コイル内周部で疎にしたことを特徴とす
る請求項1に記載の渦流探傷装置。2. The eddy current flaw detection device according to claim 1, wherein the density of the coil wire of each excitation coil is made dense at the coil outer periphery and sparse at the coil inner periphery.
のみ設けたことを特徴とする請求項1に記載の渦流探傷
装置。3. The eddy current flaw detector according to claim 1, wherein the coil wire of the exciting coil is provided only on the outer peripheral portion of the coil.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18061597A JP3758315B2 (en) | 1997-06-19 | 1997-06-19 | Eddy current flaw detector |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18061597A JP3758315B2 (en) | 1997-06-19 | 1997-06-19 | Eddy current flaw detector |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH1114600A true JPH1114600A (en) | 1999-01-22 |
JP3758315B2 JP3758315B2 (en) | 2006-03-22 |
Family
ID=16086336
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18061597A Expired - Lifetime JP3758315B2 (en) | 1997-06-19 | 1997-06-19 | Eddy current flaw detector |
Country Status (1)
Country | Link |
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JP (1) | JP3758315B2 (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2000008458A1 (en) * | 1998-08-06 | 2000-02-17 | Mitsubishi Heavy Industries, Ltd. | Eddy-current flaw detector probe |
JP2005351890A (en) * | 2004-05-27 | 2005-12-22 | General Electric Co <Ge> | Omnidirectional eddy current probe and inspection system |
JP2006058265A (en) * | 2004-08-24 | 2006-03-02 | Toyo Glass Co Ltd | Metal detector, and metal removing device |
JP2007263946A (en) * | 2006-03-03 | 2007-10-11 | Hitachi Ltd | Sensor and method for eddy current flaw detection |
JP2009186367A (en) * | 2008-02-07 | 2009-08-20 | Tokyo Seimitsu Co Ltd | Film thickness measurement apparatus and film thickness measurement method |
-
1997
- 1997-06-19 JP JP18061597A patent/JP3758315B2/en not_active Expired - Lifetime
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2000008458A1 (en) * | 1998-08-06 | 2000-02-17 | Mitsubishi Heavy Industries, Ltd. | Eddy-current flaw detector probe |
US6501267B1 (en) | 1998-08-06 | 2002-12-31 | Mitsubishi Heavy Industries, Ltd. | Eddy-current flaw detector probe |
JP2005351890A (en) * | 2004-05-27 | 2005-12-22 | General Electric Co <Ge> | Omnidirectional eddy current probe and inspection system |
JP2006058265A (en) * | 2004-08-24 | 2006-03-02 | Toyo Glass Co Ltd | Metal detector, and metal removing device |
JP2007263946A (en) * | 2006-03-03 | 2007-10-11 | Hitachi Ltd | Sensor and method for eddy current flaw detection |
JP2009186367A (en) * | 2008-02-07 | 2009-08-20 | Tokyo Seimitsu Co Ltd | Film thickness measurement apparatus and film thickness measurement method |
Also Published As
Publication number | Publication date |
---|---|
JP3758315B2 (en) | 2006-03-22 |
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