JPH11142160A - Vibrational gyro - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a vibrational gyro which provides an output signal little changeable due to the temp. SOLUTION: The vibrational gyro has an integrated circuit 10 comprising a differential circuit 24 and operational amplifier 36 with first diffusion resistors 32, 33 connected to the input of this amplifier 36 as input resistors as well as second resistor 34 connected between the inverted input and output of the amplifier 36 as a feed back resistor while the non-inverted input of the amplifier 36 is grounded through a second resistor 35. The first diffusion resistors 32, 33 have temp. characteristics of about 1500-2500 ppm/ deg.C and the second diffusion resistors 32, 33 have temp. characteristics of about 4000-5000 ppm/ deg.C.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibrating gyroscope, and more particularly to, for example, a navigation system which detects a position of a moving body by detecting camera shake, detects a rotational angular velocity, and provides appropriate guidance, or a posture of the moving body. The present invention relates to a vibrating gyroscope for detecting a rotational angular velocity used for control.

[0002]

2. Description of the Related Art FIG. 21 is a block diagram showing an example of a conventional vibrating gyroscope, and FIG. 22 is a block diagram showing another example of a conventional vibrating gyroscope. These vibrating gyros 1 include a vibrating body 2 having a regular triangular prism shape. Piezoelectric elements 3a, 3b, 3c are formed on the side surfaces of the vibrating body 2, respectively. A vibrator is formed by the vibrating body 2 and the piezoelectric elements 3a, 3b, 3c. The piezoelectric elements 3a and 3b are used for driving to cause the vibrating body 2 to bend and vibrate, and are also used for detecting a signal corresponding to the rotational angular velocity. The piezoelectric element 3c is used for feedback. An oscillation circuit 4 is connected between the piezoelectric elements 3a and 3b and the piezoelectric element 3c. Further, the piezoelectric elements 3a and 3b
It is connected to the input terminal of the differential circuit 5. The output terminal of the differential circuit 5 is connected to a synchronous detection circuit 6, and the synchronous detection circuit 6 is further connected to a smoothing circuit 7. The output terminal of the smoothing circuit 7 is connected to the DC amplifier circuit 8.

In the vibrating gyroscope 1, the vibrating body 2 bends and vibrates in a direction orthogonal to the surface on which the piezoelectric element 3c is formed by a driving signal from an oscillation circuit 4. In this state, when the vibrating body 2 rotates around the axis, the vibrating direction of the vibrating body 2 changes due to the Coriolis force. Thereby, the detecting piezoelectric elements 3a, 3
A difference in the output signal occurs between b and the difference between the output signals is output from the differential circuit 5. Then, by detecting and smoothing the output of the differential circuit 5 and further amplifying it, a signal corresponding to the rotational angular velocity applied to the vibrating gyroscope 1 can be detected.

[0004]

However, the vibrating gyroscope 1 has a piezoelectric element 3 for detection based on a change in ambient temperature.
Since the output signals from a and 3b fluctuate and the detection sensitivity changes, it is necessary to correct the temperature characteristics of the detection sensitivity.
Therefore, conventionally, a temperature characteristic correcting component 9 such as a thermistor or a positive linear temperature characteristic resistor and a chip resistor R are connected to an input resistance or a feedback resistance of an operational amplifier constituting a DC amplifier circuit 8 as shown in FIGS. To adjust the gain of the DC amplification circuit 8 with respect to a temperature change. That is, the gain of the DC amplifier circuit 8 is adjusted so as to make a change opposite to the change in the output signals from the piezoelectric elements 3a and 3b, and the temperature change of the final output signal is adjusted to be small. However, in this case, there is a problem that it is difficult to reduce the cost of the product because the temperature characteristic correcting component 9 is expensive.

Therefore, a main object of the present invention is to provide an inexpensive vibrating gyroscope in which the output signal changes little with temperature.

[0006]

SUMMARY OF THE INVENTION A vibrating gyroscope according to the present invention includes an integrated circuit forming a vibrator detection circuit, an operational amplifier formed in the integrated circuit, and an operational amplifier formed in the integrated circuit. An oscillation gyro including an input resistor connected to an input terminal, and a feedback resistor formed in an integrated circuit and connected between an output terminal and an input terminal of the operational amplifier,
The input resistance and the feedback resistance are vibrating gyroscopes formed of diffusion resistances having different temperature characteristics. The input resistance and feedback resistance of the operational amplifier are resistors that determine the circuit gain. Therefore, by forming the input resistance and the feedback resistance with diffusion resistances having different temperature characteristics from each other, the temperature characteristics of the circuit gain of the detection system can be adjusted at low cost. With the temperature characteristic of the circuit gain of the detection system, the temperature characteristic of the detection sensitivity of the vibrator can be canceled and corrected, and the change due to the temperature of the final output signal of the vibrating gyroscope can be reduced. In addition, the number of components externally attached to the integrated circuit can be reduced by using the diffusion resistor.

In the vibrating gyroscope according to the present invention, the input resistor or the feedback resistor may be formed by a combined resistor in which a plurality of diffusion resistors having different temperature characteristics are connected in series or in parallel. By connecting diffusion resistors having different temperature characteristics in series or in parallel and using them as an input resistance or a feedback resistance of the operational amplifier, the temperature characteristics of the circuit gain of the detection system can be adjusted to a desired state.

Further, in the vibrating gyroscope according to the present invention, a plurality of operational amplifiers to which an input resistor and a feedback resistor are connected may be formed in an integrated circuit, and they may be connected in series. By connecting a plurality of operational amplifiers in which an input resistor and a feedback resistor are connected as described above in series, a change in circuit gain due to temperature can be further increased. Therefore, even when the change in the rotational angular velocity detection sensitivity of the vibrator due to the temperature is large, the change due to the temperature of the final output signal can be reduced.

Further, in the vibrating gyroscope according to the present invention, a temperature characteristic as a diffusion resistance is 1500 to 2500 p.
pm / ° C diffusion resistance and 4000-5000 ppm / ° C
May be used.

The above and other objects, features and advantages of the present invention will become more apparent from the following detailed description of embodiments of the present invention with reference to the accompanying drawings.

[0011]

FIG. 1 is a block diagram showing an example of a vibrating gyroscope according to the present invention. First, the basic configuration and operation of the vibrating gyroscope 10 will be described with reference to FIG. A vibrating gyroscope 10 shown in FIG. 1 includes a regular triangular prism-shaped vibrating body 12 formed of, for example, an elinvar. Piezoelectric elements 14a, 14a,
14b and 14c are formed. Piezoelectric elements 14a, 14b
Are used for driving the vibrating body 12 to bend and vibrate, and are also used for detecting a signal corresponding to the rotational angular velocity. And the piezoelectric element 14
c is used for feedback. That is, in the vibrating gyroscope 10, the vibrating body 12 and the piezoelectric elements 14a, 14b,
The vibrator 16 is formed by 14c. In addition, the vibrating body 12 is not limited to the metal triangular prism formed by the elinvar,
A metal square pole, ceramic triangle pole, ceramic square pole, ceramic cylinder, ceramic bimorph, or the like may be used.

The vibrating gyroscope 10 includes an integrated circuit 18 in which a driving circuit and a detecting circuit are formed. As the integrated circuit 18, for example, a bipolar custom IC or the like is used. In the integrated circuit 18, an inverting amplifier 20 and a phase circuit 22 are formed as circuits for forming a drive system. The inverting amplifier 20 and the phase circuit 22 constitute an oscillation circuit.
6 are connected between the piezoelectric elements 14a and 14b and the piezoelectric element 14c.

Further, the integrated circuit 18 has a differential circuit 24 and a synchronous detection circuit 2 as circuits for forming a detection system.
6. The smoothing circuit 28 and the DC amplifier circuit 30 are formed by being connected in series. The output signal of the differential circuit 24 is synchronously detected by the synchronous detection circuit 26 based on the signal from the inverting amplifier 20. After the output signal of the synchronous detection circuit 26 is smoothed by the smoothing circuit 28,
It is amplified and output at 0.

In the vibrating gyroscope 10 shown in FIG. 1, the vibrator 16 bends and vibrates in a direction perpendicular to the surface on which the piezoelectric element 14c is formed by a driving signal from an oscillation circuit including an inverting amplifier 20 and a phase circuit 22. In this state, the vibrator 1
When rotated about the axis 6, the vibration direction of the vibrator 16 changes due to the Coriolis force. Thereby, the piezoelectric element 14
The difference between the output signals is generated between a and 14b, and the difference between the output signals is output from the differential circuit 24. And the differential circuit 24
The signal corresponding to the rotational angular velocity applied to the vibrating gyroscope 10 can be obtained by detecting and smoothing the output of the vibrating gyroscope 10 and further amplifying the output by the DC amplifier circuit 30.

FIG. 2 is a circuit diagram showing an example of a differential circuit used in the vibrating gyroscope 10 shown in FIG. The differential circuit 24 shown in FIG. 2 includes first diffused resistors 32 and 33,
, And an operational amplifier 36.

Here, the diffusion resistance is a resistance formed by doping the semiconductor substrate of the integrated circuit 18 with an impurity. The temperature characteristic of the diffusion resistance changes depending on the amount of the impurity to be doped. In the case of a bipolar custom IC, the diffusion resistance has a positive temperature characteristic,
Generally, those having a temperature characteristic of about 1500 to 2500 ppm / ° C. and those having a temperature characteristic of about 4000 to 5000 ppm / ° C. Therefore, in the embodiment described below, the former having relatively small temperature characteristics is used as the first diffusion resistance, and the latter having relatively large temperature characteristics is used as the second diffusion resistance. In each of the drawings referred to in the following description, the first diffusion resistance is represented by R (-), and the second diffusion resistance is represented by R (+).

In the differential circuit 24 shown in FIG. 2, first diffusion resistors 32 and 33 are connected as input resistors to an inverting input terminal and a non-inverting input terminal of an operational amplifier 36. The operational amplifier 36 is connected to the piezoelectric elements 14a and 14b of the vibrator 16 via the first diffused resistors 32 and 33. Also,
Between the output terminal of the operational amplifier 36 and the inverting input terminal, the second
Are connected as feedback resistors. further,
The non-inverting input terminal of the operational amplifier 36 is grounded via another second diffused resistor 35. The output terminal of the operational amplifier 36 is connected to the input terminal of the synchronous detection circuit 26.

In the vibration gyro 10 using the differential circuit 24 shown in FIG. 2, the circuit gain of the detection system has a temperature characteristic as shown in FIG. That is, the vibration gyro 10
As shown by the straight line plotted by black circles in FIG. 3, the circuit gain at the low temperature side decreases and the circuit gain increases at the high temperature side, as shown by a straight line plotted by a black circle in FIG. Therefore, in the vibrating gyroscope 10, the rotational angular velocity detection sensitivity of the vibrator 16 is as shown in FIG.
As shown by a straight line plotted with an X mark, when there is a temperature characteristic that rises on the low temperature side and decreases on the high temperature side with reference to the sensitivity at 25 ° C., the temperature characteristic of the sensitivity of the vibrator 16 is compensated for by offsetting. be able to. As a result, in the vibrating gyroscope 10, as shown by a straight line plotted by a white triangle in FIG. 3, a change in the final output signal due to temperature is small, and a flat sensitivity-temperature characteristic can be obtained. Therefore, according to the vibrating gyroscope 10, it is not necessary to use expensive components such as a thermistor for adjusting the temperature characteristic of the circuit gain as in the related art, and the number of components can be reduced. A vibrating gyroscope with a small change due to temperature can be obtained at low cost.

Next, a second embodiment of the vibrating gyroscope according to the present invention will be described.
An embodiment will be described. The vibrating gyroscope 10 according to the second embodiment has basically the same configuration as that of the first embodiment shown in FIG. 1, but differs in a differential circuit. FIG.
FIG. 9 is a circuit diagram illustrating an example of a differential circuit used in the second embodiment. The differential circuit 40 shown in FIG. 4 differs from the differential circuit 24 shown in FIG. 2 in the manner in which the first diffused resistors 32 and 33 and the second diffused resistors 34 and 35 are connected to the operational amplifier 36. . That is, in the differential circuit 40,
Second diffused resistors 34 and 35 are connected as input resistors to the inverting input terminal and the non-inverting input terminal of the operational amplifier 36, respectively. The operational amplifier 36 is connected to the second diffused resistor 3.
The piezoelectric elements 14a and 14b of the vibrator 16 via
Connected to. The first diffused resistor 32 is connected as a feedback resistor between the output terminal of the operational amplifier 36 and the inverted input terminal. Further, the non-inverting input terminal of the operational amplifier 36 is grounded via another first diffused resistor 33. The output terminal of the operational amplifier 36 is connected to the input terminal of the synchronous detection circuit 26.

In the vibration gyro 10 using the differential circuit 40 shown in FIG. 4, the circuit gain of the detection system has a temperature characteristic as shown in FIG. That is, the temperature characteristic of the circuit gain of the vibration gyro 10 using the differential circuit 40 shown in FIG. 4 is, for example, based on the circuit gain at 25 ° C. as shown by a straight line plotted by a black circle in FIG. The circuit gain increases on the low temperature side, and decreases on the high temperature side. Therefore, in the vibrating gyroscope 10, the vibrator 1
As shown by the straight line plotted by the crosses in FIG. 5, the rotational angular velocity detection sensitivity of No. 6 has a temperature characteristic that falls on the low temperature side and rises on the high temperature side with reference to the sensitivity at 25 ° C.,
The temperature characteristics of the vibrator 16 can be compensated by canceling each other. As a result, in the vibrating gyroscope 10, as shown by a straight line plotted by white triangles in FIG. 5, a change in the final output signal due to temperature is small, and a flat sensitivity-temperature characteristic can be obtained. Therefore, even when the differential circuit 40 shown in FIG. 4 is used, it is not necessary to use an expensive component such as a thermistor for adjusting the temperature characteristic of the circuit gain unlike the related art, and the number of components can be reduced. Therefore, a vibrating gyroscope having a small change in the detection sensitivity of the rotational angular velocity with temperature can be obtained at low cost.

Next, a third embodiment of the vibrating gyroscope according to the present invention will be described.
An embodiment will be described. The vibrating gyroscope 10 according to the third embodiment has basically the same configuration as that shown in FIG. 1, but differs in a differential circuit and a DC amplifier circuit. That is, in the vibrating gyroscope 10 of the third embodiment, as the input resistance and the feedback resistance of the operational amplifier 36 constituting the differential circuit, diffusion resistances having the same temperature characteristics are all used. On the other hand, as the DC amplifier circuit, a DC amplifier circuit 50 shown in FIG. 6 is used instead of the DC amplifier circuit 30 shown in FIG. DC amplifier circuit 30 shown in FIG.
Includes an operational amplifier 38, and diffusion resistors having the same temperature characteristics are used as the input resistance and the feedback resistance of the operational amplifier 38. In the DC amplifier circuit 50 shown in FIG. One diffusion resistor 52 is used, and a second diffusion resistor 54 is used as a feedback resistor. The operational amplifier 3 constituting the DC amplifier circuit 50
8 is connected to the smoothing circuit 2 via the first diffused resistor 52.
The output of the vibration gyro 10 is taken out from the output terminal of the operational amplifier 38. In the vibrating gyroscope 10 using the DC amplification circuit 50 shown in FIG. 6, by using diffusion resistors having different temperature characteristics as the input resistance and the feedback resistance constituting the DC amplification circuit 50, the temperature characteristic of the circuit gain of the detection system is obtained. Can be adjusted to compensate for the sensitivity-temperature characteristic of the vibrator 16. Therefore,
With the vibrating gyroscope 10 according to the third embodiment,
The same effects as those of the vibrating gyroscope 10 according to the first embodiment described above can be obtained.

Next, a fourth embodiment of the vibrating gyroscope according to the present invention will be described.
An embodiment will be described. The vibrating gyroscope 10 according to the fourth embodiment has basically the same configuration as that described in the third embodiment, but differs in a DC amplifier circuit. That is, in the vibration gyro 10 of the fourth embodiment, a DC amplifier circuit 60 shown in FIG. 7 is used instead of the DC amplifier circuit 50 shown in FIG. In the DC amplifier circuit 60 shown in FIG. 7, the second diffused resistor 54 is used as an input resistor of the operational amplifier 38, and the first diffused resistor 52 is used as a feedback resistor. In the vibration gyro 10 using the DC amplifier circuit 60 shown in FIG. 7, the temperature characteristics of the circuit gain of the detection system are adjusted by using diffusion resistors having different temperature characteristics as the input resistance and the feedback resistance of the DC amplifier circuit 60. Therefore, the sensitivity-temperature characteristics of the vibrator 16 can be canceled and corrected. Therefore, the same effects as those of the vibrating gyroscope 10 according to the above-described second embodiment can be obtained by the vibrating gyroscope 10 according to the fourth embodiment.

Next, the fifth embodiment of the vibrating gyroscope according to the present invention will be described.
An embodiment will be described. The vibrating gyroscope 10 according to the fifth embodiment basically has the same configuration as that shown in FIG. 1, but differs in a differential circuit. FIG. 8 is a circuit diagram illustrating an example of a differential circuit used in the fifth embodiment. The differential circuit 70 shown in FIG. 8 includes a first diffusion resistor 3 connected to an inverting input terminal and a non-inverting input terminal of the operational amplifier 36, respectively.
2, 33 are connected as input resistors. The operational amplifier 36 is connected to the piezoelectric elements 14a and 14b of the vibrator 16 via the first diffused resistors 32 and 33. Further, between the output terminal and the inverting input terminal of the operational amplifier 36, the first diffused resistor 42 and the second diffused resistor 32 are connected in series to form a feedback resistor. Further, the non-inverting input terminal of the operational amplifier 36 is grounded via a first diffused resistor 44 and a second diffused resistor 35 connected in series. And
The output terminal of the operational amplifier 36 is connected to the input terminal of the synchronous detection circuit 26. In this case, a combined resistance in which the first diffused resistor and the second diffused resistor are connected in series is used as a feedback resistor, so that an intermediate temperature characteristic between the first diffused resistor and the second diffused resistor is obtained. Can be. Therefore, the vibration gyro 10 using the differential circuit 70 shown in FIG. 8 can obtain the same effect as the vibration gyro 10 according to the above-described first embodiment, and uses a single diffusion resistor as a feedback resistor. When used, the temperature characteristics of the vibrator 16 that cannot be canceled can be canceled and corrected, and a more desired sensitivity temperature characteristic of the vibration gyro can be obtained.

Next, the sixth embodiment of the vibrating gyroscope according to the present invention will be described.
An embodiment will be described. The vibrating gyroscope 10 according to the sixth embodiment has basically the same configuration as that described in the first embodiment, but differs in a differential circuit. FIG. 9 is a circuit diagram illustrating an example of a differential circuit used in the sixth embodiment. In the differential circuit 80 shown in FIG. 9, the first diffused resistor 32 and the second diffused resistor 34 are connected in series to the inverting input terminal of the operational amplifier 36, and the first diffused resistor 33 is connected to the non-inverting input terminal. The second diffusion resistor 35 is connected in series. The operational amplifier 36 is connected to the first diffused resistor 32,
The vibrator 1 via the second diffusion resistor 33 and the second diffusion resistors 34 and 35
6 of the piezoelectric elements 14a and 14b. A first diffused resistor 42 is connected as a feedback resistor between the output terminal of the operational amplifier 36 and the inverted input terminal. Further, the non-inverting input terminal of the operational amplifier 36 is grounded via the first diffused resistor 44. The output terminal of the operational amplifier 36 is
It is connected to the input terminal of the synchronous detection circuit 26. In this case, since a combined resistance in which the first diffusion resistance and the second diffusion resistance are connected in series is used as the input resistance, an intermediate temperature characteristic between the first diffusion resistance and the second diffusion resistance is obtained. Can be. Therefore, the vibration gyro 10 using the differential circuit 80 shown in FIG. 9 can obtain the same effect as the vibration gyro 10 according to the above-described second embodiment, and can use a single diffusion resistor as the input resistance. When used, the temperature characteristics of the vibrator 16 that cannot be canceled can be canceled and corrected, and a more desired sensitivity temperature characteristic of the vibration gyro can be obtained.

Next, a seventh embodiment of the vibrating gyroscope according to the present invention will be described.
An embodiment will be described. The vibrating gyroscope 10 according to the seventh embodiment has basically the same configuration as that described in the first embodiment, but differs in a differential circuit. FIG. 10 is a circuit diagram illustrating an example of a differential circuit used in the seventh embodiment. In the differential circuit 90 shown in FIG. 10, the second diffused resistor 46 is connected to the inverting input terminal of the operational amplifier 36, and the second diffused resistor 48 is connected to the non-inverting input terminal.
The operational amplifier 36 is connected to the second diffused resistors 46, 48
Is connected to the piezoelectric elements 14a and 14b of the vibrator 16 via the. Further, a combined resistor in which the first diffused resistor 42 and the second diffused resistor 34 are connected in series is connected as a feedback resistor between the output terminal and the inverting input terminal of the operational amplifier 36.
Further, the non-inverting input terminal of the operational amplifier 36 is grounded via a combined resistor in which the first diffused resistor 44 and the second diffused resistor 35 are connected in series. The output terminal of the operational amplifier 36 is connected to the input terminal of the synchronous detection circuit 26. In this case, a combined resistance in which the first diffused resistor and the second diffused resistor are connected in series is used as a feedback resistor, so that an intermediate temperature characteristic between the first diffused resistor and the second diffused resistor is obtained. Can be. Therefore, even with the vibrating gyroscope 10 using the differential circuit 90 shown in FIG. 10, the same effect as the vibrating gyroscope 10 according to the above-described second embodiment can be obtained, and a single diffused resistor is used as a feedback resistor. When used, the temperature characteristics of the vibrator 16 that cannot be canceled can be canceled and corrected, and a more desired sensitivity temperature characteristic of the vibration gyro can be obtained.

Next, an eighth embodiment of the vibrating gyroscope according to the present invention will be described.
An embodiment will be described. The vibrating gyroscope 10 according to the eighth embodiment has basically the same configuration as that described in the first embodiment, but differs in a differential circuit. FIG. 11 is a circuit diagram illustrating an example of a differential circuit used in the eighth embodiment. The differential circuit 100 shown in FIG. 11 includes a first diffusion resistor 32 and a second
Are connected in series, and a first diffusion resistor 33 and a second diffusion resistor 35 are connected in series to a non-inverting input terminal. The operational amplifier 36 is connected to the first diffusion resistor 3.
2, 33 and the second diffused resistors 34, 35 are connected to the piezoelectric elements 14a, 14b of the vibrator 16. Also,
Between the output terminal of the operational amplifier 36 and the inverting input terminal, the second
Are connected as feedback resistors. further,
A non-inverting input terminal of the operational amplifier 36 is connected to a second diffused resistor 48.
Grounded. The output terminal of the operational amplifier 36 is connected to the input terminal of the synchronous detection circuit 26. In this case, since a combined resistance in which the first diffusion resistance and the second diffusion resistance are connected in series is used as the input resistance, an intermediate temperature characteristic between the first diffusion resistance and the second diffusion resistance is obtained. Can be. Therefore, the vibration gyro 10 using the differential circuit 100 shown in FIG. 11 can obtain the same effect as that of the vibration gyro 10 according to the above-described first embodiment, and uses a single diffusion resistor as the input resistance. When used, the temperature characteristics of the vibrator 16 that cannot be canceled can be canceled and corrected, and a more desired sensitivity temperature characteristic of the vibration gyro can be obtained.

Next, a ninth embodiment of the vibrating gyroscope according to the present invention will be described.
An embodiment will be described. The vibrating gyroscope 10 according to the ninth embodiment has basically the same configuration as that described in the third embodiment, but differs in a DC amplifier circuit. That is, in the vibrating gyroscope 10 of the ninth embodiment, the DC amplification circuit 3 shown in FIG.
Instead of 0, a DC amplification circuit 110 shown in FIG. 12 is used. In the DC amplifier circuit 110 shown in FIG. 12, the first diffused resistor 52 is used as the input resistance of the operational amplifier 38, and the first diffused resistor 56 and the second diffused resistor 54 are connected in series as feedback resistors. A resistor is used. The input terminal of the operational amplifier 38 constituting the DC amplifier circuit 110 is connected to the output terminal of the smoothing circuit 28 via the first diffused resistor 52, and the output of the vibration gyro 10 is taken out from the output terminal of the operational amplifier 38. It is. In this case, a combined resistance in which the first diffused resistor and the second diffused resistor are connected in series is used as a feedback resistor, so that an intermediate temperature characteristic between the first diffused resistor and the second diffused resistor is obtained. Can be. Therefore, the vibration gyroscope 10 using the DC amplifier circuit 110 shown in FIG. 12 can obtain the same effect as the vibration gyroscope 10 according to the third embodiment described above, and uses a single diffusion resistor as a feedback resistor. When used, the temperature characteristics of the vibrator 16 that cannot be canceled can be canceled and corrected, and a more desired sensitivity temperature characteristic of the vibration gyro can be obtained.

Next, a first example of the vibrating gyroscope according to the present invention will be described.
Embodiment 0 will be described. The vibrating gyroscope 10 according to the tenth embodiment has basically the same configuration as that described in the fourth embodiment, but differs in a DC amplifier circuit. That is, the vibrating gyroscope 10 of the tenth embodiment
Then, instead of the DC amplifier circuit 30 shown in FIG.
Is used. In the DC amplifier circuit 120 shown in FIG. 13, a second diffused resistor 54 is used as an input resistor of the operational amplifier 38, and a first diffused resistor 56 and a second diffused resistor 54 are connected in series as a feedback resistor. A resistor is used. And the DC amplifier circuit 12
The input terminal of the operational amplifier 38 constituting 0 is connected to the output terminal of the smoothing circuit 28 via the second diffused resistor 54, and the output of the vibration gyro 10 is taken out from the output terminal of the operational amplifier 38. In this case, a combined resistance in which the first diffused resistor and the second diffused resistor are connected in series is used as a feedback resistor, so that an intermediate temperature characteristic between the first diffused resistor and the second diffused resistor is obtained. Can be. Therefore, the vibration gyroscope 10 using the DC amplification circuit 120 shown in FIG. 13 can obtain the same effect as the vibration gyroscope 10 according to the above-described fourth embodiment, and uses a single diffusion resistance as a feedback resistance. A vibrator 16 that cannot be offset when used
Can be compensated by canceling each other, and a more desired sensitivity temperature characteristic of the vibrating gyroscope can be obtained.

Next, a first example of the vibrating gyroscope according to the present invention will be described.
One embodiment will be described. The vibrating gyroscope 10 according to the eleventh embodiment has basically the same configuration as that described in the fourth embodiment, but differs in a DC amplifier circuit. That is, the vibrating gyroscope 10 of the eleventh embodiment
Then, instead of the DC amplifier circuit 30 shown in FIG.
Is used. In the DC amplifier circuit 130 shown in FIG. 14, a first diffused resistor 52 and a second diffused resistor 58 are used in series as an input resistor of the operational amplifier 38, and a first diffused resistor 56 is used as a feedback resistor. Used. The input terminal of the operational amplifier 38 constituting the DC amplifier circuit 130 is connected to the output terminal of the smoothing circuit 28 via the first diffused resistor 52 and the second diffused resistor 58. The output of the vibrating gyroscope 10 is taken out. In this case, since a combined resistance in which the first diffusion resistance and the second diffusion resistance are connected in series is used as the input resistance, an intermediate temperature characteristic between the first diffusion resistance and the second diffusion resistance is obtained. Can be. Therefore, the vibration gyroscope 10 using the DC amplification circuit 130 shown in FIG. 14 can obtain the same effect as the vibration gyroscope 10 according to the above-described fourth embodiment, and uses a single diffusion resistor as the input resistance. When used, the temperature characteristics of the vibrator 16 that cannot be canceled can be canceled and corrected, and a more desired sensitivity temperature characteristic of the vibration gyro can be obtained.

Next, a first example of the vibrating gyroscope according to the present invention will be described.
A second embodiment will be described. The vibrating gyroscope 10 according to the twelfth embodiment has basically the same configuration as that described in the third embodiment, but differs in a DC amplifier circuit. That is, the vibrating gyroscope 10 of the twelfth embodiment
Then, instead of the DC amplifier circuit 30 shown in FIG.
Is used. In a DC amplifier circuit 140 shown in FIG. 15, a first diffused resistor 52 and a second diffused resistor 58 are used in series as an input resistor of an operational amplifier 38, and a second diffused resistor 54 is used as a feedback resistor. Used. The input terminal of the operational amplifier 38 constituting the DC amplifier circuit 140 is connected to the output terminal of the smoothing circuit 28 via the first diffused resistor 52 and the second diffused resistor 58. The output of the vibrating gyroscope 10 is taken out. In this case, since a combined resistance in which the first diffusion resistance and the second diffusion resistance are connected in series is used as the input resistance, an intermediate temperature characteristic between the first diffusion resistance and the second diffusion resistance is obtained. Can be. Therefore, the vibration gyro 10 using the DC amplification circuit 140 shown in FIG. 15 can obtain the same effect as that of the vibration gyro 10 according to the above-described third embodiment, and uses a single diffusion resistor as the input resistance. When used, the temperature characteristics of the vibrator 16 that cannot be canceled can be canceled and corrected, and a more desired sensitivity temperature characteristic of the vibration gyro can be obtained.

Next, a first example of the vibrating gyroscope according to the present invention will be described.
A third embodiment will be described. The vibrating gyroscope 10 according to the thirteenth embodiment has basically the same configuration as that described in the third embodiment, but differs in a DC amplifier circuit. That is, the vibrating gyroscope 10 of the thirteenth embodiment
Then, instead of the DC amplifier circuit 30 shown in FIG.
The DC amplifier circuit 150 shown in FIG. The DC amplification circuit 150 shown in FIG. 16 is different from the DC amplification circuit 50 shown in FIG.
Are connected in two stages in series. In this case,
As shown in FIG. 17, the sensitivity-temperature characteristics of the vibrator 16 that cannot be completely corrected by the one-stage DC amplifier circuit 50 can be canceled and corrected.

Next, a first example of the vibrating gyroscope according to the present invention will be described.
Fourth embodiment will be described. The vibrating gyroscope 10 according to the fourteenth embodiment has basically the same configuration as that described in the fourth embodiment, but differs in a DC amplifier circuit. That is, the vibrating gyroscope 10 of the fourteenth embodiment
Then, instead of the DC amplification circuit 30 shown in FIG.
Is used. The DC amplification circuit 160 shown in FIG. 18 is different from the DC amplification circuit 60 shown in FIG.
Are connected in two stages in series. In this case,
As shown in FIG. 19, the sensitivity-temperature characteristics of the vibrator 16 that cannot be completely corrected by the one-stage DC amplifier circuit 60 can be compensated for.

FIG. 20 is a block diagram showing another example of the vibrating gyroscope according to the present invention. In the vibrating gyroscope 170 shown in FIG. 20, the same components as those of the vibrating gyroscope 10 shown in FIG. 1 are denoted by the same reference numerals, and description thereof will be omitted. The vibration gyro 170 shown in FIG.
The vibrator 16 is different from the vibrating gyroscope 10 shown in FIG. That is, the piezoelectric elements 14a, 14b, and 14c are formed on the side surfaces of the vibrating body 12, respectively. The piezoelectric elements 14a and 14b are used for detecting a signal corresponding to the rotational angular velocity, and are also used for feedback. Can be On the other hand, the piezoelectric element 14c is used for driving. An addition circuit 21 and a phase circuit 22 are connected between the piezoelectric elements 14a and 14b and the piezoelectric element 14c to form an oscillation circuit. In this so-called one-drive two-detection type vibration gyroscope 170, the first
By applying the fourteenth embodiment, the same effects as those of the above-described embodiments can be obtained.

In the fifth to twelfth embodiments, a description has been given of a case where two first diffusion resistors and two second diffusion resistors are connected in series, but a temperature characteristic of a desired sensitivity gain is obtained. For this purpose, a larger number of diffusion resistors may be connected in series, or may be connected in parallel. In the thirteenth and fourteenth embodiments, the case where the DC amplifier circuits of the third embodiment and the fourth embodiment are connected in a plurality of stages has been described. However, the present invention is not limited to this. The vibrating gyroscope according to the embodiment may be used by connecting a plurality of stages.

[0035]

As described above, according to the vibrating gyroscope according to the present invention, it is not necessary to use expensive components such as thermistors for adjusting the temperature characteristics of the circuit gain as in the prior art, and the number of components can be reduced. Therefore, a vibrating gyroscope with a small change in the detection sensitivity of the rotational angular velocity due to the temperature can be obtained at low cost.

[Brief description of the drawings]

FIG. 1 is a block diagram showing an example of a vibrating gyroscope according to the present invention.

FIG. 2 is a circuit diagram illustrating an example of a differential circuit used in the vibration gyro according to the first embodiment.

3 is a graph showing a relationship between a temperature characteristic of a circuit gain of a detection system of a vibration gyro using the differential circuit shown in FIG. 2, a temperature characteristic of a sensitivity of a vibrator, and a temperature characteristic of a sensitivity of a vibration gyro. is there.

FIG. 4 is a circuit diagram illustrating an example of a differential circuit used in a vibration gyro according to a second embodiment.

5 is a graph showing a relationship between a temperature characteristic of a circuit gain of a vibration gyro detection system using the differential circuit shown in FIG. 4, a temperature characteristic of sensitivity of a vibrator, and a temperature characteristic of sensitivity of a vibration gyro. is there.

FIG. 6 is a circuit diagram illustrating an example of a DC amplification circuit used in a vibration gyro according to a third embodiment.

FIG. 7 is a circuit diagram illustrating an example of a DC amplifier circuit used in a vibration gyro according to a fourth embodiment.

FIG. 8 is a circuit diagram illustrating an example of a differential circuit used in a vibration gyro according to a fifth embodiment.

FIG. 9 is a circuit diagram illustrating an example of a differential circuit used in a vibration gyro according to a sixth embodiment.

FIG. 10 is a circuit diagram showing an example of a differential circuit used in a vibration gyro according to a seventh embodiment.

FIG. 11 is a circuit diagram showing an example of a differential circuit used in a vibrating gyroscope according to an eighth embodiment.

FIG. 12 is a circuit diagram illustrating an example of a DC amplification circuit used in a vibration gyro according to a ninth embodiment.

FIG. 13 is a circuit diagram showing an example of a DC amplifier circuit used in a vibrating gyroscope according to a tenth embodiment.

FIG. 14 is a circuit diagram showing an example of a DC amplifier circuit used in a vibrating gyroscope according to an eleventh embodiment.

FIG. 15 is a circuit diagram showing an example of a DC amplifier circuit used in a vibrating gyroscope according to a twelfth embodiment.

FIG. 16 is a circuit diagram illustrating an example of a DC amplifier circuit used in a vibration gyro according to a thirteenth embodiment.

17 shows a temperature characteristic of a circuit gain of a vibration gyro detection system using the DC amplification circuit shown in FIG. 16, a temperature characteristic of a circuit gain of a vibration gyro detection system using the DC amplification circuit shown in FIG. 6, 6 is a graph showing the relationship between the temperature characteristic of the sensitivity of the vibrator and the temperature characteristic of the sensitivity of the vibrating gyroscope.

FIG. 18 is a circuit diagram showing an example of a DC amplifier circuit used in a vibrating gyroscope according to a fourteenth embodiment.

19 shows the temperature characteristics of the circuit gain of the vibration gyro detection system using the DC amplification circuit shown in FIG. 18, the temperature characteristics of the circuit gain of the vibration gyro detection system using the DC amplification circuit shown in FIG. 7, 6 is a graph showing the relationship between the temperature characteristic of the sensitivity of the vibrator and the temperature characteristic of the sensitivity of the vibrating gyroscope.

FIG. 20 is a block diagram showing another example of the vibrating gyroscope according to the present invention.

FIG. 21 is a block diagram showing an example of a conventional vibration gyro.

FIG. 22 is a block diagram showing another example of a conventional vibration gyro.

DESCRIPTION OF SYMBOLS 10, 170 Vibrating gyroscope 12 Vibrating body 14a, 14b, 14c Piezoelectric element 16 Vibrator 18 Integrated circuit 20 Inverting amplifier 22 Phase circuit 24, 40, 70, 80, 90, 100 Differential circuit 26 Synchronous detection circuit 28 smoothing circuit 30, 50, 60, 110, 120, 130, 140,
150, 160 DC amplifier circuit 32, 33, 42, 44, 52, 56 First diffused resistor 34, 35, 46, 48, 54, 58 Second diffused resistor 36, 38 Operational amplifier

Claims (4)

[Claims] An integrated circuit that forms a detection circuit for a vibrator; an operational amplifier formed in the integrated circuit; an input resistor formed in the integrated circuit and connected to an input terminal of the operational amplifier; A vibrating gyroscope formed in an integrated circuit and including a feedback resistor connected between an output terminal and an input terminal of the operational amplifier, wherein the input resistor and the feedback resistor are diffused resistors having different temperature characteristics from each other. A vibrating gyro made of. 2. The vibrating gyroscope according to claim 1, wherein the input resistor or the feedback resistor is formed by a combined resistor in which a plurality of diffusion resistors having different temperature characteristics are connected in series or in parallel. 3. The operational amplifier according to claim 1, wherein a plurality of the operational amplifiers to which the input resistance and the feedback resistance are connected are formed in the integrated circuit, and they are connected in series to each other. The vibrating gyro described. 4. The temperature characteristic of the diffusion resistance is 150.
A diffusion resistance of 0 to 2500 ppm / ° C.,
4. The vibrating gyroscope according to claim 1, wherein a diffusion resistance of 00 ppm / ° C. is used.