JPH11136973A - Vibration type drive equipment and apparatus equipped with it - Google Patents

Vibration type drive equipment and apparatus equipped with it

Info

Publication number
JPH11136973A
JPH11136973A JP9297377A JP29737797A JPH11136973A JP H11136973 A JPH11136973 A JP H11136973A JP 9297377 A JP9297377 A JP 9297377A JP 29737797 A JP29737797 A JP 29737797A JP H11136973 A JPH11136973 A JP H11136973A
Authority
JP
Japan
Prior art keywords
elastic sliding
vibration
driving device
type driving
sliding member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9297377A
Other languages
Japanese (ja)
Inventor
Atsushi Tamai
淳 玉井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP9297377A priority Critical patent/JPH11136973A/en
Publication of JPH11136973A publication Critical patent/JPH11136973A/en
Pending legal-status Critical Current

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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide certain static rigidity and good follow-up performance for vibration displacement by providing an elastic sliding portion for one of vibrating body and contact body and forming the portion other than the sliding surface in an elastic sliding portion to an irregular shape. SOLUTION: Rotation of a moving body 1 is transmitted to a drive target of the equipment through an output gear 5. An elastic sliding member 1a is formed to a stepped ring shape as a whole. Also, the elastic sliding member 1a is made from a plate material of austenite-based stainless steel JIS SUS304 by giving press work to the combination of drawing and burring processes. However, on the outer peripheral surface (portion other than sliding surface 1b) at the elastic sliding member 1a, honeycomb type irregularity having many hexagon-shaped recesses is formed by etching process before press work. By forming this kind of the elastic sliding member 1a, the mass can be reduced while securing a required static rigidity and the dynamic rigidity can be enhanced.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、振動が励起される
振動体に接触体を圧接させて、これらを相対移動(摺
動)させる振動型駆動装置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibration-type driving device in which a contact body is brought into pressure contact with a vibrating body in which vibration is excited, and these are relatively moved (slid).

【0002】[0002]

【従来の技術】上記のような振動型駆動装置としては、
例えば特開平8−103088号公報にて提案されてい
るものがある。本願図6には、上記公報提案の駆動装置
における摺動部を示している。
2. Description of the Related Art As a vibration type driving device as described above,
For example, there is one proposed in Japanese Patent Application Laid-Open No. H8-103088. FIG. 6 of the present application shows a sliding portion in the driving device proposed in the above publication.

【0003】この図において、62は振動体であり、6
1は移動体(接触体)である。移動体61には、弾性摺
動部材61aが取り付けられており、この弾性摺動部材
61aの下端面(摺動面)は振動体62に取り付けられ
た摩擦材62aに圧接している。
In this figure, reference numeral 62 denotes a vibrating body,
1 is a moving body (contact body). An elastic sliding member 61 a is attached to the moving body 61, and a lower end surface (sliding surface) of the elastic sliding member 61 a is in pressure contact with a friction material 62 a attached to the vibrating body 62.

【0004】ここで、摩擦材62aに圧接する弾性摺動
部材61aは、他の部分と異なり耐摩耗性を要求される
ので、図6の駆動装置では、この弾性摺動部材61aを
耐摩耗性の高い別部材にしている。
Here, the elastic sliding member 61a pressed against the friction material 62a is required to have abrasion resistance unlike other parts. Therefore, in the driving device shown in FIG. It is a separate member of high.

【0005】また、弾性摺動部材61aはバネとしての
性質、つまりは静的な柔らかさも有しており、振動体6
2(摩擦材62a)に生じた振動変位に対して弾性摺動
部材61aの摺動面がある程度たわむことにより、摩擦
材62aとの接触状態を均一にし、騒音発生や効率低下
を防止している。
The elastic sliding member 61a also has the property of a spring, that is, has a static softness.
Since the sliding surface of the elastic sliding member 61a flexes to some extent with respect to the vibration displacement generated in 2 (the friction material 62a), the contact state with the friction material 62a is made uniform, thereby preventing noise generation and efficiency reduction. .

【0006】[0006]

【発明が解決しようとする課題】しかしながら、バネ性
を有する弾性摺動部材61aが振動変位と異なる勝手な
振動変形を生じてしまうと、騒音発生防止効果や効率低
下防止効果が薄れるので、弾性摺動部材61aにはバネ
性だけでなく、振動変位に対する追従性も要求される。
However, if the elastic sliding member 61a having a spring property causes an arbitrary vibration deformation different from the vibration displacement, the effect of preventing noise generation and the effect of preventing a decrease in efficiency are reduced. The moving member 61a is required to have not only a spring property but also a followability to a vibration displacement.

【0007】ここで、上記勝手な振動は弾性摺動部材6
1aの固有振動数が低い場合、つまり動的剛性が低い場
合に生じやすい。このため、一般に、弾性摺動部材61
aは、振動体62の振動数に対して2〜3倍以上の固有
振動数を有することが望ましい。
Here, the above-mentioned arbitrary vibration is caused by the elastic sliding member 6.
This tends to occur when the natural frequency of 1a is low, that is, when the dynamic rigidity is low. Therefore, generally, the elastic sliding member 61
a preferably has a natural frequency that is at least two to three times the frequency of the vibrating body 62.

【0008】なお、以上のことは、でこぼこ道を自動車
が走る場合を考えると理解しやすい。サスペンションバ
ネの下につり下がっているホイールとタイヤの質量が大
きいと、タイヤの上下運動の固有振動数が小さいので、
道の凹凸に対してタイヤが接触追従できなくなり、乗り
ごこちが悪くなる。一方、サスペンションバネの静的剛
性を高くしすぎると小さな凹凸のある道でタイヤがはね
て、ごつごつした乗りごこちになってしまう。つまり、
サスペンションバネの静的剛性が同じとき、バネ下荷重
が小さい程、路面に対するタイヤの追従性が良いことに
なる。
The above can be easily understood by considering the case where an automobile runs on a bumpy road. If the mass of the wheel and tire hanging under the suspension spring is large, the natural frequency of the vertical movement of the tire is small,
The tire cannot follow the unevenness of the road, and the riding comfort becomes worse. On the other hand, if the static stiffness of the suspension spring is set too high, the tires will spring on roads with small irregularities, resulting in a rough ride. That is,
When the static stiffness of the suspension spring is the same, the smaller the unsprung load, the better the tire follows the road surface.

【0009】そこで、本発明は、ある程度の静的剛性を
有し、かつ振動変位に対する追従性の良い弾性摺動部材
を有した振動型駆動装置を提供することを目的としてい
る。
SUMMARY OF THE INVENTION It is an object of the present invention to provide a vibration type driving device having an elastic sliding member which has a certain degree of static stiffness and has good followability to vibration displacement.

【0010】[0010]

【課題を解決するための手段】上記の目的を達成するた
め、本発明では、振動が励起される振動体とこの振動体
に接触する接触体とが相対摺動する振動型駆動装置にお
いて、振動体および接触体のうち一方に弾性摺動部を設
け、この弾性摺動部における摺動面以外の部分を凹凸形
状に形成したり異材料による多層構造としたりしてい
る。
In order to achieve the above object, according to the present invention, there is provided a vibration type driving device in which a vibrating body which is excited and a contacting body which comes into contact with the vibrating body relatively slide. An elastic sliding portion is provided on one of the body and the contact body, and a portion of the elastic sliding portion other than the sliding surface is formed in a concavo-convex shape or has a multilayer structure made of a different material.

【0011】すなわち、上記摺動面以外の部分をハニカ
ム形や波形の凹凸形状に形成したり、金属材料等の剛性
層により樹脂等の低密度層を挟んだ多層構造としたりす
ることにより、弾性摺動部を、質量の割には曲げ等に対
する静的剛性が高いもの(つまり断面2次モーメントが
大きいもの)、逆に言えばある程度の静的剛性を確保し
つつ質量が小さく高い動的剛性を得られるものにして、
振動変位に対する弾性摺動部の追従性を高め、振動型駆
動装置の低騒音化および高効率化を図れるようにしてい
る。
That is, by forming a portion other than the sliding surface into a honeycomb shape or a corrugated shape, or by forming a multilayer structure in which a low-density layer such as a resin is sandwiched between rigid layers of a metal material or the like. The sliding part has a high static stiffness against bending etc. (that is, a large second moment of area) compared to the mass. Conversely, it has a small mass and high dynamic stiffness while securing a certain static stiffness. To get
The followability of the elastic sliding portion to the vibration displacement is enhanced so that the noise and the efficiency of the vibration type driving device can be reduced.

【0012】[0012]

【発明の実施の形態】BEST MODE FOR CARRYING OUT THE INVENTION

(第1実施形態)図1には、本発明の第1実施形態であ
る棒状振動型モータ(振動型駆動装置)を示している。
この振動型モータは、ボルト4により締結された上部振
動体2および下部振動体8と、上部振動体2の上端摺動
面2aに対して摺動する弾性摺動部材1aを一体的に固
定した移動体(接触体)1とを有して構成されている。
振動体2,8の間には、駆動用(電気−機械エネルギー
変換用)およびセンサー用(機械−電気エネルギー変換
用)の圧電素子3と電極板7とが挟まれている。また、
下部振動体8とボルト4との間には、両者を電気的に絶
縁する絶縁シート9が介装されている。さらに、弾性摺
動部材1aは、接着剤、電気抵抗溶接、レーザ溶接、電
子ビーム溶接、ろう付け等の方法で移動体1に固定され
ている。
(First Embodiment) FIG. 1 shows a rod-shaped vibration type motor (vibration type driving device) according to a first embodiment of the present invention.
In this vibration type motor, an upper vibrating body 2 and a lower vibrating body 8 fastened by bolts 4 and an elastic sliding member 1a sliding on an upper sliding surface 2a of the upper vibrating body 2 are integrally fixed. And a moving body (contact body) 1.
Between the vibrators 2 and 8, a piezoelectric element 3 for driving (for electric-mechanical energy conversion) and for a sensor (for mechanical-electric energy conversion) and an electrode plate 7 are sandwiched. Also,
An insulating sheet 9 that electrically insulates the lower vibrating body 8 and the bolt 4 is interposed between the lower vibrating body 8 and the bolt 4. Further, the elastic sliding member 1a is fixed to the moving body 1 by a method such as adhesive, electric resistance welding, laser welding, electron beam welding, brazing, or the like.

【0013】移動体1には、この移動体1の回転を外部
に伝達するための出力ギヤ5が一体回転可能に係合して
いる。また、出力ギヤ5と移動体1の間には、弾性摺動
部材1aの下端摺動面1bを上部振動体2の摺動面2a
に圧接させるための加圧力を発生するコイルバネ6が設
けられている。
An output gear 5 for transmitting the rotation of the moving body 1 to the outside is engaged with the moving body 1 so as to be integrally rotatable. Further, between the output gear 5 and the moving body 1, the lower sliding surface 1b of the elastic sliding member 1a is connected to the sliding surface 2a of the upper vibrating body 2.
There is provided a coil spring 6 for generating a pressurizing force for bringing the pressure contact into contact with the coil spring 6.

【0014】このように構成されたモータでは、電極板
7を介して駆動用圧電素子3に互いに位相が異なる2つ
の周波信号を印加すると、振動体2,8に振動が励起さ
れ、上部振動体2の摺動面2aの振動変位が摺動面2
a,1b間の摩擦により弾性摺動部材1aおよび移動体
1に伝達され、これらが回転駆動される。移動体1の回
転は出力ギヤ5を介して装置の駆動対象(複写機の感光
ドラム等)に伝達される。なお、上部振動体2の摺動面
2aに生じる振動変位の大きさは、上部振動体2のくび
れ部2bの太さにより調整される。図2には、上記弾性
摺動部材1aの具体的形状を示している。図2(a)か
ら分かるように、弾性摺動部材1aは、全体として段付
きリング状に成形されている。また、弾性摺動部材1a
は、オーステナイト系ステンレスJIS SUS304
の板材をしぼりとバーリング加工を組み合わせてプレス
加工したものである。
In the motor configured as described above, when two frequency signals having phases different from each other are applied to the driving piezoelectric element 3 via the electrode plate 7, vibration is excited in the vibrating bodies 2 and 8, and the upper vibrating body is excited. The vibration displacement of the sliding surface 2a of the sliding surface 2
The elastic sliding member 1a and the moving body 1 are transmitted by friction between the members a and 1b, and these are rotationally driven. The rotation of the moving body 1 is transmitted via an output gear 5 to an object to be driven by the apparatus (such as a photosensitive drum of a copying machine). The magnitude of the vibration displacement generated on the sliding surface 2a of the upper vibrator 2 is adjusted by the thickness of the constricted portion 2b of the upper vibrator 2. FIG. 2 shows a specific shape of the elastic sliding member 1a. As can be seen from FIG. 2A, the elastic sliding member 1a is formed in a stepped ring shape as a whole. Also, the elastic sliding member 1a
Is austenitic stainless steel JIS SUS304
Is pressed by combining squeezing and burring.

【0015】但し、この弾性摺動部材1aにおける外周
面(摺動面1b以外の部分)には、プレス加工前に予め
エッチング加工により、多数の六角形状の凹みを有する
ハニカム状凹凸が形成されている。
However, on the outer peripheral surface (the portion other than the sliding surface 1b) of the elastic sliding member 1a, honeycomb-shaped irregularities having a large number of hexagonal recesses are formed by etching before pressing. I have.

【0016】このように弾性摺動部材1aを形成するこ
とで、所要の静的剛性を確保しつつ質量を小さくして動
的剛性を高めることができる。なお、弾性摺動部材1a
の小径部における摺動面1b付近の板厚を、しごき加工
によって減じて、動的剛性をさらに高めるようにしても
よい。
By forming the elastic sliding member 1a in this manner, it is possible to reduce the mass and increase the dynamic rigidity while securing the required static rigidity. The elastic sliding member 1a
The thickness of the small-diameter portion near the sliding surface 1b may be reduced by ironing to further increase the dynamic rigidity.

【0017】しかも、弾性摺動部材1aにおける摺動面
を従来と同様の平面形状部分として残すことにより、摺
動面の凹凸によって上部振動体2の摺動面2aが過度に
摩耗したり損傷したりすることを防止できる。
Moreover, by leaving the sliding surface of the elastic sliding member 1a as a flat surface portion similar to the conventional one, the sliding surface 2a of the upper vibrating body 2 is excessively worn or damaged due to unevenness of the sliding surface. Can be prevented.

【0018】なお、本実施形態では、凹凸形状面を外周
側になるように弾性摺動部材1aを形成した場合につい
て説明したが、凹凸形状面が内周側になるように形成し
てもよいし、内外周両面に凹凸形状を設けてもよい。
In this embodiment, the case where the elastic sliding member 1a is formed so that the uneven surface is on the outer peripheral side is described. However, the elastic sliding member 1a may be formed so that the uneven surface is on the inner peripheral side. In addition, irregularities may be provided on both inner and outer peripheral surfaces.

【0019】さらに、本実施形態では、弾性摺動部材1
aを板材のプレス加工により成形した場合について説明
したが、他の加工法、例えばパイプ材を利用した加工法
により形成してもよい。
Further, in this embodiment, the elastic sliding member 1
Although a case has been described where a is formed by pressing a plate material, it may be formed by another processing method, for example, a processing method using a pipe material.

【0020】また、凹凸形状面は、リング形状に成形し
た後、転造加工やローレット加工により形成してもよ
い。さらに、ロストワックス等の鋳造法を用いて凹凸形
状面とともに弾性摺動部材を成形してもよい。また、ス
ピニング加工によってリング形状と凹凸面とを同時に成
形することもできる。
The uneven surface may be formed by rolling or knurling after forming into a ring shape. Further, the elastic sliding member may be formed together with the uneven surface using a casting method such as lost wax. Further, the ring shape and the uneven surface can be simultaneously formed by spinning.

【0021】また、本実施形態では、弾性摺動部材1a
の材料として、耐摩耗性の高いSUS304を用いた場
合について説明したが、同様に耐摩耗性の高いマルテン
サイト系ステンレス(JIS SUS420J 等)や
析出硬化型ステンレス(JIS SUS631等)を用
いてもよい。なお、チタン、マグネシウム合金、アルミ
ニウム合金のような低比重の材料を用いてできるだけ板
厚を大きくすることにより、断面2次モーメントを高め
るとともに、動的剛性を高めるようにしてもよい。ヤン
グ率対比重の比が同程度なら、比重の小さい材質の方が
同質量で動的剛性を高めることができるからである。
In this embodiment, the elastic sliding member 1a
Although the case where SUS304 having high wear resistance is used as the material of the above has been described, similarly, martensitic stainless steel (such as JIS SUS420J) or precipitation hardening type stainless steel (such as JIS SUS631) having high wear resistance may be used. . The second moment of area and the dynamic rigidity may be increased by using a material having a low specific gravity, such as titanium, magnesium alloy, or aluminum alloy, as thick as possible to increase the thickness. If the ratio of the Young's modulus to the specific gravity is substantially the same, a material having a lower specific gravity can increase the dynamic rigidity with the same mass.

【0022】なお、本実施形態では、移動体1に別部材
である弾性摺動部材1aを取り付けた場合について説明
したが、これらを同一部材として一体成形後、弾性摺動
部に凹凸形状を設けてもよい。
In the present embodiment, the case where the elastic sliding member 1a, which is a separate member, is attached to the moving body 1 has been described. You may.

【0023】(第2実施形態)図3には、本発明の第2
実施形態である振動型モータの弾性摺動部材の具体的形
状を示している。なお、本実施形態の弾性摺動部材1
a′も、第1実施形態と同様に、移動体2に取り付けら
れるものである。
(Second Embodiment) FIG. 3 shows a second embodiment of the present invention.
4 shows a specific shape of an elastic sliding member of the vibration type motor according to the embodiment. The elastic sliding member 1 according to the present embodiment
a 'is also attached to the moving body 2 as in the first embodiment.

【0024】弾性摺動部材1a′は、摺動面1b′分か
らなる摺動部分を平面形状として残し、他の部分を周方
向に連なる波形状に形成したものである。この弾性摺動
部材1a′は、予め波形状を設けた板材をプレス加工し
て成形してもよいし、異形パイプをプレス加工して成形
してもよい。また、リング成形後にローレット加工によ
り波目をつけてもよい。
The elastic sliding member 1a 'is formed by leaving a sliding portion consisting of the sliding surface 1b' as a flat shape and forming the other portion in a wavy shape continuous in the circumferential direction. The elastic sliding member 1a 'may be formed by pressing a plate material having a corrugated shape in advance, or may be formed by pressing a deformed pipe. Alternatively, the ring may be corrugated by knurling.

【0025】(第3実施形態)図4には、本発明の第3
実施形態である振動型モータの弾性摺動部材の具体的構
成を示している。なお、本実施形態の弾性摺動部材1
a″も、第1実施形態と同様に、移動体2に取り付けら
れるものである。
(Third Embodiment) FIG. 4 shows a third embodiment of the present invention.
2 shows a specific configuration of an elastic sliding member of the vibration type motor according to the embodiment. The elastic sliding member 1 according to the present embodiment
a ″ is also attached to the moving body 2 as in the first embodiment.

【0026】この弾性摺動部材1a″は、図5に詳しく
示すように、2枚の金属材(剛性層)11,11の間
に、これら金属材よりも密度の低い材料によって形成さ
れた低密度材12を挟んだ3層構造になっている。これ
により、質量の割には剛性の高い弾性摺動部材用の素材
を作ることができる。
As shown in detail in FIG. 5, the elastic sliding member 1a ″ is formed between two metallic materials (rigid layers) 11, 11 by a low-density material formed of a material having a lower density than these metallic materials. It has a three-layer structure sandwiching the density member 12. Thereby, a material for the elastic sliding member having high rigidity can be produced for the mass.

【0027】そして、この素材をプレス加工して、図4
に示すような形状の弾性摺動部材1a″を作る。
Then, this material is press-processed, and FIG.
The elastic sliding member 1a ″ having the shape shown in FIG.

【0028】但し、低密度材12は耐摩耗性の点では劣
るので、弾性摺動部材1a″の3層端面をそのまま摺動
面として使用することはせず、図に示すように、外層の
金属材11の表面が摺動面1b″になるように弾性摺動
部材1a″を折り曲げ成形する。このように折り曲げて
作った摺動面1b″のエッヂは丸みを帯びているので、
この摺動面1b″が摺動する振動体2の摺動面を損傷さ
せることがない。また、摺動面積を広くとることができ
るので、移動体1を振動体2に押しつけているバネ6の
力を大きくすれば、摩擦力を増大させ、出力トルクを高
くすることができる。
However, since the low-density material 12 is inferior in abrasion resistance, the three-layer end face of the elastic sliding member 1a ″ is not used as a sliding surface as it is, but as shown in FIG. The elastic sliding member 1a "is bent and formed so that the surface of the metal material 11 becomes the sliding surface 1b". Since the edge of the sliding surface 1b "formed by bending in this manner is rounded,
The sliding surface 1b ″ does not damage the sliding surface of the vibrating body 2 on which the sliding member 1 slides. Also, since the sliding area can be increased, the spring 6 that presses the moving body 1 against the vibrating body 2 can be used. If the force is increased, the frictional force can be increased and the output torque can be increased.

【0029】ここで、低密度材12としては、例えば、
ハニカム状又はかいめん状の多数の凹部(貫通孔を含
む)を有する金属材料や樹脂を用いるのが望ましい。上
記凹部の形状はどのようなものでもよく、エッチング加
工で形成してもよいし、貫通孔であればプレス加工で打
ち抜いて形成してもよい。また、かいめん状材料は、金
属繊維を押しつぶして作ってもよいし、焼結加工で意図
的に気孔率を高めて作ってもよい。また、かいめん状材
料の凹部に樹脂を含浸させてもよい。
Here, as the low density material 12, for example,
It is desirable to use a metal material or resin having a large number of honeycomb-shaped or noodle-shaped concave portions (including through holes). The shape of the concave portion may be any shape, and may be formed by etching, or may be formed by punching out a through hole by pressing. In addition, the noodle-like material may be made by crushing metal fibers, or may be made by intentionally increasing porosity by sintering. In addition, a resin may be impregnated in the concave portions of the crepe-like material.

【0030】さらに、樹脂としては、ポリエチレン、ポ
リエステル等を用いるのが望ましい。この場合、かいめ
ん状材料に樹脂を含浸させた場合と同様に、樹脂自身の
振動減衰能が高いことで、モータの騒音を抑える効果も
ある。
Further, it is desirable to use polyethylene, polyester or the like as the resin. In this case, similar to the case where the resin is impregnated into the noodle-like material, the vibration damping ability of the resin itself is high, so that there is also an effect of suppressing the noise of the motor.

【0031】なお、上記各実施形態では、弾性摺動部
(弾性摺動部材1a,1a′,1a″)を移動体に設け
た場合について説明したが、弾性摺動部を振動体に設け
てもよい。振動変位による変形は相対的なものだからで
ある。
In each of the above embodiments, the case where the elastic sliding portion (elastic sliding members 1a, 1a ', 1a ") is provided on the moving body has been described, but the elastic sliding portion is provided on the vibrating body. This is because the deformation due to the vibration displacement is relative.

【0032】さらに、上記各実施形態では、棒状振動型
モータについて説明したが、本発明はリング状やリニア
タイプの振動型駆動装置にも適用することができる。
Further, in each of the above embodiments, the rod-shaped vibration type motor has been described, but the present invention can be applied to a ring-shaped or linear type vibration type driving device.

【0033】[0033]

【発明の効果】以上説明したように、本発明によれば、
振動体又は接触体に設けられる弾性摺動部を、質量の割
に剛性を高くすることができるので、この弾性摺動部の
動的剛性を向上させ、振動体の振動変位に対して高い追
従性を持たせることができる。従って、騒音が小さく、
効率の高い振動型駆動装置を実現することができる。
As described above, according to the present invention,
Since the rigidity of the elastic sliding portion provided on the vibrating body or the contacting body can be increased relative to the mass, the dynamic rigidity of the elastic sliding portion is improved, and the elastic sliding portion follows the vibration displacement of the vibrating body. It can have sex. Therefore, the noise is small,
A highly efficient vibration type driving device can be realized.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の第1実施形態である振動型モータの断
面図である。
FIG. 1 is a sectional view of a vibration type motor according to a first embodiment of the present invention.

【図2】上記モータにおける弾性摺動部材の斜視図およ
び断面図である。
FIG. 2 is a perspective view and a sectional view of an elastic sliding member of the motor.

【図3】本発明の第2実施形態である振動型モータにお
ける弾性摺動部材の斜視図である。
FIG. 3 is a perspective view of an elastic sliding member in a vibration type motor according to a second embodiment of the present invention.

【図4】本発明の第3実施形態である振動型モータにお
ける弾性摺動部材の断面図である。
FIG. 4 is a sectional view of an elastic sliding member in a vibration type motor according to a third embodiment of the present invention.

【図5】上記第3実施形態の弾性摺動部材の素材構造を
示す説明図である。
FIG. 5 is an explanatory view showing a material structure of an elastic sliding member according to the third embodiment.

【図6】従来の振動型モータの摺動部の断面図である。FIG. 6 is a sectional view of a sliding portion of a conventional vibration type motor.

【符号の説明】[Explanation of symbols]

1 移動体 1a,1a′,1a″ 弾性摺動部材 1b,1b′,1b″ 摺動面 2 上部振動体 3 圧電素子 4 ボルト 5 出力ギヤ 6 バネ 7 電極板 8 下部振動体 9 絶縁シート DESCRIPTION OF SYMBOLS 1 Moving body 1a, 1a ', 1a "Elastic sliding member 1b, 1b', 1b" Sliding surface 2 Upper vibrating body 3 Piezoelectric element 4 Bolt 5 Output gear 6 Spring 7 Electrode plate 8 Lower vibrating body 9 Insulating sheet

Claims (17)

【特許請求の範囲】[Claims] 【請求項1】 振動が励起される振動体とこの振動体に
接触する接触体とが相対摺動する振動型駆動装置におい
て、 前記振動体および前記接触体のうち一方に弾性摺動部を
設け、 この弾性摺動部における摺動面以外の部分を凹凸形状に
形成したことを特徴とする振動型駆動装置。
1. A vibration-type driving device in which a vibrating body in which vibration is excited and a contact body that comes into contact with the vibrating body relatively slide, wherein an elastic sliding portion is provided on one of the vibrating body and the contact body. A vibratory drive device characterized in that portions of the elastic sliding portion other than the sliding surface are formed in an uneven shape.
【請求項2】 前記凹凸形状が、前記弾性摺動部の剛性
を高める形状であることを特徴とする請求項1に記載の
振動型駆動装置。
2. The vibration-type driving device according to claim 1, wherein the uneven shape is a shape that increases the rigidity of the elastic sliding portion.
【請求項3】 前記凹凸形状が、ハニカム形状であるこ
とを特徴とする請求項1又は2に記載の振動型駆動装
置。
3. The vibration type driving device according to claim 1, wherein the uneven shape is a honeycomb shape.
【請求項4】 前記凹凸形状が、波形状であることを特
徴とする請求項1又は2に記載の振動型駆動装置。
4. The vibration type driving device according to claim 1, wherein the uneven shape is a wave shape.
【請求項5】 前記凹凸形状が、エッチング加工により
形成されたことを特徴とする請求項1から4のいずれか
に記載の振動型駆動装置。
5. The vibration-type driving device according to claim 1, wherein the uneven shape is formed by etching.
【請求項6】 前記凹凸形状が、転造加工により形成さ
れたことを特徴とする請求項1から4のいずれかに記載
の振動型駆動装置。
6. The vibration-type drive device according to claim 1, wherein the uneven shape is formed by rolling.
【請求項7】 前記凹凸形状が、ローレット加工により
形成されたことを特徴とする請求項1から4のいずれか
に記載の振動型駆動装置。
7. The vibration-type driving device according to claim 1, wherein the uneven shape is formed by knurling.
【請求項8】 前記弾性摺動部がプレス加工により成形
されており、 前記凹凸形状がプレス加工前に形成されたことを特徴と
する請求項1から7のいずれかに記載の振動型駆動装
置。
8. The vibration type driving device according to claim 1, wherein the elastic sliding portion is formed by press working, and the uneven shape is formed before the press working. .
【請求項9】 前記弾性摺動部が、前記凹凸形状ととも
に鋳造加工により成形されたことを特徴とする請求項
1,2,3又は7のいずれかに記載の振動型駆動装置。
9. The vibration type driving device according to claim 1, wherein said elastic sliding portion is formed by casting together with said uneven shape.
【請求項10】 前記弾性摺動部が、前記凹凸形状とと
もにスピニング加工により成形されたことを特徴とする
請求項1,2,3又は7のいずれかに記載の振動型駆動
装置。
10. The vibration type driving device according to claim 1, wherein said elastic sliding portion is formed by spinning together with said uneven shape.
【請求項11】 前記弾性摺動部が、前記振動体および
前記接触体のうち一方に取り付けられた別部材により構
成されていることを特徴とする請求項1から10のいず
れかに記載の振動型駆動装置。
11. The vibration according to claim 1, wherein the elastic sliding portion is constituted by a separate member attached to one of the vibrating body and the contact body. Mold drive.
【請求項12】 振動が励起される振動体とこの振動体
に接触する接触体とが相対摺動する振動型駆動装置にお
いて、 前記振動体および前記接触体のうち一方に弾性摺動部を
設け、 この弾性摺動部における摺動面以外の部分を異材料によ
る多層構造としたことを特徴とする振動型駆動装置。
12. A vibration type driving device in which a vibrating body excited by vibration and a contact body that comes into contact with the vibrating body relatively slide, wherein an elastic sliding portion is provided on one of the vibrating body and the contact body. A vibration type driving device, characterized in that a portion of the elastic sliding portion other than the sliding surface has a multilayer structure made of a different material.
【請求項13】 前記弾性摺動部が、剛性層により、こ
の剛性層よりも密度が低い低密度層を挟んだ構造である
ことを特徴とする請求項12に記載の振動型駆動装置。
13. The vibration type driving device according to claim 12, wherein the elastic sliding portion has a structure in which a low-density layer having a lower density than the rigid layer is sandwiched by the rigid layer.
【請求項14】 前記剛性層が、金属材料により形成さ
れていることを特徴とする請求項13に記載の振動型駆
動装置。
14. The vibration type driving device according to claim 13, wherein said rigid layer is formed of a metal material.
【請求項15】 前記低密度層が、複数の凹部を有する
金属材料により形成されていることを特徴とする請求項
12から14のいずれかに記載の振動型駆動装置。
15. The vibration type driving device according to claim 12, wherein the low density layer is formed of a metal material having a plurality of concave portions.
【請求項16】 前記低密度層が、樹脂により形成され
ていることを特徴とする請求項12から14のいずれか
に記載の振動型駆動装置。
16. The vibration type driving device according to claim 12, wherein the low density layer is formed of a resin.
【請求項17】 請求項1から16のいずれかに記載の
振動型駆動装置を駆動源として備えたことを特徴とする
装置。
17. A device comprising the vibration type driving device according to claim 1 as a driving source.
JP9297377A 1997-10-29 1997-10-29 Vibration type drive equipment and apparatus equipped with it Pending JPH11136973A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9297377A JPH11136973A (en) 1997-10-29 1997-10-29 Vibration type drive equipment and apparatus equipped with it

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9297377A JPH11136973A (en) 1997-10-29 1997-10-29 Vibration type drive equipment and apparatus equipped with it

Publications (1)

Publication Number Publication Date
JPH11136973A true JPH11136973A (en) 1999-05-21

Family

ID=17845708

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9297377A Pending JPH11136973A (en) 1997-10-29 1997-10-29 Vibration type drive equipment and apparatus equipped with it

Country Status (1)

Country Link
JP (1) JPH11136973A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3255300A1 (en) * 2016-06-10 2017-12-13 Canon Kabushiki Kaisha Friction member to contact opposite member, method for manufacturing friction member, vibration-type actuator, and electronic device
CN109217713A (en) * 2017-07-05 2019-01-15 佳能株式会社 Use the vibrating driver, electronic device and movable body of sintered body

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3255300A1 (en) * 2016-06-10 2017-12-13 Canon Kabushiki Kaisha Friction member to contact opposite member, method for manufacturing friction member, vibration-type actuator, and electronic device
CN107493032A (en) * 2016-06-10 2017-12-19 佳能株式会社 Contact the friction member of opposed member, the method for manufacture friction members, vibration-type actuator and electronic installation
US10530277B2 (en) 2016-06-10 2020-01-07 Canon Kabushiki Kaisha Friction member to contact opposite member, method for manufacturing friction member, vibration-type actuator, and electronic device
CN107493032B (en) * 2016-06-10 2020-01-14 佳能株式会社 Friction member contacting opposing member, method of manufacturing friction member, vibration-type actuator, and electronic device
US11664746B2 (en) 2016-06-10 2023-05-30 Canon Kabushiki Kaisha Friction member to contact opposite member, method for manufacturing friction member, vibration-type actuator, and electronic device
CN109217713A (en) * 2017-07-05 2019-01-15 佳能株式会社 Use the vibrating driver, electronic device and movable body of sintered body
US11108342B2 (en) 2017-07-05 2021-08-31 Canon Kabushikikaisha Vibration-type driving apparatus using sintered body impregnated with resin, electronic apparatus, and movable body

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