JPH11136076A - Piezo-electric resonator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To make this resonator small and thin. SOLUTION: A space is formed between a 1st plate 1 and a vibration element 5 because 1st conductive materials 2 exist on the plate 1, and a space is formed between a 2nd plate 4 and the element 5 with the plate 4 remaining a flat plate without making a recessed-shaped part on it by making the plate 1a flat plate, making supporting bodies 3 at least thicker than the element 5 and forming 2nd conductive materials 7 to a surface that faces the plate 4 of the element 5. Also, external electrodes 9 which are provided on an outer surface of a package and the materials 2 are easily and electrically conducted on sides of the package.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a series resonance device, and more particularly to a piezoelectric vibrator provided with a vibrating element made of a piezoelectric material.

[0002]

2. Description of the Related Art When an appropriate electrode pattern is formed on a piezoelectric substrate made of quartz, LiTaO ₃ , LiNbO ₃ or the like, and an AC electric field is applied to the electrode, the piezoelectric generates a stress having a frequency equal to the applied electric field. When the frequency of the applied electric field matches the natural frequency of the piezoelectric body, resonance occurs and strong vibration is obtained. Since the piezoelectric vibrator based on such a principle has a small size and high performance, it is widely used as an oscillation circuit or a filter of a communication device or the like.

Conventionally, a piezoelectric vibrator has been disclosed in Japanese Patent Publication No. 3-7040.
No. 7 is known. FIG.
(A) and (b) show an exploded perspective view and a sectional view of a conventional piezoelectric vibrator.

In FIGS. 10A and 10B, a piezoelectric vibrator 21 is configured by mounting a vibrating element 22 and a sealing cap 23 made of ceramic or the like on a mounting board 24 made of ceramic or the like. . The vibrating element 22 includes electrode patterns 26 and 2 each having a T-shaped electrode portion 26a and a connection portion 26b on opposing main surfaces that are front and rear surfaces of the piezoelectric substrate 25, respectively.
6 'is formed, and the piezoelectric substrate 25 has a pair of lead electrodes 27 and 27', which are a pair of lead conductor layers, formed in a thick film on one end and a pair of lead electrodes on the other end. After the end electrodes 28 and 28 ', which are conductor layers, are formed in a thick film, the conductor layers 29 and 30 for connecting the end electrodes 27 and 27' and 28 and 28 'and forming the lead conductor layers are covered. Is being worn.

On the other hand, a pair of conductor layers 31 and 32 facing the end electrodes 27 ′ and 28 ′ are formed on the upper surface of a mounting substrate 24 larger than the vibrating element 22 for mounting the sealing cap 23. The end electrode 27 'and the conductor layer 31 and the end electrode 28' and the conductor layer 32 are electrically connected to each other.

[0006]

However, in the above-described piezoelectric vibrator 21, since a concave portion must be formed in the sealing cap 23, the sealing cap 2 is not provided.
3 must be thick, and the piezoelectric vibrator 21 has a small size.
There is a problem that it is very difficult to reduce the thickness.
Further, a step of forming a concave portion in the sealing cap 23 is required, which is a factor of deteriorating cost performance.

SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned conventional problems and to provide a piezoelectric vibrator that is advantageous in terms of size, thickness, and cost.

[0008]

In order to solve the above-mentioned problems, a piezoelectric vibrator according to the present invention is provided in a package comprising a first plate, a second plate and a support. Are made of a flat plate, and a support is sandwiched between the first plate and the second plate. When the support is a flat plate having a space inside, the first plate and the second plate are bonded to each other. Is performed through an adhesive layer, and the electrical connection with the internal vibration element is such that the first conductors formed on the first plate are electrically connected to the external electrodes at the side surfaces, respectively.

Thus, a flat plate that has not been subjected to special processing can be used as a package, and a package excellent in cost performance can be manufactured. Further, the electrodes of the internal vibrating element can be easily led out, and the piezoelectric vibrator can be reduced in size and thickness.

[0010]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The invention according to claim 1 of the present invention comprises a first plate having at least one surface on which at least two or more first conductors are formed from an intermediate portion to a surface end portion; A support having a space inside, a vibration element having excitation electrodes formed on the front and back surfaces, a second plate, and external electrodes,
The vibrating element is in a package formed by a first plate, a support, and a second plate, is fixed by a second conductor, and is connected to the excitation electrode and the second conductor through the second conductor. In a piezoelectric vibrator in which one conductor is electrically conductive, the first conductor is led out of the package, and is electrically connected to the external electrode.
The first plate and the second plate are each formed of a flat plate, and the support is provided between the first plate and the second plate, and the first plate, the support, and the second plate are provided. Is a piezoelectric vibrator in which the plate and the support are closely attached to each other via an adhesive layer, and a flat plate without special processing can be used as a package, so that a package excellent in cost performance can be easily produced. Further, there is an effect that the package shape of the vibrator can be reduced in size and thickness.

The invention according to claim 2 is the piezoelectric vibrator according to claim 1, wherein at least one of the first plate, the second plate and the support is made of glass. It has an effect that a package of a vibrator can be made using a material.

The invention according to claim 3 is the piezoelectric vibrator according to claim 1, wherein at least one of the first plate, the second plate, and the support is a resin film. It has the same effect as item 2.

According to a fourth aspect of the present invention, there is provided the piezoelectric vibrator according to the first aspect, wherein the adhesive layer contains a thermosetting resin as a main component, and the vibrator can be easily packaged. Has an action.

According to a fifth aspect of the present invention, there is provided the piezoelectric vibrator according to the first aspect, wherein the adhesive layer contains an ultraviolet-curable resin as a main component, and has the same function as the fourth aspect.

According to a sixth aspect of the present invention, there is provided the piezoelectric vibrator according to the first aspect, wherein the first conductor is formed by thick film printing. It has an effect that electrical conduction can be easily performed.

According to a seventh aspect of the present invention, there is provided the piezoelectric vibrator according to the first aspect, wherein the first conductor is a metal thin film, and has the same operation as the sixth aspect.

According to an eighth aspect of the present invention, there is provided the piezoelectric vibrator according to the first aspect, wherein the first conductor is a copper foil, and has the same operation as the sixth aspect.

According to a ninth aspect of the present invention, there is provided the piezoelectric vibrator according to the first aspect, wherein the second conductor is a conductive adhesive, and the second conductor is provided between the excitation electrode of the vibration element and the first conductor. It has an effect that electrical conduction can be easily performed and the vibration element can be securely fixed in the package.

According to a tenth aspect of the present invention, there is provided the piezoelectric vibrator according to the first aspect, wherein the second conductor is a pump and a conductive adhesive, and the mounting of the vibration element is simplified by using a bump. It has the effect of being able to be converted.

According to an eleventh aspect of the present invention, there is provided the piezoelectric vibrator according to the tenth aspect, wherein the bump is an Au bump, and has the same operation as the tenth aspect.

According to a twelfth aspect of the present invention, there is provided the piezoelectric vibrator according to the tenth aspect, wherein the bump is a solder bump, and has the same function as the tenth aspect.

According to a thirteenth aspect of the present invention, there is provided a first plate having at least one surface on which at least two first conductors are formed from an intermediate portion to a surface end, and a support having a space therein. And a vibrating element having excitation electrodes formed on the front and back surfaces, a second plate, and an external electrode, wherein the vibrating element is in a package formed by the first plate, the support, and the second plate. And the excitation electrode and the first conductor are electrically connected via the second conductor while being fixed by a second conductor, and the first conductor is connected to the package And the first plate and the second plate are each configured by a flat plate, and the first plate and the second plate are electrically connected to the external electrode. 2 having the support between the two plates, the support being an adhesive A certain piezoelectric vibrator, it is possible to use a plate that is not subjected to special processing as a package, it is possible to easily make the package. Further, it has an effect that the package shape of the vibrator can be reduced in size and thickness.

According to a fourteenth aspect of the present invention, there is provided the piezoelectric vibrator according to the thirteenth aspect, wherein the adhesive is mainly composed of a thermosetting resin, and the packaging of the vibrator can be easily performed. Has an action.

According to a fifteenth aspect of the present invention, there is provided the piezoelectric vibrator according to the thirteenth aspect, wherein the adhesive mainly comprises an ultraviolet curable resin, and has the same function as the fourteenth aspect.

According to a sixteenth aspect of the present invention, at least two or more third conductors are formed on at least one surface of the second plate from an intermediate portion to a surface end, and the excitation electrode and the third conductor are formed. The third conductor is electrically conducted through the second conductor, and the third conductor is led out of the package and is electrically conducted to the external electrode. The piezoelectric vibrator according to claim 1, wherein the piezoelectric vibrator has an operation of reliably performing electrical conduction from the excitation electrode to the external electrode.

According to a seventeenth aspect of the present invention, there is provided the piezoelectric vibrator according to the sixteenth aspect, wherein the third conductor is formed by thick film printing. It has an effect that electrical conduction can be reliably performed.

[0027] According to an eighteenth aspect of the present invention, there is provided the piezoelectric vibrator according to the sixteenth aspect, wherein the third conductor is a metal thin film.

According to a nineteenth aspect of the present invention, there is provided the piezoelectric vibrator according to the sixteenth aspect, wherein the third conductor is a copper foil, and has the same effect as the seventeenth aspect.

Hereinafter, an embodiment of the present invention will be described with reference to FIG.
This will be described with reference to FIG. FIG. 1 is an exploded perspective view showing a basic configuration of the piezoelectric vibrator of the present invention. 1 is a first plate, 2 is a first conductor formed from an intermediate portion of the upper surface of the first plate 1 to an end of the surface, 3 is a frame-shaped support, 4 is a second plate, 5 Denotes a vibration element, and 6 denotes an excitation electrode formed on the front and back surfaces of the vibration element 5.

(Embodiment 1) FIG. 2 shows Embodiment 1 of the present invention. In FIG. 2, a flat plate having a first conductor 2 formed on one surface from an intermediate portion to an end of the surface is shown. And a second plate 4 made of a flat plate with a frame-shaped support 3 interposed therebetween. First plate 1 and support 3
The second plate 4 and the second plate 4 are each made of either glass or resin film. The first conductor 2 is
It is formed by thick film printing by screen printing or the like, metal thin film by metal evaporation or sputtering, or copper foil. The surface of the first plate 1 facing the support 3 is the surface on which the first conductor 2 is formed.

The first plate 1 and the support 3 are bonded to each other, and the second plate 4 and the support 3 are bonded to each other via an adhesive layer 8.
The adhesive layer 8 is mainly composed of a thermosetting resin or an ultraviolet curable resin. In any case, it is important that the resin can be easily cured. Further, it is desirable to perform the curing of the resin while pressurizing the whole. The first plate 1, the support 3 and the second plate 4 form a package of the piezoelectric vibrator.

Here, the vibrating element 5 is accommodated in a space formed in the support 3, and the excitation electrodes 6 formed on the front and back surfaces are formed by the second conductor 7 by the first conductor 2. The vibrating element 5 is fixed to a space in a package formed by the first plate 1, the support 3, and the second plate 4 by the second conductor 7 while electrically conducting with the second conductor 7. .

Furthermore, the vibrating element 5 requires a space around the excitation electrode 6 and a side surface thereof. If the space is not provided and the package is in contact with the package, the vibration characteristics are significantly deteriorated. Therefore, as a solution to this problem, for example, a method is employed in which the portions of the first plate 1 and the second plate 4 that are larger than the size of the excitation electrode 6 are concavely formed on the surfaces facing the vibration element 5.

However, according to the embodiment of the present invention, the first
The space between the first plate 1 and the vibrating element 5 can be created by the presence of the conductor 2, and the second conductor 7 can be formed between the first conductor 2 and the excitation electrode 6. The space between the first plate 1 and the vibrating element 5 can be made wider by intervening. According to this method, the first plate 1 can be a flat plate. Further, since the thickness of the support 3 is at least equal to or greater than the vibration element 5 and the second conductor 7 is formed up to the surface of the vibration element 5 facing the second plate 4, the second conductor 7 is formed.
The second plate 4 remains flat without forming a concave portion on the plate 4
A space can be formed between the vibration element 5 and the vibration element 5. Further, the external electrodes 9 provided on the outer surface of the package of the piezoelectric vibrator and the first conductor 2 are electrically connected to each other on the side surface of the package.

(Embodiment 2) FIG. 3 shows Embodiment 2 of the present invention. The same components as those of Embodiment 1 shown in FIG. Is omitted.

In FIG. 3, the support 10 is made of only an adhesive. This adhesive is mainly composed of a thermosetting resin or an ultraviolet curable resin. In any case, it is important that the resin can be easily cured. In this case, however, the resin must be cured without applying pressure between the first plate 1 and the second plate 4. If it is cured while applying pressure, the second plate 4 and the vibration element 5 come into contact,
As a result, the vibration characteristics deteriorate.

(Embodiment 3) FIG. 4 shows Embodiment 3 of the present invention. The same components as those of Embodiment 1 shown in FIG. Is omitted.

In FIG. 4, the second conductor 11 is composed of a bump and a conductive adhesive. This bump is Au
Or it is made of solder. Vibration element 5 in the first embodiment
Although it has been shown that a space is required between the first plate 1 and the first plate 1, the required space can be secured more reliably by the interposition of the bumps. In addition, electrical conduction between the excitation electrode 6 and the first conductor 2 can be stabilized.

(Embodiment 4) FIG. 5 shows Embodiment 4 of the present invention. The same components as those of Embodiment 1 shown in FIG. Is omitted.

FIG. 5 has a feature obtained by combining the second and third embodiments. The support 10 is composed of only an adhesive, and the second conductor 11 is composed of a bump and a conductive adhesive. ing. In this configuration, since a space can be reliably formed between the vibration element 5 and the first plate 1 by using the bumps, the deterioration of vibration characteristics due to the contact between the vibration element 5 and the package does not occur. Then, the first plate 1 and the second plate
Plate 4 can be easily bonded. At this time, as in the second embodiment, the resin must be cured without applying pressure between the first plate 1 and the second plate 4. If hardening while applying pressure, the second plate 4 and the vibration element 5 come into contact with each other, resulting in deterioration of vibration characteristics.

(Fifth Embodiment) FIG. 6 shows a fifth embodiment of the present invention. The same components as those of the first embodiment shown in FIG. Is omitted.

In FIG. 6, the third conductor 12 is
Is formed on the surface of the plate 4 facing the vibrating element 5, the inside of the package is electrically connected to the excitation electrode 6 via the second conductor 7, and the outside of the package is at the side surface of the package. It is electrically connected to the electrode 9. The presence of the third conductor 12 enables more reliable electrical conduction between the excitation electrode 6 of the vibration element 5 and the external electrode 9.

(Embodiment 6) FIG. 7 shows Embodiment 6 of the present invention. The same components as those of Embodiment 1 shown in FIG. Is omitted.

FIG. 7 has a feature obtained by combining the second embodiment and the fifth embodiment. In the second embodiment, it has been described that pressure cannot be applied when the adhesive of the support 10 is cured,
According to the present embodiment, since the third conductor 12 is present, a space can be formed between the second plate 4 and the vibrating element 5, so that the pressure is applied when the support 10 is cured. Therefore, the thickness of the support 10 can be made uniform.

(Embodiment 7) FIG. 8 shows Embodiment 7 of the present invention, and the same components as those of Embodiment 1 shown in FIG. Is omitted.

In FIG. 8, the bumps of the second conductor 11 are formed on both surfaces of the excitation electrode 6 formed on the front and back surfaces of the vibration element 5. Since the second conductor 11 is formed on both surfaces, a space can be reliably created around the vibrating element 5, and the presence of the first conductor 2 and the third conductor 12 allows In addition, electrical conduction from the excitation electrode 6 to the external electrode 9 can be efficiently performed.

(Eighth Embodiment) FIG. 9 shows an eighth embodiment of the present invention. The same components as those of the first embodiment shown in FIG. Is omitted.

FIG. 9 shows a configuration having a combination of the second and seventh embodiments, and the space between the second plate 4 and the vibrating element 5 shown in the sixth embodiment is more reliably secured. Can be formed.

[0049]

As described above, according to the present invention, at least one surface has at least 2
A first plate on which at least one first conductor is formed, a frame-shaped support having a space inside, a vibration element having excitation electrodes formed on the front and back surfaces, a second plate, and an external electrode. The vibrating element is in a package formed by the first plate, the support, and the second plate, is fixed by the second conductor, and is connected to the excitation electrode and the first electrode via the second conductor. In a piezoelectric vibrator in which a conductor is electrically conducted, a first conductor is led out of the package, and is electrically conducted to an external electrode, a first plate and a second plate are provided. Are each formed of a flat plate, and have a support between the first plate and the second plate, and the first plate and the support and the second plate and the support are in close contact with each other via an adhesive layer. Or a piezoelectric vibrator characterized in that the support is made of an adhesive, It is not necessary to form a concave portion so as to avoid the formation, may be used a plate not subjected to special processing as a package, it is possible to make a good package cost. Furthermore, the electrodes of the internal vibration element can be easily and reliably electrically connected to the external electrodes to be led out, and the advantageous effect that the package of the piezoelectric vibrator can be reduced in size and thickness. Is obtained.

[Brief description of the drawings]

FIG. 1 is an exploded perspective view showing a piezoelectric vibrator according to an embodiment of the present invention.

FIG. 2 is a cross-sectional view showing the first embodiment of the present invention.

FIG. 3 is a cross-sectional view illustrating a second embodiment of the present invention.

FIG. 4 is a sectional view showing a third embodiment of the present invention.

FIG. 5 is a sectional view showing a fourth embodiment of the present invention.

FIG. 6 is a sectional view showing a fifth embodiment of the present invention.

FIG. 7 is a sectional view showing a sixth embodiment of the present invention.

FIG. 8 is a sectional view showing a seventh embodiment of the present invention.

FIG. 9 is a sectional view showing an eighth embodiment of the present invention.

10A is an exploded perspective view showing a conventional piezoelectric vibrator packaging method, and FIG. 10B is a sectional view showing a conventional piezoelectric vibrator packaging method.

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 first plate 2 first conductor 3 support 4 second plate 5 vibrating element 6 excitation electrode 7 second conductor 8 adhesive layer 9 external electrode 10 support 11 second conductor 12 third conductor

Claims (20)

[Claims] 1. A first plate in which at least one or more first conductors are formed on at least one surface from an intermediate portion to a surface end, a frame-shaped support having a space inside, a front and back surface A vibration element having an excitation electrode formed thereon, a second plate, and an external electrode, wherein the vibration element is in a package formed by the first plate, the support, and the second plate; And the excitation electrode and the first conductor are electrically connected via the second conductor, and the first conductor is led out of the package. Wherein the first plate and the second plate are electrically connected to the external electrode.
Are each formed of a flat plate, and the support is provided between the first plate and the second plate, and the first plate and the support and the second plate and the support are bonded to each other. Piezoelectric vibrators adhered to each other via layers. 2. The piezoelectric vibrator according to claim 1, wherein at least one of the first plate, the second plate, and the support is made of glass. 3. The piezoelectric vibrator according to claim 1, wherein at least one of the first plate, the second plate, and the support is made of a resin film. 4. The piezoelectric vibrator according to claim 1, wherein the adhesive layer contains a thermosetting resin as a main component. 5. The piezoelectric vibrator according to claim 1, wherein the adhesive layer is mainly composed of an ultraviolet curable resin. 6. The piezoelectric vibrator according to claim 1, wherein the first conductor is formed by thick film printing. 7. The piezoelectric vibrator according to claim 1, wherein the first conductor comprises a metal thin film. 8. The method according to claim 1, wherein the first conductor is made of copper foil.
3. The piezoelectric vibrator according to claim 1. 9. The piezoelectric vibrator according to claim 1, wherein the second conductor is made of a conductive adhesive. 10. The piezoelectric vibrator according to claim 1, wherein the second conductor comprises a pump and a conductive adhesive. 11. The piezoelectric vibrator according to claim 10, wherein the bump is formed of an Au bump. 12. The piezoelectric vibrator according to claim 10, wherein the bump is formed of a solder bump. 13. A first plate on which at least two or more first conductors are formed on at least one surface from an intermediate portion to a surface end, a frame-shaped support having a space inside,
A vibration element having excitation electrodes formed on the front and back surfaces, a second plate,
An external electrode, wherein the vibrating element is in a package formed by the first plate, the support, and the second plate, is fixed by a second conductor, and is connected to the second plate.
The excitation electrode and the first conductor are electrically connected to each other through the conductor, and the first conductor is led out of the package, and is electrically connected to the external electrode. In the piezoelectric vibrator, the first plate and the second plate are each formed of a flat plate, and the support is provided between the first plate and the second plate, and the support is bonded. A piezoelectric vibrator made of an agent. 14. The piezoelectric vibrator according to claim 13, wherein the adhesive mainly comprises a thermosetting resin. 15. The piezoelectric vibrator according to claim 13, wherein the adhesive mainly comprises an ultraviolet curable resin. 16. At least two or more third conductors are formed on at least one surface of the second plate from an intermediate portion to a surface end, and the excitation electrode and the third conductor are formed on the second plate. Electrically conductive through the conductor of
14. The conductor of claim 1 is led out of the package, and is electrically connected to the external electrode.
3. The piezoelectric vibrator according to claim 1. 17. The piezoelectric vibrator according to claim 16, wherein the third conductor is formed by thick film printing. 18. The piezoelectric vibrator according to claim 16, wherein the third conductor is a metal thin film. 19. The method according to claim 16, wherein the third conductor is a copper foil.
3. The piezoelectric vibrator according to claim 1. 20. The piezoelectric vibrator according to claim 1, wherein the thickness of the support is at least larger than the thickness of the vibrating element.