JPH11135171A - Electronic control apparatus - Google Patents
Electronic control apparatusInfo
- Publication number
- JPH11135171A JPH11135171A JP31613597A JP31613597A JPH11135171A JP H11135171 A JPH11135171 A JP H11135171A JP 31613597 A JP31613597 A JP 31613597A JP 31613597 A JP31613597 A JP 31613597A JP H11135171 A JPH11135171 A JP H11135171A
- Authority
- JP
- Japan
- Prior art keywords
- wiring board
- electronic control
- terminal block
- control device
- terminal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Connections Arranged To Contact A Plurality Of Conductors (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は多数の端子を備えた
電子制御機器に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electronic control device having a large number of terminals.
【０００２】[0002]
【従来の技術】図５（ａ）に示すように、プログラマブ
ルコントローラのような電子制御機器１には、端子台２
が設けられている。該端子台２は、電子制御機器１と図
示しない被制御機器との間を接続するケーブル（配線
材）の端部を結線するための端子２０，２０Ａを有して
いる。一方、この種の電子制御機器１は、図示しないＤ
ＩＮレールと呼ばれる取付レールに被装着部３が装着さ
れることで、制御盤内等に固定される。2. Description of the Related Art As shown in FIG. 5 (a), an electronic control device 1 such as a programmable controller has a terminal block 2 attached thereto.
Is provided. The terminal block 2 has terminals 20 and 20A for connecting ends of cables (wiring members) connecting the electronic control device 1 and a controlled device (not shown). On the other hand, this type of electronic control device 1 has a D (not shown).
The mounting section 3 is fixed to a control panel or the like by being mounted on a mounting rail called an IN rail.
【０００３】[0003]
【発明が解決しようとする課題】ここで、電子制御機器
１がプログラマブルコントローラなどの場合には、多数
の端子２０，２０Ａを有しており、そのため、端子２
０，２０Ａを上下２段の階段状に配設している。したが
って、端子台２が嵩高くなる。一方、該端子台２の各端
子２０，２０Ａは、図５（ｂ）のように、上方に窪んだ
被装着部３の上方に配設された配線基板５の更に上方に
設けられているから、電子制御機器１の高さＨが高くな
る。Here, when the electronic control device 1 is a programmable controller or the like, it has a large number of terminals 20 and 20A.
0, 20A are arranged in a two-step upper and lower steps. Therefore, the terminal block 2 becomes bulky. On the other hand, as shown in FIG. 5B, the terminals 20 and 20A of the terminal block 2 are provided further above the wiring board 5 disposed above the mounting portion 3 which is recessed upward. In addition, the height H of the electronic control device 1 increases.
【０００４】したがって、本発明の目的は、電子制御機
器の高さを低くすることである。Accordingly, it is an object of the present invention to reduce the height of electronic control equipment.
【０００５】前記目的を達成するために、本発明は、取
付レールに装着可能な被装着部と、該被装着部を形成す
る筐体の壁面に略平行に配設された配線基板と、該配線
基板に接続され配線材の端部を結線する端子を複数有す
る端子台とを備えた電子制御機器において、配線基板の
端部を取付レールの幅方向に前記被装着部よりも突出さ
せ、該配線基板の突出部分を介して端子を接続したこと
を特徴とする。In order to achieve the above object, the present invention provides a mounting portion which can be mounted on a mounting rail, a wiring board disposed substantially parallel to a wall surface of a housing forming the mounting portion, and An electronic control device comprising a terminal block having a plurality of terminals connected to the wiring board and connecting the ends of the wiring material, wherein the end of the wiring board is projected from the mounting portion in the width direction of the mounting rail, The terminal is connected via a protruding portion of the wiring board.
【０００６】本発明によれば、配線基板は被装着部より
も突出しているから、該配線基板よりも下方の空間に、
たとえば端子を締め付ける雄ネジや導体を配設しても、
これらの雄ネジや導体と前記被装着部とが干渉しない。According to the present invention, since the wiring board protrudes from the mounting portion, the wiring board is placed in a space below the wiring board.
For example, even if a male screw or conductor is
These male screws and conductors do not interfere with the mounted portion.
【０００７】[0007]
【発明の実施の形態】以下、本発明の一実施形態を図面
にしたがって説明する。図１に示す電子制御機器１は、
互いに対称な構成を有する一対の端子台２，２を備えて
おり、以下、端子台２に関する説明については、一方の
端子台２についてのみ説明する。前記端子台２は、図２
に示すように、電子制御機器１の本体ケース（筐体）１
０に対して着脱可能に設けられている。DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to the drawings. The electronic control device 1 shown in FIG.
A pair of terminal blocks 2 and 2 having a symmetrical configuration are provided. Hereinafter, description of the terminal block 2 will be made only for one terminal block 2. The terminal block 2 is shown in FIG.
As shown in FIG. 1, a main body case (casing) 1 of the electronic control device 1 is provided.
0 is detachably provided.
【０００８】前記本体ケース１０は、図３（ａ）の側面
図に示すように側面視（側面から見た形状）が略凸字状
で、かつ、その中央の下部に被装着部３が設けられてい
る。被装着部３は、たとえばＤＩＮレール４のような取
付レールに、電子制御機器１を装着するためのもので、
固定式の第１挟持部３１と可動式の第２挟持部３２を有
する周知の構造である。As shown in the side view of FIG. 3 (a), the main body case 10 has a substantially convex shape when viewed from the side (the shape viewed from the side), and the mounting portion 3 is provided at a lower portion at the center thereof. Have been. The mounted portion 3 is for mounting the electronic control device 1 on a mounting rail such as a DIN rail 4, for example.
This is a known structure having a fixed first holding portion 31 and a movable second holding portion 32.
【０００９】前記本体ケース１０には、前記被装着部３
の一部を形成する下壁面３３に略平行なプリント基板
（配線基板）５が固定されている。該プリント基板５に
は、ＤＩＮレール４の幅方向Ｗに被装着部３よりも突出
した突出部分５０が、両端部に設けられている。該突出
部分５０には、図２および図３（ｂ）に示すように、そ
の表面および裏面に端子面（配線基板の端子）５１，５
１が設けられており、該突出部分５０は雄型コネクタ５
２を形成している。The main body case 10 includes the mounting portion 3.
A substantially parallel printed circuit board (wiring board) 5 is fixed to a lower wall surface 33 which forms a part of the printed circuit board. The printed circuit board 5 is provided at both ends with protruding portions 50 protruding from the mounted portion 3 in the width direction W of the DIN rail 4. As shown in FIGS. 2 and 3B, the protruding portion 50 has terminal surfaces (terminals of a wiring board) 51, 5 on its front and back surfaces.
1 and the projecting portion 50 is provided with a male connector 5.
2 are formed.
【００１０】一方、前記端子台２には、図３（ａ）に破
線で示すように、前記突出部分５０（雄型コネクタ５
２）に装着される凹所２５が形成されている。該凹所２
５には、図３（ｂ）に示すように、端子面５１に接触す
る一対のコンタクト２１，２１Ａが設けられて、雌型コ
ネクタ２２が形成されている。該端子台２の雌型コネク
タ２２がプリント基板５の雄型コネクタ５２に対して、
図３（ａ）のＤＩＮレール４の幅方向Ｗに押し込まれ
て、端子台２がプリント基板５に装着される。On the other hand, as shown by a broken line in FIG.
A recess 25 to be attached to 2) is formed. The recess 2
5, as shown in FIG. 3 (b), a pair of contacts 21 and 21 </ b> A that are in contact with the terminal surface 51 are provided, and a female connector 22 is formed. The female connector 22 of the terminal block 2 is
The terminal block 2 is mounted on the printed circuit board 5 by being pushed in the width direction W of the DIN rail 4 in FIG.
【００１１】図２の電子制御機器１には、端子台２の装
着時に端子台２を案内する案内面１１が、前記略凸字状
の本体ケース１０に一体に形成されている。前記案内面
１１は、図３（ａ）の前記本体ケース１０からプリント
基板５の突出部分５０と略平行に突出しており、端子台
２の装着後には端子台２に外力が加わった際に端子台２
を下方から支持する支持面１１を構成する。該支持面１
１における図２のプリント基板５に対向する（向かい合
っている）部分１１ａは、前記被装着部３の一部を構成
する下壁面３３よりも前記プリント基板５から離れた下
方の位置に設けられている。前記図３（ｂ）のコンタク
ト２１，２１Ａには、導体２３，２３Ａを介して端子２
０，２０Ａが接続されている。プリント基板５の下方の
空間には、下段の端子２０Ａとプリント基板５の端子面
５１とを導通させるコンタクト２１Ａ（導体）および導
体２３Ａの一部が配置されている。これらの端子２０，
２０Ａには、図示しない被制御機器との間を接続するケ
ーブルの端部が、雄ネジ２４で固定されて結線される。
その他の構成は前記図５の従来例と同様であり、同一部
分または相当部分に同一符号を付して、その詳しい説明
を省略する。In the electronic control device 1 shown in FIG. 2, a guide surface 11 for guiding the terminal block 2 when the terminal block 2 is mounted is formed integrally with the main body case 10 having a substantially convex shape. The guide surface 11 protrudes from the main body case 10 in FIG. 3A substantially in parallel with the protruding portion 50 of the printed circuit board 5, and after the terminal block 2 is mounted, when the external force is applied to the terminal block 2, the terminal Stand 2
Is formed from below. The support surface 1
The portion 11a of FIG. 1 facing (facing) the printed circuit board 5 of FIG. 2 is provided at a position lower than the printed circuit board 5 apart from the lower wall surface 33 which constitutes a part of the mounted portion 3. I have. The terminals 21 and 21A of FIG. 3B are connected to the terminals 2 through conductors 23 and 23A.
0 and 20A are connected. In a space below the printed board 5, a contact 21A (conductor) and a part of the conductor 23A for electrically connecting the lower terminal 20A and the terminal surface 51 of the printed board 5 are arranged. These terminals 20,
To 20A, an end of a cable connecting to a controlled device (not shown) is fixed by a male screw 24 and connected.
The other configuration is the same as that of the conventional example of FIG. 5 described above.
【００１２】前記構成において、本電子制御機器１は、
図３（ａ）のプリント基板５における被装着部３よりも
突出させた突出部分５０に雄型コネクタ５２を形成し
て、該突出させた雄型コネクタ５２に図３（ｂ）の端子
台２の雌型コネクタ２２を接続することで、プリント基
板５に端子２０，２０Ａを接続している。したがって、
プリント基板５よりも下方の空間に雄ネジ２４Ａや導体
２３Ａを配設しても、これらの雄ネジ２４Ａや導体２３
Ａと、図３（ａ）の被装着部３とが干渉しない。その結
果、図１の端子２０，２０Ａが２段であるにもかかわら
ず、電子制御機器１の下面１２から端子台２の上面２６
までの高さＨが低くなる。In the above configuration, the electronic control device 1 is
A male connector 52 is formed on a protruding portion 50 of the printed circuit board 5 shown in FIG. 3A which protrudes from the mounted portion 3, and the protruding male connector 52 is provided on the terminal block 2 shown in FIG. The terminals 20, 20A are connected to the printed circuit board 5 by connecting the female connector 22 of FIG. Therefore,
Even if the male screw 24A and the conductor 23A are arranged in a space below the printed circuit board 5, the male screw 24A and the conductor 23A
3A does not interfere with the mounted portion 3 in FIG. As a result, although the terminals 20 and 20A of FIG.
To the height H is reduced.
【００１３】ところで、本実施形態のように、端子台２
を本体ケース１０に対して着脱自在とすると、図３
（ａ）の端子台２を本体ケース１０で支持するのが好ま
しい。しかし、支持面１１ａが被装着部３の下壁面３３
よりも上方に位置していると、図３（ｂ）のプリント基
板５と支持面１１ａとの間にコンタクト２１Ａや導体２
３Ａを配設できなくなる。これに対し、本実施形態で
は、前記支持面１１ａを図３（ａ）の被装着部３の下壁
面３３よりも下方に配置したので、前記図３（ｂ）のコ
ンタクト２１Ａや導体２３Ａを配設し得る。By the way, as in this embodiment, the terminal block 2
3 is detachable from the main body case 10, FIG.
It is preferable that the terminal block 2 shown in FIG. However, when the support surface 11a is attached to the lower
If the contact 21A and the conductor 2 are located between the printed circuit board 5 and the support surface 11a in FIG.
3A cannot be installed. On the other hand, in the present embodiment, since the support surface 11a is disposed below the lower wall surface 33 of the mounted portion 3 in FIG. 3A, the contacts 21A and the conductors 23A in FIG. Can be set up.
【００１４】なお、本発明の電子制御機器１は、必ずし
もＤＩＮレール４に装着される必要はなく、被装着部３
を図４（ａ）のアタッチメント（取付具）７の取付板部
４Ａに取り付けてもよい。さらに、図４（ｂ）のよう
に、電子制御機器１をアタッチメント７を介してＤＩＮ
レール４に取り付けてもよい。すなわち、本発明の電子
制御機器１は、被装着部３がＤＩＮレール４に実際に装
着されるか否かを問題とせず、ＤＩＮレール４に装着可
能な形状の被装着部３を備えていればよい。また、取付
レールとしてはＤＩＮレール４に限定されない。Note that the electronic control device 1 of the present invention does not necessarily need to be mounted on the DIN rail 4,
May be attached to the attachment plate portion 4A of the attachment (attachment) 7 in FIG. Further, as shown in FIG. 4B, the electronic control device 1 is connected to the DIN through the attachment 7.
It may be attached to the rail 4. That is, the electronic control device 1 of the present invention does not care whether or not the mounted portion 3 is actually mounted on the DIN rail 4 and includes the mounted portion 3 which can be mounted on the DIN rail 4. I just need. Further, the mounting rail is not limited to the DIN rail 4.
【００１５】ところで、端子台２が図４（ｂ）のような
姿勢になっていると、多数の端子２０（図１），２０Ａ
に対する結線作業が面倒になる。これに対し、本実施形
態のように、端子台２を本体ケース１０に対して取外し
自在とすれば、取り外した状態で端子２０，２０Ａへの
結線作業が行えるから、結線作業が楽になる。しかし、
本発明は、端子台２が本体ケース１０に対して着脱可能
な構造に限定されるものではなく、端子台２が本体ケー
ス１０に一体に形成されていてもよい。By the way, when the terminal block 2 is in the posture as shown in FIG. 4B, a large number of terminals 20 (FIG. 1), 20A
Connection work is complicated. On the other hand, if the terminal block 2 is made detachable from the main body case 10 as in the present embodiment, the connection work to the terminals 20 and 20A can be performed in the detached state, so that the connection work becomes easy. But,
The present invention is not limited to a structure in which the terminal block 2 is detachable from the main body case 10, and the terminal block 2 may be formed integrally with the main body case 10.
【００１６】なお、本実施形態では電子制御機器１がプ
ログラマブルコントローラである場合について説明した
が、複数個の端子２０，２０Ａを有する電子制御機器１
であれば本発明が適用される。また、端子２０，２０Ａ
は階段状に２段設けられている必要はなく、１段のみで
ある場合も本発明の範囲に含まれる。In this embodiment, the case where the electronic control device 1 is a programmable controller has been described, but the electronic control device 1 having a plurality of terminals 20 and 20A is described.
Then, the present invention is applied. Also, terminals 20, 20A
Need not be provided in two steps in a stepwise manner, and the case of only one step is also included in the scope of the present invention.
【００１７】また、端子２０，２０Ａの構造としては、
前記実施形態のように雄ネジでケーブルの端部を締め付
ける構造に限定されるものではなく、たとえば、隙間に
バネを内蔵した端子に、ケーブルの端部を挿入するなど
の構造であってもよい。また、前記実施形態では、プリ
ント基板５の突出部分５０自体で雄型コネクタ５２を形
成したが、本発明では、前記プリント基板５に雄型コネ
クタを取り付けてもよい。The structure of the terminals 20, 20A is as follows.
The structure is not limited to the structure in which the end of the cable is tightened with the male screw as in the above-described embodiment. For example, a structure in which the end of the cable is inserted into a terminal having a built-in spring in a gap may be used. . Further, in the above embodiment, the male connector 52 is formed by the protruding portion 50 of the printed board 5 itself, but a male connector may be attached to the printed board 5 in the present invention.
【００１８】[0018]
【発明の効果】以上説明したように、本発明によれば、
配線基板の端部を取付レールの幅方向に被装着部よりも
突出させ、該突出部分を介して端子を接続したから、該
突出部分の下方の空間に導体などの種々の部材を配設し
ても、これらの部材が被装着部と干渉しない。したがっ
て、突出部分の下方の空間を利用して、配線基板の端部
と前記端子とを接続することができるから、端子台の高
さを低くすることができ、その結果、電子制御機器の高
さを低くすることができる。As described above, according to the present invention,
Since the end of the wiring board protrudes beyond the mounting portion in the width direction of the mounting rail and the terminal is connected via the protruding portion, various members such as conductors are arranged in a space below the protruding portion. However, these members do not interfere with the mounted portion. Therefore, it is possible to connect the end of the wiring board and the terminal by utilizing the space below the protruding portion, so that the height of the terminal block can be reduced, and as a result, the height of the electronic control device can be reduced. Can be reduced.
【００１９】なお、配線基板の突出部分に対して、端子
台を着脱自在とすれば、端子台を取り外して端子への結
線作業が行えるので、多数の端子への結線作業が容易に
なる。If the terminal block is made detachable with respect to the projecting portion of the wiring board, the terminal block can be removed and the connection work to the terminals can be performed, so that the connection work to a large number of terminals becomes easy.
【００２０】また、端子台を下方から支持する支持面に
おける配線基板に対向する部分を、被装着部を構成する
壁面よりも下方に設けたので、該支持面が邪魔になっ
て、導体などの部材を配設できなくなるということがな
い。したがって、電子制御機器の高さを低くすることが
できる。Further, the portion of the support surface for supporting the terminal block from below, which is opposed to the wiring board, is provided below the wall surface constituting the mounting portion. It is not impossible to dispose the members. Therefore, the height of the electronic control device can be reduced.
【図面の簡単な説明】[Brief description of the drawings]
【図１】本発明の一実施形態を示す電子制御機器の斜視
図である。FIG. 1 is a perspective view of an electronic control device according to an embodiment of the present invention.
【図２】同じく一方の端子台を取り外した状態を示す斜
視図である。FIG. 2 is a perspective view showing a state where one terminal block is removed.
【図３】電子制御機器の側面図および端子台の拡大断面
図である。FIG. 3 is a side view of the electronic control device and an enlarged sectional view of a terminal block.
【図４】取付具の斜視図および他の取付構造によって取
り付けられた電子制御機器を示す斜視図である。FIG. 4 is a perspective view of a mounting tool and a perspective view showing an electronic control device mounted by another mounting structure.
【図５】従来の電子制御機器の一例を示す斜視図であ
る。FIG. 5 is a perspective view showing an example of a conventional electronic control device.
１：電子制御機器 ２：端子台 ３：被装着部 ４：ＤＩＮレール（取付レール） ５：プリント基板（配線基板） １１：支持面 ２０：端子 ２０Ａ：端子 ２１：コンタクト ２２：雌型コネクタ ２３Ａ：導体 ５０：突出部分 ５１：端子面 ５２：雄型コネクタ 1: electronic control device 2: terminal block 3: mounted part 4: DIN rail (mounting rail) 5: printed circuit board (wiring board) 11: support surface 20: terminal 20A: terminal 21: contact 22: female connector 23A: Conductor 50: Projecting part 51: Terminal surface 52: Male connector
Claims (6)
被装着部を形成する筐体の壁面に略平行に配設された配
線基板と、該配線基板に接続され配線材の端部を結線す
る端子を複数有する端子台とを備えた電子制御機器にお
いて、 前記配線基板の端部を前記取付レールの幅方向に前記被
装着部よりも突出させ、該配線基板の突出部分を介して
前記端子を接続したことを特徴とする電子制御機器。1. A mounting portion that can be mounted on a mounting rail, a wiring board disposed substantially parallel to a wall surface of a housing forming the mounting portion, and an end of a wiring material connected to the wiring substrate. An electronic control device comprising: a terminal block having a plurality of terminals for connecting the wiring board; wherein an end of the wiring board is protruded from the mounting portion in the width direction of the mounting rail, and An electronic control device, wherein the terminal is connected.
の端子と前記端子台の端子との間を導通させる導体を配
置した電子制御機器。2. The electronic control device according to claim 1, wherein a conductor that conducts between a terminal of the wiring board and a terminal of the terminal block is arranged in a space below the protruding portion of the wiring board.
部分に対して、前記端子台を着脱可能にした電子制御機
器。3. The electronic control device according to claim 2, wherein the terminal block is detachable from the projecting portion of the wiring board.
出部分と略平行に突出して前記端子台を支持する支持面
を形成すると共に、該支持面における前記配線基板に対
向する部分を前記被装着部を形成する壁面よりも前記配
線基板から離れた位置に設定した電子制御機器。4. The support surface according to claim 3, wherein a support surface that protrudes from the housing to which the wiring board is fixed substantially parallel to a protruding portion of the wiring board to support the terminal block is formed. An electronic control device in which a portion facing the wiring board is set at a position farther from the wiring board than a wall surface forming the mounted portion.
面を設けて該配線基板の端部で雄型コネクタを形成し、
一方、該雄型コネクタに装着される凹所を前記端子台に
設けて該端子台に雌型コネクタを形成した電子制御機
器。5. The male connector according to claim 3, wherein a terminal surface is provided on at least one of a front surface and a rear surface of the wiring board, and a male connector is formed at an end of the wiring board.
On the other hand, an electronic control device in which a recess to be attached to the male connector is provided in the terminal block and a female connector is formed in the terminal block.
タに対して前記取付レールの幅方向に押し込まれて、前
記端子台が前記配線基板に装着されている電子制御機
器。6. The terminal board according to claim 5, wherein the female connector of the terminal block is pushed into the male connector of the wiring board in a width direction of the mounting rail, and the terminal block is mounted on the wiring board. Electronic control equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31613597A JPH11135171A (en) | 1997-10-31 | 1997-10-31 | Electronic control apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31613597A JPH11135171A (en) | 1997-10-31 | 1997-10-31 | Electronic control apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH11135171A true JPH11135171A (en) | 1999-05-21 |
Family
ID=18073652
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP31613597A Pending JPH11135171A (en) | 1997-10-31 | 1997-10-31 | Electronic control apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH11135171A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7609528B2 (en) | 2003-01-13 | 2009-10-27 | Siemens Aktiengesellschaft | Modular installation device |
| CN101639493A (en) * | 2008-08-01 | 2010-02-03 | 株式会社其恩斯 | waveform observing apparatus |
| JP2010038609A (en) * | 2008-08-01 | 2010-02-18 | Keyence Corp | Waveform observing apparatus |
| JP2013167653A (en) * | 2013-06-07 | 2013-08-29 | Keyence Corp | Waveform observation device |
| US11133174B2 (en) | 2015-10-04 | 2021-09-28 | Applied Materials, Inc. | Reduced volume processing chamber |
-
1997
- 1997-10-31 JP JP31613597A patent/JPH11135171A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7609528B2 (en) | 2003-01-13 | 2009-10-27 | Siemens Aktiengesellschaft | Modular installation device |
| CN101639493A (en) * | 2008-08-01 | 2010-02-03 | 株式会社其恩斯 | waveform observing apparatus |
| JP2010038609A (en) * | 2008-08-01 | 2010-02-18 | Keyence Corp | Waveform observing apparatus |
| JP2010038608A (en) * | 2008-08-01 | 2010-02-18 | Keyence Corp | Waveform observing apparatus |
| JP2013167653A (en) * | 2013-06-07 | 2013-08-29 | Keyence Corp | Waveform observation device |
| US11133174B2 (en) | 2015-10-04 | 2021-09-28 | Applied Materials, Inc. | Reduced volume processing chamber |
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