JPH11133195A - X-ray light source device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent the sticking of debris and to stably generate high-intensity X-rays by inclining the optical axis of an X-ray optical system by 60-90 deg. against the normal line from a portion where the laser beam of a target is converged. SOLUTION: The excitation laser beam emitted and excited from a laser light source is converged by a condensing lens 2, transmits a laser beam incidence window 10 and a polyethylene film 8 and is spot-converged on the surface of a target 11. When the angle between a target normal line LT and the optical axis LX of incident X-rays is set to 60-90 deg., the quantity of the debris near the optical axis LX of the incident X-rays and the quantity of the debris stuck to an X-ray spectrometer 12 are extremely reduced, thus high-intensity, stable, high-luminance X-rays can be obtained by inclining the optical axis LX of an X-ray optical system by 60-90 deg. against the target normal line LT. The quantity of the debris near the X-ray optical system is reduced, the sticking of debris to the X-ray optical system is suppressed, high-intensity and soft X-rays can be generated, stable and high-intensity X-rays are obtained, and continuous irradiation is allowed for a long period.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a structure of an X-ray light source device for generating laser plasma X-rays by irradiating a target with high-energy laser light.
The X-ray light source device of the present invention is used in the fields of electronics and materials such as X-ray lithography, X-ray microscope, and nanostructure analysis.

[0002]

2. Description of the Related Art In recent years, an X-ray light source device that irradiates a predetermined target with a laser beam to generate X-rays has been known. For example, using a flat or cylindrical solid metal as a target, a high-density plasma is generated by focusing a laser beam on the surface of this target,
There is known a structure in which X-rays generated from the freely expanded plasma are guided to the outside through an X-ray optical system.

In recent years, high-energy laser light having an intensity of 10 MW / cm ² or more has been developed, and a device for generating laser plasma X-rays using this laser light has been proposed (JP-A-7-128500, etc.). ), Application to X-ray lithography, X-ray microscope, etc. is expected. However, in such an X-ray light source device, at present, laser light irradiation is performed intermittently at intervals of several tens minutes or more in order to avoid a problem due to overheating. In this case, it is difficult to extract continuous X-rays. However, in recent years, as disclosed in JP-A-7-94296, by using a solid-state laser having a pulse train with a waveform controlled, Laser plasma X-rays can be generated repeatedly.

In US Pat. No. 4,700,371, the use of a tape-shaped target allows laser plasma X to be repeatedly and frequently repeated without leaking vacuum.
It has been proposed to generate lines. However, in an X-ray light source device using laser light, combustion decomposed products and crushed products (hereinafter, referred to as debris) are emitted from a target simultaneously with X-rays and scattered over a wide area. Also 10 MW / cm ²
In the case of the above-described high-energy laser light, the speed of debris becomes particularly high, and the laser light scatters over a wider area. When the debris adheres to the X-ray optical system, the amount of X-ray taken out of the apparatus may decrease or the elements of the X-ray optical system may deteriorate. When laser plasma X-rays are repeatedly generated for a long time by using a tape-shaped target or the like, a large amount of debris adheres to the X-ray optical system in a short time.

For this reason, in the conventional X-ray light source device, the device is returned to normal pressure every several tens to thousands of laser irradiations to remove debris attached to the X-ray optical system and the laser optical system. Therefore, there has been a problem that continuous irradiation for a long time is difficult, and workability and productivity are low. Therefore, JP-A-4-
JP 112498 and JP-A-8-194100 disclose an apparatus having a configuration in which a polymer film is interposed between a target and an X-ray optical system, and X-rays are irradiated to the X-ray optical system through the polymer film. Have been. With this configuration, the debris adheres to the polymer film and is captured, so that the debris is prevented from adhering to the X-ray optical system, and the above-described problem is avoided.

[0006]

However, as the debris adheres to the polymer film, the X-ray transmittance decreases, so that the X-ray intensity gradually decreases. Therefore, it is necessary to periodically replace the polymer film with a new one,
When the X-ray light source device is returned to normal pressure, it is difficult to achieve long-time continuous irradiation. If the polymer film is suspended in a tape form between a pair of reels and wound on one of the reels and moved so that a new portion is always suspended, the above problem can be avoided. Therefore, when the thickness is increased, there is a problem that soft X-rays having a specific wavelength are absorbed by the polymer film.

The present invention has been made in view of such circumstances, and in an X-ray light source device using a laser beam, the occurrence of debris is grasped to prevent the attachment of debris to an X-ray optical system. And an X-ray light source device capable of stably generating high-intensity X-rays.

[0008]

The features of the X-ray light source device according to the first aspect of the present invention, which solves the above-mentioned problems, include a vacuum chamber, a target arranged in the vacuum chamber, and a target arranged outside the vacuum chamber. In an X-ray light source device including a laser light source that generates laser plasma X-rays by irradiating a laser beam, and an X-ray optical system that collects the generated X-rays, the optical axis of the X-ray optical system is a target. Is inclined 60 to 90 degrees with respect to the normal from the portion where the laser light is focused.

[0009]

DESCRIPTION OF THE PREFERRED EMBODIMENTS As an X-ray optical system, an X-ray focusing mirror, an X-ray spectroscope, a wavelength selection filter and the like are exemplified. As the laser light, those having an intensity of 10 MW / cm ² or more can be used, and those having an intensity of 100 MW / cm ² or more are particularly preferable.A laser light such as a YAG laser, a glass laser, an excimer laser, and a CO ₂ gas laser is used. Available. If a laser beam with an intensity of 100 MW / cm ² or more is used,
X-rays having a wavelength of about 40 nm can be efficiently generated.

The degree of vacuum in the vacuum chamber is generally 10 ^-10 to 10 ³ Pa or less. Furthermore, as a target,
When generating laser plasma soft X-rays, metals, semiconductors, polymer materials, ceramics, and the like can be used. The target has a shape such as a flat plate, a rod, a column, or a tape. In particular, if the tape is continuously or intermittently supplied to the target position in the form of a tape, a new target can always be supplied without the need to replace the target, so that a long-time continuous operation can be performed.

The most significant feature of the present invention is that the optical axis of the X-ray optical system is inclined by 60 to 90 degrees with respect to the normal from the portion where the laser light of the target is focused. It is clear that debris generated from the target has an angular distribution with respect to a normal line (hereinafter, referred to as a target normal line) at a position where the laser light of the target is condensed and irradiated. For example, when a YAG laser beam is focused on a flat target, the angular distribution of the generated debris with respect to the target normal becomes clear as shown in FIG. 1, and this distribution is a cosine distribution. That is, it means that the debris decreases as the angle with respect to the target normal approaches 90 degrees, and if this angle is 60 degrees or more, the amount of debris is extremely small.

[0012] Therefore, by forming the optical axis of the X-ray optical system at an angle of 60 to 90 degrees with respect to the normal line from the target in the portion where the laser beam is focused, a high intensity X-ray with high intensity can be obtained. X-rays can be obtained, and debris adhesion to the X-ray optical system can be reduced, and long-term continuous use is possible without leaking the vacuum of the equipment even for tens of thousands of laser irradiations. And productivity is improved. Since this effect is estimated to be greatest when the angle between the optical axis of the X-ray optical system and the target normal is 80 degrees, it is most preferably set to 80 degrees. If the angle between the optical axis of the X-ray optical system and the target normal exceeds 90 degrees, it becomes difficult to focus the X-rays. If the angle is less than 60 degrees, debris will adhere to the X-ray optical system and the X-ray intensity will increase. Decrease.

In order to tilt the optical axis of the X-ray optical system by 60 to 90 degrees with respect to the target normal, the optical axis of the X-ray optical system may be adjusted, or the direction of the target may be adjusted. Is also good. As described above, from the viewpoint of the amount of generated debris and the amount of debris adhering to the X-ray optical system, the optical axis of the X-ray optical system is 60 to 60 with respect to the normal line from the target in the portion where the laser light is focused. It is desirable to incline 90 degrees.

[0014]

The present invention will be described below in detail with reference to examples. (Embodiment 1) FIGS. 2 and 3 show an X-ray light source device used in this embodiment. This X-ray light source device includes a vacuum chamber 1 having a laser beam incident window 10 on a side wall, a condenser lens 2 arranged outside the vacuum chamber 1, a flat target 11 arranged inside the vacuum chamber 1, An X-ray spectrometer 12, a scattered particle removing device 3,
And a film driving device 100.

An exhaust device (not shown) is connected to the vacuum chamber 1 so that the pressure inside the vacuum chamber 1 can be reduced to 10 ^-4 Pa. The laser beam entrance window 10 is formed of quartz glass, and is formed in a perfect circular shape on the side wall of the vacuum chamber 1. In the vacuum chamber 1, a flat plate-shaped target 11 made of aluminum is arranged at substantially the center, and a polyethylene film 8 supplied from the scattered particle removing device 3 is provided between the target 11 and the laser light incident window 10 by a laser. It is arranged movably in the direction perpendicular to the optical path.

The condenser lens 2 is disposed outside the vacuum chamber 1 and coaxially with the laser light entrance window 10. Then the target normal L _T of the target 11, positioned on the center and the condenser lens center 2 is collinear laser light entrance window 10 (laser beam axis), it is arranged a laser light source (not shown) on the extension line I have. The X-ray spectrometer 12 is grazing incidence grating monochromator, the optical axis L _X of the incident X-ray to the X-ray spectrometer 12 is adjustable arbitrarily angle θ with respect to the target normal L _T Has become.

The scattered particle removing device 3 includes a base 30 having a U-shaped cross section, a motor 4 fixed to the base 30, a drive reel 5 held on a rotating shaft of the motor 4, and a position separated from the drive reel 5. And a driven reel 6 rotatably held by the base 30 and a polyethylene film 8 stretched between the drive reel 5 and the driven reel 6. Vacuum grease or solid lubricant is applied to all movable parts such as the bearing of the rotating shaft of the motor 4, the bearing of the drive reel 5, and the bearing of the driven reel 6, so that rotation in a vacuum is performed smoothly for a long time. It is devised.

The film driving device 100 is disposed between the target 11 and the X-ray spectrometer 12 and has a feed reel 102 on which a polypropylene film 101 formed in a tape shape having a thickness of 1 μm is wound, and a film 101. And a motor 104 for driving the take-up reel 103 to rotate. The motor 104 is configured to be driven in synchronization with the repetition frequency of the excitation laser.

The following experiment was conducted using this laser X-ray light source device. First, a vacuum chamber 1 is evacuated by an exhaust device (not shown).
^{Is set} to a vacuum of 10 ⁻⁴ to 10 ⁻⁵ Pa, and a second harmonic (wavelength: 0.53 μm) of the excitation YAG laser light having an energy of 1 J and a pulse width of 7 nanoseconds is generated from a laser light source (not shown).
Excitation laser light emitted from the laser light source and excited is condensed by the condenser lens 2, passes through the laser light entrance window 10 and the polyethylene film 8, and is condensed on the surface of the target 11. The irradiation intensity is 7.2 × 10 ¹⁰ W / cm ² .

The irradiation of the excitation laser beam allows the target
11 Laser plasma is generated on the surface, and laser plasma soft X-rays 9 or X-ray lasers 9 are generated from the laser plasma. At this time, the debris generated at the same time is scattered, but is shielded by the presence of the polyethylene film 8 and is prevented from adhering to the laser beam incident window 10.

In this laser X-ray light source device, the motor 4 is driven at the time of irradiation or when irradiation is stopped, and the drive reel 5 rotates. This makes polyethylene film 8
, A tension acts from the drive reel 5, and the tension causes the driven reel 6 to rotate, so that the polyethylene film 8 moves from the driven reel 6 and is wound on the drive reel 5. Therefore, the surface of the polyethylene film 8 to which the debris has adhered deviates from the optical path, and a new surface to which no debris has adhered is located in the optical path. Then, when the next excitation laser beam is emitted from the laser light source, the excitation laser beam passes through a new portion of the polyethylene film 8 where no debris is attached, and is irradiated onto the target 11 smoothly without interruption. Also, even if debris adheres to the polyethylene film 8, the density of the debris is reduced by moving the polyethylene film 8, and continuous irradiation is possible as long as transmission of the excitation laser light is not hindered. The laser plasma soft X-ray 9 or the X-ray laser 9 can be generated stably.

While driving the polyethylene film 8 as described above, the target normal L _T and the optical axis L _{X of the} incident X-ray
Was changed between 45 and 90 degrees, and the X-ray spectrum was observed by the oblique incidence type diffraction X-ray spectrometer 12. A back-illuminated X-ray CCD camera was used for X-ray intensity evaluation. FIG. 4 shows the result of observing the soft X-ray spectrum generated from the target 11 at an angle θ = 90 degrees. FIG. 4 shows a line spectrum (wavelength: 13.13 nm) of high luminance from tetravalent ions of aluminum. Soft X-rays of this wavelength have attracted attention as X-ray reduction exposure light sources.

FIG. 5 shows the relationship between the angle θ and the intensity of the soft X-ray spectrum at a wavelength of 13.13 nm. According to FIG. 5, the angle θ is 90
It can be seen that the relatively high intensity is maintained in the range from degrees to around 50 degrees, and shows a peak value at 80 degrees, but the intensity sharply drops below 50 degrees. This is the X
X-ray spectroscopy is due to the attenuation of the X-ray spectrum by the plasma generated on the surface of the target 11
It is considered that debris was attached to 13.

Meanwhile, from FIG. 1, if the angle θ between the optical axis L _X of the target normal L _T incident X-ray 60 to 90 degrees, the amount of debris in the vicinity of the optical axis L _X of the incident X-ray , The amount of debris adhering to the X-ray spectrometer 12 is also very small. Therefore, the optical axis of the X-ray optical system
By the L _X and configuration inclined 60 to 90 degrees with respect to the target normal L _T, the strength is high and stable high brightness X-ray is obtained, adhere less and less length of the debris to the X-ray optical system Continuous irradiation for a long time becomes possible, and workability and productivity are improved.

(Embodiment 2) FIG. 6 shows an X-ray light source device according to a second embodiment of the present invention. The X-ray light source device includes a vacuum chamber 1 having a laser beam incident window 10 on a side wall, a target driving device 20 disposed in the vacuum chamber 1, an X-ray spectroscope 12 fixed to the vacuum chamber 1, X-ray detector fixed to X-ray spectrometer 12
13 and is composed of.

An exhaust device (not shown) is connected to the vacuum chamber 1 so that the pressure inside the vacuum chamber 1 can be reduced to 10 ^-4 Pa. The laser beam entrance window 10 is formed of quartz glass, and is formed in a perfect circular shape on the side wall of the vacuum chamber 1. The target driving device 20 includes a base 21 fixed in the vacuum chamber 1 and a base 21.
A pair of reels 22 pivotally supported on the upper side, a tape-shaped target 23 having one end wound on one of the pair of reels 22 and the other end held on the other, and a second guide for guiding the tape-shaped target 23. It is composed of a pair of guide rollers 24 and a guide 25 that adjusts the tension of the tape-shaped target 23 and adjusts its direction.

As the tape-like target 23, a polyethylene terephthalate film having a thickness of 50 μm and an aluminum film having a thickness of 10 μm are used, and a motor (not shown) drives one of the reels 22 to rotate at a speed of 5 mm / sec. And is configured to move continuously. The tape target 23 is configured so that the tension is 10 to 50 kg / cm ² when pressed by the guide 25.

Prior to this X-ray light source device, a cylindrical guide was used as the guide 25, and the surface of the tape-like target 23 in contact with the guide was twice as large as the excitation laser light having an energy of 1 J and a pulse width of 7 nanoseconds. Harmonics (wavelength: 0.53
μm) at a repetition frequency of 10 Hz. The YAG laser beam is focused on the tape-like target 23 at a point of about 50 μm in diameter.
× 10 ¹⁰ W / cm ² . Then, the tape-shaped target 23 was melted by the heat, and it became difficult to adhere to the guide and move it.

Therefore, as shown in FIG.
The same experiment was performed using a guide 25 having a configuration such that laser light was transmitted through the tape-like target 23 and passed through the gap 26. Then, it was clarified that the tape-shaped target 23 moved backward by about 500 μm due to the pressure of the photons of the laser beam and the pressure of the plasma generated on the tape-shaped target 23.

When the tape-like target 23 moves as described above, the emission position of the generated X-rays deviates from the X-ray observation position, and it becomes difficult to obtain X-rays of stable intensity. Therefore, when the same experiment was conducted with the width of the gap 26 set to 2 mm, it was found that the amount of movement of the tape-shaped target 23 was reduced to about 100 μm and there was no melting, so the guide 25 having a gap of 2 mm was used. For this reason, it is preferable that the gap is larger by 1 to 1.5 mm than the laser beam size.

Then, the tip shape of the guide 25 is variously changed,
As the angle between the optical axis L _X of the target normal L _T and X-ray spectrometer 12 of the tape-shaped target 23 position YAG laser beam is a point condensing θ is the various levels in the range of 45 to 90 degrees The X-ray spectrum was observed in the same manner as in Example 1. 60 As a result, Example 1 and similar results were obtained, the angle θ formed by the optical axis L _X of the target normal L _T and X-ray optical system of the tape-shaped target 23 of the point light converging position of the laser beam By setting the angle to 90 degrees, high intensity and stable high-brightness X-rays can be obtained, and adhesion of debris to the X-ray optical system is reduced, enabling continuous irradiation for a long time, improving workability and productivity. It was clear that.

(Embodiment 3) According to the X-ray light source devices of Embodiments 1 and 2, the amount of debris adhering to the X-ray optical system can be reduced as compared with the prior art, but it is still insufficient. there were. Therefore, in a method of suppressing the adhesion of debris to the X-ray optical system using a polymer film, the material and thickness of the polymer film were examined so that soft X-rays having sufficient strength could be taken out.

First, the characteristics of various polymer films were investigated in order to suppress the adhesion of debris to the X-ray optical system. X
The minimum condition of the polymer film that is arranged before the X-ray optical system to prevent debris from adhering to the X-ray optical system is that the soft X
It is necessary that the line transmittance is high. Therefore, polyimide, polypropylene, polycarbonate, mylar, fluororesin ("Teflon" manufactured by DuPont), Parylene-C
The relationship between the film thickness of each of (C ₈ H ₇ Cl), parylene-N (C ₈ H ₈ ), and polymethyl methacrylate using the experimental apparatus shown in FIG. It was measured. Table 1 shows the results.

In the experimental apparatus shown in FIG. 8, the laser beam condensed by the condenser lens 2 is condensed and radiated from the laser beam entrance window 10 to the target 11 arranged in the center of the vacuum chamber 1. . And the generated laser plasma soft X-ray 9
Is transmitted through a polymer film 14 and is incident on an X-ray spectrometer 12 composed of a grazing incidence type diffraction grating spectroscope, and its soft X-ray intensity is measured by an X-ray detector 13.

In this experiment, the excitation YAG laser light having an energy of 1 J and a pulse width of 7 nanoseconds was used as the laser light.
The second harmonic (wavelength 532 nm) is used, and aluminum is used for the target 11. The focused size of the excitation laser light on the target 11 is about 150 μm, and the energy on the target 11 is 8.08 × 10 ¹¹ W / cm ² . The angle between the optical axis of the excitation laser beam and the target normal L _T is 0 degree, and the angle (observation angle) θ between the target normal L _T and the optical axis L _X of the X-ray spectrometer 12 is 90 degrees. Then the polymer film 14 is disposed perpendicularly to the optical axis L _X of the target 11 and the X-ray spectrometer 12 to measure the transmittance of the soft X-ray.

[0036]

[Table 1] Assuming that the transmittance of soft X-rays having a wavelength of 13 nm, which is useful as a light source for X-ray lithography, is 1% or more, if the thickness exceeds 3 μm, it is difficult to use all polymer films. If it is about 1 μm, polypropylene and parylene can be used. If the thickness is about 0.2 μm, all polymer films can be used.

In consideration of the strength of the polymer film and the resistance to winding when the thickness is 1 μm or less, polypropylene and parylene are judged to be preferable materials. Next, using a polypropylene film as a polymer film, an experiment was performed to measure the relationship between the irradiation time of the excitation laser beam and the amount of attached debris. First, at a position 100 mm away from the target, 60
The film was placed at an angle in degrees. Using a pulse laser that oscillates at a repetition frequency of 10 Hz as the excitation laser device, 100 shots (10 seconds), 1,000
The irradiation time was changed to shot (100 seconds) and 10,000 shots (1,000 seconds), and the amount of debris attached to the film was observed with an optical microscope. The results are shown in FIGS.

As is clear from FIGS. 9 to 11, the amount of debris is not conspicuous up to 100 shots, but the debris becomes conspicuous after 1,000 shots. Therefore, when a new surface of the polymer film is always exposed by winding the polymer film wound on the reel on another reel, the polymer film may be disposed in the X-ray extraction window of the X-ray optical system. It was found that the total time of debris collision during the travel of the diameter must be within 10 seconds (within 100 shots). That is, for example, in the case of using an excitation laser device that oscillates at a repetition frequency of 10 Hz with an X-ray extraction window having a diameter of 10 mm, it is appropriate to set the film winding speed to 1 mm / sec or more.

FIG. 12 shows the X-ray light source device of this embodiment obtained based on the above experimental results. This X-ray light source device includes a vacuum chamber 1 having a laser beam incident window 10 on a side wall, a target 11 arranged in the vacuum chamber 1, and an X-ray provided in the vacuum chamber 1.
A line extraction window 15, a film driving device 100 disposed at a position 100 mm away from the target 11 between the target 11 and the X-ray extraction window 15, and an aperture 200 disposed between the target 11 and the film driving device 100. It is composed of

The exciting laser beam, the angle α between the optical axis and the target normal L _T is 0 °, that is, is configured to be parallel to irradiation and normal L _T. The angle between the center axis of the normal line L _T and the X-ray extraction window 15 theta (observation angle) is set to 80 degrees. The film drive 100 has a thickness of 1μ
m-shaped polypropylene film
A feed reel 102 wound with 101; a take-up reel 103 holding the leading end of the film 101; and a take-up reel
And a motor 104 for rotationally driving the motor 103.
Reference numeral 104 is configured to be driven in synchronization with the repetition frequency of the excitation laser.

The aperture 200 is for preventing debris from adhering to the surface of the film 101 wound around the reel 102, and has a through hole through which soft X-ray can pass.
It has 201 and is formed from a metal plate. Using this X-ray light source device, a silicon substrate is arranged at a position 200 mm away from the target 11 in the direction of the X-ray extraction window 15 (between the X-ray extraction window 15 and the film driving device 100), and 10 Hz is used as excitation laser light. 100,000 shots were continuously irradiated using a pulse laser oscillating at a repetition frequency of the film
The winding speed of 101 is 1 mm / sec. At this time, the thickness of the debris deposited on the silicon substrate was measured, and the results are shown in Table 2. For comparison, a similar test was performed with the film drive device 100 removed, and the results are shown in Table 2.

[0042]

[Table 2] As is evident from Table 2, according to the X-ray light source device of the present embodiment, the debris has no effect on the X-ray optical system.

[0043]

That is, according to the X-ray light source device of the present invention, the amount of debris near the X-ray optical system is small, the adhesion of debris to the X-ray optical system is suppressed, and a high intensity soft X-ray is generated. Therefore, stable high-intensity X-rays can be obtained, and continuous irradiation for a long time can be performed.

[Brief description of the drawings]

FIG. 1 is a graph showing a distribution of an amount of debris generated when a YAG laser beam is focused on a target at a position inclined by a predetermined angle from a target normal.

FIG. 2 is an explanatory diagram illustrating a configuration of an X-ray light source device according to one embodiment of the present invention.

FIG. 3 is an explanatory diagram showing a relationship between an optical axis of an X-ray optical system of an X-ray light source device according to an embodiment of the present invention and a target normal.

FIG. 4 is a graph showing a line spectrum of a back-illuminated X-ray CCD camera measured in one embodiment of the present invention.

FIG. 5 is a graph showing the relationship between an angle θ measured in one embodiment of the present invention and the intensity of a soft X-ray spectrum at a wavelength of 13.13 nm.

FIG. 6 is an explanatory diagram illustrating a configuration of an X-ray light source device according to a second embodiment of the present invention.

FIG. 7 is an enlarged explanatory view of a main part of FIG. 6;

FIG. 8 is an explanatory diagram showing a configuration of an experimental device used in a third embodiment of the present invention.

FIG. 9 is a micrograph showing the particle structure of debris on the surface of a silicon substrate when continuously irradiated with 100 shots in the third example.

FIG. 10 is a micrograph showing the particle structure of debris on the surface of a silicon substrate when 1,000 shots are continuously irradiated in the third embodiment.

FIG. 11 is a micrograph showing the particle structure of debris on the surface of a silicon substrate when 10,000 shots are continuously irradiated in the third embodiment.

FIG. 12 is an explanatory diagram illustrating a configuration of an X-ray light source device according to a third embodiment of the present invention.

[Explanation of symbols]

1: Vacuum tank 2: Condensing lens 3: Scattered particle removing device 11, 23: Target 9: X-ray 12: X
Line spectrometer (X-ray optical system) L _X: X-ray optical system of the optical axis L _T: Target normal

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[Procedure amendment]

[Submission date] April 6, 1998

[Procedure amendment 1]

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[Correction target item name] Fig. 9

[Correction method] Change

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[Procedure amendment 2]

[Document name to be amended] Drawing

[Correction target item name] FIG.

[Correction method] Change

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FIG. 10

[Procedure amendment 3]

[Document name to be amended] Drawing

[Correction target item name] FIG.

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 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Atsushi Sakata 2 Toyota Town, Toyota City, Aichi Prefecture Toyota Max Co., Ltd. (72) Inventor Yoki 2 Toyota Town Toyota City, Aichi Prefecture Toyota Max Inc. ( 72) Inventor Hirozumi Higashi 41-41, Chuchu-ji, Yokomichi, Nagakute-cho, Aichi-gun, Aichi Prefecture Inside Toyota Central Research Laboratory, Inc.

Claims (1)

[Claims] 1. A vacuum chamber, a target disposed in the vacuum chamber, a laser light source disposed outside the vacuum chamber, and irradiating the target with laser light to generate laser plasma X-rays. X that focuses X-rays
An X-ray light source device comprising a line optical system, wherein an optical axis of the X-ray optical system is inclined by 60 to 90 degrees with respect to a normal line from a portion of the target where the laser light is focused. An X-ray light source device characterized by the above-mentioned.