JP2001284098A - X-ray generating target and x-ray generating system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a target which can generate X-ray having a narrow band spectrum and big peaks at wavelengths of 6 nm and 16 nm. SOLUTION: Consisting of a polymer film 40 and a target layer formed on a surface of the polymer film 40, this X-ray generating target has a double- layer structure with the target layers having aluminum layer 41 of layer thickness from 2 to 10 μm and boron layer 42 of layer thickness from 0.1 to 20 μm. With this double-layer structure, by correlation of the X-rays generated at the aluminum layer and at the boron layer, the X-ray having a narrow band spectrum can be generated with big peaks at wavelengths of 6 nm and 16 nm.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an X-ray generator for generating a laser plasma soft X-ray, an X-ray laser, and the like, and a target used for the X-ray generator. X-rays extracted from the X-ray generator of the present invention are X-rays.
It can be used for X-ray photoelectron spectroscopy, X-ray diffraction spectroscopy, nanostructure analysis, X-ray microscope, and the like, and can be particularly suitably used for X-ray microphotoelectron spectroscopy.

[0002]

2. Description of the Related Art In recent years, an X-ray generating apparatus for generating an X-ray by irradiating a predetermined target disposed in a vacuum container with a laser beam has been known. For example, a flat or cylindrical solid metal is used as a target, and a high-density laser plasma is generated by condensing a laser beam on the surface of this target. There is known a structure that leads to the outside through a system.

In recent years, high-energy laser light having an intensity of 10 to 100 MW / cm ² or more has been developed, and an apparatus for generating laser plasma soft X-rays by using this laser light for excitation has been proposed (Japanese Patent Laid-Open Publication No. Heisei (Kokai) No. Heisei 9 (1994) -208). Application to X-ray lithography and X-ray microscope is expected.

However, in such an X-ray generator, the excitation laser beam is intermittently irradiated at intervals of several tens minutes or more in order to avoid a problem due to overheating. In this case, it is difficult to continuously extract soft X-rays. However, in recent years, as disclosed in Japanese Patent Application Laid-Open No. 7-94296, a solid-state laser having a pulse train with a controlled waveform is used to generate 1 Hz or 10 Hz. By repeating the above, laser plasma soft X-rays can be generated.

In US Pat. No. 4,700,371 and the like, laser plasma soft X-rays are repeated at high frequency without returning the vacuum vessel to normal pressure by using a solid-state laser of a pulse train with a controlled waveform and a tape-shaped target. It has been proposed to occur.

However, in an X-ray generator using an excitation laser beam, scattered particles composed of combustion decomposition products and crushed materials are emitted from a target simultaneously with X-rays and scattered over a wide area. In the case of a high-energy excitation laser beam of 10 MW / cm ² or more, the speed of the scattered particles is particularly high, and the scattered particles are scattered over a wider range. And these flying particles are X
When adhered to the line optical system, the amount of X-rays taken out of the apparatus may be reduced or elements of the X-ray optical system may be deteriorated. Further, when scattering particles adhere to the laser optical system, the utilization efficiency of the excitation laser light decreases. In addition, when laser plasma soft X-rays are repeatedly generated for a long time by using a tape-shaped target, etc., a large amount of scattered particles explosively occur in a short period of time, and an X-ray optical system or a laser optical There is a problem of sticking to the system.

For this reason, in the conventional X-ray generator, the vacuum vessel is returned to normal pressure every several tens to thousands of times of irradiation with the excitation laser to remove scattered particles attached to the X-ray optical system or the laser optical system. I have. Therefore, it is difficult to take out X-rays continuously for a long time, and there is a problem that workability and productivity are low.

Therefore, Japanese Patent Application Laid-Open Nos. 4-112498 and 8-19
Japanese Patent No. 4100 discloses an apparatus having a configuration in which a polymer film is interposed between a target and an X-ray optical system, and X-rays are irradiated to the X-ray optical system through the polymer film. Japanese Patent Application Laid-Open No. Hei 10-26699 proposes to use a polymer film to prevent scattered particles from adhering to an excitation laser entrance window. With this configuration, the scattered particles adhere to and are captured by the polymer film, so that the scattered particles are prevented from adhering to the X-ray optical system or the laser optical system, and the above-described problem can be solved.

Japanese Patent Application Laid-Open No. 10-55899 discloses a method for continuously generating soft X-rays by injecting and recovering fine metal particles to an excitation laser irradiation position.
No. 221499 discloses injection of a gas containing fine metal particles.
A method for generating soft X-rays using a collecting device is disclosed.

[0010]

However, it is difficult to completely shield floating particles floating in a vacuum vessel by a method of shielding scattered particles by a polymer film, and it is difficult to shield the particles by X-ray lithography or X-ray photoelectron spectroscopy. In some cases, suspended particles may enter the used X-ray optical element or X-ray focusing optical system.

In the method of spraying fine metal particles as a target, the generation of scattered particles can be reduced.
There are problems that it is difficult to generate high-intensity soft X-rays and that it is difficult to synchronize the ejection with the excitation laser.

As an X-ray light source used for microphotoelectron spectroscopy, core electrons localized in device elements, particularly silicon (Si), which is a basic element of a semiconductor, for functionally evaluating materials and devices are used. In order to excite shell electrons, a wavelength of 7 nm or less is required, while G
A wavelength of about 16 nm is required to excite valence band electrons of a compound semiconductor such as a and As.

For the above reasons, the wavelengths of 6 nm and 16 nm
An X-ray light source that has a large peak at the same wavelength, has a spectrum narrowed by this wavelength, and has almost no peak at other wavelengths is preferable. However, a target for simultaneously generating X-rays of these two wavelengths in a narrowed spectrum has not yet been known. Therefore, a light source having peaks at various wavelengths or a light source for generating each wavelength alone is used. Was used.
There is a problem that the analysis accuracy is low or the number of steps is large.

The present invention has been made in view of such circumstances, and has as its object to provide a target capable of generating X-rays having large peaks at wavelengths of 6 nm and 16 nm and having a narrowed spectrum. I do.

Another object of the present invention is to generate the above-mentioned unique X-ray continuously while suppressing the generation of flying particles and suspended particles, and to set a target in synchronization with an excitation laser. An object of the present invention is to provide an X-ray generator that can be easily supplied.

[0016]

A feature of the X-ray generation target of the present invention which solves the above-mentioned problems is a target which is arranged in an X-ray generator and generates X-rays by irradiation of an energy beam. A molecular film and a target layer formed on the surface of the polymer film. The target layer has an aluminum layer having a thickness of 2 to 10 μm and a thickness of 0.1.
It may form a two-layer structure with a boron layer of about 20 μm.

In the X-ray generation target of the present invention, the target layer preferably comprises an aluminum layer formed on the surface of the polymer film and a boron layer formed on the surface of the aluminum layer.

The X-ray generator according to the present invention for solving the above-mentioned problems is characterized in that a vacuum vessel, a target arranged in the vacuum vessel, beam irradiation means for irradiating the target with an energy beam, and communication with the vacuum vessel are provided. An X-ray optical system for guiding X-rays generated from the target
In the X-ray generator, the target is the X-ray generation target according to claim 1 or 2, and has a target driving device that continuously or intermittently supplies the target to the irradiation position of the energy beam.

[0019]

According to the study of the present inventors, when a polymer film is irradiated with an energy beam, not only is it turned into plasma by the energy but also the irradiation position of a certain type of polymer film is reduced. It was clarified that the surrounding area was only gasified and no scattered particles were generated. Therefore, by using such a polymer film, the generation of scattered fine particles can be suppressed.

Therefore, the target of the present invention comprises a polymer film and a target layer formed on the surface of the polymer film. The polymer film holds the target layer to impart strength, and enables continuous supply to the energy beam irradiation position as described later. The energy beam is usually applied to the target layer.However, if the energy beam is applied to the polymer film, it is possible to suppress the generation of scattered particles even if the energy beam is applied to the polymer film. It is desirable that the material be easily gasified when irradiated with an energy beam, and that the material be composed of an element selected from carbon, hydrogen, oxygen and nitrogen. When such a polymer film is used, CO, CO ₂ , H ₂ O, N ₂
It easily gasifies as such and does not generate scattered particles and suspended particles. Examples of such a polymer film include polyethylene, polypropylene, polyethylene terephthalate, polycarbonate, polyimide, and parylene.

The thickness of the polymer film is desirably 30 μm or more. If the thickness is less than 30 μm, the area around the irradiation position of the energy beam breaks over a wide range, and it becomes difficult to supply the target continuously or intermittently using a target driving device described later. If the thickness is 30 μm or more, only the irradiation position of the energy beam is melted, so that the surrounding area can be prevented from being broken. The upper limit of the thickness is not limited, but is easy to supply by the target driving device, easy to manufacture,
Alternatively, considering the winding length on the reel, etc., 1
The thickness is preferably not more than 00 μm.

The most characteristic feature of the present invention is that the target layer is an aluminum layer having a thickness of 2 to 10 μm and an aluminum layer having a thickness of 0.1 to 10 μm.
It has a two-layer structure with a boron layer of 20 μm. With such a two-layer structure, due to the interaction between the X-rays generated in the aluminum layer and the X-rays generated in the boron layer, the spectrum has large peaks at wavelengths of 6 nm and 16 nm and a narrow band spectrum. X-rays can be generated.

When the thickness of the aluminum layer is smaller than 2 μm, pinholes are liable to be formed in the aluminum layer itself,
It is not preferable because the spectrum of the generated X-rays differs depending on the irradiation position of the energy beam. When the thickness of the aluminum layer exceeds 10 μm, the amount of scattered particles generated at the time of irradiation with the energy beam increases. On the other hand, when the thickness of the boron layer is less than 0.1 μm, it becomes difficult to generate an X-ray having a spectrum having a peak at a wavelength of 6 nm, and when the thickness is more than 20 μm, an X-ray having a spectrum having a peak at a wavelength of 16 nm is generated. It becomes difficult, and the amount of scattered particles generated at the time of energy beam irradiation increases.

Either of the aluminum layer and the boron layer may be an upper layer, but a target layer composed of an aluminum layer formed on the surface of the polymer film and a boron layer formed on the surface of the aluminum layer. Is desirable. In the opposite configuration, when the aluminum layer is the outermost surface, most of the energy of the energy beam is robbed by the aluminum layer having a high ionic value, and X-rays having a spectrum with a small peak at a wavelength of 6 nm due to boron are generated. Therefore, it is preferable that the boron layer be an upper layer (the surface side on which the energy beam is irradiated).

It is desirable that the total thickness of the target layer be 20 μm or less in total of the aluminum layer and the boron layer. If the thickness of the target layer exceeds 20 μm, scattered particles and suspended particles are generated when the energy beam is irradiated. Further, the target layer can be formed by processing aluminum or boron to a thickness of 10 μm or 20 μm or less, and welding or bonding the aluminum or boron on the polymer film. Alternatively, an aluminum layer or a boron layer may be formed by vapor deposition. In particular, since boron has a high melting point and is difficult to be processed into a foil shape, it is desirable to form a boron layer by vapor deposition.

An X-ray generator according to the present invention is provided with a vacuum vessel, a target disposed in the vacuum vessel, beam irradiation means for irradiating the target with an energy beam, and a beam generated from the target provided in communication with the vacuum vessel. X leading X-ray
And a line optical system.

As the target, one composed of the above-mentioned polymer film and target layer is used.

The beam irradiation means has an intensity of 10 MW.
/ Cm ² or more can be used for irradiating a laser beam of 100 MW / cm ² or more.
^Two or more are particularly preferable, and laser light such as a YAG laser, a glass laser, an excimer laser, a CO ₂ gas laser, a titanium sapphire laser, and a dye laser can be used. When a laser beam having an intensity of 100 MW / cm ² or more is used, soft X-rays having a wavelength of 2 to 40 nm can be efficiently generated.

The X-ray generator according to the present invention includes a target driving device for continuously or intermittently supplying a target to an energy beam irradiation position. Therefore, it is desirable that the target has a sheet shape or a tape shape. With such a target, the target can be continuously or intermittently supplied to the irradiation position of the energy beam by using the target driving device. Therefore, without releasing the vacuum in the vacuum container,
X-rays can be continuously generated for a long time.

This target driving device has a configuration in which, for example, a pair of reels is prepared, and a tape-shaped target is wound from one of the wound reels to the other. If the rotation drive of the reel is continuous, the target can be continuously supplied to the irradiation position, and if the rotation drive is intermittent, the target can be supplied intermittently.

The target can be formed into a sheet having a relatively large area, and the target can be supplied continuously or intermittently by rotating or moving it in parallel. Alternatively, wrap a sheet-shaped target around the surface of a cylindrical member,
The member may be rotated.

The degree of vacuum of the vacuum vessel is 10 ^-10 to 10
The range of ⁻³ Pa is generally used, and examples of the X-ray optical system include an X-ray focusing mirror, an X-ray spectroscope, and a wavelength selection filter.

The X-ray generator of the present invention is preferably further provided with an X-ray optical system such as an X-ray focusing mirror, a flat-image oblique incidence spectroscope, and a wavelength selection filter. Further X
It is more desirable to provide, in addition to the line optical system, a wavelength dispersion device for dispersing the wavelength of X-rays, and a wavelength selection device for selecting the wavelength of the wavelength-dispersed X-rays and extracting a substantially single-wavelength X-ray. In a wavelength dispersion device, X-rays generated from a target are dispersed into X-rays of various wavelengths, and X-rays having substantially a single wavelength can be extracted from the wavelength-dispersed X-rays by a wavelength selection device. The extracted X-rays having substantially a single wavelength can be used as a monochromatic X-ray light source, and are extremely useful for X-ray photoelectron spectroscopy, X-ray diffraction spectroscopy, nanostructure analysis, X-ray microscope, and the like.

Examples of the wavelength dispersion device include a spectroscope, a diffraction grating, a multilayer half mirror film, a zone plate and the like. A spatial slit is typically exemplified as the wavelength selection device. This space slit is composed of two parallel metal plates and a frame arranged side by side with a gap therebetween, blocks the X-rays except for the elongated gap, and makes the longitudinal direction of the gap perpendicular to the wavelength dispersion direction. It has become. The spectral width can be limited by the width of the elongated gap, and by increasing the length of the gap, more X-rays can be transmitted.

The wavelength selector may be configured to take out X-rays of a specific wavelength as fixed, but it is preferable to be movable in the wavelength dispersion direction of the wavelength-dispersed X-rays. As a result, X-rays of various wavelengths can be selected and extracted, and can be variously used as a monochromatic X-ray light source that can emit X-rays of various wavelengths.

For example, when a diffraction grating is used as a wavelength dispersion device, the incident angle (α) of X-rays incident on the diffraction grating and the emission angle (β) of X-rays of a predetermined wavelength (λ) that are wavelength-dispersed.
Has the relationship of the following equation (1). In the following equation (1), N is the number of grooves in the diffraction grating, and k is the order.

Therefore, the emission angle (β) of the X-ray of the predetermined wavelength (λ) can be obtained from the equation (1), and the diffraction L can be calculated by the following equation (2) using the distance L from the diffraction grating to the wavelength selection device. Since the height (H) from the lattice plane to the imaging position can be calculated, X-rays of an arbitrary wavelength can be extracted from the wavelength-dispersed light by making the wavelength selector movable to the imaging position. it can.

Nkλ = sinα + sinβ (1) H = L cotβ (2) The X-rays of a specific wavelength selected by the wavelength selection device are connected to the X-ray CCD camera, micro channel plate, streak camera, etc. before the wavelength selection device. Can be observed by placing an X-ray detector, and by placing an X-ray microscope, an X-ray (EUV) lithography evaluation device, a photoelectron spectroscopy device, etc., each can be used as a monochromatic X-ray light source. Can be used in the field.

Further, in the X-ray generator of the present invention, it is desirable that a regulating member for cutting higher-order X-rays is disposed between the target and the X-ray optical system. In this way, the higher order X-rays are cut by the regulating member,
When the X-rays are incident on the wavelength dispersion device and the wavelength selection device, further narrowing of the band is achieved and the X-ray of a single wavelength is obtained.
The line can be taken out more reliably. As this regulating member, a silicon nitride film or the like can be used.

Further, it is desirable that the X-ray generator of the present invention has a scattered particle removing device for suppressing at least the scattered particles from entering the X-ray optical system. Thus, even if scattered particles or suspended particles are generated from the target due to some reason, the particles can be prevented from adhering to the X-ray optical system, and the continuous operation can be performed for a longer time. As the scattered particle removing device, a polymer film or the like disclosed in JP-A-8-194100 or the like can be used.

[0041]

The present invention will be described below in detail with reference to examples.

(Embodiment 1) FIG. 1 shows X in one embodiment of the present invention.
1 shows a line generator. The X-ray generator includes a vacuum vessel 1 having a laser incident window 10 on one side wall, a spectroscope connection port 11 on a side wall crossing the side wall at 90 degrees, and a condenser lens arranged outside the vacuum vessel 1. 2, a target driving device 3 disposed in the vacuum vessel 1, a tape-shaped target 4 disposed in the target driving device 3, and a planar imaging oblique incidence spectroscope 5 connected to a spectroscope connection port 11.
And is composed of

The plane imaging oblique incidence spectrometer 5 includes an X-ray focusing mirror 50 and a slit 51, and a diffraction grating 6 as a wavelength dispersion device and a CCD camera 7 are provided in front of the mirror.

An exhaust device (not shown) is connected to the vacuum vessel 1 so that the pressure inside the vacuum vessel 1 can be reduced to 10 -4 Pa. The laser incident window 10 is formed of quartz glass, and is formed in a perfect circular shape on the side wall of the vacuum vessel 1.

The condenser lens 2 is arranged coaxially with the laser light entrance window 10 outside the vacuum vessel 1. Then, the target normal line at the condensing position of the target 4, the center of the laser incident window 10 and the center of the condensing lens 2 are located on the same straight line (laser optical axis), and a laser light source (not shown) is arranged on an extension of the straight line. ing. This laser light source has several hundred MW / cm ² at a repetition frequency of 10 Hz.
The high-energy excitation laser beam 100 is applied.

As shown in an enlarged view in FIG. 2, the target driving device 3 includes a pair of reels 31 and 32 that are movably held on a base 30 and a target interposed between the pair of reels 31 and 32. 4 and a motor (not shown). As shown in FIG. 3, the target 4 includes a transparent film layer 40 made of polyethylene and a film layer 40.
It has a three-layer structure including an aluminum layer 41 laminated on the surface and a boron layer 42 formed on the surface of the aluminum layer 41 by vapor deposition, and is formed in a tape shape. The target 4 is wound around one of the reels 31 and is wound from one of the reels 31 to the other reel 32 by continuous driving of a motor. Therefore, the portion irradiated with the excitation laser light is wound around the reel 32, so that a new portion of the target 4 is always located at the condensing position 33 of the laser light 100.

The target 4 includes an aluminum layer 41 formed by bonding an aluminum foil to a film layer 40 made of polyethylene, and a boron layer 42 formed on the surface of the aluminum layer 41 by vacuum evaporation. At the light position 33, the surface of the boron layer 42 is arranged so as to face the laser light 100.

It is known that the target 4 is peeled off by about 500 μm in the moving direction by one irradiation of the laser beam 100. Therefore, when irradiating the laser beam with a repetition frequency of 10 Hz, it is sufficient that the feed speed of the target 4 is about 5 mm / sec.

The X-ray focusing mirror 50 in the plane imaging type oblique incidence spectroscope 5 has a toroidal reflection surface, and is designed so that X-rays perpendicular to the surface are focused by the slit 51. I have.

In the X-ray generator of the present embodiment described above, the flat-image-form oblique incidence spectroscope 5 includes the X-ray focusing mirror 5
The X-rays converged at 0 pass through the slit 51, and the X-rays whose wavelength is dispersed by the diffraction grating 6 are incident on the CCD camera 7.

According to the X-ray generator, the reel 30,
By making the rotation drive of 31 continuous, the target 4 can be continuously supplied to the condensing position 33 of the excitation laser beam 100. If the rotation drive is made intermittent, it can be supplied intermittently. Therefore, continuous driving for a long time becomes possible.

According to this X-ray generator, since the tape-shaped target 4 composed of the film layer 40, the aluminum layer 41 and the boron layer 42 is used, the generation of scattered particles and suspended particles can be suppressed. it can. Thereby, the laser incident window 10, the plane imaging type oblique incidence spectrometer 5,
Alternatively, the attachment of scattered particles and suspended particles to the CCD camera 7 is suppressed, and X-rays can be generated and used stably for a long time.

(Test Example) Using the above X-ray generator,
The spectrum of X-rays generated by variously changing the configuration of the target 4 was measured.

FIG. 4 shows an X-ray spectrum of a target 4 having a fixed film layer 40 with a fixed thickness of 50 μm and only an aluminum layer 41. FIG. The X-ray spectrum in this case is shown in FIG.

For aluminum, a large peak is observed at a wavelength of 16 nm, and for boron, large peaks are observed at wavelengths of 6 nm and 12 nm.

Next, the thickness of the film layer 40 was fixed at 50 μm, and an aluminum foil was bonded to the surface thereof to form an aluminum layer 41 with a thickness of 5 μm. The thickness of the aluminum layer 41 was fixed at 5 μm. Then, the boron layer 4 is formed on the surface of the aluminum layer 41 by vacuum evaporation.
2, 0.05 μm, 0.1 μm, 0.5 μm, 1 μm,
Eight levels of 5 μm, 10 μm, 20 μm and 50 μm were formed to prepare eight kinds of targets 4. X-ray spectra generated using these targets 4 are shown in FIGS.

As is clear from comparison of these spectra, as the thickness of the boron layer 42 increases, the wavelength 6n
The peak at m is higher, while the peak at 16 nm is smaller. The thickness of the boron layer 42 is 0.05
μm is not preferable because the peak at a wavelength of 6 nm is lower than the peak at an unnecessary wavelength, and the thickness of the boron layer 42 is 50 μm.
When the peak length is m, the peak at a wavelength of 16 nm is lower than the peak at an unnecessary wavelength, which is not preferable.

Therefore, the thickness of the aluminum layer 41 is 5
μm, the thickness of the boron layer 42 is 0.1 to 20 μm.
It turns out that the range of m is desirable.

In this embodiment, the target driving device 3 is of the horizontal type, but the same effect can be obtained by using the vertical type as shown in FIG.

(Embodiment 2) In the embodiment 1, the target 4 is formed in a tape shape.
The configuration is the same as that of the first embodiment except that a target 4 in sheet form is used as shown in FIG.

The target driving device 3 in the X-ray apparatus of the present embodiment comprises an XY stage comprising an X stage 34 and a Y stage 35, and a sheet-like target 4 held on the XY stage. ing. The target 4 is formed in a sheet shape composed of a film layer 40, an aluminum layer 41, and a boron layer 42 as in the first embodiment, and is adhered to a flat plate 36. The target 4 is disposed so as to be perpendicular to the optical axis of the excitation laser light. The X stage 34 and the Y stage 35 are movable in the X direction and the Y direction, respectively.
Each can be manually driven in the X and Y directions. The target 4 moves with the movement of the XY stage, so that each part of the target 4 is located at the laser beam focusing position 33.

Therefore, according to the X-ray generator of this embodiment, by driving the X stage 34 and the Y stage 35 every time the laser beam 100 is irradiated, a new portion of the target 4 is moved to the laser beam focusing position 33. Can be done. Therefore, the target can be exchanged without releasing the vacuum of the vacuum vessel 1, so that the laser beam can be repeatedly irradiated, and the X can be repeatedly repeated at a high frequency.
Lines can be generated.

In this embodiment, the target 4 is adhered to the rectangular flat plate 36. However, as shown in FIG.
7 may be attached. In this case, a new portion of the target 4 can be positioned at the laser beam condensing position 33 by using only the X stage 34 and rotating the disk 43 about its center.

(Embodiment 3) The X-ray generator of this embodiment is also
The configuration is the same as that of the first embodiment except that the configurations of the target and the target driving device are different.

That is, as shown in FIG. 17, the target driving device 3 includes a driving device 38 and a cylindrical member 39 fixed to the driving device 38. By driving the driving device 38, the cylindrical member 39 is configured to rotate about the central axis and to advance and retreat in the central axis direction (Y direction). The target 4 having the same configuration as that of the second embodiment is attached to the outer peripheral surface of the cylindrical member 39.

According to the target driving device 3, an arbitrary portion of the target 4 can be positioned at the laser beam condensing position 33 by driving the driving device 38. Therefore, the target can be replaced without releasing the vacuum of the vacuum vessel 1, so that the laser beam can be repeatedly irradiated, and the X-ray can be repeatedly generated at a high frequency.

[0067]

According to the X-ray generation target and the X-ray generation apparatus of the present invention, X-rays of substantially single wavelength can be extracted and used as a monochromatic X-ray light source. Further, since X-rays having spectra having high peaks at 6 nm and 16 nm can be generated, it is very suitable for X-ray microphotoelectron spectroscopy. In addition, when the target is formed in a sheet shape or a tape shape, X-rays can be repeatedly generated with high frequency, and a long-time continuous operation can be performed.

[Brief description of the drawings]

FIG. 1 is an explanatory cross-sectional view illustrating an overall configuration of an X-ray apparatus according to an embodiment of the present invention.

FIG. 2 is a perspective view of a target driving device used in the X-ray apparatus according to one embodiment of the present invention.

FIG. 3 is a cross-sectional view of a target used in the X-ray apparatus according to one embodiment of the present invention.

FIG. 4 is an X-ray spectrum diagram observed with the X-ray apparatus of one embodiment of the present invention and targeting only the aluminum layer.

FIG. 5 is an X-ray spectrum diagram observed with the X-ray apparatus of one embodiment of the present invention and targeting only the boron layer.

FIG. 6 shows a graph of 5 μm observed with an X-ray apparatus according to an embodiment of the present invention.
FIG. 5 is an X-ray spectrum diagram when a target having an aluminum layer of m and a boron layer of 0.05 μm is used.

FIG. 7: Observed by the X-ray apparatus of one embodiment of the present invention,
FIG. 3 is an X-ray spectrum diagram when a target having an aluminum layer of m and a boron layer of 0.1 μm is used.

FIG. 8 shows a graph of 5 μm observed with an X-ray apparatus according to an embodiment of the present invention.
FIG. 7 is an X-ray spectrum diagram when a target having an aluminum layer of m and a boron layer of 0.5 μm is used.

FIG. 9: Observed by the X-ray apparatus of one embodiment of the present invention,
FIG. 6 is an X-ray spectrum diagram when a target having an m-th aluminum layer and a 1 μm-boron layer is used.

FIG. 10 shows the results of observation with an X-ray apparatus according to an embodiment of the present invention;
FIG. 4 is an X-ray spectrum diagram when a target having a μm aluminum layer and a 5 μm boron layer is used.

FIG. 11 shows the results of observation with an X-ray apparatus according to an embodiment of the present invention;
FIG. 5 is an X-ray spectrum diagram when a target having a μm aluminum layer and a 10 μm boron layer is used.

FIG. 12 shows a graph of 5 observed with the X-ray apparatus of one embodiment of the present invention.
FIG. 3 is an X-ray spectrum diagram when a target having a μm aluminum layer and a 20 μm boron layer is used.

FIG. 13 shows a graph of 5 observed with the X-ray apparatus of one embodiment of the present invention.
FIG. 4 is an X-ray spectrum diagram when a target having a μm aluminum layer and a 50 μm boron layer is used.

FIG. 14 is a perspective view illustrating another aspect of the target driving device used in the first embodiment.

FIG. 15 is a perspective view of the target driving device used in the second embodiment.

FIG. 16 is a perspective view showing another aspect of the target driving device used in the second embodiment.

FIG. 17 is a perspective view of a target driving device used in Embodiment 3.

[Explanation of symbols]

1: Vacuum container 2: Condensing lens
3: Target driving device 4: Target 5: Planar imaging oblique incidence spectrometer 6: Diffraction grating (wavelength dispersion device) 7: CCD camera 40: Film layer 41: Aluminum layer 4
2: Boron layer

 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Atsushi Sakata 2 Toyota Town, Toyota City, Aichi Prefecture Inside Toyota Max Co., Ltd. (72) Inventor Hirozumi Higashi 41, Chukuji Yokomichi Oji, Nagakute-cho, Aichi-gun 1 Toyota Central Research Laboratory Co., Ltd. F-term (reference) 4C092 AA06 AB19 AB23 BD05 BD11 BD14 BD19 CE02

Claims (3)

[Claims] 1. A target which is arranged in an X-ray generator and generates X-rays by irradiation of an energy beam,
It comprises a polymer film and a target layer formed on the surface of the polymer film.
An X-ray generation target characterized in that it has a two-layer structure of an aluminum layer having a thickness of 0 μm and a boron layer having a thickness of 0.1 to 20 μm. 2. The method according to claim 1, wherein the target layer comprises the aluminum layer formed on the surface of the polymer film, and the boron layer formed on the surface of the aluminum layer. X-ray generation target. 3. A vacuum vessel, a target placed in the vacuum vessel, beam irradiation means for irradiating the target with an energy beam, and an X-ray generated from the target provided in communication with the vacuum vessel. 2. An X-ray generator comprising: an X-ray optical system for guiding an object;
3. An X-ray generating apparatus according to claim 2, further comprising a target driving device for continuously or intermittently supplying the target to an irradiation position of the energy beam.