JPH11125805A - Matrix substrate and liquid crystal display device and projection type liquid crystal display device using the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a liquid crystal display device which is capable of stably fixing pixel potential, precisely controlling the potential applied to liquid crystals and providing good image quality even if there is some variations in the pixel potential. SOLUTION: The liquid crystal display device which divides an analog video signal into a plurality of lines and impresses these signals on a liquid crystal panel has >=3 pieces of analog video input lines 41 to 44 within this liquid crystal panel on one side of its liquid crystal pixel array region and has analog switches 6 for transmitting these analog video signals to the desired signal lines between the analog video input lines 41 to 44 and the liquid crystal pixel array. The various values of the connecting distances of the analog video input lines 41 to 44 and the analog switches 6 are not sorted. The device has respectively >=2 pieces of the analog video input lines 41 to 44 on both sides of the liquid crystal pixel array. The various values of the connecting distances of the analog video input lines 41 to 44 and the analog switches 6 vary in their sequence on both sides.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a matrix substrate as a pixel electrode substrate for displaying images and characters using liquid crystal, a liquid crystal device, and a display device using the same.
The present invention relates to a matrix substrate, a liquid crystal display device, and a projection type liquid crystal display device having an analog input line to a liquid crystal panel and an analog switch for displaying a liquid crystal element.

[0002]

2. Description of the Related Art In accordance with the recent information and communication era, the necessity of displaying information is increasing. At such times, the importance of display devices for communicating with image information is increasing. Above all, liquid crystal display devices have been receiving attention because of their thinness and low power consumption, and have grown into a key industry along with the semiconductor industry. The liquid crystal display device is currently mainly used in a 12-inch notebook-sized personal computer. In the future, not only personal computers, but also workstations and home televisions, liquid crystal display devices having a larger screen size will be used. However, as the screen size increases, not only the manufacturing apparatus becomes expensive, but also electrically strict characteristics are required to drive a large screen. For this reason, the screen size is increased, and the manufacturing cost is reduced to two or less.
It increases rapidly, for example, in proportion to the third power.

[0003] Therefore, recently, a front or rear projection (projection) system for producing a small liquid crystal display panel and optically enlarging and displaying a liquid crystal image has been attracting attention. This is because the size can be reduced, the characteristics can be improved, and at the same time, the cost can be reduced, similarly to the scaling rule in which the performance and cost increase with the miniaturization of semiconductors. From these points, the liquid crystal display panel is TFT
In the case of a mold, a TFT having a small size and sufficient driving force is required, and the TFT is also shifting from one using amorphous Si to one using polycrystalline Si. Video signals of a resolution level such as the NTSC standard used for ordinary television do not require very high-speed processing.

[0004] Therefore, not only TFTs but also peripheral drive circuits such as shift registers or decoders can be manufactured from polycrystalline Si to provide a liquid crystal display device in which the display region and the peripheral drive circuits are integrated. However, even polycrystalline Si is not as good as single-crystal Si, and is a high-definition television with a higher resolution level than the NTSC standard, XGA (eXtended Graphics Array), SX
In order to realize a display of a GA (Super eXtended Graphics Array) class, a shift register or the like must be divided and arranged in a plurality. In this case, noise called a ghost occurs in a display area corresponding to a joint of the division,
A solution to the problem is desired in this field.

On the other hand, a display device using a single crystal Si substrate having extremely high driving force has attracted attention as compared with a display device having an integral structure of polycrystalline Si. In this case, since the driving power of the transistors of the peripheral driving circuit is satisfactory, it is not necessary to perform the split driving as described above. Therefore, problems such as noise can be solved.

In either polycrystalline or single-crystal Si, the reflection type liquid crystal element is formed by connecting the drain of the TFT and the reflection electrode and sandwiching the liquid crystal between the reflection electrode and the transparent common electrode. Further, it is possible to provide a reflection type liquid crystal device in which horizontal and vertical shift registers for scanning the liquid crystal element on the same semiconductor substrate are formed.

[0007]

The present applicant has filed a Japanese Patent Application No. 7-186473 for a method of manufacturing a reflection type liquid crystal device using the above-described polycrystalline Si and single-crystal Si as a semiconductor substrate. The application includes the following objects, solutions, and embodiments.

For the purpose, when light is incident on a pixel electrode of a conventional liquid crystal pixel, the incident light is scattered in all directions due to unevenness of the surface, and the light reflection efficiency becomes very small. In the alignment film rubbing step of the mounting step, it causes poor alignment, as a result, causes poor alignment of the liquid crystal, the image quality of the displayed image is deteriorated due to the decrease in contrast, and the groove portion between each pixel electrode is not rubbed. Therefore, it causes a liquid crystal alignment defect and, at the same time, generates a horizontal electric field between the pixel electrodes in combination with the surface unevenness, which causes a bright line. Since the generation of the bright lines significantly deteriorates the contrast of the displayed image and deteriorates the image quality, the object of the present application is to solve the above-mentioned problem, eliminate irregularities on the pixel electrode surface, and cause poor alignment and irregular reflection caused by the irregularities. It is an object of the present invention to provide a liquid crystal display device capable of preventing a problem and performing high-quality display and a method of manufacturing the same.

As a means for solving the problem, the liquid crystal display device of the present application comprises an active matrix substrate in which a switching transistor is arranged for each pixel, and an active matrix type in which liquid crystal is sandwiched between opposed electrode substrates. A liquid crystal display device, wherein all pixel electrode surfaces are located on the same plane and parallel to the active matrix substrate, and at least a part of a side wall of each pixel electrode is in contact with an insulator. The present application uses chemical mechanical polishing (hereinafter, referred to as “CMP”) to form a pixel electrode surface by polishing, so that the pixel electrode surface is formed into a mirror-like and smooth surface. In addition, all pixel electrode surfaces can be formed on the same plane. Further, the pixel electrode layer is formed on the insulating layer, or the insulating layer is formed on the pixel electrode layer in which the holes are formed, and the above polishing step is performed, so that the gap between the pixel electrodes is more favorably formed by the insulating layer. It is buried and completely free of irregularities. Therefore, irregular reflection and poor orientation caused by the irregularities are prevented, and high-quality image display is possible.

Another embodiment will be described with reference to FIGS. 26 and 27. FIG. As a first embodiment, a reflection type liquid crystal display device will be described. FIG. 2 shows a manufacturing process of the active matrix substrate and a cross-sectional view of a liquid crystal element.
6, shown in FIG. Hereinafter, the present embodiment will be described in detail step by step. 26 and 27 show a pixel portion, a peripheral driver circuit such as a shift register for driving a switching transistor of the pixel portion can be formed on the same substrate at the same time as the pixel portion forming step. .

An n-type silicon semiconductor substrate 201 having an impurity concentration of 10 ¹⁵ cm ⁻³ or less is partially thermally oxidized to form a LOCOS
Then, boron is ion-implanted with a dose of about 10 ¹² cm ⁻² using the LOCOS 202 as a mask to form a p-type impurity region PWL2 having an impurity concentration of about 10 ¹⁶ cm ^−3.
03 is formed. This substrate 201 is thermally oxidized again to form a gate oxide film 20 having an oxide film thickness of 1000 Å or less.
4 is formed (FIG. 26A).

Thereafter, after forming a gate electrode 205 made of n-type polysilicon doped with phosphorus at about 10 ²⁰ cm ⁻³ , phosphorus is ion-implanted at a dose of about 10 ¹² cm ^{−2 over the} entire surface of the substrate 201 to obtain an impurity concentration of about 10 ¹² cm ^{−2. An} NLD 206, which is an n-type impurity region of about ¹⁶ cm ^-3 , is formed. Subsequently, using a patterned photoresist as a mask, phosphorus is ion-implanted at a dose of about 10 ¹⁵ cm ^-2, and an impurity concentration of 1
Source and drain regions 207 and 20 of about 0 ¹⁹ cm ^-3
7 'is formed (FIG. 26B).

Next, an interlayer film P is formed on the entire surface of the substrate 201.
SG (PhosphoSilicate Glass: oxide film doped with phosphorus) 208 was formed. This PSG 208 is NSG (No.
ndope Silicate Glass) / BPSG (Boro-Phospho-Sil)
It is also possible to substitute with icate Glass) or TEOS (Tetraetoxy-Silane). Source and drain regions 20
A contact hole is patterned in the PSG 208 immediately above 7,207 ′, and Al is deposited by sputtering, and then patterned to form an Al electrode 209 (FIG. 2).
6 (c)). In order to improve ohmic contact characteristics between the Al electrode 209 and the source / drain regions 207 and 207 ', a barrier metal such as Ti / TiN is used.
Al electrode 209 and source / drain regions 207 and 20
7 '.

A plasma SiN 210 is formed on the entire surface of the substrate 201.
About 3000 Å, followed by PSG211
Is formed into a film of about 10,000 Å (FIG. 26)
(D)).

Using the plasma SiN 210 as a dry etching stopper layer, the PSG 211 is patterned so as to leave only an isolation region between pixels, and then the through hole 212 is patterned by dry etching immediately above the Al electrode 209 in contact with the drain region 207 '. (FIG. 26E).

The sputtering or E
Pixel electrode 2 by B (Electron Beam, electron beam) deposition
13 is formed into a film of 10,000 Å or more (FIG. 2)
7 (f)). As the pixel electrode 213, Al, T
A metal film of i, Ta, W, or the like, or a compound film of these metals is used.

The surface of the pixel electrode 213 is polished by CMP (FIG. 27 (g)). Polishing amount is PSG211 thickness 10
2,000 angstrom and the thickness of the pixel electrode x angstrom, x angstrom or more, x + 100
Less than 00 angstroms.

The active matrix substrate formed by the above-described process is further provided with an alignment film 215 on its surface, subjected to an alignment treatment such as rubbing treatment on its surface, and bonded to a counter substrate via a spacer (not shown). The liquid crystal 214 is injected into the gap to form a liquid crystal element (FIG. 27).
(H)). In this embodiment, the opposing substrate is the transparent substrate 22.
0, color filter 221 and black matrix 2
22, a common electrode 223 made of ITO or the like, and an alignment film 2
15 '.

Hereinafter, a method of driving the reflection type liquid crystal element of this embodiment will be briefly described. A source region 207 is formed by a peripheral circuit such as a shift register formed on a chip on the substrate 201.
At the same time, a gate potential is applied to the gate electrode 205 to turn on the switching transistor of the pixel and supply a signal charge to the drain region 207 '. The signal charge is applied to the drain region 207 'and the PWL20.
3 is accumulated in a depletion layer capacitance of a pn junction formed between the pixel electrode 213 and the pixel electrode 213 and applies a potential to the pixel electrode 213 via the Al electrode 209. When the potential of the pixel electrode 213 reaches a desired potential, the potential applied to the gate electrode 205 is turned off, and the pixel switching transistor is turned off. Since the signal charge is stored in the pn junction capacitance section, the pixel electrode 213
Is fixed until the pixel switching transistor is driven next time. The fixed potential of the pixel electrode 213 drives the liquid crystal 214 sealed between the substrate 201 and the counter substrate 220 shown in FIG.

The active matrix substrate of this embodiment is shown in FIG.
As apparent from FIG. 7H, since the surface of the pixel electrode 213 is smooth and the insulating layer is embedded in the gap between the adjacent pixel electrodes, the alignment film 215 formed thereon is formed.
The surface is smooth and has no irregularities. Therefore, the light utilization efficiency is reduced due to scattering of the incident light, which has conventionally been caused by the unevenness,
The reduction in contrast due to rubbing failure and the generation of bright lines due to a lateral electric field due to a step between pixel electrodes are prevented, and the quality of a displayed image is improved.

However, in the liquid crystal display device of the above-mentioned application, it is not easy to completely match the pixel potentials. That is, due to various factors such as a difference in circuit constants until writing to each pixel and a process variation in a chip, a slight variation occurs even in an adjacent pixel. In particular, when a video signal is divided and applied, a small difference in the time constant of each video signal wiring affects the image quality itself, that is, a subtle difference in pixel potential causes a line to a human eye. I feel very sensitive. It is important to design the circuit so that each pixel potential has the same characteristics as much as possible, as well as on the circuit so that even if there is some variation in the potential of each pixel electrode, the image quality is not deteriorated. It is a conclusion obtained as a result of the inventor's earnest efforts that the improvement of is required.

Therefore, according to the present invention, the pixel potential can be fixed as stably as possible, the voltage applied to the liquid crystal can be precisely controlled, and even if there is some variation in the pixel potential,
It is an object of the present invention to provide a liquid crystal display device capable of obtaining good image quality.

[0023]

According to the present invention, there is provided a liquid crystal display device having a plurality of analog video inputs, wherein the semiconductor device has three analog video input lines on one side of the semiconductor device. An analog switch for transmitting an analog video signal to a desired signal line between the analog video input line and the pixel array, and a connection distance between the analog video input line and the analog switch is reduced. Are not sorted.

Further, in the liquid crystal display device, two or more analog video input lines are provided on both sides of the semiconductor device, and the order of the connection distance between the analog video input line and the analog switch is different on both sides. It is characterized by the following.

Further, in the above liquid crystal display device, in the liquid crystal display device having a plurality of analog video inputs, two or more analog video input lines are present in parallel in the semiconductor device, and a portion between the analog video input line and the pixel array is provided. Has an analog switch for transmitting an analog video signal to a desired signal line, and a connection distance between the analog video input line and the analog switch is different depending on each of the plurality of analog video input lines. The lengths of the wirings themselves are equal.

[0026]

BEST MODE FOR CARRYING OUT THE INVENTION

[First Embodiment] A first embodiment of the present invention will be described in detail with reference to FIG. FIG. 1 is an example of an explanatory diagram around a peripheral circuit portion of a liquid crystal panel used in a liquid crystal display device used in the present embodiment. In the figure, reference numeral 2 denotes a horizontal shift register. Reference numeral 8 denotes a signal line on which a liquid crystal panel itself is arranged at the top, and reference numerals 41 to 44 denote analog video input lines, which are input in four phases in the present embodiment. Reference numeral 6 denotes an analog switch for transmitting the analog video input lines 41 to 44 to the signal line 8, which is a CMOS transfer gate in the example of the present embodiment, but is not limited to this. Reference numerals 51, 52, 53, and 54 denote wirings for connecting the analog video input lines 41 to 44 and the analog switch 6, and 52 denotes analog video input lines 41, 42, and 43.
And is connected to the drain of the analog switch 6. Reference numeral 53 similarly jumps the analog video input line 41 and is connected to the drain of the analog switch. 54 is connected to the drain of the analog switch 6 by jumping the analog video input lines 41 and 42 in the same manner. On the other hand, 51 can connect to the analog switch 6 without jumping the analog video input line.

Here, in this embodiment, the analog video input line having the longest connection distance between the analog video input lines 41-44 and the analog switch 6 is the analog video input line 44, which corresponds to the wiring 52, and the smallest one. This is an analog video input line 41, which corresponds to the wiring 51.
The length of the wiring from the upper left in FIG. 1 is 1: 4: 2: 3, which is not arranged in order. In this case, since the resistance values corresponding to the connection distances are different from the sequential wirings, there is an effect that it is difficult to see the variation in the image quality. In the present embodiment, a case in which a four-phase analog video input is applied to an XGA panel is used, but the permissible writing time to one pixel is as short as about 51 ns. At this time, the signal line capacitance C of the wiring material due to the jump and the delay CR due to the resistance R use polysilicon wiring in the present embodiment, and the connection distance between the analog video input lines 41-44 and the analog switch 6 is reduced. The polysilicon resistance is R = 120 with the shortest 51 wirings
Ω, signal line capacitance C = 6.0 pF, CR = 0.7 n
s, C = 6.0 pF, R = 731Ω with the longest 52 wires of the analog video input lines 41-44 and the analog switch 6
, CR = 4.4 ns, which greatly differs from each other.

Actually, the on-resistance of the analog switch 6 is also taken into account, but the voltage written to the signal line differs depending on each signal line due to the delay and the resistance value.
Eventually, the voltages written to the respective pixels are different from each other, causing unevenness in image quality. In particular, if the voltage differences are arranged in order, the human eyes will feel sensitive and the image quality will be difficult to see. On the other hand, when the voltage differences are not arranged in order, as in the present embodiment, the sensitivity of the human eye becomes dull and the image quality is satisfactory. In FIG. 1, an analog video input line 41 is shown as an example.
The example in which the shortest and longest connection distances between −44 and the analog switch 6 are arranged is shown. Even in this case, there is a great effect on the image quality as compared with the case where they are arranged in order. There is no particular limitation. For example, the number may be divided into odd and even numbers, such as 1 → 3 → 2 → 4, etc., and even in the case of a plurality of signal lines other than the set of four signal lines, the shortest and longest connection distances must be provided first. In this way, variations can be made inconspicuous.

In this embodiment, an XGA panel has been described.
As the number of pixels increases, the requirement for the writing characteristics becomes severe, and the variation in the pixel writing potential increases. If the number of analog video input lines is increased, the writing time can be spared, but the jump distance is increased, and the variation in the pixel writing potential due to the connection distance between the analog video input line and the analog switch increases. The connection distance between the analog video input line and the analog switch affects the image display characteristics as CR (capacitance × resistance), and thus can be said to be an essential problem regardless of the voltage applied to the liquid crystal. In this embodiment, the connection between the analog video input line and the analog switch uses a Poly-Si material. This is merely an example, and it goes without saying that there is no particular problem with other polycide materials such as W and metal.
For example, for metal, AL, ALSiCu, AlGeC
It is possible to use materials such as Cr, Au, and Ag in addition to u, AlCu, and AlC. By using such a material, even when the resistance value is low and the wiring exceeds the analog video input line, the delay determined by CR becomes small, and writing to pixels can be performed stably and with little variation.

[Second Embodiment] A second embodiment of the present invention will be described in detail with reference to FIG. FIG. 2 is an example of an explanatory diagram around a peripheral circuit portion of a liquid crystal panel used in the liquid crystal display device used in the present embodiment. In the figure, 1 is a liquid crystal panel formed on a substrate, 2 is a horizontal shift register, and 3 is a vertical shift register. Reference numeral 8 denotes a general term for analog video signal lines, and reference numerals 41 to 48 denote analog video input lines. Reference numeral 6 denotes an analog switch for transmitting the analog video input line 8 to the signal line, which is a CMOS transfer gate in the example of the present embodiment, but is not limited to this. Further, 51-58 are wirings for connecting the analog video input line and the analog switch, and 51-54 are the same as those of the first embodiment.
The liquid crystal pixels driven by the upper and lower horizontal shift registers via the analog switch 6 are mutually driven vertically by one line as shown in the figure. As four pairs of this part, the connection distance between the analog video input line and the analog switch is shown from the left as 1, 4, 2, 3
And not in the correct order.

This has the effect of making it difficult to see variations in image quality. Further, in the present embodiment, 55-
The connection distance between the analog video input line and the analog switch, which is indicated by the wiring for the upper horizontal shift register indicated by 58, is 4, 2, 3, 1 in ascending order from the left, and the order is shifted by one in the up and down directions. There is a big feature in being different.
By doing so, for example, the voltages written to the pixels A, C, E, G,... In the same pixel line as shown in FIG. Even if there is a slight voltage difference applied to each of the eight pixels, the sensitivity of the human eye cannot be distinguished and becomes dull, and the image quality is satisfactory. Needless to say, the effect is further enhanced when combined with the invention of the first embodiment. In this embodiment, an XGA panel is used. However, as the number of pixels increases, the requirement for the writing characteristics becomes more severe, and the variation in the pixel writing potential increases. Therefore, the method of the present invention is effective.

FIG. 3 is an example of an explanatory diagram showing the vicinity of a peripheral circuit section of a liquid crystal panel used in the liquid crystal display device used in the present embodiment. In the figure, 101-103 are power supplies laid out between the analog video input lines 41-44. In this embodiment, the power supply lines are all reference potentials fixed to ground.
By arranging the reference potential between 1-44, the parasitic capacitance can be reduced, and there is no problem if the wiring is fixed to a certain potential without being limited to the power supply line. Further, the wiring may be the same as the wiring in which the voltage changes, or the wiring in which the voltage of the analog video input line does not change, for example, the wiring changes during the blanking period. By laying out the fixed potential wiring between the analog video input lines in this way, it is possible to prevent the voltage change of the analog video input line from being disturbed between adjacent analog video input lines, and to stabilize the analog video input line. Voltage was realized.

Accordingly, the voltage written to the pixel through the signal line is stabilized, and a liquid crystal display device exhibiting good display characteristics has been realized. Furthermore, in the present embodiment, between the analog video input line is a structure having a wiring fixed at a certain constant potential, there may be a similar wiring fixed at a certain constant potential outside the analog video input line, It is needless to say that a voltage change due to capacitive coupling from another clock can be shielded.

[Third Embodiment] A third embodiment of the present invention will be described in detail with reference to FIG. FIG. 4 is an example of an explanatory diagram around a peripheral circuit portion of a liquid crystal panel used in a liquid crystal display device using the present invention. In the present embodiment, reference numeral 1 denotes a pixel portion having a TFT (Thin Film Transistor) of a pixel switch and a liquid crystal. Reference numeral 2 denotes a horizontal shift register, and reference numeral 3 denotes a vertical shift register. 8 is a signal line, 9
Is a drive line, and 41-43 are analog video input lines. In this embodiment, analog video signals are input in three phases. 6
Is an analog switch for transmitting the analog video input lines 41-43 to the signal line 8 by an on / off signal from the horizontal shift register 2. In the example of this embodiment, a CMOS transfer gate is used, but it is needless to say that the present invention is not limited to this. No.

Reference numerals 51, 52, and 53 denote wirings for connecting the analog video input lines 41-43 and the analog switch 6, and reference numeral 52 jumps the analog video input line 41 and is connected to the drain of the analog switch 6. 53 is connected to the drain of the analog switch 6 by jumping the analog video input lines 41 and 42 in the same manner. On the other hand, 51 can connect to the analog switch 6 without jumping the analog video input line. Further, reference numeral 7 denotes an additional wiring additionally connected to 51 and 52 for the purpose of equalizing the capacity of the analog video input line. In this embodiment, three-phase analog video input X
Although this is a case where the present invention is applied to a GA panel, the allowable writing time for one pixel is as short as about 38 ns.

At this time, due to the presence of the additional wiring, the analog video input line capacitance can be designed to be almost uniform at the analog video input lines 41 and 43 at the maximum values of 75.3 pF and 75.5 pF, respectively. The display device was realized. On the other hand, when the additional wiring 7 does not exist, the analog video input line capacitances are 60.9 pF and 67.5 pF, respectively, which are about 10% different from each other. In such a situation, when writing is performed, the voltage between the pixels is different, and the display appears as image deterioration such as unevenness or streaks. In this embodiment, the XGA
As shown in the panel, as the number of pixels increases, the requirement for the writing characteristics becomes severe and the variation increases. If the number of analog video input lines is increased, the writing time can be spared, but since the jump distance is increased, the capacity difference between the respective analog video input line capacities increases.

In particular, the capacitance of an analog video input line affects the image display characteristics as CR (capacitance × resistance), and thus can be said to be an essential problem regardless of the voltage applied to the liquid crystal. Needless to say, the effect is further improved when combined with the inventions of the first and second embodiments.

FIG. 5 shows another configuration example of the present embodiment. In FIG. 5, the video input lines 41 to 43 are different from FIG.
From the analog video input lines 41-43
This is an example of a form in which the shortest and longest connection distances between the switch and the analog switch 6 are arranged, and each of the wirings up to the switch 6 is provided with an additional wiring 7 so as to have the same length as the longest wiring. Even in this case, there is a great effect on the image quality as compared with the case where the images are arranged in order. It is needless to say that the arrangement is not particularly limited in the drawing.

[Fourth Embodiment] A liquid crystal device using the analog video signal line between the analog video input line and the liquid crystal panel will be described.

Hereinafter, embodiments of the present invention will be described with reference to a plurality of liquid crystal panels, but the present invention is not limited to each embodiment. It goes without saying that the effect is increased by combining the mutual forms of technology. In addition, the structure of the liquid crystal panel is described using a semiconductor substrate, but is not necessarily limited to the semiconductor substrate.
It is needless to say that a structure described below may be formed on a normal transparent substrate, and the present invention is not limited to the reflective liquid crystal display device described in the present embodiment, but may be a transmissive liquid crystal display device. The liquid crystal panels described below are all MOS
It is an FET or TFT type, but may be a two-terminal type such as a diode type. In addition, the liquid crystal panel described below can be used as a display device for home televisions, projectors, head mounted displays, 3D video game machines, laptop computers, electronic organizers, video conferencing systems, car navigation systems, airplane panels, etc. It is valid.

FIG. 6 shows a cross section of the liquid crystal panel of the present invention. In the figure, reference numeral 301 denotes a semiconductor substrate;
2 ′ are p-type and n-type wells, 303 and 30 respectively
3 'and 303 "are source regions of the transistor, 304 is a gate region, and 305, 305' and 305" are drain regions.

As shown in FIG. 6, since the transistors in the display region are applied with a high withstand voltage of 20 to 35 V, the source and drain layers are not formed in a self-aligned manner with respect to the gate 304, and the transistor is offset. , a source region 303 therebetween ', the drain region 305' as shown in a low concentration in the p-well n ^- layer of low concentration in the n-well p ^- layer is provided. By the way, the offset amount is 0.5 to 2.0 μm
Is preferred. On the other hand, a part of the peripheral circuit is shown on the left side of FIG. 9, but in the part of the peripheral circuit, the source and drain layers are formed in self-alignment with the gate.

Here, the offset of the source and the drain has been described. However, it is effective to change not only the presence / absence of the offset but also the offset amount according to the withstand voltage and to optimize the gate length. This is because a part of the peripheral circuit is a logic circuit, and this part is generally 1.5 to 5V.
Since the system drive is sufficient, the self-aligned structure is provided to reduce the size of the transistor and improve the driving force of the transistor. This substrate 301 is made of a p-type semiconductor,
The substrate is at the lowest potential (usually the ground potential of the reference potential), and the n-type well receives a voltage applied to the pixels, that is, 20 to 35 V, in the case of the display area, while the logic portion of the peripheral circuit is A driving voltage of 1.5 to 5 V is applied. With this structure, it is possible to configure an optimum device according to each voltage, and it is possible to realize not only a reduction in chip size but also a high pixel display by improving a driving speed.

In FIG. 6, reference numeral 306 denotes a field oxide film; 310, a source electrode connected to a data line;
11 is a drain electrode connected to the pixel electrode, 312 is a pixel electrode also serving as a reflecting mirror, 307 is a light shielding layer covering a display area and a peripheral area, and is suitably made of Ti, TiN, W, Mo or the like.
As shown in FIG. 6, the light-shielding layer 307 covers the display region except for the connection portion between the pixel electrode 312 and the drain electrode 311. Except for the light-shielding layer 307, the area where the wiring capacitance is heavy is designed to cover the layer of the pixel electrode 312 when light of illumination light is mixed in and a malfunction of the circuit occurs, so that transfer is devised. . In addition, 308
Is an insulating layer below the light-shielding layer 307, and is a P-SiO layer 318.
The P-SiO layer 318 was further covered with a P-SiO layer 308 by flattening the surface with SOG to secure the stability of the insulating layer 308. In addition to the planarization by SOG, a method of forming a P-TEOS (Phospho-Tetraetoxy-Silane) film, further covering the P-SiO layer 318, and performing a CMP treatment on the insulating layer 308 to planarize may be used. Needless to say.

Reference numeral 309 denotes a reflective electrode 312 and a light shielding layer 3.
07, the insulating layer 309 is
This serves as a charge holding capacitor of the reflection electrode 312 through the gate electrode. Big
In order to form a capacitor, SiO_Two Besides, high dielectric constant PS
iN, Ta_Two O_Five , Or SiO _Two Is effective.
You. Ti, TiN, Mo, W, etc. used for the light shielding layer 307
By providing the insulating layer 309 on a flat metal,
A film thickness of about 00 to 5000 angstroms is preferable.
You.

Further, 313 is an antireflection film, 314 is a liquid crystal material, 315 is a common transparent electrode, 316 is a counter substrate,
317, 317 'are high-concentration impurity regions, 319 is a display region, and 320 is an antireflection film.

As shown in FIG. 6, high-concentration impurity layers 317 and 317 'having the same polarity as the wells 302 and 302' formed below the transistor are formed in the periphery and the contents of the wells 302 and 302 '. Even when a high-amplitude signal is applied to the source, the well potential is fixed at a desired potential in the low-resistance layer, so that stable and high-quality image display can be realized. Further, between the n-type well 302 'and the p-type well 302, the above p ⁺ -type and n ⁺ -type high-concentration impurity layers 317 and 317' are provided via a field oxide film. The need for a channel stop layer immediately below the field oxide film, which is sometimes used, is eliminated.

These p ⁺ -type and n ⁺ -type high-concentration impurity layers 31
7, 317 'can be formed simultaneously in the source and drain layer forming process, so that the number of masks and man-hours in the manufacturing process are reduced, and the cost is reduced.

Reference numeral 313 denotes an anti-reflection film provided between the common transparent electrode 315 and the counter substrate 316. The anti-reflection film is configured to reduce the interface reflectance in consideration of the refractive index of the liquid crystal at the interface. Is done. In that case, an insulating film smaller than the refractive index of the counter substrate 316 and the transmission electrode 315 is preferable.

Next, FIG. 7 shows a plan view of the present invention. In the figure, 321 is a horizontal shift register, 322 is a vertical shift register, 323 is an n-channel MOSFET,
24 is a p-channel MOSFET, 325 is a storage capacitor,
326 is a liquid crystal layer, 327 is a signal transfer switch, 328 is a reset switch, 329 is a reset pulse input terminal,
330 is a reset power supply terminal, and 331 is a video signal input terminal. The semiconductor substrate 301 is p-type in FIG. 7, but may be n-type.

The well region 302 ′ is formed on the semiconductor substrate 301.
And the opposite conductivity type. Therefore, in FIG. 7, the well region 302 is p-type. p-type well region 302
It is preferable that impurities are implanted into the n-type well region 302 ′ at a higher concentration than the semiconductor substrate 301.
The impurity concentration of the semiconductor substrate 301 is 10 ¹⁴ to 10 ¹⁵ (cm
^{In the case of -3} ), the impurity concentration of the well region 302 is 10 ¹⁵ to
10 ¹⁷ (cm ⁻³ ) is desirable.

In FIG. 6, a source electrode 310 is connected to a data line to which a display signal is sent by a drain electrode 31.
1 is connected to the pixel electrode 312. These electrodes 310,
311 includes Al, AlSi, AlSiCu, Al
GeCu, AlCu wiring is used. These electrodes 31
0, 311 and the contact surface between the semiconductor and Ti, Ti and TiN
If a via metal layer made of is used, the contact can be stably realized. Also, the contact resistance can be reduced. In addition, it is needless to say that the wiring described in the first and second embodiments does not have a drive delay between pixels. Further, the pixel electrode 312 has a flat surface,
A highly reflective material is preferable, and Al, A which is a normal metal for wiring is used.
lSi, AlSiCu, AlGeCu, AlC
It is possible to use materials such as r, Au, Ag and the like. Further, in order to improve flatness, the surfaces of the base insulating layer 309 and the pixel electrode 312 are treated by a chemical mechanical polishing (CMP) method.

The holding capacitor 325 in FIG. 7 is a capacitor for holding a signal between the pixel electrode 312 and the common transparent electrode 315. A substrate potential is applied to the well region 302. In the present embodiment, the transmission gate configuration of each row is such that the first row from the top is an n-channel MOSFET.
At T323, the lower part is the p-channel MOSFET 324, 2
In the row, the top is the p-channel MOSFET 324 and the bottom is n
In order to make the channel MOSFET 323, the order is changed between adjacent rows. As mentioned above,
Not only are the striped wells in contact with the power supply lines around the display area, but also thin power supply lines are provided in the display area to make contact.

At this time, stabilization of the well resistance is key. Therefore, in the case of a p-type substrate, a configuration is adopted in which the contact area or the number of contacts inside the display region of the n-well is increased compared to the contact of the p-well. Since the p-well has a constant potential in the p-type substrate, the substrate plays a role as a low-resistance body. Therefore, the influence of the swing due to the input and output of the signal to the source and drain of the n-well having the island shape tends to be large, but this can be prevented by increasing the contact from the upper wiring layer. As a result, stable and high-quality display can be realized.

A video signal (a video signal, a pulse-modulated digital signal, etc.) is input from a video signal input terminal 331 and opens and closes a signal transfer switch 327 in response to a pulse from the horizontal shift register 321 to connect to each data line. Output. From the vertical shift register 322, a high pulse is applied to the gate of the n-channel MOSFET 323 and a low pulse is applied to the gate of the p-channel MOSFET in the selected row.

As described above, the switch in the pixel portion is constituted by a single-crystal CMOS transmission gate, and the signal to be written to the pixel electrode is completely independent of the threshold value of the MOSFET, and the signal to the source is fully rendered. It has the advantage of being writable.

Further, since the switch is composed of a single crystal transistor, there is no unstable fluctuation at the crystal grain boundary of the polysi-TFT, and high-speed driving with high reliability without variation can be realized.

Next, the configuration of the panel peripheral circuit will be described with reference to FIG.
This will be described with reference to FIG. 8, 337 is a display area of a liquid crystal element, 332 is a level shifter circuit, 333 is a video signal sampling switch, 334 is a horizontal shift register, 335 is a video signal input terminal, and 336 is a vertical shift register.

Here, the horizontal and vertical SRs 334, 336
The scanning direction can be bi-directionally controlled by a selection switch, so that it is possible to respond to changes in the arrangement of optical systems, etc. without changing the panel.The same panel can be used for different series of products. There is an advantage that cost can be reduced.
In FIG. 8, the video signal sampling switch 333 has a one-transistor one-transistor configuration. However, the present invention is not limited to this. By using a CMOS transmission gate configuration, all input video lines are written to the signal lines. It goes without saying that you can do it. Of course, by using the circuit configuration (layout) used in the first to third embodiments for this portion, a high quality image can be obtained.

When a CMOS transmission gate is used, the area of the nMOS gate and the pMOS gate,
There is a problem that the video signal is fluctuated due to the difference in the overlap capacitance between the gate and the source / drain. This is the MOSFET of the sampling switch of each polarity
By connecting the source and drain of a MOSFET having a gate amount of about １ ／ of the gate amount to a signal line, and applying a reverse-phase pulse, the swing can be prevented, and an extremely good video signal is written to the signal line. Was. As a result, higher-quality display is possible.

Next, a method for accurately synchronizing the video signal with the sampling pulse will be described with reference to FIG. For this purpose, it is necessary to change the delay amount of the sampling pulse. 342 is an inverter for pulse delay, 343 is a switch for selecting which inverter for delay is to be selected, 344 is an output whose delay amount is controlled, 345 is a capacitor, M1 to M11 are drivers of each CMOS configuration, and outB is An out-phase output with respect to the input, out is an in-phase output, and 346 is a protection circuit.

Further, SEL1 (SEL1B) to SEL1
3 (SEL3B), it is possible to select how many inverters 342 to pass through.

Since the synchronizing circuit is built in the panel, the delay amount of the pulse from the outside of the panel is reduced.
R. G. FIG. In the case of a B3 plate panel, even if the symmetry is lost due to the jig or the like, the symmetry can be adjusted with the above selection switch, and R, G, B
A good display image with no displacement due to the high pulse phase range was obtained. Needless to say, it is also effective to incorporate a temperature measuring diode inside the panel and to correct the temperature by referring to the delay amount from a table based on the output of the diode.

Next, the relationship with the liquid crystal material will be described.
Although FIG. 6 shows a flat counter substrate structure, the common electrode substrate 316 is formed with irregularities in order to prevent interfacial reflection of the common transparent electrode 315, and the common transparent electrode 315 is formed on the surface thereof.
Is provided. On the opposite side of the common electrode substrate 316, an antireflection film 320 is provided. In order to form these concavities and convexities, a method in which sandblasting is performed using abrasive grains having a small particle size is also effective for increasing the contrast.

As a liquid crystal material, a polymer network liquid crystal PNLC was used. However, PDLC or the like may be used as the polymer network liquid crystal.
The polymer network liquid crystal PNLC is produced by a polymerization phase separation method. After making a solution with liquid crystal and polymerizable monomer or oligomer and injecting it into the cell by the usual method,
The liquid crystal and the polymer are phase-separated by UV polymerization, and the polymer is formed in a network in the liquid crystal. PNLC has many liquid crystals (7
0-90 wt%).

In PNLC, the refractive index anisotropy (Δ
When a nematic liquid crystal having a high n) is used, light scattering is not strong. When a nematic liquid crystal having a large dielectric anisotropy (Δε) is used, driving can be performed at a low voltage. The size of the polymer network, ie, the center-to-center distance of the mesh is 1 to 1.5
(Μm), the light scattering is strong enough to obtain high contrast.

Next, the relationship between the seal structure and the panel structure will be described with reference to FIG. In FIG.
351 is a seal portion, 352 is an electrode pad, and 353 is a clock buffer circuit. An amplifier unit (not shown) is used as an output amplifier at the time of panel electrical inspection.
Further, there is an Ag paste portion (not shown) for taking the potential of the counter substrate, 356 is a display portion formed of a liquid crystal element, and 357 is a peripheral circuit portion such as a horizontal / vertical shift register (H, VSR). A seal portion 351 indicates a contact area of a bonding material or an adhesive for bonding a pixel electrode 312 provided on a semiconductor substrate 301 and a glass substrate provided with a common electrode 315 around four sides of a display portion 356. , Seal part 3
After bonding at 51, liquid crystal is sealed in the display unit 356 and the shift register unit 357.

As shown in FIG. 10, in this embodiment, circuits are provided both inside and outside the seal so that the total chip size is reduced. In this embodiment, the pad drawers are concentrated on one side of the panel. However, both sides on the long side can be taken out from multiple sides instead of one side. Sometimes effective.

Further, since the panel of the present invention uses a semiconductor substrate such as a Si substrate, strong light is irradiated as in a projector, and when light is applied to the side wall of the substrate, the substrate potential fluctuates. Panel malfunction may occur. Therefore, the side wall of the panel and the peripheral circuit portion of the display area on the top surface of the panel are a substrate holder capable of shielding light, and the back surface of the Si substrate has a high thermal conductivity through an adhesive having a high thermal conductivity. It has a holder structure in which metals such as Cu are connected.

Next, a reflective electrode structure and a method of manufacturing the same, which are the points of the present invention, will be described. The completely flat reflective electrode structure of the present invention is different from the usual method of patterning and polishing a metal, in advance, the groove is etched in advance at the electrode pattern, the metal is formed there, This is a novel method of removing the metal on the region where the electrode pattern is not formed by polishing and also flattening the metal on the electrode pattern. Moreover, the width of the wiring is much wider than the region other than the wiring, and the common problem of the conventional etching apparatus causes the following problem, and the structure of the present invention cannot be manufactured.

That is, when etching is performed, a polymer is deposited during etching, and patterning cannot be performed.
Then, in the oxide film type etching (CF ₄ / CHF ₃ type), the conditions were changed (FIG. 11). At the time of the total pressure (conventional) of 1.7 torr shown in FIG.
The case where the total pressure (current time) shown in (b) is 1.0 torr is shown.

When the deposition gas CHF ₃ is exposed under the conditions shown in FIG. 11A, the polymer is surely deposited.
Although it decreases, the difference in dimensions (loading effect) between the pattern close to the resist and the pattern far from it becomes extremely large, indicating that the pattern cannot be used.

In FIG. 11B, in order to suppress the loading effect, the pressure is gradually lowered, and when the pressure becomes 1 torr or less, the loading effect is considerably suppressed and the CHF
_By setting ₃ to zero, it was found that etching using only CF ₄ was effective.

Further, there is almost no resist in the pixel electrode region, and the peripheral portion is covered with the resist.
It was found that it was difficult to form the structure, and it was found that it was effective to provide a free electrode equivalent to the pixel electrode and its shape up to the periphery of the display area.

With this structure, there is no step between the conventional display portion and the peripheral portion or the seal portion, the gap accuracy is increased, the in-plane uniform pressure is increased, and unevenness during injection is reduced. Thus, an effect that high-quality image quality can be obtained with good yield was obtained.

Next, an optical system incorporating the reflection type liquid crystal panel of the present invention will be described with reference to FIG. FIG.
, 371 is a light source such as a halogen lamp, 372 is a condensing lens for narrowing down the light source image, 373 and 375 are planar convex Fresnel lenses, 374 is a color separation optical element for separating into R, G, and B, and is a dichroic. Mirrors, diffraction gratings, etc. are effective.

A mirror 376 guides the respective lights separated into R, G, and B lights to the R, G, and B panels, and a mirror 377 illuminates the condensed beam to the reflective liquid crystal panel with parallel lights. The field lens 378 has an aperture at the position of the above-mentioned reflective liquid crystal element 379 for each of R, G and B.
Reference numeral 380 denotes a projection lens that expands by combining a plurality of lenses. 381 is a screen, which is usually
A clear, high-contrast, bright image can be obtained by using two plates, a Fresnel lens that converts projection light into parallel light, and a lenticular lens that displays a wide viewing angle vertically and horizontally. In the configuration of FIG. 12, only one color liquid crystal panel is described, but the space between the color separation optical element 374 and the squeezing portion 379 is separated into three colors, respectively, and a three-panel panel is arranged. Further, it is needless to say that not only three plates but also a single plate configuration is possible by providing a microlens array on the surface of the reflective liquid crystal device panel and irradiating different incident lights to different pixel regions. A voltage is applied to the liquid crystal layer of the liquid crystal element, and the light that has been specularly reflected at each pixel passes through the squeezing portion 379 and is projected on the screen.

On the other hand, when the voltage is not applied and the liquid crystal layer is a scatterer, the light incident on the reflection type liquid crystal element is isotropically scattered and the angle 379 in which the aperture of the aperture portion shown in FIG. No light other than the scattered light inside enters the projection lens. Thereby, black is displayed. As can be seen from the above optical system, no polarizing plate is required, and the entire surface of the pixel electrode enters the projection lens with a high reflectance of the signal light, so that a display 2-3 times brighter than in the past can be realized. As described in the above embodiment,
Anti-reflection measures were taken on the surface and interface of the counter substrate, the noise light component was extremely small, and high contrast display was realized. Also, since the panel size can be reduced,
All optical elements (lenses, mirrors etc.) have been miniaturized, and low cost and light weight have been achieved.

The color non-uniformity, luminance non-uniformity, and fluctuation of the light source can be controlled by inserting an integrator (fly-eye lens type rod type) between the light source and the optical system to thereby obtain the color non-uniformity, luminance non-uniformity on the screen. Could be solved.

A peripheral electric circuit other than the liquid crystal panel will be described with reference to FIG. In the figure, reference numeral 385 denotes a power supply, which is mainly divided into a lamp power supply and a system power supply for driving a panel and a signal processing circuit. Reference numeral 386 denotes a plug, and 387 denotes a lamp temperature detector. When there is an abnormality in the lamp temperature, the control board 388 controls the lamp to stop. This is controlled not only by the lamp but also by the 389 filter safety switch. For example, if a high-temperature lamp house box is to be opened, safety measures are taken to prevent the box from burning. Reference numeral 390 denotes a speaker, and 391 denotes an audio board. A processor for 3D sound, surround sound, or the like can be incorporated as required. Reference numeral 392 denotes an expansion board 1, which is an external device 396 for an S terminal for video signals, composite video and audio for video signals, and the like.
, A selection switch 395 for selecting which signal to select, and a tuner 394. A signal is sent to the extension board 2 via the decoder 393. On the other hand, the expansion board 2 mainly has a Dsub15 pin terminal for video from another system or a computer, and receives an A / D signal via a switch 450 for switching to a video signal from the decoder 393.
The signal is converted into a digital signal by the converter 451.

A main board 453 mainly includes a memory such as a video RAM and a CPU. The NTSC signal that has been A / D converted by the A / D converter 451 is temporarily stored in a memory and assigned to a high pixel count.
Signal processing such as interpolation of intermittent signals of empty elements that do not match the number of liquid crystal elements, and signal processing such as gamma conversion edge gradation and brightness adjustment bias adjustment suitable for liquid crystal display elements are performed. If a VGA signal is received instead of an NTSC signal, for example, a computer signal is also subjected to a resolution conversion process for a high-resolution XGA panel. The main board 453 also performs processing such as combining a computer signal with NTSC signals of a plurality of image data as well as one image data. The output of the main board 453 is subjected to serial / parallel conversion, and is supplied to the head board 454 in a form that is not easily affected by noise. The head board 454 performs parallel / serial conversion again, performs D / A conversion, and divides the data according to the number of video lines on the panel.
A signal is written to the liquid crystal panels 455, 456, and 457 of B, G, and R colors. Reference numeral 452 denotes a remote control operation panel, and a computer screen can be easily operated with the same feeling as a TV. Each of the liquid crystal panels 455, 456, and 457 has the same liquid crystal device configuration provided with a color filter of each color, and the horizontal and vertical scanning circuits applied to those described in the first to third embodiments are applied. . As described above, since each liquid crystal device processes an image that does not always have high resolution into high-quality image by processing, the display result of the present invention can display an extremely clear image.

[Fifth Embodiment] FIG. 14 is a diagram showing the configuration of an optical system of a front and rear projection type liquid crystal display device using the liquid crystal display device of the present invention. FIG. 14 shows a top view of FIG.
(A), FIG. 14 (b) showing a front view, FIG. 1 showing a side view
4 (c). In the figure, 1301 is a projection lens for projecting onto a screen, 1302 is a liquid crystal panel with a micro lens, 1303 is a polarizing beam splitter (PBS), 1340 is an R (red light) reflecting dichroic mirror, and 1341 is B / G (blue & green). Light) reflection dichroic mirror, 1342 is a B (blue light) reflection dichroic mirror, 1343 is a high reflection mirror that reflects all color light, 1350 is a Fresnel lens, 1351 is a convex lens, 1306 is a rod type integrator, 1307 is an elliptical reflector, 1308 is Metal halide, UHP
And the like.

Here, the R (red light) reflecting dichroic mirror 1340, the B / G (blue & green light) reflecting dichroic mirror 1341, and the B (blue light) reflecting dichroic mirror 1342 are each a spectral reflection as shown in FIG. Has characteristics. These dichroic mirrors, together with the high reflection mirror 1343, are arranged three-dimensionally as shown in the perspective view of FIG. On the other hand, each primary color light illuminates the liquid crystal panel 1302 from three-dimensionally different directions.

Here, a description will be given according to the progress of the light beam. First, the light beam emitted from the lamp 1308 of the light source is white light, and is condensed by the elliptical reflector 1307 at the entrance of the integrator 1306 in front of the light beam. As the reflection proceeds, the spatial intensity distribution of the light beam is made uniform. The light beam emitted from the integrator 1306 is the convex lens 1
351 and the Fresnel lens 1350 are converted into a parallel light flux in the x-axis direction (reference to the front view in FIG. 14B), and first reach the B reflection dichroic mirror 1342. The B reflection dichroic mirror 1342 reflects only the B light (blue light), and the R reflection dichroic mirror at a predetermined angle with respect to the z axis in the z-axis direction, that is, on the lower side (reference to the front view in FIG. 14B). Go to 1340.

On the other hand, the color light (R / G light) other than the B light passes through the B reflection dichroic mirror 1342 and is reflected by the high reflection mirror 1343 at right angles in the z-axis direction (downward). Head to mirror 1340. Here, both the B-reflection dichroic mirror 1342 and the high-reflection mirror 1343 transfer the luminous flux (x-axis direction) from the integrator 1306 in the z-axis direction (lower side) based on the front view of FIG. The high-reflection mirror 1343 has an inclination of exactly 45 ° with respect to the xy plane about the y-axis direction as a rotation axis. On the other hand, the B reflection dichroic mirror 1342
Is also set at an angle shallower than 45 ° with respect to the xy plane with the y-axis direction as the rotation axis.

Accordingly, while the R / G light reflected by the high reflection mirror 1343 is reflected at a right angle in the z-axis direction, the B light reflected by the B reflection dichroic mirror 1342 is reflected with respect to the z axis. It goes downward at a predetermined angle (tilt in the xz plane). Here, in order to make the illumination ranges of the B light and the R / G light coincide with each other on the liquid crystal panel 1302, the principal rays of each color light intersect on the liquid crystal panel 1302 so that the high reflection mirror 1343 and the B reflection dichroic mirror 1342 intersect. The shift amount and the tilt amount are selected.

Next, as described above, the downward direction (z-axis direction)
The R / G / B light directed to is directed to the R reflection dichroic mirror 1340 and the B / G reflection dichroic mirror 1341, which are the B reflection dichroic mirror 134.
2 and the lower side of the high reflection mirror 1343,
The G reflection dichroic mirror 1341 is disposed at an angle of 45 ° with respect to the x-z plane with the x axis as the rotation axis, and the R reflection dichroic mirror 1340 is also positioned with respect to the xz plane with the x axis direction as the rotation axis. The angle is set shallower than 45 °. Therefore, of the R / G / B light incident on these, first, the B / G light is converted to the R reflection dichroic mirror 13.
40, the B / G reflecting dichroic mirror 13
41, the beam is reflected at right angles in the y-axis + direction,
After being polarized through 3, the liquid crystal panel 1302 arranged horizontally on the xz plane is illuminated. Among them, the B light travels at a predetermined angle (tilt in the xz plane) with respect to the x-axis as described above (see FIGS. 14A and 14B), so that B / G After the reflection by the reflection dichroic mirror 1341, the liquid crystal panel 1302 is illuminated by maintaining a predetermined angle (tilt in the xy plane) with respect to the y axis and setting the angle as an incident angle (in the xy plane direction).

The G light is reflected at right angles by the B / G reflection dichroic mirror 1341, travels in the positive y-axis direction, is polarized through the PBS 1303,
That is, the liquid crystal panel 1302 is illuminated vertically. As for the R light, as described above, the R reflection dichroic mirror 1340 disposed in front of the B / G reflection dichroic mirror 1341 reflects the R light in the y-axis + direction by the R reflection dichroic mirror 1340. )
As shown in (side view), a predetermined angle (y
(−z-plane tilt), advance in the y-axis + direction, and
After being polarized through the liquid crystal panel 1302, the liquid crystal panel 1302 is illuminated with an angle with respect to the y-axis as an incident angle (y-z plane direction). Further, similarly to the above, the liquid crystal panel 1 of each color of RGB is used.
In order to make the illumination ranges on 302 the same, the shift amount and the tilt amount of the B / G reflection dichroic mirror 1341 and the R reflection dichroic mirror 1340 are selected so that the principal rays of each color light intersect on the liquid crystal panel 1302. .

Further, as shown in FIG. 15A, the cut wavelength of the B reflection dichroic mirror 1341 is 480.
15B, the cut wavelength of the B / G reflection dichroic mirror 1341 is 570 nm as shown in FIG.
As shown in FIG. 5 (c), the R reflection dichroic mirror 1
Since the cut wavelength of 340 is 600 nm, unnecessary orange light passes through the B / G reflection dichroic mirror 1341 and is discarded. Thereby, an optimal color balance can be obtained.

Then, as described later, the liquid crystal panel 1302
The RGB light is reflected and polarization-modulated by the PBS 1303.
The light flux reflected on the PBS surface 1303a of the PBS 1303 in the + x-axis direction becomes image light, and the projection lens 13
01 is enlarged and projected on a screen (not shown). By the way, each RG that illuminates the liquid crystal panel 1302
Since the B light has a different incident angle, each of the RGB light reflected from the B light has a different emission angle.
As 301, a lens having a lens diameter and an opening large enough to capture all of them is used. However, the inclination of the light beam incident on the projection lens 1301 is made parallel by each color light passing twice through the micro lens, and the inclination of the light incident on the liquid crystal panel 1302 is maintained.

However, as shown in FIG. 28, in the transmission type of the conventional example, the light beam emitted from the liquid crystal panel spreads more largely due to the condensing action of the microlens, so that projection for capturing this light beam is performed. The lens required an even larger numerical aperture and was an expensive lens. However, in this example, since the spread of the light beam from the liquid crystal panel 2 is relatively small in this manner, a sufficiently bright projection image can be obtained on a screen even with a projection lens having a smaller numerical aperture, and a less expensive projection lens can be obtained. Can be used. Although an example of a stripe type display method in which the same colors are arranged in the vertical direction shown in FIG. 29 can be used in the present embodiment, it is not preferable in the case of a liquid crystal panel using a microlens as described later. .

Next, the liquid crystal panel 13 of the present invention used here
02 will be described. FIG. 17 shows the liquid crystal panel 1302.
17 (corresponding to the yz plane in FIG. 16).
In the figure, 1321 is a microlens substrate, 1322
Is a micro lens, 1323 is a sheet glass, 1324
Denotes a transparent counter electrode, 1325 denotes a liquid crystal layer, 1326 denotes a pixel electrode, 1327 denotes an active matrix drive circuit unit,
328 is a silicon semiconductor substrate. Micro lens 1
322 is formed on the surface of a glass substrate (alkali glass) 1321 by a so-called ion exchange method,
A two-dimensional array structure is formed at a pitch twice the pitch of the pixel electrodes 1326.

The liquid crystal layer 1325 employs a so-called ECB mode nematic liquid crystal such as DAP or HAN adapted to the reflection type, and a predetermined alignment is maintained by an alignment layer (not shown). The voltage value is lower than that of the fourth embodiment,
Since the accuracy of the potential of the pixel electrode 1326 becomes more important, the circuit and configuration of the present invention are effective, and the number of pixels in a single plate and the number of video lines are large. The configuration of the embodiment is very effective. Pixel electrode 1
326 is made of Al and doubles as a reflecting mirror, and is subjected to a so-called CMP process in the final step after patterning in order to improve the surface properties and improve the reflectance (details will be described later).

Active matrix drive circuit section 132
Reference numeral 7 denotes a semiconductor circuit provided on a so-called silicon semiconductor substrate 1328 for driving the pixel electrode 1326 in an active matrix. A gate line driver (not shown) (not shown) is provided around the circuit matrix. And signal line driver (horizontal register etc.)
Is provided (details will be described later). These peripheral drivers and active matrix drive circuits are R
Each of the pixel electrodes 1326 does not have a color filter, but each of the RGB primary color video signals is written into the predetermined RGB pixel by the primary color video signal written by the active matrix driving circuit.
The pixels are distinguished as GB pixels, and form a predetermined RGB pixel array described later.

Here, looking at the G light illuminating the liquid crystal panel 1302, the G light is P
The liquid crystal panel 13 after being polarized by the BS 1303
02 perpendicularly. An arrow G (in / out) in the drawing shows an example of a ray incident on one micro lens 1322a. As shown in the figure, the G light beam is collected by the micro lens 1322, and illuminates the G pixel electrode 1326g. Then, the light is reflected by the pixel electrode 1326g made of Al, and is emitted to the outside of the panel again through the same micro lens 1322a. When the G light (polarized light) reciprocates through the liquid crystal layer 1325 in this manner, the G light (polarized light) is modulated by the operation of the liquid crystal due to the electric field formed between the pixel electrode 1326g and the counter electrode 1324 by a signal voltage applied to the pixel electrode 1326g. Exit the liquid crystal panel,
It returns to PBS1303.

Here, the PBS surface 1 depends on the degree of modulation.
The amount of light reflected at 303a and traveling toward the projection lens 1301 changes, and so-called gray-scale gradation display of each pixel is performed. On the other hand, as described above, the cross section (yz
With respect to the R light incident from an oblique direction in the plane, the R light incident on the microlens 1322b after being polarized by the PBS 1303 is also expressed as follows.
As indicated by an arrow R (in) in the drawing, the light is condensed by the microlens 1322b and illuminates the R pixel electrode 1326r at a position shifted to the left from immediately below. Then, the reflected light is reflected by the pixel electrode 1326r, and as shown in FIG.
The light exits the panel through 22a (R (ou)
t)).

At this time, the R light (polarized light) is also applied to the opposite electrode 13 by the signal voltage applied to the pixel electrode 1326r.
The liquid crystal panel is modulated by the operation of the liquid crystal by an electric field corresponding to an image signal formed between the liquid crystal panel 24 and the liquid crystal panel, and is emitted from the liquid crystal panel.
It returns to PBS1303. In the subsequent process, the image light is projected from the projection lens 1301 in exactly the same manner as in the case of the G light described above. By the way, in the description of FIG. 17, the color lights of the G light and the R light on the pixel electrode 1326g and the pixel electrode 1326r partially overlap each other and interfere with each other. Is actually exaggerated, and the thickness of the liquid crystal layer is actually 1 to 5 μm.
This is very thin compared to 50-100 μm of the sheet glass 1323, and such interference does not occur regardless of the pixel size.

Next, FIG. 18 is a diagram for explaining the principle of color separation / color synthesis in this embodiment. Here, FIG. 18A is a schematic top view of the liquid crystal panel 1302, and FIGS. 18B and 18C are AA ′ (x
3 is a schematic cross-sectional view of FIG. Here, the micro lens 1322 is formed as shown in FIG.
As shown by the one-dot chain line, one for each half of two adjacent two-color pixels centering on the G light. Among them, FIG. 18C corresponds to FIG. 17 showing the yz cross section, and shows how the G light and the R light incident on each microlens 1322 enter and exit. As can be seen from this, each G pixel electrode is disposed directly below the center of each microlens, and each R pixel electrode is disposed directly below the boundary between microlenses. Therefore, the angle of incidence of the R light is
is preferably set to be equal to the ratio of the pixel pitch (B & R pixel) to the distance between the microlens and the pixel electrode.

On the other hand, FIG.
2 corresponds to the xy section. In this xy section, the B pixel electrode and the G pixel electrode are shown in FIG.
Similarly, each G pixel electrode is disposed immediately below the center of each microlens, and each B pixel electrode is disposed immediately below the boundary between the microlenses.

As described above, the B light illuminating the liquid crystal panel is incident on the oblique direction of the cross section (xy plane) in the drawing after being polarized by the PBS 1303 as described above. Similarly, each micro lens 13
B light incident from the microlens 22 is reflected by the B pixel electrode 1326b as shown in FIG.
322, the microlenses 13 adjacent in the x direction
Emitted from 22. Regarding the modulation by the liquid crystal on the B pixel electrode 1326b and the projection of the B emission light from the liquid crystal panel,
This is the same as the above-mentioned G light and R light.

Each B pixel electrode 1326b is disposed immediately below the boundary between microlenses, and the incident angle of B light to the liquid crystal panel is the same as that of R light.
It is preferable to set nθ to be equal to the ratio between the pixel pitch (G & B pixel) and the distance between the microlens and the pixel electrode. By the way, in the liquid crystal panel of this example, as described above, the arrangement of each RGB pixel is RGRGRG in the z direction.
18B are arranged in the x-direction, and FIG. 18A shows a planar arrangement thereof. As described above, each pixel size is about half of the microlens in both the vertical and horizontal directions, and the pixel pitch is half of that of the microlens in both the x and z directions. Also,
The G pixel is also located directly below the center of the microlens in plan view, the R pixel is located between the G pixels in the z direction and at the microlens boundary, and the B pixel is located between the G pixels in the x direction and at the microlens boundary. I have. Further, the shape of one microlens unit is rectangular (double the size of a pixel).

FIG. 19 is a partially enlarged top view of the present liquid crystal panel. Here, a broken-line grid 1329 in the figure indicates a group of RGB pixels constituting one picture element. That is, when each RGB pixel is driven by the active matrix driving circuit unit 1327 in FIG. 17, the RGB pixel unit indicated by the broken-line grid 1329 corresponds to the R pixel corresponding to the same pixel position.
It is driven by a GB video signal. Here, the R pixel electrode 132
Focusing on one pixel composed of 6r, G pixel electrode 1326g, and B pixel electrode 1326b, first, R pixel electrode 1
326r is the micro lens 1 as indicated by the arrow r1.
As described above, the illumination light is illuminated with the R light obliquely incident from 322b, and the R reflected light is emitted through the microlens 1322a as indicated by an arrow r-2. B pixel electrode 132
6b denotes a micro lens 132 as indicated by an arrow b1.
As described above, the illumination light is illuminated with the B light obliquely incident from 2c, and the B reflected light is also emitted through the micro lens 1322a as shown by the arrow b2. Further, the G pixel electrode 1326g is illuminated with the G light incident vertically (in the direction toward the back of the paper) from the micro lens 1322a as described above, as indicated by the front rear arrow g12, and the G reflected light is the same micro lens 1322a. Vertically (in the direction coming out of the page).

As described above, in the present liquid crystal panel, 1
Regarding the RGB pixel units constituting one picture element, although the incident illumination position of each primary color illumination light is different, their emission is the same micro lens (1322 in this case).
a). This is also true for all other picture elements (RGB pixel units).

Therefore, as shown in FIG. 20, all the emitted light from the liquid crystal panel is transmitted to the PBS 1303 and the projection lens 13.
When the image is projected onto the screen 1309 through the optical system 01 and optically adjusted so that the position of the micro lens in the liquid crystal panel 1302 is image-formed and projected on the screen 1309, the projected image is placed in the micro lens lattice shown in FIG. The pixel is a state in which light emitted from the RGB pixel units constituting each picture element is mixed, that is, the picture element in the same pixel mixed state is used as a constituent unit. Then, FIG.
9 does not have a so-called RGB mosaic as in the conventional example of FIG.

Active matrix drive circuit section 132
Since each pixel 7 exists below each pixel electrode 1326, the RGB pixels constituting the picture element are simply drawn side by side on the circuit sectional view of FIG. 17, but the drain of each pixel FET is
It is connected to each RGB pixel electrode 1326 in a two-dimensional array as shown in FIG.

FIG. 21 is an overall block diagram of a drive circuit system of the projection type liquid crystal display device. Here, reference numeral 1310 denotes a panel driver which inverts the polarity of an RGB video signal and forms a liquid crystal drive signal obtained by a predetermined voltage amplification.
Various timing signals are formed. An interface 1312 decodes various video and control transmission signals into standard video signals and the like. Reference numeral 1311 denotes a decoder which decodes and converts a standard video signal from the interface 1312 into an RGB primary color video signal and a synchronization signal, that is, an image signal corresponding to the liquid crystal panel 1302. Reference numeral 1314 denotes a ballast lighting circuit that drives and lights an arc lamp 1308 in the elliptical reflector 1307. A power supply circuit 1315 supplies power to each circuit block. Reference numeral 1313 denotes a controller including an operation unit (not shown), which comprehensively controls the respective circuit blocks. As described above, in the projection type liquid crystal display device, the drive circuit system is very common as a single-panel type projector, and the above-described R
It is possible to display a color image with good texture without GB mosaic.

FIG. 23 is a partially enlarged top view of another embodiment of the liquid crystal panel of this embodiment. Here, one of the micro lenses 1322 is arranged corresponding to three of the pixels R, G, and B. Also, the micro lens 132
The B pixel electrodes 1326b are arranged just below the center of 2, and the G pixels 1326g are arranged alternately in the horizontal direction, and the R pixels 1326r are arranged alternately in the vertical direction. Even if arranged in this manner, R
By making the B light vertically incident and the R / G light obliquely incident (same angle and different directions) so that the reflected light from the GB pixel unit is emitted from one common microlens, the same effect as in the previous example can be obtained. Obtainable. Further, an R pixel is arranged just below the center of the micro lens 1322, and other color pixels are arranged in the left and right or up and down directions with respect to the R pixel by G,
B pixels may be alternately arranged.

[Sixth Embodiment] FIG. 24 shows a sixth embodiment of the liquid crystal panel according to the present invention. This figure is a partially enlarged sectional view of the present liquid crystal panel 1320. The difference from the fifth embodiment is as follows. First, a sheet glass 1323 is used as an opposite glass substrate, and the micro lens 1
220 is formed on a sheet glass 1323 by a so-called reflow method using a thermoplastic resin.
Further, spacer columns 1251 are formed in non-pixel portions by photolithography of a photosensitive resin. A partial top view of the liquid crystal panel 1320 is shown in FIG.

As can be seen from FIGS. 24 and 25, the spacer pillars 1251 are formed in the non-pixel area at the corners of the microlenses 1220 at a predetermined pixel pitch. FIG. 25 is a sectional view taken along the line AA ′ passing through the spacer pillar 1251.
(B). The formation density of the spacer pillars 1251 is preferably provided in a matrix at a pitch of 10 to 100 pixels, so that both the flatness of the sheet glass 1323 and the liquid crystal injection property, which are inconsistent with the number of spacer pillars, are satisfied. Must be set. In the present embodiment, the light-shielding layer 1221 formed of a metal film pattern is used.
Is provided to prevent leakage light from entering the boundary between the microlenses. As a result, a decrease in the saturation of the projected image (due to the mixing of the primary color image light) and a decrease in the contrast due to the leak light are prevented. Therefore, by using the present liquid crystal panel 1320 to configure a projection display device including the liquid crystal panel as in the present embodiment, it is possible to obtain sharper and better image quality.

Although the liquid crystal panel and the projection display device have been described in the fourth to sixth embodiments, the drive wiring of the liquid crystal pixel shown in the first to third embodiments will be described.
Accurate images and high-quality images can be obtained by matching the wiring lengths and wiring capacities from a plurality of signal lines, for example, input analog signal lines for each color of R, G, and B to horizontal and vertical shift registers to each pixel. What can be obtained is easily configurable.

[0111]

As described above, according to the present invention, in a liquid crystal display device having a plurality of analog video inputs,
The semiconductor device has three or more analog video input lines on one side of the semiconductor device, and an analog switch for transmitting an analog video signal to a desired signal line is provided between the analog video input line and the pixel array. A liquid crystal display device that can obtain a high quality image even if there is a slight variation in pixel potential by improperly setting the order of the connection distance between the analog video input line and the analog switch. Could be provided.

When two or more analog video input lines are provided on both sides of the semiconductor device, furthermore, the order of magnitude of the connection distance between the analog video input lines and the analog switches is different on both sides. Thus, a liquid crystal display device capable of obtaining good image quality even when the liquid crystal display device has variations can be provided. Also, even if the connection distance between the analog video input line and the analog switch is different depending on each of the plurality of analog video input lines, by equalizing the length of the wiring itself, the pixel potential is fixed stably, A liquid crystal display device capable of precisely controlling the voltage applied to the liquid crystal and obtaining higher quality image by the above combination can be provided.

Further, in the projection type liquid crystal display device according to the present invention, one picture element is constituted by using a reflection type liquid crystal panel with microlenses and an optical system for illuminating each primary color light from different directions. Since the reflected light after modulation by the liquid crystal from the set of R, G, and B pixels is emitted through the same microlens, a high-quality and good color image projection display without RGB mosaic can be realized.

Further, since the luminous flux from each pixel passes through the microlens twice and is almost parallelized, a bright projected image can be obtained on the screen even if an inexpensive projection lens having a small numerical aperture is used. Become.

[Brief description of the drawings]

FIG. 1 is a schematic circuit diagram illustrating a first embodiment of the present invention.

FIG. 2 is a schematic circuit diagram illustrating a second embodiment of the present invention.

FIG. 3 is a schematic circuit diagram used in a second embodiment of the present invention.

FIG. 4 is a schematic circuit diagram illustrating a third embodiment of the present invention.

FIG. 5 is a schematic circuit diagram illustrating a third embodiment of the present invention.

FIG. 6 is a cross-sectional view of a liquid crystal device manufactured by CMP according to the present invention.

FIG. 7 is a schematic circuit diagram of a liquid crystal device according to the present invention.

FIG. 8 is a block diagram of a liquid crystal device according to the present invention.

FIG. 9 is a circuit diagram including a delay circuit of an input unit of the liquid crystal device according to the present invention.

FIG. 10 is a conceptual diagram of a liquid crystal panel of a liquid crystal device according to the present invention.

FIG. 11 is a graph for judging pass / fail of an etching process in manufacturing a liquid crystal device according to the present invention.

FIG. 12 is a conceptual diagram of a liquid crystal projector using the liquid crystal device according to the present invention.

FIG. 13 is a circuit block diagram showing the inside of the liquid crystal projector according to the present invention.

FIG. 14 is an overall configuration diagram showing an embodiment of an optical system of a projection type liquid crystal display device according to the present invention.

FIG. 15 is a diagram illustrating the spectral reflection characteristics of a dichroic mirror used in the optical system of the projection type liquid crystal display device according to the present invention.

FIG. 16 is a perspective view of a color separation illumination unit of the optical system of the projection type liquid crystal display device according to the present invention.

FIG. 17 is a sectional view of one embodiment of a liquid crystal panel according to the present invention.

FIG. 18 is a diagram illustrating the principle of color separation and color synthesis of a liquid crystal panel according to the present invention.

FIG. 19 is a partially enlarged top view of the liquid crystal panel of one embodiment of the present invention.

FIG. 20 is a partial configuration diagram showing a projection optical system of a projection type liquid crystal display device according to the present invention.

FIG. 21 is a block diagram showing a driving circuit system of the projection type liquid crystal display device according to the present invention.

FIG. 22 is a partially enlarged view of a projected image on a screen of the projection type liquid crystal display device according to the present invention.

FIG. 23 is a partially enlarged top view of a liquid crystal panel of one embodiment according to the present invention.

FIG. 24 is a partially enlarged top view of the liquid crystal panel of one embodiment according to the present invention.

FIG. 25 is a partially enlarged top view and a sectional view of a liquid crystal panel of one embodiment according to the present invention.

FIG. 26 is a sectional view in a manufacturing process of the liquid crystal panel of the liquid crystal device.

FIG. 27 is a cross-sectional view illustrating a manufacturing step of the liquid crystal panel of the liquid crystal device.

FIG. 28 is a partially enlarged sectional view of a transmission type liquid crystal panel with microlenses.

FIG. 29 is a partially enlarged view of a projected image on a screen of a projection type liquid crystal display device using a transmission type liquid crystal panel with a micro lens.

[Explanation of symbols]

 Reference Signs List 1 pixel area 2 horizontal shift register 3 vertical shift register 41 to 48 analog video input line 6 analog switch 7 additional wiring 8 signal line 51 to 54 wiring 101 to 103 power supply 301 semiconductor substrate 302, 302 'p-type and n-type well 303, 303 'source region 304 gate region 305, 305' drain region 306 LOCOS insulating layer 307 light shielding layer 308 PSG 309 plasma SiN 310 source electrode 311 connecting electrode 312 reflective electrode & pixel electrode 313 anti-reflective film 314 liquid crystal layer 315 common transparent electrode 316 facing Electrodes 317, 317 'High-concentration impurity region 319 Display region 320 Antireflection film 321, 322 Shift register 323 nMOS 324 pMOS 325 Storage capacitor 327 Signal transfer switch 328 Reset switch H 329 Reset pulse input terminal 330 Reset power supply terminal 331 Video signal input terminal 332 Boost level shifter 342 Inverter for pulse delay 343 Switch 344 Output 345 Capacity 346 Protection circuit 351 Seal section 352 Electrode pad 353 Clock buffer 371 Light source 372 Light collecting lens 373 375 Fresnel lens 374 Color separation optical element 376 Mirror 377 Field lens 378 Liquid crystal device 379 Aperture section 380 Projection lens 381 Screen 385 Power supply 386 Plug 387 Lamp temperature detection 388 Control board 389 Filter safety switch 453 Main board 454 Liquid crystal panel drive head board 455 456,457 Liquid crystal device 1220 Micro lens (reflow heat sag type) 1251 Spacer pillar 1252 Peripheral seal 1301 Projection lens 1302 Liquid crystal panel with micro lens 1303 Polarized beam splitter (PBS) 1306 Rod integrator 1307 Elliptical reflector 1308 Arc lamp 1309 Screen 1310 Panel driver 1311 Decoder 1312 Interface circuit 1314 Ballast (Arch lamp lighting circuit) 1320 Micro Liquid crystal panel with lens 1321 Micro lens glass substrate 1322 Micro lens (index distribution type) 1323 Sheet glass 1324 Opposite transparent electrode 1325 Liquid crystal 1326 Pixel electrode 1327 Active matrix drive circuit section 1328 Silicon semiconductor substrate 1329 Basic picture element unit 1340 R reflection dichroic mirror 1341 B / G reflection die Roikkumira 1342 B reflecting dichroic mirror 1343 high reflection mirror 1350 Fresnel lens (second condenser lens) 1351 first condenser lens

Claims (13)

[Claims] 1. A matrix substrate for dividing an analog video signal into a plurality of signals and applying the divided signals to a liquid crystal panel, wherein a pixel electrode for driving a liquid crystal pixel and an analog video input line are provided on one side of a liquid crystal pixel array area in the liquid crystal panel. And an analog switch for transmitting the analog video signal to a desired signal line between the analog video input line and the liquid crystal pixel array, and the analog video input line and the analog switch A matrix substrate, wherein the magnitudes of the connection distances are not sorted. 2. An analog video input line having two or more analog video input lines on both sides of a liquid crystal pixel array area, an analog switch provided between the analog video input line and the liquid crystal pixel array area, A matrix substrate, wherein the order of magnitude of the connection distance to the switch is different on both sides. 3. The matrix substrate according to claim 1, further comprising a wiring for additional capacitance connected to the analog video input line and the analog switch. 4. A liquid crystal display device in which an analog video signal is divided into a plurality of lines and applied to a liquid crystal panel, wherein the liquid crystal panel has three or more analog video input lines on one side of a liquid crystal pixel array area; An analog switch for transmitting the analog video signal to a desired signal line is provided between an analog video input line and the liquid crystal pixel array, and a magnitude of a connection distance between the analog video input line and the analog switch is sorted. A liquid crystal display device characterized by not being performed. 5. A liquid crystal display device in which an analog video signal is divided into a plurality of lines and applied to a liquid crystal panel, wherein two or more analog video input lines are provided on both sides of a liquid crystal pixel array area. An analog switch is provided between liquid crystal pixel array regions, and the order of magnitude of the connection distance between the analog video input line and the analog switch is different on both sides. 6. The liquid crystal display device according to claim 4, further comprising a wiring for additional capacitance at a connection between said analog video input line and said analog switch. 7. The liquid crystal display device according to claim 4, wherein a reference potential line is arranged between said plurality of analog video input lines. 8. A liquid crystal display device for dividing an analog video signal into a plurality of lines and applying the analog video signal to a liquid crystal panel, wherein two or more analog video input lines for transmitting the analog video signal are present in parallel in the liquid crystal panel. An analog switch for transmitting the analog video signal to a desired signal line is provided between the analog video input line and the liquid crystal pixel array, and a connection distance between the analog video input line and the analog switch is plural. A liquid crystal display device characterized in that the length of the connection wiring itself is equal to that of the analog video input line. 9. The liquid crystal display device according to claim 4, wherein the liquid crystal panel includes a semiconductor substrate, an active matrix driving circuit, a pixel electrode, a liquid crystal layer, and a counter transparent electrode. , A liquid crystal display device having a structure in which a sheet glass and a microlens are sequentially laminated. 10. The liquid crystal display device according to claim 9, wherein one element of the microlens is three elements of the pixel electrode.
A liquid crystal display device having one for each. 11. The liquid crystal display device according to claim 9, wherein the microlens is formed by molding a microlens glass substrate. 12. A projection type liquid crystal display device using the liquid crystal display device according to claim 4. Description: 13. The projection type liquid crystal display device according to claim 12, wherein the liquid crystal panel has at least one liquid crystal panel for three colors, and separates blue light with a high reflection mirror and a blue reflection dichroic mirror. Further, a projection type liquid crystal display device is characterized in that red and green are separated by a red reflecting dichroic mirror and a green / blue reflecting dichroic mirror and each liquid crystal panel is projected.