JPH11116208A - Electric discharge type ozonizer - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an improved efficient electric discharge type ozonizer by passing the whole quantity of a gaseous starting material through a high discharge density discharge field (creeping discharge field D1 corresponding position) and at the same time, sweeping heat energy generated in a position where a gas flow is particularly easily heat-generated, and cooling. SOLUTION: In the electric discharge type ozonizer constituted so as to laminate a discharge electrode 2 on one surface of a dielectric 1 and a counter electrode 3 on another surface and to apply high potential pulse voltage between the discharge electrode 2 and the counter electrode 3, gaseous starting material flow-in grooves 21, which run from one end side to another end side, but do not reach another end, and ozone flow-out grooves 22, which run from another end to one end, but do not reach one end, are adjacently provided in parallel on the contact surface of the discharge electrode 2 with the dielectric 1. A mountain part positioned between each gaseous starting material flow-in groove 21 and each ozone flow-out groove 22 is formed so as to gradually decrease the width to sharpen the top and to provide a clearance to have a gas flow passing gap between the dielectric 1 and the mountain part.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a discharge type ozonizer for converting oxygen or air in a source gas into ozone by passing the source gas through a discharge field using oxygen or air as a source gas.

Conventionally, as a discharge type ozonizer, a corona discharge type shown in FIG. 9 is known as the most typical one. The corona discharge type ozonizer according to the illustrated embodiment has a discharge electrode 2 having a diameter having a predetermined gap with the inner peripheral surface of the dielectric 1a in a dielectric 1a formed of a glass cylinder.
a, and a counter electrode 3 is superimposed on the outer peripheral surface of the dielectric 1a, and a high-voltage pulse voltage is applied between the discharge electrode 2a and the counter electrode 3 by the power supply device 4, and
Corona discharge is generated in the gap between the inner peripheral surface of the discharge electrode 2a and the discharge electrode 2a, and the raw material gas flows through the discharge field in the gap as shown by the arrow.

However, in the above-mentioned corona discharge type ozonizer, the dielectric 1a is thick and the gap between the inner peripheral surface of the dielectric 1a and the discharge electrode 2a is set wide (usually 2-3 mm). There is a problem that a very high voltage is required to generate discharge, and a large power supply device 4 is required.

In view of the above, as a conventional discharge-type ozonizer for a small capacity, a creeping discharge-type ozonizer in which the distance between a discharge electrode and a counter electrode is minimized to generate a high-density discharge field even at a relatively low voltage has been proposed. I have. This creeping discharge type ozonizer embeds a counter electrode 3 in a dielectric 1 made of ceramic as shown in FIG.
May be overlapped on the lower surface side of the dielectric 1 in the figure. )
Then, the discharge electrodes 2b are laminated in a predetermined pattern (pattern) on the surface (the upper surface in the figure) of the dielectric 1 by a conventionally known means such as printing.

When a high-voltage pulse voltage is applied between the discharge electrode 2b and the counter electrode 3 by the power supply 4, a creeping discharge is generated on the surface of the dielectric 1 on which the discharge electrode 2b is laminated, and the creeping discharge is generated. The oxygen in the source gas is ozonized by bringing the source gas into contact with the source gas.

The surface discharge type ozonizer has a high discharge efficiency, in other words, a high discharge density with the same electric energy. Therefore, it can be estimated that the ozone generation efficiency increases accordingly. However, in actuality, since this creeping discharge occurs extremely thinly, it is difficult to efficiently contact the creeping discharge field and the raw material gas, and the efficiency of ozone generation has not been improved. There is a problem that.

Therefore, the present inventor has previously proposed a new mixed discharge type ozonizer shown in FIG. 11 and FIG. 12 which is formed by mixing a creeping discharge field and a corona discharge field. In this mixed discharge type ozonizer, it is almost the same as a creeping discharge type that a discharge electrode 2 is superimposed on one surface of a dielectric 1 and a counter electrode 3 is superimposed on the other surface, but a contact surface of the discharge electrode 2 with the dielectric 1 is formed. Are provided with grooves 24, 24, 24,...

Although it is a matter of course that a high-voltage pulse voltage is applied between the discharge electrode 2 and the counter electrode 3 by the power supply 4, the raw material gas is applied to the grooves 24, 2 of the discharge electrode 2.
4, 24... Flows in the direction of the arrow in FIG.

The mixed discharge type ozonizer is shown in FIG.
As shown in FIG. 7, since the top of the ridge of the discharge electrode 2 is in contact with the dielectric material 1, a creeping discharge field D1 is generated in the vicinity thereof, and the electrode gap gradually increases toward the valley. D2 will occur. However, it has been confirmed that the generation of the creeping discharge field D1 is a kind of trigger, and the corona discharge field D2 is induced at a lower voltage than in the past and stably continues. The discharge is more efficient than the conventional corona discharge method. By using a corona discharge field rather than a conventional creepage discharge type, the frequency of contact with the discharge field of the raw material gas is improved. We succeeded in increasing ozone generation efficiency.

[0010] However, further research on the mixed discharge type ozonizer showed that, at the beginning of energization, the ozone generation efficiency was instantaneously high, but the ozone generation efficiency decreased after energization, and the ozone generation in one groove 24 was reduced. When the amount of generated ozone was continuously measured, a phenomenon that the amount of generated ozone fluctuated was confirmed. That is, these phenomena are considered to indicate that there is still room for improvement.

Therefore, the inventors of the present invention have conducted intensive studies on further increasing the efficiency of ozone generation. As a result, the surface discharge field D1 of the conventional mixed discharge ozonizer has a higher discharge density than the corona discharge field D2. The problem is that the high ozone generation efficiency at the beginning of energization cannot be maintained, and most of the raw material gas has a corona discharge field D2 having a relatively low discharge density.
There is also a case where the gas passes through only the inside and does not contact the creeping discharge field D1. For some reason, if there is a turbulence in the gas flow of the raw material gas that normally travels as indicated by the arrow in FIG. It has been found that there is a problem that the ozone generation amount fluctuates and the discharge field cannot be used effectively.

[0012]

In view of the above, the present invention has been made in view of the above, and the entire amount of the raw material gas passes through a discharge field having a high discharge density (the portion corresponding to the creeping discharge field D1). It is an object of the present invention to provide a more efficient discharge type ozonizer by sweeping and cooling heat energy generated in a part which is easy to perform.

[0013]

In order to achieve the above-mentioned object, the present invention is directed to a method of superposing a discharge electrode 2 on one surface of a dielectric 1 and a counter electrode 3 on the other surface. In the discharge type ozonizer adapted to apply a high-voltage pulse voltage to the discharge gas, a contact surface of the discharge electrode 2 with the dielectric 1 is connected to the material gas inflow groove 21 extending from one end to the other end and not reaching the other end. An ozone outflow groove 22 that does not reach one end from the other end side to one end side is provided close to and in parallel with each other, and a crest portion 23 located between the raw material gas inflow groove 21 and the ozone outflow groove 22 is A technical measure characterized by providing a clearance 23c for sequentially narrowing the top so as to sharpen the top and providing a gas flow gap between the dielectric 1 and the dielectric 1 is adopted.

Therefore, the discharge type ozonizer of the present invention has a clearance 23c between the top of the peak 23 located between the raw material gas inflow groove 21 and the ozone outflow groove 22 and the dielectric 1.
As shown in FIG. 12, a part of the discharge electrode 2 does not always contact the dielectric 1, as shown in FIG. 12, but if the clearance 23c is small, the top of the peak 23 is A high-density discharge field equivalent to the creeping discharge field D1 is generated, and a corona discharge field D2 is generated between the bottom of the peak 23 and the dielectric 1.

According to the present invention, the raw material gas flowing into the raw material gas inflow groove 21 is closed as shown by an arrow in FIG. 2 since the front end side of the raw material gas inflow groove 21 is closed. It passes over the clearance 23c over the mountain 23 located between the inflow groove 21 and the ozone outflow groove 22,
It has the effect of flowing out from the ozone outflow groove 22.

The total amount of the raw material gas is equal to the clearance 2
3c, a creeping discharge field D1 having a high discharge density
The action of causing the raw material gas to flow through the inside and the action of surely cooling a portion near the clearance 23c having a large calorific value are derived.

Next, a second aspect of the present invention relates to a dielectric
A discharge electrode 2 on one side and a counter electrode 3 on the other side, and a high-voltage pulse voltage is applied between the discharge electrode 2 and the counter electrode 3. A source gas inflow groove 21 extending from one end side to the other end side and not reaching the other end is provided on a contact surface with one, and is provided in parallel close to the source gas inflow groove 21 from the other end side to one end side. An ozone outflow groove 22 that does not reach one end is formed, and a peak 23 located between the raw material gas inflow groove 21 and the ozone outflow groove 22 is sequentially reduced in width so as to sharpen the top, and has a dielectric constant. A technical means is provided in which a plurality of gas channels 20 provided with a clearance 23c for providing a gas flow gap between the body 1 and the body 1 are provided in parallel.

Therefore, the discharge-type ozonizer of the present invention has a function of generating a large volume of ozone with a compact device by providing a plurality of gas flow paths 20 in parallel in addition to the above-described function. It is.

Next, a third aspect of the present invention relates to a dielectric
A discharge electrode 2 on one side and a counter electrode 3 on the other side, and a high-voltage pulse voltage is applied between the discharge electrode 2 and the counter electrode 3. The raw material gas inflow groove 21 that does not reach the other end from one end to the other end and the ozone outflow groove 22 that does not reach one end from the other end to the one end are alternately close to the contact surface with 1. The peaks 23 located between the raw material gas inflow grooves 21 and the ozone outflow grooves 22 are sequentially reduced in width so as to sharpen the tops thereof, and the dielectric material 1
And a clearance 23c for providing a gas flow gap between them is provided, and the sectional area of each clearance 23c is set smaller than the sectional area of each raw material gas inflow groove 21. is there.

Therefore, according to the present invention, since the raw material gas inflow grooves 21 and the ozone outflow grooves 22 are alternately arranged, the present invention has the effect of being more compact.

Since the cross-sectional area of each clearance 23c is set smaller than the cross-sectional area of each raw material gas inflow groove 21, when the raw material gas is pumped into the raw material gas inflow groove 21, the clearance 23c becomes a kind of orifice, This has the effect of keeping the inside of the inflow groove 21 at a high-pressure atmosphere and the inside of the ozone outflow groove 22 at a low-pressure atmosphere. The differential pressure between the high-pressure atmosphere and the low-pressure atmosphere provides an effect that the source gas flows uniformly through each part of the clearance 23c.

[0023]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the figure, 1 is a dielectric,
The discharge electrode 2 is provided on one surface of the dielectric 1 and the counter electrode 3 is provided on the other surface.
And a high-voltage pulse voltage is applied between the discharge electrode 2 and the counter electrode 3 as in the conventional mixed discharge type ozonizer.

The dielectric 1 is a thin plate of ceramic (in this embodiment, a fine ceramic having an alumina purity of 99% or more) is used. In the example, a material having a thickness of 0.7 mm was used. However, a material having a sufficient mechanical strength of about 0.5 mm has been developed recently.)

It is a matter of course that the discharge electrode 2 having a resistance to the generated ozone is used. In the present embodiment, titanium or a titanium alloy is used (platinum, stainless steel or the like may be used). The discharge electrode 2 may be made of a metal as appropriate, but it is desirable to use a metal having good heat conductivity because cooling can further improve ozone generation efficiency. In the case of water cooling, a metal excellent in corrosion resistance is used.

According to the present invention, the contact surface of the discharge electrode 2 with the dielectric 1 is provided with a raw material gas inflow groove 21 extending from one end to the other end and not reaching the other end, and from the other end to the one end. An ozone outflow groove 22 that does not reach the opposite end is provided in parallel and in close proximity.

The raw material gas inflow groove 21 and the ozone outflow groove 2
2, the cross-sectional shape may be appropriately selected, but in this embodiment, the embodiments shown in FIGS. 1 to 5 are formed in a triangular cross section so that they are arranged adjacent to each other. 7 and FIG. 7, the cross-sectional shape is substantially semicircular.

The peak 23 located between the raw material gas inflow groove 21 and the ozone outflow groove 22 is narrowed so as to sharpen the top, and the gas flow gap Is provided.
The reason why the width is reduced so as to sharpen the top is to concentrate the electric charges, and it is not always necessary to sharpen the top sharply. As in the embodiment, the top may be formed in a semicircle having a small radius, and further, although not shown, may be formed in a flat shape having a sufficiently narrow width.

As described above, when the material gas inflow groove 21 and the ozone outflow groove 22 are each formed in a triangular cross section so that they are adjacent to each other, the material gas inflow groove 21 and the ozone outflow groove 22 are formed. As shown in FIG. 3, the peak 23 located between them has a triangular shape with a sharp top, and the top is naturally narrowed.

As described above, the reason why the peaks of the peaks 23 located between the raw material gas inflow groove 21 and the ozone outflow groove 22 are sequentially narrowed so as to be sharpened is that by sharpening the portion, This is for the purpose of concentrating the charges as described above. When the discharge electrode 2 in which charges are concentrated in contact with or close to the dielectric 1 exists, a creeping discharge having a high discharge density or a discharge equivalent to the creeping discharge is generated in the vicinity thereof. The first object of the present invention is to utilize the creeping discharge having a high discharge density. However, not only the creeping discharge but also the creeping discharge induced by the creeping discharge and the relatively low voltage It also utilizes the stable and continuous corona discharge that is generated in the above.

Therefore, the above-mentioned raw material gas inflow groove 21
As a result of the experiment, it is most desirable that the cross-sectional shape of the groove and the ozone outflow groove 22 be such that the distance from the dielectric 1 is gradually increased from the portion (top) in contact with or close to the dielectric 1 toward the skirt. As can be seen, in the embodiments of FIGS. 1 to 5, the cross-sectional shapes of the raw material gas inflow groove 21 and the ozone outflow groove 22 are triangular in cross section as described above. In the embodiment shown in FIGS. 6 and 7, the cross-sectional shapes of the raw material gas inflow groove 21 and the ozone outflow groove 22 have a normal waveform, but the radius of the cross section of the crest is reduced. Is sharpened so that the groove does not suddenly become deep near the top.

The clearance 23c is for communicating the raw material gas inflow groove 21 and the ozone outflow groove 22. The raw material gas flowing from the raw material gas inflow groove 21 is
Since the material gas inflow groove 21 does not penetrate to the other end side of the discharge electrode 2, the entire amount thereof flows into the ozone outflow groove 22 through the clearance 23c, and the ozone outflow groove 2
2 to the other end of the discharge electrode 2. That is, the raw material gas is supplied to the raw material gas inflow groove 21 and the ozone outflow groove 2.
As shown by an arrow in FIG. 2, the vehicle travels over the mountain portion 23 located between the two and meanders in a crank shape.

In order to provide the clearance 23c, the tops (ie, ridges 23a) of the peaks 23 located between the raw material gas inflow grooves 21 and the ozone outflow grooves 22 are most clearly shown in FIG. 3 and FIG. As shown in the figure, the height may be lowered by one step. In the embodiment shown in FIG.
3a is formed into a waveform whose height changes sequentially, and the ridge line 23a is formed.
Are provided with a part that contacts the dielectric 1 and a part that does not.
Clearance 23c, 23c, 23c in the direction of ridge line 23a
... parts are provided intermittently.

It is needless to say that it is preferable that the cross-sectional area of the raw material gas inflow groove 21 and the total cross-sectional area of the clearance 23c be the same without pressure loss. However, if the cross-sectional area of the raw material gas inflow groove 21 is large, the ridge line 23a is farther away from the dielectric 1, so that no creeping discharge occurs. Therefore, when the ridge line 23a is formed into a waveform as described above, creeping discharge occurs locally but surely, which is efficient.

Next, a second aspect of the present invention relates to a dielectric
A discharge electrode 2 on one side and a counter electrode 3 on the other side, and a high-voltage pulse voltage is applied between the discharge electrode 2 and the counter electrode 3. A plurality of gas passages 20 and 2
Are provided in parallel.

The gas flow path 20 extends from one end to the other end and does not reach the other end. The gas flow passage 20 is provided in parallel with and adjacent to the raw gas inlet groove 21. And each of the peaks 23 located between the raw material gas inflow groove 21 and the ozone outflow groove 22 is sequentially reduced in width so as to sharpen the top. In addition, a clearance 23c for providing a gas flow gap with the dielectric 1 is provided.

That is, in the present invention, a plurality of gas channels 20, 20, 20,... Comprising a combination of the source gas inflow groove 21 and the ozone outflow groove 22 of claim 1 are provided in parallel. is there. The gas flow paths 20, 20, 2
0... Are provided in parallel.
0, 20, 20,... May be provided at predetermined intervals, but in the illustrated embodiment, they are sequentially brought close to each other, and as a result, the raw material gas inflow grooves 21 and the ozone outflow grooves 22 are alternately arranged. The cross section has a triangular wave (sawtooth wave) shape.

If the cross-section in which the raw material gas inflow grooves 21 and the ozone outflow grooves 22 are alternately formed is a triangular wave (sawtooth wave), a large volume of raw material gas can be delivered by a compact device, and the device is compact. Can greatly contribute to And the ridgeline 23 of the mountain part between the juxtaposed gas channels 20, 20.
Since b (see FIG. 3) is in line contact with the dielectric 1 and charges are concentrated, a creeping discharge having a high discharge density is generated at this portion to enable efficient discharge.

Then, the gas channels 20, 20 arranged in parallel are arranged.
In the creepage discharge where the discharge density is high at the ridgeline 23b of the mountain portion between the peaks, not only the raw material gas flowing through the raw material gas inflow groove 21 goes straight along the raw material gas inflow groove 21 but also as shown in FIG. As shown by an arrow in the figure, there is an airflow that bends toward the opposite mountain side of the raw material gas inflow groove 21, so that a large amount of the raw material gas comes into contact with this discharge site due to a kind of turbulent flow of the raw material gas. It is.

However, although a creeping discharge having a high discharge density is generated at the ridgeline 23b of the mountain portion between the body flow paths 20, 20, the raw material gas is a kind of turbulent flow, and a part thereof is formed. Since it is only contact, it can be guessed that high efficiency cannot be achieved yet.

Therefore, in the invention of claim 3, a sufficient source gas is ensured to flow also to the high-density creeping discharge portion, and the discharge electrode 2 is provided on one surface of the dielectric 1.
The discharge electrode 2 and the counter electrode 3
In the discharge type ozonizer, a high-voltage pulse voltage is applied between the discharge electrode 2 and the raw material gas flowing from one end to the other end of the contact surface of the discharge electrode 2 with the dielectric 1 and not reaching the other end. Grooves 21 and ozone outflow grooves 22 that are alternately close to and extend from the other end to one end and do not reach one end are provided in parallel, and are located between the raw material gas inflow grooves 21 and the ozone outflow grooves 22. The portion 23 is sequentially reduced in width so as to sharpen its top, and is provided with a clearance 23c for providing a gas flow gap between the dielectric 1 and the cross-sectional area of each clearance 23c. 21 is set smaller than the cross-sectional area.

That is, the raw material gas inflow grooves 21 and the ozone outflow grooves 22 are provided alternately, and the raw material gas supplied into the raw material gas inflow grooves 21 is positioned on both sides thereof as shown by arrows in FIG. And flows into the ozone outflow grooves 22, 22 through the clearances 23c, 23c, thereby ensuring a high-density discharge field generated on both sides in the short direction of the raw material gas inflow groove 21. It will be available. Compactness and efficiency can be achieved at the same time.

However, the clearances 23c, 23
are manufactured with due attention to the dimensional accuracy, but the amount of the supplied source gas flowing out to the right and the left in the short direction of the source gas inflow groove 21 is made uniform. It was very difficult. If an extreme difference occurs in the outflow amount, the efficiency is reduced, and the cooling effect due to the air flow is reduced, so that the ozone generation amount is reduced synergistically.

Therefore, in the present invention, each clearance 23
By setting the cross-sectional area of c to be smaller than the cross-sectional area of each raw material gas inflow groove 21, the above-mentioned amount of outflow to the left and right sides of the raw material gas inflow groove 21 in the lateral direction is made uniform.

When the cross-sectional area of each of the above-mentioned clearances 23c is set smaller than the cross-sectional area of each of the raw material gas inflow grooves 21, when the raw material gas is pressure-fed into the raw material gas inflow grooves 21, first, the clearances 23c become a kind of weir. Therefore, the source gas temporarily stays at the upstream portion of the clearance 23c, which causes some pressure loss, but causes an extreme deviation of the flow rate of the outflow to the left and right sides in the short direction of the source gas inflow groove 21. Is eliminated.

Since the clearance 23c serves as a kind of orifice, if the material gas inflow groove 21 is not provided but a high pressure atmosphere is provided, the inside of the ozone outflow groove 22 becomes a low pressure atmosphere. Since the pressure difference between the two influences the flow rate of the air flow, the higher the flow path narrowing rate of the clearance 23c, the more uniform the flow rate of the raw material gas inflow groove 21 to the left and right sides in the short direction. It is what will become.

[0047]

Since the present invention is as described above, the total amount of the raw material gas is small and the clearance 23c having a high discharge density is provided.
It is possible to provide an efficient discharge-type ozonizer in which oxygen in the raw material gas is efficiently ozonized by flowing through a portion.

In order to generate ozone efficiently, the source gas must be brought into contact with the discharge field without fail. However, if the generated ozone stays in the discharge field for a long time, it is again decomposed by the discharge and returns to oxygen. It is said that there is. Therefore, it is considered that the source gas should be surely passed through a discharge field having a high discharge density in a short time in order to efficiently generate ozone.
Since the raw material gas flows through the discharge section, it is possible to provide a discharge type ozonizer in which generated ozone is less likely to be decomposed again in a discharge field.

Further, the discharge type ozonizer has a property that heat is generated by the discharge and the generated ozone is decomposed by this heat energy. The attenuation of ozone in the heating atmosphere is not so small as to be negligible, and it is said that a discharge type ozonizer requires a cooling device. However, it is impossible to directly cool the discharge portion having the largest heat value, and generally, cooling is performed via the counter electrode 3 (outside the counter electrode 3). However, in the present invention, the generated heat energy is swept by the gas flow of the raw material gas by flowing the raw material gas through the narrow clearance 23c at a high speed so that the thermal energy is not accumulated in the part having a high discharge density. It is possible to provide an efficient discharge-type ozonizer capable of performing the above-described steps.

According to the second aspect of the present invention, the discharge density is high on both outer sides of the raw gas inlet groove 21 and the ozone outlet groove 22 where the clearance 23c is not provided (the ridge line 23b in FIG. 3). Although a creeping discharge occurs, a turbulent flow is generated by the gas flow of the raw material gas not flowing straight in the raw gas inlet groove 21 and the ozone outflow groove 22 in the longitudinal direction but meandering as shown in FIG. And no local fever was measured,
It is possible to provide a compact, large-capacity discharge ozonizer.

Further, according to the third aspect of the present invention, by alternately arranging the raw material gas inflow grooves 21 and the ozone outflow grooves 22, a high-density discharge field on both sides in the short direction of the raw material gas inflow grooves 21 is ensured. It is possible to provide a compact and efficient discharge type ozonizer which can eliminate heat storage due to discharge by reliably flowing the source gas through this narrow high-density discharge field, and further provide a compact and efficient discharge type ozonizer. By setting the cross-sectional area to be smaller than the cross-sectional area of each raw material gas inflow groove 21, each clearance 2 can be maintained without strictly maintaining the dimensional system.
An object of the present invention is to provide a discharge-type ozonizer that allows a uniform amount of a source gas to flow through a portion 3c.

Incidentally, in the embodiment shown in FIGS. 6 and 7, the material gas inflow groove 21 and the ozone outflow groove 22 are each 4 m long.
20 pieces each having a total length of 95 mm with a stroke of m were juxtaposed, and a discharge electrode 3 having a minimum distance of 0.15 mm from a dielectric was used as a clearance 23c.
When a pulse high pressure of 5 kHz was applied, an ozone concentration of 250 g / nm was obtained with a flow of 4 liters of cylinder oxygen per minute.
³ super-high concentration ozone gas could be taken out. The power consumption at this time was 5.35 KW · h / kg ozone. FIG. 8 shows the present data of the present embodiment, the conventional glass tube type (corona discharge type), the present invention type, and the narrow gap type (a type in which the discharge gap of the corona discharge type is narrowed) which is said to be the most efficient at present. These are summarized for comparison. The conventional method shows that the power consumption rises significantly when the concentration exceeds 200 g / nm ³ in the ultra-high concentration range, whereas the present method shows that the power consumption increases linearly. It shows the features.

Similarly, in the embodiment described in the preceding paragraph, the power consumption at the time of generation of ozone having a concentration of 58000 ppm at 4 liters per minute was about 200 W · H, and the ozone was 1K.
Approximately 6.6KW · h / kg in terms of power consumption per g
It became ozone. As a comparison, in the mixed discharge type shown in FIGS. 11 and 12, the power consumption is about 240 W · h, and 4 liters per minute and 31,000 ppm of ozone are generated. Therefore, the power consumption per 1 kg of ozone is about 14 KW ·
h / kg ozone. This value is considered to be normal power consumption in a small-sized ozonizer of this scale. However, the power consumption of the ozonizer of the present invention is about 約 as described above.
It is possible to reduce power by 〜15%, and there is a possibility of breaking the wall of discharge power of 5 kWh / kg ozone, which is said to be a borderline of large ozone utilization. This is an example showing that the means for preventing heat loss, particularly the re-decomposition of generated ozone, which is the object of the present invention, is effective.

[Brief description of the drawings]

FIG. 1 is an exploded perspective view of a main part of a discharge type ozonizer of the present invention.

FIG. 2 is a plan view of a discharge electrode used in the discharge type ozonizer of the present invention.

FIG. 3 is a vertical sectional view of a main part.

FIG. 4 is a sectional view taken along line AA of FIG. 3;

FIG. 5 is a cross-sectional view of a portion corresponding to line AA in FIG. 3 in another embodiment.

FIG. 6 is a plan view of a main part in another embodiment.

FIG. 7 is an enlarged partial sectional view taken along line BB of the embodiment of FIG. 6;

FIG. 8 is a comparison graph of the present invention and a conventional method.

FIG. 9 is a sectional view of a main part of a conventional corona discharge type ozonizer.

FIG. 10 is a sectional view of a main part of a conventional surface discharge type ozonizer.

FIG. 11 is a perspective view of a conventional mixed discharge type ozonizer.

FIG. 12 is a longitudinal sectional view of a discharge section of a conventional mixed discharge type ozonizer.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Dielectric 2 Discharge electrode 3 Counter electrode 20 Gas flow path 21 Source gas inflow groove 22 Ozone outflow groove 23 Mountain part 23c Clearance

Claims (3)

[Claims] A discharge electrode (2) is superimposed on one surface of a dielectric (1) and a counter electrode (3) is superposed on the other surface, and a high-voltage pulse voltage is applied between the discharge electrode (2) and the counter electrode (3). In the discharge type ozonizer adapted to apply a voltage, the contact surface of the discharge electrode (2) with the dielectric (1) is provided with a raw material gas inflow groove (21) extending from one end to the other end and not reaching the other end. ) And an ozone outflow groove (22), which extends from the other end side to one end side and does not reach one end, are provided close to and parallel to each other, and between the raw material gas inflow groove (21) and the ozone outflow groove (22). The located ridge (23) is gradually narrowed so as to sharpen the top, and a clearance (23c) for providing a gas flow gap between the ridge (23) and the dielectric (1) is provided. Discharge type ozonizer. 2. A discharge electrode (2) is superimposed on one surface of a dielectric (1) and a counter electrode (3) is superposed on the other surface, and a high-voltage pulse voltage is applied between the discharge electrode (2) and the counter electrode (3). In a discharge type ozonizer adapted to apply a voltage, a material gas inflow groove (21) extending from one end to the other end of the contact surface of the discharge electrode (2) with the dielectric (1) and not reaching the other end. And an ozone outflow groove (22) which is provided in parallel with and close to the raw material gas inflow groove (21) and does not reach one end from the other end toward one end, and the raw material gas inflow groove (21) The ridge (23) located between the groove and the ozone outflow groove (22) is gradually narrowed so as to sharpen the top, and a gas flow gap is provided between the ridge and the dielectric (1). Gas flow path (20) provided with clearance (23c)
Are provided in parallel with each other. 3. A discharge electrode (2) on one surface of a dielectric (1) and a counter electrode (3) on the other surface, and a high-voltage pulse voltage is applied between the discharge electrode (2) and the counter electrode (3). In a discharge type ozonizer adapted to apply a voltage, a material gas inflow groove (21) extending from one end to the other end of the contact surface of the discharge electrode (2) with the dielectric (1) and not reaching the other end. And ozone outflow grooves (22) which are not provided at one end from the other end side to the one end side are alternately provided in parallel and close to each other, and between the raw material gas inflow groove (21) and the ozone outflow groove (22). Is gradually narrowed so as to sharpen the top, and a clearance (23c) for providing a gas flow gap between the peak and the dielectric (1) is provided.
A discharge type ozonizer characterized in that the cross-sectional area of each clearance (23c) is set smaller than the cross-sectional area of each raw material gas inflow groove (21).