JPH11111125A - Vacuum valve - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide superior corrosion resistance, prevent temperature rise during current carrying, reduce noises and improve power transmission efficiency, and improve reliability by making a composition of at least one material of a sealing metal fitting consisting of a specific wt.% of Ni, a specific wt.% of C, and a sum of Fe and Co of less than a specific wt.%, and the remainder being Cu. SOLUTION: At least one material composition of sealing metal fittings 2a and 2b for sealing openings at both ends of an insulation cylinder 1 with air tightness consists of 25 to 55 wt.% of Ni, 0.001 to 0.1 wt.% of C, 0.001 to 5 wt.% of a sum of C and Mn, 0.005 to 1.5 wt.% of a sum of Mg and Mn, or 0.001 to 1.5 wt.% of a sum of C, Mg, and Mn. Further, 5 wt.% or less is added in a sum of Fe and Co, and the remaining main component is Cu. Thereby, when the openings at both ends of the insulation cylinder 1 are metal-blazed under a high temperature of about 500 to 1000 deg.C and sealed with air tightness, strength under the high temperature atmosphere is small to a thermal stress due to a difference of a thermal expansion coefficient, and the stress release can be ensured.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] The present invention relates to a vacuum valve.

[0002]

2. Description of the Related Art In general, a vacuum valve is provided in a vacuum container having a cylindrical insulating container made of ceramics such as alumina, which has hermetically sealed openings at both ends with sealing metal fittings and an internal pressure of 1 × 10 ^-2 Pa or less. And a pair of contacts arranged so as to be able to contact and separate. On both end surfaces of the insulating container, a metallized layer formed by baking and applying a powder of, for example, Mo-Mn is formed in order to enable metal brazing with the sealing metal. The sealing metal includes a 42Ni-Fe alloy and a 17Co-29Ni-Fe alloy whose thermal expansion coefficient at the time of metal brazing is close to that of an insulating container.
An alloy or the like is used, and both ends of the insulating container and 750 to 10
It is hermetically sealed and joined by metal brazing at a high temperature of about 00 ° C. Then, after hermetic sealing and joining, a rust-proof coating treatment is generally performed on the surface of the metal to improve corrosion resistance.

As is well known, a vacuum valve is required to have high reliability. In particular, the hermetic portion is only a portion that determines the basic function of the vacuum valve, that is, maintaining a high vacuum for a long period of time. Must be done. The hermetic portion between the insulating container and the sealing fitting is a portion joining two substances having different coefficients of thermal expansion,
It is common to seal by metal brazing at a high temperature of about 1000 ° C. One of the technical points for improving reliability is to alleviate the internal stress caused by the difference between the expansion and contraction of the two substances when brazing the metal. Therefore, the material of the conventional sealing fitting has a thermal expansion coefficient at the time of metal brazing that is close to that of alumina porcelain.
Ni-Fe alloys or 17Co-29Ni-Fe alloys have been commonly used.

[0004]

However, the conventional method has the following problems. The first is the problem of corrosion resistance. Since aggressive technical development regarding the corrosion resistance to the operating environment of the vacuum valve has not been performed so far, the surface of the sealing metal needs to be subjected to a rust-proof coating treatment. Was. However, there are drawbacks that the coating itself is not always sufficient for long-term reliability, for example, it is an organic resin-based material, and easily deteriorates over time, and there are problems such as adhesion of the coating film and destruction of the coating film. That is, corrosion resistance to chlorine gas, especially in a chemical plant or a beach area, is an extremely important characteristic in ensuring long-term reliability of a vacuum valve.

[0005] Second, the sealing fitting is made of a ferromagnetic material. That is, there is a problem that a temperature rise occurs due to iron loss at the time of energization, and noise occurs due to generation of magnetostrictive vibration, and these also lead to energy loss.

In order to solve such a problem, for example, as disclosed in Japanese Patent Publication No. 7-21985, Cu-
An alloy based on Ni to which Si, Mn, and Fe are added is used. The use of this CuNi-based alloy has almost satisfied the problems of corrosion resistance and ferromagnetism. However, in such a composition system, surface peeling, which is thought to be caused by inclusions in the alloy due to the addition of Si, is often observed. As a result, a sudden decrease in the withstand voltage, which is considered to be caused by the deposits, has occurred, and it has become an important issue to solve this.

The present invention has been made in view of the above circumstances, and achieves excellent corrosion resistance, prevention of temperature rise during energization, reduction of noise, and improvement of power transmission efficiency.
It is an object of the present invention to provide a vacuum valve capable of further improving reliability.

[0008]

The present invention has the following features. (1) A vacuum valve having a pair of contacts detachably disposed in a vacuum vessel in which both ends of a ceramic insulating cylinder are hermetically sealed with sealing metal fittings, wherein at least one of the sealing metal fittings is provided. The composition of one material is Ni 25-55% by weight, C
A vacuum valve comprising 0.001 to 0.1% by weight, the balance being Cu. (2) A vacuum valve in which a pair of contacts is set so as to be able to contact and separate from each other in a vacuum container in which both ends of a ceramic insulating cylinder are hermetically sealed with sealing metal fittings, and at least one of the sealing metal fittings. Is composed of 25 to 55% by weight of Ni and C
0.001-0.1% by weight, the total of Fe and Co is 5.0
A vacuum valve, characterized in that the weight percent or less is made of Cu. (3) A vacuum valve in which a pair of contacts is set so as to be able to contact and separate from each other in a vacuum container in which openings at both ends of a ceramic insulating cylinder are hermetically sealed with sealing fittings, and at least one of the sealing fittings. Is composed of 25 to 55% by weight of Ni and C
0.001-0.1% by weight, the sum of C and Mn is 0.00
A vacuum valve comprising 1 to 1.5% by weight, the balance being Cu. (4) A vacuum valve in which a pair of contacts is set to be able to contact and separate from each other in a vacuum container in which both ends of a ceramic insulating cylinder are hermetically sealed with sealing metal fittings, wherein at least one of the sealing metal fittings is provided. Is composed of 25 to 55% by weight of Ni and C
0.001-0.1% by weight, the sum of C and Mn is 0.00
A vacuum valve comprising 1 to 1.5% by weight, the total of Fe and Co being 5.0% by weight or less, and the balance being Cu. (5) A vacuum valve in which a pair of contacts is set so as to be able to contact and separate from each other in a vacuum vessel in which both ends of a ceramic insulating cylinder are hermetically sealed with sealing metal fittings, and at least one of the sealing metal fittings. The composition of the material is Ni 25-55% by weight, Mg
A vacuum valve comprising 0.005 to 0.5% by weight, the balance being Cu.

(6) A vacuum valve in which a pair of contacts is set to be able to contact and separate from each other in a vacuum container in which both ends of a ceramic insulating cylinder are hermetically sealed with sealing fittings. Has a composition of at least one of Ni 25-55.
A vacuum valve comprising: weight%, 0.005 to 0.5 weight% of Mg, total of 5.0 weight% or less of Fe and Co, and the balance being Cu. (7) A vacuum valve in which a pair of contacts can be connected and separated in a vacuum container in which both ends of a ceramic insulating cylinder are hermetically sealed with sealing metal fittings, wherein at least one of the sealing metal fittings is provided. The composition of the material is Ni 25-55% by weight, Mg
0.005 to 0.5% by weight, the total of Mg and Mn is 0.0
A vacuum valve comprising 0.05 to 1.5% by weight, with the balance being Cu. (8) A vacuum valve in which a pair of contacts is set so as to be able to contact and separate from each other in a vacuum vessel in which both ends of a ceramic insulating cylinder are hermetically sealed with sealing metal fittings, and at least one of the sealing metal fittings. The composition of the material is Ni 25-55% by weight, Mg
0.005 to 0.5% by weight, the total of Mg and Mn is 0.0
0.5 to 1.5% by weight, the total of Fe and Co is 5.0% by weight
Hereinafter, a vacuum valve characterized by the balance of Cu. (9) A vacuum valve in which a pair of contacts is set so as to be capable of coming and going in a vacuum vessel in which both ends of a ceramic insulating cylinder are hermetically sealed with sealing metal fittings, wherein at least one of the sealing metal fittings is provided. Wherein the composition of the material is 25 to 55% by weight of Ni, the total of C and Mg is 0.001 to 1.5% by weight, and the balance is Cu. (10) A vacuum valve in which a pair of contacts is set so as to be able to contact and separate from each other in a vacuum vessel in which both ends of a ceramic insulating cylinder are hermetically sealed with sealing metal fittings, and at least one of the sealing metal fittings. Is composed of 25 to 55% by weight of Ni and C
0.001 to 1.5% by weight of Fe and Co
A total of 5.0% by weight or less and a balance of Cu.

[0010] The sealing material of the vacuum valve of the present invention is mainly intended for good corrosion resistance and non-magnetism. From such a viewpoint, the non-magnetic region of the Cu-Ni alloy is the target. The point of the Cu-Ni alloy is that the thermal expansion coefficient is larger than the conventional material, and the sealing properties necessary for sealing, the workability for forming the sheet material, and the reliability regarding the withstand voltage property are important points. Become. Cu-Ni alloys tend to have a larger coefficient of thermal expansion than 42Ni-Fe alloys and 17Co-29Ni-Fe alloys, and are not suitable for sealing. However, since the yield strength at a high temperature is smaller than that of the conventional Fe-based sealing material, the difference in thermal expansion in the process of solidifying and cooling the wax is reduced by the plastic deformation of the Cu—Ni alloy itself.
For this reason, a material based on a Cu-Ni alloy was selected.

Next, the process of determining the composition system of the Cu-Ni alloy in consideration of brazing properties, workability and reliability will be described. When Si is used as a deoxidizing agent, surface peeling which is considered to be due to the formation of inclusions occurs, and instantaneous reduction in withstand voltage characteristics due to lack of the peeled portion is observed. Therefore, as a result of studying various additives, the present inventors have found that C, Mg, Mn deoxidation is appropriate. Furthermore, these elements not only have a deoxidizing effect,
It has been found that it also plays a major role in sealing properties and reliability, which are important for vacuum valves.

The addition of C, Mg, and Mn affects the deoxidizing effect in the alloy, workability, brazing properties, and reliability related to withstand voltage. It is important for a vacuum valve to maintain a vacuum in a vacuum vessel, and for that purpose, brazing properties and reduction of gas in the material are indispensable. Attention must also be paid to the deterioration of the withstand voltage characteristics due to the formation of inclusions. C, Mg, and Mn are all elements that exhibit a deoxidizing effect. However, in order to adjust the oxygen content by adding only Mn, 1.5% by weight (hereinafter referred to as wt%).
The above addition is necessary. However, when such a large amount of Mn is added, the cold workability is inferior, and cracks tend to occur during cold rolling. Therefore, in order not to impair the cold workability, the upper limit of Mn is set to 1.5 wt%, and C or 0.005% or more as an auxiliary deoxidizing agent is used.
% Or more of Mg can maintain a stable oxygen content. However, as in the case of Mn, excessive addition of C and Mg impairs the cold workability.
It is desirable that the content be 5 wt% or less.

C and Mg are used as deoxidizing agents as described above. However, since they are more active than Mn, their addition amounts are 0.1 wt% for C and 0.5 wt% for Mg.
If, for example, in the brazing in a vacuum atmosphere, to cause selective oxidation and the like on the Cu-Ni alloy surface,
Sufficient brazing cannot be performed. Therefore, it is necessary to suppress the amount of C added to 0.1 wt% or less and the amount of Mg to 0.5 wt% or less.

Further, for the reasons described above, the deoxidizing agents Mn, C,
If the addition amount of Si is too small, an unhealthy portion of the ingot such as a pinhole due to insufficient deoxidation is generated, and cracks are easily generated in hot working and cold working. To prevent this cracking, the total of C and Mn should be at least 0.001 wt%,
At least 0.005 wt% in total. However, from the viewpoint of reducing and stabilizing the oxygen content in the alloy as well as the pinholes, the addition amount of Mn is insufficient at this lower limit, and the stronger deoxidizing agents C, Mg
Good results are obtained with the addition of

From the above, trace amounts of deoxidizing agents C and M
g and Mn are added in an amount of 0.001 to 0.1 wt% C;
Mg must be 0.005 to 0.5 wt%, and the total of the deoxidizing agent to which Mn has been added must be 1.5 wt% or less. Furthermore, by not using Si, there is a tendency to obtain stable characteristics in terms of withstand voltage.

The addition of Fe and Co has a role to further improve the corrosion resistance of the Cu—Ni alloy, and is effective not only in the above-mentioned natural environment but also in a severe environment containing chlorine gas or the like. Become. However, the addition of Fe exceeding 5 wt% causes a decrease in corrosion resistance due to the addition of a large amount, and the addition of a large amount of Co causes the ferromagnetic property of the CuNi alloy. Therefore, the total added amount of Fe and Co should be suppressed to 5 wt% or less. is necessary.

As for the amount of Ni in the CuNi alloy, the corrosion resistance tends to improve as the amount of Ni increases. According to the study of the present inventors, it is necessary to add at least 25 wt% or more of Ni in order to maintain corrosion resistance in a natural environment. When the added amount of Ni exceeds 55 wt%,
In the low temperature range, the ferromagnetic signs are observed in the CuNi alloy, which is an undesirable state. Therefore, (25-55) wt% Ni-Cu is preferable as the basic composition.

FIG. 1 is a sectional view showing a configuration example of a vacuum valve of the present invention. In the figure, both ends of a cylindrical insulating tube 1 made of alumina porcelain are fixed at a fixed side sealing metal fitting 2a.
And the movable side sealing metal fitting 2b are hermetically sealed so that the internal pressure 1
A vacuum container 3 having a pressure of × 10 ^-2 Pa or less is formed.
Inside the vacuum vessel 3, there is a fixed conducting shaft 4 serving as one electric path.
And a fixed contact 5 fixed to the end thereof, a movable conducting shaft 6 serving as the other electric path, and a movable contact 7 fixed to the end.
Are provided, and the fixed side contact 5 and the movable side contact 7 are configured to be able to freely contact and separate. The movable energizing shaft 6 has one end fixed to the other end of the bellows 8 fixed to the movable-side sealing member 2b, and can move in the axial direction while maintaining the degree of vacuum of the vacuum container 3. ing. Further, in order to prevent the metal vapor generated from the two contacts when the fixed contact 5 and the movable contact 7 are opened and closed from adhering to the inner wall of the insulating cylinder 1, the insulation resistance is reduced inside the vacuum vessel 3. A metal shield 9 is provided so as to surround the fixed contact 5 and the movable contact 7.

The material composition of at least one of the sealing members 2a and 2b for hermetically sealing the openings at both ends of the insulating cylinder 1 is such that Ni is 25 wt% or more and 55 wt% or less, and the total of C and Mn is 0.001 to 0.001 wt%. 1.5 wt% or the total of Mg and Mn is 0.005 to 1.5 wt%, or the total of C, Mg and Mn is 0.001 to 1.5 wt%.
And Co in an amount of 5 wt% or less in total, and the remaining main component is Cu. In addition, the sealing fittings 2a, 2
The rust-preventive surface coating of b is unnecessary.

Since the sealing fittings 2a and 2b have such a material composition, when the openings at both ends of the insulating cylinder 1 are hermetically sealed by metal brazing at a high temperature of about 500 to 1000 ° C. The sealing metal fittings 2a and 2b have a lower proof stress in a high-temperature atmosphere than the conventional 42Ni-Fe even with respect to the thermal stress due to the difference in the thermal expansion coefficient between the metal fittings 2a and 2b and the insulating cylinder 1.
It is designed to facilitate plastic deformation at high temperature and reduce stress. Further, high hermetic reliability can be obtained even if the coefficient of thermal expansion is not always close to that of alumina porcelain. Therefore, 42Ni-Fe and 17Co-20Ni-F, which have been conventionally used as materials for the sealing fitting, have been used.
It shows good properties different from those of the e-alloy.

[0021]

Next, the present invention will be described based on examples and comparative examples. First, an evaluation method for each sample will be described. Corrosion resistance: The tendency was examined by a neutral salt spray test. 7
After spraying with 2Hr, the appearance change was investigated.
The dimensions of the test piece are about 50 mm x 1 mmt. This test was not performed with Fe and Co added materials. Corrosion resistance in special atmosphere: Conducted in a Cass test, which is more accelerated than a neutral salt spray test. The CASS test is a salt spray test in an acidic atmosphere. For evaluation, a numerical value obtained by converting the corrosion weight loss of the alloy into the average corrosion loss thickness was used. The test time was set to 720 hours. In addition, this evaluation was implemented about the material which added Fe and Co.

Temperature characteristics: A vacuum valve using the alloy of this example was manufactured, and the rise in the temperature of the sealing alloy when a current of 7.2 kV-630A was applied for 3 hours was measured by attaching a thermocouple to the sealing portion. Noise at the time of energization: At the time of the temperature characteristic measurement, the presence or absence of noise due to magnetostrictive vibration was confirmed by hearing.

Sealing characteristics: What must be considered in the sealing bonding between the CuNi alloy of the present invention and ceramics such as aluminum porcelain is the reliability at the bonding portion, that is,
It is not the degree of apparent sealing but the degree of actual sealing. Specifically, the airtightness must be maintained by the impact force generated at the time of opening and closing. Therefore, the sealing properties were evaluated based on the following properties. After the completion of the production of the vacuum valve, after confirming that the degree of vacuum was 1 × 10 ⁻⁴ Pa or less, the vacuum valve was attached to a predetermined circuit breaker, and opened and closed 500 times, and then the degree of vacuum was measured again. , And the degree of hermetic sealing was confirmed. Note that three vacuum valves were used for each evaluation. Withstand voltage characteristics: After producing a vacuum valve using each sealing material, evaluation was made by re-ignition by an advanced small current test. The current is 500 A and the recovery voltage is 36 kV. In addition, the sealing material evaluated was judged to be effective from all the above-mentioned evaluations, and was evaluated with three vacuum valves each.

Examples 1 to 4, Comparative Examples 1 and 2 In order to study the basic composition of CuNi alloy, C having a composition shown in Table 1 was about 0.05 wt%, and Mn was 0.3 wt%.
Six types of CuNi alloys with t% added were produced. Each Ni content is 15, 25, 35, 45, 55, 70 w
t%.

Table 2 shows the evaluation results. In the evaluation of the corrosion resistance by the neutral salt spray test, Comparative Example 1 in which Ni = 15 wt% discolored green over the entire surface, whereas the CuNi alloy in which Ni = 25 wt% or more had each green corroded portion. It was only observed.

The characteristics of processing the CuNi alloy into a sealing fitting and assembling it into a valve will be described. Ni content is 5
In the case of 5 wt% or less, the temperature rise during energization was small, and no generation of noise was observed. In contrast, N
In the case of i = 70 wt% (Comparative Example 2), there was noise due to the ferromagnetic material, and there was also a remarkable temperature rise. The degree of vacuum after no-load opening / closing, which is a parameter indicating the brazing property, was all good.

From the above results, it can be said that the basic composition of the CuNi alloy is preferably (25 to 55) wt% Ni-Ci.

[0028]

[Table 1]

[0029]

[Table 2]

Examples 3, 5 to 7, Comparative Examples 3 to 6 The amounts of C and Mn added were examined. The basic composition of the CuNi alloy is 45 wt% Ni-Cu, and the amount of C added is 0 to
0.5 wt%, the amount of added Mn is 0-2.5 wt%,
Eight types of samples having the compositions shown in Table 3 were produced.

Table 4 shows the evaluation results. In Comparative Example 3 in which C and Mn were not added at all and Comparative Example 4 in which only a small amount of Mn was added, cracks occurred during rolling, probably because a large amount of oxygen remained in the alloy, and subsequent sample preparation was not possible. It was possible. 0.001 ≦ C ≦ 0.1 wt% and 0.001
Examples 5 and 6 satisfying the range of ≦ C + Mn ≦ 1.5
Samples Nos. 3 and 7 showed good brazing characteristics. However, even in the region of C + Mn ≦ 1.5 wt%, C =
In Comparative Example 5 in which the amount of C added was as large as 0.5 wt%, the degree of vacuum after opening and closing with no load was all atmospheric pressure, although brazing could be performed. Further, in Comparative Example 6 in which C + Mn> 1.5 wt% was added, significant cracking occurred during rolling, and the subsequent processing was stopped.

As described above, the addition amount of C and Mn is 0.00
1 ≦ C ≦ 0.1 wt%, and 0.001 ≦ C + M
It can be said that n ≦ 1.5 wt% is good.

[0033]

[Table 3]

[0034]

[Table 4]

Examples 8 to 11 and Comparative Examples 7 to 10 The addition amounts of Mg and Mn were examined. The basic composition of the CuNi alloy is 45 wt% Ni-Cu, and the amount of Mg added is 0.
Eight kinds of samples having compositions shown in Table 5 were manufactured in which the composition shown in Table 5 was １．０1.0 wt% and the Mn addition amount was 0-2.5 wt%.

Table 6 shows the evaluation results. In Comparative Example 7 in which Mg and Mn were not added at all, cracks occurred during rolling, probably because a large amount of oxygen remained in the alloy, and it was impossible to prepare samples thereafter. In Comparative Example 8 to which only a small amount of Mn was added, slight cracking was observed, but processing until the final shape was obtained was possible. However, the degree of vacuum after no-load opening / closing was reduced, and it could not be used as an actual machine. 0.00
5 ≦ Mg ≦ 0.5 wt% and 0.005 ≦ Mg + M
Examples 8 to 11 satisfying the range of n ≦ 1.5 showed good brazing characteristics. However, Mg + Mn
Mg = 1.0 wt% even in the region of ≦ 1.5 wt%
In Comparative Example 9 with a large amount of Mg added, although the brazing could be performed, the degree of vacuum after no-load switching was all atmospheric pressure. Further, in Comparative Example 10 in which Mg + Mn> 1.5 wt% was added, remarkable cracks occurred during rolling, and the subsequent processing was stopped.

As described above, the addition amount of Mg and Mn is 0.0
05 ≦ Mg ≦ 0.5wt% and 0.005 ≦ M
It can be said that g + Mn ≦ 1.5 wt% is good.

[0038]

[Table 5]

[0039]

[Table 6]

Examples 12 and 13 and Comparative Example 11 The addition amounts of C, Mg and Mn were examined. The composition shown in Table 7 in which the basic composition of the CuNi alloy is 45 wt% Ni-Cu, the amount of C added is ~ 0.5 wt%, the amount of Mg added is ~ 1.0 wt%, and the amount of Mn added is ~ 2.0 wt%. Were prepared.

Table 8 shows the results of the evaluation. C + Mg + Mn ≦
Examples 12 and 13 satisfying the region of 1.5 exhibited good characteristics over all. However, Mg + Mn> 1.5
In Comparative Example 11 in which wt% was added, since significant cracking occurred during rolling, the subsequent processing was stopped.

From the above, the total added amount of C, Mg, Mn is:
It can be said that C + Mg + Mn ≦ 1.5 wt% is good.

[0043]

[Table 7]

[0044]

[Table 8]

Examples 14 to 18 and Comparative Example 12 The effects of Fe and Co as third elements on CuNi alloys will be described. As described above, the CuNi alloy shows good corrosion resistance in an atmosphere of about neutral salt spray, but shows a degree of corrosion that can be converted by weight and thickness in a more severe atmosphere of CAS. Specifically, as shown in Example 3, in a 45 wt% Ni—Cu alloy, 50%
It shows a corrosion thickness of about μm, but by adding 0.1 wt% of Fe, the corrosion thickness becomes 40 μm (Example 14).
By adding 5 wt% of Fe, the corrosion thickness becomes 30
The corrosion resistance of μm (Example 15) is improved. But,
If too much Fe is added, as in Comparative Example 12, the corrosion thickness increases to 90 μm and becomes more magnetic.

As described above, the addition of Fe is desirably 5 wt% or less. In Examples 16 to 18, Co and Fe,
Although an example of the addition of Co is shown, some or all of Fe
It has been found that the same effect can be obtained by substituting with.

[0047]

[Table 9]

[0048]

[Table 10]

Examples 3, 10, 12, 15 and Comparative Example 13 The relationship between the withstand voltage characteristics and the deoxidizer will be examined.

Among the above-mentioned sealing materials, arbitrary ones of each composition system were extracted, and the withstand voltage characteristics of the deoxidized Si and Mn materials were evaluated. Examples 3, 10, 12, 1
C, Mg, Mn deoxidized sample No. 5 had an occurrence rate of about 0.3% in this evaluation apparatus. However, Si, M
In Comparative Example 13 in which n-deoxidation was performed, peeling was observed at various places on the surface of the plate material, the re-ignition occurrence rate was 0.5, and a property deterioration considered to be due to the inclusion caused by Si was recognized. . As described above, deoxidation of C, Mg, and Mn is desirable.

[0051]

[Table 11]

[0052]

[Table 12]

[0053]

According to the present invention, as compared with the conventional vacuum valve, the corrosion resistance is better, the temperature rise during energization can be suppressed, the power transmission efficiency can be improved, and the noise can be reduced. Can be significantly reduced, and the withstand voltage characteristics can be improved.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view showing an embodiment of a vacuum valve according to the present invention.

[Description of Signs] 1 Insulating cylinders 2a, 2b Sealing fitting 3 Vacuum container 4 Fixed-side energized shaft 5 Fixed-side contact 6 Movable-side energized shaft 7 Movable-side contact 8 Bellows 9 Shield

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Atsushi Yamamoto 1 Toshiba-cho, Fuchu-shi, Tokyo Inside the Toshiba Fuchu Plant (72) Inventor Takashi Kusano 1 Toshiba-cho, Fuchu-shi, Tokyo Toshiba Corporation Fuchu factory

Claims (10)

[Claims] 1. A vacuum valve having a pair of contacts removably disposed in a vacuum vessel in which both ends of a ceramic insulating cylinder are hermetically sealed with sealing fittings. The composition of at least one of the materials is Ni 25 to 55% by weight;
A vacuum valve comprising 0.001 to 0.1% by weight of C and the balance of Cu. 2. A vacuum valve in which a pair of contacts is set so as to be able to contact and separate from each other in a vacuum container in which both ends of a ceramic insulating cylinder are hermetically sealed with sealing metal fittings. The composition of at least one material is Ni 25 to 55% by weight;
C 0.001 to 0.1% by weight, total of 5.0 of Fe and Co
A vacuum valve, characterized in that the weight percent or less is made of Cu. 3. A vacuum valve in which a pair of contacts is set so as to be able to contact and separate from each other in a vacuum container in which openings at both ends of a ceramic insulating cylinder are hermetically sealed with sealing fittings. The composition of at least one material is Ni 25 to 55% by weight;
C 0.001 to 0.1% by weight, total of C and Mn 0.00
A vacuum valve comprising 1 to 1.5% by weight, the balance being Cu. 4. A vacuum valve in which a pair of contacts is set so as to be able to contact and separate from each other in a vacuum container in which both ends of a ceramic insulating cylinder are hermetically sealed with sealing metal fittings. The composition of at least one material is Ni 25 to 55% by weight;
C 0.001 to 0.1% by weight, total of C and Mn 0.00
A vacuum valve comprising 1 to 1.5% by weight, a total of 5.0% by weight or less of Fe and Co, and a balance of Cu. 5. A vacuum valve in which a pair of contacts is set so as to be able to contact and separate from each other in a vacuum container in which openings at both ends of a ceramic insulating cylinder are hermetically sealed with sealing fittings. The composition of at least one material is Ni 25 to 55% by weight;
A vacuum valve comprising 0.005 to 0.5% by weight of Mg and the balance being Cu. 6. A vacuum valve in which a pair of contacts is set so as to be able to contact and separate from each other in a vacuum container in which both ends of a ceramic insulating cylinder are hermetically sealed with sealing metal fittings. The composition of at least one material is Ni 25 to 55% by weight;
Mg 0.005 to 0.5% by weight, total of Fe and Co5.
A vacuum valve comprising 0% by weight or less and a balance of Cu. 7. A vacuum valve in which a pair of contacts is set so as to be able to contact and separate from each other in a vacuum container in which openings at both ends of a ceramic insulating cylinder are hermetically sealed with sealing fittings. The composition of at least one material is Ni 25 to 55% by weight;
0.005 to 0.5% by weight of Mg;
A vacuum valve comprising 005 to 1.5% by weight, the balance being Cu. 8. A vacuum valve in which a pair of contacts is set so as to be able to contact and separate from each other in a vacuum container in which openings at both ends of a ceramic insulating cylinder are hermetically sealed with sealing metal fittings. The composition of at least one material is Ni 25 to 55% by weight;
0.005 to 0.5% by weight of Mg;
005 to 1.5% by weight, total of 5.0% by weight of Fe and Co
Hereinafter, a vacuum valve characterized by the balance of Cu. 9. A vacuum valve in which a pair of contacts is set so as to be able to contact and separate from each other in a vacuum container in which both ends of a ceramic insulating cylinder are hermetically sealed with sealing metal fittings. The composition of at least one material is Ni 25 to 55% by weight;
A vacuum valve comprising a total of 0.001 to 1.5% by weight of C and Mg, and a balance of Cu. 10. A vacuum valve in which a pair of contacts is set so as to be able to contact and separate from each other in a vacuum container in which openings at both ends of a ceramic insulating cylinder are hermetically sealed with sealing fittings. The composition of at least one of the materials is composed of 25 to 55% by weight of Ni, 0.001 to 1.5% by weight in total of C and Mn, 5.0% by weight or less in total of Fe and Co, and the balance Cu. Vacuum valve.