JPH11106902A5 - - Google Patents
Info
- Publication number
- JPH11106902A5 JPH11106902A5 JP1997268294A JP26829497A JPH11106902A5 JP H11106902 A5 JPH11106902 A5 JP H11106902A5 JP 1997268294 A JP1997268294 A JP 1997268294A JP 26829497 A JP26829497 A JP 26829497A JP H11106902 A5 JPH11106902 A5 JP H11106902A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9268294A JPH11106902A (ja) | 1997-10-01 | 1997-10-01 | 光学薄膜成膜装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9268294A JPH11106902A (ja) | 1997-10-01 | 1997-10-01 | 光学薄膜成膜装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH11106902A JPH11106902A (ja) | 1999-04-20 |
| JPH11106902A5 true JPH11106902A5 (ja) | 2005-09-29 |
Family
ID=17456537
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9268294A Withdrawn JPH11106902A (ja) | 1997-10-01 | 1997-10-01 | 光学薄膜成膜装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH11106902A (ja) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4770040B2 (ja) * | 2001-03-22 | 2011-09-07 | 株式会社ニコン | 成膜装置、成膜方法及び多層膜反射鏡の製造方法 |
| JP2002363733A (ja) | 2001-06-04 | 2002-12-18 | Nippon Sheet Glass Co Ltd | 被膜の形成方法 |
| JP5247405B2 (ja) * | 2008-12-15 | 2013-07-24 | キヤノン株式会社 | 真空蒸着装置及び部材製造方法 |
| CN115418619A (zh) * | 2022-07-30 | 2022-12-02 | 四川中科朗星光电科技有限公司 | 一种行星转动镀膜装置的均匀性模拟和测试方法 |
| CN116356260A (zh) * | 2023-04-14 | 2023-06-30 | 重庆京东方显示技术有限公司 | 一种膜层厚度控制装置 |
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1997
- 1997-10-01 JP JP9268294A patent/JPH11106902A/ja not_active Withdrawn