JPH11102380A - Graphic processing method, graphic processor and recording medium - Google Patents

Abstract

PROBLEM TO BE SOLVED: To speed up processing and to reduce the amount of resources by determining cell frames which geometrically overlap with each other and an overlap of a pattern when the pattern is in a specific state according to kinds set for the presence areas of respective cells. SOLUTION: Layout data 11 are inputted and presence areas at the time of expansion by cells are set to generate information on cell frames (S21). The cells included in the layout data 11 are set as cells to be processed in order (S22) and cells in layers below the cells to be processed and the kinds corresponding to the hierarchical structure of the cell frame of the pattern are set (S24). When a different kind is set for cell frames and patterns which geometrically overlap with each other, it is decided that there is the overlap and when it is decided that cell frames or a cell frame and a pattern overlap with each other, cell frames and patterns in lower layers included in the overlapping cell frames are further read in (S25); when it is decided that the patterns overlap with each other (S26), the overlap of the patterns is determined (S27).

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a graphic processing method, a graphic processing apparatus, and a recording medium capable of easily recognizing an overlap between layers in pattern data of a semiconductor integrated circuit device.

2. Description of the Related Art In recent years, as the degree of integration of semiconductor integrated circuit devices (LSIs) has been increased, the amount of design data for LSIs has become enormous, and the capacity of magnetic disk devices and the like for storing data is insufficient. There is a possibility that. In addition, the time required for graphic processing required for LSI layout verification and EB data creation processing is increasing.
Since an increase in the amount of resources and a prolonged processing time cause an increase in cost, a reduction in the time required for graphic processing and a reduction in the amount of resources are required.

[0003]

2. Description of the Related Art Conventionally, graphic processing required for layout verification, EB data creation processing, and the like is performed by examining the overlapping of graphics from layout data of an LSI and performing graphic logic operation on the overlapping graphics to verify and create the graphics. Create figures required for processing. Layout verification, EB data creation processing, and the like are performed based on the created graphics.

[0004]

The layout data of the LSI is structured in a hierarchical structure to improve the design efficiency and reduce the amount of data. In such layout data, since the overlapping pattern actually exists in a different layer or is included in another cell in the same layer, the overlapping of the patterns may not be immediately discriminated.

Therefore, there is a method in which all the pattern data of the layout data are developed in the same hierarchy and a graphic logical operation is performed. However, in this method, a plurality of used cells are provided and expanded for the number of uses, so that the number of patterns increases, the data amount becomes enormous, and all data cannot be stored in a disk device or the like. The so-called resource amount is insufficient. In addition, when the data amount increases, the processing speed decreases, and the processing time increases.

Further, there is a method of performing a graphic logic operation by lifting only an overlapping pattern in a cell to an upper layer (changing the pattern to upper layer data). This method has an effect of suppressing an increase in the amount of data by maintaining a hierarchical structure by forming a new cell using a pattern having no overlap. However, in this method, if there are many overlapping cells, the method becomes the same as the method of developing all the patterns described above, so that the resources are insufficient and the processing speed is reduced.

Further, there is a method of expanding only a pattern of overlapping cells to suppress an increase in data amount.
However, with this method, if the number of overlapping cells is large,
Since the method is the same as the method of developing all the patterns described above, the shortage of resources and the reduction of the processing speed are also caused.

Further, before examining a cell to be processed in advance, a new cell which is included in a reference cell at each time and in which a cell (descendant cell) of a lower hierarchy than the cell is removed is created. In advance, there is a method of referring to the new cell. In this method, it is possible to avoid checking the same overlap many times, which contributes to a reduction in processing time. But,
There is a problem that a long time is required for processing because a new cell from which overlap has been removed must be created in advance.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and has as its object to provide a graphic processing method, a graphic processing apparatus, and a recording medium capable of achieving high-speed processing and reducing the amount of resources. Is to provide.

[0010]

In order to achieve the above object, the invention according to claim 1 detects a geometrical overlap of a pattern in layout data in which cells and patterns are arranged in a hierarchical structure. A graphics processing method,
The layout data is input, the existence area when expanded for each cell is set, the information of the cell frame including the area frame of each existence area and the frame of the pattern is created, and the cells included in the layout data are sequentially determined. A cell is set as a processing target cell, and a type according to a hierarchical structure is set for a cell frame of a hierarchy below the processing target cell and a cell frame of a pattern. If different types are set, it is determined that there is overlap, and if it is determined that there is overlap between cell frames or between cell frames and patterns, the lower layer cell frames and patterns included in the overlapped cell frames are further read. When it is determined that there is an overlap between the patterns, the overlap of the patterns is determined.

According to a second aspect of the present invention, for layout data in which cells and patterns are arranged in a hierarchical structure,
A graphic processing method for detecting a geometrical overlap of a pattern, comprising inputting the layout data, creating an existence area when expanded for each cell, and creating an area frame of each created existence area and a pattern frame. Storing cell frame information in a file in a hierarchical structure, sequentially setting cells included in the layout data as cells to be processed, and cell frames of cells and patterns below the cell to be processed. Setting a type according to a hierarchical structure with respect to, a step of reading the cell to be processed, or a cell frame and a pattern included in the cell frame determined to have an overlap, and Determining whether there is an overlap between the cell frames of different types or between the cell frames and the pattern; and, if there is no overlap between the newly read cell frames, A step of determining whether there is an overlap between different types of patterns among the read patterns, and a step of determining the overlap of the patterns determined to have the overlap and creating a table including overlap information of the geometrically overlapping patterns. With.

[0012] The invention according to claim 3 is the invention according to claim 1 or 2.
In the graphic processing method described in 1 above, when a type is set for the cell frame and pattern, the cell frame or the cell if the cell belonging to the cell frame is a processing target cell is set for the cell frame. A unique type is set for the frame, and if the cell frame or the cell belonging to the cell frame is not the processing target cell, the same type as the belonging cell is set. For the pattern, the same type as the belonging cell is set. Was set.

The invention described in claim 4 is the first to third aspects of the present invention.
In the graphic processing method according to any one of the above, a geometrically overlapping cell or pattern is detected with respect to the processing target cell by using the sweep method, and the overlapping is detected in the detected cell frame or pattern. Judgment was made.

According to a fifth aspect of the present invention, the layout data in which cells and patterns are arranged in a hierarchical structure is
A graphic processing apparatus for detecting a geometrical overlap of a pattern, comprising inputting the layout data, setting an existing area when developed for each cell, and comprising an area frame of each existing area and a pattern frame. Area frame creating means for creating cell frame information; processing target cell setting means for sequentially setting cells included in the layout data as processing target cells; Type setting means for setting a type according to a hierarchical structure, and when a different type is set for the geometrically overlapping cell frame or pattern, it is determined that there is an overlapping, If it is determined that there is an overlap between the cell frames or between the cell frame and the pattern, the lower layer cell frames and patterns included in the overlapping cell frame are further read, and it is determined that the patterns overlap. If you were to determine the overlapping of the patterns.

According to a sixth aspect of the present invention, the layout data in which cells and patterns have a hierarchical structure are
A graphic processing device for detecting a geometrical overlap of a pattern, comprising inputting the layout data, creating an existence area when expanded for each cell, and creating an area frame of each created existence area and a pattern frame. Area frame creation means for storing cell frame information in a file in a hierarchical structure, processing cell setting means for sequentially setting cells included in the layout data as processing target cells, and a hierarchy below the processing target cells Type setting means for setting the type of the cell frame of the cell or pattern according to the hierarchical structure, and data reading means for reading the cell frame or pattern included in the processing target cell or the cell frame determined to have an overlap. A first overlap determination means for determining whether or not a cell frame of a different type among the newly read cell frames or a cell frame overlaps a pattern; When there is no overlap in the read cell frame, among the read patterns, a second overlap determination unit that determines whether a pattern of a different type has an overlap, and determines the overlap of the pattern determined to have the overlap, An overlap determination unit for creating a table including overlap information of geometrically overlapping patterns.

The invention according to claim 7 is the invention according to claim 5 or 6.
Wherein the type setting means sets a unique type for the cell frame if the cell frame or a cell belonging to the cell frame is a cell to be processed. When the cell frame or the cell belonging to the cell frame is not the processing target cell, the same type as the belonging cell is set, and the pattern is set to the same type as the belonging cell.

The invention described in claim 8 is the invention according to claims 5 to 7
In the graphic processing device according to any one of the above, a geometrically overlapping cell or pattern is detected with respect to the processing target cell using the sweep method, and the overlapping is detected in the detected cell frame or pattern. Judgment was made.

The invention according to claim 9 is the invention according to claims 1 to 4
A recording medium storing a graphic processing program for detecting an overlap by the graphic processing method according to any one of the above. (Operation) Therefore, according to the first or second aspect of the present invention, different cell frames and patterns having geometrical overlap are different based on the type set for the existing area of each cell. If the type is set, it is determined that there is overlap, and if it is determined that there is overlap between the cell frames or between the cell frame and the pattern, the lower layer cell frame and pattern included in the overlapped cell frame are further read. When it is determined that there is an overlap between the patterns, the overlap of the patterns is determined. Therefore, the same type of cell frame is not expanded, and the required resource amount is reduced. In addition, since no extra overlap is detected depending on the set type, the processing time is short.

According to the third aspect of the present invention, when a cell frame or a cell belonging to the cell frame is a processing target cell, a unique type is set for the cell frame. If the cell frame or the cell to which the cell frame belongs is not the processing target cell, the same type as the belonging cell is set. The same type as the belonging cell is set for the pattern. Therefore, the type according to the hierarchical structure of the layout data is easily set.

According to the fourth aspect of the present invention, the sweep method is used for the cell to be processed, and a geometrically overlapping cell or pattern is easily detected. Therefore, overlapping patterns are easily detected, and the processing time is short.

According to the fifth or sixth aspect of the present invention, the area frame creating means sets an existing area when the input layout data is expanded for each cell, and sets an area of each existing area. Create cell frame information consisting of a frame and a pattern frame. The processing target cell setting means sequentially sets cells included in the layout data as processing target cells. The type setting means sets the type according to the hierarchical structure for the cells of the hierarchy below the processing target cell and the cell frame of the pattern. If different types are set for cell frames and patterns that have geometrical overlap, it is determined that there is overlap, and if it is determined that there is overlap between cell frames or between cell frames and patterns, The lower cell frame and the pattern included in the cell frame having the overlap are further read, and when it is determined that the patterns overlap each other, the overlap of the pattern is determined. Therefore, the same type of cell frame is not expanded, and the required resource amount is reduced.
In addition, since no extra overlap is detected depending on the set type, the processing time is short.

According to the seventh aspect of the present invention, when the cell frame or a cell belonging to the cell frame is a processing target cell, the type setting means sets the cell frame to the cell frame. A unique type is set, and if the cell frame or the cell to which the cell frame belongs is not the processing target cell, the same type as the belonging cell is set. Also, the same type as the belonging cell is set for the pattern. Therefore, a type according to the hierarchical structure of the layout data is easily set.

According to the eighth aspect of the present invention, a cell or pattern that geometrically overlaps with the processing target cell is detected using the sweep method, and the overlap is determined in the detected cell frame or pattern. I did it. Therefore, the overlapping patterns can be easily detected, and the processing time is short.

According to the ninth aspect of the present invention, a graphic processing program for detecting an overlap by the graphic processing method according to any one of the first to fourth aspects is recorded on a recording medium, Provided easily.

[0025]

DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to FIGS. FIG. 3 shows a system configuration of the graphic processing apparatus of the present embodiment. The graphic processing device 1 includes a central processing unit (hereinafter, referred to as a CPU) 2, a memory 3, a magnetic disk device 4, a display device 5, and a keyboard 6.
And a magnetic tape device 7, which are interconnected by a bus 8.

The magnetic disk device 4 stores program data (hereinafter, simply referred to as a program) for graphic processing shown in FIGS. This program is for executing overlap detection processing for detecting overlapping pattern data from layout data having a hierarchical structure. The program data is recorded and supplied to a magnetic tape 9 as a recording medium. The CPU 2 controls the magnetic tape device 7 to read program data from the magnetic tape 9 and store the program data in the magnetic disk device 4.

The magnetic disk device 4 stores the first and second data files 11 and 12 shown in FIG.
The first data file 11 stores layout data of a semiconductor device created in advance by circuit design and layout design by a CAD device (not shown). The second data file 12 is a work file,
Is the temporary data created during the overlap detection process.
It is stored in the data file 12. Note that the second data file 12 may be created in the memory 3 of FIG.

The third data file 13 shown in FIG. 1 is stored in the memory 3 in FIG. The third data file 13 is a file for storing processing results of the overlap detection processing. The CPU 2 stores the overlapped pattern data detected by executing the overlap detection processing and the cell name of the cell including the pattern data in the third data file 13 as overlap information. Note that the third data file 13 may be created in the magnetic disk device 4 of FIG.

Next, the graphic processing (overlap detection processing) will be described with reference to the flowcharts of FIGS. CPU2
Performs graphic processing (overlap detection processing) in accordance with steps 21 to 28 shown in the flowchart of FIG.

First, step 21 is an area frame creation process (area frame creation means). The CPU 2 of FIG. 3 inputs the layout data stored in the first data file 11. With respect to the layout data, the CPU 2 sets the existence area including all the patterns when each cell is developed in each layer in each hierarchy from the bottom up (in order from the bottom layer to the top layer). Then, the CPU 2 sets a boundary line (a line surrounding the existence region) of the existence region of each set hierarchy as a cell frame. Each cell has a cell frame. CPU2
Stores the data of the set cell frame and the data of the pattern in the second data file 12.

For example, as shown in FIG. 4, there is layout data 40 arranged in a hierarchical structure. The layout data 40 includes a cell AAA in the uppermost layer. Cell AA
A includes a cell BBB and a cell CCC provided in a lower layer. Cell BBB and cell CCC are provided in the same hierarchy,
The cells have different layout data. Further, cell BB
B includes a cell DDD provided in a lower layer, and the cell DDD
DD includes the pattern PD1 provided in the lower layer. Cell C
CC includes patterns PC1 and PC2 provided in the lower layer. The patterns PD1 and PD2 have different shapes, and are provided on the same level as the cell DDD.

FIG. 5 is an explanatory diagram showing the cell frames of each layer created by the area frame creating process. In order to make the relationship between the cells and the created cell frames easy to understand, the same reference numerals as those of the cells are given to the cell frames. In each layer, the cells and patterns one layer below the cell included in the cell are indicated by broken lines.

The CPU 2 shown in FIG.
In response to this, cell frames in each layer are created from the bottom up. That is, the CPU 2 first sets, for the pattern PD1 existing in the lowermost layer, an area including the pattern PD1 and in which the upper-layer cell DDD exists. Then, the CPU 2 sets the cell frame D, which is the frame of the set existence area.
Create a DD. Therefore, the cell DDD has the cell frame DDD and includes the pattern PD1.

Similarly, the CPU 2 sets, for the cell DDD, an area including the cell DDD and in which the cell BBB in the upper layer exists, and sets the cell frame B as the frame of the set existing area.
Create BB. Therefore, the cell BBB has the cell frame BBB and includes the cell DDD.

The CPU 2 applies the pattern PC1 to the patterns PC1 and PC2 of the same hierarchy as the cell DDD.
An area including the PCC1 and the cell CCC in the upper layer is set, and a cell frame CCC which is a frame of the set existing area is created. Therefore, the cell CCC has the cell frame CCC and includes the patterns PC1 and PC2.

Further, the CPU 2 includes the cells BBB and CCC for the cells BBB and CCC, and
An area where the AA exists is set, and a cell frame AAA which is a frame of the set existing area is created. Therefore, the cell AAA has a cell frame AAA and includes cells BBB and CCC.

Then, the CPU 2 creates the cell frame AA
The information of A, BBB, CCC, and DDD is stored in the second data file 12 of FIG. Further, the CPU 2 executes the patterns PC1, PC2, PD included in the layout data 40.
1 is stored in the second data file 12.

The information stored for each of the cell frames AAA to DDD includes the coordinate values of each of the cell frames AAA to DDD, values of existing layers, and the like. The information stored for each of the patterns PC1 to PD1 includes the coordinate value of each pattern, the value of the existing hierarchy, and the like.

After storing the information on the cell frame and pattern created for the layout data, the CPU 2 proceeds from step 21 to step 22 in FIG. Step 22 is processing target cell setting processing (processing target cell setting means), and the CPU 2 in FIG. 3 selects a cell (cell frame) to be subjected to the overlap detection processing from time to time among all the cells constituting the layout data. Select The CPU 2 treats the selected cell as a processing target cell. The CPU 2 repeatedly executes the processing of steps 23 to 25 (executes the loop of steps 23 to 25) on the cells and patterns constituting the hierarchical structure with the processing target cell as the top layer, and performs the top down (processing of the top layer). The program is configured to determine whether there is an overlap (in order from the target cell toward the lower layer). After setting the processing target cell at that time, the CPU 2 proceeds to step 23 from step 22.

Step 23 is a data reading process (data reading means). The CPU 2 reads from the second data file 12 information on layout layout data included in the focused cell. The information includes a cell one level below the cell of interest (hereinafter referred to as a child cell) and pattern frame data. The frame data is the coordinates of the cell frame,
Contains the coordinate values of the outer shape of the pattern. When the reading of the necessary frame data is completed, the CPU 2 proceeds from step 23 to step 24.

The cell of interest at that time is stored in step 22
Is one of the cells constituting the hierarchical structure with the processing target cell set at the uppermost layer. CPU2
In addition, among the cells constituting the hierarchical structure, the cells of interest are set in order from the cell of the highest hierarchical level. For example, in FIG. 4, when the cell AAA is set as a processing target cell, the CPU 2 selects the cell AAA → the cell BBB → the cell DDD.
→ Set the cell of interest in the order of the cells CCC. Also, CPU2
Is a cell BBB when the cell BBB is a processing target cell.
The target cell is set in the order of BB → cell CCC, and the cells AAA and CCC are not focused on.

Accordingly, in executing the loop of steps 23 to 25, first, in the first loop, the CPU 2 reads the frame data of the cell frame and pattern included in the cell to be processed in the uppermost hierarchy. In the second and subsequent loops, the CPU
Reference numeral 2 sequentially reads cell data and pattern data included in the lower hierarchy from the processing target cell.

The child cell means not only a cell one layer below the cell to be processed, but also a cell one layer below the cell of interest at each time. Conversely, a cell including a cell of interest at each time is referred to as a parent cell. For example, in the layout data 40 of FIG. 4, when attention is paid to the cell BBB at that time, the cell BBB is a child cell of the cell AAA, and the parent cell of the cell BBB is the cell AAA. If attention is paid to the cell DDD at that time, the cell DDD is
It is a child cell of B and the parent cell of cell DDD is cell BBB.

Step 24 is a type setting process (type setting means). The CPU 2 shown in FIG. 3 executes the structure (cell, pattern, etc.) that constitutes the data of the hierarchical structure with the processing target cell set in step 22 as the top layer. (Hereinafter, referred to as a structure), the type is set according to steps 31 to 37 shown in the flowchart of FIG.

First, in step 31, the CPU 2
Determines whether the structure is a cell or a pattern. CP
U2 is a step 32 if the structure is a pattern
Move on to In step 32, the CPU 2 sets, for the pattern, the same type as the cell to which the pattern belongs. A cell belonging to a pattern refers to an upper cell having the pattern.

If the structure is not a pattern in step 31, that is, if the structure is a cell, the CPU
2 moves from step 31 to step 33. In step 33, the CPU 2 determines whether or not the cell is a processing target cell. When the cell is the processing target cell, the CPU 2 proceeds from step 33 to step 34. Step 3
In 4, the CPU 2 sets a unique type for the cell.

If it is determined in step 33 that the cell that is the structure is not the processing target cell, the CPU 2 proceeds from step 33 to step 35. In step 35,
The CPU 2 determines whether or not the cell to which the structure belongs is a processing target cell. The cell to which a structure belongs is a cell containing the structure, that is, a cell one level above the structure and a parent cell of the structure. CPU2
When the belonging cell is the processing target cell, the process proceeds from step 35 to step 36. In step 36, the CPU 2
Set your own type for the structure.

If the belonging cell is not the cell to be processed in step 35, the CPU 2 proceeds from step 35 to step 37. In step 37, the CPU 2 sets the same type as that of the belonging cell for the structure.

The above type setting processing will be described with reference to FIG. Here, the case where the cell AAA is set as the processing target cell will be described. Structure is pattern PD
In the case of 1, the CPU 2 sets the same type as the cell to which the pattern PD1 belongs to the pattern PD1 in step 32 of FIG. The cell belonging to pattern PD1 is cell DD.
D. Therefore, the CPU 2 sets the same type as the cell DDD as the belonging cell for the pattern PD1.

Similarly, when the structure is the pattern PC1,
In the case of PC2, the cell to which the patterns PC1 and PC2 belong is the cell CCC. Therefore, the CPU 2 sets the same type as the cell CCC belonging to the patterns PC1 and PC2 in step 32 of FIG.

When the structure is a cell DDD,
The cell DDD is not a processing target cell. Also, cell D
The cell BBB which is the cell to which the DD belongs is not a processing target cell. Therefore, the CPU 2 sets the same type as the cell BBB belonging to the cell DDD in step 37 of FIG.

When the structure is a cell BBB,
The cell BBB is not a processing target cell. Also, cell B
Cell AAA, which is the cell to which BB belongs, is the cell to which it belongs. Accordingly, CPU 2 determines in step 36 of FIG.
A unique type is set for BB.

Similarly, when the structure is a cell CCC, the cell CCC is not a processing target cell. The cell AAA, which is a cell belonging to the cell CCC, is a cell belonging to the cell CCC. Therefore, the CPU 2 sets a unique type for the cell CCC in step 36 of FIG.

Further, when the structure is a cell AAA, the cell AAA is a cell to be processed. Therefore, C
The PU2 sets a unique type for the cell AAA in step 34 of FIG.

The setting of the type is performed by writing data indicating the type in a predetermined area for the data of each structure. FIG. 6 is an explanatory diagram showing data of a structure constituting the layout data 40 of FIGS.

Each structure constituting each layer of the pattern PD1 from the cell AAA has a data area 41, respectively.
To 47 are set. These data areas 41 to 4
7 is created in the memory 3, for example, in the area frame creation processing in step 21 of FIG. Data area 4
1 to 47 may be created prior to execution of the graphic processing program. Further, the data area may be created in the processing target cell setting processing in step 22. In this case, the data area may be created only for the structure configuring the hierarchical structure with the processing target cell to be set as the uppermost layer. .

Each of the data areas 41 to 47 includes first and second areas 48 and 49, respectively. The first area 48 is provided for writing the type of structure (cell frame or pattern) and the type set for each structure.
In the first area 48, information indicating the processing target cell set in step 22 of FIG. 1 is written. The second area 49 is provided for storing a pointer to a cell belonging to each structure. The pointer is, for example, an address indicating a data area of a cell belonging to each structure. With this pointer, the cell to which each structure belongs can be easily determined.

When the type setting process in step 24 in FIG. 1 is completed, the CPU 2 in FIG. Step 25 is a first overlap determination process (first overlap determination means), which is a cell frame overlap determination process for determining whether or not a cell frame has an overlap. In step 25, in the frame data read in step 23, if the frame data is information of a cell frame, the CPU 2 checks the overlap of the cell frames. The cell frame overlap is a case where a cell frame overlaps with another cell frame or a cell frame overlaps with a pattern. If there is an overlap in the cell frame, the CPU 2 returns from step 25 to step 23, where the child cell frame of the cell,
Load a pattern. That is, the CPU 2 reads the frame data of the next lower layer of the overlapping cell frame. The CPU 2 checks in step 25 whether the cell frames overlap. Then, when there is no overlap in the cell frames, the CPU 2 proceeds from step 25 to step 26.

Therefore, the CPU 2 executes steps 23 to 25
Is repeated in the direction in which the hierarchy becomes deeper, that is, from the processing target cell to the lower layer until the cell frames no longer overlap. Then, when the cell frame no longer overlaps, the CPU 2
Moves from step 25 to step 26.

Step 26 is a second overlap judging process (second
Overlap determination means), which is a pattern overlap determination process for determining whether or not the patterns have overlap. In step 26, if there is an overlap between the patterns, the CPU 2 in FIG. 3 proceeds from step 26 to step 27.

Step 27 is an overlap determination process (overlap determination means), and the CPU 2 in FIG. 3 determines the overlap with respect to the pattern determined to have an overlap in step 26. The CPU 2 stores the determined pattern information in the third data file 13 as overlap information. The overlap information is information indicating a pattern having an overlap, and includes a cell name of a cell including the pattern, a hierarchy in which the pattern exists, a coordinate value of the pattern, and the like.

If there is no overlap between the patterns in step 26 of FIG. 1, the CPU 2 proceeds from step 26 to step 28. Step 28 is an end determination process,
The CPU 2 in FIG. 3 determines whether or not the overlap detection processing has been performed on all the cells. For this determination, the information of the processing target cell set in step 22 is used. The CPU 2 determines whether or not all the cells constituting the layout data have been set as the processing target cells. CPU
In the case of No. 2, if all the cells are not set as the processing target cells, the process proceeds from step 28 to step 22. Then, the loop from step 22 to step 27 is repeatedly executed until there are no cells not set as the processing target cells, and the overlap detection processing is performed with all the cells as the processing target cells.

When the processing of all the cells is completed in step 28, that is, when the processing of judging the overlapping of the patterns with all the cells as the processing target cells is completed, the CPU 2 ends the graphic processing.

The overlap information stored in the third data file 13 in the above-described graphic processing (overlap detection processing)
It is used for layout verification and EB data creation processing.
For example, in the layout verification, the third data file 13
Based on the overlapping information stored in, a graphic logic process is performed on the overlapping graphic, and a graphic required for verification is created. In the EB data creation processing, exposure data is created based on the overlap information stored in the third data file 13 by removing the overlap of layout data having overlaps. According to the exposure data, the exposure time can be reduced and the influence on the surroundings can be eliminated by the amount of no overlap.

In the layout verification, EB data creation processing, and the like, since information on the overlapping patterns is created in advance, it is not necessary to check the overlap for all cells. In addition, there is no need to expand all layout data and create a new cell having no overlap as in the related art. Therefore, the processing time can be shortened and the amount of resources can be reduced.

Next, the above-described graphic processing (overlap detection processing)
Will be described with reference to FIGS. FIG. 7 is an explanatory diagram showing the hierarchical structure of the layout data 51. FIG.
FIG. 7 is a layout diagram showing a state where layout data 51 is developed. FIG. 9 is a layout diagram showing structures included in each layer of the layout data 51.

The layout data 51 includes a cell A in the uppermost layer.
AA is provided. The cell AAA includes two cells BBB of the same layout provided in the lower layer. Note that, in order to distinguish cells having the same layout, in the following description, numerals in parentheses are given to the reference numerals of the cells. Therefore, the cell AAA includes cells BBB (1) and BBB (2).

The cells BBB (1) and BBB (2) correspond to two cells CCC (11) and CC
C (12), CCC (21) and CCC (22). Each of the cells CCC (11) to CCC (22) includes two cells DDD (111), DD provided in the lower layer, respectively.
D (112) to DDD (221) and DDD (222). Further, each of the cells DDD (111), DDD (11
2) to DDD (221) and DDD (222) each include two patterns PD1 and PD2 (see FIG. 9) provided in lower layers.

In FIG. 9, hatching is applied to structures having an overlap in each layer. Cell AA
Cells BBB (1) and BBB (2) included in A overlap each other. Also, the cell CCC included in each cell BBB
(1) and CCC (2) overlap. Furthermore, cells DDD (1) and DDD (2) included in each cell CCC overlap. The patterns PD1 and PD2 included in each cell DDD do not overlap.

FIG. 8 shows hatched structures that overlap when all the hierarchies are expanded. As shown in FIG. 8, the patterns PD1 and PD2 included in the cell DDD (111) overlap with the pattern PD1 included in the cell DDD (112). Cell DDD (112)
And the pattern PD2 included in the cell DDD (121) overlaps. Cell DDD (1
21) and the cell DDD (12
The patterns PD1 and PD2 included in 2) overlap. Further, the pattern P included in the cell DDD (122)
D2 and pattern PD included in cell DDD (211)
1. The pattern PD1 included in the cell DDD (122) and the pattern PD2 included in the cell DDD (211) overlap. Pattern P included in cell DDD (211)
D1 and PD2 overlap the pattern PD1 included in the cell DDD (212). The pattern PD2 included in the cell DDD (212) and the pattern PD2 included in the cell DDD (221) overlap. Cell DDD (221)
And the patterns PD1 and PD2 included in the cell DDD (222) overlap.

The graphic processing on the layout data 51 will be described. [When the cell DDD is set as the processing target cell] The CPU 2 is used for each structure constituting the hierarchical structure with the cell DDD (111) set as the processing target cell as the top hierarchy.
Sets the type as follows.

First, the CPU 2 sets the type in the cell DDD (111). The cell DDD (111) is a processing target cell. Therefore, the CPU 2 sets the unique type [DDD (111)] in the cell DDD (111).

Next, the CPU 2 sets the cell DDD (111)
, The cell DDD (111) which is the cell to which the patterns PD1 and PD2 belong
The same type [DDD (111)] is set.

The CPU 2 repeatedly executes the loop of steps 23 to 25 in the graphic processing of FIG. 1 to detect an overlap. In the first loop, first, the CPU 2
The frame data included in the cell DDD (111) is
Read from the data file 12. As shown in FIG. 10, the cell DDD (111) includes patterns PD1 and DP2. Therefore, the CPU 2 reads the frame data of the patterns PD1 and PD2 from the second data file 12.

Since the cell DDD (111) does not include a cell, there is no cell frame to be read next. Therefore, the CPU 2
The overlap is determined in the patterns PD1 and PD2. In this case, since there is no overlap between the patterns PD1 and PD2,
The CPU 2 determines “no overlap” in the cell DDD (111).

Further, the CPU 2 sets the cell DDD (112)
To DDD (222), the same processing as in cell DDD (111) is performed. Then, the CPU 2 checks each cell DD
In D (112) to DDD (222), the cell DDD
As in (111), it is determined that there is no overlap.

[When Cell CCC is Set as Processing Target Cell] For each structure constituting the hierarchical structure with the cell CCC (11) set as the processing target cell as the uppermost layer, the CPU 2 has the following types. Set.

First, the CPU 2 sets the type in the cell CCC (11). The cell CCC (11) is a processing target cell. Therefore, the CPU 2 sets a unique type [CCC (11)] in the cell CCC (11).

Next, the CPU 2 sets the type in the cells DDD (111) and DDD (112) included in the cell CCC (11). Cells DDD (111) and DDD (11
The cell CCC (11), which is the cell belonging to 2), is a processing target cell. Therefore, the CPU 2 sets a unique type for each cell. That is, the CPU 2 assigns the unique type [DDD (111)] to the cell DDD (111)
A unique type [DDD (112)] is set for (112).

Further, the CPU 2 checks the cell DDD (111)
, The cell DDD (111) which is the cell to which the patterns PD1 and PD2 belong
The same type [DDD (111)] is set. Also, C
PU2 is the pattern P included in the cell DDD (112).
For D1 and PD2, the same type [DDD] as the cell DDD (112) that is the cell to which the patterns PD1 and PD2 belong.
(112)] is set.

The CPU 2 repeatedly executes the loop of steps 23 to 25 in the graphic processing of FIG. 1 to detect an overlap. In the first loop, first, the CPU 2
The frame data included in the cell CCC (11) is read from the second data file 12 in FIG. As shown in the upper part of FIG. 11, the cell CCC (11) includes the cells DDD (111), DDD
DD (112). Therefore, the CPU 2 determines that the cell DD
The frame data of D (111) and DDD (112) are read from the second data file 12.

Next, the CPU 2 reads the read cell DDD
It is determined whether the frame data of (111) and DDD (112) overlap. Cells DDD (111) and DDD (11
The cell frame of 2) has an overlap as shown in the upper part of FIG. In addition, cells DDD (111) and DDD (112)
Are different from each other because their own types are set.

Therefore, in the second loop, the CPU
2 reads the frame data of the structure constituting each of the cells DDD (111) and DDD (112). FIG.
1, cells DDD (111), DDD
(112) includes patterns PD1 and PD2, respectively. Therefore, the CPU 2 determines that the cells DDD (111), DD
The frame data of the patterns PD1 and PD2 of D (112) are read from the second data file 12.

Cell DDD (111), DDD (112)
Contains no cells, so there is no next cell frame to read. Therefore, the CPU 2 determines that each of the cells DDD (111), DDD
The overlap is determined in the patterns PD1 and PD2 included in (112).

In this case, as shown in the lower part of FIG. 11, the patterns PD1 and PD2 of the cell DDD (111) overlap with the pattern PD1 of the cell DDD (112). Also, the patterns PD1 and PD2 of the cell DDD (111)
And the pattern PD1 of the cell DDD (112) is of a different type. Therefore, the CPU 2 determines that "there is an overlap" in the cells DDD (111) and DDD (112).
Then, the CPU 2 determines that the cell DDD (11
1) and the cells DDD (11
2) The overlapping information of the pattern PD1 is stored in the third data file 13 of FIG.

When the cell CCC (12) in FIG. 7 is set as the processing target cell, the CPU 2 sets the cell CCC (11)
Operates in the same manner as when is set as the processing target cell. That is, the CPU 2 sets the type for each structure constituting the hierarchical structure having the cell CCC (2) as the uppermost hierarchy. Then, the CPU 2 determines the cell DDD (121) in FIG.
And the overlap in the cell DDD (122) is detected. Then, the CPU 2 determines that the overlapped cell DDD (121)
Is stored in the third data file 13 of FIG. 1 with the overlap information of the pattern PD1 and the patterns PD1 and PD2 of the cell DDD (122).

When the cell CCC (21) is set as the processing target cell, the CPU 2 operates in the same manner as when the cell CCC (11) is set as the processing target cell. That is, C
The PU2 sets the type for each structure constituting the hierarchical structure with the cell CCC (21) as the uppermost hierarchy.
Then, the CPU 2 detects an overlap between the cell DDD (211) and the cell DDD (212) in FIG. Then, the CPU 2 stores, in the third data file 13 in FIG. 1, the overlap information of the patterns PD1 and PD2 of the overlapping cell DDD (211) and the pattern PD1 of the cell DDD (212).

Further, when the cell CCC (22) is set as the processing target cell, the CPU 2 operates in the same manner as when the cell CCC (11) is set as the processing target cell. That is, C
The PU2 sets the type for each structure constituting the hierarchical structure with the cell CCC (22) as the uppermost hierarchy.
Then, the CPU 2 detects an overlap between the cell DDD (221) and the cell DDD (221) in FIG. Then, the CPU 2 determines the pattern PD1 of the cell DDD (221) having the overlap and the pattern P1 of the cell DDD (222).
The overlap information of D1 and PD2 is stored in the third data file 13 of FIG.

[When cell BBB is set as a processing target cell] For each structure forming a hierarchical structure with the cell BBB (1) set as the processing target cell as the top level,
The CPU 2 sets the type as follows.

First, the CPU 2 sets the type in the cell BBB (1). Cell BBB (1) is a processing target cell. Therefore, the CPU 2 sets a unique type [BBB (1)] in the cell BBB (1).

Next, the CPU 2 sets the type in the cells CCC (11) and CCC (12) included in the cell BBB (1). The cell BBB (1) which is a cell belonging to the cells CCC (11) and CCC (12) is a processing target cell. Therefore, the CPU 2 assigns unique types [CCC (11)] and [CCC] to the cells CCC (11) and CCC (12), respectively.
C (12)].

Next, the CPU 2 sets the type for the cells DDD (111) and DDD (112) included in the cell CCC (11). Cell DDD (111), DDD
The cell belonging to (112) is the cell CCC (11), and this cell CCC (11) is not a processing target cell. Therefore, the CPU 2 determines that the cells DDD (111) and DDD (11
In 2), the same type [CCC (11)] as the cell CCC (11), which is the belonging cell, is set. Similarly, the CPU 2
Cell DDD (121) included in cell CCC (12),
The same type [CCC (12)] as the belonging cell CCC (12) is set for the DDD (122).

Further, the CPU 2 sets the cell DDD (111)
, The cell DDD (111) which is the cell to which the patterns PD1 and PD2 belong
The same type [CCC (11)] is set. Also, CP
U2 is a pattern PD included in the cell DDD (112).
1 and PD2, the same type [CCC (1) as the cell DDD (112) that is the cell to which the patterns PD1 and PD2 belong.
2)] is set.

The CPU 2 repeatedly executes the loop of steps 23 to 25 in the graphic processing of FIG. 1 to detect an overlap. In the first loop, first, the CPU of FIG.
2 reads the frame data of the structure included in the cell BBB (1) from the second data file 12 in FIG. As shown in the upper part of FIG. 12, the cell BBB (1)
C (11) and CCC (12). Therefore, CPU2
Reads the frame data of the cells CCC (11) and CCC (12) from the second data file 12.

Next, the CPU 2 reads the read cell CCC
(11) It is determined whether or not the frame data of the CCC (12) overlap. As shown in the upper part of FIG. 12, the cell CCC (1
The cell frames of 1) and CCC (12) have an overlap. Also, the cells CCC (11) and CCC (12) are set to unique types, and therefore have different types.

Therefore, in the second loop, the CPU
2 reads the frame data of the structure contained in each of the cells CCC (11) and CCC (12). FIG.
As shown in the middle of FIG. 2, the cell CCC (11)
DD (111) and DDD (112). Cell CCC
(12) includes cells DDD (121) and DDD (122). Accordingly, the CPU 2 determines that the cells DDD (111) to DDD (111)
The DD (122) frame data is read from the second data file 12.

Next, the CPU 2 reads the read cell DDD
It is determined whether the frame data of (111) to DDD (122) overlap. As shown in the middle part of FIG.
There is an overlap between the cell frame of (111) and the cell frame of the cell DDD (112). Cell DDD (112) and Cell DDD (121)
Cell frames have overlap. Further, the cell DDD (12
1) and the cell frame of the cell DDD (122) overlap.

However, cell DDD (111) and cell DD
Each type of D (112) is a type [CCC (11)]
And the same. In addition, the types of the cell DDD (121) and the cell DDD (122) are respectively the type [CCC (1
2)] and are the same. Therefore, the CPU 2 determines that the cells DDD (111) and DDD (112) of the same type
It is determined that there is no overlap between the cells DDD (121) and DDD (122).

On the other hand, cell DDD (112) and cell DDD
(121) is of type [CCC (11)],
[CCC (12)], which is different. Therefore, CPU2
Determines that there is "overlapping" between the cells DDD (112) and DDD (121).

Therefore, in the third loop, the CPU
2 is the cell DDD (11
2), the frame data of the structure included in the DDD (121) is read from the second data file 12. That is, as shown in the lower part of FIG.
12), the frame data of the patterns PD1 and PD2 included in the DDD (121) are read from the second data file 12.

At this time, the CPU 2 does not read the frame data of the structures contained in the cells DDD (111) and the cells DDD (122) determined to be “no overlap”. That is, the CPU 2 does not read the frame data included in the cell determined as “no overlap”. Therefore, the usage amount of resources such as the memory 3 is all (cells DDD (111) to
(Frame data of (122)).

Cell DDD (112), DDD (121)
Contains no cells, so there is no next cell frame to read. Therefore, the CPU 2 determines that each of the cells DDD (112), DDD
The overlap is determined in the patterns PD1 and PD2 included in (121).

In this case, as shown in the lower part of FIG. 12, the pattern PD2 of the cell DDD (112) and the cell DDD
The pattern PD2 of (121) has an overlap. The pattern PD2 of the cell DDD (112) and the cell DDD
The pattern PD2 of (121) is of type [C
CC (11)] and [CCC (12)]. Therefore, the CPU 2 sets the cell DDD (112) and the cell DDD
At (121), it is determined that "overlap exists", that is, the overlap between the cell DDD (112) and the cell DDD (121) is detected. . Then, the CPU 2 compares the pattern PD2 of the overlapping cell DDD (112) with the cell DDD.
The overlapping information of the pattern PD2 of (121) is the third information in FIG.
It is stored in the data file 13.

When the cell BBB (2) in FIG. 7 is set as the processing target cell, the CPU 2 operates in the same manner as when the cell BBB (1) is set as the processing target cell. That is, C
The PU2 sets the type for each structure constituting the hierarchical structure with the cell BBB (2) as the uppermost hierarchy. Then, the CPU 2 detects an overlap between the cell DDD (212) and the cell DDD (221) in FIG. And
The CPU 2 calculates the pattern PD2 of the overlapping cell DDD (212) and the pattern PD2 of the cell DDD (221).
Is stored in the third data file 13 of FIG.

[When the Cell AAA is Set as the Processing Target Cell] The CPU constituting each of the structures constituting the hierarchical structure with the cell AAA set as the processing target cell as the top level
2 sets the type as follows.

First, the CPU 2 sets the type in the cell AAA. Cell AAA is a processing target cell. Therefore, C
The PU2 sets a unique type [AAA] in the cell AAA. Next, the CPU 2 checks the cell BB included in the cell AAA.
The type is set for B (1) and BBB (2). Cell AA which is a cell belonging to cells BBB (1) and BBB (2)
A is a cell to be processed. Therefore, the CPU 2 sets the cell BB
Unique types [BBB (1)] and [BBB (2)] are set for B (1) and BBB (2), respectively.

Next, the CPU 2 sets the type for the cells CCC (11) and CCC (12) included in the cell BBB (1). The cell BBB (1) which is a cell belonging to the cells CCC (11) and CCC (12) is not a processing target cell. Therefore, the CPU 2 sets the cells CCC (11), CCC
For (12), the same type [BBB (1)] as the cell BBB (1) that is the belonging cell is set. Similarly, CPU2
Are the cells CCC (11) included in the cell BBB (2),
For the CCC (12), the same type [BBB (2)] as the belonging cell BBB (2) is set.

Next, the CPU 2 sets the type for the cells DDD (111) and DDD (112) included in the cell CCC (11). At this time, the cells DDD (111),
Cell CCC (11) which is a cell belonging to DDD (112)
Is not a processing target cell. Therefore, the CPU 2 determines that the cell D
The same type [BBB (1)] as the cell CCC (11), which is a cell belonging to, is set in DD (111) and DDD (112).

Similarly, CPU 2 sets cell CCC (12)
Of the cell DDD (121) and DDD (122) included in the cell CCC (12), which is the cell to which the cell belongs, is not the processing target cell.
BB (1)] is set. Further, the CPU 2 executes the cell CC
Cells DDD (211), DDD included in C (21)
In response to (212), the cell CCC (2
Since cell 1) is not a processing target cell, cell CCC (21)
The same type [BBB (2)] is set. Furthermore, CPU
2 is a cell DDD (22) included in the cell CCC (22).
1) and DDD (222), since the cell CCC (22), which is the belonging cell, is not a processing target cell,
The same type [BBB (2)] as C (22) is set.

Further, the CPU 2 sets the cell DDD (111)
, The cell DDD (111) which is the cell to which the patterns PD1 and PD2 belong
The same type [BBB (1)] is set. Also, CPU
2 is a pattern PD included in the cell DDD (112).
1 and PD2, the same type [BBB] as the cell DDD (112) that belongs to the patterns PD1 and PD2.
(1)] is set.

Similarly, the CPU 2 sets the cell DDD (12
1), pattern P included in DDD (122)
The same type [BBB (1)] is set for D1 and PD2 as the cells DDD (121) and DDD (122) that belong to the patterns PD1 and PD2. Furthermore, CPU2
Is a cell DDD (211) which is a cell belonging to the patterns PD1 and PD2 with respect to the patterns PD1 and PD2 included in the cells DDD (211) to DDD (222), respectively.
The same type [BBB (2)] as that of DDD (222) is set.

The CPU 2 repeatedly executes the loop of steps 23 to 25 in the graphic processing of FIG. 1 to detect an overlap. In the first loop, first, the CPU 2
The frame data of the structure included in the cell AAA is read from the second data file 12 of FIG. As shown at the top of FIG. 13, cell AAA is composed of cells BBB (1), BBB
(2) is included. Therefore, the CPU 2 determines that the cell BBB
The frame data of (1) and BBB (2) is read from the second data file 12.

Next, the CPU 2 reads the read cell BBB
It is determined whether or not the frame data of (1) and BBB (2) overlap. As shown in the upper part of FIG. 13, cells BBB (1),
The cell frame of BBB (2) has an overlap. Further, the cells BBB (1) and BBB (2) are set to unique types, respectively, and thus have different types.

Therefore, in the second loop, the CPU
2 reads the frame data of the structure included in the cell BBB (1) from the second data file 12 in FIG. As shown in the second row of FIG. 13, the cell BBB (1)
CC (11), CCC (12), CCC (21), CC
C (22). Therefore, the CPU 2 sets the cell CCC
(11) to read the frame data of CCC (22) from the second data file 12.

Next, the CPU 2 reads the read cell CCC
It is determined whether the frame data of (11) to CCC (22) overlap. As shown in the second row of FIG.
There is an overlap between the cell frame of (11) and the cell frame of the cell CCC (12). The cell frames of the cell CCC (12) and the cell CCC (21) have an overlap. Further, the cell frames of the cell CCC (21) and the cell CCC (22) have an overlap.

However, the cell CCC (11) and the cell CCC
The types of (12) are the types [BBB (1)], which are the same. Also, the cell CCC (21) and the cell CCC
The type of (22) is the type [BBB (2)], which is the same. Therefore, the CPU 2 sets the cell CCC (2) between the cells CCC (11) and CCC (12) of the same type.
1) It is determined that there is no overlap between the CCC (22).

On the other hand, cell CCC (12) and cell CCC
The types of (21) are types [BBB (1)] and [B
BB (2)]. Therefore, the CPU 2 determines that "there is an overlap" between the cells CCC (12) and CCC (21).

Therefore, in the third loop, the CPU
2 is a cell CCC (12) determined to have “overlapping”,
The frame data of the structure included in the CCC (21) is read. As shown in the third row of FIG.
The CC (12) includes cells DDD (121) and DDD (12
2). Cell CCC (21) is connected to cell DDD (21
1), DDD (212). Therefore, the CPU 2
Cells DDD (121), DDD (122), DDD (2
11), the frame data of DDD (212) is read from the second data file 12.

Next, the CPU 2 reads the read cell DDD
(121), DDD (122), DDD (211), D
It is determined whether or not the DD (212) frame data has an overlap.
As shown in the third row of FIG. 13, the cell frames of the cell DDD (121) and the cell DDD (122) have an overlap. The cell frames of the cell DDD (122) and the cell DDD (211) have overlap. Further, the cell frames of the cell DDD (211) and the cell DDD (212) have an overlap.

However, cell DDD (121) and cell DD
The type of D (122) is the type [BBB (1)], which is the same. Also, cell DDD (211) and cell D
Each type of DD (212) is a type [BBB (2)]
And the same. Therefore, the CPU 2 determines whether the cell DDD (121) and the cell DDD (122) of the same type
It is determined that there is no overlap between DD (211) and DDD (212).

On the other hand, cell DDD (122) and cell DDD
The types of (211) are type [CCC (11)],
[CCC (12)], which is different. Therefore, CPU2
Determines that there is an overlap between the cells DDD (112) and DDD (211).

Therefore, in the fourth loop, the CPU
2 is the cell DDD (11
2) The frame data of the structure included in the DDD (211) is read from the second data file 12. That is, C
PU2 has a cell DDD as shown at the bottom of FIG.
(112) and the frame data of the patterns PD1 and PD2 included in the DDD (211), respectively.
Read from 2.

At this time, the CPU 2 does not read the frame data of the structures included in the cell DDD (121) and the cell DDD (212) determined as “no overlap”. That is, the CPU 2 does not read the frame data included in the cell determined as “no overlap”. Therefore, the usage amounts of resources such as the memory 3 are all (cells DDD (111) to DDD (2
12) compared to reading frame data).

Cell DDD (112), DDD (211)
Contains no cells, so there is no next cell frame to read. Therefore, the CPU 2 determines that each of the cells DDD (112), DDD
The overlap is determined in the patterns PD1 and PD2 included in (211).

In this case, as shown at the bottom of FIG.
The pattern PD2 of the cell DDD (122) and the cell DDD
The pattern PD1 of (211) has an overlap. The pattern PD1 of the cell DDD (122) and the cell DDD
The pattern PD2 of (211) has an overlap.

The pattern PD1 of the cell DDD (122) and the pattern PD1 of the cell DDD (211) are different types [CCC (11)] and [CCC (12)], respectively. The pattern P of the cell DDD (122)
D2 and the pattern PD2 of the cell DDD (211) have types [CCC (11)] and [CCC (12)], respectively.
Is different.

Therefore, the CPU 2 sets the cell DDD (112)
And the cell DDD (211) determines that there is an overlap. Then, the CPU 2 determines that the overlapping cell DDD
(112) pattern PD2, PD1 and cell DDD
The overlapping information of the patterns PD1 and PD2 of (211) is stored in the third data file 13 of FIG.

By the above processing, all the overlaps can be detected without overlapping, so that the time required for the processing is short. In addition, for cells that have an overlap, when each cell is of the same type, it is determined that there is no overlap, and the structure included in the cell is not read, so that the number of data to be read is reduced and resources are insufficient. Nothing.

By the way, in the conventional method, since the type is not set, the frame determined as “no overlap” in the present embodiment is operated as “with overlap”. For example, in the second row of FIG. 13, the cell CCC (11) and the cell CC
C (12), cell CCC (21) and cell CC (22) have conventionally been determined to be "overlapping". As a result, extra overlap is also checked, and the processing takes time.
In addition, in order to make “no overlap”, there is a method of creating data (new cell) from which overlap has been removed in advance, but a resource (disk) is used to create data with overlap removed. Resources, etc.), and processing takes time.

However, in the present embodiment, the type is set for each cell frame, and the frames of the same type are processed as “no overlap”, so that no extra overlap is checked, so that the processing time is short. Become. Also, do not read the structure contained in the cell frame determined as "no overlap",
That is, since the cell frame determined as “no overlap” is not expanded, the number of data to be processed at each time is reduced, and the required resource amount is reduced. Furthermore, there is no need to create data from which overlap has been removed in advance. Therefore, there is no shortage of resources, and the processing time is shortened.

[Overlap Detection Processing Using Sweep Method] Next, the case where the overlap detection processing is executed using the sweep method will be described with reference to FIGS. The sweep method is
This is an effective method for detecting a state such as a shape of a figure or an overlap, and is generally used.

FIG. 14 is an explanatory diagram showing the hierarchical structure of the layout data 61. FIG. 15 shows the layout data 6
FIG. 2 is a layout diagram showing a state in which No. 1 is developed. FIG.
9 is a layout diagram showing structures included in each layer of the layout data 61. FIG.

As shown in FIG. 14, layout data 6
1 has a cell TOP in the uppermost layer. The cell TOP is composed of two cells of the same layout, AAA, which are provided in the lower layer.
(1), AAA (2), and cell BBB. Cell AA
A (1) includes cell CCC (1) and cell AAA (2)
Includes cell CCC (2). Each cell CCC (1), CC
C (2) includes a cell EEE and a pattern PC1 (see FIG. 16). Cell EEE has patterns PE1 and PE
2 inclusive.

The cell BBB includes two cells DDD (1) and DDD (2) having the same layout and a pattern PB1,
PB2 (see FIG. 16). Cell DDD includes patterns PD1 and PD2 (see FIG. 16).

In FIG. 16, hatching is applied to structures having an overlap in each layer. Cell T
Cells AAA (1), AAA (2), BB included in OP
B overlaps. The cells DDD (1) and DDD (2) included in the cell BBB overlap.

FIG. 15 shows hatched structures that overlap when all the layers are expanded.
As shown in FIG. 15, a pattern PE1 constituting the cell EEE (1) included in the cell CCC (1) and a cell CCC (1).
The pattern PC1 included in (2) has an overlap. The pattern PD1 included in the cell DDD (1), the pattern PD1 included in the cell DDD (2), and the cell DDD
The pattern PD2 included in (1) and the pattern PD2 included in the cell DDD (2) overlap.

The case where the sweep method is used for the layout data 61 will be described. First, CPU2
Calculates the existence area of each cell from the bottom up to create frame data of each cell. Then, the CPU 2 stores the created frame data of each cell in the second data file 12.

Next, the CPU 2 sets a cell to be processed. Here, a case where the cell TOP is set as a processing target cell will be described. Next, the CPU 2 sets the type of each cell based on the set processing target cell.

The CPU 2 sets the type of each structure constituting the hierarchical structure with the cell AAA set as the cell to be processed as the uppermost layer as follows. First, C
The PU2 sets a unique type [TOP] in the cell TOP because the cell TOP is a processing target cell.

Next, since the cells belonging to the cells AAA (1), AAA (2) and BBB included in the cell TOP are the cells to be processed, the CPU 2
Unique types [AAA (1)], [AAA (2)], and [BBB] are set for A (1), AAA (2), and BBB, respectively.

Then, for each cell and each pattern included in the hierarchy below the cell AAA (1), the CPU 2 determines the same type [AAA] as the cell AAA (1) which belongs to the cell.
(1)] is set. Further, the CPU 2 executes the cell AAA
(2) For each cell and each pattern included in the following hierarchy, the same type [AA] as the cell AAA (2) that belongs to the cell.
A (2)]. Further, the CPU 2 executes the cell BBB
The same type [BBB] as the cell BBB to which the cell belongs is set for each cell and each pattern included in the following hierarchy.

Next, the CPU 2 sweeps from the left side to the right side of the cell frame with respect to the cell TOP having the sweep line SL as a processing target cell. Note that the sweep line SL may be swept from the right side to the left side of the cell frame set as the processing target cell.

Next, when there are a plurality of cell frames having the same X coordinate on the sweep line SL, the CPU 2 determines that the plurality of cell frames overlap. And C
PU2 reads the cell frames of a plurality of cells determined to overlap.

For example, at the position of sweep line SL in FIG. 17, cells AAA (1), AAA (2), BBB
Are overlapping. Therefore, the CPU 2 determines that the cell AAA
The cell frames of (A), AAA (2), and BBB are read.

Here, the cell frame AAA (1) and the cell frame AAA
A (2), the cell frame AAA (2), and the cell frame BBB have a geometrical overlap. Also, each cell frame AAA
(1), AAA (2), and BBB have their own types because the cell to which they belong is the cell to be processed. Therefore, the CPU 2 determines that each cell frame AAA (1), AAA
A (2), the structure included in the BBB, that is, the cell of the next lower layer of each cell and the cell frame of the pattern are read.
Then, the CPU 2 creates a work list in the memory 3 in which information such as the names of all the read cell frames is stored.

As shown in FIG. 18, cell AAA (1) includes cell CCC (1), and cell AAA (2) includes cell CCC (1).
C (2). The cell BBB is the cell DDD
(1), DDD (2) and patterns PB1 and PB2. Therefore, the CPU 2 stores the cell CCC in the work list.
(1), CCC (2), cell DDD (1), DDD
(2) and the information of the patterns PB1 and PB2 are stored.

Each cell CCC (1), CCC
(2), DDD (1) and DDD (1) are of type [AAA
(1)], [AAA (2)], [BBB], [BBB]
have. Therefore, the CPU 2 determines that the cell CCC (1) and the cell CCC (2) and the cell CCC (2) and the cell DDD (1) are “overlapping”. Further, the CPU 2 determines that the cell D
DD (1) and cell DDD (2) are determined to be "no overlap".

The CPU 2 repeatedly executes the above processing on the layout data 61 having a hierarchical structure from the upper layer to the lower layer. Then, only the pattern remains in the work list. Therefore, the CPU 2 checks whether the remaining patterns overlap.

Here, as shown in FIG. 19, the cell EEE
Pattern PE2 included in (1) and cell CCC (2)
Are different from each other, and different types [AAA (1)] and [AAA (2)] are set for each of them. Therefore, the CPU 2 determines that the pattern PE2 and the pattern PC1 are "overlapping". And C
The PU2 stores the overlapping information of the overlapping patterns PE1 and PC1 in the third data file 13 of FIG.

As described above, by using the sweep method, an overlapping pattern can be easily detected, and the processing time is shortened. As described above,
According to the present embodiment, the following effects can be obtained.

(1) With respect to the input layout data, an existing area when expanded for each cell is set, and information of a cell frame including an area frame of each existing area and a pattern frame is created. Are sequentially set as cells to be processed, and the type according to the hierarchical structure is set for the cells of the hierarchy below the cell to be processed and the cell frame of the pattern.
If different types are set for cell frames and patterns that have geometrical overlap, it is determined that there is overlap, and if it is determined that there is overlap between cell frames or between cell frames and patterns, The lower cell frame and the pattern included in the cell frame having the overlap are further read, and when it is determined that the patterns overlap each other, the overlap of the patterns is determined.

As a result, the type is set for each cell frame, and the frames of the same type are processed as “no overlap”, so that no extra overlap is checked, so that the processing time can be shortened. .

(2) In addition, the structure contained in the cell frame determined as “no overlap” is not read, ie,
Since the cell frame determined as “no overlap” is not expanded, the number of data to be processed at each time is reduced, and the required resource amount can be reduced.

(3) Further, there is no need to create data from which overlap has been removed in advance. Therefore, the processing time can be shortened without running out of resources. (4) For a cell frame, if the cell frame or the cell to which the cell frame belongs is a processing target cell, a unique type is set for the cell frame, and the cell frame or the cell frame belongs to. If the cell is not the processing target cell, the same type as the belonging cell is set. Also, the same type as the belonging cell is set for the pattern. Therefore, the type according to the hierarchical structure of the layout data can be easily set.

(4) Since the sweep method is used to detect the state of the figure, overlapping patterns can be easily detected. Therefore, the processing time of the graphic processing is shortened, and the processing speed can be increased.

[0156]

As described in detail above, according to the present invention,
It is possible to provide a graphic processing method, a graphic processing apparatus, and a recording medium capable of achieving high-speed processing and reducing the amount of resources.

[Brief description of the drawings]

FIG. 1 is a flowchart of graphic processing.

FIG. 2 is a flowchart of a type setting process.

FIG. 3 is a schematic configuration diagram of a graphic processing apparatus according to an embodiment.

FIG. 4 is an explanatory diagram showing a hierarchical structure of a graphic.

FIG. 5 is a perspective view illustrating a hierarchical structure of a graphic.

FIG. 6 is an explanatory diagram showing the relationship between data.

FIG. 7 is an explanatory diagram showing a hierarchical structure of a graphic.

FIG. 8 is a layout diagram showing a developed figure.

FIG. 9 is a layout diagram showing a hierarchical structure of a graphic.

FIG. 10 is a layout diagram for explaining graphic processing.

FIG. 11 is a layout diagram showing a graphic development process.

FIG. 12 is a layout diagram showing a graphic development process.

FIG. 13 is a layout diagram showing a graphic development process.

FIG. 14 is an explanatory diagram showing a hierarchical structure of another graphic.

FIG. 15 is a layout diagram showing another developed figure.

FIG. 16 is a layout diagram showing a hierarchical structure of another graphic.

FIG. 17 is a layout diagram for explaining another graphic processing.

FIG. 18 is a layout diagram showing another graphic development process.

FIG. 19 is a layout diagram showing another graphic development process.

[Explanation of symbols]

 Reference Signs List 11 first data file (layout data) 13 third data file (overlap information) 21 area frame creation means 22 processing target cell setting means 23 data reading means 24 type setting means 25 first overlap judgment means 26 second overlap judgment means 27 Overlap confirmation means

Claims (9)

[Claims] 1. A graphic processing method for detecting geometrical overlap of a pattern with respect to layout data in which cells and patterns are arranged in a hierarchical structure, wherein the layout data is input and expanded for each cell. Setting the existence area at the time of making, creating information of a cell frame composed of an area frame of each existence area and a pattern frame, sequentially setting cells included in the layout data as cells to be processed, The type corresponding to the hierarchical structure is set for the cell frame of the hierarchy and the cell frame of the pattern, and there is an overlap when the different type is set for the cell frame and the pattern having the geometrical overlap. If it is determined that there is overlap between the cell frames or between the cell frame and the pattern, the lower layer cell frames and patterns included in the overlapping cell frames are further read, and the Graphic processing method to determine the overlapping of the pattern in the case of determining that it is. 2. A graphic processing method for detecting a geometrical overlap of a pattern with respect to layout data in which cells and patterns are configured in a hierarchical structure, wherein the layout data is input and expanded for each cell. Creating the existence area at the time of the execution, storing the information of the created cell frame including the area frame and the pattern frame in the file in a hierarchical structure, and sequentially processing the cells included in the layout data. Setting a cell, setting a type according to a hierarchical structure for a cell of a hierarchy below the processing target cell, and a cell frame of a pattern, and setting the type of the processing target cell or the cell frame determined to have an overlap. Reading the included cell frames and patterns; and, among the newly read cell frames, overlapping cell frames of different types or overlapping with the cell frames and patterns. Determining whether there is an overlap; and determining whether there is an overlap with a different type of pattern among the read patterns when the newly read cell frame has no overlap; and determining that the overlap exists. A graphic processing method comprising the steps of: determining a pattern overlap; and creating a table including information on geometrically overlapping patterns. 3. The graphic processing method according to claim 1, wherein when a type is set for the cell frame and the pattern, the cell frame or a cell belonging to the cell frame is set for the cell frame. If is a cell to be processed, a unique type is set for the cell frame. If the cell frame or the cell to which the cell frame belongs is not a cell to be processed, the same type as the belonging cell is set. Is a graphic processing method that sets the same type as the belonging cell. 4. The graphic processing method according to claim 1, wherein a cell or pattern that geometrically overlaps with the processing target cell is detected by using the sweep method. , A graphic processing method for judging an overlap in a detected cell frame or pattern. 5. A graphic processing device for detecting a geometrical overlap of a pattern with respect to layout data in which cells and patterns are arranged in a hierarchical structure, wherein the layout data is input and expanded for each cell. Area frame creation means for setting the existence area at the time of performing, and creating information of a cell frame composed of an area frame of each existence area and a pattern frame, and a process of sequentially setting cells included in the layout data as cells to be processed A target cell setting means, and a type setting means for setting a type according to a hierarchical structure to a cell of a hierarchy below the processing target cell and a cell frame of a pattern, wherein the geometrically overlapping cell frame; If a different type is set for the pattern, it is determined that there is an overlap. Further reading, graphics processing apparatus adapted to determine the overlapping of the pattern in the case of determining that there is an overlap in the pattern between the underlying cell frame, patterns included in the. 6. A graphic processing apparatus for detecting a geometrical overlap of a pattern with respect to layout data in which cells and patterns are arranged in a hierarchical structure, wherein the layout data is input and expanded for each cell. Area frame creating means for creating an existing area at the time of the creation, storing information of the created area frame of each existing area and a cell frame composed of a pattern frame in a file in a hierarchical structure, and a cell included in the layout data. A processing target cell setting means for sequentially setting the processing target cells; a type setting means for setting a type according to a hierarchical structure with respect to a cell of a hierarchy below the processing target cell and a cell frame of a pattern; Or data reading means for reading a cell frame and a pattern included in the cell frame determined to have an overlap, and a cell frame of a different type among the newly read cell frames. First overlap determining means for determining whether a pattern overlaps with a cell frame or a cell frame, and when the newly read cell frame has no overlap, among the read patterns, a different type of pattern has a overlap. A graphic processing apparatus comprising: a second overlap determination unit that determines whether the overlap is determined; and an overlap determination unit that determines the overlap of the patterns determined to have the overlap and creates a table including overlap information of the geometrically overlapped patterns. 7. The graphic processing device according to claim 5, wherein the type setting means includes: for a cell frame, when the cell frame or a cell belonging to the cell frame is a cell to be processed. Set a unique type for the cell frame. If the cell frame or the cell to which the cell frame belongs is not the processing target cell, set the same type as the belonging cell. A graphic processing device for setting the type. 8. The graphic processing device according to claim 5, wherein a cell or pattern that geometrically overlaps with the processing target cell is detected using the sweep method. And a graphic processing device for determining the overlap in the detected cell frames and patterns. 9. A recording medium storing a graphic processing program for detecting an overlap by the graphic processing method according to claim 1. Description: