JPH1095676A - Production of ceramic substrate - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for producing ceramic substrates by sintering ceramic green sheets disposed in an oven, enabling to sinter the green sheets without adhering the green sheets to each other by disposing the plural green sheets on a shelf plate in a piled state, heating the inside of the oven and simultaneously adding specific vibrations to the shelf plate. SOLUTION: This method for producing ceramic substrates comprises arranging plural ceramic green sheets 2 on a shelf plate 3 in a piled state, vertically fitting a guide 6 into the shelf plate 3 so as to surround the shelf plate 3, flowing an electric current in an electric heater 4 and an electric heater 4 disposed in the shelf plate 3 to heat the oven 1 and the shelf plate 3 at a prescribed temperature, and simultaneously operating a vibrator 5 connected to the shelf plate 3 to add 0.01-1DHz horizontal vibrations to the shelf plate 3 preferably in a vibration width of 0.01-1mm.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a ceramic substrate formed by firing ceramic green sheets placed in a furnace.

[0002]

2. Description of the Related Art A ceramic substrate used for a printed wiring board or the like is obtained by arranging a plurality of ceramic green sheets on a shelf plate in a furnace, and heating the furnace with an electric heater or a burner. It can be obtained by firing. However, when the ceramic green sheets are fired by this method, there is a problem in that the ceramic green sheets or the ceramic green sheet and the shelf plate are burned and adhered to each other.
Therefore, between ceramic green sheets, and between the ceramic green sheet and the shelf board, a method has been performed in which a bedding powder or a bedding powder sheet is added and fired.
A step of applying the bedding powder before baking and a step of removing the bedding powder after baking, and in the case of a bedding powder sheet, a step of arranging the bedding powder before baking is required, and each step is added. As a result, work efficiency was reduced, and productivity was significantly reduced.

[0003] Accordingly, there has been a demand for a method of firing without using the above-mentioned bedding powder or bedding powder sheet and fixing.

[0004]

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned circumstances, and has as its object the purpose of firing a plurality of ceramic green sheets one upon another. An object of the present invention is to provide a method of manufacturing a ceramic substrate, which can obtain a ceramic substrate without a ceramic green sheet being baked and fixed.

[0005]

According to a first aspect of the present invention, there is provided a method of manufacturing a ceramic substrate in which a ceramic green sheet disposed in a furnace is fired. Together with the shelf, and heat the furnace,
A horizontal vibration is applied to the shelf.

According to a second aspect of the present invention, there is provided a method of manufacturing a ceramic substrate according to the first aspect, wherein the vibrations are not less than 0.01 Hz and not more than 10 Hz.
The vibration width is 0.01 mm or more and 1 mm or less.

[0007] If the above vibration is less than 0.01 Hz, the vibration period becomes slow, and if the vibration width is not increased, the vibration is fixed.
If the vibration width is 1 mm or more, a place where the ceramic green sheets are partially adhered to each other occurs, and a phenomenon occurs in which the ceramic green sheets are peeled off each time vibration occurs, and the surface is roughened. If the vibration is 10 Hz or more, the period becomes short and the movement of the ceramic green sheet does not follow. If the vibration width is smaller than 0.01 mm, the ceramic green sheet is fixed.

[0008]

Embodiments of the present invention will be described below.

As the ceramic substrate obtained by the method of manufacturing a ceramic substrate according to the present invention, for example, ceramic powders such as alumina, aluminum nitride, silicon nitride, boron nitride, ferrite, and barium titanate are used. , Water, methylcellulose, starch,
It is used irrespective of liquid or powder, such as amino acid, phenol resin, acrylic, vinyl acetate, glycerin and glycol, and can be used in combination. These materials are mixed and dispersed, and formed into a sheet by, for example, a doctor blade method or the like, and punched into a predetermined size to form a ceramic green sheet.

FIG. 1 is a schematic view showing an example of a firing apparatus used in the method of manufacturing a ceramic substrate according to the present invention.

As shown in FIG. 1, the firing apparatus has a shelf 3 provided in a furnace 1, and a ceramic green sheet 2 is arranged on the shelf 3. The shelf plate 3 holds the ceramic green sheet 2 to be fired, and the shelf plate 3
Has a built-in heating element and is further connected to the vibration generator 5.

The heating element includes an electric heater, a radiant heat heater, a panel heater, and the like. In the present embodiment, the electric heater 4 is used, and the shelf plate 3 is heated by applying a current to the electric heater 4. Can be. The vibration generator 5 applies a horizontal vibration to the connected shelves 3, and the vibration and the vibration width can be arbitrarily changed.

The shelf plate 3 is provided with a guide 6 so as to surround the placed ceramic green sheet 2 so that the placed ceramic green sheet 2 does not fall off the shelf plate 3 due to vibration. Bar-shaped guide 6 shown in the figure
Can be detachably fitted to the shelf 3 so that the ceramic green sheet 2 can be easily placed on the shelf 3.
In addition to the columnar guide as shown in the figure, the guide 6 may be a plate that is bent so that the bent inner surface is arranged along the four corners of the ceramic green sheet 2.

Further, the above-mentioned baking apparatus has a heating element in the furnace 1. In this embodiment, an electric heater 4 is used. Can be heated to temperature. The firing temperature is appropriately determined according to the constituent material of the ceramic green sheet 2 together with the electric heater 4 built in the shelf plate 3, and a desired firing temperature can be obtained.

Next, a method of manufacturing a ceramic substrate using the above-described firing apparatus will be described. According to the present invention, a plurality of ceramic green sheets 2 are superposed and arranged on a shelf plate 3 provided in a furnace 1, and the ceramic green sheets 2
The guide 6 is fitted to the shelf plate 3 so as to surround the
An electric current is supplied to the electric heater 4 disposed inside the furnace, and the inside of the furnace 1 is heated to a predetermined firing temperature. An electric current is also supplied to the electric heater 4 built in the shelf 3 to heat the shelf 3 itself. 1
The temperature of the shelf 3 is adjusted according to the rise in the ambient temperature in the inside. Then, the surface of the ceramic green sheet 2 exposed in the furnace 1 and the surface which is in contact with the shelf 3 and is not exposed in the furnace 1 are uniformly heated. Further, simultaneously with the heating, the vibration generator 5 connected to the shelf 3 is operated. The vibration generator 5 is connected to the shelf 3 and can apply vibrations in a horizontal direction to the one arranged on the shelf 3. In the present invention, the vibration is 0.01 Hz or more and 10 Hz or less, and the vibration width is Vibration is applied to the shelf 3 by setting it to 0.01 mm or more and 1 mm or less. Then, the ceramic green sheets 2 arranged on the shelf 3 vibrate with each other, and can be fired without moving and fixing. Even if the ceramic green sheet 2 is partially displaced due to the above vibration, the surroundings are suppressed by the guide 6 erected on the shelf 3, so that the firing can be performed without slipping.

As described above, according to the method for manufacturing a ceramic substrate of the present invention, a plurality of ceramic green sheets arranged on a shelf in a furnace are heated to apply vibration to the shelf during firing. Since firing is performed, it is possible to suppress the stacked ceramic green sheets from sticking.

In particular, the vibration applied to the shelf is 0.01 Hz.
10 Hz or less, vibration width 0.01 mm or more, 1 m
By setting m or less, the effect becomes remarkable.

[0018]

According to the method of manufacturing a ceramic substrate according to the present invention, a plurality of ceramic green sheets are superimposed and arranged on a shelf, and the inside of the furnace is heated and horizontal vibration is applied to the shelf. Accordingly, the stacked ceramic green sheets can be fired without being fixed. Furthermore, the vibration is 0.01 Hz or more,
When the frequency is 10 Hz or less and the vibration width is 0.01 mm or more and 1 mm or less, the effect can be significantly obtained.

Further, since a plurality of ceramic green sheets can be stacked and fired at one time, the processing can be performed efficiently and the productivity can be improved.

[Brief description of the drawings]

FIG. 1 is a schematic view showing an example of a firing apparatus used in a method for manufacturing a ceramic substrate according to the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Furnace 2 Ceramic green sheet 3 Shelf 4 Electric heater 5 Vibration generator 6 Guide

Claims (2)

[Claims] 1. A method of manufacturing a ceramic substrate, comprising firing ceramic green sheets placed in a furnace, placing a plurality of the ceramic green sheets on a shelf board, heating the furnace, and heating the shelf. A method for manufacturing a ceramic substrate, wherein horizontal vibration is applied to a plate. 2. The method of manufacturing a ceramic substrate according to claim 1, wherein the vibration is 0.01 Hz or more and 10 Hz or less, and the vibration width is 0.01 mm or more and 1 mm or less.