JPH1089967A - Sensor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a sensor by which a small acceleration, a small inertial force or the like acting on a moving body can be detected with high accuracy. SOLUTION: An angular velocity ω1 and an angular velocity ω2 whose direction is opposite to each other around an axis O are given alternately to a measuring member 1 which is formed of an elastic material and whose mass is at (m). An external force such as an acceleration or the like is given to the measuring member 1, and the measuring member 1 is endowed with a speed component U at right angles to the axis O. Then, the measuring member 1 is bending-vibrated to a direction Fc1 and a direction Fc2 due to the Coriolis force Fc1 and the Coriolis force Fc2. When its vibration is detected by a detecting means 3, the Coriolis forces can be detected, and the speed component U on the basis of a very small acceleration can be found.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for applying an external force such as an acceleration of mass motion or an inertial force to a measuring member or an external force such as a magnetic force acting on the measuring member. The present invention relates to a sensor capable of detecting a displacement of a measurement member based on the acceleration and an inertia force applied to a moving body, and further detecting a magnetic force applied to the measurement member.

[0002]

2. Description of the Related Art As a device for detecting an external force acting on a device or an instrument, for example, there is an acceleration sensor for detecting the acceleration of a moving body. In this acceleration sensor, for example, a measuring member having a constant mass is elastically supported on a moving body, and the moving body has acceleration, and (acceleration) × (mass) =
Generally, (force) acts on the measuring member so that when the measuring member moves by this force, the amount of movement or displacement can be detected. Further, this acceleration sensor can also detect the movement of the measuring member due to the inertial force when the moving body starts or stops.

[0003]

However, in the conventional acceleration sensor, when a large acceleration is applied, a large force acts on the measuring member to displace the measuring member, and the displacement can be measured. When the acceleration or inertia force acting on the measurement member is very small, such as when the moving body on which the member is mounted is moving while being accelerated slowly, the measurement member hardly moves and the acceleration and inertia force are detected with high accuracy. Can not. Similarly, for example, in a region where a magnetic force or an electric force or other physical force is distributed, a measurement member of a substance affected by the magnetic force or the electric force is located, and the magnetic force or the electric force When it is necessary to measure the influence of external force, if the external force applied to the measuring member by magnetic force or electric force is too small, the magnetic force or electric force is determined based on the amount of movement or displacement of the measuring member. Physical external force such as force cannot be detected accurately.

An object of the present invention is to solve the above-mentioned conventional problems, and an object of the present invention is to provide a sensor capable of detecting a small acceleration, an inertial force, and the like acting on a moving body with high accuracy.

Another object of the present invention is to provide a sensor capable of detecting the external force with high accuracy when the measuring member receives an external force such as a magnetic force or an electric force.

[0006]

According to the present invention, there is provided a sensor comprising: a driving means for rotating a measuring member having a predetermined mass; and an external force applied to the rotating rotating measuring member, thereby causing the measuring member to rotate. Detecting means for detecting a displacement generated in the measuring member based on the velocity component and the angular velocity of the rotation when having a relative velocity component with respect to the rotation speed. is there.

Further, the sensor according to the present invention comprises an axial measuring member formed of an elastic material, and a driving means for rotating the measuring member around a central axis of the measuring member or an axis parallel to the central axis. When an external force is applied to the rotating measuring member and the measuring member has a velocity component relative to the rotation, the measurement is performed based on the velocity component and the angular velocity of the rotation. And a detecting means for detecting bending deformation occurring in the member.

In the above, it is possible to provide a configuration in which the driving means applies rotation to the measuring member in such a manner that its rotation direction alternates, and the measuring member generates bending vibration based on the velocity component and the angular velocity. It is.

Further, in the sensor according to the present invention, an axial measuring member formed of an elastic material, a driving means for applying torsional vibration to the measuring member, and an external force applied to the torsional vibrating measuring member. When the measurement member has a velocity component relative to the torsional vibration, a detection unit that detects bending vibration acting on the measurement member based on the velocity component and the angular velocity of the torsional vibration, It is characterized by being provided.

In the above, it is preferable that the resonance frequency of the measuring member due to torsional vibration and the resonance frequency of bending vibration are substantially the same.

Further, the sensor according to the present invention comprises a measuring member having a predetermined mass, a supporting member for supporting the measuring member, a driving means for applying a circular motion to the measuring member via the supporting member, and a circular motion. When an external force is applied to the measuring member and the measuring member has a velocity component relative to the circular motion, a displacement generated in the measuring member based on the velocity component and the angular velocity of the circular motion. And a detecting means for detecting the

In each of the sensors, a measuring member is provided on the moving body, and when an acceleration of the moving body or an inertial force based on the movement of the moving body acts as an external force on the measuring member, the external force is detected. It is possible to

When the measuring member moves by receiving a force such as a magnetic force or an electric force, the magnetic force or the electric force can be measured by detecting the displacement or the moving amount of the measuring member. It is.

In the sensor according to the present invention, the measuring member having a predetermined mass is rotating, and when acceleration or inertial force is applied to the moving body supporting the rotating measuring member, the measuring member is rotated by the rotation system. Has a velocity component relative to. Due to this velocity component and the angular velocity of the rotation, a Coriolis force acts on the measuring member in a direction orthogonal to the velocity component.
By detecting the amount of displacement or movement of the measurement member due to the Coriolis force, it is possible to detect the direction and magnitude of the acceleration or inertia force applied to the rotating measurement member.

In this sensor, since the measuring member is given an angular velocity by rotating or torsionally oscillating the measuring member, if this angular velocity is set to a predetermined value or more, a relatively small acceleration or inertia force is set. Even a velocity component generated by an external force, such as an external force, can generate a Coriolis force in relation to the angular velocity. Therefore, high-accuracy detection is possible even when the acceleration and the inertial force are small and the speed component of the measuring member is small.

In the case where the speed of the measuring member is given by a magnetic force or an electric force, the measuring member is provided with an angular velocity so as to be positioned within the region where the magnetic force or the electric force is applied. A force given from a magnetic force or an electric force can be detected.

For example, when an axis-shaped measuring member is rotated around an axis (center axis) passing through the center of gravity at each cross section orthogonal to the axis, or when it is rotated around an axis parallel to this axis, measurement is performed by an external force. A Coriolis force perpendicular to both the central axis and the velocity component acts on the central axis and the velocity component according to a velocity component of the velocity applied to the member that is perpendicular to the central axis. Since a bending measurement can be caused by the Coriolis force in the shaft-shaped measuring member, the speed can be detected by detecting the bending deformation with a strain gauge or the like.

Also, when a measuring member having a predetermined mass makes a circular motion and a speed based on an external force is applied to the measuring member, Coriolis force acts on the measuring member, and the measuring member moves the central axis of the motion and It will be displaced in the direction orthogonal to both of the velocity components orthogonal to the central axis.

As described above, the sensor of the present invention can be used when the external force acts on the measuring member and the measuring member has a velocity component.
By detecting the Coriolis force orthogonal to the speed component, the speed component based on the external force can be known.

[0020]

DESCRIPTION OF THE PREFERRED EMBODIMENTS FIGS. 1A and 1B and FIG. 2A
(B) is a perspective view showing a basic embodiment of a sensor of the present invention. In FIG. 1A, a shaft-shaped measuring member 1 having a circular cross section is supported by a cantilever. The measuring member 1 is formed of a constant elastic material such as an elinvar, and the lower end thereof is fixed to a support 2. The support 2 is rotated by a motor or the like. This rotation is given at a constant speed in a fixed direction about the central axis O of the measuring member 1. In FIG. 1A, the angular velocity at this time is indicated by ω. Note that the central axis O is a line passing through the center of gravity of each cross section of the axial measurement member 1 and is a neutral axis of the measurement member 1.

A detecting means 3 is provided on a side surface of the measuring member 1. When the measuring member 1 moves at a speed, the detecting means 3 can detect a bending deformation of the measuring member 1 in a direction orthogonal to a component U perpendicular to the central axis O of the speed. It is provided in. This detection means 3
It is a strain gauge (strain sensor) for detecting strain on the surface of the measuring member 1 or a piezoelectric element.

As shown in FIG. 1 (B), in a state where a measuring member 1 having a predetermined mass m is given an angular velocity ω in a certain direction around a central axis O, the measuring member 1 is mounted. When a physical external force such as acceleration, inertial force, or magnetic force acts on a device or the like, the measuring member 1 has a velocity component U orthogonal to the central axis O. Then, a Coriolis force Fc in a direction orthogonal to the speed component U acts on the measuring member 1 by the speed component U and the angular speed ω. The absolute value of this Coriolis force Fc is

[0023]

(Equation 1)

## EQU1 ## Note that Fc, ω, and U are vector values, respectively, and the [U × ω] is a vector product.
Since the Coriolis force Fc acts in a direction perpendicular to the velocity component U, the measurement member 1 is bent and deformed in the Fc direction. The distortion of the surface of the measuring member 1 due to the bending deformation (displacement) is detected by the detecting means 3. Since the amount of bending deformation (amount of distortion) based on the Coriolis force Fc is proportional to the velocity component U, the Coriolis force Fc The speed component U can be obtained from the detected value of the above, and the direction and magnitude of the external force can be known.

In the sensor shown in FIG. 2A, a measuring member 1 having the same structure as that shown in FIG. 1A is used, and rotation around the central axis O is given to the measuring member 1 by driving means. , The rotation direction of which is alternately switched. In the plane viewed from above, the angular velocity in the counterclockwise direction is denoted by ω1, and the angular velocity in the clockwise direction is denoted by ω2. When an external force such as acceleration, inertial force, or magnetic force is applied to a device or device on which the measuring member 1 is mounted, the measuring member 1 has a velocity component U due to the external force. When the angular velocity component of the measuring member 1 is ω1, Coriolis force Fc1 acts on the measuring member 1, and when the angular velocity component is ω2, the Coriolis force Fc2 acts on the measuring member 1. Coriolis forces Fc1 and Fc2
Is the opposite direction. Therefore, the measuring member 1 generates bending vibration in the Fc1 and Fc2 directions. The velocity component U can be obtained by detecting the distortion of the surface of the measuring member 1 due to the bending vibration by the detecting means 3.

Note that the angular velocities ω1 and ω2
It is preferable that the frequency at which is alternately applied is made to match or almost match the resonance frequency of the measuring member 1 due to bending vibration. Thus, the measuring member 1 resonates and vibrates in the Fc1 and Fc2 directions, and the magnitude of the amplitude is detected by the detecting means 3, so that the magnitude of the velocity component U can be detected with high accuracy. 1 (A) and FIG.
In (A), by providing the detecting means 3 in each direction of the surface of the measuring member 1, it is possible to detect a velocity component based on external forces from multiple directions perpendicular to the central axis O. Also, in FIGS. 1A and 2A, the rotation of the angular velocities ω, ω1, ω2 does not necessarily need to be around the central axis O of the measuring member 1, but may be an axis parallel to or substantially parallel to the central axis O. By giving a rotation about an appropriate axis, bending deformation or bending vibration is given to the measuring member 1 by the Coriolis force, and it is possible to obtain a velocity component U based on an external force.

FIG. 3 shows a modification of FIG. FIG.
In FIG. 1, a measuring member 1 made of a constant elastic material such as an elinvar has a thin elastic arm 1a having a small sectional modulus, a base 1b of which is fixed on a support 2, and a measuring member 1 of the elastic arm 1a. A head portion (weight portion) 1c having a predetermined mass is integrally provided at the tip portion. As in the case shown in FIG. 2A, the torsion vibration drive unit provided on the support 2 or the base 1b causes the measurement member 1 to torsionally vibrate so as to have both angular speeds of ω1 and ω2. When an external force such as acceleration or inertia force acts on this sensor, the thin elastic arm 1a having a small sectional modulus is easily deformed, and the elastic arm 1a and the head 1c have a velocity component U. Based on this velocity component U and the angular velocities ω1 and ω2, the elastic arm 1a and the head 1c are moved to Fc1 and Fc2.
Vibrates in the direction, and the vibration component is detected by the detection means 3. As described above, the detection sensitivity of the sensor of the present invention can be freely set by appropriately changing the rigidity of the measuring member 1.

FIG. 4 is a perspective view showing another embodiment of the sensor of the present invention utilizing the torsional vibration of the measuring member, and FIG.
(A) and (B) are perspective views showing a driving means for applying torsional vibration to the measuring member in FIG. 4, and FIG. 6 is an explanatory view for explaining a vibration mode by Coriolis force. In the sensor shown in FIG.
For example, a pair of axial measuring members 4a and 4b formed of an elastic body such as a constant elastic material such as an elinvar is used. The measuring members 4a and 4b are provided with elastic arms 4a1 and 4b1.
Is a thin shaft with a small section modulus, and the base 4a2,
4b2 and the heads 4a3 and 4b3 are thick, and the heads 4a3 and 4b3 function as weights.

As driving means for driving the measuring members 4a and 4b, disk-shaped piezoelectric vibrators 5a and 5b are used. The piezoelectric vibrators 5a and 5b are made of piezoelectric ceramic, and the polarization directions of the piezoelectric vibrators 5a and 5b are as shown in FIGS. In the piezoelectric vibrator 5a shown in FIG. 5A, the semi-circular portions are subjected to dielectric polarization in opposite directions, and in the piezoelectric vibrator 5b shown in FIG. Polarization is performed, and the dielectric polarization directions of the piezoelectric vibrators 5a and 5b are opposite to each other.

As shown in FIG. 4, the base 4 of the measuring member 4a is
a2 and the piezoelectric vibrator 5a are fixed to each other with the electrode 6a interposed therebetween, and the base 4b2 of the measuring member 4b and the piezoelectric vibrator 5b are also fixed to each other with the electrode 6b interposed therebetween. Also, the piezoelectric vibrator 5
a and 5b are fixed to each other with a common electrode (earth electrode) 7 interposed therebetween. The common electrode 7 is formed of a conductive metal plate having a certain thickness, and a part of the common electrode 7 protrudes laterally to form a support piece 7a. The support piece 7a is fixed to a support portion such as a printed board, and the sensor is entirely supported at the center. In addition, each measuring member 4a
The detecting means 8a, such as a strain gauge (strain sensor) or a piezoelectric element, are provided on the side surfaces of the elastic arms 4a1 and 4b1.
8b is stuck. These detecting means 8a and 8b are provided for the elastic arm 4a1 in the bending mode of the sensor shown in FIG.
And 4b1 are attached to the parts where the surface distortion is greatest.

In the sensor shown in FIG. 4, AC voltages having the same phase are applied to the electrodes 6a and 6b serving as drive electrodes. The frequency of this AC voltage is the same or almost the same as the resonance frequency of the torsional vibration of the sensor shown in FIG. When an AC voltage having the above frequency is applied to the electrodes 6a and 6b, a torsional force is generated between the surfaces of the piezoelectric vibrator 5a, and a torsional force is also generated between the surfaces of the piezoelectric vibrator 5b.
Due to the torsional force of the piezoelectric vibrators 5a and 5b, when an angular velocity ω1 is generated in one measuring member 4a, an opposite angular velocity ω1 is generated in the other measuring member 4b. And an angular velocity ω2 in the opposite direction occurs,
An opposite angular velocity ω2 is generated in the measuring member 4b.

As a result, the sensor shown in FIG. 4 generates torsional vibration, which is mainly caused by the elastic arms 4a1 and 4a1.
occurs in b1. For sensors that generate torsional vibration,
When an external force such as acceleration, inertia force, or magnetic force acts, the elastic arms 4a1, 4b1 and the heads 4a3, 4b3
With a velocity component U perpendicular to the central axis (neutral axis) O, the directions of the velocity component U and the central axis O are applied to the elastic arms 4a1 and 4b1 and the heads 4a3 and 4b3 of the measuring members 4a and 4b. And a Coriolis force orthogonal to both acts.
Since the directions of the torsional vibration are opposite between the measuring members 4a and 4b, Coriolis forces acting in opposite directions act on the measuring members 4a and 4b. That is, when the elastic arms 4a1 and 4b1 and the heads 4a3 and 4b3 both have angular velocities in the ω1 direction, the Coriolis force Fc1 causes bending deformation as shown by a broken line in FIG. At the next moment, when the elastic arms 4a1 and 4b1 and the heads 4a3 and 4b3 have an angular velocity ω2, the measuring member 4
a and 4b undergo bending deformation upside down as shown by the broken line in FIG. 6, and by repeating this, the elastic arms 4a1 and 4b1 are deformed.
The heads 4a3 and 4b3 generate bending vibration (lateral vibration).

The elastic arms 4a1 and 4b1 based on the bending vibration
Is detected by the detecting means 8a and 8b. The speed component U can be determined based on the detection output, and the direction and magnitude of the external force acting on the sensor can be determined. In the sensor shown in FIG. 4, the resonance frequency of the torsional vibration of the elastic arms 4a1 and 4b1 of each of the measuring members 4a and 4b and the resonance frequency of the bending vibration (lateral vibration) are made equal or almost equal to each other, so that it is based on the Coriolis force. The speed component U can be detected with high accuracy.

Here, the condition that the resonance frequency of the torsional vibration of the elastic arms 4a1 and 4b1 becomes equal to the resonance frequency of the bending vibration will be described. Elastic arm 4a with length L and diameter d
The primary resonance frequency f1 of the torsional vibration of 1, 4b1 is as shown in Expression 2. G is a transverse elastic coefficient of a constant elastic material such as an elinver constituting the elastic arms 4a1, 4b1, ρ is a density of the constant elastic material, and g is an acceleration of gravity.

[0035]

(Equation 2)

Next, the primary resonance frequency f2 of the bending vibration (lateral vibration) of the measuring member 4a or 4b is as shown in Expression 3. In Equation 3, E · I is the bending rigidity, E is the longitudinal elastic modulus, I is the moment of inertia, and A is the cross-sectional area of the axial (round bar) elastic arms 4a1 and 4b1.

[0037]

(Equation 3)

In the above equation (3), the result of substituting the moment of inertia I and the sectional area A is equation (4).

[0039]

(Equation 4)

Here, rearranging as f1 = f2,
It becomes as follows.

[0041]

(Equation 5)

When the ratio (L / d) between the diameter d and the length L of the elastic arms 4a1 and 4b1 is expressed by the following equation (5), the piezoelectric vibrators 5a and 5b, which are the driving means, have the frequency f1 and f2. When a drive voltage is applied to generate torsional resonance in the elastic arms 4a1 and 4b1, bending resonance shown in FIG. 6 can be generated by Coriolis forces Fc1 and Fc2 based on the velocity component U, as shown in FIG. .

FIGS. 7 and 8 are perspective views showing another embodiment of the sensor of the present invention. 7A and 7B are explanatory views for explaining the principle, and FIG. 8 shows a specific embodiment. In FIG. 7A, a measuring member 11 having a predetermined mass m is suspended and supported by a fixing member 12 with a supporting member 13. The measuring member 11 having the mass m is circularly moved in a fixed direction about the axis (vertical axis) O. The angular velocity of the circular motion at this time is denoted by ω. When an external force such as an acceleration, an inertial force, or a magnetic force acts on the measuring member 11 moving in a circular motion, and the measuring member 11 has a velocity component U orthogonal to the axis O, FIG.
As shown in (B), a Coriolis force Fc in a direction orthogonal to the velocity component U acts on the measuring member 11, and the measuring member 11 that is moving circularly is displaced in the Fc direction. If this displacement is detected, the velocity component U can be obtained based on the above equation (1).

FIG. 8 shows a specific configuration of the sensor shown in FIG. In FIG. 8, the measuring member 1 having a predetermined mass m
Reference numeral 1 denotes a cubic block, and the support member 13 is a square pillar formed of an elastic material such as a constant elastic material. The measurement member 11 is joined to the lower surface of the support member 13 via an insulating layer 14, and the measurement member 11 and the support member 13 are electrically insulated. On one side of the measuring member 11,
A piezoelectric element 15a having an electrode on its surface is attached as a driving means, and a piezoelectric element 15b having an electrode on its surface is also attached as a driving means to another side surface which is orthogonal to and adjacent to this. The direction of dielectric polarization of the piezoelectric elements 15a and 15b is the thickness direction thereof as shown in FIG.

An AC drive voltage {V0 · sin (ω · t)} is applied to the electrodes on the surface of the piezoelectric element 15a,
The AC drive voltage {V0 · cos (ω · t)} whose phase is different from the AC drive voltage by 90 degrees is applied to the electrode on the surface of b (where ω of the drive voltage means angular frequency;
Angular velocity ω). Thereby, the support member 1
3 is bending deformation in x1 direction, bending deformation in y1 direction, x
A bending deformation in two directions and a bending deformation in the y2 direction occur sequentially, and as a result, the measuring member 11 having a mass m moves circularly around the axis O as shown in FIG.

As a detecting means, a substrate 16 is provided below the measuring member 11 so as to be spatially separated from the measuring member 11, and the detecting electrodes 17a, 17b, 17
c, 17d are mounted vertically. The detection electrodes 17a, 17b, 17c, and 17d are opposed to the cubic side surfaces of the measurement member 11 at minute intervals in the x1, x2, y1, and y2 directions. As a result, the measurement member 11
Between the measuring member 11 and the detecting electrode 17
b, between the measurement member 11 and the detection electrode 17c, and between the measurement member 11 and the detection electrode 17d, a variable capacitance element using air as a dielectric is formed.

FIG. 9 shows a detection circuit to which the detection means is connected. The measuring member 11 is formed of a conductive material, and an AC voltage having a predetermined frequency is applied to the measuring member 11 from a power supply circuit 18. In FIG. 8, Y
A pair of detection electrodes 17c and 17d facing the measurement member 11 in the 1-Y2 direction are shown.
7d, a diode and capacitors C, C are combined to form a circuit. With this circuit, the difference between the voltage V3 generated at the detection electrode 17c and the voltage V4 generated at the electrode 17d can be obtained as a DC voltage between the output terminals 19a and 19b. Note that the same detection circuit as that shown in FIG. 9 is also connected to the detection electrodes 17a and 17b facing X1-X2.

In the sensor shown in FIG. 8, an external force is applied to the measuring member 11 which moves circularly around the axis O, and the measuring member 11 moves in the X1 direction relative to the circular movement and a velocity component orthogonal to the axis O. With U, the measuring member 1 that is moving circularly
1 is displaced in the Y1 direction by the Coriolis force Fc. Due to the displacement, in the circuit shown in FIG. 8, the distance between the measurement member 11 and the detection electrode 17c, the distance between the measurement member 11 and the detection electrode 17d
, A difference is generated between them and the voltage V3
And the voltage V4 changes. The voltage difference V3-V4 obtained between the output terminals 19a and 19b is related to the displacement of the measuring member 11 due to the Coriolis force Fc, so that the speed component U can be obtained from the voltage difference V3-V4.

[0049]

As described above, the sensor of the present invention can detect the direction and intensity of the external force acting on the measuring member by using the Coriolis force, and can detect the small acceleration and magnetic force. Physical force can be detected. In addition, this sensor can be made compact by using a vibrator or the like.

[Brief description of the drawings]

1A and 1B show a basic embodiment of a sensor of the present invention, wherein FIG. 1A is a perspective view, FIG.

FIGS. 2A and 2B show a basic embodiment of the sensor of the present invention, wherein FIG. 2A is a perspective view, FIG.

FIG. 3 is a perspective view showing a modification of the sensor shown in FIG. 2,

FIG. 4 is a perspective view showing an embodiment of a sensor that generates torsional vibration;

FIGS. 5A and 5B are perspective views showing a piezoelectric vibrator that is a driving unit of the sensor shown in FIG. 4;

6 is an explanatory diagram of the operation principle of the sensor shown in FIG. 4,

FIGS. 7A and 7B show a basic embodiment of a sensor using circular motion, in which FIG. 7A is a perspective view showing the principle, and FIG.
Is an illustration of the principle of operation,

FIG. 8 is a perspective view showing a specific structure of a sensor using circular motion;

9 is a detection circuit diagram to which the detection means of FIG. 8 is connected,

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Measuring member 1a Elastic arm 1c Head 2 Support 3 Detecting means 4a, 4b Measuring member 4a1, 4b1 Elastic arm 4a3, 4b3 Head 5a, 5b Piezoelectric vibrator to be driving means 11 Measuring member 12 Fixed part 13 Supporting members 15a, 15b Piezoelectric elements 17a, 17b, 17c, 17d serving as driving means Detecting electrode 18 Power supply U Velocity components Fc, Fc1, Fc2 Coriolis force applied to measuring member by external force

Claims (7)

[Claims] 1. A driving means for rotating a measuring member having a predetermined mass, and an external force applied to the rotating rotating measuring member, the measuring member having a velocity component relative to the rotation. A detecting means for detecting a displacement generated in the measuring member based on the velocity component and the angular velocity of the rotation. 2. A shaft-like measuring member formed of an elastic material, driving means for rotating the measuring member about a central axis of the measuring member or about an axis parallel to the central axis, and rotation is provided. When an external force is applied to the measuring member and the measuring member has a velocity component relative to the rotation, a bending deformation generated in the measuring member based on the velocity component and the angular velocity of the rotation is generated. Detecting means for detecting;
The sensor characterized by being provided with. 3. The sensor according to claim 2, wherein the driving means applies rotation to the measuring member so that its rotation direction changes alternately, and the measuring member generates bending vibration based on the velocity component and the angular velocity. 4. An axial measuring member formed of an elastic material, driving means for applying a torsional vibration to the measuring member, and an external force applied to the torsional vibrating measuring member, the measuring member Detecting means for detecting a bending vibration acting on the measuring member based on the velocity component and the angular velocity of the torsional vibration, when the velocity component has a relative velocity component to the torsional vibration. Sensor. 5. The sensor according to claim 4, wherein a resonance frequency of the measuring member due to torsional vibration is substantially the same as a resonance frequency of the measuring member due to bending vibration. 6. A measuring member having a predetermined mass, a supporting member for supporting the measuring member, driving means for applying a circular motion to the measuring member via the supporting member, and a measuring member having a circular motion. Detecting means for detecting a displacement generated in the measuring member based on the velocity component and the angular velocity of the circular motion when an external force is applied and the measuring member has a velocity component relative to the circular motion; And a sensor. 7. The measuring member according to claim 1, wherein the measuring member is provided on the moving member, and an inertial force based on acceleration of the moving member or movement of the moving member acts as an external force on the measuring member. sensor.