JPH1083942A - Inspecting window for semiconductor cooling chamber - Google Patents

Abstract

PROBLEM TO BE SOLVED: To make is possible to simplify the strcuture and to reduce the original cost, by sealing the part between the outer space in a transparent hard member covering a hole and the housing inner space, and fixing the transparent hard member and the shielding member to a frame. SOLUTION: The position alignment of up and down, right and left and front and rear with respect to the wafer contained in a cooling chamber 10 is performed by one inspecting window 1 formed at the forward slant surface of the cooling chamber 10 having as angle α. That is to say, the inspecting window 11 is constituted by a glass plate 11a constituted by a sealing member 11b and a setscrew 4. The position alignment in the up and down and the two right and left in two directions for the wafer is performed from the front side of the inspecting window 11. The position alignment for the wafer in the front and rear directions is performed from the upper side of the inspecting window 11. Furthermore, it is recommended that the transparent hard member is a hard glass plate member and the sealing member is a packing material such as synthetic resin.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a structure of a semiconductor cooling chamber (hereinafter abbreviated as "cooling chamber") for performing processing of a wafer in a vacuum atmosphere in a semiconductor manufacturing apparatus.

[0002]

2. Description of the Related Art FIG. 4 is a perspective view showing an inspection window of a conventional cooling chamber, FIG. 5 is a diagram showing a procedure for inspecting the upper surface of a wafer by the inspection window of FIG. 4, and FIG. It is a figure showing the front inspection procedure of a wafer. In a conventional wafer cooling chamber, as shown in FIG. 4, a glass plate 2a is formed using a sealing material 2b and a set screw 4 in a front hole 1a provided on the front surface of a hexahedron forming the cooling chamber 1. Window 2, a glass plate 3 a is sealed with a sealing material 3 in a hole 1 b provided on the upper surface.
a and an upper inspection window 3 constituted by using a set screw 4, and when teaching a robot (not shown) to the wafer 5 housed in the cooling chamber 1, as shown in FIG. Position adjustment in the direction of arrow Z) and left and right (direction of arrow Y) is performed by the front inspection window 2, and as shown in FIG. It is done by.

[0003]

As described above, a highly airtight structure is required for the cooling chamber because the film formation processing of the wafer in the semiconductor manufacturing apparatus is performed under special conditions in a vacuum atmosphere. And However, because of the necessity of further cost reduction, it has been a problem to maintain required functions for the inspection window and to simplify the structure. SUMMARY OF THE INVENTION An object of the present invention is to simplify the structure of a cooling chamber, reduce costs, and speed up inspection and confirmation of wafers housed in the cooling chamber.

[0004]

SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, the present invention relates to a conventional cooling chamber.
The position adjustment in three directions of up, down, left, right, front and rear with respect to the wafer, which was performed by the inspection windows provided at the respective locations, is performed by one inspection window formed on the front slope of the cooling chamber having the angle α. It is an inspection window structure of a cooling chamber. That is, as described in claim 1, the above-mentioned object is to provide a housing formed of a hexahedron, and a hole formed on one surface of the hexahedron forming an angle α between the housing bottom and the housing. A transparent hard member that covers the hole, a seal member that seals between the external space and the housing internal space via the transparent hard member, and a fastening that fixes the transparent hard member and the seal member to the housing. And means for inspecting the semiconductor cooling chamber. The angle α is preferably an inclination angle (acute angle) having an average value of about 45 °, but an optimum value should be selected according to the processing content of the semiconductor housed in the cooling chamber or the teaching of the robot. That is natural.

[0005]

Embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view showing an embodiment of an inspection window of a cooling chamber according to the present invention, FIG. 2 is a diagram showing a procedure for inspecting the upper surface of a wafer by the inspection window of FIG. 1, and FIG.
FIG. 4 is a view showing a procedure for inspecting the front surface of a wafer by an inspection window of FIG.
Position adjustment of the wafer 5 accommodated in the cooling chamber 10 in three directions of up, down, left, right, front and back is performed by one inspection window 11 formed on the front slope of the cooling chamber 10 having the angle α. That is, the inspection window 11 is
As shown in FIG. 3, a glass plate 11a is formed by using a sealing material 11b and a set screw 4 to adjust the position of the glass plate 11a in two directions, up and down (arrow Z direction) and left and right (arrow Y direction). Can be performed from the front side of the inspection window 11,
As shown in FIG. 2, the position of the wafer 5 in the front-rear direction (the direction of the arrow X) can be adjusted from above the inspection window 11, and one inspection window 11 can be used for inspection in three directions. Can be implemented. The transparent hard member according to claim 1 is, for example, a hard glass plate material having an appropriate thickness, and the sealing member is, for example, an appropriate material such as a synthetic rubber material. An elastic packing material is preferred.

[0006]

According to the present invention, the inspection of the wafer in the cooling chamber, which has conventionally been performed at two locations, is performed in one step.
The inspection window at the location can also be used, and the structure can be simplified and the cost can be reduced by reducing the number of parts.

[Brief description of the drawings]

FIG. 1 is a perspective view showing an embodiment of an inspection window of a cooling chamber of the present invention.

FIG. 2 is a diagram showing a procedure for inspecting a top surface of a wafer by an inspection window of FIG. 1;

FIG. 3 is a view showing a procedure for front inspection of a wafer by an inspection window of FIG. 1;

FIG. 4 is a perspective view showing an inspection window of a conventional cooling chamber.

5 is a view showing a procedure for inspecting the upper surface of the wafer by the inspection window of FIG. 4;

6 is a diagram showing a procedure for inspecting the front of a wafer by the inspection window of FIG. 4;

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Cooling chamber 1a ... Front hole 1b ... Top hole 2 ... Front inspection window 2a ... Glass plate 2b ... Sealing material 3 ... Upper inspection window 3a ... Glass plate 3b ... Sealing material 4 ... Set screw 5 ... Wafer 10 ... Cooling chamber 10a: hole 11: inspection window 11a: glass plate 11b: sealing material

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Katsuji Toyama 3-14-20 Higashinakano, Nakano-ku, Tokyo International Electric Company (72) Inventor Tetsuaki Inada 3-14-20 Higashinakano, Nakano-ku, Tokyo International Inside Electric Co., Ltd.

Claims (1)

[Claims] 1. A housing formed of a hexahedron, a hole formed on one surface of the hexahedron forming an angle α with the bottom surface of the housing, and a transparent hard member covering the hole. A sealing member for sealing between the external space and the housing internal space via the transparent hard member; and fastening means for fixing the transparent hard member and the sealing member to the housing. Inspection window of the semiconductor cooling chamber.