JPH0677451A - Solid-state image pickup device - Google Patents

Solid-state image pickup device

Info

Publication number
JPH0677451A
JPH0677451A JP5005542A JP554293A JPH0677451A JP H0677451 A JPH0677451 A JP H0677451A JP 5005542 A JP5005542 A JP 5005542A JP 554293 A JP554293 A JP 554293A JP H0677451 A JPH0677451 A JP H0677451A
Authority
JP
Japan
Prior art keywords
solid
lid
imaging device
state imaging
state image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5005542A
Other languages
Japanese (ja)
Inventor
Hideo Yamanaka
英雄 山中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP5005542A priority Critical patent/JPH0677451A/en
Publication of JPH0677451A publication Critical patent/JPH0677451A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched

Abstract

PURPOSE:To provide a solid state image pickup device which is free from damages even if its cover is made of resin. CONSTITUTION:A solid-state image pickup element 2 is mounted on the approximately central part of a base 3, the solid-state image pickup element 2 is connected to leads 31 with bonding wires 32 and a resin cover 5 is put onto the base 3 so as to have the solid-state image pickup element 2, the bonding wires 32 and the connection parts of the leads 31 provided inside a recess 5a which is formed in the lower surface of the cover 5 to form a solid state image pickup device 1. Protrusions 6 are provided on the surface of the cover 5 except on the part corresponding to the effective picture element 21 of the solid-state image pickup element 2. Further, a surface treatment for light shielding is applied to the surfaces of the protrusions 6.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は、樹脂製の蓋が設けら
れたCCDエリアセンサやリニアセンサ等の固体撮像装
置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a solid-state image pickup device such as a CCD area sensor or a linear sensor provided with a resin lid.

【0002】[0002]

【従来の技術】この種の固体撮像装置には、セラミック
ス等から成る基台上に固体撮像素子を搭載してガラスや
樹脂等の蓋にて気密封止した、いわゆる中空パッケージ
を用いたものがある。中空パッケージは、蓋と基台との
間に所定の空間が形成されており、この空間内に固体撮
像素子やボンディングワイヤ等が密封状態で配置されて
いる。このため、吸湿性が低いとともに、固体撮像素子
に外部からのゴミが付着しにくい構造となっている。中
空パッケージを用いた固体撮像装置を製造するには、先
ずセラミックスの基台の略中央部に銀ペースト等を用い
て固体撮像素子を搭載する。そして、固体撮像素子とリ
ードとをボンディングワイヤにて配線し、ガラス製の蓋
を所定高さの枠を介して基台上に取り付ける。また、樹
脂製の蓋を使用する場合には、この蓋の下面側に設けら
れた凹部内に固体撮像素子とリードおよびボンディング
ワイヤが配置される状態に蓋を基台上に取り付ける。こ
の取り付けは、基台と枠および蓋との接合面に低温樹脂
シーラや紫外線硬化接着剤等を塗布して基台上に搭載
し、重しを用いて蓋の表面側から押圧して固定する。低
温樹脂シーラを用いる場合は金属製の重しを、また、紫
外線硬化接着剤を用いる場合は石英ガラス製の重しを用
いている。近年では、中空パッケージの加工性の向上
や、軽量化およびコストダウンを図る観点から、樹脂製
の基台や蓋を用いるものが多くなっている。
2. Description of the Related Art A solid-state image pickup device of this type uses a so-called hollow package in which a solid-state image pickup element is mounted on a base made of ceramics or the like and hermetically sealed by a lid made of glass or resin. is there. In the hollow package, a predetermined space is formed between the lid and the base, and the solid-state image sensor, the bonding wire, etc. are arranged in a sealed state in this space. For this reason, the structure has a low hygroscopic property, and also has a structure in which dust from the outside does not easily adhere to the solid-state imaging device. In order to manufacture a solid-state image pickup device using a hollow package, first, a solid-state image pickup element is mounted using silver paste or the like on a substantially central portion of a ceramic base. Then, the solid-state imaging device and the lead are wired by a bonding wire, and a glass lid is mounted on the base via a frame having a predetermined height. When a lid made of resin is used, the lid is mounted on the base so that the solid-state image sensor, the leads and the bonding wires are arranged in the recess provided on the lower surface side of the lid. This attachment is performed by applying a low-temperature resin sealer, an ultraviolet curing adhesive, or the like on the joint surface between the base, the frame and the lid, and mounting it on the base, and pressing the lid from the surface side of the lid to fix it. . A metal weight is used when the low-temperature resin sealer is used, and a quartz glass weight is used when the ultraviolet curing adhesive is used. In recent years, in order to improve the workability of hollow packages, reduce the weight, and reduce the cost, more and more products use a resin base or lid.

【0003】また、従来の蓋は、固体撮像素子への入射
光を透過させるために透明な樹脂で形成されていた。図
13(A)は、全体が透明な蓋11の断面説明図であ
る。その他、従来の蓋としては、図13(B)に示すよ
うに、斜め方向からの光の入射を防止するため、中央部
以外の上面に梨子地状の凹凸面12を形成して不透明に
したものが知られている。
Further, the conventional lid is made of a transparent resin in order to transmit the light incident on the solid-state image pickup element. FIG. 13A is a cross-sectional explanatory view of the lid 11 which is entirely transparent. In addition, as a conventional lid, as shown in FIG. 13 (B), in order to prevent the incidence of light from an oblique direction, an uneven surface 12 having a pear-skin texture is formed on the upper surface other than the central portion to make it opaque. Things are known.

【0004】[0004]

【発明が解決しようとする課題】しかしながら、樹脂製
の蓋を使用した場合、蓋の取り付けにおいて、金属やガ
ラスから成る重しを押圧することにより、蓋の表面に傷
が付いてしまう。蓋の表面は、光を透過させるために高
い平面度で加工されており、この表面に傷が付いてしま
うと固体撮像装置の特性劣化を招くことになる。特に樹
脂製の蓋を用いた固体撮像装置では大量生産に適してい
るため、蓋の表面に付く傷による歩留りの低下が大きな
問題となる。
However, when a lid made of resin is used, the surface of the lid is scratched by pressing a weight made of metal or glass when the lid is attached. The surface of the lid is processed to have high flatness for transmitting light, and if the surface is scratched, the characteristics of the solid-state imaging device will be deteriorated. In particular, a solid-state imaging device using a lid made of resin is suitable for mass production, and thus a serious problem is a decrease in yield due to scratches on the surface of the lid.

【0005】また、図13(B)に示すように、蓋11
の中央部以外の上面に梨子地状の凹凸面12を形成した
場合は、凹凸面12により不透明状になるため、斜め方
向からの光の入射を防止することができる。しかし、図
14に示すように、蓋中央の透明部に強い入射光が入っ
た場合、ボンディングワイヤ13で反射した光が蓋11
の内壁面で反射して固体撮像素子14の受光部に入り、
フレアが生じる問題があった。
As shown in FIG. 13B, the lid 11
When the pear-skin textured concavo-convex surface 12 is formed on the upper surface other than the central portion of the above, since the concavo-convex surface 12 makes it opaque, it is possible to prevent the incidence of light from an oblique direction. However, as shown in FIG. 14, when a strong incident light enters the transparent portion in the center of the lid, the light reflected by the bonding wire 13 is reflected by the lid 11.
Is reflected by the inner wall surface of the
There was a problem of flare.

【0006】さらに、上記したように、蓋を透明にする
には、蓋を成形する金属を最初放電加工で切り出し、そ
の後鏡面研磨加工しなければならず、高価な金型を必要
とする。また、光透過率が高く、複屈折も小さく、吸湿
性,透過性が極めて小さいポリオレフィン系樹脂で蓋を
形成した場合、材質が軟らかいため、シール時に装置や
治具による傷が発生し易く、加えて製品の物流やマウン
ト時にも傷が発生し易い。この傷のため、品質の低下を
起こす頻度が高かった。
Further, as described above, in order to make the lid transparent, the metal forming the lid must first be cut out by electric discharge machining and then mirror-polished, which requires an expensive die. In addition, when the lid is made of a polyolefin resin that has high light transmittance, low birefringence, and extremely low hygroscopicity and transparency, the material is soft, so damage is likely to occur due to the device or jig during sealing. It is easy for scratches to occur during product distribution and mounting. Due to this scratch, the quality of the product was often deteriorated.

【0007】この発明が解決しようとする課題は、樹脂
製の蓋を用いても傷が付かない固体撮像装置を得るに
は、どのような手段を講じればよいかという点にある。
また、その他の課題は、ボンディングワイヤに起因する
フレアを低減するにはどのような手段を講じればよいか
という点にある。
The problem to be solved by the present invention lies in what kind of means should be taken to obtain a solid-state image pickup device which is not damaged even if a lid made of resin is used.
Further, another problem is what kind of means should be taken to reduce flare caused by the bonding wire.

【0008】[0008]

【課題を解決するための手段】この出願の請求項1記載
の発明は、基台の略中央部に固体撮像素子を搭載し、こ
の固体撮像素子とリレーとをボンディングワイヤにて接
続し、樹脂製の蓋の下面に設けられた凹部内に固体撮像
素子とボンディングワイヤとリードの接続部とを配置す
る状態で基台上にこの蓋を取り付けた固体撮像装置で、
蓋表面の固体撮像素子の有効画素に対応する部分以外に
凸部を設けたことを、構成としている。
According to a first aspect of the invention of the present application, a solid-state image pickup device is mounted in a substantially central portion of a base, and the solid-state image pickup device and a relay are connected by a bonding wire to form a resin. In a solid-state imaging device in which this lid is mounted on a base in a state where a solid-state imaging device, a bonding wire, and a connecting portion of leads are arranged in a concave portion provided on the lower surface of a lid made of
The configuration is such that a convex portion is provided on the lid surface other than the portion corresponding to the effective pixels of the solid-state image sensor.

【0009】この出願の請求項2記載の発明は、上記凸
部を、蓋の相対向する辺に堤状に設けたことを構成とす
る。また、請求項3記載の発明は、上記凸部を蓋の各辺
の略中央部に突子状に設けたことを構成とする。さら
に、請求項4記載の発明は、上記凸部が3個の突子から
成り、これら3個の突子を頂点とする三角形の略中央部
に前記固体撮像素子が位置するように突子を配置したこ
とを構成とする。さらにまた、請求項5記載の発明は、
上記凸部に表面に遮光のための表面処理を施したことを
構成とする。請求項6記載の発明は、上記凸部を蓋の4
隅に突子状に設けたことを構成とする。
The invention according to claim 2 of this application is characterized in that the convex portions are provided in a bank shape on opposite sides of the lid. Further, the invention according to claim 3 is configured such that the convex portion is provided in a substantially central portion of each side of the lid in a projecting shape. Further, in the invention according to claim 4, the convex portion is composed of three protrusions, and the protrusion is arranged so that the solid-state imaging device is located at a substantially central portion of a triangle having these three protrusions as vertices. The arrangement is done. Furthermore, the invention according to claim 5 is
The surface of the convex portion is subjected to a surface treatment for shading. According to a sixth aspect of the present invention, the convex portion is a lid
The structure is provided in the shape of a protrusion in the corner.

【0010】請求項7記載の発明は、基台の略中央に固
体撮像素子を搭載し、かつ該基台に備えられたリードと
該固体撮像素子とをボンディングワイヤで接続すると共
に、蓋を前記基台に被せて前記固体撮像素子を封止した
固体撮像装置において、前記蓋は、前記固体撮像素子の
有効画素領域への入射光を透過させる光透過領域を中央
部に有し、かつ封止された空間に面する表面が前記中央
部を除いて不透明な乱反射面であることを、構成として
いる。
According to a seventh aspect of the present invention, the solid-state image pickup device is mounted substantially in the center of the base, and the leads provided on the base and the solid-state image pickup device are connected by bonding wires, and the lid is provided with the lid. In the solid-state imaging device in which the solid-state imaging device is covered with a base and sealed, the lid has a light-transmitting region in the central portion for transmitting incident light to an effective pixel region of the solid-state imaging device, and sealing The surface facing the defined space is an opaque diffuse reflection surface excluding the central portion.

【0011】請求項8記載の発明は、上記蓋がポリオレ
フィン系樹脂で成ることを構成とする。また、請求項9
記載の発明は、上記乱反射面が、梨子地状の凹凸面であ
り、上記光透過領域の表面は鏡面であることを構成とす
る。さらに、請求項10記載の発明は、上記蓋が金型を
用いて射出成形した樹脂成型物であることを構成とす
る。
The invention according to claim 8 is characterized in that the lid is made of a polyolefin resin. In addition, claim 9
In the invention described above, the irregular reflection surface is a pear-like textured surface, and the surface of the light transmission region is a mirror surface. Further, the invention according to claim 10 is characterized in that the lid is a resin molded product injection-molded using a mold.

【0012】[0012]

【作用】この出願の請求項1〜6記載の発明において
は、蓋表面の有効画素に対応する部分以外に凸部が設け
られているため、蓋の表面側から重しを押圧する際、重
しと凸部とが接触することになる。
In the inventions according to claims 1 to 6 of this application, since the convex portion is provided on the lid surface other than the portion corresponding to the effective pixels, when the weight is pressed from the front surface side of the lid, The ridge and the convex portion come into contact with each other.

【0013】すなわち、蓋表面の有効画素に対応する部
分には、重しが直接接触することなく、しかも、凸部が
蓋表面上に均等配置されているので等圧にて蓋を押圧で
きる。
That is, the weight does not directly contact the portion corresponding to the effective pixel on the lid surface, and the convex portions are evenly arranged on the lid surface, so that the lid can be pressed with equal pressure.

【0014】また、凸部の表面に遮光のための表面処理
を施すことにより、有効画素上方以外から固体撮像素子
に進入する不要光を遮断できるため、フレア等の画像の
乱れが抑制されることになる。
Further, by performing a surface treatment for light shielding on the surface of the convex portion, unnecessary light entering the solid-state image pickup device from a position other than above the effective pixel can be blocked, so that image disturbance such as flare can be suppressed. become.

【0015】この出願の請求項7及び請求項8記載の発
明においては、蓋の、封止された空間に面する表面(内
側面)のうち、中央部の光透過領域を除く面が乱反射面
となっている。このため、光透過領域から入った光がボ
ンディングワイヤで反射して乱反射面に入射した場合、
乱反射するため、固体撮像素子の有効画素領域へ強い光
が入射することを抑制する作用がある。
In the invention according to claim 7 and claim 8 of this application, among the surfaces (inner side surfaces) of the lid facing the sealed space, the surface excluding the light transmission region in the central portion is a diffuse reflection surface. Has become. Therefore, when the light entering from the light transmitting area is reflected by the bonding wire and is incident on the irregular reflection surface,
Since it is diffusely reflected, it has an effect of suppressing strong light from entering the effective pixel region of the solid-state image sensor.

【0016】請求項9記載の発明は、ポリオレフィン系
樹脂で成る蓋の光透過領域は、光透過率が高く、複屈折
が小さいため、固体撮像素子の有効画素領域への光の入
射効率が高くなる。また、ポリオレフィン系樹脂は、吸
湿性,透湿性が極めて小さいため、蓋で封止された固体
撮像素子の水による特性劣化を防止する作用がある。ま
た、蓋中央の光透過領域以外の表面を乱反射面、特に梨
子地状の凹凸面とすれば、蓋の製作時のハンドリング
や、固体撮像装置の製造工程中の組立て装置,治具等に
より傷が生じても目立たなくなり歩留まりを向上するこ
とができる。
According to a ninth aspect of the present invention, since the light transmission region of the lid made of polyolefin resin has a high light transmittance and a small birefringence, the incident efficiency of light to the effective pixel region of the solid-state image pickup device is high. Become. Further, since the polyolefin resin has extremely low hygroscopicity and moisture permeability, it has an action of preventing characteristic deterioration of the solid-state imaging device sealed with the lid due to water. Also, if the surface other than the light-transmitting area in the center of the lid is made to be a diffuse reflection surface, especially a rough surface with a pear-skin texture, it will be scratched by handling during the production of the lid and by assembly equipment, jigs, etc. during the manufacturing process of the solid-state imaging device. Even if this occurs, it becomes inconspicuous and the yield can be improved.

【0017】請求項10記載の発明においては、射出成
形により、光透過領域と乱反射面が容易に形成できる。
According to the tenth aspect of the invention, the light transmission region and the irregular reflection surface can be easily formed by injection molding.

【0018】特に、金型の、乱反射面に対応する面は、
通常、金型の切断加工である放電加工によってできた面
そのままで梨子地状の凹凸面であるため、光透過領域に
対応する部分だけ鏡面研磨加工すればよく、容易に作成
ができる。
Particularly, the surface of the mold corresponding to the irregular reflection surface is
Usually, since the surface formed by electric discharge machining, which is a cutting process of a mold, is a pear-like textured surface as it is, only the portion corresponding to the light transmitting region needs to be mirror-polished and can be easily manufactured.

【0019】[0019]

【実施例】以下、この発明に係る固体撮像装置の詳細を
図面に示す実施例に基づいて説明する。
DESCRIPTION OF THE PREFERRED EMBODIMENTS The details of the solid-state image pickup device according to the present invention will be described below with reference to the embodiments shown in the drawings.

【0020】(実施例1)図1は実施例1の固体撮像装
置を説明する断面図、図2はその斜視図である。
(Embodiment 1) FIG. 1 is a sectional view for explaining a solid-state image pickup device of Embodiment 1, and FIG. 2 is a perspective view thereof.

【0021】この固体撮像装置1は、基台3の略中央部
に搭載されたCCDやリニアセンサ等の固体撮像素子2
を樹脂製の蓋5の凹部5a内に配置して密封状態に封止
した、いわゆる中空パッケージから成るものである。固
体撮像素子2の上面には有効画素21が形成されてお
り、外部からの光を電気信号に変換している。また、固
体撮像素子2の周辺には外部との電気的接続を得るため
のリード31が配置されており、このリード31と固体
撮像素子2とがボンディングワイヤ32にて配線されて
いる。この固体撮像素子2とリード31とボンディング
ワイヤ32とが蓋5の凹部5a内に配置される状態に蓋
5が基台3上に取り付けられている。
The solid-state image pickup device 1 includes a solid-state image pickup device 2 such as a CCD or a linear sensor mounted on a substantially central portion of a base 3.
Is a hollow package which is placed in the recess 5a of the resin lid 5 and hermetically sealed. Effective pixels 21 are formed on the upper surface of the solid-state image sensor 2 and convert light from the outside into electric signals. Further, a lead 31 for obtaining an electrical connection to the outside is arranged around the solid-state image sensor 2, and the lead 31 and the solid-state image sensor 2 are wired by a bonding wire 32. The lid 5 is mounted on the base 3 in a state where the solid-state imaging device 2, the leads 31, and the bonding wires 32 are arranged in the recess 5 a of the lid 5.

【0022】この蓋5は、例えばポリオレフィン系の透
明な樹脂にて成形されたもので、その表面は高い平坦度
に加工されている。また、蓋5表面の有効画素21に対
応する部分以外の面には、例えば蓋5の相対向する辺に
堤状の凸部6が設けられている。この凸部6の高さは
0.1mm程度でよく、蓋5の表面側から重しを押圧し
た際に、この重しと蓋5表面との間にわずかな隙間が形
成されるものであればよい。
The lid 5 is made of, for example, a transparent polyolefin resin and its surface is processed to have a high degree of flatness. On the surface of the lid 5 other than the portion corresponding to the effective pixels 21, for example, bank-shaped convex portions 6 are provided on opposite sides of the lid 5. The height of the convex portion 6 may be about 0.1 mm, and when the weight is pressed from the surface side of the lid 5, a slight gap is formed between the weight and the surface of the lid 5. Good.

【0023】次に、この固体撮像装置1の製造方法を図
3〜図4の断面図に基づいて説明する。
Next, a method of manufacturing the solid-state image pickup device 1 will be described with reference to the sectional views of FIGS.

【0024】先ず、図3に示すように、所定の位置にリ
ード31が配置された基台3の略中央部に銀ペースト等
を用いて固体撮像素子2を搭載する。そして、固体撮像
素子2とその周囲に配置されたリード31とボンディン
グワイヤ32により配線する。
First, as shown in FIG. 3, the solid-state image pickup device 2 is mounted on the base 3 having the lead 31 arranged at a predetermined position in a substantially central portion thereof using silver paste or the like. Then, the solid-state image sensor 2 and the leads 31 arranged around the solid-state image sensor 2 and the bonding wires 32 are used for wiring.

【0025】次いで、蓋5の下面に低温樹脂シーラや紫
外線硬化接着剤等の接着剤7を塗布し、基台3上に取り
付ける。これにより、蓋5の凹部5a内に固体撮像素子
2とリード31およびボンディングワイヤ32を配置す
る。
Next, the lower surface of the lid 5 is coated with an adhesive 7 such as a low temperature resin sealer or an ultraviolet curing adhesive, and the lid 5 is mounted on the base 3. As a result, the solid-state image sensor 2, the lead 31 and the bonding wire 32 are arranged in the recess 5 a of the lid 5.

【0026】そして、図4に示すように、蓋5の表面側
に重し8を搭載して押圧する。この際、重し8の下面は
蓋5表面に設けられた凸部6と当接するため、重し8と
蓋5表面との間に隙間が形成される。したがって、重し
8の荷重は凸部6を介して蓋5に伝わり、蓋5表面に重
し8が接触することなく基台3と蓋5とを密着させる。
例えば、接着剤7として紫外線硬化接着剤を用いた場合
には、石英ガラス製の重し8を使用し、押圧した状態で
重し8上方から紫外線を照射する。これにより、紫外線
が石英ガラス製の重し8を透過して接着剤7に照射され
硬化することになる。
Then, as shown in FIG. 4, a weight 8 is mounted on the surface side of the lid 5 and pressed. At this time, since the lower surface of the weight 8 contacts the convex portion 6 provided on the surface of the lid 5, a gap is formed between the weight 8 and the surface of the lid 5. Therefore, the load of the weight 8 is transmitted to the lid 5 via the convex portion 6, and the base 3 and the lid 5 are brought into close contact with each other without the weight 8 coming into contact with the surface of the lid 5.
For example, when an ultraviolet curing adhesive is used as the adhesive 7, a quartz glass weight 8 is used, and ultraviolet rays are irradiated from above the weight 8 in a pressed state. As a result, the ultraviolet rays pass through the quartz glass weight 8 and are applied to the adhesive 7 to be cured.

【0027】(実施例2)次に本発明の実施例2を説明
する。
(Second Embodiment) Next, a second embodiment of the present invention will be described.

【0028】先ず、図5の斜視図に示すような固体撮像
装置1は、蓋5の相対向する短辺に凸部6が堤状に設け
られたもので、固体撮像素子2の画像に悪影響を及ぼさ
ない程度の大きさに形成されている。
First, in the solid-state image pickup device 1 as shown in the perspective view of FIG. 5, the convex portions 6 are provided in a bank shape on the opposite short sides of the lid 5, which adversely affects the image of the solid-state image pickup element 2. It is formed to a size that does not reach

【0029】なお、必要に応じて蓋5の4辺全てに堤状
の凸部6を設けてもよい。
If necessary, a bank-shaped convex portion 6 may be provided on all four sides of the lid 5.

【0030】(実施例3)本実施例は、図6の斜視図に
示すように、蓋5の各辺の略中央部に突子状の凸部6が
設けられたものである。
(Embodiment 3) In the present embodiment, as shown in the perspective view of FIG. 6, a projecting portion 6 is provided at a substantially central portion of each side of the lid 5.

【0031】このような凸部6の配置により、図4に示
す重し8を蓋5の表面側から押圧すると、蓋5の下面と
基台3との接触面に均等に荷重することができる。
With such arrangement of the convex portions 6, when the weight 8 shown in FIG. 4 is pressed from the surface side of the lid 5, the contact surface between the lower surface of the lid 5 and the base 3 can be evenly loaded. .

【0032】(実施例4)本実施例は、図7の斜視図に
示すように、蓋5の4隅に突子状の凸部6が設けられた
もので、前述の固体撮像装置1と同様に、蓋5の下面と
基台3との接触面に均等な荷重を与えることができる。
(Embodiment 4) In this embodiment, as shown in the perspective view of FIG. 7, a protrusion 5 having a projecting shape is provided at four corners of a lid 5, and the solid-state image pickup device 1 and Similarly, an even load can be applied to the contact surface between the lower surface of the lid 5 and the base 3.

【0033】(実施例5)本実施例は、図8の平面図に
示すように、凸部6が3個の突子から構成されたもの
で、この3個の突子を頂点とする三角形の略中央部に固
体撮像素子2が位置するように配置されている。
(Embodiment 5) In the present embodiment, as shown in the plan view of FIG. 8, the convex portion 6 is composed of three protrusions, and a triangle having these three protrusions as vertices. The solid-state image pickup device 2 is arranged substantially at the center.

【0034】これにより、凸部6の面積を小さくするこ
とができるため、固体撮像素子2の光の取り込みに対し
て凸部6が邪魔になることがなく、しかも蓋5に均等な
荷重を与えることができる。
As a result, the area of the convex portion 6 can be reduced, so that the convex portion 6 does not interfere with the light pickup of the solid-state image pickup element 2 and a uniform load is applied to the lid 5. be able to.

【0035】(実施例6)本実施例は、図9の斜視図に
示すように、蓋5上面の固体撮像素子2の有効画素に対
応する部分以外全部に凸部6が設けられたものである。
(Embodiment 6) In the present embodiment, as shown in the perspective view of FIG. 9, a convex portion 6 is provided on the upper surface of the lid 5 except the portion corresponding to the effective pixel of the solid-state image pickup device 2. is there.

【0036】このため、最も重要な有効画素に対応する
蓋5表面を保護しやすい状態となっている。また、凸部
6の表面に遮光のための表面処理を施してもよい。例え
ば、凸部6の表面に黒色の塗料を被着したり、凸部6の
表面を梨子地状に形成する。この代表的な例として図1
0の斜視図に示す固体撮像装置1は、固体撮像素子2の
有効画素21に対応する蓋5表面以外の全部に凸部6が
設けられており、しかもこの凸部6の表面全体に梨子地
状の表面処理が施されている。
Therefore, the surface of the lid 5 corresponding to the most important effective pixel is easily protected. Further, the surface of the convex portion 6 may be subjected to a surface treatment for shading. For example, a black paint is applied to the surface of the convex portion 6, or the surface of the convex portion 6 is formed in a pear-skin texture. As a typical example of this, FIG.
In the solid-state imaging device 1 shown in the perspective view 0, the convex portion 6 is provided on the entire surface of the solid-state imaging element 2 except for the surface of the lid 5 corresponding to the effective pixel 21, and the entire surface of the convex portion 6 has a pear surface. -Like surface treatment is applied.

【0037】これにより、有効画素21に対応する蓋5
表面以外から固体撮像素子2に進入する不要な光や強い
光を遮断することができるため、フレア等の画像に対す
る悪影響を抑制することができる。
As a result, the lid 5 corresponding to the effective pixel 21
Since it is possible to block unnecessary light or strong light that enters the solid-state image sensor 2 from other than the surface, it is possible to suppress adverse effects on the image such as flare.

【0038】なお、これらの固体撮像装置1に用いた各
種の蓋5は、それぞれの形に対応した形状の金型を用い
ることで、容易に形成することができる。
The various lids 5 used in the solid-state image pickup device 1 can be easily formed by using a mold having a shape corresponding to each shape.

【0039】(実施例7)図11は本実施例における蓋
5の断面図、図2は本実施例の固体撮像装置の要部断面
図である。
(Embodiment 7) FIG. 11 is a sectional view of the lid 5 in the present embodiment, and FIG. 2 is a sectional view of the essential portions of the solid-state imaging device of the present embodiment.

【0040】本実施例においては、図11に示すよう
に、固体撮像素子2の有効画素領域に対応する、蓋5の
中央部を表裏面を鏡面で形成した光透過領域5bとして
いる。そして、光透過領域5b以外の全表面を梨子地状
の微細な凹凸面5cとしている。この蓋5は、ポリオレ
フィン系樹脂を金型を用い射出成形したものである。こ
の金型は、光透過領域5aに対応する部分だけを鏡面加
工すればよく、他の部分は金型を放電加工により切断し
たままの状態で梨子地状の凹凸面が形成できる。
In the present embodiment, as shown in FIG. 11, the central portion of the lid 5 corresponding to the effective pixel area of the solid-state image pickup element 2 is a light transmitting area 5b having front and back surfaces formed by mirror surfaces. The entire surface other than the light transmitting area 5b is made into a finely textured surface 5c having a pear-skin texture. The lid 5 is formed by injection molding a polyolefin resin using a mold. In this die, only the portion corresponding to the light transmitting region 5a needs to be mirror-finished, and the other portions can have a pear-like textured surface in a state where the die is cut by electric discharge machining.

【0041】このような蓋5を基台3に接着した場合、
図12に示すように、光透過領域5bから入った強い光
がボンディングワイヤ32で反射して、蓋5の内壁に入
射しても、乱反射面5cにより強い光は分散される。こ
のため、固体撮像素子2の有効画素領域では強い反射光
が入射することがなくなり、フレアの発生が防止でき
る。また、蓋5下端面も凹凸が形成されているため、接
着剤のなじみが良く気密性が向上する。
When such a lid 5 is bonded to the base 3,
As shown in FIG. 12, even if the strong light entering from the light transmitting region 5b is reflected by the bonding wire 32 and enters the inner wall of the lid 5, the strong light is dispersed by the irregular reflection surface 5c. Therefore, strong reflected light does not enter the effective pixel area of the solid-state image sensor 2, and flare can be prevented from occurring. Further, since the lower end surface of the lid 5 is also formed with irregularities, the adhesive is well compatible with and airtightness is improved.

【0042】本実施例では、蓋中央の光透過領域以外の
全表面を乱反射面5bとしたが、少なくとも蓋5の封止
空間に面する内側面(光透過領域を除く)を乱反射面と
すれば、フレア防止効果が得られる。
In this embodiment, the entire surface other than the light transmission area in the center of the lid is the diffuse reflection surface 5b, but at least the inner surface of the lid 5 facing the sealing space (excluding the light transmission area) is a diffuse reflection surface. If so, the flare prevention effect can be obtained.

【0043】以上、この発明の各実施例について説明し
たが、この発明はこれに限定されるものではなく、構成
の要旨の範囲で各種の設計変更が可能である。例えば、
上記各実施例では、容器状の蓋に本発明を適用したが、
他の形状の蓋でもよい。
Although each embodiment of the present invention has been described above, the present invention is not limited to this, and various design changes can be made within the scope of the gist of the configuration. For example,
In each of the above embodiments, the present invention is applied to the container-shaped lid,
Other shaped lids may be used.

【0044】また、上記各実施例では、ポリオレフィン
系樹脂で蓋を形成したが、他の材料を用いても勿論よ
い。
In each of the above embodiments, the lid is made of polyolefin resin, but other materials may be used.

【0045】[0045]

【発明の効果】以上説明したように、この出願の請求項
1〜6記載の発明によれば次のような効果がある。
As described above, according to the inventions described in claims 1 to 6 of this application, the following effects are obtained.

【0046】すなわち、蓋の表面に凸部が設けられてい
るため、樹脂製の蓋を用いた場合であっても、蓋の表面
側から押圧する重しにより蓋の表面が傷つけられること
がない。このため、固体撮像装置の特性劣化を防ぐこと
ができるとともに、大量生産の可能な樹脂製の蓋を用い
るため固体撮像装置の歩留りを向上することが可能とな
る。しかも、この凸部の表面に遮光のための表面処理を
施すことで、画像に対する悪影響を積極的に改善するこ
とが可能となる。
That is, since the convex portion is provided on the surface of the lid, even if the lid made of resin is used, the surface of the lid is not damaged by the weight pressed from the surface side of the lid. . Therefore, the characteristics of the solid-state imaging device can be prevented from being deteriorated, and the yield of the solid-state imaging device can be improved because the resin lid that can be mass-produced is used. Moreover, by performing a surface treatment for light shielding on the surface of the convex portion, it is possible to positively improve the adverse effect on the image.

【0047】また、この出願の請求項7及び請求項8記
載の発明によれば、ボンディングワイヤに起因するフレ
アを低減する効果がある。
Further, according to the invention described in claims 7 and 8 of this application, there is an effect of reducing flare caused by the bonding wire.

【0048】さらに、この出願の請求項9記載の発明に
よれば、上記効果に加えて、光特性が良くしかも吸湿
性,透湿性の極めて小さいポリオレフィン系樹脂を用い
て、歩留,品質を向上する効果がある。
Further, according to the invention of claim 9 of this application, in addition to the above effects, the yield and quality are improved by using a polyolefin resin having good optical characteristics and extremely low hygroscopicity and moisture permeability. Has the effect of

【0049】さらにまた、この出願の請求項10記載の
発明によれば、蓋中央の光透過領域に対応する、金型面
だけ鏡面加工するだけでよいため、低コストな金型を用
いることができる。
Further, according to the invention of claim 10 of this application, since only the mold surface corresponding to the light transmitting region in the center of the lid needs to be mirror-finished, a low-cost mold can be used. it can.

【図面の簡単な説明】[Brief description of drawings]

【図1】実施例1を説明する断面図。FIG. 1 is a cross-sectional view illustrating a first embodiment.

【図2】実施例1を説明する斜視図。FIG. 2 is a perspective view illustrating the first embodiment.

【図3】蓋の取り付けを説明する断面図。FIG. 3 is a cross-sectional view illustrating attachment of a lid.

【図4】重しによる押圧を説明する断面図。FIG. 4 is a cross-sectional view illustrating pressing by weight.

【図5】実施例2を説明する斜視図。FIG. 5 is a perspective view illustrating a second embodiment.

【図6】実施例3を説明する斜視図。FIG. 6 is a perspective view illustrating a third embodiment.

【図7】実施例4を説明する斜視図。FIG. 7 is a perspective view illustrating a fourth embodiment.

【図8】実施例5を説明する平面図。FIG. 8 is a plan view illustrating a fifth embodiment.

【図9】実施例6を説明する斜視図。FIG. 9 is a perspective view illustrating a sixth embodiment.

【図10】実施例6の変形例を説明する斜視図。FIG. 10 is a perspective view illustrating a modified example of the sixth embodiment.

【図11】実施例7の蓋を示す断面図。FIG. 11 is a sectional view showing a lid of the seventh embodiment.

【図12】実施例7の要部断面図。FIG. 12 is a cross-sectional view of a main part of the seventh embodiment.

【図13】(A)及び(B)は従来の蓋を示す断面図。13A and 13B are cross-sectional views showing a conventional lid.

【図14】従来の固体撮像装置の要部断面図。FIG. 14 is a sectional view of a main part of a conventional solid-state imaging device.

【符号の説明】[Explanation of symbols]

1…固体撮像装置 2…固体撮像素子 3…基台 5…蓋 5a…凹部 5b…光透過領域 5c…乱反射面 6…凸部 21…有効画素 31…リード 32…ボンディングワイヤ DESCRIPTION OF SYMBOLS 1 ... Solid-state imaging device 2 ... Solid-state imaging device 3 ... Base 5 ... Lid 5a ... Recess 5b ... Light transmission area 5c ... Diffuse reflection surface 6 ... Convex part 21 ... Effective pixel 31 ... Lead 32 ... Bonding wire

Claims (10)

【特許請求の範囲】[Claims] 【請求項1】 略中央部に固体撮像素子を搭載し、かつ
リードと前記固体撮像素子とをボンディングワイヤにて
接続して成る基台と、下面に形成された凹部内に前記固
体撮像素子と前記ボンディングワイヤと前記リードの接
続部とを配置した状態に、前記基台上に載置された樹脂
製の蓋とから成る固体撮像装置において、 前記蓋表面の前記固体撮像素子の有効画素に対応する部
分以外に凸部が設けられていることを特徴とする固体撮
像装置。
1. A base having a solid-state image sensor mounted in a substantially central portion and connecting a lead and the solid-state image sensor with a bonding wire, and the solid-state image sensor in a recess formed in a lower surface. A solid-state imaging device comprising a resin lid placed on the base in a state where the bonding wire and the connection portion of the lead are arranged, which corresponds to an effective pixel of the solid-state imaging device on the lid surface. A solid-state imaging device, wherein a convex portion is provided in a portion other than a portion to be formed.
【請求項2】 前記凸部は、前記蓋の相対向する辺に堤
状に設けられていることを特徴とする請求項1記載の固
体撮像装置。
2. The solid-state imaging device according to claim 1, wherein the convex portions are provided in a bank shape on opposite sides of the lid.
【請求項3】 前記凸部は、前記蓋の各辺の略中央部に
突子状に設けられていることを特徴とする請求項1記載
の固体撮像装置。
3. The solid-state imaging device according to claim 1, wherein the convex portion is provided in a substantially central portion of each side of the lid in a protrusion shape.
【請求項4】 前記凸部は3個の突子から成り、前記3
個の突子を頂点とする三角形の略中央部に前記固体撮像
素子が位置する状態に前記3個の突子が配置されている
ことを特徴とする請求項1記載の固体撮像装置。
4. The protrusion comprises three protrusions,
2. The solid-state imaging device according to claim 1, wherein the three protrusions are arranged in a state where the solid-state image pickup element is located at a substantially central portion of a triangle having the individual protrusions as apexes.
【請求項5】 前記凸部の表面には、遮光のための表面
処理が施されていることを特徴とする請求項1記載の固
体撮像装置。
5. The solid-state imaging device according to claim 1, wherein a surface treatment for light shielding is applied to a surface of the convex portion.
【請求項6】 前記凸部は、前記蓋の4隅に突子状に設
けられていることを特徴とする請求項1記載の固体撮像
装置。
6. The solid-state imaging device according to claim 1, wherein the protrusions are provided in four corners of the lid in a projecting shape.
【請求項7】 基台の略中央に固体撮像素子を搭載し、
かつ該基台に備えられたリードと該固体撮像素子とをボ
ンディングワイヤで接続すると共に、蓋を前記基台に被
せて前記固体撮像素子を封止した固体撮像装置におい
て、 前記蓋は、前記固体撮像素子の有効画素領域への入射光
を透過させる光透過領域を中央部に有し、かつ封止され
た空間に面する表面が前記中央部を除いて不透明な乱反
射面であることを特徴とする固体撮像装置。
7. A solid-state image sensor is mounted on the base substantially at the center,
And in the solid-state imaging device in which the lead provided in the base and the solid-state image sensor are connected by a bonding wire, and the lid is covered to seal the solid-state image sensor, the lid is the solid state. A light transmission region for transmitting incident light to an effective pixel region of the image pickup device is provided in a central portion, and a surface facing the sealed space is an opaque diffuse reflection surface except for the central portion. Solid-state imaging device.
【請求項8】 前記乱反射面は、梨子地状の凹凸面であ
り、前記光透過領域の表面は鏡面である請求項7記載の
固体撮像装置。
8. The solid-state imaging device according to claim 7, wherein the irregular reflection surface is a pear-skin textured uneven surface, and the surface of the light transmission region is a mirror surface.
【請求項9】 前記蓋は、ポリオレフィン系樹脂で成る
請求項7又は請求項8記載の固体撮像装置。
9. The solid-state imaging device according to claim 7, wherein the lid is made of polyolefin resin.
【請求項10】 前記蓋は金型を用いて射出成形された
樹脂成型物である請求項7又は請求項8又は請求項9記
載の固体撮像装置。
10. The solid-state imaging device according to claim 7, 8 or 9, wherein the lid is a resin molded product injection-molded using a mold.
JP5005542A 1992-06-23 1993-01-18 Solid-state image pickup device Pending JPH0677451A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5005542A JPH0677451A (en) 1992-06-23 1993-01-18 Solid-state image pickup device

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP18996692 1992-06-23
JP4-189966 1992-06-23
JP5005542A JPH0677451A (en) 1992-06-23 1993-01-18 Solid-state image pickup device

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2001273144A Division JP3685114B2 (en) 1992-06-23 2001-09-10 Solid-state imaging device

Publications (1)

Publication Number Publication Date
JPH0677451A true JPH0677451A (en) 1994-03-18

Family

ID=26339509

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5005542A Pending JPH0677451A (en) 1992-06-23 1993-01-18 Solid-state image pickup device

Country Status (1)

Country Link
JP (1) JPH0677451A (en)

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* Cited by examiner, † Cited by third party
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JP2002512436A (en) * 1998-02-06 2002-04-23 シェルケース リミティド Integrated circuit device
JP2007053337A (en) * 2005-07-21 2007-03-01 Matsushita Electric Ind Co Ltd Optical device and manufacturing method thereof, optical device apparatus, and camera module
JP2020004769A (en) * 2018-06-25 2020-01-09 日本電気硝子株式会社 Airtight package and manufacturing method thereof
CN110752188A (en) * 2018-07-23 2020-02-04 信越化学工业株式会社 Synthetic quartz glass cavity, synthetic quartz glass cavity cover, optical device package and manufacturing method

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JP2007053337A (en) * 2005-07-21 2007-03-01 Matsushita Electric Ind Co Ltd Optical device and manufacturing method thereof, optical device apparatus, and camera module
JP4686400B2 (en) * 2005-07-21 2011-05-25 パナソニック株式会社 Optical device, optical device apparatus, camera module, and optical device manufacturing method
JP2020004769A (en) * 2018-06-25 2020-01-09 日本電気硝子株式会社 Airtight package and manufacturing method thereof
CN110752188A (en) * 2018-07-23 2020-02-04 信越化学工业株式会社 Synthetic quartz glass cavity, synthetic quartz glass cavity cover, optical device package and manufacturing method
JP2020021937A (en) * 2018-07-23 2020-02-06 信越化学工業株式会社 Synthetic quartz glass cavity, synthetic quartz glass cavity lid, optical device package, and method for manufacturing them
US11424389B2 (en) 2018-07-23 2022-08-23 Shin-Etsu Chemical Co., Ltd. Synthetic quartz glass cavity member, synthetic quartz glass cavity lid, optical device package, and making methods
US11757067B2 (en) 2018-07-23 2023-09-12 Shin-Etsu Chemical Co., Ltd. Synthetic quartz glass cavity member, synthetic quartz glass cavity lid, optical device package, and making methods

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