JPH1069618A - Sample stage and charged particle ray device using the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To simply introduce the device as it is and to facilitate observation and measurement by providing plural terminals on a sample fixing stage and providing plural terminal receptacles on the side of a moving mechanism part. SOLUTION: When the sample fixing stage 12 held by a carrier rod 211 is moved with its pins 121 toward a fixing stage holding part 13 so as to house these pins 121 into their receptacles 131, the stage 12 is mechanically fixed to the holding part 13. Then, a sample 11 of a magnetic head is introduced into a lens barrel 18. A signal for generating a write magnetic field is given to the magnetic head by using a sample driving part 16 outside the lens barrel and connected electrically to the sample 11. Consequently, measurement of a deflecting amt. by the magnetic field is performed by changing an arrival position of an electron ray 10 on a fluorescent plate 271 in an observation room 27 or on a film 281 in a camera room 28.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sample stage technique for observing a magnetic device or measuring a physical quantity such as a magnetic field distribution using a charged particle beam apparatus.

[0002]

2. Description of the Related Art When evaluating and analyzing characteristics of a magnetic device such as a magnetic head used in a magnetic disk drive, the device is driven, the temperature of the device is changed, and
It has become indispensable to measure physical quantities such as electric characteristics and magnetic characteristics by changing an operating condition by applying an electric field or a magnetic field to a device. For example, the performance of the head can be evaluated by measuring the magnetic field generated by the head while supplying a current to the coil of the magnetic head used in the magnetic disk drive. In addition, various currents near the sample, such as applying an external magnetic field to the sample by applying a current to the coil installed near the observation sample, or adjusting the temperature of the head by energizing a heating / cooling member that is thermally connected to the sample. If the observation or measurement is performed while changing the atmospheric conditions, another characteristic of the sample can be evaluated. Accordingly, there is a need for a means for transmitting an electric signal to the sample and its vicinity as necessary for the purpose of the above observation and measurement.

On the other hand, a charged particle beam apparatus represented by an electron microscope is characterized by high spatial resolution, physical quantity measurement such as elemental analysis, and sensitivity to a magnetic field. In recent years, it has been widely used for observation and measurement of the above magnetic devices. In such a charged particle beam apparatus, a sample holder capable of sending an electric signal near the sample is prepared.
For example, JP-A-6-44936 describes a side entry holder for a transmission electron microscope. FIG. 11 shows the configuration of this holder. The holder includes a heating member 88 for heating the sample 82 in the sample holder 85 of the side entry, a conducting wire 90, a switch 91, and a variable resistor 9.
2. A battery 93 is incorporated. The heating member 88 is located near the sample, and includes a switch 91, a variable resistor 92, and a battery 93.
Is installed at a position far from the sample 82. An appropriate current is applied to the heating member 88 near the sample 82 by the switch 91 and the variable resistor 92 incorporated therein, and the sample 82 is heated by utilizing heat conduction, so that normal electron microscope observation can be performed.

[0004]

The sample holder of the side entry described in the above-mentioned prior art is for transmitting and transmitting electrons to a thin film sample with a transmission electron microscope. On the other hand, in the evaluation and observation of a magnetic device such as a magnetic head, it is important to analyze a film on the surface or to pass an electron beam near the surface of the device while keeping the shape of the device. This is because when processing is performed, the original important properties of the device may change or disappear. That is, in a magnetic device, it may be desired to perform observation in a state in which processing for observation is not performed, rather than thinning a part of the device and transmitting electrons therethrough. Further, in the above technique, a supply source of an electric signal is incorporated in the holder. Since the space in the holder is limited, a small supply source is good, but a complicated and large electric signal supply source cannot be incorporated in the holder.

The problem to be solved by the present invention is that a device can be easily introduced into a charged particle beam apparatus as it is, observation and measurement can be performed, and an electric signal to be applied to a sample and an electric signal for changing the surrounding atmosphere can be obtained. An object of the present invention is to provide a sample stage capable of introducing a signal into a sample or a vicinity thereof.

[0006]

According to the present invention, a sample stage has the following structure. That is, a sample fixing table to which a sample is fixed, a fixing table holding section to which the sample fixing table can be attached and detached, a moving mechanism section for moving the fixing table holding section to a desired position, and a mechanism control for controlling the moving mechanism section. The sample stage includes a plurality of terminals provided on the sample fixing table, and a plurality of terminal receivers provided on the moving mechanism side. Here, the sample is a magnetic device such as a magnetic head and a magnetic recording medium.

Alternatively, the following configuration is adopted. A sample fixing table to which the sample is fixed, a fixing table holding section to which the sample fixing table can be attached and detached, a moving mechanism section for moving the fixing table holding section to a desired position, and a mechanism control section for controlling the moving mechanism section. A sample stage that is configured and mechanically attachable to and detachable from the holder holder of the sample holder. The sample holder and the holder holder have a plurality of sets of terminals and receivers, respectively. A mechanical connection with the holding portion is made by the terminal and the receiver, and the terminal and the receiver are in electrical contact with each other, and an electrical signal is supplied to the sample through the terminal and the receiver.

[0008] Further, the fixed stage holder of the sample stage is provided with a guide for adjusting the mounting position of the sample fixed stage. The guide is constituted by a mechanical fit or a combination of the mechanical fit and the guide pin and the notch groove into which the guide pin is inserted.

The following configuration also solves the problem. That is, a sample fixing table to which a sample is fixed, a fixing table holding section to which the sample fixing table is fixed, a moving mechanism section for moving the fixing table holding section to a desired position, and a mechanism control section for controlling the moving mechanism section. This is a sample stage that can be mechanically attached to and detached from the sample holder on the sample holder. The sample holder and the sample holder have a plurality of sets of terminals and receivers, respectively. Is provided. Mechanical connection between the sample holder and the holder holder is made by a terminal and a receiver, and the terminal and the receiver are in electrical contact with each other, and an electric signal is supplied to the atmosphere control member through the terminal and the receiver, or the sample and the temperature are controlled. An electrical signal is applied to both members. Here, the atmosphere adjusting member is any one of a heating wire, an electronic cooling element, a coil and an electrostatic deflecting plate.

[0010] Further, a sample fixing table to which a sample is fixed, a fixing table holding section detachable from the sample fixing table, a moving mechanism section for moving the fixing table holding section to a desired position, and a moving mechanism section. The sample stage is configured with a mechanism control unit for controlling and is mechanically attachable and detachable to and from the holder holder of the sample holder, and the sample holder and the holder holder are provided with a plurality of sets of terminals and receivers, respectively. Separately, a plurality of sets of electric contact terminals and their electric contact receivers are provided on the sample holder and the holder holder. The mechanical connection between the sample holder and the holder holder is made by a terminal and a part of the receiver. The electrical contact terminal and the electrical contact receiver are in electrical contact with each other, and an electrical signal is applied to the sample through the terminal and the receiver. Here, the electric contact terminal is constituted by a pin and a spring, and the electric contact receiver is constituted by a plate electrode.

A sample stage which further solves the problem can be incorporated in a charged particle beam apparatus as follows. That is, a charged particle beam device including an electron gun, an electron lens, an observation room, and a vacuum mirror is provided with a sample driving unit for driving a sample outside the vacuum mirror, and with one of the sample stages. A preliminary exhaust chamber is provided in contact with the vacuum mirror body for moving the sample fixing table into and out of the vacuum mirror body from outside the vacuum mirror body. Alternatively, the following may be performed. A charged particle beam device including an electron gun, an electron lens, an observation room, and a vacuum mirror, a sample drive unit for driving a sample is provided outside the vacuum mirror, and one of the sample stages is fixed to the sample. A preliminary exhaust chamber is provided in contact with the vacuum mirror to allow the table to be moved into and out of the vacuum mirror from outside the vacuum mirror. This is performed using the provided transport rod.

[0012]

First, a sample is fixed on a sample fixing table. The sample is a magnetic device such as a magnetic head and a magnetic recording medium. The sample holder is fixed to the holder holder. The sample holder can be attached to and detached from the holder holder. The fixed base holding unit is connected to the moving mechanism unit, and moves the fixed base holding unit, the sample fixed base, and the sample in which the moving mechanism unit is integrated to desired positions. The movement of the moving mechanism is controlled by a mechanism controller. Here, a plurality of terminals are provided on the sample fixing table, and a plurality of terminals are provided on the moving mechanism side. The sample holder is fixed to the holder holder by the terminal and the receiver. That is, mechanical attachment / detachment of the sample holding table to / from the holding table holder can be performed. In addition, the terminals and receptacles are kept in electrical contact by being connected, through which electrical signals can be passed.
Using this electrical connection, an electrical signal can be given to the sample mounted on the sample holder.

A guide is also provided as a part of the present embodiment in order to facilitate the positioning of the sample holder and the holder holder when attaching and detaching the holder. The guide is configured with a mechanical fit, for example, such that a rod is inserted into the tube. Further, in addition to the mechanically fitting guide, if the guide pin and the cut groove through which the guide pin passes are formed on the outer periphery of the portion corresponding to the rod and the portion corresponding to the cylinder, the orientation can be easily adjusted.

The present invention can be used not only to directly supply an electric signal which can be introduced to a sample but also to change the atmosphere around the sample. This is also a part of the present embodiment. In this method, both the sample and a member for adjusting the atmosphere of the sample are fixed to the sample fixing table. The member for adjusting the atmosphere of the sample is a heating wire, an electronic cooling element, a coil or an electrostatic deflecting plate. The heating wire heats the sample, the thermoelectric cooler cools the sample, the coil applies a magnetic field to the sample, and the electrostatic deflecting plate applies an electric field to the sample. The sample holder can be attached to and detached from the holder holder in the same manner as described above, and the holder holder, the sample holder, the sample, and, if necessary, the atmosphere adjusting member are moved to desired positions by the moving mechanism. The moving mechanism is controlled by the mechanism controller in the same manner as described above.

The sample holder and the holder holder were provided with a plurality of sets of terminals and receivers similar to those described above. The terminal and the receiver are not only mechanically fixed but also electrically contact with each other, and can supply an electric signal to the atmosphere control member through the terminal and the receiver. Alternatively, an electric signal can be given to both the sample and the temperature control member.

Further, in the present embodiment, as described below, not only terminals and receivers for mechanical attachment / detachment but also terminals and receivers used only for electrical contact can be additionally provided. In the same manner as described above, the configuration includes a sample, a sample fixing table, a fixing table holding section, a moving mechanism section, and a mechanism control section. Then, a plurality of sets of terminals and their receivers are provided on the sample fixing table and the fixing table holding unit, respectively. Mechanical attachment / detachment uses these terminals and receptacles, which also serve as electrical connections. Separately from this, a plurality of sets of electric contact terminals and electric contact receivers are provided on the sample fixing table and the fixing table holder. The electric contact terminal is constituted by a pin and a spring, and the electric contact receiver is constituted by a plate electrode. These electrical contact terminals and electrical contact receivers cannot support the sample holder, but can only make electrical contact. In addition, since it can be installed even in a small space, it is convenient to increase the number of lines through which electric signals pass.

Further, the stage can be incorporated in the following charged particle beam apparatus. The charged particle beam apparatus includes an electron gun, an electron lens, and an observation room in a vacuum mirror.
In the charged particle beam apparatus having this configuration, a sample driving unit for driving the sample is provided outside the vacuum mirror. Further, one of the sample stages was provided in this charged particle beam device. Further, a preliminary exhaust chamber is provided in contact with the vacuum mirror so that the sample fixing table can be introduced into the vacuum mirror from outside the vacuum mirror. Further, the introduction of the sample fixing table on which the sample is fixed and the mounting of the sample fixing table on the fixing table holding section are performed using the transport rod provided in the preliminary exhaust chamber.

(Embodiment 1) In this embodiment, a case will be described in which a transmission electron microscope is used as a charged particle beam apparatus and a magnetic head is used as a sample.

FIG. 1 is a sectional view showing the structure of the sample stage of this embodiment. The left side of the mirror 18 is a vacuum inside the microscope, and the right side is the atmosphere. The sample 11 is mounted on the sample holding table 12 in a vacuum. Here, the sample 11 is a magnetic head. The magnetic head is connected to a total of four signal lines 171, two signal lines for generating a magnetic field for magnetic recording and two signal lines for reading the magnetic field.
Further, an end of the signal line 171 opposite to the sample 11 is connected to the pin 121. This pin 121 is fixed to the sample fixing table 12.

The receiver 131 of the pin 121 is embedded and fixed in the fixed base holder 13. The interval between the receptacles 131 is the same as that of the pins 121 so that all the pins 121 are stabbed. A signal line 172 is connected to the receiver 131,
It communicates with the sample drive unit 16 outside the vacuum. In the present embodiment, the sample driving unit 16 used was one capable of generating a write signal of the magnetic head and receiving a read signal of the magnetic head.

The fixed base holding section 13 is fixed to a moving mechanism section 14. The moving mechanism section 14 is attached to a mirror body 18, and is moved by a signal from a mechanism control section 15. Now, in FIG. 1, the traveling direction of the electron beam 10 is assumed to be the Z-axis direction, and the right-left direction of FIG. 1 is assumed to be the Y-axis direction perpendicular to the Z-axis direction, perpendicular to both the Y-axis and the Z-axis and perpendicular to the plane of FIG. Let the direction be the X-axis direction. In the present embodiment, the moving mechanism unit 14 has a mechanism capable of moving the sample 10 in the X, Y, and Z axial directions, rotating the sample 10 around the Y axis, and tilting the sample about the X axis φ. Was used.

FIG. 2 is a schematic sectional view showing the sample stage incorporated in a transmission electron microscope. Electron gun 22
The electron beam 10 generated from the sample passes through the irradiation lens 23 and a part of the objective lens 24, and passes through the surface of the magnetic head which is the sample 11. Further, this electron beam 10 is
4 and through the intermediate lens 25 and the magnifying lens 26,
The observation room 27 is reached. In the observation room 27, an image can be observed by illuminating the fluorescent plate 271. If necessary, a film 281 can be exposed in the camera room 28 to take a picture.

The apparatus shown in FIG. 2 is provided with a preliminary exhaust chamber 21 at a position opposite to the moving mechanism 14 of the lens body 20. The preliminary evacuation chamber 21 has a sample exchange door 213, and is connected to the mirror 20 via a valve 212. Further, a transport rod 211 was prepared in the preliminary exhaust chamber 21. The transfer rod 211 grips the sample fixing table 12 and
From the camera to the mirror body 20.

In this transmission electron microscope, the sample 11 is introduced into the mirror 20 as follows. First, the sample holder 12 to which the sample 11 is fixed and the signal line 171 is wired between the sample 11 and the pin 121 is prepared. This is put into the preliminary exhaust chamber 21 through the sample exchange door 213 and
Let one grab. At this time, of course, the sample holder 12 and the sample 11 are not attached to the holder holder 13 attached to the mirror body 20 in FIG. Next, the sample exchange door 213 is closed,
The preliminary exhaust chamber 21 is evacuated. When the degree of vacuum becomes substantially the same as that of the mirror body 20, the valve 212 is opened, and the sample fixing table 12 is introduced into the mirror body 20 using the transport rod 211.

FIG. 3 shows this state. Transfer rod 21
The sample fixing table 12 gripped by the first unit 1 has its pin 121 directed toward the fixing table holding unit 13, and the pin 121 receives the pin 1.
Move to fit in 31. Pin 121 receives 13
When it is set to 1, the sample holding table 12 is mechanically fixed to the holding table holder 13. When the sample 11 is removed from the vacuum, the rod 211 holding the sample holder 12 is moved in the left direction in FIG.

In this apparatus, the magnetic head of the sample 11 was introduced into the mirror 20. As shown in FIG. 1, the pins 121 and the receiver 131 were connected, and the mechanical connection and the electrical connection were completed at the same time. Further, the mechanism control unit 15 and the moving mechanism unit 14
The sample 11 of the sample holder 12 connected to the end of the holder holder 13 was set to an appropriate position and orientation with respect to the location and direction of the electron beam 10. Here, a signal for generating a write magnetic field was given to the magnetic head using the sample drive unit 16 outside the mirror body, which is electrically connected to the sample 11. When the magnetic head of the sample 11 generates a magnetic field, the electron beam 10 passing therethrough can bend its trajectory by Lorentz force. At this time, sample 1
If the lens below 1 is properly adjusted, as shown in FIG.
The arrival position of the electron beam 10 can be changed on the fluorescent plate 271 in the observation room 27 or on the film 281 in the camera room 28, and the amount of deflection due to the magnetic field can be measured. For example, the writing signal given to the magnetic head from the sample driving section 16 is as shown in FIG. 4, and the deflection amount of the electron beam only when indicated by oblique lines could be detected.

FIG. 5 shows an example in which a guide is provided for facilitating the alignment between the pin 121 of the sample holder 12 and the receiver 131 of the holder holder 13. Instead of the fixed base holding part 13 of FIG.
With. Otherwise, it is the same as FIG. As a result, when the sample holder 13 is introduced,
The axis of the fixed base holder 13 is aligned with the
And the position of the receiver 131 can be easily adjusted.

Further, in order to further facilitate the positioning of the pin 121 and the receiver 131 by aligning the direction of the θ direction between the sample fixing table 12 and the guide fixing table holder 132 in FIG. 5, the side surface shown in FIG. It is also possible to make it as shown in FIG. First, a guide pin 122 is provided on a side surface of the sample fixing table 12, and the fixed table holding section 1 with a guide is provided.
Guide cuts 133 were made in the 32 guide portions. Thereby, even if the angle in the θ direction between the sample fixing table 12 and the fixed table holder with guide 132 is slightly shifted, the orientation can be corrected at the time of insertion by aligning the guide pin 122 and the guide notch 133. . Therefore, the sample holder 12 and the guide holder holder 133 with a guide are provided.
It has become easier to adjust the angle of.

Further, the distribution of the write magnetic field can be observed with a transmission electron microscope while operating the magnetic head of the sample 11 using the sample stage described above in a transmission electron microscope.

Further, by using the sample fixing table 127 having a different sample orientation as shown in FIG. 7, the electron beam 10 can be irradiated to the surface of the sample 11 vertically. By using this, it is possible to detect reflected electrons, secondary electrons, X-rays, and the like with the detector 31 while operating the sample 11, and to analyze and evaluate the characteristics of the magnetic device as the sample 11.

Example 2 The atmosphere around the sample was changed using a sample holder capable of introducing an electric signal to the vicinity of the sample. In this embodiment, an example in which the temperature of a sample is adjusted will be described.

FIG. 8 is a sectional view showing an example of the sample stage in which the temperature has been adjusted. First, the sample 11 was attached to the sample fixing stand 12 and wired between the pins 121. Further, the temperature adjusting member 41 was attached to the sample fixing table 12. The temperature adjusting member 41 can change the temperature of the member by an electric signal such as an electronic cooling element such as a Peltier element or a heating wire, for example. Temperature control member 41
Are wired between the pins 121 similarly to the sample 11.

A receiver 131 is fixed to the fixed base holder 13 in the same manner as in the above embodiment. The receptacle 131 into which the pin 121 connected to the sample 11 was inserted was connected to the sample driving unit 16. Further, the receptacle 131 into which the pin 121 connected to the temperature adjustment member 41 is inserted was connected to the temperature adjustment control unit 42. This pin 121 and receiver 13
By using No. 1, the mechanical attachment / detachment of the sample holding table 12 and the holding table holder 13 became possible in the same manner as in the embodiment.

The use of this sample stage not only provides an electrical signal to the sample 11 but also allows the sample 1 to be measured during measurement.
1 can be set to an arbitrary temperature, and the temperature adjustment member 42 can be replaced by the sample 11.
Furthermore, it is possible to attach a temperature sensor to the sample fixing table 12, perform wiring, and read the electric signal from outside.

Next, as the atmosphere around the sample, the magnetic field around the sample was changed. This embodiment is shown in FIG.
In addition to the sample 11, the sample fixing base 12 is provided with a portion including a coil 51, a coil support 52, and an actuator 53. Both ends of the coil 51 are connected to the pins 121 of the sample fixing table 121, and further connected to the coil driving unit 54 via the receiver 131. The actuator 53 controlled by the actuator driving unit 55 can move the coil support 52 to change the position of the coil 51 with respect to the sample 11.

By using a similar technique, an electric field can be applied to the sample 11. Of course, the observation can be performed while the atmosphere around the sample 11 is temporally changed.

As described above, according to the present invention, it is possible to prepare an optimum sample fixing table according to a sample and the purpose of observation and measurement thereof, and to use an electric signal at or near the sample as necessary. Is now available.

(Embodiment 3) In this embodiment, a case will be described in which a terminal for transmitting an electric signal and a pad for receiving the terminal are used in addition to the pins described in the embodiment.

FIG. 10 shows this embodiment. Sample holder 1
The sample 11 is attached to 2, but unlike the previous examples, a spring-type terminal 125 is attached in addition to the pin 121, and a signal line is also wired to this terminal.

Further, a pad 135 is attached to the fixed base holder 13 at a position corresponding to the spring type terminal 125. The signal line from the pad 135 is connected to the signal line similarly to the receiver 131.

When the sample fixing table 12 approaches the fixing table holding unit 13 and the pin 121 is inserted into the depth of the receiver 131, mechanical connection between the sample fixing table 12 and the fixing table holding unit 13 can be performed. At the same time, the spring-type terminal 125 contacts the pad 135, and the spring bends to push the pad 135 to make electrical contact.

The spring-type terminal 125 and the pad 13 of this embodiment are used.
5, the signal from the sample driving unit 16 could be transmitted to the sample 11 as in the first embodiment. Further, by combining with the sample fixing table 12 for changing the atmosphere described in the second embodiment, it is possible to change the atmosphere around the sample 11 by using the electrical contact of the present embodiment. Spring terminal 1
Since the area 25 and the pad 135 need to be placed in a smaller place than the pins 121 and the receptacle 131, by using this embodiment,
More electric signals could be introduced to the sample 11 and the vicinity of the sample.

[0043]

According to the present invention, an electric signal can be given to a sample in a sample stage having a structure in which a sample fixing table on which a sample is mounted can be easily attached to and detached from a moving mechanism, and an atmosphere around the sample can be provided using the electric signal. It can be changed. For this reason, observation and measurement can be performed while applying an electric signal to the sample.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view of a main part showing one embodiment of a sample stage of the present invention.

FIG. 2 is a longitudinal sectional view showing an example of a charged particle beam apparatus equipped with a sample stage of the present invention.

FIG. 3 is a side view showing a state of attachment and detachment of a sample holder and a holder holder.

FIG. 4 is a waveform chart showing an example of an electric signal for driving a sample.

FIG. 5 is a vertical cross-sectional view of a main part showing a sample stage provided with a fixed base holder with a guide.

FIGS. 6A and 6B are a side view and a longitudinal sectional view of a main part showing a sample stage provided with a sample fixing base with a guide pin and a fixing base holding part with a guide cut.

FIG. 7 is a vertical sectional view of a main part showing a sample stage in which the sample is placed facing upward.

FIG. 8 is a vertical sectional view of a main part showing a sample stage capable of adjusting the atmosphere (temperature) of the sample.

FIG. 9 is a vertical sectional view of a main part showing a sample stage capable of adjusting the atmosphere (magnetic field) of the sample.

FIG. 10 is a vertical cross-sectional view of a main part showing a sample stage using a spring-type terminal and a pad.

FIG. 11 is a vertical sectional view of a main part showing a conventional sample stage.

[Explanation of symbols]

10: charged particle beam, 11: sample, 12: sample holder, 1
21 ... pin, 13 ... fixed table holder, 131 ... receiver, 14
... moving mechanism unit, 15 ... mechanism control unit, 16 ... sample driving unit,
171, 172: signal line, 18: mirror body.

 ──────────────────────────────────────────────────の Continuing on the front page (72) Inventor Yusuke Yajima 1-280 Higashi Koikekubo, Kokubunji-shi, Tokyo Inside the Central Research Laboratory of Hitachi, Ltd. Central Research Laboratory

Claims (11)

[Claims] 1. A sample fixing table to which a sample is fixed, a fixing table holding section to which the sample fixing table can be attached and detached, a moving mechanism section for moving the fixing table holding section to a desired position, and the moving mechanism A sample stage comprising a mechanism control section for controlling a section, wherein the sample fixing table has a plurality of terminals, and the moving mechanism section has a plurality of terminals. 2. A sample stage according to claim 1, wherein said sample is a magnetic device. 3. A sample fixing table to which a sample is fixed, a fixing table holding section to which the sample fixing table is fixed, a moving mechanism section for moving the fixing table holding section to a desired position, and the moving mechanism section. In the sample stage, which is configured by a mechanism control unit for controlling the sample stage and can be mechanically attached to and detached from the fixed stage holder of the sample stage, a plurality of sets of terminals and receivers are respectively provided on the sample stage and the stage holder. Mechanical coupling of the sample holder to the holder holder is made by the terminal and the receiver, and the terminal and the receiver are in electrical contact with each other,
A sample stage for applying an electric signal to the sample through the terminal and the receptacle. 4. The apparatus according to claim 1, further comprising: a guide for adjusting a mounting position of the sample holder on the holder holder.
The guide is a sample stage configured by mechanical fitting. 5. The fixing device according to claim 1, wherein the fixing table holding unit includes a guide for adjusting a mounting position of the sample fixing table, wherein the guide is a mechanical fit, a guide pin, and a cut groove for receiving the guide pin. Sample stage composed of 6. A sample fixing table to which a sample is fixed, a fixing table holding section to which the sample fixing table is fixed, a moving mechanism section for moving the fixing table holding section to a desired position, and the moving mechanism section In the sample stage, which is configured by a mechanism control unit that controls the number of terminals, the sample fixing table and the fixing table holding unit each have a plurality of terminals and a receiving unit. Comprising an atmosphere adjusting member capable of changing the atmosphere of the sample in the sample fixing table, mechanical coupling of the sample fixing table with the fixing table holding section is performed by the terminal and the receiver, and The terminal and the receiver are in electrical contact with each other, and an electric signal is supplied to the atmosphere control member through the terminal and the receiver, or an electric signal is supplied to both the sample and the temperature control member. Sample stage to be. 7. A sample stage according to claim 6, wherein said atmosphere adjusting member is one of a heating wire, an electronic cooling element, a coil and an electrostatic deflecting plate. 8. A sample fixing table to which a sample is fixed, a fixing table holding section detachable from the sample fixing table, a moving mechanism section for moving the fixing table holding section to a desired position, and the moving section. The sample stage is configured by a mechanism control unit that controls a mechanism unit, and a sample stage that can be mechanically attached to and detached from the fixed stage holding unit of the sample fixing stage has terminals and receivers respectively on the sample fixed stage and the fixed stage holding unit. A plurality of sets are provided, and the sample fixing table and the fixing table holding section each include a plurality of sets of electric contact terminals and electric contact receivers, and the mechanical coupling of the sample fixing table with the fixing table holding section is performed by the terminal and the terminal. A sample stage made by a part of a receiver, wherein the electrical contact terminal and the electrical contact receiver are in electrical contact with each other, and an electrical signal is applied to the sample through the terminal and the receiver. 9. A sample stage according to claim 8, wherein said electric contact terminal is constituted by a pin and a spring, and said electric contact receiver is constituted by a plate electrode. 10. A charged particle beam apparatus including an electron gun, an electron lens, an observation room, and a vacuum mirror, wherein a sample driving unit for driving the sample is provided outside the vacuum mirror. Comprising any one of the sample stages according to items 1 to 8,
A charged particle beam apparatus having a preliminary exhaust chamber in contact with the vacuum mirror for moving a sample holder from the outside of the vacuum mirror into the vacuum mirror. 11. A charged particle beam apparatus comprising an electron gun, an electron lens, an observation room, and a vacuum mirror, wherein a sample driving unit for driving the sample is provided outside the vacuum mirror. Comprising any one of the sample stages according to items 1 to 8,
A preliminary exhaust chamber is provided in contact with the vacuum mirror body for inserting and removing the sample fixing table from the outside of the vacuum mirror body into and out of the vacuum mirror body. Using a transport rod provided in a preliminary exhaust chamber.