JPH1062302A - Device for inspecting display panel for defect - Google Patents
Device for inspecting display panel for defectInfo
- Publication number
- JPH1062302A JPH1062302A JP21577196A JP21577196A JPH1062302A JP H1062302 A JPH1062302 A JP H1062302A JP 21577196 A JP21577196 A JP 21577196A JP 21577196 A JP21577196 A JP 21577196A JP H1062302 A JPH1062302 A JP H1062302A
- Authority
- JP
- Japan
- Prior art keywords
- display panel
- image
- screen
- liquid crystal
- crystal panel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、液晶パネルなどの
表示パネルの欠陥を検出する、表示パネルの欠陥検査装
置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a display panel defect inspection apparatus for detecting a defect of a display panel such as a liquid crystal panel.
【０００２】[0002]
【従来の技術】従来、液晶パネルなどの表示パネルの欠
陥を検出するため、画面をＣＣＤカメラにて撮像した画
像を２値化して欠陥部の画像を検出していた。2. Description of the Related Art Conventionally, in order to detect a defect in a display panel such as a liquid crystal panel, an image of a screen taken by a CCD camera is binarized to detect an image of a defective portion.
【０００３】このような従来の欠陥検査では、発光絵素
部が正方配置している画面を、受光素子が正方配置して
いるＣＣＤにて撮像すると、干渉縞（モアレ）が生じる
ことがある。これは、発光絵素と発光絵素との間、受光
素子と受光素子との間に隙間、すなわち発光や受光をし
ない部分が存在するので、撮像した画面の発光絵素数
と、ＣＣＤカメラの受光素子数との比によって発生す
る。In such a conventional defect inspection, interference fringes (moire) may occur when an image of a square light emitting picture element portion is imaged by a CCD having a square light receiving element. This is because there is a gap between the light-emitting pixels and between the light-emitting elements and between the light-receiving elements, that is, a portion that does not emit or receive light. It is caused by the ratio with the number of elements.
【０００４】この干渉縞を生じた画面では、画面全体の
明るさが均一でないため、画面全体を一つのしきい値に
て２値化すると、欠陥部の他に干渉縞の一部も欠陥と同
様に検出されてしまい、欠陥部のみの検出が困難とな
る。Since the brightness of the entire screen is not uniform on the screen having the interference fringes, if the entire screen is binarized by one threshold value, a part of the interference fringes as well as the defective portion is determined to be defective. Similarly, it is detected, and it becomes difficult to detect only the defective portion.
【０００５】この干渉縞による影響を除去するには以下
の方法がある。第１の方法は、十分高い倍率、例えば、
画面の一つの発光絵素を１０×１０受光素子程度のＣＣ
Ｄ素子にて受光するように倍率を設定して撮像すると干
渉縞が生じないため、このような倍率にて検査する方法
である。There are the following methods for removing the influence of the interference fringes. The first method uses a sufficiently high magnification, for example,
One luminescent picture element of the screen is CC of about 10 × 10 light receiving element
When imaging is performed with the magnification set so that light is received by the D element, no interference fringes are generated. Therefore, the inspection is performed at such a magnification.
【０００６】第２の方法は、光学レンズ系を合焦位置で
なく、焦点のあっていない（アンフォーカス）位置で撮
像を行うことによって、干渉縞の発生を抑制する方法で
ある。A second method is to suppress the occurrence of interference fringes by imaging the optical lens system at an out-of-focus (unfocused) position instead of at the in-focus position.
【０００７】[0007]
【発明が解決しようとする課題】しかしながら、上記第
１の方法では、画面全体を検査するためには、画面を数
十に分割して撮像、検査しなければならない。このため
逐次処理では長時間を要し、並列処理では処理装置が非
常に高価となる。また、このような高倍率では、画面の
各発光絵素の間にあるマスク部分（発光しない部分）と
を識別しなければならないため、欠陥検出処理が複雑か
つ困難となる。However, in the first method, in order to inspect the entire screen, it is necessary to divide the screen into several tens and take an image. Therefore, the sequential processing requires a long time, and the parallel processing requires a very expensive processing device. Further, at such a high magnification, a mask portion (a portion that does not emit light) between each light-emitting picture element on the screen must be identified, so that the defect detection process is complicated and difficult.
【０００８】また、上記第２の方法では、撮像した画像
がぼけることによって、干渉縞は分からなくなるが、同
時に欠陥部もぼけるため、微細または微量な欠陥部の検
出が困難となる。In the second method, the interference fringes cannot be recognized due to blurring of the captured image, but at the same time, the defect is also blurred, making it difficult to detect a minute or minute defect.
【０００９】そこで本発明は、上記従来の問題点を解消
すべくなされたものであり、干渉縞が発生するような低
倍率であっても、かつ合焦点の光学レンズ系を用いて、
表示パネルの画面の干渉縞が生じた画像から欠陥部のみ
を正確に検出する表示パネルの欠陥検査装置を提供する
ことを目的とする。SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned conventional problems, and has been developed using an optical lens system which is low in magnification and in which an interference fringe is generated, and which is focused.
An object of the present invention is to provide a defect inspection apparatus for a display panel that accurately detects only a defective portion from an image in which interference fringes on a screen of a display panel have occurred.
【００１０】[0010]
【課題を解決するための手段】上述の課題を解決するた
め、本発明の請求項１に記載の表示パネルの欠陥検査装
置は、表示パネルを点灯させる点灯手段と、表示パネル
の画面を撮像する撮像手段と、この撮像手段にて前記表
示パネルの画面を撮像した際に生じた干渉縞の間隔デー
タを入力するためのデータ入力手段と、撮像された前記
表示パネルの画面の検査対象画素の明るさと、前記デー
タ入力手段から入力された干渉縞の間隔データだけ離れ
た位置の画素の明るさとの差分を求める差分処理手段
と、この差分処理手段の求めた差分に基づき、前記表示
パネルの明るさを所定の値と比較して欠陥部を検出する
欠陥検出手段とを具備することを特徴とする構成を有す
る。In order to solve the above-mentioned problems, a display panel defect inspection apparatus according to a first aspect of the present invention includes a lighting unit for lighting a display panel and an image of a screen of the display panel. Imaging means; data input means for inputting interval data of interference fringes generated when the image of the screen of the display panel is captured by the imaging means; and brightness of a pixel to be inspected on the captured screen of the display panel. And a difference processing means for calculating a difference between the brightness of a pixel at a position separated by the interference fringe interval data input from the data input means, and a brightness of the display panel based on the difference obtained by the difference processing means. And a defect detecting means for detecting a defective portion by comparing the value with a predetermined value.
【００１１】本発明の請求項２に記載の表示パネルの欠
陥検査装置は、請求項１に記載の表示パネルの欠陥検査
装置を構成する手段において、前記差分処理手段が、撮
像された前記表示パネルの画面の検査対象画素の明るさ
の２倍から、前記干渉縞の間隔データだけ前後に離れた
位置の画素の明るさをそれぞれ減算処理して差分を求め
ることを特徴とする。According to a second aspect of the present invention, there is provided a defect inspection apparatus for a display panel according to the first aspect, wherein the difference processing means includes an image picked up by the display panel. In this method, the difference is obtained by subtracting the brightness of a pixel at a position separated by the interference fringe interval data forward and backward from twice the brightness of the inspection target pixel on the screen.
【００１２】上記の構成によって、本発明の請求項１に
記載の表示パネルの欠陥検査装置は、撮像画像の検査対
象画素の明るさと、干渉縞の間隔データだけ離れた位置
の画素の明るさとの差分を求めることによって、撮像し
た画像から干渉縞を除去するので、表示パネルの欠陥を
正確に検出することができる。According to the above configuration, the defect inspection apparatus for a display panel according to the first aspect of the present invention provides a display panel defect inspection apparatus that measures the brightness of a pixel to be inspected in a picked-up image and the brightness of a pixel located at a position separated by interference fringe interval data. By obtaining the difference, interference fringes are removed from the captured image, so that a defect of the display panel can be accurately detected.
【００１３】本発明の請求項２に記載の表示パネルの欠
陥検査装置は、撮像画像の検査対象画素の明るさの２倍
から、干渉縞の間隔データだけ前後に離れた位置の画素
の明るさをそれぞれ減算処理して差分を求めるので、表
示パネルの輝度むらによる影響を排除することができ
る。According to a second aspect of the present invention, there is provided a defect inspection apparatus for a display panel, wherein the brightness of a pixel at a position separated by two or more times the brightness of a pixel to be inspected of a picked-up image by an interval data of interference fringes. Are subtracted from each other to obtain a difference, so that the influence of uneven brightness of the display panel can be eliminated.
【００１４】[0014]
【発明の実施の形態】以下、図面を参照して本発明の実
施の形態を詳細に説明する。図１は、本発明の表示パネ
ルの欠陥検査装置の機能ブロック図である。液晶パネル
点灯制御部２は、液晶パネル１０を点灯し、バックライ
ト１は、液晶パネル１０を照明する。液晶パネル点灯制
御部２とバックライト１とで点灯手段を構成する。Embodiments of the present invention will be described below in detail with reference to the drawings. FIG. 1 is a functional block diagram of a display panel defect inspection apparatus according to the present invention. The liquid crystal panel lighting control unit 2 turns on the liquid crystal panel 10, and the backlight 1 illuminates the liquid crystal panel 10. The liquid crystal panel lighting control unit 2 and the backlight 1 constitute lighting means.
【００１５】ＣＣＤアレイカメラ３は、液晶パネル１０
の画面を撮像し、画像メモリ４に記録する。ＣＣＤアレ
イカメラ３と画像メモリ４とで撮像手段を構成する。The CCD array camera 3 includes a liquid crystal panel 10
Is captured and recorded in the image memory 4. The CCD array camera 3 and the image memory 4 constitute an imaging unit.
【００１６】差分処理部５は、画像メモリ４に記録され
た画像に対して、欠陥検出制御部６の制御に応じた差分
処理を行う。欠陥検出制御部６は、液晶パネル点灯制御
部２と差分処理部５を制御し、液晶パネル１０の画面の
欠陥を検出する。差分処理部５と欠陥検出制御部６と
は、マイクロコンピュータなどによって構成される。The difference processing unit 5 performs difference processing on the image recorded in the image memory 4 according to the control of the defect detection control unit 6. The defect detection control unit 6 controls the liquid crystal panel lighting control unit 2 and the difference processing unit 5, and detects a defect on the screen of the liquid crystal panel 10. The difference processing unit 5 and the defect detection control unit 6 are configured by a microcomputer or the like.
【００１７】モニタ７は、ＣＣＤアレイカメラ３にて撮
像された液晶パネル１０の画面の画像を表示し、データ
入力部８は、画面に生じた干渉縞の間隔データを入力す
る。データ入力部８はキーボードなどによって構成され
る。The monitor 7 displays an image of the screen of the liquid crystal panel 10 picked up by the CCD array camera 3, and the data input section 8 inputs data of interference fringe intervals generated on the screen. The data input unit 8 is constituted by a keyboard or the like.
【００１８】次に液晶パネル１０の欠陥検査の手順を説
明する。まず液晶パネル点灯制御部２は、液晶パネル１
０を検査用の画面に点灯し、バックライト１にて照明す
る。この液晶パネル１０の画面は、ＣＣＤアレイカメラ
３にて撮像され、画像メモリ４に記録される。Next, the procedure of the defect inspection of the liquid crystal panel 10 will be described. First, the liquid crystal panel lighting control unit 2 controls the liquid crystal panel 1
0 is lit on the screen for inspection and illuminated by the backlight 1. The screen of the liquid crystal panel 10 is imaged by the CCD array camera 3 and recorded in the image memory 4.
【００１９】この画像メモリ４に記録された画像は、差
分処理部５および欠陥検出制御部６を経由して、モニタ
７に映し出される。図２は、この映し出された液晶パネ
ル１０の画面を示し、干渉縞が生じている。この干渉縞
の間隔をモニタ７上のカーソルにて測定し、測定された
干渉縞の間隔データＰを、データ入力部８から入力す
る。The image recorded in the image memory 4 is displayed on a monitor 7 via a difference processing section 5 and a defect detection control section 6. FIG. 2 shows the projected screen of the liquid crystal panel 10 in which interference fringes are generated. The interval between the interference fringes is measured with a cursor on the monitor 7, and the measured interval data P of the interference fringes is input from the data input unit 8.
【００２０】欠陥検出制御部６は、この干渉縞の間隔デ
ータＰを、差分処理部５に与える。差分処理部５は、画
像メモリ４に格納されている画面の各画素の明るさｆ
（ｘ，ｙ）に対し、干渉縞の間隔データＰを用いて、次
式によって、新たな画像ｆ1（ｘ，ｙ）を求める。The defect detection control section 6 gives the interval data P of the interference fringes to the difference processing section 5. The difference processing unit 5 calculates the brightness f of each pixel of the screen stored in the image memory 4.
With respect to (x, y), a new image f 1 (x, y) is obtained by the following equation using the interference fringe interval data P.
【００２１】ｆ1（ｘ，ｙ）＝２×ｆ（ｘ，ｙ）−ｆ
（ｘ−ｐ，ｙ）−ｆ（ｘ＋ｐ，ｙ） ただしｆ（ｘ−ｐ，ｙ）およびｆ（ｘ＋ｐ，ｙ）は、検
査対象画素の明るさｆ（ｘ，ｙ）に対し、干渉縞を横切
る方向に±ｐだけ距離の離れた位置の画素の明るさを表
す。F 1 (x, y) = 2 × f (x, y) −f
(X−p, y) −f (x + p, y) where f (x−p, y) and f (x + p, y) represent interference fringes with respect to the brightness f (x, y) of the inspection target pixel. It represents the brightness of the pixel at a position separated by ± p in the transverse direction.
【００２２】図３（ａ）は、画像メモリ４から読み出し
た画像ｆ（ｘ，ｙ）と、その横断面Ａの輝度グラフを示
す。この干渉縞が発生した画像ｆ（ｘ，ｙ）では、干渉
縞の間隔Ｐだけ離れた位置の画素はほぼ同じ明るさとな
り、干渉縞の間隔Ｐの周期で繰り返される。画像に干渉
縞が存在するため、欠陥部の識別が困難である。FIG. 3A shows an image f (x, y) read from the image memory 4 and a luminance graph of a cross section A thereof. In the image f (x, y) in which the interference fringes have occurred, the pixels located at positions separated by the interference fringe interval P have substantially the same brightness, and are repeated at the period of the interference fringe interval P. The presence of interference fringes in the image makes it difficult to identify the defect.
【００２３】また画像ｆ（ｘ，ｙ）の横断面Ａの輝度グ
ラフを見ると、バックライト１にて照明された液晶パネ
ル１０の画面には、輝度むらがあることが分かる。この
輝度むらによる影響を排除するため、上記式に示される
ように検査対象画素の明るさの２倍から、干渉縞の間隔
Ｐだけ前後に離れた位置の画素の明るさをそれぞれ減算
処理して差分を求める。これによって、照明むらなどに
よる、画面の輝度むらによる影響を排除することができ
る。When looking at the brightness graph of the transverse section A of the image f (x, y), it can be seen that the screen of the liquid crystal panel 10 illuminated by the backlight 1 has uneven brightness. In order to eliminate the influence of the uneven brightness, the brightness of the pixel at a position separated by a distance P between the interference fringes is subtracted from twice the brightness of the inspection target pixel as shown in the above equation. Find the difference. As a result, it is possible to eliminate the influence of uneven brightness of the screen due to uneven lighting.
【００２４】図３（ｂ）は、新たに求めた画像ｆ
1（ｘ，ｙ）と、その横断面Ａ1の輝度グラフを示し、画
像から干渉縞のみが除去され、欠陥部が強調されてい
る。この新たな画像ｆ1（ｘ，ｙ）に対し、差分処理部
５は、２値化処理を行い、ｆ2（ｘ，ｙ）を求める。FIG. 3B shows a newly obtained image f.
1 as (x, y), shows the luminance graph of the cross-section A 1, only the interference fringes from the image are removed, it is emphasized defect. The difference processing unit 5 performs a binarization process on the new image f 1 (x, y) to obtain f 2 (x, y).
【００２５】図３（ｃ）は、２値化した画像ｆ2（ｘ，
ｙ）と、その横断面Ａ2の輝度グラフを示し、欠陥部の
みを容易に抽出できることを示している。FIG. 3C shows a binarized image f 2 (x,
and y), shows the luminance graph of the cross-section A 2, show that it is possible easily extract only the defect portion.
【００２６】欠陥検出制御部６は、差分処理部５にて求
められた２値化した画像ｆ2（ｘ，ｙ）を用いて、各画
素の明るさが設定された値よりも大きいか否かを比較し
て、液晶パネル１０の画面の欠陥の有無を検出する。そ
して有りの場合は、さらにその個数、大きさなどを検出
する。The defect detection control unit 6 uses the binarized image f 2 (x, y) obtained by the difference processing unit 5 to determine whether the brightness of each pixel is larger than a set value. Then, the presence or absence of a defect on the screen of the liquid crystal panel 10 is detected. If yes, the number, size, etc. are detected.
【００２７】以上説明したように本発明は、簡易な構成
にて、液晶パネル１０の画面を撮像した画像の各画素に
対して、画面上に生じた干渉縞の間隔だけ離れた位置の
画素との差分を求めることによって、撮像した画像から
干渉縞を除去することができる。このため、２値化する
ことによって、欠陥部のみを強調した画像を容易に得る
ことができ、干渉縞を有する画像からでも微細、微弱な
欠陥を正確に検出することができる。As described above, according to the present invention, with a simple configuration, each pixel of the image obtained by capturing the screen of the liquid crystal panel 10 is compared with a pixel at a position separated by an interval of interference fringes generated on the screen. , Interference fringes can be removed from the captured image. For this reason, by binarizing, it is possible to easily obtain an image in which only the defective portion is emphasized, and it is possible to accurately detect fine and weak defects even from an image having interference fringes.
【００２８】[0028]
【発明の効果】以上説明した通り、本発明の請求項１に
記載の表示パネルの欠陥検査装置は、撮像画像の検査対
象画素の明るさと、干渉縞の間隔データだけ離れた位置
の画素の明るさとの差分を求めることによって、撮像し
た画像から干渉縞を除去することができる。このため、
欠陥部のみを強調した画像を容易に得ることができ、干
渉縞を有する画像からでも表示パネルの微細、微弱な欠
陥を正確に検出することができる。As described above, the defect inspection apparatus for a display panel according to the first aspect of the present invention provides the brightness of a pixel to be inspected of a picked-up image and the brightness of a pixel at a position separated by the interference fringe interval data. The interference fringes can be removed from the captured image by obtaining the difference between For this reason,
It is possible to easily obtain an image in which only the defective portion is emphasized, and it is possible to accurately detect fine and weak defects of the display panel even from an image having interference fringes.
【００２９】本発明の請求項２に記載の表示パネルの欠
陥検査装置は、撮像画像の検査対象画素の明るさの２倍
から、干渉縞の間隔データだけ前後に離れた位置の画素
の明るさをそれぞれ減算処理して差分を求める。このた
め、照明むらなどによる、表示パネルの輝度むらによる
影響を排除することができる。According to a second aspect of the present invention, there is provided a defect inspection apparatus for a display panel, wherein the brightness of a pixel at a position separated from the double of the brightness of a pixel to be inspected of a picked-up image by a distance data of an interference fringe. Are respectively subtracted to obtain a difference. For this reason, it is possible to eliminate the influence of uneven brightness of the display panel due to uneven lighting or the like.
【図面の簡単な説明】[Brief description of the drawings]
【図１】本発明の実施の形態の表示パネルの欠陥検査装
置の機能ブロック図である。FIG. 1 is a functional block diagram of a display panel defect inspection apparatus according to an embodiment of the present invention.
【図２】液晶パネル１０の撮像画面に生じた干渉縞を示
す図である。FIG. 2 is a diagram showing interference fringes generated on an imaging screen of a liquid crystal panel 10;
【図３】（ａ）は、画像ｆ（ｘ，ｙ）とその横断面Ａの
輝度を示し、（ｂ）は、画像ｆ1（ｘ，ｙ）とその横断
面Ａ1の輝度を示し、（ｃ）は、画像ｆ2（ｘ，ｙ）とそ
の横断面Ａ2の輝度を示す図である。3 (a), the image f (x, y) and indicates the luminance of the cross section A, (b), the image f 1 (x, y) and indicates the luminance of the cross section A 1, (C) is a diagram showing the luminance of the image f 2 (x, y) and its cross section A 2 .
【符号の説明】 １ バックライト ２ 液晶パネル点灯制御部 ３ ＣＣＤアレイカメラ ４ 画像メモリ ５ 差分処理部 ６ 欠陥検出制御部 ７ モニタ ８ データ入力部 １０ 液晶パネル[Description of Signs] 1 Backlight 2 Liquid crystal panel lighting control unit 3 CCD array camera 4 Image memory 5 Difference processing unit 6 Defect detection control unit 7 Monitor 8 Data input unit 10 Liquid crystal panel
Claims (2)
生じた干渉縞の間隔データを入力するためのデータ入力
手段と、 撮像された前記表示パネルの画面の検査対象画素の明る
さと、前記データ入力手段から入力された干渉縞の間隔
データだけ離れた位置の画素の明るさとの差分を求める
差分処理手段と、 この差分処理手段の求めた差分に基づき、前記表示パネ
ルの明るさを所定の値と比較して欠陥部を検出する欠陥
検出手段とを具備することを特徴とする表示パネルの欠
陥検査装置。A lighting unit for lighting a display panel; an imaging unit for imaging a screen of the display panel; and interval data of interference fringes generated when the imaging unit images the screen of the display panel. Calculating the difference between the brightness of the pixel to be inspected on the screen of the display panel and the brightness of the pixel at a position separated by the interval data of the interference fringes input from the data input means. Processing means; and defect detection means for detecting a defective portion by comparing the brightness of the display panel with a predetermined value based on the difference obtained by the difference processing means. Inspection equipment.
示パネルの画面の検査対象画素の明るさの２倍から、前
記干渉縞の間隔データだけ前後に離れた位置の画素の明
るさをそれぞれ減算処理して差分を求めることを特徴と
する請求項１に記載の表示パネルの欠陥検査装置。2. The method according to claim 1, wherein the difference processing unit calculates the brightness of a pixel at a position separated by two or more distances of the interference fringe from the brightness of the pixel to be inspected on the screen of the display panel. The defect inspection apparatus for a display panel according to claim 1, wherein a difference is obtained by performing a subtraction process.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21577196A JP3245066B2 (en) | 1996-08-15 | 1996-08-15 | Display panel defect inspection equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21577196A JP3245066B2 (en) | 1996-08-15 | 1996-08-15 | Display panel defect inspection equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH1062302A true JPH1062302A (en) | 1998-03-06 |
| JP3245066B2 JP3245066B2 (en) | 2002-01-07 |
Family
ID=16677959
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21577196A Expired - Fee Related JP3245066B2 (en) | 1996-08-15 | 1996-08-15 | Display panel defect inspection equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3245066B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103529571A (en) * | 2013-10-25 | 2014-01-22 | 京东方科技集团股份有限公司 | Detecting device and detecting method for liquid crystal display panel ions |
-
1996
- 1996-08-15 JP JP21577196A patent/JP3245066B2/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103529571A (en) * | 2013-10-25 | 2014-01-22 | 京东方科技集团股份有限公司 | Detecting device and detecting method for liquid crystal display panel ions |
| CN103529571B (en) * | 2013-10-25 | 2016-01-06 | 京东方科技集团股份有限公司 | Liquid crystal panel ion detection device and detection method |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3245066B2 (en) | 2002-01-07 |
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