JPH0682390A - Method and apparatus for inspecting surface defect - Google Patents
Method and apparatus for inspecting surface defectInfo
- Publication number
- JPH0682390A JPH0682390A JP15188193A JP15188193A JPH0682390A JP H0682390 A JPH0682390 A JP H0682390A JP 15188193 A JP15188193 A JP 15188193A JP 15188193 A JP15188193 A JP 15188193A JP H0682390 A JPH0682390 A JP H0682390A
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- image
- defect
- signal
- surface defect
- color
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Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、冷延鋼板などの表面欠
陥を検出するための表面欠陥検査方法及び装置に係わ
り、特に、テレビカメラによって撮像した表面欠陥像を
処理して、微妙な色むら状の表面欠陥などを正確に検出
するできるようにした、表面欠陥検査方法及び装置に関
する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface defect inspection method and apparatus for detecting surface defects such as cold-rolled steel sheet, and in particular, processing a surface defect image picked up by a television camera to obtain a delicate color. The present invention relates to a surface defect inspection method and apparatus capable of accurately detecting uneven surface defects and the like.
【0002】[0002]
【従来の技術】一般に、冷延鋼板などの表面欠陥を検出
する方法としては、例えば特開昭62−75234号に
開示されているように、スポット状のレーザ光を冷延鋼
板などの表面に照射し、該表面の凹凸によって生ずるレ
ーザ光の散乱や回折現象を利用して表面欠陥を検出す
る、レーザ散乱方式やレーザ回折方式による表面欠陥検
出方法が知られている。2. Description of the Related Art Generally, as a method for detecting surface defects on a cold-rolled steel sheet or the like, spot-like laser light is applied to the surface of the cold-rolled steel sheet or the like, as disclosed in JP-A-62-75234. There is known a surface defect detection method using a laser scattering method or a laser diffraction method, in which a surface defect is detected by irradiating and utilizing a scattering or diffraction phenomenon of laser light generated by the unevenness of the surface.
【0003】一方、被検査物体の表面をテレビカメラで
撮映した画像データから該物体の表面欠陥を検出する方
法としては、例えば特開昭56−77704号に開示さ
れているように、閾値による二値化法が用いられてお
り、被検査物体の表面をテレビカメラで撮像して得られ
た映像が、設定値以上の、若しくは設定値以下の輝度を
示しているとき、該表面を欠陥と判定するようにされて
いる。On the other hand, as a method of detecting a surface defect of an object to be inspected from image data obtained by photographing the surface of the object to be inspected by a television camera, for example, as disclosed in JP-A-56-77704, a threshold value is used. The binarization method is used, and when the image obtained by imaging the surface of the object to be inspected with a television camera shows a brightness higher than a set value or lower than the set value, the surface is regarded as a defect. It is decided.
【0004】[0004]
【発明が解決しようとする課題】しかしながら、上記レ
ーザ散乱方式やレーザ回折方式では、色むら状の表面欠
陥を検出することができないうえ、表面粗度の微妙な変
化による欠陥の検出が困難であるという問題点があっ
た。However, in the above laser scattering method and laser diffraction method, it is not possible to detect color irregular surface defects, and it is difficult to detect defects due to subtle changes in surface roughness. There was a problem.
【0005】又、テレビカメラ撮像による二値化法で
は、微細な欠陥は、表面粗度による回折や散乱光との判
別が困難であるうえ、一定の値の閾値で二値化を行う
と、被検査物体表面の反射率の変化や照明光強度の変動
によって信号強度変化が生じたときに、二値化範囲に大
きな差が生ずるという問題点があった。Further, in the binarization method using a television camera, it is difficult to distinguish minute defects from diffraction and scattered light due to surface roughness, and when binarization is performed with a constant threshold value, There is a problem that a large difference occurs in the binarization range when a change in signal intensity occurs due to a change in reflectance of the surface of the object to be inspected or a change in illumination light intensity.
【0006】本発明は、上記従来の問題点を解決すべく
成されたものであり、テレビカメラによって撮像した表
面欠陥像を処理して、微妙な色むら状の表面欠陥などを
正確に検出できる表面欠陥の検出方法及び装置を提供す
ることを目的とする。The present invention has been made to solve the above-mentioned conventional problems, and it is possible to accurately detect a subtle uneven color-like surface defect by processing a surface defect image picked up by a television camera. An object of the present invention is to provide a method and apparatus for detecting surface defects.
【0007】[0007]
【課題を達成するための手段】本発明は、表面を撮像し
て得た画像データから、被検査物体の表面欠陥を検出す
る表面欠陥検査方法において、2色以上の色成分を撮像
できる撮像装置を用いて、撮影された各色成分から、特
定のオフセット値を引き、各色成分を足し合わせること
により、微小な欠陥信号を強調する撮像画面を作成する
ようにして、前記課題を解決したものである。SUMMARY OF THE INVENTION The present invention is a surface defect inspection method for detecting a surface defect of an object to be inspected from image data obtained by imaging the surface, and an image pickup device capable of picking up two or more color components. By solving the above problem, a specific offset value is subtracted from each of the photographed color components, and each color component is added to create an imaging screen that emphasizes a minute defect signal. .
【0008】又、前記オフセット値を、画像中の各色成
分のそれぞれの平均値から求めることにより、表面の反
射率の変化や照明光強度の変動による影響を軽減したも
のである。Further, by obtaining the offset value from the average value of each color component in the image, the influence of the change of the reflectance of the surface and the change of the intensity of the illumination light is reduced.
【0009】又、前記により作成された撮像画面を、予
め設定された値で二値化し、二値化された面積が、予め
設定された判別閾値を越えた場合、当該撮影画像中に欠
陥が存在すると判定するようにしたものである。Further, when the image pickup screen created as described above is binarized with a preset value and the binarized area exceeds a preset discrimination threshold, a defect is found in the photographed image. It is determined that it exists.
【0010】同様にして、本発明は、表面欠陥検査装置
において、被検査物体を照射する光源と、被検査物体表
面を撮像し、画像信号をビデオ信号として伝送する機能
を有し、2色以上の色成分を撮像できる撮像装置と、ビ
デオ画像信号をデジタル画像信号に変換する機能を有す
るアナログ/デジタル信号変換装置と、画像データを保
存する画像データメモリを有し、画像中の輝度の平均値
を計算して、特定のオフセット値を引き、各色成分の値
を足し合わせ、二値化する機能を有する画像処理装置
と、二値化の面積から欠陥の有無を判定する判別装置
と、判定結果を出力する出力装置とを備えることによ
り、前記課題を達成したものである。Similarly, the present invention has, in a surface defect inspection apparatus, a light source for irradiating an object to be inspected and a function of picking up an image of the surface of the object to be inspected and transmitting an image signal as a video signal. , An analog / digital signal converter having a function of converting a video image signal into a digital image signal, and an image data memory for storing image data, and an average value of luminance in an image. , A specific offset value is subtracted, the values of the respective color components are added, and an image processing device having a function of binarizing, a discriminating device that determines the presence or absence of a defect from the binarized area, and the determination result The above-mentioned problem is achieved by including an output device for outputting.
【0011】[0011]
【作用】これまで、テレビカメラ撮像による鋼板表面欠
陥検査では、鋼板表面の表面粗度による回折、散乱光、
更には鋼板表面の反射率の変化や照明光強度の変動のた
め、微弱な色むら状の欠陥は判別が困難であった。[Function] Up to now, in the inspection of steel plate surface defects by image pick-up by a television camera, diffraction, scattered light due to the surface roughness of the steel plate surface,
Furthermore, it was difficult to identify a weak irregular color defect due to a change in reflectance of the steel plate surface and a change in illumination light intensity.
【0012】そこで本発明では、2色以上の色成分が撮
像できる撮像装置で撮像した、一画像中の画像データの
各色成分の輝度の平均値を求める。この平均値より幾ら
か小さい値を、それぞれ各成分のオフセット値として設
定し、各色成分の画像から引く。この各色成分からオフ
セット値を差し引いた画像を足し合わせ、濃淡画像とし
て表示することにより、微妙な色むら状欠陥の信号が強
調され、又、鋼板表面の散乱光や撮像素子の電子ノイズ
は足し合わされることにより平均化され、色むら状の欠
陥のSN比が良くなる。Therefore, in the present invention, the average value of the brightness of each color component of the image data in one image picked up by an image pickup device capable of picking up two or more color components is obtained. A value slightly smaller than this average value is set as the offset value of each component and subtracted from the image of each color component. By adding the images obtained by subtracting the offset value from each color component and displaying it as a grayscale image, the signal of the subtle color irregularity defect is emphasized, and the scattered light on the steel plate surface and the electronic noise of the image sensor are added together. By doing so, they are averaged, and the SN ratio of the irregular color defect is improved.
【0013】更に、平均値から求めたオフセット値を差
し引くことにより、鋼板表面の反射率や照明光強度の変
化を補正することができる。Further, by subtracting the offset value obtained from the average value, it is possible to correct the changes in the reflectance and the illumination light intensity on the surface of the steel sheet.
【0014】更に、この濃淡画像に、予め設定した閾値
により二値化処理を施すことにより、欠陥部分が二値化
され、二値化面積により欠陥の有無が判定できる。Further, the grayscale image is binarized by a preset threshold value to binarize the defective portion, and the presence or absence of the defect can be determined by the binarized area.
【0015】[0015]
【実施例】以下、3個の一次元撮像素子をもつ、3つの
色成分を検出する一次元撮像装置を用いた本発明の実施
例について、図面を参照して詳しく説明する。Embodiments of the present invention using a one-dimensional image pickup device having three one-dimensional image pickup elements for detecting three color components will be described in detail below with reference to the drawings.
【0016】図1は、本実施例の構成を示す説明図であ
る。この図において、例えば鋼板でなる被検査物体10
に表面欠陥12が存在し、該表面欠陥12の周辺を照ら
すようにして、照明光源20から被検査物体10に光が
照射されている。FIG. 1 is an explanatory diagram showing the configuration of this embodiment. In this figure, the object to be inspected 10 made of, for example, a steel plate
There is a surface defect 12 in the surface of the inspection object 10, and the illumination light source 20 irradiates the inspection object 10 with light so as to illuminate the periphery of the surface defect 12.
【0017】22は、2色以上の色成分(実施例では、
赤、緑、青の3成分)を撮像できる2個以上(実施例で
は3個)の一次元撮像素子を備えた一次元撮像装置(例
えば3板式の3色テレビカメラ)であって、被検査物体
10の表面欠陥12及びその周辺部を撮像する。該一次
元撮像装置22の出力は、ビデオ信号として伝送され、
アナログ/デジタル(A/D)変換装置24でA/D変
換された後、画像処理装置26に送出されて画像処理さ
れる。22 is a color component of two or more colors (in the embodiment,
A one-dimensional image pickup device (for example, a three-plate three-color television camera) having two or more (three in the embodiment) one-dimensional image pickup device capable of picking up three components of red, green, and blue. The surface defect 12 of the object 10 and its peripheral portion are imaged. The output of the one-dimensional imaging device 22 is transmitted as a video signal,
After being A / D converted by the analog / digital (A / D) converter 24, it is sent to the image processor 26 for image processing.
【0018】前記画像処理装置26では、一次元撮像装
置22からのビデオ信号を被検査物体10の移動ピッチ
に同期させて1ライン毎に蓄積し、時系列的に1ライン
毎のビデオ信号を順次蓄積することにより、被検査物体
10の画像を二次元化する。In the image processing device 26, the video signal from the one-dimensional image pickup device 22 is accumulated line by line in synchronism with the movement pitch of the object 10 to be inspected, and the video signal for each line is sequentially arranged in time series. By accumulating, the image of the inspection object 10 is two-dimensionalized.
【0019】画像処理装置26の出力は、演算装置28
に送出されて、二値化の面積から表面欠陥の有無が判定
されるなどの演算が施され、該演算結果が、演算結果出
力装置30を介して出力される。又、演算装置28の出
力は画像モニタ30にも送出され、上記表面欠陥12を
鮮明に示す画像を表示する。The output of the image processing unit 26 is output by the arithmetic unit 28.
Then, the calculation result is output from the binarized area to determine the presence or absence of a surface defect, and the calculation result is output via the calculation result output device 30. The output of the arithmetic unit 28 is also sent to the image monitor 30 to display an image showing the surface defect 12 clearly.
【0020】図2は、赤(波長範囲600〜800n
m)、緑(波長範囲500〜600nm)及び青(波長範
囲400〜500nm)の3色の成分が撮像できる一次元
撮像装置22により撮像した、表面処理鋼板における色
むら状の表面欠陥の画像である。この画像の青成分のa
−b 間の輝度分布を図3に示す。これらの本画像中の各
色成分の画像の輝度の平均値を下表1に示す。FIG. 2 shows red (wavelength range 600 to 800 n
m), green (wavelength range 500 to 600 nm), and blue (wavelength range 400 to 500 nm), which are imaged by a one-dimensional image pickup device 22 capable of picking up three color components. is there. A of the blue component of this image
The luminance distribution between −b is shown in FIG. Table 1 below shows the average value of the brightness of the image of each color component in these main images.
【0021】[0021]
【表1】 [Table 1]
【0022】この平均値から、例えば30を引いた値を
それぞれの成分のオフセット値と設定し、各色成分の画
像から差し引くと、図4に示す輝度分布となる。図中、
(R)は赤成分、(G)は緑成分、(B)は青成分をそ
れぞれ示す。When the value obtained by subtracting 30 from the average value is set as the offset value of each component and subtracted from the image of each color component, the brightness distribution shown in FIG. 4 is obtained. In the figure,
(R) shows a red component, (G) shows a green component, and (B) shows a blue component.
【0023】これらのオフセット値を引いた各色成分の
画像を濃淡画像として足し合わせると、図5に示す画像
となり、その輝度分布は図6となる。このように微弱で
あった欠陥部の信号が、一連の処理により強調され、鋼
板表面の反射率や照明光の変化が補正される。When the images of the respective color components from which these offset values have been subtracted are added together as a grayscale image, the image shown in FIG. 5 is obtained, and its luminance distribution is shown in FIG. In this way, the signal of the weak defect portion is emphasized by a series of processes, and the reflectance of the steel plate surface and the change of the illumination light are corrected.
【0024】更に、閾値で二値化処理を行うと図7に示
す画像が得られ、欠陥部が抽出される。Further, when the binarization process is performed with the threshold value, the image shown in FIG. 7 is obtained, and the defective portion is extracted.
【0025】なお、上記一連の画像処理は、図1の画像
処理装置26で行われる。The above series of image processing is performed by the image processing device 26 of FIG.
【0026】図7の画像から二値化面積を計算すると、
表示画面に対する面積率は約6%となり、面積率による
欠陥判定が行える。Calculating the binarized area from the image of FIG.
The area ratio with respect to the display screen is about 6%, and defect determination can be performed based on the area ratio.
【0027】この欠陥判定は演算装置28で行われ、該
判定結果が演算結果出力装置30に送出されて印刷など
が行われる。又、該判定結果は、画像モニタ32にも送
出され、該モニタ32上に表示される。This defect determination is performed by the arithmetic unit 28, and the determination result is sent to the arithmetic result output unit 30 for printing or the like. The determination result is also sent to the image monitor 32 and displayed on the monitor 32.
【0028】なお、前記実施例においては、撮像装置と
して3板式の3色テレビカメラが用いられていたが、撮
像装置の種類は、これに限定されず、2色以上の色成分
を撮像できる2個以上の一次元撮像素子を備えたもので
あれば他のものでもよい。In the above embodiment, a three-plate type three-color television camera was used as the image pickup device, but the type of the image pickup device is not limited to this, and two or more color components can be picked up. Any other device may be used as long as it includes one or more one-dimensional image pickup devices.
【0029】又、撮像素子も一次元撮像素子に限定され
ず、各色成分を分離して撮像できる二次元撮像素子を用
いてもよい。二次元撮像素子を用いた構成では、画像処
理装置26において、一次元撮像素子を用いた構成のと
きのように、被検査物体10の移動ピッチに同期させて
1ライン毎にビデオ信号を蓄積し、二次元画像とする必
要はなく、撮像素子からの二次元のビデオ信号をそのま
ま処理することができる。The image pickup device is not limited to the one-dimensional image pickup device, and a two-dimensional image pickup device capable of separating each color component for image pickup may be used. In the configuration using the two-dimensional image sensor, in the image processing device 26, as in the configuration using the one-dimensional image sensor, the video signal is accumulated line by line in synchronization with the movement pitch of the inspected object 10. It is not necessary to form a two-dimensional image, and the two-dimensional video signal from the image sensor can be directly processed.
【0030】又、検査対象も表面処理鋼板に限定され
ず、一般の鋼板や、他の金属板にも、同様に適用でき
る。Further, the object to be inspected is not limited to the surface-treated steel plate, but can be similarly applied to general steel plates and other metal plates.
【0031】[0031]
【発明の効果】以上説明したとおり、本発明によれば、
2色以上の色成分を撮像できる撮像装置により撮像した
表面欠陥像を処理することにより、これまで検出が困難
であった微妙な色むら状の表面欠陥が正確に検出できる
という優れた効果を有する。As described above, according to the present invention,
By processing a surface defect image captured by an image capturing device capable of capturing color components of two or more colors, it is possible to accurately detect subtle irregular color irregular surface defects that have been difficult to detect up to now. .
【図1】本発明の実施例の構成説明図FIG. 1 is an explanatory diagram of a configuration of an embodiment of the present invention.
【図2】前記実施例の撮像装置で撮像した表面欠陥を含
む画像の例を示す線図FIG. 2 is a diagram showing an example of an image including a surface defect imaged by the image pickup apparatus of the embodiment.
【図3】図2のa −b 間の青成分の輝度プロファイルを
示す線図FIG. 3 is a diagram showing a luminance profile of a blue component between a and b in FIG.
【図4】前記実施例で、各色成分の画像から特定のオフ
セット値を差し引いた輝度プロファイルを示す線図FIG. 4 is a diagram showing a luminance profile obtained by subtracting a specific offset value from an image of each color component in the embodiment.
【図5】同じく、オフセット値を差し引いた各色成分を
足し合わせた画像を示す線図FIG. 5 is a diagram showing an image in which each color component from which an offset value has been subtracted is added together in the same manner.
【図6】図5のa −b 間の輝度プロファイルを示す線図FIG. 6 is a diagram showing a luminance profile between a and b in FIG.
【図7】図5に対して二値化処理を施した画像を示す線
図FIG. 7 is a diagram showing an image obtained by performing binarization processing on FIG.
10…被検査物体 12…表面欠陥 20…照明光源 22…一次元撮像装置 24…A/D変換装置 26…画像処理装置 28…演算装置 30…演算結果出力装置 32…画像モニタ DESCRIPTION OF SYMBOLS 10 ... Inspected object 12 ... Surface defect 20 ... Illumination light source 22 ... One-dimensional imaging device 24 ... A / D conversion device 26 ... Image processing device 28 ... Calculation device 30 ... Calculation result output device 32 ... Image monitor
Claims (4)
査物体の表面欠陥を検出する表面欠陥検査方法におい
て、 2色以上の色成分を撮像できる撮像装置を用いて、撮影
された各色成分から、特定のオフセット値を引き、各色
成分を足し合わせることにより、 微小な欠陥信号を強調する撮像画面を作成することを特
徴とする表面欠陥検査方法。1. A surface defect inspection method for detecting a surface defect of an object to be inspected from image data obtained by imaging a surface, each color imaged by using an image pickup device capable of picking up two or more color components. A surface defect inspection method characterized by creating an imaging screen that emphasizes a minute defect signal by subtracting a specific offset value from the components and adding up each color component.
画像中の各色成分のそれぞれの平均値から求めることに
より、表面の反射率の変化や照明光強度の変動による影
響を軽減することを特徴とする表面欠陥検査方法。2. The offset value according to claim 1,
A surface defect inspection method characterized by reducing the influence of a change in the reflectance of the surface or a change in the intensity of illumination light by obtaining the average value of each color component in the image.
て、予め設定された値で二値化し、二値化された面積
が、予め設定された判別閾値を越えた場合、当該撮影画
像中に欠陥が存在すると判定することを特徴とする表面
欠陥検査方法。3. The image pickup screen created according to claim 1, binarized by a preset value, and when the binarized area exceeds a preset discrimination threshold, A surface defect inspection method characterized by determining that a defect exists.
伝送する機能を有し、2色以上の色成分を撮像できる撮
像装置と、 ビデオ画像信号をデジタル画像信号に変換する機能を有
するアナログ/デジタル信号変換装置と、 画像データを保存する画像データメモリを有し、画像中
の輝度の平均値を計算して、特定のオフセット値を引
き、各色成分の値を足し合わせ、二値化する機能を有す
る画像処理装置と、 二値化の面積から欠陥の有無を判定する判別装置と、 判定結果を出力する出力装置と、 を含むことを特徴とする表面欠陥検査装置。4. A light source for irradiating an object to be inspected, an image pickup apparatus having a function of picking up an image of the surface of the object to be inspected and transmitting an image signal as a video signal, and a video image. An analog / digital signal converter having a function of converting a signal into a digital image signal, and an image data memory for storing image data, and calculating an average value of luminance in an image to subtract a specific offset value, An image processing device having a function of binarizing by adding the values of respective color components, a discriminating device for discriminating the presence or absence of a defect from the binarized area, and an output device for outputting the discrimination result. And surface defect inspection equipment.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15188193A JPH0682390A (en) | 1992-06-26 | 1993-06-23 | Method and apparatus for inspecting surface defect |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4-169257 | 1992-06-26 | ||
JP16925792 | 1992-06-26 | ||
JP15188193A JPH0682390A (en) | 1992-06-26 | 1993-06-23 | Method and apparatus for inspecting surface defect |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0682390A true JPH0682390A (en) | 1994-03-22 |
Family
ID=26480982
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15188193A Pending JPH0682390A (en) | 1992-06-26 | 1993-06-23 | Method and apparatus for inspecting surface defect |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0682390A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08145914A (en) * | 1994-11-16 | 1996-06-07 | Nakajima:Kk | Detecting equipment of defect of lumber by one-dimensional tv camera |
JP2004138417A (en) * | 2002-10-16 | 2004-05-13 | Nippon Steel Corp | Method and apparatus for inspecting scratch in steel plate |
JP2018146567A (en) * | 2017-03-03 | 2018-09-20 | 株式会社神戸製鋼所 | Surface quality detection method |
CN109191439A (en) * | 2018-08-20 | 2019-01-11 | 宁波市智能制造产业研究院 | A kind of target workpiece surface knife mark defect inspection method |
WO2022202042A1 (en) * | 2021-03-22 | 2022-09-29 | 株式会社安永 | Visual inspection method and visual inspection device |
-
1993
- 1993-06-23 JP JP15188193A patent/JPH0682390A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08145914A (en) * | 1994-11-16 | 1996-06-07 | Nakajima:Kk | Detecting equipment of defect of lumber by one-dimensional tv camera |
JP2004138417A (en) * | 2002-10-16 | 2004-05-13 | Nippon Steel Corp | Method and apparatus for inspecting scratch in steel plate |
JP2018146567A (en) * | 2017-03-03 | 2018-09-20 | 株式会社神戸製鋼所 | Surface quality detection method |
CN109191439A (en) * | 2018-08-20 | 2019-01-11 | 宁波市智能制造产业研究院 | A kind of target workpiece surface knife mark defect inspection method |
WO2022202042A1 (en) * | 2021-03-22 | 2022-09-29 | 株式会社安永 | Visual inspection method and visual inspection device |
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