JPH1062296A - Air leak testing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an air leak tester capable of detecting leaks with high accuracy. SOLUTION: A housing space 9b for a work is formed between an upper mold 50 and a lower mold 40. A measurement block 55 for which a pressure sensor, etc., are provided is directly installed to the upper mold 50. A channel part 1b2 in the downstream side of an air channel which communicates with a test pressure source is holed in the measurement block 55. The downstream- side channel part 1b2 communicates with the housing space 9b for a work via through holes 22y and 51y holed in the upper mold 50.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an air leak test apparatus for detecting the presence or absence of minute leakage of a work.

[0002]

2. Description of the Related Art For example, an air leak test apparatus for detecting the presence or absence of leakage of a small sealed container such as a small electronic component has an upper die and a lower die which can be separated from each other.
By contacting these upper and lower dies,
A sealed accommodation space for the master and an accommodation space for the work are formed. Further, the air leak test device includes a common air passage whose base end is connected to the test pressure source, and first and second branch air passages branched from a distal end of the common air passage. The distal ends of the first and second branch air passages are connected to the master accommodation space and the work accommodation space, respectively. Each branch air passage is provided with a two-way valve. In the first and second branch air passages, a differential pressure sensor is connected via a pair of pressure introduction passages to a middle part of the front end side passage portion between the two-way valve and the front end.

In the air leak test apparatus, at the time of a leak test, a master part and a work to be inspected are respectively housed in a master housing space and a work housing space, and a master housing space and a work space are received from a test pressure source. Supply test pressure to the containment space. Thereafter, by closing a pair of two-way valves, the system on the master side and the system on the work side are respectively closed at the test pressure, and in this state, leakage of the work is detected based on the differential pressure detected from the differential pressure sensor. Determine the presence or absence.

[0004]

Conventionally, the above first and second methods have been described.
The front end side passage portion and the pressure introduction passage of the second branch air passage are formed in a measurement block, and the differential pressure sensor is installed on an outer surface of the measurement block. The front end side passage portions of the first and second branch air passages of the measurement block open to the outer surface of the measurement block, and are respectively connected to upper and lower work accommodation spaces and master accommodation spaces via pipes. ing. However, due to the presence of this pipe, high-precision leak detection could not be performed. The reason will be described in detail. Especially the first
The distal passage portion and the pair of introduction passages of the second branch air passage form a closed system. If a part of the distal passage portion is formed by a pipe, the volume of the closed system becomes large. Therefore, the differential pressure generated due to the leakage of the work becomes small, and it becomes difficult to find the small leakage. Also, since the tube is formed of a relatively soft material to facilitate bending, the volume of the closed system may change due to the elastic deformation of the tube when a test pressure is applied. However, there was a limit in improving the detection accuracy.

[0005]

Means for Solving the Problems The invention of claim 1 is:
(A) an air passage connected to the test pressure source, (b) a valve provided in the air passage, and (c) a pressure sensor for detecting a pressure in a passage portion of the air passage that is closer to the valve than the valve. (D) a pressure introduction passage for connecting a distal end passage portion of the air passage to a port of a pressure sensor; and (e) a distal end passage portion of the air passage and the pressure introduction passage,
A measurement block having a pressure sensor installed on its outer surface and opening the pair of pressure introduction passages to be connected to a port of the pressure sensor; and An air leak test apparatus having a first mold and a second mold that form a storage space for the apparatus, the measurement block is directly attached to one of the first mold and the second mold selected from the first mold and the second mold. A through hole is formed in the selected mold so as to connect the work accommodation space and the front end side passage portion of the air passage formed in the measurement block.

The invention of claim 2 is based on claim 1 (a) to (b).
(F) In the air leak test apparatus including the components, the measurement block is provided as one of the selected molds, and the tip of the tip side passage portion of the air passage formed in the measurement block is directly used for a workpiece. It is characterized by being connected to the accommodation space.

[0007] The invention of claim 3 is based on claim 1 (a) to (b).
In the air leak test apparatus provided with the component (e), the work block is detachably attached to the work so that the work opening is air-tightly connected to the work opening at the front end of the air passage formed in the measurement block. And a mounting means for mounting on the device.

[0008] The invention of claim 4 is the invention of claim 1.
(E) an air leak test apparatus including the components described above, wherein the measurement block is attached to an intermediate member, and a through hole is formed in the intermediate member so as to be continuous with a front end side passage portion of an air passage formed in the measurement block; A mounting means is provided for detachably mounting the work to the intermediate member so that the opening of the work is airtightly connected to the tip end opening of the through hole of the intermediate member.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a first embodiment of the present invention will be described with reference to FIGS. First, an outline of the air leak test device will be described with reference to the system diagram of FIG. This air leak test device has an air passage 1. The air passage 1 includes a common air passage 1x and first and second branch air passages 1a branched from a downstream end (tip) thereof.
1b. Upstream end (base end) of common air passage 1x
Is connected to a compressed air pressure source 2 (test pressure source).
In the common air passage 1x, a regulator 3 and a three-way solenoid valve 4 are provided in this order from the upstream side. This three-way solenoid valve 4
A test pressure supply position for communicating the pair of branch air passages 1a and 1b with the compressed air source 2;
This selects one of the open-to-atmosphere positions where a and 1b are cut off from the compressed air source 2 and released to the atmosphere.

[0010] Upstream ends (base ends) of branch air passages 1a and 1b
Is connected to the downstream end of the common air passage 1x, and is provided with a normally open pneumatically driven two-way valve 5a, 5b in the middle thereof. Hereinafter, in the branch air passages 1a and 1b,
An upstream passage portion 1 is provided between the two-way valves 5a and 5b and the upstream end.
a ₁ , 1b ₂ (proximal passage portion), two-way valves 5a, 5b
The space between b and the downstream end is referred to as downstream-side passage portions 1a ₂ and 1b ₂ (tip-side passage portions).

A pair of input ports 6 of a differential pressure sensor 6 (pressure sensor) is provided in the middle of the downstream passage portions 1a ₂ and 1b ₂ of the branch air passages 1a and 1b via introduction passages 1c and 1d.
a and 6b are respectively connected. This differential pressure sensor 6
Has a diaphragm inside and a pair of input ports 6
The deformation of the diaphragm according to the pressure difference between a and 6b is converted into a voltage and output.

Further, the communication passages 1e, 1b are provided in the middle of the downstream passage portions 1a ₂ , 1b ₂ of the branch air passages 1a, 1b.
The volume changers 8a and 8b are connected via f. The volume changers 8a and 8b have the same configuration.

At the downstream end of the first branch air passage 1a, a master housing space 9 for housing a master part M is provided.
a at the downstream end of the second branch air passage 1b.
A work accommodation space 9b for accommodating a work W to be inspected (for example, a precision electronic component or the like) is connected. The master part M is the same part as the work W, for example, and it has been confirmed that no leakage occurs. The accommodation spaces 9a and 9b will be described later.

Further, the air leak test device has a control unit 10. The control unit 10 includes a microcomputer, a memory, an input / output interface, a driving unit, and the like (all not shown). The control unit 10 also receives a detection signal from the differential pressure sensor 6. The control unit 10 has a function of controlling the three-way solenoid valve 4, the two-way valves 5a and 5b, the volume changers 8a and 8b, the display 11, the pass lamp 12, the reject lamp 13, and the like.

Next, a specific structure of the air leak test apparatus will be described with reference to FIGS. 2 and 3 show the overall configuration, and FIG. 4 shows details of the main part. This air leak test device can inspect five works at the same time. In these drawings, most of the common air passage 1x, the compressed air pressure source 2, the regulator 3, and the three-way solenoid valve 4 are omitted.

As shown in FIGS. 2 and 3, the air leak test device has a fixed frame 20. The fixed frame 20 has a lower base 21 and an upper base 22 that are horizontally arranged at an interval vertically. Both bases 2
The reference numerals 1 and 22 are connected by a support 23. As is clear from FIG. 3, the rear half of the space above the lower base 21 is occupied by the upper base 22, but the front half is open for the convenience of the work replacement operation. The fixed frame 20 further has a case 24 installed on the upper surface of the upper base 22.

As shown in FIG. 2, on the upper surface of the lower base 21, rails 25 extending horizontally in the front-rear direction (in the direction perpendicular to the paper surface in FIG. 2) are installed left and right apart.
A moving table 26 is provided on these rails 25. A horizontal driving mechanism 27 of an air cylinder type is installed on the upper surface on the right side of the lower base 21 when viewed from the front, and the moving table 26 is moved in the front-rear direction along the rail 25 by the horizontal moving mechanism 27. It has become.

On the moving table 26, five lift tables 30 which can be moved up and down independently are arranged in a line in the horizontal direction. Each elevator 30 is provided with a horizontal support base 3.
1, a receiving rod 32 extending vertically downward from the lower surface of the central portion of the support base 31, and a guide rod 33 extending vertically downward from the lower surface of the front and rear ends of the support base 31. When the guide rod 33 penetrates the moving table 26, the elevator 30 can vertically move up and down in a stable posture. The receiving rod 32 is provided with a pair of engaging hooks 34. A compressed coil spring 35 is interposed between the movable table 26 and the lower end of the guide rod 33 whose diameter has been increased. The support 30 is
Due to its own weight and the downward biasing force of the coil spring 35, it is placed on the moving table 26.

On the lower surface of the rear part of the lower base 21, five lifting air cylinders 36 (vertical moving mechanisms) are mounted side by side in the left-right direction. The push-up rod 37 of the air cylinder 36 penetrates through the lower base 21 and protrudes upward. The upper end of the push-up rod 37 has a large diameter, and an annular engagement recess 37a is formed here.

Push-up rod 3 of air cylinder 36
7 is retracted to the lowest position, and the moving table 2
6 moves rearward. Moving table 2
When 6 moves rearward, the receiving rods 32 of the five movable bases 30 are located right above the push-up rods 37 of the five air cylinders 36. Further, the engaging hook 34 is engaged with the engaging concave portion 37a of the push-up rod 37. By driving these air cylinders 36, the push-up rod 37 is raised, and the receiving rod 32
, The moving table 30 is pushed upward. The engagement between the engagement recess 37a of the push-up rod 37 and the engagement hook 34 ensures that the movable table 30 moves downward as the push-up rod 37 moves downward.

A lower mold 40 (first mold) extending in the front-rear direction is attached to the upper surface of the support base 31 of each elevator 30. The lower mold 40 has two convex portions 41 and 42 having circular cross sections.
The front surface is horizontal and the same height, and is provided as mating surfaces 41a and 42a. FIG.
As best shown in FIG.
a, 42a, a concave portion 43 forming the master accommodating space 9a and a concave portion 44 forming the work accommodating space 9b.
Are formed respectively. Mating surfaces 41a, 42a
Are formed with an annular groove so as to surround these concave portions 43 and 44, and seal rings 45 and 46 are formed in these grooves.
Are fitted in each.

On the lower surface of the upper base 22, five receiving plates 51 corresponding to the five lower dies 40 are mounted side by side. The receiving plate 51 extends long in the front-rear direction, and its lower surface is provided as a horizontal mating surface 51a. A total of five upper dies 50 (second dies) are provided by the corresponding portions of the receiving plate 51 and the upper base 22.
Is configured. On the upper surface of the upper base 22, five measurement blocks 55 are mounted side by side. The measurement block 55 has a rectangular parallelepiped shape that is long and narrow in the front and back. Each measurement block 55 is disposed directly above the receiving plate 51.

When the elevating platform 30 moves up and the mating surfaces 41a and 42a of the lower mold 40 come into contact with the mating surfaces 51a of the receiving plate 51 of the upper mold 50, the concave portions 43 and
44 is closed by the receiving plate 51 to form a sealed master accommodating space 9a and a work accommodating space 9b. In addition,
These accommodation spaces 9a and 9b have the same volume.

As shown in FIG. 4, a portion near the front end of the common air passage 1x is formed at the rear end of the measurement block 55. The main part of the common air passage 1x is a pipe (not shown)
And is connected to the bored hole via a joint. The branch air passages 1 a and 1 b are also formed in the measurement block 55. The distal ends of the upstream passage portions 1a ₁ and 1b ₁ of the branch air passages 1a and 1b and the base ends of the downstream passage portions 1a ₂ and 1b ₂ open to the upper surface of the measurement block 55 at close positions. The two-way valves 5a and 5b are installed at the opening position in an airtight manner.

The pressure introducing passages 1c and 1d are also measured by the measuring block 5.
5, a differential pressure sensor 6 is hermetically installed at the opening position. Similarly, the communication passages 1e and 1f are also formed in the measurement block 55 and open at the upper surface thereof, and the volume changers 8a and 8b are installed at the opening positions in an airtight manner.

Each of the two-way valves 5a and 5b has a cylindrical case 80 and an air-driven valve body 81 disposed in the case 80. Two vertical communication holes 82 and 83 are formed at the bottom of the case 80.
The lower end of one communication hole 82 has the shape of the downstream passage portion 1.
The upper end is open to the valve seat 84 in connection with the openings a ₂ and 1b ₂ . The other communication hole 83 is connected to the upstream passage portions 1a ₁ , 1
It is continuous in b _1. When the valve body 81 is separated from the valve seat 84, the downstream passage portions 1a ₂ and 1b ₂ communicate with the upstream passage portions 1a ₁ and 1b ₁ via the internal space of the case 80, and the valve body 81 When the user is seated on the valve seat 84, the communication is interrupted.

A pair of input ports 6a, 6 of the differential pressure sensor 6
b (see FIG. 1) are respectively connected to upper end openings of the pair of pressure introduction passages 1c and 1d. Each of the volume changers 8 a and 8 b has a cylindrical tank 90 and an air-driven valve element 91 disposed in the tank 90. At the bottom of the tank 90, a vertical communication hole 92 is formed. The lower end of the communication hole 92 has the communication passage 1e, 1
f, and the upper end is open to the valve seat 94.

The measurement block downstream passage portion 1a ₂ of the first branch air passage 1a bored in the 55, the measurement block 5
5, and is continuous with a through hole 22 x formed through the upper base 22 and a through hole 51 x formed in the receiving plate 51. These through holes 22x, 51x
It is intended to constitute a cutting edge portion of the downstream passage portion 1a _2, located directly above the recess 43 of the lower die 40 in the rearward position. Similarly, the downstream passage portion 1b ₂ of the second branch air passage 1b bored in the measuring block 55 is opened to the lower surface of the measurement block 55, through holes 22y bored through the upper base 22, It is connected to a through hole 51y formed in the receiving plate 51. These through holes 22
y, 51 y is constitutes a cutting edge portion of the downstream passage portion 1b _2, are positioned directly above the recess 44 of the lower die 40 in the rearward position.

As is clear from the above description, in FIG. 1, an air passage in a range surrounded by an imaginary line is formed in the upper die 50 and the measurement block 55. In this embodiment, five upper dies 50 and a measurement block 55 are provided.
Only one is shown. The common air passage 1x is branched into five on the way and connected to five measurement blocks 55.

The base 22, the receiving plate 5
1. The measurement block 55 is connected to each other in a state of being airtightly shut off from the outside by using a seal ring, bolts, nuts and the like (not shown). The control unit 10, the display 11, the pass lamp 12, and the reject lamp 13 are attached to the case 24.

With the air leak test apparatus having the above configuration,
When performing a work leak test, make sure that five lower molds 40
The master parts M are housed in the concave portions 43 of the respective components. Then, as shown in FIG. 3, the moving table 26 is pulled out to the front position by the horizontal moving mechanism 27, and the upper part of the lower mold 40 is opened, and the five workpieces W to be inspected are moved using a robot or the like. Each is accommodated in the other concave portion 44 of the lower mold 40.

Next, the horizontal drive mechanism 27 is driven to move the moving table 26 backward as shown by the arrow A, and is positioned immediately below the upper base 22. In this state, the elevating cylinder 36 is driven to raise the elevating table 30 as shown by the arrow B, and the mating surfaces 41a and 41b of the lower die 40 are pressed against the mating surface 51a of the receiving plate 51 of the upper die 50 to be in close contact therewith. Let it. As a result, a sealed housing space 9a for accommodating the master part M and a sealed housing space 9b for accommodating the work W are obtained. In this state,
The lower end openings (tip opening) of the through-holes 51x, 51y of the receiving plate 51 are connected to these accommodation spaces 9a, 9b.

Next, the three-way solenoid valve 4 is turned on, and the test pressure is applied to the master accommodating space 9 via the branch air passages 1a and 1b.
a and the work accommodation space 9b. Next, two-way valve 5
a, by closing 5b, while closing the system including a downstream passage portion 1a ₂ and the master accommodating space 9a of the first branch air passage 1a in the test pressure, the second branch air passage 1
system comprising a downstream passage portion 1b ₂ and the workpiece accommodating space 9b of b is also closed with a test pressure.

Work W accommodated in work accommodation space 9b
If there is no flaw, the pressurized air does not enter into the work W, and the pressure of the closed system on the work side is not different from the pressure of the closed system on the master side. Or acceptable. In this case, the control unit 10 determines that there is no minute leakage.

If the work W has a minute flaw, pressurized air enters the inside of the work W, so that the pressure of the work side closing system is reduced by that amount, and the differential pressure sensor 6 responds to the leak by the pressure. The detected differential pressure is detected. The control unit 10 causes the display unit 11 to display the leak amount in terms of the atmospheric pressure corresponding to the differential pressure, and makes a leak determination by comparing the amount with the threshold value. When the leakage amount is smaller than the threshold value, it is determined that the work W has no minute leakage, and when the leakage amount is larger than the threshold value, it is determined that there is the minute leakage.

Next, the valves 91 of the volume changers 8a and 8b are opened to release the pressures of the master-side closing system and the work-side closing system to the internal space of the tank 90 at atmospheric pressure (pseudo leakage). After that, the differential pressure is detected again by the differential pressure sensor 6.
This detected differential pressure is compared with a threshold value different from the above, and the presence or absence of a large leak is determined.

The principle of the large leak determination is as follows. If the work W has a large flaw, the pressurized air is drawn into the work W when the test pressure is applied, and the inside of the work W becomes the test pressure. Thereafter, even if the two-way valves 5a and 5b are closed and the differential pressure is detected, this differential pressure is substantially zero, and it is determined that there is no minute leakage.
For this reason, as described above, an equal amount of pseudo leakage occurs in the master-side closing system and the work-side closing system. Work W
If the test pressure is generated due to a large leak inside, the pressure of the work-side closing system becomes higher than expected after the pseudo leak. In other words, when there is a large leak, a difference corresponding to the inner volume of the work W appears in the volumes of the closed systems on the master side and the work side. The difference in volume in the test pressure state appears as a differential pressure due to the pseudo leak, so that the presence or absence of a large leak can be determined.

For the work W which has been judged as having no micro-leakage and no large-leakage, the corresponding pass lamp 12 is turned on as a non-defective product, and if there is a micro-leakage or large-leakage, the work W is defective. The judgment is made and the corresponding reject lamp 13 is turned on. Next, the control unit 10 sets the three-way solenoid valve 4 to the atmosphere release position and opens the two-way valves 5a and 5b to open the master accommodation space 9a and the work accommodation space 9b to the atmosphere. The on / off valves 91 of 8a and 8b are closed.

After performing the leak test as described above,
The lifting cylinder 36 is driven to lower the lifting table 30, and the accommodation spaces 9a and 9b are opened. Then, the moving table 26 is moved forward by the horizontal moving mechanism 27 and returned to the initial position, the inspected work W is taken out from the concave portion 44, a new work W is accommodated, and the above-described leak test is performed again.

In the above air leak test apparatus, the measurement block 55 is directly connected to the upper mold 50, and the downstream air passage portions 1a ₂ , 1b ₂ of the branch air passages 1a, 1b of the measurement block 55.
Through holes 22x, 22y,
The through holes 51x and 51y formed in the receiving plate 51 communicate with the accommodation spaces 9a and 9b through the through holes 51x and 51y.
Compared 2x, 22y, through-holes 51x, when configuring for constituting the 51y as advanced portion of the downstream passage portion 1a _2, 1b _2, a portion of the downstream passage portion 1a _2, 1b ₂ by means of a tube Thus, the cross-sectional area of the passage can be reduced and shortened, and therefore the volume of the closed system can be reduced as much as possible. By the way, when a tube is used, the volume of the closed system is 20 cc, but in this embodiment, it is about 1 to 2 cc. Further, since the cross-sectional area of the bored hole does not change due to the application of the test pressure, a change in the volume of the closed system due to the test pressure can be eliminated. Furthermore, no member for connecting the passage is required, and the possibility of leakage here can be eliminated. As a result, the sensitivity of the leak detection due to the differential pressure can be increased, and it is possible to stably detect minute leaks of small precision components with high reliability.

In the above embodiment, the upper mold 50, the lower mold 40,
Although a plurality of sets, ie, five sets, of the elevating cylinders 36 are provided, it goes without saying that one set may be used. The differential pressure sensor, valve, and volume changer may be installed on different types of surfaces. Moreover, you may install in a lower type | mold.

FIGS. 5 to 7 show second, third and fourth embodiments of the present invention, respectively. In these embodiments, components corresponding to those in the first embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted. In the second embodiment shown in FIG. 5, the upper mold 50 of the first embodiment is omitted, and the measurement block 55 itself constitutes the upper mold. The lower surface 55a of the measurement block 55 serves as a mating surface, and the mating surfaces 41a and 42a of the lower mold 40 directly contact the mating surface 55a in an airtight manner. Downstream passage portion 1 of branch air passages 1a and 1b formed in measurement block 55
The tips of a2 and 1b2 open to this mating surface 55a,
The storage recesses 9a and 9b are connected to each other.

In the third embodiment shown in FIG. 6, two-way valves 5a and 5b, a differential pressure sensor 6, and volume changers 8a and 8b are provided on the lower surface of the measurement block 55, and the branch air passage 1a is provided on the upper surface. , 1b are open at the downstream passage portions 1a ₂ , 1b ₂ . Around the downstream passage portion 1a _2, 1b ₂ of the opening, the seal ring 100 is attached. The downstream passage portion 1b ₂ of the seal ring 100 as the workpiece W hits the workpiece W is mounted in the detachable. In this embodiment, the work W is an electromagnetic valve, and in a state where the valve Wa of the electromagnetic valve is in contact with a valve seat by a spring (not shown), the sealing property of the valve port Wb is inspected.
Note that the master has been mounted in an airtight state in communication always downstream passage portion 1a _2, here not shown.
The work W is air-tightly mounted on the measurement block 55 by a mounting mechanism including a guide mechanism and a pressing cylinder 150 (pressing mechanism) (not shown), and a very small space constituting the valve port Wb is formed in the downstream passage portion. 1b ₂ is connected to the upper end opening (tip opening).

The fourth embodiment of FIG. 7 is similar to the third embodiment of FIG. 6, except that the measurement block 55 is airtightly attached to the support base 200 (intermediate member). Support base 20
0, through holes 250x and 200y are formed vertically, and the lower ends of the through holes 250x and 250y are connected to the downstream passage portions 1a ₂ and 1b ₂ formed in the measurement block 55.
, Respectively, and are the foremost portions of these passage portions 1a ₂ and 1b ₂ . These through holes 250x, 250y
At the upper end of the downstream passage portion 1a ₂ , 1 of the third embodiment.
b ₂ a master in the same manner, the workpiece W is adapted to continuous airtight.

[0045]

As described above, according to the first aspect of the present invention, the measurement block is directly attached to one of the molds, so that the front end portion of the air passage is formed through the through-hole of the one mold. It can communicate with the storage space, and the volume of the closed system can be reduced as much as possible, and the change in volume due to pressure can be minimized. As a result, the sensitivity of leak detection due to differential pressure can be increased. Thus, even if the work to be inspected is small, minute leakage can be stably detected with high accuracy.

According to the second aspect of the invention, by using the measurement block as one of the molds, detection accuracy equal to or higher than that of the first aspect of the invention can be obtained, and the configuration can be simplified. According to the third aspect of the present invention, the work is directly mounted on the measurement block and communicates with the front end side passage portion of the air passage formed in the measurement block, so that the detection accuracy is equal to or higher than that of the first aspect of the invention. Can be obtained. According to the fourth aspect of the present invention, the measurement block is attached to the intermediate member, and the work communicates with the distal end side passage portion of the air passage formed in the measurement block through the through hole of the intermediate member. Detection accuracy equal to or higher than that of the first invention can be obtained.

[Brief description of the drawings]

FIG. 1 is a system diagram of an air leak test device according to a first embodiment of the present invention.

FIG. 2 is a front view showing the appearance of the air leak test device.

FIG. 3 is a side view showing the appearance of the air leak test device.

FIG. 4 is a sectional view of a main part of the air leak test apparatus.

FIG. 5 is a sectional view of a main part of an air leak test device according to a second embodiment of the present invention.

FIG. 6 is a sectional view of a main part of an air leak test device according to a third embodiment of the present invention.

FIG. 7 is a sectional view of a main part of an air leak test apparatus according to a fourth embodiment of the present invention.

[Explanation of symbols]

1x common air passage 1a first branch air passage 1b second branch air passage 1a _1, 1b ₁ upstream passage portion (proximal end side passage portion) 1a _2, 1b ₂ downstream passage portion (tip side passage portion) 2 compressed air Source (test pressure source) 5a, 5b Two-way valve (valve) 6 Differential pressure sensor (pressure sensor) 8a, 8b Volume changer 9a Master accommodating space 9b Work accommodating space 40 Lower die (first type) 50 Upper die (2nd type) 22x, 22y, 51x, 51y Through-hole 150 Pressing cylinder (mounting means) 200 Intermediate member 200x, 200y Through-hole

Claims (4)

[Claims] (A) an air passage connected to a test pressure source; (b) a valve provided in the air passage; and (c) a pressure in a passage portion of the air passage that is closer to the tip than the valve. A pressure sensor for detecting, (d) a pressure introducing passage for connecting the distal end passage portion of the air passage to a port of the pressure sensor, and (e) a distal end passage portion of the air passage and the pressure introducing passage. A measurement block having a pressure sensor installed on its outer surface and opening the pair of pressure introduction passages to be connected to a port of the pressure sensor; and A first mold and a second mold that form a work accommodating space; and an air leak test apparatus including: a first mold and a second mold, wherein the measurement block is directly attached to one of the first mold and the second mold. This choice An air leak test apparatus, characterized in that a through hole is formed in the mold so as to connect the work accommodating space and a front end passage portion of an air passage formed in the measurement block. 2. The air leak test apparatus according to claim 1, wherein the measurement block is provided as one of the selected molds and is drilled in the measurement block. An air leak test device, wherein the distal end of a passage portion on the distal end side of an air passage is directly connected to a work accommodation space. 3. An air leak test apparatus comprising the components (a) to (e) according to claim 1, wherein a work opening is formed at a front end opening of a front end side passage portion of an air passage formed in the measurement block. An air leak test apparatus comprising: mounting means for removably mounting a work on a measurement block so as to be connected in an airtight manner. 4. An air leak test apparatus comprising the components (a) to (e) according to claim 1, wherein said measurement block is attached to an intermediate member, and said intermediate member has an air passage formed in said measurement block. And a mounting means for detachably mounting the work to the intermediate member so that the opening of the work is airtightly connected to the distal end opening of the through hole of the intermediate member. Characteristic air leak test equipment.