JPH1057797A - Liquid material supply device and material exchanging method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To completely remove a harmful material from a material supply line by providing stop valves respectively in a discharge pipe, a material line connecting pipe and a material supply pipe and providing stop valves also in a by-pass pipe and a connecting pipe. SOLUTION: The liquid material supply device is for charging a liquid fuel enclosed a vessel main body 41 with an inert gas to a carburetor 75 through to material supply line 21 and is provided with a harm removing device 50. That is, an exhaust pipe 39 is closed by closing valves 151, 153 of the harm removing device 50 and a pressurized gas is fed to the vessel main body 41 by closing the valve 131 of the by-pass pipe 31 and the valve 135 of the connecting pipe 35. The liquid enclosed in the vessel main body 41 is charged to the carburetor 75 through the discharge pipe 23, the material line connecting pipe 25 and the material supply pipe 527, and at the time of exchanging the vessel, a material such as silicon tetrachloride remaining in the inside of the discharge pipe 23 and the material line connecting pipe 25 is surely removed by opening the valve 135 provided in the connecting pipe 35.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for stably supplying a liquid material solution used for producing an optical fiber or synthetic quartz glass to a vaporizer such as a vaporizer.

[0002]

2. Description of the Related Art Generally, a vaporizer such as a vaporizer is used as a device for supplying a high-purity glass raw material gas. A vaporizer is a gas control device that vaporizes a liquid material at an ambient temperature equal to or higher than the boiling point, controls the flow rate stably and accurately with a mass flow controller, and supplies the vaporized raw material gas to the reaction system. It is composed of

[0003] As described above, by using a liquid material as a glass raw material and vaporizing and using the same, all metal impurities contained in the liquid material are trapped in a vaporization tank without providing a special distillation device, and the distillation is performed. Will be done.
Therefore, by using a vaporizer, a high-purity glass source gas can be supplied. And usually,
A liquid material of a silicon compound such as silicon tetrachloride is used as a raw material of the optical fiber and the quartz glass. In order to supply the liquid material from the container to a vaporizer such as a vaporizer, the liquid material is pressure-fed with nitrogen gas or an inert gas.

As shown in FIG. 14, such a liquid material supply device for a vaporizer is composed of a pressurized gas line 11, a material supply line 21, and a container in which a liquid material is sealed. A pressurized gas line 11 of the liquid material supply device 10 is a gas supply for sending a pressurized gas to a container so that an inert gas from a pressurized gas supply source (not shown) is pressed into an upper portion of the container body 41. The material supply line 21 is formed by a pipe 13, a gas introduction pipe 17 fixed to the container main body 41, and a gas line connection pipe 15 having a joint 16 to the gas introduction pipe 17 at a distal end.
Is formed by a discharge pipe 23 fixed to the container body 41, a material line connection pipe 25 having a joint 26 to the discharge pipe 23 at an end, and a material supply pipe 27 connected to a vaporizer 75. It is.

The gas supply pipe 13 has a gas feed valve.
It has an open / close valve as 111, and this gas feed valve 111
Gas line connection pipe 15 connected to gas supply pipe 13 via
The bypass pipe 31 is provided with an open / close valve as a line short-circuit valve 131. The bypass pipe 31 is connected to the material line connection pipe 25, and the material line connection pipe is connected.
An opening / closing valve as a material receiving valve 123 is provided at the end of 25 and connected to the material supply pipe 27.

Further, the material supply pipe 27 is connected to the vaporizer 75 via an opening / closing valve as a supply valve 125, and the material supply pipe 27 is removed via an exhaust pipe 39 having an opening / closing valve as an exhaust valve 153. It is connected to a harm tower. The gas introduction pipe 17 of the container body 41 is provided with an opening / closing valve as the gas introduction valve 113. Also, the discharge pipe 23
Is provided with an opening / closing valve as a discharge valve 121.
When removing the container, the gas introduction valve 11
By closing 3 and the discharge valve 121, the inside of the container body 41 is sealed.

After a new container is attached, the container body
41, the gas introduction valve 113 and the discharge valve 121 are opened, the line short-circuit valve 131 of the bypass pipe 31 and the supply valve 125 of the material supply pipe 27 are closed, and the gas supply valve 111 of the gas supply pipe 13 is opened. The 39 exhaust valves 153 are opened. Therefore, when the gas feed valve 111 and the gas introduction valve 113 are opened, a pressurized gas such as nitrogen gas is pressed into the container main body 41, and the liquid material in the container main body 41 is discharged through the discharge valve 121. It is pushed out to the supply line 21.

At this time, the supply valve 125 of the material supply pipe 27
Is closed and the exhaust valve 153 of the exhaust pipe 39 is opened, so that the pressurized gas or air, etc., existing inside the material line connection pipe 25 passes through the exhaust pipe 39 to the abatement tower or the like. , Which removes harmful components and releases it to the atmosphere. Thereafter, when the exhaust valve 153 is closed and the supply valve 125 is opened, the liquid material can be sent to the vaporizer 75.

When the liquid material is pressure-fed to the vaporizer 75, usually, a gas having low reactivity with the liquid material, that is, an inert gas such as nitrogen gas (hereinafter, referred to as a pressurized gas) is passed through a regulator. A system is used in which a constant pressure is constantly applied to the container body 41 (about 1-2 kg / cm ² ), and a pressurized gas is injected into the container body 41 as much as the liquid material in the container body 41 is reduced. Have been.

When the container is replaced, the container is removed from the joints 16 and 26 of the pressurized gas line 11 and the material supply line 21. At this time, the material supply line
If the liquid material extruded from the container remains in 21,
May cause corrosion. Therefore, it is necessary to keep flowing the nitrogen gas or the inert gas into the material supply line 21 before removing the container to remove the liquid material remaining in the material supply line 21. Generally, such an operation is called purging. The gas used at that time is called a purge gas.

When removing the container,
Normally, the gas introduction valve 113 and the discharge valve 121 are closed, and the supply valve 125 that has sent the liquid material to the vaporizer 75.
Is closed, and the exhaust valve 153 and the line short-circuit valve 131 are opened to perform purging using the pressurized gas as a purge gas. Therefore, the pressurized gas is sent to the material supply pipe 27 through the bypass pipe 31, and the liquid material remaining in the material supply pipe 27 is discharged to the abatement tower or the like via the exhaust pipe 39.

The conventional purging is performed by using a pressurized gas line.
With the gas introduction valve 113 provided at the supply port to the container 11 and the discharge valve 121 provided at the supply port of the liquid material from the container closed, the nitrogen gas or the inert gas is continuously flowed into each line, causing corrosiveness. The high liquid material is removed through the exhaust pipe 39.

[0013]

However, in the above-mentioned conventional method, the liquid material remains and adheres to the discharge pipe and the material line connecting pipe, and it is impossible to completely purge the material supply line. It was taking time. In addition, it was not possible to remove the air mixed when a new container was attached.

If the purging cannot be performed completely, the following problem occurs. When a corrosive material such as silicon tetrachloride is used for the liquid material, even if the metal touching such a liquid material is a corrosion-resistant material such as SUS316L,
Corrosion is caused by an acid such as hydrochloric acid generated by the reaction of liquid material with moisture in the air. In addition, a siloxane-based compound is also generated by a reaction with moisture in the air. Such reaction products and particulate metal impurities cause clogging and mass flow errors inside the mass flow controller connected to the vaporizer. In addition, it may cause internal leakage of the valve and cause a problem.

If it takes time to replace the container, the liquid material cannot be supplied while the container is being replaced, so that a product cannot be manufactured. Furthermore, as a raw material for glass, various organosilicon compounds such as silane have a possibility of being used, but these organosilicon compounds are
Some flash units have low flash points and cannot be handled such as replacing containers unless purging is performed reliably.

In view of the above problems, the present inventors have intensively studied a liquid material supply device. As a result, it has been found that a vacuum pump is installed in the abatement apparatus, and purging is performed completely by adopting a purge in which evacuation and gas injection are repeated, and purging efficiency is improved. Further, the purge line is changed so that the purge near the connection to the discharge pipe can be surely performed.

[0017]

According to the present invention, there is provided a container in which a liquid material is sealed, a pressurized gas line for introducing a pressurized gas into the container, and a liquid material supplied to a vaporizer by pressurizing the pressurized gas. And a gas supply line, and the pressurized gas line is connected to a gas supply pipe, a gas line connection pipe, and the gas line connection pipe. A gas introduction pipe fixed to the main body of the container, wherein the material supply line comprises:
A discharge pipe fixed to the body of the container, a material line connection pipe connected to the discharge pipe and a material supply pipe connected to the vaporizer, and a bypass pipe connecting the gas supply pipe and the material supply pipe And a connection pipe for connecting the gas introduction pipe and the discharge pipe. The gas line connection pipe and the gas introduction pipe each include an open / close valve. The discharge pipe, the material line connection pipe, and the material supply pipe also include an open / close valve. And a liquid material supply device for supplying a liquid material to a vaporizer by providing an opening / closing valve also in the bypass pipe and the connection pipe.

As described above, since the liquid material supply apparatus has the connection pipe connecting the gas introduction pipe and the discharge pipe together with the bypass pipe connecting the gas supply pipe and the material supply pipe, the purge is performed. At this time, it is possible to perform purging by a purge line via a bypass pipe as in the related art, and open the on-off valve of the connecting pipe, so that the discharge pipe is connected from the gas line connecting pipe and the gas introduction pipe via the connecting pipe. In addition, a purge line passing through the material line connection pipe can be formed, and the liquid material remaining inside the discharge pipe and the material line connection pipe can be reliably purged in a short time.

The liquid material supply device of the present invention includes:
There is a case where a liquid material supply device has a harm removal device connected to the material supply line, and the harm removal device is provided with a vacuum pump. In this way, if the abatement apparatus equipped with the vacuum pump is provided, the evacuation can be performed at the time of purging, and the liquid material remaining inside the discharge pipe or the material line connection pipe is vaporized by decompression, and in a short time. Can be removed by suction.

Further, in the abatement apparatus of the liquid material supply apparatus according to the present invention, by arranging the abatement tower and the vacuum pump downstream of the liquid trap, the evacuation of the material supply line is performed via the liquid trap and the abatement tower. It is preferable to be able to do so. As described above, when the liquid trap is used in the abatement apparatus, the liquid material flowing into the abatement apparatus from the material supply line can be stored in the liquid trap.
And since the abatement tower and the vacuum pump are arranged downstream of the liquid trap, it is possible to prevent a large amount of liquid material from flowing into the abatement tower in a short time. Therefore, it is possible to safely and reliably remove the material gas from the material supply line and exhaust the gas, and easily perform a short-time purge with a vacuum pump.

In the liquid material supply device of the present invention, the container preferably has a rupture prevention mechanism. By providing the rupture prevention mechanism in this way, even if an unexpected accident occurs, the rupture of the container can be prevented, and the damage can be reduced. Further, as the rupture prevention mechanism, it is preferable that a rupturable plate for sealing the container and a safety valve are arranged in series in the blowout pipe.

As described above, if a rupturable plate and a safety valve are used in series as a rupture prevention mechanism, the rupturable plate normally keeps the container tightly sealed, and when the internal pressure of the container rises abnormally, the rupturable plate is ruptured. Then, the safety valve can be opened to prevent the container from being damaged. And after the rupture disk ruptures,
The pressure in the container is released to the outside, and when the internal pressure becomes close to the atmospheric pressure, the container is closed by the safety valve to prevent outside air from flowing into the container.

Further, the present invention has a container in which a liquid material is sealed, a bypass pipe branched from a gas supply pipe, and a gas line connection pipe provided with a joint at an end portion. A connection pipe is provided with an open / close valve, a gas introduction pipe of the container connected to the gas line connection pipe is provided with an open / close valve, and a material line connection pipe provided with a joint at an end is provided with an open / close valve, and the material line is provided. The bypass pipe is connected to a material supply pipe connecting the connection pipe, and the material supply pipe is provided with an open / close valve. The discharge pipe of the container connected to the material line connection pipe is provided with an open / close valve, and the gas introduction is further provided. It has a connecting pipe for connecting the pipe and the discharge pipe, and this connecting pipe also has an open / close valve,
Further, when exchanging a container of a liquid material supply device having an exhaust pipe connected to the material supply pipe or the material line connection pipe, a purge gas sent from the gas supply pipe is supplied to the gas line connection pipe, the gas introduction pipe, The material is replaced by removing the container after purging by flowing the gas through the connecting pipe, the discharge pipe, and the exhaust pipe through the material line connecting pipe.

As described above, when exchanging the container of the liquid material supply apparatus having the connecting pipe connecting the gas introduction pipe and the discharge pipe provided in the container, the purge gas is sent to the connecting pipe, the discharge pipe, and the material line connecting pipe. Because of the method, the inside of the discharge pipe and the material line connection pipe can be reliably purged,
The container can be safely removed and replaced.

Further, the method according to the present invention has a container filled with a liquid material, and has a bypass pipe branched from a gas supply pipe and a gas line connection pipe provided with a joint at an end. A gas line connecting pipe with an open / close valve, a gas inlet pipe of the container connected to the gas line connecting pipe with an open / close valve, and a material line connecting pipe provided with a joint at an end with an open / close valve. The bypass pipe is connected to a material supply pipe connecting the material line connection pipe, and the material supply pipe is also provided with an open / close valve, and the discharge pipe of the container connected to the material line connection pipe is provided with an open / close valve. A connecting pipe for connecting the gas introduction pipe and the discharge pipe is provided, and the connecting pipe is also provided with an opening / closing valve. Upon exchanging the container of the liquid material supply device connected to the material line connection pipe, after closing the valve of the material supply pipe, open the valve of the connection pipe to make the gas introduction pipe and the discharge pipe communicate with each other, The inside of the gas line connection pipe and the gas introduction pipe connected by the connection of the gas line and the inside of the material line connection pipe and the discharge pipe connected by the connection of the material line are pressurized by a purge gas. After the state and the pressure reduction state by the vacuum pump of the abatement apparatus are repeated, a material exchange method of removing a container from the gas line joint and the material line joint may be adopted.

When the purging gas is injected into the discharge pipe or the material line connection pipe and the pressure inside the discharge pipe or the material line connection pipe is reduced by the vacuum pump as described above,
The liquid material remaining inside the discharge pipe and the material line connection pipe can be reliably removed in a short time. Then, as a method according to the present invention, upon replacing the container, after closing the valve of the material supply pipe, once open the valve of the bypass pipe to remove the liquid material inside the material line connection pipe and the discharge pipe. After returning to the container, the valves of the bypass pipe and the gas line connection pipe, the gas introduction pipe, and the discharge pipe are closed, and further, the gas introduction pipe and the gas are opened by opening the valve of the connection pipe. It is preferable to use a material exchange method in which the inside of the discharge pipe is in communication with the inside of the discharge pipe, and the inside of the pipe is depressurized and pressurized.

As described above, when the valve of the bypass pipe is opened, the pressurized gas can be sent to the material line connection pipe, and the liquid material remaining inside the material line connection pipe and the discharge pipe can be returned to the container. Therefore, the amount of the liquid material remaining inside the material line connection pipe or the discharge pipe can be reduced, and the removal of the liquid material by decompression and pressurization can be performed more reliably in a shorter time.

Also, the method according to the present invention has a container filled with a liquid material, and has a bypass pipe branched from a gas supply pipe and a gas line connection pipe provided with a joint at an end. And equipped with an open / close valve in the gas line connection pipe, provided with an open / close valve in the gas introduction pipe of the container connected to the gas line connection pipe, and provided with an open / close valve in the material line connection pipe with a joint at the end, The material supply pipe connecting the material line connection pipe is connected to the bypass pipe, and the material supply pipe is provided with an open / close valve, and the discharge pipe of the container connected to the material line connection pipe is provided with an open / close valve. A connection pipe for connecting the gas introduction pipe and the discharge pipe; an opening / closing valve provided for the connection pipe; and a connection pipe connected to the material supply pipe or the material line connection pipe. At the time of replacing the container of the liquid material supply device equipped with a vacuum pump in the device, after closing each valve of the gas introduction pipe and the discharge pipe fixed to the main body of the container, the vacuum pump of the abatement apparatus, The outlet of the discharge pipe fixed to the main body of the container is depressurized, the container is removed, the container is replaced, and the outlet of the discharge pipe of the new container is depressurized. In some cases, a material exchange method of opening a pipe opening / closing valve may be used.

As described above, the method is such that when exchanging the container of the liquid material supply apparatus having the vacuum pump in the abatement apparatus connected to the material supply pipe or the material line connection pipe, the opening of the discharge pipe is set in a reduced pressure state. Therefore, the inside of the discharge pipe and the material line connection pipe can be decompressed to evaporate and suck the liquid material in the pipe, and the inside of the discharge pipe and the material line connection pipe can be securely purged to safely remove and remove the container. Exchange can take place.

Further, even after the replacement, the outlet of the discharge pipe is kept in a reduced pressure state, and the open / close valve of the discharge pipe is opened as it is, so that the outside air flowing into the discharge pipe or the material line connection pipe at the time of container replacement is removed. As a new material of the container can be supplied.

[0031]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a liquid material supply apparatus according to the present invention, as shown in FIG. 1, sends an inert gas such as nitrogen gas into a container body 41 through a pressurized gas line 11, The liquid material sealed in the container body 41 is fed into the vaporizer 75 via the material supply line 21 and has a detoxification device 50 equipped with a vacuum pump 55.

The pressurized gas line 11 is supplied with a pressurized gas at a constant pressure via a regulator (not shown) or the like to the gas supply pipe 13, and is fixed to the gas line connection pipe 15 and the container body 41. The inert gas is sent to the upper space of the container body 41 through the gas introduction pipe 17 which is provided. or,
The liquid material in the container body 41 is sent from the discharge pipe 23 fixed to the container body 41 to the vaporizer 75 via the material line connection pipe 25 and the material supply pipe 27.

Further, the gas line connection pipe 15 and the gas introduction pipe 17
The gas line connection pipe 15 has an open / close valve as a gas feed valve 111 at the other end.
11 connects to the gas supply pipe 13. Further, the discharge pipe 23 and the material line connection pipe 25 are detachably connected by a joint as a material line connection 26, and the material line connection pipe 25 has an open / close valve as a material receiving valve 123 at the other end. The material receiving valve 123 is connected to the material supply pipe 27.

The gas supply pipe 13 is provided with a pressure switch 61 and a mass flow meter 63, and the gas line connection pipe 15 is provided with a pressure gauge 65. And material line fitting
The material supply line 21 is formed by the discharge pipe 23, the material line connection pipe 25, and the material supply pipe 27 connected by 26. In this liquid material supply device 10, a line short-circuit valve 131 is provided in the middle of a bypass pipe 31 connecting the gas supply pipe 13 and the material supply pipe 27, the material supply pipe 27 is provided with a supply valve 125 in the middle, As in the conventional case, the 41 gas introduction pipe 17 also includes a gas introduction valve 113 in the middle, and the discharge pipe 23 also includes a discharge valve 121 in the middle.

In the liquid material supply apparatus 10, a connection pipe 35 for connecting the gas introduction pipe 17 and the discharge pipe 23 is provided, and an opening / closing valve as a pipe connection valve 135 is provided in the connection pipe 35. . The connecting pipe 35 is closer to the gas line joint 16 than the gas introducing valve 113 in the gas introducing pipe 17,
It connects the discharge pipe 23 to the material line joint 26 side of the discharge valve 121.

Even when the pressurized gas is not sent to the gas line connection pipe 15 by branching the bypass pipe 31 from the gas supply pipe 13, the pressurized gas is sent to the material supply pipe 27 via the bypass pipe 31. I can do it. Furthermore, abatement equipment
50 is the material receiving valve 123 of the material supply pipe 27 and the supply valve 1
It is connected to the air conditioner 25 through an exhaust pipe 39. The abatement apparatus 50 has a liquid trap 51 and an abatement tower 53, and not only connects the exhaust pipe 39 directly to the vacuum pump 55 by the exhaust valve 153, but also removes the liquid through the removal valve 151 and the filter connection valve. It is connected to a vacuum pump 55 via a trap 51 and an abatement tower 53.

Therefore, in the liquid material supply apparatus 10, the exhaust pipe 39 is closed by closing the exhaust valve 153 and the removal valve 151 of the abatement apparatus 50, and the line short-circuit valve 131 and the connecting pipe 35 of the bypass pipe 31 are closed. When the pipe connection valve 135 is closed, as shown in FIG. 2, the pressurized gas is supplied to the container body 41 through the gas supply pipe 13, the gas line connection pipe 15, and the pressurized gas line 11 of the gas introduction pipe 17. Can be sent within. Then, the liquid sealed in the container body 41 is supplied to the material supply line 21 of the discharge pipe 23, the material line connection pipe 25, and the material supply pipe 27.
Can be sent to the vaporizer 75 via the

In replacing the container, the liquid material supply device 10 is provided with a connecting pipe 35 for connecting the gas introducing pipe 17 and the discharge pipe 23, and a connecting valve 135 is provided on the connecting pipe 35. Therefore, by opening the pipe connection valve 135 provided in the connection pipe 35, the material such as silicon tetrachloride remaining in the discharge pipe 23 and the material line connection pipe 25 can be reliably removed.

That is, in the liquid material supply device 10, when the amount of the liquid material in the container main body 41 decreases and it becomes necessary to replace the container in which the liquid material is sealed, first, the supply valve 12 is used.
After closing 5 and closing the gas introduction valve 113 and the discharge valve 121, the removal valve 151 is opened. As described above, by opening the removal valve 151, a purge line of the exhaust pipe 39 connecting the material supply pipe 27 and the abatement apparatus 50 is formed.
Then, by opening the pipe connection valve 135, the gas introduction pipe 17 and the discharge pipe 23 can communicate with each other to perform purging.

As described above, instead of the line short-circuit valve 131 provided in the bypass pipe 31, the pipe connection valve 1 provided in the connecting pipe 35 is used.
By opening 35, the purge gas flows from the gas supply pipe 13 through the gas line connection pipe 15, passes through the gas line joint 16, passes through the gas introduction pipe 17 and the connection pipe 35 on the container body 41 side, and flows into the discharge pipe 23. I do. Then, the purge gas passes through the material line connection pipe 25 and the material supply pipe 27 from the discharge pipe 23 over the material line joint 26, and is sent from the exhaust pipe 39 to the abatement apparatus 50. Accordingly, the purge gas flows through the inside of the discharge pipe 23 and the material line connection pipe 25 located before and after the material line joint 26, and quickly and reliably removes the liquid material remaining inside the discharge pipe 23 and the material line connection pipe 25. Can be removed.

Further, in this liquid material supply device 10, since the abatement device 50 is provided with the vacuum pump 55, the gas introduction valve is provided.
With the 113 and discharge valve 121 closed,
By closing the line shorting valve 131 with the line 111, the inside of the material line connection pipe 25 and the inside of the discharge pipe 23 connected to the material line connection pipe 25 by the material line connection 26 can be reduced.

As described above, the discharge pipe 23 and the material line connection pipe
In addition to sending the purge gas to the discharge pipe 23 and the material supply pipe 27, the discharge pipe 23 and the material line connection pipe 25 and the material supply pipe 27 are evacuated so that the discharge pipe 23 and the material line connection pipe 25 and the material supply The liquid fuel remaining in the pipe 27 is removed by evaporating and drying under reduced pressure, and the fuel line joint and the like can be removed quickly and reliably in a purged state. Therefore, safe container replacement work can be performed.

The abatement apparatus 50 comprises a liquid trap 51, an abatement tower 53 provided downstream thereof, and a vacuum pump further downstream thereof.
55 is installed. Therefore, this abatement device 50
Then, the liquid material in the material supply line 21 is volatilized and suctioned by being evacuated, and flows into the liquid trap 51. Thereafter, the gas of the liquid material volatilized by the liquid trap 51 is removed by the removal tower 53, and is discharged into the air via the vacuum pump 55, or further externally attached to the removal apparatus 50.
Will be exhausted.

An absorbent for absorbing the liquid material is contained in the abatement tower 53. Then, it absorbs the inflowing liquid material and material gas, and passes harmless nitrogen gas and the like. However, if a large amount of liquid material directly flows, it may not be completely absorbed and may flow into the vacuum pump 55. Also, when a large amount of liquid material flows into the abatement tower 53, the absorbent causes a chemical reaction, generating heat,
There is a risk of fire. For this reason, the liquid trap 51 is provided upstream of the abatement tower 53 to prevent the liquid material from directly flowing into the abatement tower 53.

As described above, the liquid trap 51 serves to prevent the liquid material gas from flowing into the abatement tower 53, protect the abatement tower 53, and increase the abatement efficiency. Further, the detoxification tower 53 not only performs detoxification of the liquid material gas but also plays a role of preventing reverse diffusion of oil from the oil rotary vacuum pump 55. By using the abatement apparatus 50 having such a vacuum pump 55, it is possible to completely purge the material supply line 21 that could not be conventionally purged in a short time.

Then, in this liquid material supply device 10,
When the container body 41 is replaced, not only the case where the purge gas is kept flowing or the case where the reduced pressure suction is maintained, but also the valves provided in the pressurized gas line 11 and the material supply line 21 are operated, as shown in FIG. As shown in the figure, purging of the discharge pipe 23, the material line connection pipe 25, and the material supply pipe 27 can be performed even more reliably by performing the respective processes of material return, evacuation, and gas injection. In this case, when the empty container body 41 is removed, while preventing the liquid material from leaking from the end of the discharge pipe 23 and the material line joint 26,
As a result, harmful volatile components can be prevented from being dispersed.

That is, as a procedure for such container replacement, the supply valve 125 is closed to shut off the supply of the material to the vaporizer 75 from the state shown in FIG. 2, and as shown in FIG. By closing 111, the supply of the pressurized gas to the container body 41 through the gas introduction pipe 17 is stopped. In addition, bypass pipe
By opening the line short-circuit valve 131 of 31, the pressurized gas is directly sent to the material supply pipe 27 and the material line connection pipe 25, and the material remaining in the material line connection pipe 25 and the discharge pipe 23 is discharged into the container body 41. Return to

At this time, as shown in the table of FIG.
It is preferable that the gas introduction valve 113 and the pipe connection valve 135 be closed. Then, the vacuum pump 55 of the abatement apparatus 50 is operated, and the discharge valve 121 of the discharge pipe 23 and the line short-circuit valve 131 of the bypass pipe 31 are closed while the gas introduction valve 113 and the pipe connection valve 135 are closed. Open 151. In this way, at least the discharge pipe 23 and the material line connection pipe 25
Then, the pressure inside the material supply pipe 27 is reduced. Also, as shown in FIG. 5, by opening the pipe connection valve 135, the inside of the gas line connection pipe 15 is evacuated together with the inside of the material line connection pipe 25 and the material supply pipe 27, and the vacuum is drawn.

After the evacuation is performed in this manner, as shown in FIG. 6, the removal valve 151 is closed and the gas feed valve 111 is closed.
Open the discharge pipe 23, the material line connection pipe 25, and the material supply pipe.
Gas press-fitting is performed to pressurize the interior of 27, and thereafter, gas removal and evacuation are repeated by opening and closing the removal valve 151 and the gas feed valve 111. At this time, as shown in FIG. 11, it is sufficient that the valves other than the gas feed valve 111 and the removal valve 151 are kept in a fixed open state or a closed state.

As described above, the purging is performed by repeatedly performing evacuation and gas injection. If a high vacuum can be obtained by evacuation, the liquid material can be completely volatilized and sucked. However, since the degree of vacuum obtained by the vacuum pump 55 is about 0.01 to 0.1 atm, the operation is performed a plurality of times. As described above, after gas injection and evacuation are repeated a required number of times, the line short-circuit valve 131 is opened from the gas injection state, and the container main body 41 is removed from the gas line joint 16 and the material line joint 26 to thereby remove the container main body 41. In this case, the container is replaced.

The switching between gas injection and evacuation is as follows.
It may be performed not only by the switching operation between the gas feed valve 111 and the removal valve 151, but also by the switching operation between the pipe connection valve 135 and the removal valve 151. Thereafter, the line short-circuit valve of the bypass pipe 31 is changed from a state where the inside of the gas introduction pipe 17 and the discharge pipe 23 is pressurized by the purge gas.
When the container 131 is opened and the container body 41 is removed, the pressurized gas from the gas supply pipe 13 is supplied to the gas line connection pipe 15 as shown in FIG.
And pressurized gas is discharged from the bypass pipe 31
Can also be discharged from the end of the material line connection pipe 25 via the

As described above, if the container is removed by releasing the pressurized gas from the end of the gas line connection pipe 15 and the end of the material line connection pipe 25, the gas line connection pipe 15 from which the container body 41 has been removed, External air can be prevented from flowing into the material line connection pipe 25. After installing the new container body 41, the line short-circuit valve 131 and the gas feed valve 1
11 is closed, the removal valve 151 is opened, and the valve is opened and closed as shown in FIG. Then the removal valve
Opening and closing operations of the gas supply valve 111 and the gas feed valve 111 are performed to repeat the gas injection and the evacuation.

As described above, purging is performed even after the container body 41 is attached, so that moisture and atmospheric components adhering to the gas introduction pipe 17 and the discharge pipe 23 are reliably removed from the pressurized gas line 11 and the material supply line 21. can do. Then, by closing the pipe connection valve 135 and the removal valve 151 from the state of evacuation and opening the discharge valve 121, the liquid material in the container body 41 is placed inside the material line connection pipe 25 and the material supply pipe 27 in a reduced pressure state. Let it suck.

Then, the gas in the container body 41 is sent to the vaporizer 75 by opening the gas feed valve 111 and the gas introduction valve 113 to send the pressurized gas into the container body 41 and opening the supply valve 125. it can. Further, as described above, in the liquid material supply device 10 in which the connecting pipe 35 that connects the gas introduction pipe 17 and the discharge pipe 23 of the container body 41 is provided, the gas feed valve 111 and the pipe connection valve 135 are opened, and the exhaust pipe 39 is opened. It is also possible to perform a purge in which the purge gas is continuously flown to the abatement tower 53 or the like.

Also in this case, since the purge gas flows through the material line joint 26 when the container main body 41 is removed, even if the evacuation is not performed, the inside of the discharge pipe 23 or the material line connection pipe 25 is required. Liquid material remaining in the exhaust pipe 39 can be sent out in a short time. In the above embodiment, although the exhaust pipe 39 connecting the material supply line 21 and the abatement apparatus 50 is branched from the material supply pipe 27, as shown in FIG. Incoming valve 123
The exhaust pipe 39 may be branched from the joint side. Also in this case, the purge shown in FIG. 3 can be performed by performing the evacuation and the gas pressure injection to perform the reliable purge.

Further, as shown in FIG.
By opening 1 and the pipe connection valve 135, it is also possible to perform a continuous gas purge in which the purge gas is sent from the exhaust pipe 39 to the abatement tower 53 or the like. Also in this case, since the purge gas flows through the material line joint 26 when the container body 41 is removed, the liquid material remaining inside the discharge pipe 23 and the material line connection pipe 25 is sent out to the exhaust pipe 39 in a short time. be able to.

Further, the exhaust pipe 39 is not branched from the material supply pipe 27, and as shown in FIG. 8 and FIG.
In the case of branching from 25, as shown in FIG. 9, a purge 1 for flowing a purge gas through the connecting pipe 35 and the discharge pipe 23 is performed.
In addition, as shown in FIG. 10, the line short-circuit valve 131 of the bypass pipe 31 and the material receiving valve 123 of the material line connection pipe 25 are opened, and the purge 2 through which the purge gas flows through the bypass pipe 31 is used in combination. There is. Also in this case, the liquid material remaining inside the material line connection pipe 25 can be reliably removed in a short time without using vacuuming.

It is dangerous that liquid materials harmful to the human body such as silicon tetrachloride are released into the atmosphere.
However, if the internal pressure of the container exceeds the pressure resistance of the container body 41 due to any cause such as an accident or a fire, the container may explode. Prevent this secondary disaster,
Alternatively, the container body 41 is provided with a rupture prevention mechanism for avoidance.

This is due to the fact that it becomes impossible to electrically control the system due to an accident or fire, or if the supply of pressurized gas to the pressurized gas line 11 or the like occurs abnormally and the container body 41 is abnormally pressurized. In consideration of this, the rupturable plate 47 ruptures before the pressure in the container main body 41 exceeds the pressure resistance of the container main body 41 to prevent the container main body 41 from rupture. Therefore, a rupturable plate 47 having a lower pressure resistance than the container main body 41, a safety valve, and the like are provided above the container main body 41.

However, even if the temporary danger can be avoided, if the liquid material is continuously released into the air, another secondary disaster may occur. In addition, if the rupture prevention mechanism is configured to operate only with the pressure of a safety valve or the like, there is a concern that a container that should be kept in a sealed state during normal operation of the apparatus. That is, the inside of the container body 41 is contaminated with air,
There is a risk of contaminating peripheral equipment such as lines.

Accordingly, as shown in FIG. 13, the container body 41 in the liquid material supply device 10 is provided with a blowing pipe 45,
Burst stainless steel plate to seal the container body 41
47 is fixed by a seal, and a sharp cutter 48 is arranged outside the rupturable plate 47. By disposing the metal rupturable plate 47 and the cutter 48 in this way, when the pressure inside the container body 41 becomes abnormally high, the rupture plate 47
Bulges out and comes into contact with the cutter 48 to rupture, so that the gas inside can be discharged from the opening 46 of the blowing pipe 45.

Further, a valve element 49 as a safety valve is further provided outside the rupturable plate 47. When the rupturable plate 47 is broken and the inside of the valve element 49 becomes high pressure, the valve element 49 is lifted up and the inside thereof is lifted. Pressure can be released. Then, when the internal pressure returns to normal, the valve body 49 returns by its own weight or by the force of an appropriate elastic body to close the valve, and the gas containing the harmful component in the container body 41 is blown out. Leakage from the tube 45 can be prevented.

As described above, the rupture prevention mechanism has a double structure, and when the pressure in the container body 41 rises abnormally (for example, 8 kg / cm ² or more), first, the SUS thin plate (rupture plate 47) is deformed. Then, the thin plate made of SUS is cut by the cutter 48. As a result, the internal pressure of the container body 41 escapes between the thin plate of SUS and the valve element 49 as a safety valve installed above the thin plate. Here, when the internal pressure of the container main body 41 further rises and approaches the pressure resistance of the container main body 41 (for example, 9.9 kg / cm ² ), the safety valve operates to release the internal pressure of the container main body 41 to the air. Then, when the internal pressure of the container body 41 is significantly lower than the pressure resistance (for example, 2 kg / cm ² or less), the safety valve automatically closes and stops releasing the pressure into the air.

With the rupture prevention mechanism having such a structure, even if a malfunction such as a malfunction of the safety valve or a failure in opening and closing occurs, the rupture plate 47 directly touches the atmosphere in the container body 41.
As long as is not broken, there is no release of liquid material into the air,
Further, contamination of the container body 41 and the like can be prevented. Comparative Example FIG. 14 shows an example of a conventional liquid material supply device 10. In this apparatus, purging was performed, the container was removed, and the purge state was verified.

The container of silicon tetrachloride is connected to the pressurized gas line 11 and the material supply line 21 as shown in FIG. 14, and the valves 113 and 121 are connected to the gas introduction pipe 17 and the discharge pipe 23 fixed to the container body 41, respectively. Is installed. A plurality of valves are installed around the periphery as shown in the figure. Purging was performed by using nitrogen gas as a purge gas, closing the valves 113 and 121 of the gas introduction pipe 17 and the discharge pipe 23 fixed to the container, and continuously flowing nitrogen gas through the bypass pipe 31 for one hour. In order to verify the purge state, the apparatus was left for one hour after the completion of the purge. After that, when the container was removed with the joints 16 and 26, the liquid material came out from the joint 26.

Therefore, in the conventional liquid material supply device 10, the liquid material remains in the material supply line 21 even if the nitrogen gas is kept flowing. Then, it was found that unless the liquid material remaining in the material supply line 21 was heated and vaporized, it could hardly be removed and could not be purged. Example 1 Purging was performed in the liquid material supply apparatus 10 having the structure shown in FIG. 1, the container was removed, and the purge state was verified.

The purge line is a line branched from the pressurized gas line 11 at the tip of the gas feed valve 111 and upstream of the supply valve 125 of the material supply line 21. As shown in the drawing, a connecting pipe 35 is provided for increasing the purging efficiency and purging so that no liquid material remains in the line, and an opening / closing valve is provided in the connecting pipe 35 to improve the purge line. Can be formed.

Further, the abatement apparatus 50 is provided with a vacuum pump 55 in order to increase the purging efficiency and to completely purge the parts which could not be purged conventionally. When the liquid material directly flows into the vacuum pump 55, the vacuum pump 55 deteriorates and becomes unusable. Therefore, an abatement tower 53 is provided upstream of the vacuum pump 55. In addition, when a large amount of liquid material flows into the abatement tower 53, it is heated by a rapid reaction, and the abatement ability is lost. Therefore, a trap 51 for the liquid material is provided upstream of the abatement tower 53.

Further, if the container is heated due to a fire or the like, or if an abnormality occurs in the pressurized gas line 11 and the pressure inside the container body 41 rises abnormally, there is a risk that the container may burst. Therefore,
The container was provided with a rupture plate 47 as a rupture prevention mechanism. Rupture disc 47
Uses SUS316, and a cutter
48 were installed. If the pressure in the container rises for some reason, the rupturable plate 47 is deformed, cut by the cutter 48, and the pressure in the container body 41 is released to the atmosphere. And a safety valve is installed on the upper part of this rupture disc 47,
When the rupturable plate 47 ruptures and pressure in the container body 41 is applied to the safety valve, the safety valve opens and releases the pressure in the container body 41 to the atmosphere. Further, when the pressure in the container body 41 becomes about 2 kg / cm ² or less, the safety valve is closed to prevent the liquid material in the container body 41 from being released to the atmosphere.

The opening and closing of the valve during the purge operation is shown in the table of FIG. As the purge gas, a pressurized gas was used.
Note that if the liquid material remaining in the material supply line 21 flows directly into the abatement apparatus 50 via the purge line, the deterioration of the abatement apparatus 50 will be accelerated. 21 The liquid material inside was returned into the container (material return).

This material return is performed by measuring the pressure in the container with a pressure gauge 65.
For about 10 seconds while monitoring with. Purging using the vacuum pump 55 removes the liquid material in the purge line by the vacuum pump 55.
After volatilization and suction for 1 minute, the operation of replacing the purge line with 5 kg / cm ² of the pressurized gas (hereinafter, evacuation-gas injection) was repeated 100 times.

Thereafter, when the container was removed from the joints 16 and 26, no liquid material was found in the material supply line 21. Then, the acidity was checked using PH test paper, but no discoloration was observed. As a result, it was confirmed that the purging could be performed completely. In addition, abatement equipment 50
In order to check the contamination of the vacuum pump 55 with the liquid material, the acidity of the oil was confirmed with a pH test paper, but no discoloration was observed.

Further, when the number of repetitions of evacuation and gas injection was gradually reduced, it was found that ten evacuation and gas injections were sufficient to completely purge the purge line. In view of safety, it was found that complete purging can be performed in less than half of the time required for conventional insufficient purging even if vacuuming and gas injection are performed 20 times.

The valve control for repeating the evacuation and gas injection was performed by automatically switching the opening and closing of the valve by a control device having a built-in computer. Example 2 Purging was performed in the liquid material supply device 10 of FIG. 8, the container was removed, and the purge state was verified.

The purge line is a line branched from the tip of the gas feed valve 111 in the pressurized gas line 11 and upstream of the supply valve 125 of the material supply line 21. Branches from near. As shown in FIG. 9, a connecting pipe 35 is provided in the same manner as in the first embodiment so that the purging efficiency is increased and the liquid material does not remain in the line as compared with the conventional apparatus.

In this embodiment, the gas was flowed through two paths. One is a purge 1 which is a purge line via the connecting pipe 35. The other is purge 2 of the purge line via the bypass pipe 31. The liquid material remaining in the material supply line 21 was pushed out by these two paths so as to be pushed out, and purging was performed. Further, if the container is heated by a fire or the like, or if an abnormality occurs in the pressurized gas line 11 and the pressure in the container body 41 rises abnormally, there is a danger that the container may burst. Provided. Rupture plate 47 is SUS31
Using No. 6, a cutter 48 was installed above the rupturable plate 47. When the pressure in the container body 41 rises for some reason, the rupturable plate 47 is deformed, cut by the cutter 48, and the pressure in the container body 41 is released to the atmosphere.

The opening and closing of the valve in each operation will now be described with reference to FIG.
Table 2 shows. This purging was performed by using nitrogen gas as a purge gas and continuously flowing nitrogen gas for one hour while switching between opening and closing of the line short-circuit valve 131 and the pipe connection valve 135. In order to verify the purge state, the apparatus was left for one hour after the completion of the purge. Thereafter, when the container was removed from the joint, no residual liquid material was observed in the line. But,
When the pH test paper was brought close to the joint, red discoloration was observed.

As described above, the purging could be performed to such an extent that the liquid material was not visually observed.

[0079]

According to the first aspect of the present invention, there is provided a container having a liquid material sealed therein, a pressurized gas line, and a material supply line for supplying the liquid material to the vaporizer, and each line has a valve. A pressurized gas line is constituted by a gas supply pipe, a gas line connection pipe and a gas introduction pipe fixed to the main body of the container, and a discharge pipe in which the material supply line is fixed to the main body of the container. And a material supply pipe connected to the material line connection pipe and the vaporizer, a connection pipe connecting the gas supply pipe and the material supply pipe, and a connection pipe connecting the gas introduction pipe and the discharge pipe, The gas line connection pipe and the gas introduction pipe are each provided with an open / close valve, the discharge pipe, the material line connection pipe, and the material supply pipe are also provided with an open / close valve, respectively, and the bypass pipe and the connection pipe are also provided with an open / close valve. It is a device.

Therefore, the on-off valves of the bypass pipe and the connecting pipe are closed, and the pressurized gas is sent from the pressurized gas line to the container.
The liquid material in the container can be sent to a vaporizer via a material supply line. When the container is replaced, the open / close valve of the connection pipe is opened, and a purge line including the discharge pipe and the material line connection pipe can be formed. For this reason, the liquid material remaining inside the discharge pipe and the material line connection pipe can be reliably purged in a short time, and the stable container exchange can be performed in a short time, and the stable operation of the vaporizer can be performed. . That is, quartz glass excellent in high homogeneity can be manufactured.

According to a second aspect of the present invention, there is provided a liquid material supply device having a harm removal device connected to a material supply line, and a vacuum pump provided in the harm removal device. Therefore, the pressure in the purge line such as the discharge pipe or the material line connection pipe can be reduced, and the liquid material can be vaporized and suctioned to perform a reliable purge in a short time. According to a third aspect of the present invention, as the abatement apparatus, the abatement tower and the vacuum pump are disposed downstream of the liquid trap, so that the evacuation from the material supply line is performed through the liquid trap and the abatement tower. It is a material supply device.

Therefore, the liquid material flowing from the material supply line such as the material line connection pipe into the abatement apparatus can be stored in the liquid trap so that a large amount of the liquid material does not flow into the abatement tower. It is possible to maintain the long life as a detoxification device by minimizing deterioration such as. The invention described in claim 4 is a liquid material supply device provided with a rupture prevention mechanism in a container.

Therefore, even if an abnormality occurs, the rupture of the container can be prevented, the damage to the liquid material supply device and the periphery of the container can be reduced, and the safety can be improved. According to a fifth aspect of the present invention, as a rupture prevention mechanism, a rupturable plate for sealing a container and a safety valve are arranged in series in a blow-off pipe and provided in a container body. Therefore, when the pressure inside the container becomes abnormally high, the rupturable plate ruptures to prevent the container from being damaged, but in a normal state, the container can be reliably sealed. Also, even after the rupture disk ruptures, if the pressure inside the container drops, the safety valve closes, preventing outside air from flowing into the container until restoration, or allowing the vaporized material gas to flow out. And prevent the expansion of secondary disasters.

According to a sixth aspect of the present invention, there is provided a container having a liquid material sealed therein, a bypass pipe and a gas line connection pipe, the bypass pipe and the gas line connection pipe provided with an opening / closing valve, and a gas line. The gas introduction pipe of the container connected to the connection pipe is provided with an open / close valve, and the material line connection pipe is provided with an open / close valve, and the material supply pipe including the material line connection pipe and the bypass pipe is provided with an open / close valve,
A discharge pipe of a container connected to the material line connection pipe is provided with an open / close valve, and a connection pipe connecting the gas introduction pipe and the discharge pipe is also provided with an open / close valve, and the material supply pipe or the material line connection pipe is provided. When exchanging the container of the liquid material supply device having an exhaust pipe connected to the purge gas sent from the gas supply pipe, a gas line connection pipe, a gas introduction pipe, a connection pipe,
The material is replaced by removing the container after purging by flowing the gas through the discharge pipe and the exhaust pipe through the material line connection pipe.

Therefore, since the purge gas flows into the discharge pipe or the material line connection pipe where the liquid material remains, the inside of the discharge pipe or the material line connection pipe is surely purged in a short time, and the discharge pipe and the material line connection pipe are connected. This is a material exchanging method in which a container can be safely exchanged without disconnecting a liquid material or a material gas when the material line connecting pipe is disconnected. The invention according to claim 7 has a container in which a liquid material is sealed, a bypass pipe and a gas line connection pipe, and the bypass pipe and the gas line connection pipe are provided with an opening / closing valve. An on-off valve is provided on the gas introduction pipe of the connected vessel, and an on-off valve is provided on the material line connection pipe, and an on-off valve is also provided on the material supply pipe combining the material line connection pipe and the bypass pipe. Equipped with an open / close valve on the discharge pipe of the container connected to the connection pipe,
A liquid material supply device further comprising an opening / closing valve in a connection pipe connecting the gas introduction pipe and the discharge pipe, and connecting a detoxification apparatus equipped with a vacuum pump to the material supply pipe or the material line connection pipe by an exhaust pipe. When replacing the container, after closing the valve of the material supply pipe, the valve of the connection pipe is opened to make the gas introduction pipe and the discharge pipe communicate with each other, and the inside of the gas line connection pipe and the gas introduction pipe, and the material line connection pipe And a method of exchanging material by repeatedly removing the container from the gas line joint and the material line joint after repeatedly setting the inside of the discharge pipe to the pressurized state by the purge gas and the depressurized state by the vacuum pump.

Therefore, the liquid material remaining inside the discharge pipe or the material line connection pipe can be evaporated by the pressurized state and the depressurized state, and the liquid material can be sucked and discharged to the abatement apparatus. And a safe and quick container exchange method. According to the invention described in claim 8, after replacing the container, after closing the valve of the material supply pipe, once opening the valve of the bypass pipe and returning the liquid material inside the material line connection pipe and the discharge pipe to the container. ,
By closing each valve of the bypass pipe, the gas line connection pipe, the gas introduction pipe, and the material line connection pipe and the discharge pipe, and further opening the connection pipe valve, the gas introduction pipe and the discharge pipe are brought into communication with each other to discharge the discharge pipe. Is a material exchange method for reducing and increasing the pressure in the inside of the container.

Accordingly, the liquid material remaining inside the discharge pipe, the material line connection pipe, etc. is returned to the container to reduce the residual amount, and the purging can be performed in a shorter time so that the container can be replaced safely and quickly. Is the way. The invention according to claim 9 has a container having a liquid material sealed therein, a bypass pipe and a gas line connection pipe, and the bypass pipe and the gas line connection pipe are provided with an opening / closing valve. An on-off valve is provided on the gas introduction pipe of the container to be connected, and an on-off valve is provided on the material line connection pipe, and an on-off valve is provided on the material supply pipe combining the material line connection pipe and the bypass pipe. A discharge pipe of a container connected to the pipe is provided with an open / close valve, and a connection pipe connecting the gas introduction pipe and the discharge pipe is also provided with an open / close valve, and is connected to the material supply pipe or the material line connection pipe. When replacing the container of the liquid material supply device equipped with a vacuum pump in the abatement system, the valves of the gas introduction pipe and the discharge pipe fixed to the main body of the container are closed, and then the vacuum pump of the abatement system is used. After the outlet of the discharge pipe is depressurized, the container is removed, and after the container is replaced, the outlet of the discharge pipe of the new container is depressurized, and the open / close valve of the discharge pipe of this container is opened. Method.

Accordingly, the liquid material remaining on the mouth of the discharge pipe is evaporated under reduced pressure to be suction-removed by the abatement apparatus, and the inside of the discharge pipe and the material line connection pipe is reliably purged in a short time. When the pipe is disconnected from the material line connection pipe,
This is a material replacement method in which a container can be safely replaced without a liquid material or a material gas flowing out. Further, since the mouth of the discharge pipe is kept in a reduced pressure state even after the replacement of the container, it is possible to supply a liquid material from a new container while excluding outside air in the pipe.

[Brief description of the drawings]

FIG. 1 is a conceptual diagram showing an example of a liquid material supply device according to the present invention.

FIG. 2 is a conceptual diagram showing a flow of a fluid in a use state of the liquid material supply device according to the present invention.

FIG. 3 is a diagram showing an example of a procedure for exchanging containers in the liquid material supply device according to the present invention.

FIG. 4 is a conceptual diagram showing a flow of a fluid in a use state of the liquid material supply device according to the present invention.

FIG. 5 is a conceptual diagram showing a flow of a fluid in a use state of the liquid material supply device according to the present invention.

FIG. 6 is a conceptual diagram showing a flow of a fluid in a use state of the liquid material supply device according to the present invention.

FIG. 7 is a conceptual diagram showing a flow of a fluid in a use state of the liquid material supply device according to the present invention.

FIG. 8 is a conceptual diagram showing a flow of a fluid in a use state of the liquid material supply device according to the present invention.

FIG. 9 is a conceptual diagram showing a flow of a fluid in a use state of the liquid material supply device according to the present invention.

FIG. 10 is a conceptual diagram showing a flow of a fluid in a use state of the liquid material supply device according to the present invention.

FIG. 11 is a diagram showing a valve state at the time of container replacement in the liquid material supply device according to the present invention.

FIG. 12 is a view showing a valve state at the time of container replacement in the liquid material supply device according to the present invention.

FIG. 13 is a view showing an example of a rupture prevention mechanism for a container used in the liquid material supply device according to the present invention.

FIG. 14 is a conceptual diagram of a conventional liquid material supply device.

[Explanation of symbols]

Reference Signs List 10 liquid material supply apparatus 11 pressurized gas line 13 gas supply pipe 15 gas line connection pipe 16 gas line joint 17 gas introduction pipe 21 material supply line 23 discharge pipe 25 material line connection pipe 26 material line connection 27 material supply pipe 31 bypass pipe 35 Connecting pipe 39 Exhaust pipe 41 Container 45 Blow-out pipe 46 Opening 47 Bursting plate 48 Cutter 49 Valve element 50 Detoxification device 51 Liquid trap 53 Detoxification tower 55 Vacuum pump 61 Pressure switch 63 Mass flow meter 65 Pressure gauge 75 Vaporizer 111 Gas Feed valve 113 Gas introduction valve 121 Discharge valve 123 Material receiving valve 125 Supply valve 131 Line short circuit valve 135 Pipe connection valve 151 Removal valve 153 Exhaust valve 155, 157 Filter connection valve

Claims (9)

[Claims] 1. A container enclosing a liquid material, a pressurized gas line for introducing a pressurized gas into the container, a material supply line for supplying a liquid material to a vaporizer by pressurizing the pressurized gas,
In the liquid material supply apparatus further comprising a valve in each line, the pressurized gas line is fixed to a gas supply pipe, a gas line connection pipe, and a main body of the container connected to the gas line connection pipe. The material supply line, a discharge pipe fixed to the main body of the container, a material line connection pipe connected to the discharge pipe, and a material supply pipe connected to the vaporizer. And a connection pipe connecting the gas supply pipe and the material supply pipe, and a connection pipe connecting the gas introduction pipe and the discharge pipe. Each of the gas line connection pipe and the gas introduction pipe has Equipped with an open / close valve,
The discharge pipe, the material line connection pipe, and the material supply pipe each include an open / close valve, and the bypass pipe and the connection pipe also include an open / close valve to supply the liquid material to the vaporizer. Liquid material supply device. 2. The liquid material supply device according to claim 1, further comprising: an abatement device connected to the material supply line, wherein the abatement device is provided with a vacuum pump. 3. The abatement apparatus according to claim 1, wherein the abatement tower and the vacuum pump are disposed downstream of a liquid trap, thereby exhausting the material from the material supply line through the liquid trap and the abatement tower. The liquid material supply device according to claim 2, wherein: 4. The liquid material supply device according to claim 1, wherein the container is provided with a rupture prevention mechanism. 5. The liquid material supply device according to claim 4, wherein the rupture prevention mechanism has a rupture plate for sealing the container and a safety valve arranged in series in a blow-out pipe. 6. A container having a liquid material sealed therein, a bypass pipe branched from a gas supply pipe, and a gas line connection pipe provided with a joint at an end portion, wherein the bypass pipe and the gas line connection pipe are opened and closed. A valve is provided, an open / close valve is provided on a gas introduction pipe of the container connected to the gas line connection pipe, and an open / close valve is provided on a material line connection pipe provided with a joint at an end, and the material line connection pipe is connected. The material supply pipe is connected to the bypass pipe, and the material supply pipe is provided with an open / close valve. The discharge pipe of the container connected to the material line connection pipe is provided with an open / close valve. A liquid material supply having a connection pipe for connecting the pipe and an on-off valve also in the connection pipe, and having an exhaust pipe connected to the material supply pipe or the material line connection pipe. Upon replacement of the container of the apparatus, the purge gas sent from the gas supply pipe is supplied to the gas line connection pipe, the gas introduction pipe, the connection pipe, the discharge pipe, and
A material exchange method, wherein the container is removed after purging by flowing the exhaust gas through the material line connection pipe to the exhaust pipe. 7. A container having a liquid material sealed therein, a bypass pipe branched from a gas supply pipe, and a gas line connection pipe provided with a joint at an end portion, wherein the bypass pipe and the gas line connection pipe are opened and closed. A valve is provided, an open / close valve is provided on a gas introduction pipe of the container connected to the gas line connection pipe, and a material line connection pipe provided with a joint at an end is provided with an open / close valve and the material line connection pipe is connected. The material supply pipe is connected to the bypass pipe, and the material supply pipe is also provided with an open / close valve. The discharge pipe of the container connected to the material line connection pipe is provided with an open / close valve. It has a connecting pipe for connecting to the discharge pipe and also has an opening / closing valve for this connecting pipe. At the time of container exchange of the connected liquid material supply device, after closing the valve of the material supply pipe, open the valve of the connection pipe to make the gas introduction pipe and the discharge pipe communicate with each other, and connect the gas line with the joint of the gas line. The inside of the connected gas line connection pipe and the gas introduction pipe and the inside of the material line connection pipe and the discharge pipe connected by the joint of the material line are pressurized by a purge gas and the abatement apparatus. The method of material exchange, characterized in that the container is detached from the gas line joint and the material line joint after repeatedly reducing the pressure by the vacuum pump. 8. When exchanging the container, after closing the valve of the material supply pipe, once open the valve of the bypass pipe to return the liquid material inside the material line connection pipe and the discharge pipe to the container. After that, the bypass pipe and the gas line connection pipe, the gas introduction pipe, and closing each valve of the discharge pipe, further, by opening the valve of the connection pipe, the gas introduction pipe and the discharge pipe. 9. The material exchange method according to claim 8, wherein the inside is depressurized and pressurized as the communicating state. 9. A container having a liquid material sealed therein, a bypass pipe branched from a gas supply pipe, and a gas line connection pipe provided with a joint at an end portion, wherein the bypass pipe and the gas line connection pipe are opened and closed. A valve is provided, an open / close valve is provided on a gas introduction pipe of the container connected to the gas line connection pipe, and an open / close valve is provided on a material line connection pipe provided with a joint at an end, and the material line connection pipe is connected. The material supply pipe is connected to the bypass pipe, and the material supply pipe is provided with an open / close valve. The discharge pipe of the container connected to the material line connection pipe is provided with an open / close valve. It has a connecting pipe for connecting the pipe and the connecting pipe also has an open / close valve, and a vacuum pump is provided for the abatement apparatus connected to the material supply pipe or the material line connecting pipe. At the time of replacing the container of the liquid material supply device, after closing each valve of the gas introduction pipe and the discharge pipe fixed to the main body of the container, it was fixed to the main body of the container by the vacuum pump of the abatement apparatus. The outlet of the discharge pipe is in a reduced pressure state, and then the container is removed,
Further, after the container is replaced, the opening of the discharge pipe of the new container is opened after opening the mouth of the discharge pipe of the new container under reduced pressure.