JPH1052817A - Wire saw - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve processing accuracy for an article to be processed and to improve yield of the article to be processed by providing two kinds of multi- channel rollers, namely, a resin-made multi-channel roller wherein at least channel parts of the multi-channel roller are constituted of a resin and a ceramic- made multi-channel roller wherein at least channel parts of the multi-channel roller are constituted of a ceramic. SOLUTION: As two multi-channel rollers facing to an article 3 to be processed, namely, multi-channel rollers for a head 1a and 1b, ceramic-made multi-channel rollers wherein wire channel parts are formed of a ceramic are used. As a multi-channel roller 2 for driving, a resin-made multi-channel roller wherein wire channel parts are formed of a resin is used. As two multi-channel rollers for a head 1a and 1b facing to an article 3 to be processed, ceramic-made multi-channel rollers wherein at least wire channel parts are formed of a ceramic are used. By combining the resin-made multi-channel roller and the ceramic-made multi-channel rollers and arranging appropriately them, processing accuracy of the article to be processed is improved.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wire saw for cutting and grooving silicon, magnetic material, quartz, and the like.

[0002]

2. Description of the Related Art A wire saw is provided with a plurality of multi-groove rollers on which wires are stretched, and by rotating the multi-groove rollers to linearly move the wires, silicon, magnetic material, crystal, ceramics, etc. It is a device that performs processing such as cutting and grooving of the work (work). Conventionally, as a multi-slot roller for a wire saw, a roller having a groove formed on the surface thereof made of a synthetic resin such as nylon or urethane has been widely used. There is a problem such as difficulty in holding, and to solve the problem, a wire saw has been proposed in which a multi-groove roller having a groove portion made of a hard material such as ceramics is arranged in a triangular shape (Japanese Patent Laid-Open No. 63-237863). .

However, in this wire saw, the grooves of all three rollers arranged in a triangular shape are formed of a high-hardness material such as ceramics, and have the following problems.

[Problems to be solved by the invention]

[0004] In the case of a ceramic multi-groove roller in which the groove is formed of ceramics or the like, the wire groove is made of ceramics, so that it is very hard as compared with a synthetic resin or the like.
As a result, the wire groove wear is small, but the wire groove hardly deforms when a load is applied to the groove, so if an uneven load is applied due to the swing of a multi-groove roller, the roller can absorb and absorb the shock. It is not possible to do so, and all of the wire will be hooked, and the wire will be easily derailed and disconnected. Once the wire is derailed or broken, the workpiece being processed is often lost. In addition, because of the hardness of the multi-groove roller, it is not possible for the roller to absorb the chatter of the wire and the rapid fluctuation of the tension of each wire. Easy to do.

Further, in a device in which a wire saw can cut and groove a workpiece by reciprocating movement of a wire, in a wire saw using a ceramic multi-groove roller, a groove portion is formed of a synthetic resin or the like. Since the frictional force between the roller groove and the wire is smaller than that of a wire saw that uses a multi-slot roller, when the multi-slot roller is reversed, the movement of the drive multi-slot roller is directly connected to the movement of the wire saw. Wires, etc., cannot follow accurately, causing a slip between the wire and the multi-groove roller. Due to this slip, the wire, abrasive grain, wire groove rubbed,
This also causes wear of the wire grooves of the multi-groove roller. Therefore, the reversal speed of the drive multi-groove roller must be reduced because the reversal cannot be performed quickly, and the processing becomes slow. In addition, the ceramic multi-groove roller is heavier than the resin multi-groove roller, and therefore has a large inertia force, which is one of the causes of the inability to quickly turn over. Also, if a slip occurs between the wire and the multi-groove roller, chatter occurs in the wire, thereby causing chipping or burrs on the workpiece and deteriorating the processing accuracy. This is also one of the causes that the multi-groove roller cannot be reversed quickly.

In recent years, the wire diameter has been reduced in order to reduce the processing allowance for the workpiece, and the required processing accuracy has been increased, and the processing speed has been increased, so that high tension has been applied to the wire. The point has become a more serious problem.

[0007]

SUMMARY OF THE INVENTION In view of the above circumstances, the present invention improves the processing accuracy of a workpiece in wire sawing, improves the yield of the workpiece, increases the processing speed, In addition, a wire saw having a long life of the multi-groove roller was constituted by the following means.

According to the present invention, a processing wire is stretched on a multi-groove roller having a plurality of wire grooves on a surface, and the wire is stretched.
A wire-saw for processing a workpiece by moving the multi-groove roller, and a resin multi-groove roller in which at least the groove portion of the multi-groove roller is made of resin. A wire saw, wherein at least two types of the multi-groove rollers are mounted, the ceramic multi-groove rollers having at least a groove portion formed of ceramics.

The present invention is also a wire saw characterized in that in the above invention, the two multi-groove rollers facing the workpiece are ceramic multi-groove rollers in which at least the groove portions are made of ceramic.

The present invention is also characterized in that the multi-groove roller for applying a driving force to the processing wire stretched over the multi-groove roller in the above invention is a resin multi-groove roller having at least a groove portion made of resin. It is a wire saw.

[0011]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention focuses on the fact that two types of multi-groove rollers made of ceramics and resin have completely different characteristics, and one type of multi-groove roller is used in one apparatus. Rather than using the wire saw, the performance of the wire saw is improved by appropriately selecting and arranging a multi-groove roller having a function required for the multi-groove roller at each part in the apparatus.

Hereinafter, the present invention will be described with reference to FIG. FIG. 1 shows a multi-groove roller portion of a wire saw. Two head multi-groove rollers 1a and 1b facing the workpiece 3 and one drive multi-groove roller 2 are provided above these head rollers. A processing wire 4 is stretched between these multi-groove rollers. A drive motor (not shown) is connected to the drive multi-groove roller 2, and when the drive multi-groove roller 2 is rotated by the drive motor, a processing wire stretched between the multi-groove rollers. 4 moves. Workpiece 3 installed so as to be in contact with the processing wire stretched between head rollers 1a and 1b
In the process, processing such as cutting and grooving is performed by the moving motion of the processing wire 4. At this time, the workpiece 3 moves while the workpiece table 5 or the multi-groove roller moves, whereby the processing proceeds while pressing the abrasive fluid and the wire against the non-workpiece.

In this embodiment, two multi-groove rollers facing the workpiece 3, ie, a multi-groove roller 1 for the head,
a and 1b are made of ceramic (alumina)
The ceramic multi-groove roller formed by
As the drive multi-groove roller 2, a resin multi-groove roller having a wire groove formed of resin (nylon) is employed.

In the two head multi-groove rollers 1a and 1b opposed to the workpiece 3, the precision of the wire grooves greatly affects the processing precision of the workpiece. Therefore, it is desirable that the head multi-groove roller employs a ceramic multi-groove roller in which at least the wire groove is formed of ceramic. In the ceramic multi-groove roller used in the present invention, all portions may be formed of ceramics, or the wire groove portions may be formed of ceramics, and the other portions may be formed of other members such as metal (for example, see Japanese Unexamined Patent Application Publication No. 63-23
7863). Ceramics here are alumina, zirconia, silicon carbide,
Hard ceramics such as silicon nitride are used.

By using a ceramic multi-groove roller, as shown in Table 1, the coefficient of thermal expansion is much smaller than that of a resin multi-groove roller, so that the change in the pitch of the wire grooves with respect to a temperature change is small, and the wire groove portions are hard. Since the deformation of the wire saw groove due to the wire tension is extremely small, the effect that the pitch of the wire groove is not changed by the wire tension is exhibited.

[0016]

[Table 1]

Furthermore, since ceramics have high wear resistance,
The groove shape can be maintained more accurately for a long time than the resin multi-groove roller. As a result of the experiment, the ceramic multi-groove roller
As shown in the figure, it can be seen that the wear progresses only in the radial direction with respect to the axis of the multi-groove roller. It is possible to process objects.

On the other hand, in the resin multi-groove roller, as shown in FIG. 7, the wear of the wire groove wears not only in the radial direction but also in the axial direction with respect to the axis of the multi-groove roller. Despite the disadvantage that the pitch goes out of order and the processing accuracy of the workpiece quickly deteriorates, the hardness is small, so even if an uneven load is applied to the wire groove, it can be absorbed to some extent by the wire groove. ,
Also, there is an advantage that the frictional force with the wire in the wire groove is larger in the resin than in the ceramic.

In the present invention, when a ceramic multi-groove roller is used for all the multi-groove rollers including the two head multi-groove rollers, the elastic coefficient is 1 as shown in Table 1.
Since there is a difference of more than an order of magnitude and the deformation of the wire groove is smaller than that of the resin, the vibration of the multi-groove roller, the chatter of the wire, the rapid change of the tension of each wire, and the like cannot be absorbed by the ceramic multi-groove roller. Therefore, all of the generated eccentric load must be received by the wire, which may cause the wire to be derailed or broken, or cause chattering, burr, etc. on the processed surface of the workpiece.

Therefore, by forming at least one of the rollers other than the two head multi-groove rollers into a resin multi-groove roller,
The resin-made multi-groove roller serves as a cushioning material, which can suppress the occurrence of wire derailment, disconnection, chattering and burr on the processed surface of the workpiece.

As a result of actually cutting a non-processed magnetic material using a wire saw having three multi-groove rollers, a wire saw using three multi-groove rollers made of ceramics has a size of 5 μm or less. A number of chippings were found in the processed magnetic material. However, as a result of performing processing under the same conditions using a wire saw equipped with a single resin multi-groove roller in addition to the two head multi-groove rollers, no chipping or the like occurred.

Next, the frictional force between the multi-groove roller and the wire was examined. Outer diameter of multi-groove roller is 100mm
Table 2 shows the results of examining the frictional force between the resin and ceramic multi-groove rollers and the wire using a wire having a diameter of 0.14 mm in which four types of loads were applied to the V-shaped wire groove of 60 °. It was found that the multi-groove roller made of resin has a larger friction force by 100 to 200 g / final than the multi-groove roller made of ceramics. If 300 wires are wound per multi-groove roller, the difference in frictional force between the resin multi-groove roller and the ceramic multi-groove roller is:
The value is as large as 30 to 60 kg.

[0023]

[Table 2]

From the above, in the case where the wire saw is configured to perform processing such as cutting the work while reversing the wire in a reciprocating motion, the resin multi-groove roller is used as the drive multi-groove roller. Then, the following effects are exhibited. By using a resin multi-groove roller having a large frictional force for the drive multi-groove roller that requires a large transmission force when reversing, it is possible to suppress the occurrence of slip between the wire and the drive multi-groove roller during reversal. it can. Since no slip occurs, abrasion of the wire groove that occurs at the time of slip can be suppressed, and the reversing speed can be increased, so that the processing speed is also increased.
Also, when slippage occurs, the wire chatters, which is one of the factors that cause chattering, chipping, etc. on the processed surface of the workpiece.
But it can be suppressed.

Further, as shown in Table 1, since the specific gravity of the resin is lower than that of the ceramics, the total weight of all the multi-groove rollers in one apparatus is also reduced. Therefore, the inertia force is also small,
The above effect is further enhanced.

While the above has been described based on the embodiment shown in FIG. 1, other embodiments will be described below. FIG. 2 shows the multi-groove roller portion of the first embodiment of the present invention. A wire saw using three multi-groove rollers, one drive multi-groove roller 2 is a resin multi-groove roller, and two head multi-groove rollers 1a, 1b facing the non-processed object 3.
Are composed of ceramic multi-groove rollers.

FIG. 3 shows a multi-groove roller portion according to a second embodiment of the present invention. The structure of the first embodiment is such that the arrangement of the multi-groove rollers is upside down, and the non-workpiece 3 and two multi-groove rollers 1a, 1b for the head are disposed upward.
Are arranged, and the two head multi-groove rollers 1a, 1b
Is a ceramic multi-groove roller, and one lower drive multi-groove roller 2 is formed of a resin multi-groove roller.

FIG. 4 shows a multi-groove roller portion according to a third embodiment of the present invention. A wire saw using four multi-groove rollers, wherein a workpiece 3 is disposed below, and head multi-groove rollers 1a and 1b are disposed opposite to the workpiece 3, and an upper drive multi-groove roller 2a and a guide multi-groove are provided. One roller 2b is arranged, and each of the head multi-groove rollers 1a, 1
b is a ceramic multi-groove roller, and the other two multi-groove rollers 2a and 2b are formed of resin multi-groove rollers.

FIG. 5 shows a multi-groove roller portion according to a fourth embodiment of the present invention. This is a wire saw using four multi-groove rollers, in which the arrangement of the third embodiment is inverted. According to the third embodiment, the multi-groove rollers 1a, 1
b is a ceramic multi-groove roller, and the other two multi-groove rollers 2a and 2b are formed of resin multi-groove rollers.

[0030]

According to the present invention, the following remarkable effects can be obtained by combining and appropriately selecting a resin multi-groove roller and a ceramic multi-groove roller in one device of a wire saw. By improving the pitch accuracy of the wire groove, the accuracy of the workpiece is improved. The wear resistance of the resin and ceramic multi-groove rollers is improved. Wires are less likely to derail and break. Chipping and chattering of the workpiece are reduced. The reversing operation of the multi-groove roller can be performed quickly, resulting in a shorter processing time. The yield of the workpiece is improved.

[Brief description of the drawings]

FIG. 1 is a perspective view showing a main part of a multi-groove roller portion of a wire saw according to a first embodiment of the present invention.

FIG. 2 is an explanatory view showing an outline of a multi-groove roller portion of the wire saw according to the first embodiment of the present invention.

FIG. 3 is an explanatory view showing an outline of a multi-groove roller portion of a wire saw according to a second embodiment of the present invention.

FIG. 4 is an explanatory view showing an outline of a multi-groove roller portion of a wire saw according to a third embodiment of the present invention.

FIG. 5 is an explanatory view showing an outline of a multi-groove roller portion of a wire saw according to a fourth embodiment of the present invention.

FIG. 6 is a schematic diagram of a wire groove cross section of a ceramic multi-groove roller.

FIG. 7 is a schematic view of a cross section of a wire groove of a resin multi-groove roller.

[Explanation of symbols]

 1a, 1b Multi-groove roller for head 2, 2a Multi-groove roller for drive 2b Multi-groove roller for guide 3 Work piece 4 Wire 5 Abrasive liquid supply device 6 Work table

Claims (3)

[Claims] 1. A wire saw which stretches a processing wire on a multi-groove roller having a plurality of wire grooves on a surface thereof, and moves the wire to process a workpiece. In a wire saw having three or more rollers, a resin multi-groove roller in which at least the groove portion of the multi-groove roller is made of resin, and a ceramic multi-groove roller in which at least the groove portion of the multi-groove roller is made of ceramic A wire saw to which two types of multi-groove rollers are attached. 2. The wire saw according to claim 1, wherein the two multi-groove rollers facing the workpiece are ceramic multi-groove rollers having at least a groove formed of ceramic. 3. The multi-groove roller according to claim 1, wherein the multi-groove roller for applying a driving force to the wire stretched over the multi-groove roller is a resin multi-groove roller having at least a groove formed of resin. Wire saw.