JPH1048135A - Infrared gas analyzer - Google Patents

Infrared gas analyzer

Info

Publication number
JPH1048135A
JPH1048135A JP21923396A JP21923396A JPH1048135A JP H1048135 A JPH1048135 A JP H1048135A JP 21923396 A JP21923396 A JP 21923396A JP 21923396 A JP21923396 A JP 21923396A JP H1048135 A JPH1048135 A JP H1048135A
Authority
JP
Japan
Prior art keywords
gas
sample cell
gas filter
sample
infrared light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP21923396A
Other languages
Japanese (ja)
Inventor
Katsuhiko Araya
克彦 荒谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP21923396A priority Critical patent/JPH1048135A/en
Publication of JPH1048135A publication Critical patent/JPH1048135A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To the eliminate the need for span gas and prevent measurement from being interrupted by calibration. SOLUTION: A gas filter wheel 20 including gas filters (a), (c) filled with inert gas which does not absorb infrared rays and a gas filter (b) filled with measured component gas is provided between a light source 10 and a sample cell 2. When the gas filters (a), (b) are in a light path, zero gas flows to the sample cell 2, while sample gas flows to the sample cell 2 when the gas filter (c) is in the light path. As a result, when the gas filter (a) is in the light path, a zero-point signal is obtained as a signal from a detector 16, when the gas filter (b) is in the light path, a span-point signal is obtained, and when the gas filter (c) is in the light path, a measurement signal is obtained respectively. These signals are obtained per rotation of the gas filter wheel 20.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は化学工場や製鉄所の
環境のガス濃度に関するプロセスコントロール、ボイラ
や燃焼炉の煙道ガス分析、大気汚染の監視、自動車の排
ガス測定などに使用され、ガス分子固有の赤外線吸収効
果を利用してガス中や蒸気中にある特定成分の濃度を連
続的に測定する赤外線ガス分析計に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is used for process control relating to gas concentration in the environment of chemical factories and steelworks, flue gas analysis of boilers and combustion furnaces, monitoring of air pollution, measurement of automobile exhaust gas, etc. The present invention relates to an infrared gas analyzer that continuously measures the concentration of a specific component in a gas or vapor by utilizing a unique infrared absorption effect.

【0002】[0002]

【従来の技術】図1に従来の赤外線ガス分析装置を概略
的に示す。(A)は構成図、(B)はそのうちのセクタ
部分を示す平面図である。赤外光が透過する試料セル2
はガス入口4から試料ガスと赤外線に対し吸収をもたな
い基準ガスとが三方弁8により切り換えて供給され、ガ
ス出口6から排気される。10は赤外線の光源であり、
光源10と試料セル2の間には試料セルに入射する赤外
光を断続させるセクタ12が設けられている。セクタ1
2は(B)に示されるように切欠きを有し、モータ14
により回転させられることにより試料セル2に入射する
赤外光を断続する。16は赤外検出器であり、試料セル
2を透過した赤外線を検出する。
2. Description of the Related Art FIG. 1 schematically shows a conventional infrared gas analyzer. (A) is a configuration diagram, and (B) is a plan view showing a sector portion thereof. Sample cell 2 that transmits infrared light
The sample gas and a reference gas having no absorption for infrared rays are supplied by switching through a three-way valve 8 from a gas inlet 4 and exhausted from a gas outlet 6. 10 is an infrared light source,
A sector 12 is provided between the light source 10 and the sample cell 2 for intermittently intermitting infrared light incident on the sample cell. Sector 1
2 has a notch as shown in FIG.
To intermittently interrupt the infrared light incident on the sample cell 2. Reference numeral 16 denotes an infrared detector which detects infrared light transmitted through the sample cell 2.

【0003】このガス分析装置では、基準ガス(ゼロガ
ス)と試料ガスを交互に試料セル2に流すことによって
ゼロ点の補償を行なっている。しかし、スパン点(感
度)の補償は行なっていないため、定期的にスパンガス
(標準ガス)を流し、感度を校正する必要がある。
In this gas analyzer, a zero point is compensated by flowing a reference gas (zero gas) and a sample gas alternately through a sample cell 2. However, since the span point (sensitivity) is not compensated, it is necessary to periodically supply a span gas (standard gas) to calibrate the sensitivity.

【0004】[0004]

【発明が解決しようとする課題】従来の装置のように定
期的にスパンガスを流して感度を校正する場合は、高価
なスパンガスが必要となる。また校正中は欠測(測定を
行なえないこと)になる問題がある。本発明はスパンガ
スを不要にし、校正のために測定が中断されるのを防ぐ
ことを目的とするものである。
When the sensitivity is calibrated by periodically flowing a span gas as in a conventional apparatus, an expensive span gas is required. In addition, there is a problem that measurement is not performed during calibration (measurement cannot be performed). It is an object of the present invention to eliminate the need for span gas and prevent measurement from being interrupted for calibration.

【0005】[0005]

【課題を解決するための手段】本発明では、所定濃度の
測定成分ガスを充填したガスフィルタからなる第1の透
過部、赤外線に対する吸収をもたない第2、第3の透過
部をもち、回転して各透過部が順次光源と試料セルの間
の光路を横切ることにより試料セルに入射する赤外光を
断続するガスフィルタホイールを設け、基準ガスが試料
セルに供給された状態でガスフィルタホイールの第1、
第2の透過部が試料セルに入射する赤外光の光路を横切
り、試料ガスが試料セルに供給された状態でガスフィル
タホイールの第3の透過部が試料セルに入射する赤外光
の光路を横切るように切換え弁の切換えとガスフィルタ
ホイールの回転との同期をとり、ガスフィルタホイール
の各透過部を透過した赤外光による赤外検出器の検出値
から試料ガス中の成分濃度を算出する。
According to the present invention, there is provided a first transmitting portion comprising a gas filter filled with a predetermined concentration of a measuring component gas, and a second and a third transmitting portion having no absorption for infrared rays. A gas filter wheel that rotates and intermittently intercepts infrared light incident on the sample cell by rotating the respective transmission sections sequentially across the optical path between the light source and the sample cell is provided. The first of the wheels,
The second transmission portion traverses the optical path of the infrared light incident on the sample cell, and the third transmission portion of the gas filter wheel enters the sample cell with the sample gas supplied to the sample cell. The switching of the switching valve and the rotation of the gas filter wheel are synchronized so that the concentration of the component in the sample gas is calculated from the detection value of the infrared detector by the infrared light transmitted through each transmission part of the gas filter wheel. I do.

【0006】第1の透過部が光路に入るときは試料セル
には基準ガスが流されており、第1の透過部のガスフィ
ルタに充填された所定濃度の測定成分ガスによるスパン
点を模擬した出力が得られる。第2の透過部が光路に入
るときも試料セルには基準ガスが流されており、ゼロ点
の出力が得られる。第3の透過部が光路に入るときは試
料セルには試料ガスが流されており、試料ガスによる出
力が得られる。これらの出力を演算することによって、
ゼロ点のみならず、スパン点も常時補償された測定がで
きる。そのため、定期的に標準ガスを用いた感度校正を
行なわなくても精度の高い測定が可能となる。
When the first transmitting portion enters the optical path, a reference gas is flowing through the sample cell, and a simulated span point due to a predetermined concentration of the measurement component gas filled in the gas filter of the first transmitting portion. The output is obtained. When the second transmission section enters the optical path, the reference gas is still flowing through the sample cell, and an output at the zero point is obtained. When the third transmission section enters the optical path, the sample gas is flowing through the sample cell, and an output by the sample gas is obtained. By calculating these outputs,
Not only the zero point but also the span point can always be compensated for measurement. Therefore, highly accurate measurement can be performed without performing sensitivity calibration using a standard gas periodically.

【0007】[0007]

【実施例】図2は一実施例を概略的に表わしたものであ
る。図3はそのうちのガスフィルタホイールを表わした
ものであり、(A)は平面図、(B)は(A)のX−
X’線位置での断面図である。図1と同一部分には同一
の符号を用いる。赤外光が透過する試料セル2にはガス
入口4から試料ガスと基準ガス(ゼロガス)とが三方弁
8により切り換えて供給され、ガス出口6から排気され
る。赤外線の光源10と試料セル2の間には試料セルに
入射する赤外光を断続するために、図1でのセクタ12
に代ってガスフィルタホイール20が設けられている。
FIG. 2 schematically shows an embodiment. FIGS. 3A and 3B show a gas filter wheel of which, FIG. 3A is a plan view, and FIG.
It is sectional drawing in the X 'line position. The same parts as those in FIG. 1 are denoted by the same reference numerals. A sample gas and a reference gas (zero gas) are switched from a gas inlet 4 to a sample cell 2 through which infrared light is transmitted by a three-way valve 8, and exhausted from a gas outlet 6. In order to interrupt the infrared light incident on the sample cell between the infrared light source 10 and the sample cell 2, the sector 12 shown in FIG.
Instead, a gas filter wheel 20 is provided.

【0008】ガスフィルタホイール20は、図3に示さ
れるように、両面がCaF2などの赤外透過窓22でシ
ールされた透過部として3つのガスフィルタa,b,c
を備えており、ガスフィルタホイール20の回転によっ
てそれらのガスフィルタa,b,cが順次、光源10と
試料セル2の間の光路を横切るように配置されている。
ガスフィルタaとcには窒素など赤外線を吸収しない不
活性ガスが充填され、ガスフィルタbには測定成分ガス
が窒素など赤外線を吸収しない不活性ガスで希釈されて
充填されている。ガスフィルタbの測定成分ガス濃度
は、試料セル2に測定レンジのフルスケールの濃度の測
定成分ガスが流れたときの赤外吸収量と同一吸収量がそ
のガスフィルタbでなされるように決められている。ガ
スフィルタa,b,cは第2、第1、第3の透過部にそ
れぞれ対応する。図には示されていないが、三方弁8の
切換えとガスフィルタホイール20の回転を同期させる
ためにコントローラが設けられている。
As shown in FIG. 3, the gas filter wheel 20 has three gas filters a, b, and c as transmission portions whose both surfaces are sealed by an infrared transmission window 22 made of CaF 2 or the like.
The gas filters a, b, and c are sequentially arranged so as to cross the optical path between the light source 10 and the sample cell 2 by the rotation of the gas filter wheel 20.
The gas filters a and c are filled with an inert gas such as nitrogen which does not absorb infrared rays, and the gas filter b is filled with a measurement component gas diluted with an inert gas such as nitrogen which does not absorb infrared rays. The measurement component gas concentration of the gas filter b is determined such that the same absorption amount as the infrared absorption amount when the measurement component gas of the full-scale concentration of the measurement range flows through the sample cell 2 is obtained by the gas filter b. ing. The gas filters a, b, and c correspond to the second, first, and third transmission units, respectively. Although not shown, a controller is provided to synchronize the switching of the three-way valve 8 and the rotation of the gas filter wheel 20.

【0009】次に、この実施例の動作について説明す
る。三方弁8を介して試料ガス又は基準ガスが試料セル
2に供給される。図4に示されるように、不活性ガスが
充填されたガスフィルタa又は測定成分を含むガスが充
填されたガスフィルタbが光路に入るときは、試料セル
2には基準ガスであるゼロガスが流され、ガスフィルタ
cが光路に入るときは試料セル2には試料ガスが流され
るように、三方弁8とガスフィルタホイール20の回転
が同期して制御される。その結果、検出器16からの信
号として、光路にあるガスフィルタの種類a,b,cに
応じて、図5(A)に示されるような検出信号が得られ
る。
Next, the operation of this embodiment will be described. A sample gas or a reference gas is supplied to the sample cell 2 via the three-way valve 8. As shown in FIG. 4, when a gas filter a filled with an inert gas or a gas filter b filled with a gas containing a measurement component enters the optical path, zero gas as a reference gas flows through the sample cell 2. When the gas filter c enters the optical path, the rotation of the three-way valve 8 and the rotation of the gas filter wheel 20 are controlled synchronously so that the sample gas flows through the sample cell 2. As a result, a detection signal as shown in FIG. 5A is obtained as a signal from the detector 16 according to the types a, b, and c of the gas filters in the optical path.

【0010】図5(B)はガスフィルタa,b,cと、
試料セル2を流れるガスの種類とに対し、得られる検出
信号の種類を表わしたものである。すなわち、ガスフィ
ルタaが光路に入った場合はゼロ点の信号、ガスフィル
タbが光路に入った場合はスパン点の信号、ガスフィル
タcが光路に入った場合は測定信号がそれぞれ得られ、
それらの信号がガスフィルタホイル20の1回転ごとに
得られる。
FIG. 5B shows gas filters a, b, c.
It shows the type of detection signal obtained with respect to the type of gas flowing through the sample cell 2. That is, a signal at the zero point is obtained when the gas filter a enters the optical path, a signal at the span point when the gas filter b enters the optical path, and a measurement signal when the gas filter c enters the optical path.
These signals are obtained for each revolution of the gas filter wheel 20.

【0011】ゼロ点の信号をRZ、スパン点の信号をR
S、測定信号をMとすると、試料ガスの濃度Cは C=f((RZ-M)/(RZ-RS))・CR と表わされる。ここで、f(x)は赤外吸収信号を直線
化する関数、CRはレンジの濃度である。
The signal at the zero point is RZ, and the signal at the span point is R
Assuming that S and the measurement signal are M, the concentration C of the sample gas is expressed as C = f ((RZ-M) / (RZ-RS)). CR. Here, f (x) is a function for linearizing the infrared absorption signal, and CR is the density of the range.

【0012】このように、ガスフィルタホイール20が
1回転するごとにゼロ点とスパン点の補償された精度の
高い測定が行なわれる。実際にはガスフィルタbの初期
校正として、標準ガスを試料セル2に流してガスフィル
タbの校正(理論値からのずれの補正)をし、その補正
係数を記憶させておいて、測定値の補正に利用するのが
望ましい。
As described above, each time the gas filter wheel 20 makes one rotation, the zero point and the span point are compensated for with high accuracy. Actually, as an initial calibration of the gas filter b, a standard gas is caused to flow through the sample cell 2 to calibrate the gas filter b (correction of a deviation from a theoretical value), and its correction coefficient is stored. It is desirable to use it for correction.

【0013】[0013]

【発明の効果】本発明では所定濃度の測定成分ガスを充
填したガスフィルタからなる第1の透過部、赤外線に対
する吸収をもたない第2、第3の透過部をもち、回転し
て各透過部が順次光源と試料セルの間の光路を横切るこ
とにより試料セルに入射する赤外光を断続するガスフィ
ルタホイールを設け、基準ガスが試料セルに供給された
状態でガスフィルタホイールの第1、第2の透過部が試
料セルに入射する赤外光の光路を横切り、試料ガスが試
料セルに供給された状態でガスフィルタホイールの第3
の透過部が試料セルに入射する赤外光の光路を横切るよ
うに切換え弁の切換えとガスフィルタホイールの回転と
の同期をとり、ガスフィルタホイールの各透過部を透過
した赤外光による赤外検出器の検出値から試料ガス中の
成分濃度を算出するようにしたので、標準ガスによる定
期的な校正が不要になり、欠測もなくなって精度の高い
測定を行なうことができるようになる。
According to the present invention, there are provided a first transmitting portion comprising a gas filter filled with a predetermined concentration of a measuring component gas, and second and third transmitting portions having no absorption for infrared rays. A gas filter wheel that intermittently intercepts infrared light incident on the sample cell by sequentially traversing the optical path between the light source and the sample cell, wherein the first and second gas filter wheels are provided in a state where the reference gas is supplied to the sample cell. The second transmission portion traverses the optical path of the infrared light incident on the sample cell, and the third gas filter wheel is moved in a state where the sample gas is supplied to the sample cell.
The switching of the switching valve and the rotation of the gas filter wheel are synchronized so that the transmission part of the gas crosses the optical path of the infrared light incident on the sample cell, and the infrared light transmitted by each transmission part of the gas filter wheel is transmitted by the infrared light. Since the component concentration in the sample gas is calculated from the detection value of the detector, the periodic calibration with the standard gas is not required, and the measurement can be performed with high accuracy without any missing measurement.

【図面の簡単な説明】[Brief description of the drawings]

【図1】従来の赤外線ガス分析装置を示す図であり、
(A)は全体構成図、(B)はそのうちのセクタ部分を
示す平面図である。
FIG. 1 is a diagram showing a conventional infrared gas analyzer.
(A) is an overall configuration diagram, and (B) is a plan view showing a sector portion thereof.

【図2】一実施例を概略的に示す構成図である。FIG. 2 is a configuration diagram schematically showing one embodiment.

【図3】同実施例におけるガスフィルタホイールを示す
図であり、(A)は平面図、(B)はそのX−X’線位
置での断面図である。
FIGS. 3A and 3B are diagrams showing a gas filter wheel in the embodiment, wherein FIG. 3A is a plan view and FIG. 3B is a cross-sectional view taken along the line XX ′.

【図4】同実施例の動作における試料セル内のガスの種
類(A)とガスフィルタの開口度(B)を示すタイミン
グ図である。
FIG. 4 is a timing chart showing the type (A) of gas in the sample cell and the opening degree (B) of the gas filter in the operation of the embodiment.

【図5】検出器により得られる信号を示す図であり、
(A)はその波形図、(B)は対応を示す図表である。
FIG. 5 is a diagram showing a signal obtained by a detector;
(A) is a waveform diagram, and (B) is a chart showing correspondence.

【符号の説明】[Explanation of symbols]

2 試料セル 4 試料セルのガス入口 6 ガス出口 8 切換え弁の三方弁 10 光源 16 検出器 20 ガスフィルタホイール a,b,c, ガスフィルタ 2 sample cell 4 gas inlet of sample cell 6 gas outlet 8 three-way valve of switching valve 10 light source 16 detector 20 gas filter wheel a, b, c, gas filter

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 ガス入口とガス出口をもち、赤外線が透
過する試料セルと、 試料セルのガス入口に設けられ、試料ガスと赤外線に対
する吸収をもたない基準ガスとを切り換えて試料セルに
供給する切換え弁と、 試料セルに赤外光を照射する光源と、 所定濃度の測定成分ガスを充填したガスフィルタからな
る第1の透過部、赤外線に対する吸収をもたない第2、
第3の透過部をもち、回転して各透過部が順次光源と試
料セルの間の光路を横切ることにより試料セルに入射す
る赤外光を断続するガスフィルタホイールと、 試料セルを透過した赤外光を検出する赤外検出器と、 基準ガスが試料セルに供給された状態でガスフィルタホ
イールの第1、第2の透過部が試料セルに入射する赤外
光の光路を横切り、試料ガスが試料セルに供給された状
態でガスフィルタホイールの第3の透過部が試料セルに
入射する赤外光の光路を横切るように切換え弁の切換え
とガスフィルタホイールの回転との同期をとるコントロ
ーラと、 ガスフィルタホイールの各透過部を透過した赤外光によ
る赤外検出器の検出値から試料ガス中の成分濃度を算出
する演算手段と、を備えたことを特徴とする赤外線ガス
分析装置。
1. A sample cell having a gas inlet and a gas outlet and transmitting infrared light, and a sample gas provided at a gas inlet of the sample cell and switching between a sample gas and a reference gas having no absorption for infrared light are supplied to the sample cell. A first light transmitting portion comprising a gas filter filled with a predetermined concentration of a measurement component gas, a second light source having no absorption for infrared light,
A gas filter wheel having a third transmitting portion, intermittently intermitting infrared light incident on the sample cell by rotating and each transmitting portion sequentially traversing the optical path between the light source and the sample cell; An infrared detector for detecting external light, and first and second transmission portions of a gas filter wheel traversing the optical path of infrared light incident on the sample cell while a reference gas is supplied to the sample cell, And a controller for synchronizing the switching of the switching valve and the rotation of the gas filter wheel so that the third transmitting portion of the gas filter wheel crosses the optical path of the infrared light incident on the sample cell in a state where the gas is supplied to the sample cell. Calculating means for calculating a component concentration in the sample gas from a detection value of an infrared detector based on infrared light transmitted through each transmission portion of the gas filter wheel.
JP21923396A 1996-07-31 1996-07-31 Infrared gas analyzer Pending JPH1048135A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21923396A JPH1048135A (en) 1996-07-31 1996-07-31 Infrared gas analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21923396A JPH1048135A (en) 1996-07-31 1996-07-31 Infrared gas analyzer

Publications (1)

Publication Number Publication Date
JPH1048135A true JPH1048135A (en) 1998-02-20

Family

ID=16732299

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21923396A Pending JPH1048135A (en) 1996-07-31 1996-07-31 Infrared gas analyzer

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005315587A (en) * 2004-04-27 2005-11-10 Yokogawa Electric Corp Infrared gas analyzer and its calibration method
JP2007256242A (en) * 2006-03-27 2007-10-04 Riken Keiki Co Ltd Infrared gas detector
KR100871909B1 (en) 2007-06-15 2008-12-05 한국표준과학연구원 Infrared gas detector having a selective detector module
JP2009042184A (en) * 2007-08-10 2009-02-26 Kimoto Denshi Kogyo Kk Gas meter
JP2010286349A (en) * 2009-06-11 2010-12-24 Yokogawa Electric Corp Laser gas analyzer and gas analyzing method using the same
CN117647489A (en) * 2024-01-30 2024-03-05 埃睿迪信息技术(北京)有限公司 Water quality detection method, device and equipment

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005315587A (en) * 2004-04-27 2005-11-10 Yokogawa Electric Corp Infrared gas analyzer and its calibration method
JP2007256242A (en) * 2006-03-27 2007-10-04 Riken Keiki Co Ltd Infrared gas detector
KR100871909B1 (en) 2007-06-15 2008-12-05 한국표준과학연구원 Infrared gas detector having a selective detector module
JP2009042184A (en) * 2007-08-10 2009-02-26 Kimoto Denshi Kogyo Kk Gas meter
JP2010286349A (en) * 2009-06-11 2010-12-24 Yokogawa Electric Corp Laser gas analyzer and gas analyzing method using the same
CN117647489A (en) * 2024-01-30 2024-03-05 埃睿迪信息技术(北京)有限公司 Water quality detection method, device and equipment
CN117647489B (en) * 2024-01-30 2024-04-16 埃睿迪信息技术(北京)有限公司 Water quality detection method, device and equipment

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