JPH10438A - Cleaning apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To attempt to extend the service life of a filter member by a method in which the filter member has a regeneration nozzle, and cleaning liquid is sent simultaneously toward a cleaning nozzle and the regeneration nozzle by a cleaning liquid pump. SOLUTION: In an apparatus equipped with a cleaning liquid tank 1 for storing cleaning liquid, a cleaning nozzle 2 for spraying the cleaning liquid to an object W, a cleaning liquid circulating means 3 for returning the sprayed cleaning liquid to the tank 1, a cleaning liquid pump 4 for sending the cleaning liquid in the tank 1 to the cleaning nozzle 2 side, a filter member 5 for filtering the cleaning liquid in the tank 1, and a regeneration nozzle 6, a cleaning liquid pump 1 sends the cleaning liquid in the tank 1 simultaneously toward both nozzles 2, 6.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

TECHNICAL FIELD The present invention relates to a cleaning device,
In particular, the present invention relates to a cleaning apparatus for sequentially cleaning objects to be cleaned supplied in a flow operation.

[0002]

2. Description of the Related Art A conventional cleaning apparatus includes a cleaning liquid tank for storing a cleaning liquid, a cleaning nozzle for spraying the cleaning liquid to an object to be cleaned, a cleaning liquid circulation means for guiding the sprayed cleaning liquid to the cleaning liquid tank, and a cleaning liquid tank. A cleaning liquid pump for feeding the cleaning liquid therein to the cleaning nozzle side.

[0003] Then, a filter member is provided in the cleaning liquid tank, and the cleaning liquid is supplied again to the cleaning nozzle via the filter member.

[0004]

However, in the above-described conventional example, since the deposits and dirt of the cleaning object adhere to the filter member within a short period of time, clogging occurs.
There was an inconvenience that the replacement had to be performed frequently.

[0005]

SUMMARY OF THE INVENTION It is an object of the present invention to provide a cleaning apparatus which solves the disadvantages of the prior art and extends the life of the filter member.

[0006]

According to the first aspect of the present invention, a cleaning liquid tank for storing a cleaning liquid, a cleaning nozzle for spraying a cleaning liquid onto an object to be cleaned, and a cleaning liquid circulation means for returning the sprayed cleaning liquid to the cleaning liquid tank. And a cleaning liquid pump for feeding the cleaning liquid in the cleaning liquid tank to the cleaning nozzle side.

Further, a filter member for filtering the cleaning liquid in the cleaning liquid tank and a regeneration nozzle for spraying the cleaning liquid on the filter member are provided, and the cleaning liquid pump simultaneously transmits the cleaning liquid from the cleaning liquid tank to both the cleaning nozzle and the regeneration nozzle. It adopts the configuration of sending in.

In the above-described configuration, first, the cleaning liquid in the cleaning liquid tank is sent to the cleaning nozzle by the cleaning liquid pump via the filter member, whereby the cleaning nozzle sprays the cleaning liquid on the object to be cleaned.

The cleaning liquid used for cleaning is returned to the cleaning liquid tank by the cleaning liquid circulation means, and is used again for cleaning. Due to the reuse of the cleaning liquid, dirt, deposits and the like on the object to be cleaned adhere to the filter member.

On the other hand, the above-mentioned cleaning liquid pump also supplies the cleaning liquid to the regenerating nozzle for spraying the cleaning liquid to the filter member, and simultaneously removes dirt and the like adhering to the filter member.

According to a second aspect of the present invention, the apparatus has the same structure as the first aspect of the invention, and is provided with a reproducing nozzle movably over the entire area of the filter member and biases the movement of the reproducing nozzle. And a moving biasing means.

In the above configuration, the same operation as in the first aspect of the invention is performed, and at the same time, the cleaning liquid is sprayed on the filter member while the regeneration nozzle moves over the entire area of the filter member.

According to a third aspect of the present invention, the cleaning liquid has the same configuration as the first aspect of the invention, and further has a filter member formed in an endless belt shape to take in the cleaning liquid in the cleaning liquid tank and supply the cleaning liquid to the cleaning pump. The intake member is provided in the cleaning liquid tank, and a transport means for transporting the filter member while constantly contacting the filter member with the intake of the cleaning liquid intake member is provided.

In the above construction, the same operation as in the first aspect of the present invention is performed, and the endless belt-shaped filter member is slid while being constantly in contact with the inlet of the cleaning liquid intake member. Is done.

At this time, the cleaning liquid in the cleaning liquid tank is always supplied to the cleaning nozzle and the regenerating nozzle via the filter member by driving the cleaning liquid pump, and the cleaning object is cleaned on one cleaning nozzle side, and the other is cleaned. In the regeneration nozzle, the filter member is cleaned in any of the endless belt-shaped regions.

According to the present invention, the above-described objects are achieved by the above-described configurations.

[0017]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A first embodiment of the present invention will be described with reference to FIGS. In the first embodiment, an object to be cleaned (hereinafter, referred to as a cleaning object) sequentially supplied by a belt conveyer B is used.
A cleaning apparatus 10 that cleans each workpiece W by spraying a cleaning liquid on the workpiece W).
FIG. 1 is a schematic configuration diagram thereof.

That is, the cleaning apparatus 10 includes a cleaning liquid tank 1 for storing a cleaning liquid, a cleaning nozzle 2 for spraying the cleaning liquid onto the workpiece W, and a cleaning liquid circulation means 3 for guiding the sprayed cleaning liquid to the cleaning liquid tank 1. The cleaning liquid in the cleaning liquid tank 1 is supplied to the cleaning nozzle 2 and a regeneration nozzle 6 described later.
And a cleaning liquid pump 4 to be fed to the side. The arrow lines connecting the components indicate the communication flow path of the cleaning liquid, and the cleaning liquid flows in the direction of the arrow.

The above-described belt conveyor B is disposed so as to penetrate through the inside of the cleaning device 10, and each work W on the belt conveyor B is disposed so as to pass immediately below the cleaning nozzle 2. I have.

Each part will be described in detail. First, the cleaning nozzle 2
A plurality of outlets are provided, and these are connected to the discharge side of the cleaning liquid pump 4 through the communication flow path, and the pressure applied to the cleaning liquid pump 4 sprays the cleaning liquid onto the work W guided downward. I do. As a result, a decomposing effect of the cleaning liquid and a peeling effect by spraying are generated, and dirt, an oil film, and deposits on the surface of the work W are cleaned.

Below the cleaning nozzle 2 via the belt conveyor B, the work W
A cleaning liquid vat (cleaning liquid circulation means) 3 is provided as a receiving tray for the cleaning liquid mixed with dirt or the like. The cleaning liquid vat 3 is set to have a size capable of receiving almost all of the cleaning liquid discharged from the cleaning nozzle 2, and the used cleaning liquid collected here is returned to the cleaning liquid tank 3 via the communication channel. .

Next, the configuration around the cleaning liquid tank 1 will be described with reference to FIG.

Since the cleaning liquid is circulated as described above, the cleaning liquid tank 1 is always filled with a substantially constant amount of the cleaning liquid. The inside of the cleaning liquid tank 1 is divided into two parts, one of which is a cleaning liquid area in which dirt is in communication with the cleaning liquid vat 3 via the communication flow path, and the other is through the communication flow path. This is a clean cleaning liquid area connected to the cleaning liquid pump 4.

The boundaries between these regions are defined by an upper partition plate 11 and a lower partition plate 12 provided in the cleaning liquid tank 1 and a filter member 5 provided between the partition plates 11 and 12.
It consists of. The upper partition plate 11 extends from the side wall on the cleaning liquid pump 4 side of the cleaning liquid tank 1 to the other side wall facing the lower partition plate 12, and the lower partition plate 12 has a predetermined height from the bottom surface of the cleaning liquid tank 1 upward. It is standing upright. The filter member 5 is disposed between the partition plates 11 and 12 at a predetermined inclination angle, and the cleaning liquid in the cleaning liquid tank 1 is discharged by the operation of the cleaning liquid pump 4, and contaminants are mixed with the cleaning liquid. The cleaning liquid is moved from the cleaning liquid area to the clean cleaning liquid area via the filter member 5, and the filtration is performed.

In the vicinity of the filter member 5 in the cleaning liquid region where dirt is mixed, a regeneration nozzle 6 for spraying the cleaning liquid toward the filter member 5 is provided. The regeneration nozzle 6 is connected to the discharge side of the cleaning liquid pump 4 via a communication channel. That is, both the cleaning nozzle 2 and the regeneration nozzle 6 communicate with the discharge side of the cleaning liquid pump 4 in a state where the communication flow paths are branched. Thus, the operation of blowing the cleaning liquid from the regeneration nozzle 6 is energized. Here, the regeneration nozzle 6 may be provided on the side of the clean cleaning liquid region (downstream side) of the filter member 5. As a result, the cleaning liquid is sprayed from the direction opposite to the direction in which the deposits and the like that have adhered to the filter member 5 are sprayed, and the removal is more effectively performed.

Further, the regenerating nozzle 6 has an outlet having a width capable of uniformly spraying the filter member 5 in the width direction (perpendicular to the plane of FIG. 2). Further, the regeneration nozzle 6 is disposed so as to blow in a direction substantially perpendicular to the plane of the filter member 5, but the angle with respect to the filter member 5 may be set to a more effective predetermined angle. good.

The reproducing nozzle 6 has arrows U and D shown in FIG.
It is held by the moving urging means 7 that moves along the direction. The movement urging means 7 includes, for example, a guide rail disposed along the inclination direction of the filter member 5, a slider reciprocally movable along the guide rail, and a drive for urging the movement of the slider. It comprises a mechanism and a support member for connecting the regeneration nozzle 6 to the slider. In such a configuration, the regeneration nozzle 6 is connected to the cleaning liquid pump 4 by a flexible pipe such as a tube. Or alternatively
A configuration in which the reproduction nozzle 6 is manually moved may be adopted. By these movement urging means 7, the spraying operation of the cleaning liquid by the regeneration nozzle 6 can be performed over the entire area of the filter member 5.

Hereinafter, the operation of the first embodiment having the above configuration will be described.

First, the cleaning liquid in the cleaning liquid tank 1 is sent to the cleaning nozzle 2 by the cleaning liquid pump 4, whereby the cleaning liquid is sprayed from the cleaning nozzle 2 onto the work W.

As a result, dirt, oil film and other deposits adhering to the work W conveyed below the cleaning nozzle 2 by the belt conveyor B are separated from the surface of the work W, and these deposits and the like are removed together with the cleaning liquid. It flows into the vat 3 and is returned to the cleaning liquid tank 1 from here.

Here, the cleaning liquid pump 4 is continuously driven, and the cleaning liquid is transferred from the contaminated cleaning liquid area in the cleaning liquid tank 1 to the clean cleaning liquid area via the filter member 5, and the cleaning liquid is re-used at any time. Usage is performed. Then, although the cleaning liquid is reused, dirt and adhered substances of the cleaning target adhere to the filter member 5. However, since the cleaning liquid is sprayed from the regeneration nozzle 6, the filter member 5 transmits the cleaning liquid. Deposits are removed. Also,
During the removal operation, the regeneration nozzle 6 is moved by the movement urging means 7 in the directions of the arrows U and D at any time, and thus is performed over the entire area of the filter member 5.

The removed deposits and the like settle at the bottom in the cleaning liquid tank 1 with the passage of time. Here, since the filter member 5 is provided on the upper part of the partition plate 12, the precipitate is blocked by the partition plate 12 so as not to adhere to the filter member 5.

As described above, in the first embodiment, it is possible to remove the adhered matter of the work W adhered to the filter member 5 by the regeneration nozzle 6 and to extend the life of the filter member 5. It is possible to improve the economical efficiency of the entire apparatus by improving the durability of the consumable parts.

When the filter member 5 is disposable, the frequency of the replacement can be reduced, the interruption of the cleaning operation can be avoided, the replacement operation can be reduced, and the time efficiency and workability in the cleaning operation can be reduced. It is possible to improve.

Further, the occurrence of clogging of the filter member 5 is prevented, whereby the washing operation of the washing liquid is carried out satisfactorily, the washing liquid can be always supplied sufficiently, and the washing effect can be improved. And the filter member 5 can obtain an effect similar to a so-called cross-flow type filter.

For the same reason, the burden on the suction / discharge operation of the cleaning liquid pump 4 can be reduced, and the maintainability of the apparatus can be improved.

Further, since the regeneration nozzle 6 is configured to move over the entire area of the filter member 5 by the moving urging means 7, the entire area of the filter member 5 can be cleaned, and the above-described effects can be further improved. It is possible.

Further, in the cleaning apparatus 10, since the cleaning liquid is supplied to both the cleaning nozzle 2 and the regenerating nozzle 6 by the cleaning liquid pump 4, there is no need to separately provide a cleaning liquid pump. The number of parts can be reduced, and productivity and economic efficiency can be improved. At the same time, it is possible to reduce the size of the entire cleaning device.

Further, in the cleaning device, an operation (backwashing) of temporarily stopping the cleaning operation and reversely operating the cleaning liquid pump is performed in accordance with the state of contamination of the filter member. By this operation, the cleaning liquid in the communication flow path flows backward, and the cleaning liquid moves from the clean cleaning liquid area to the contaminated cleaning liquid area via the filter member in the cleaning liquid tank, thereby attaching the work adhered to the filter member. Kimono and the like are removed.
This backwashing operation must be performed after the cleaning operation is temporarily stopped. Therefore, if it is performed frequently, the efficiency of the cleaning operation is reduced. However, in the first embodiment, the deposits on the filter member 5 are removed. Since it is removed, the number of times of the backwash operation can be effectively reduced, thereby improving the working efficiency.

A second embodiment of the present invention will be described with reference to FIGS. In the second embodiment, since all the components except for the configuration around the cleaning device 10 and the cleaning liquid tank 1 shown in FIG. 1 are the same, the same reference numerals are used for such components, and duplicate description will be omitted. Shall be.

That is, the cleaning device 20 shown in the second embodiment has a cleaning liquid tank 21 shown in FIG. 3 in which a cylindrical cleaning liquid intake member 22 shown in FIG. Fixedly equipped.

Below the cleaning liquid intake member 22 inside the cleaning liquid tank 21, a regeneration nozzle 26 is provided with its outlet directed toward the cleaning liquid intake member 22.

Then, the filter member 2 having an endless belt shape is wound around the outer peripheral surface of the cleaning liquid intake member 22 halfway.
5 is provided, and a transport unit 23 for transporting the filter member 25 while sliding it while keeping a part of the filter member 25 in contact with the cleaning liquid intake member 22 is provided near the outside of the cleaning liquid tank 21 at all times. It is arranged.

Further, the cleaning liquid tank 2 is
An air blow nozzle 27 that blows air from a contact surface side of the filter member 25 with the cleaning liquid intake member 22 toward the opposite surface of a part of the filter member 25 conveyed to the outside of the filter member 25, and a portion below the air blow nozzle 27. The cleaning device 20 is equipped with a dust box 28 for storing the deposits separated from the filter member 25 by the spraying.

The components will be described in detail.
Is formed in a cylindrical shape as shown in FIG. 4, has a hollow interior, and has upper and lower ends covered by flat surfaces. A discharge port 22A provided on the upper flat surface is connected to the cleaning liquid pump 4 via a communication channel. In addition, in the contact area of the above-described filter member 25 on the outer peripheral surface, countless cleaning liquid intake ports 22B are formed.

FIG. 5 shows a cross section of the intake port 22B in FIG. 4 along the center axis direction. As shown in FIG. 5, the cross section of the intake 22B has a shape protruding outward with a radius R, and a shape entering the inside with a radius r at an edge of the intake 22B. With this protruding shape, the state of contact with the filter member around the intake port 22B is further ensured, and the filter member 25 can smoothly contact with the filter member 25, thereby preventing the filter member 25 from being damaged or worn. be able to.

When the cleaning liquid intake member 22 is provided in the cleaning liquid tank 21 as shown in FIG.
2B is directed substantially downward, and these intake ports 22B are all covered by the filter member 25.

The regeneration nozzle 2 is located near the plurality of intake ports 22B of the cleaning liquid intake member 22 provided in the cleaning liquid tank 21.
The outlet of the regeneration nozzle 26 is formed to have a width substantially equal to the length of the cleaning liquid intake member 21 in the central axis direction so that the cleaning liquid can be uniformly sprayed on the plurality of intakes 22B. Have been. Also, the reproduction nozzle 26
Is connected to the cleaning liquid pump 4 via a communication channel, and has a structure in which the cleaning liquid is supplied simultaneously with the cleaning nozzle 2 not shown.

The filter member 25 is in the form of an endless belt as described above, and one end thereof is
The other end is transported to the outside of the cleaning liquid tank 21 by a plurality of transport rollers 23B constituting the transport unit 23.

The transport means 23 comprises a plurality of transport rollers 23B and a drive roller 23A rotated by a drive motor (not shown) as described above. Each of the transport rollers 23B stretches the filter member 25 so as not to be loosened. In particular, the filter member 25 is designed to maintain a contact state in a region where each of the intake ports 22B of the cleaning liquid intake member 22 is provided. A predetermined tension is applied to 25.

Compressed air is supplied to the air blow nozzle 27 by a compressor (not shown) or the like, and the compressed air is blown out from its outlet. The air blow nozzle 27 is disposed close to a region of the filter member 25 outside the cleaning liquid tank 21, and its outlet faces a contact surface of the filter member 25 with the cleaning liquid intake member 22. Therefore, the deposits and the like adhering to the surface opposite to the contact surface are forcibly removed. Then, the removed deposits and the like are stored in a dust box 28 provided below.

The operation of the second embodiment will be described.

First, by driving the cleaning liquid pump 4, the cleaning liquid in the cleaning liquid tank 21 is sucked from the cleaning liquid intake member 22 through the filter member 25 and sent to the cleaning nozzle 2. Thus, the cleaning liquid is sprayed from the cleaning nozzle 2 onto the work W.

When the above-described cleaning is performed, the deposits and the like are separated from the surface of the work W, return to the cleaning liquid tank 21 via the cleaning liquid vat 3 together with the cleaning liquid, and the deposits and the like are mixed in the cleaning liquid in the cleaning liquid tank 21. You.

Here, since the cleaning liquid pump 4 is continuously driven, the cleaning liquid in the cleaning liquid tank 21 is sucked into the cleaning liquid pump 4 side from the intake port 22B of the cleaning liquid intake member 22 as needed. At this time, the cleaning liquid is sprayed on the filter member 25 wound around the cleaning liquid intake member 22 by the regeneration nozzle 26 connected to the discharge side of the cleaning liquid pump 4, and the filter member 25 attached to the vicinity of the intake port 22B.
Is removed.

At the same time, the filter member 25 that covers each of the intakes 22B is constantly moved by the transport means 23.
Since it is slid and conveyed while being in contact with the area around B, the amount of deposits and the like adhering to the filter member 25 is smaller than that of the fixed filter member.

The transported filter member 25 is
The compressed air blown by the air blow nozzle 27 on the downstream side of the intake port 22B removes deposits remaining on the surface thereof, and is conveyed again to the intake port 22B of the cleaning liquid intake member 22 in a clean state. .

FIGS. 6 and 7 are diagrams showing the relationship between the particle size (grain roughness) of the deposits and the like passing through the filter member from the start of the cleaning operation and the flow rate of the cleaning liquid. FIG. 6 shows the case of the above-described cleaning apparatus 20, and FIG. 7 shows the case of the cleaning apparatus without the regeneration nozzle 26.

In any of the above cases, since deposits and the like adhere to the filter member as time elapses from the start of cleaning, clogging occurs, the particle size passing through the filter member decreases, and the flow rate of the passing cleaning solution decreases. Each state is shown in each figure, but when the regeneration nozzle is not provided, the particle diameter continuously decreases and the flow rate of the cleaning liquid decreases more rapidly, whereas the regeneration nozzle is provided. In this case, the decrease in the particle diameter is stabilized at a constant value, and the decrease in the flow rate of the cleaning liquid is accordingly stabilized at a constant value.

In the second embodiment, since the work W is cleaned as described above, the same effect as that of the above-described cleaning device 10 is obtained, and the endless belt-shaped filter member 25 is used in a transport state. In this way, the entire surface area of the filter member 25 is used without having to extend and equip the filter member 25. That is, it is possible to reduce the size of the entire device.

Further, since the adhering substances and the like are removed from the filter member 25 which is always in a transport state by the regeneration nozzle 26, the filter member 25 can be always kept in a clean state. For this reason, the filter member 25
It is possible to improve the service life of the filter, further improve the economy of the entire apparatus, workability, and the cleaning effect.
5 can obtain an effect close to what is called a cross-flow type filter.

Further, since an air blow nozzle 26 for removing adhering matter remaining on the surface of the filter member 25 is provided in a region outside the cleaning liquid tank 21 of the filter member 25, the filter member 25 is further cleaned and the cleaning liquid is removed again. Filtration can be performed, whereby the filter member 25 can be further cleaned, and each of the above effects can be made more effective.

[0063]

According to the first aspect of the present invention, it is possible to remove the adhering matter of the object to be cleaned adhering to the filter member by the regenerating nozzle, and it is possible to extend the life of the filter member. At the same time, the economy of the entire apparatus can be improved by improving the durability of the consumable parts.

Further, when the filter member is disposable, the frequency of replacement can be reduced, thereby avoiding the interruption of the cleaning work and reducing the replacement work, and improving the time efficiency and workability in the cleaning work. It is possible to achieve.

Further, the occurrence of clogging of the filter member can be prevented, whereby the washing operation of the washing liquid can be carried out satisfactorily, the washing liquid can be always supplied sufficiently, and the washing effect can be improved. In addition, it is possible to obtain an effect similar to that of a so-called cross-flow type filter member.

For the same reason, the suction of the cleaning liquid pump
The burden on the discharge operation can be reduced, and the maintainability of the device is improved.

Further, since the cleaning liquid is supplied to both the cleaning nozzle and the regenerating nozzle by one cleaning liquid pump, it is not necessary to provide separate pumps, thereby reducing the number of parts of the apparatus. It is possible to improve productivity and economic efficiency. At the same time, it is possible to reduce the size of the entire cleaning device.

According to the second aspect of the present invention, since the regeneration nozzle is moved over the entire area of the filter member by the moving urging means, the entire area of the filter member can be cleaned, and the above effects can be further improved. It is possible to improve.

The third aspect of the present invention has the same effect as the first aspect of the present invention, and uses an endless belt-shaped filter member in a transported state so that the filter member can be installed without being extended. The entire surface area is used. That is, it is possible to reduce the size of the entire device in the same manner as the large filter member in a small space.

Further, since the adhering substances and the like are removed from the filter member which is always in a transport state by the regeneration nozzle, the filter member can be always kept in a clean state. For this reason, it is possible to extend the life of the filter member, to further improve the economy of the entire apparatus, the workability, and the cleaning effect, and to obtain an effect similar to that of a so-called cross-flow filter. is there.

Since the present invention is constructed and functions as described above, it is possible to provide an excellent cleaning device which has not been conventionally provided.

[Brief description of the drawings]

FIG. 1 is a schematic configuration diagram showing a first embodiment of the present invention.

FIG. 2 is a schematic configuration sectional view of a main part of the cleaning device disclosed in FIG. 1;

FIG. 3 is a schematic configuration diagram showing a second embodiment of the present invention.

FIG. 4 is a perspective view showing a cleaning liquid intake member of the cleaning device disclosed in FIG. 3;

FIG. 5 is a sectional view showing an inlet of the cleaning liquid intake member disclosed in FIG. 4;

FIG. 6 is a diagram illustrating a relationship between a flow rate of a cleaning liquid and a size of a particle size of an adhering substance or the like passing through a filter member over time from the start of a cleaning operation according to the second embodiment.

FIG. 7 is a diagram showing a relationship between a flow rate of a cleaning liquid and a size of a particle size of a deposit or the like passing through a filter member with the passage of time from the start of a cleaning operation of a cleaning device without a regeneration nozzle.

[Explanation of symbols]

 1, 21 Cleaning liquid tank 2 Cleaning nozzle 3 Cleaning liquid vat (Cleaning liquid circulation means) 4 Cleaning liquid pump 5, 25 Filter member 6, 26 Regeneration nozzle 7 Moving biasing means 10, 20 Cleaning device 22 Cleaning liquid intake member 22B Intake port 23 Transport means

Claims (3)

[Claims] 1. A cleaning liquid tank for storing a cleaning liquid, a cleaning nozzle for spraying a cleaning liquid onto an object to be cleaned, a cleaning liquid circulation unit for returning the sprayed cleaning liquid to the cleaning liquid tank, and a cleaning liquid in the cleaning liquid tank for cleaning the cleaning liquid. A cleaning device including a cleaning liquid pump fed to a nozzle side, comprising: a filter member for filtering the cleaning liquid in the cleaning liquid tank; and a regeneration nozzle for spraying the cleaning liquid on the filter member, wherein the cleaning liquid pump includes the cleaning nozzle and the regeneration nozzle. The cleaning liquid in the cleaning liquid tank is simultaneously fed to both of the cleaning liquid tanks. 2. The apparatus according to claim 1, wherein said regeneration nozzle is provided so as to be movable over the entire area of said filter member, and further comprises a moving urging means for urging the movement of said regeneration nozzle. Cleaning equipment. 3. The cleaning liquid taking-in member, wherein the filter member is formed in an endless belt shape, and a cleaning liquid taking-in member for taking in the cleaning liquid in the cleaning liquid tank and supplying the cleaning liquid to the cleaning pump is provided in the cleaning liquid tank. 2. The cleaning apparatus according to claim 1, further comprising a conveying unit that conveys the filter member while keeping the filter member in contact with an inlet of the member.