JPH1038792A - Surface characteristics measuring system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a surface characteristics measuring system for measuring the characteristics of a thin film formed on the surface of a solid or a basic material in which the stripping position of the thin film can be measured easily and accurately while reducing the cost and the size. SOLUTION: A contact needle 2 connected through a resilient body 11 fixed to an oscillatory section 14 is brought into contact with the surface of a sample 4 and subjected to a shaking load while moving the sample 4 in the Y direction. Subsequently, the contact needle 2 is then brought into contact with the test starting position of the sample 4 and subjected to a constant load while moving the sample 4 in the Y direction and then the surface profile of the sample 4 is measured. Lateral oscillation of the contact needle 2 is detected by means of a pair of coils (24a, 24b) arranged in the horizontal direction on the opposite sided of the end part of the resilient body 11 and vertical oscillation of the contact needle 2 in the thickness direction of the sample 4 is detected by means of a pair of coils (25a, 25b) arranged in the vertical direction on the opposite sides of the end part of the resilient body 11.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to an apparatus for measuring mechanical properties of a solid surface or a thin film.

[0002]

2. Description of the Related Art For example, for thin films of metals and inorganic materials manufactured by vacuum deposition, sputtering, plasma CVD, or the like, the adhesion between the film and the substrate, particularly the coefficient of friction, hardness, and surface, which are indicators of the adhesion. 2. Description of the Related Art A surface characteristic measuring device for measuring characteristics such as roughness is known.

In such a surface characteristic measuring device,
The surface of the sample is moved in one direction while vibrating the contact needle in contact with the sample surface at low frequency, and the vibration output corresponding to the frictional force between the contact needle and the sample surface is detected. There has been proposed a measuring device for measuring surface physical properties by measuring surface roughness. According to this device, when the contact needle is vibrated while increasing the load of the contact needle, the vibration output increases,
When the thin film is separated from the base material, a high-frequency noise waveform is generated, so that it is possible to detect the occurrence of the separation.

In the above-mentioned surface characteristic measuring apparatus, it is necessary to associate the relationship between the place where the peeling occurred and the load where the peeling occurred. However, when observing the place where the peeling occurred, it is necessary to visually check the place where the peeling occurred. The measurement is performed, or the sample is set on a separately provided microscope and observed, or measured by a surface roughness measuring device. For this reason, it was not possible to accurately correlate the relationship between the location where the separation occurred and the load.

[0005] In view of the above, there has been proposed a surface characteristic measuring apparatus as described above which can also measure the amount of displacement in the depth direction with respect to the sample (Japanese Patent Laid-Open No. 4-315).
No. 033). According to this device, when measuring the characteristics of a thin film or a fixed surface, it is possible to measure the film thickness of the thin film and the amount of deformation in the depth direction of the material for a multilayer structure, etc. Physical properties can be evaluated.

[0006]

However, in the surface characteristic measuring apparatus disclosed in the above-mentioned Japanese Patent Application Laid-Open No. 4-315033, a sensor for detecting peeling is provided in the cartridge of the contact needle, and the cartridge and the contact are detected. Since the displacement sensor of the electrostatic capacitance type is provided in the vibrating portion main body holding the needle, there is a demand for improving the size and complexity of the sensor portion in terms of cost and size.

SUMMARY OF THE INVENTION An object of the present invention is to provide a surface characteristic measuring apparatus capable of easily associating a relationship between a portion where a peeling has occurred and a load with a low cost and a small size.

[0008]

FIG. 1 shows an embodiment of the present invention.
6, the invention of claim 1 is directed to a sample stage 3 on which a sample 4 is placed, a moving unit for moving the sample stage 3 in a predetermined direction, and a sample placed on the sample stage 3. 4 a contact needle 2 that contacts the surface and vibrating means 6 and 7 for vibrating the contact needle 2
A load means 11 for applying a load to the contact needle 2;
And a horizontal vibration displacement of the contact needle 2 due to friction with the surface of the sample 4 by detecting a vertical displacement and a horizontal displacement of the displacement detecting portion 23 of the retaining device 11 respectively. Detecting means 24 for detecting vertical displacement of the contact needle 2 due to a change in the thickness direction of the sample 4
a, 24b, 25a, and 25b achieve the above object.

According to a second aspect of the present invention, the holding means 11 has one end and the other end supported by the apparatus main body at an intermediate point so as to be vertically and horizontally displaceable, a contact needle 2 at one end, and a displacement detecting point 23 at the other end.
Is provided around the displacement detection point 23.
1. A pair of sensor elements 24 for detecting the displacement in the left-right direction
a, 24b and a pair of sensor elements 25a, 25b for detecting displacement in the up-down direction are disposed to face each other in the circumferential direction.

According to the first aspect of the present invention, when the sample 4 is moved in a predetermined direction and a vibration load is applied to the sample 4 via the contact needle 2, the right and left due to the friction of the contact needle 2 with the surface of the sample 4. The displacement detection portion 23 of the holding means 11 is displaced according to the displacement. The horizontal displacement of the displacement detecting portion 23 is detected by the detecting means 24a and 24b. When a load is applied to the sample 4 via the contact needle 2 while moving the sample 4 in a predetermined direction without vibrating the contact needle 2, the vertical displacement due to the unevenness of the contact needle 2 with the surface of the sample 4 occurs. The displacement detection portion 23 of the holding means 11 is displaced. And this displacement detection point 2
3 is detected by the detecting means 25a and 25b. According to the invention of claim 2, since the holding means 11 is supported at the intermediate point, the displacement detection portion 23 moves in accordance with the displacement of the contact needle 2. The displacement of the displacement detecting portion 23 is detected by a pair of sensor elements 24a and 24b for detecting displacement in the left and right direction and a pair of sensor elements 25a and 25b for detecting displacement in the up and down direction.

In the section of the means for solving the above-mentioned problems, which explains the configuration of the present invention, the drawings of the embodiments of the present invention are used to make the present invention easier to understand. However, the present invention is not limited to this.

[0012]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a diagram schematically showing a configuration of a surface characteristic measuring device according to an embodiment of the present invention.
As shown in FIG. 1, in the surface characteristic measuring device according to the present embodiment, a contact needle 2 is connected to a box-shaped vibration device 1 via an elastic body 11 attached to a vibration portion main body 14. At the time of measurement, the contact needle 2 is in contact with the surface of a sample 4 fixed on a sample table 3 incorporating an XY-axis fine movement device.

The vibration device 1 comprises a Z-axis fine movement device 5, two oscillators 6, and a vibration transmission plate 8 connected to the front of a speaker 7 connected to each oscillator 6. Further, the vibration device 1 is provided with a load detector 12 for detecting a load on the sample 4. The Z-axis fine movement device 5, the load detector 12, and the measurement processing unit 9 described later are controlled by the control device 13 as described later.

The surface characteristic measuring apparatus according to the present embodiment is configured to be able to vibrate to about 20 to 200 Hz, and the load applied to the contact needle 2 is adjusted by the elastic body 11. Up to about 1 kg. The radius of curvature of the contact needle 2 is 15 μm
If it is on the order, the peeling of the film on the sample surface can be sufficiently measured with a load of about 100 g. The spring constant of the elastic body 11 and the radius of curvature of the contact needle 2 can be appropriately selected according to the type of thin film or surface to be measured and the film pressure, and the material thereof can be appropriately selected. For the contact needle 2, diamond is used.

FIG. 2 is a view showing a connection state between the contact needle 2 and the vibrating section main body 14, and FIG. 3 is a view showing a configuration of a detection section described later. As shown in FIGS. 2 and 3, the contact needle 2 is fixed to one end of the elastic body 11 that moves around a fulcrum 22 connected to the vibrating section main body 14. A magnet 23 is fixed to the other end of the elastic body 11, and a pair of coils 24 a and 24 b are arranged on a horizontal line passing through the center of the magnet 23, and a pair of coils 25 a and 25 b are arranged on a vertical line passing through the center of the magnet 23. It is arranged. The coils 24a and 24b detect the horizontal displacement of the contact needle 2, and the coils 25a and 25b detect the displacement of the contact needle 2.
The vertical displacement of is detected. When the elastic body 11 moves around the fulcrum 22, the distance between the magnet 23 and the coils 24a, 24b, 25a, 25b fluctuates, and as a result, the coils 24a, 24b, 25a, 25
The induced current flowing through b changes. The change in the induced current is detected as the displacement of the contact needle 2, subjected to arithmetic processing by the measurement processing unit 9, and can be observed by the oscilloscope 10.

Next, the operation of this embodiment will be described. First, in order to measure the adhesive force of the thin film of the sample 4, for example, horizontal transverse vibration (for example, 30 Hz) is applied to the contact needle 2 from the oscillator 6 through the speaker 7, and the sample stage 6 is driven to move the sample 4 to the Y axis. (Moving speed 0.15mm /
The load is gradually applied. The displacement of the contact needle 2 is determined by the coils 24a, 24b, 25
a, 25b, and the detection result is stored in the oscilloscope 10 and the recorder 15. At this time, the signal output increases with an increase in the load, but a high-frequency noise waveform is generated when the film is peeled off, so that the peeling time can be known from the noise waveform. The load at this point is defined as the peeling load, and the adhesive force fs is determined by the following equation in the measurement processing unit 9.

(Equation 1) In the above formula, fs is the adhesive force, W is the peeling load, r is the radius of curvature of the tip of the contact needle 2, and P is the Brinell hardness of the substrate.

FIG. 4 schematically shows the state of the surface of the sample 4 when this test is completed. As shown in FIG.
The surface of the sample 4 has a scratch formed by the contact needle 2.

After the film on the surface of the sample 4 is peeled in this way, the driving of the oscillator 6 is stopped and the sample table 6 is returned to the position before the start of the test. Then, as shown in FIG.
Is brought into contact with the test start position S of the sample 4 to apply a constant load. Then, the sample table 6 is driven to move the sample 4 in the Y-axis direction. Thereby, the contact needle 2 moves on the surface of the sample 4 as shown in FIG. 5, and the displacement of the contact needle 2 in the vertical direction with respect to the surface of the sample 4 is stored in the oscilloscope 10 and the recorder 15.

The surface of the sample 4 thus obtained is
FIG. 6 shows the correspondence between the signal Q representing the surface shape of the sample 4 and the signal Q. As shown in FIG. 6, since a large peak is generated in the signal Q at a position corresponding to the position A where the film of the sample 4 has peeled, it is easily recognized that the film of the sample 4 has peeled at this position. be able to. In addition, by integrating this value, the thickness of the peeled film can be known.

As described above, according to the present embodiment, after the test for peeling the film formed on the surface of the sample 4 is performed,
It is possible to easily and accurately know at which position of the sample 4 peeling has occurred in the same apparatus. Further, a sensor for detecting peeling and a sensor for measuring the surface shape are connected to the elastic body 11.
Are arranged around the magnets 23 at the end portions, respectively, so that the cost can be reduced and the size of the device can be reduced as compared with the conventional device.

In the above-described embodiment, the displacement of the contact needle 2 is detected by the coils 24a, 24b, 25a, 25b.
Other displacement detectors such as optical displacement sensors can be used.

In the correspondence between the above-described embodiment and the claims, the elastic body 11 replaces the loading means and the holding means with the magnet 23.
Are the displacement detection points, and the coils 24a, 24b, 25a, 2
5b constitutes a detecting means.

[0023]

As described in detail above, according to the first aspect of the present invention, when measuring the characteristics of a thin film or a solid surface, a sample is set by the same device after a test for peeling the film is performed. To measure the surface shape of the sample without fixing,
The displacement of the contact needle in two orthogonal directions can be easily and accurately known. In addition, since it is not necessary to move the sample subjected to the test for peeling the film to another measurement device, the test can be performed efficiently. Further, since the displacement of the contact needle in four directions, up, down, left and right, is performed by one detecting means, the size can be reduced. According to the second aspect of the present invention, since the sensor element is arranged around the displacement detection portion of the holding means, the cost can be reduced and the size of the device can be reduced as compared with the conventional device.

[Brief description of the drawings]

FIG. 1 is a diagram schematically showing a configuration of a surface characteristic measuring device according to an embodiment of the present invention.

FIG. 2 is a diagram showing a configuration of a contact needle.

FIG. 3 is a diagram showing a configuration of a coil;

FIG. 4 is a diagram showing a path of a contact needle on a sample surface.

FIG. 5 is a diagram showing a path of a contact needle for performing shape measurement on a sample surface.

FIG. 6 is a diagram showing a correspondence between a signal representing a surface shape and a signal representing a surface shape of a sample after a test.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Vibration device 2 Contact needle 3 Sample stand 4 Sample 5 Z-axis fine movement device 6 Oscillator 7 Speaker 8 Vibration transmission plate 9 Amplifier 10 Oscilloscope 11 Elastic body 12 Load detector 13 Control device 23 Magnet 24a, 24b, 25a, 25b Coil

Claims (2)

[Claims] 1. A sample stage on which a sample is placed, a moving means for moving the sample stage in a predetermined direction, a contact needle contacting the surface of the sample placed on the sample stage, and a vibrating contact needle. A vibration means for applying a force to the contact needle, a load means for applying a load to the contact needle, a holding means for holding the contact needle, and a vertical and horizontal two-direction displacement of a displacement detection point of the holding means, thereby detecting the sample. A surface characteristic detecting means for detecting left and right vibration displacement of the contact needle due to friction with a surface and detecting vertical displacement of the contact needle due to a change in a thickness direction of the sample. measuring device. 2. The holding means has one end and the other end supported by the apparatus main body at an intermediate point so as to be vertically and horizontally displaceable, the contact needle being provided at the one end, and the displacement detecting portion being provided at the other end. A pair of sensor elements for detecting the displacement of the holding means in the left-right direction and a pair of sensor elements for detecting the displacement in the up-down direction are arranged around the displacement detection point so as to face each other in the circumferential direction. The surface characteristic measuring device according to claim 1, wherein the surface characteristic measuring device is provided.