JPH1038721A - Method and equipment for measuring pressure distribution - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enhance the grinding accuracy and the work efficiency significantly by measuring the pressure distribution at plurality of positions on any one of opposing faces or both when they are pressed against each other. SOLUTION: A plurality of pressure measuring means 1 are contained, respectively, in three containing parts 3 formed at a constant interval on a cushion spacer 2. They are set between upper and lower elastic sheets 4, 5 and mounted on a supporting base 6. A pressing weight 7 is larger than the spacer 2 and the elastic sheets 4, 5 and pressure distribution is measured when the weight is mounted in the center while being balanced. According to the method, pressure distribution in a press contact mechanism can be measured appropriately and the absolute value of pressure distribution can be measured appropriately. Consequently, the characteristics of a grinding mechanism and other various working machines can be determined and an accurate and rational work can be realized by determining appropriate processing conditions.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pressure distribution measuring method and apparatus, and more particularly to a method and apparatus capable of accurately measuring a pressure distribution at a surface contact portion in various types of mechanical devices. is there.

[0002]

2. Description of the Related Art In general, various kinds of processing work machines perform processing work under appropriate surface contact conditions in order to enhance work efficiency. Under such surface contact conditions, it is necessary to manage the pressing contact conditions. Is of course preferred. That is, it is indispensable to measure the pressure distribution at the surface contact portion in order to increase the efficiency or uniformity of the processing operation in, for example, a grinder or a polishing machine.

[0003] However, a preferred method for measuring the pressure distribution of a grinding machine or the like as described above has not yet been established, and for this reason, pressure-sensitive paper is actually used.

[0004]

In the case of the prior art as described above, it is difficult to obtain the absolute value of the pressure even if the pressure-sensitive paper is used, and the type of the pressure-sensitive paper used is determined by trial and error. In general, it is a condition that the pressure distribution of the grinding machine or the like is parallel, and it is not easy to obtain a preferable measurement result under such conditions.

Therefore, even if it is understood that the measurement of the pressure distribution between the grinding wheels in a grinding machine or the like can greatly improve the grinding accuracy and the work efficiency, it is impossible to make such a measurement. Therefore, there is a disadvantage that it is not possible to perform a rational operation in which the material and the working state of the processing member in the grinding machine or the like are appropriately determined.

[0006]

The present invention has been studied to solve the above-mentioned problems in the prior art, and succeeded in appropriately measuring the pressure distribution at each position when the opposing surface was pressed. That
It is as follows.

A pressure distribution measuring method characterized by measuring a pressure distribution at a plurality of positions on one or both surfaces when opposing surfaces are pressed against each other. It is preferable to measure the pressure distribution at each of a plurality of positions by interposing a cushioning spacer adapted to enclose the pressure measuring means on the side. Further, it is appropriate to interpose an elastic material having a compression elastic modulus equal to or lower than the spacer on the pressure side and the pressure receiving side of the cushioning spacer, and particularly to reduce the compression elastic modulus of the pressure side elastic material.

A pressure having a plurality of pressure measuring means for measuring a pressure distribution at each position when a pressing force is applied between the opposing surfaces. It is a distribution measuring device, and it is preferable that a diaphragm is provided on one side of the pressure measuring means, a disc-shaped pressure measuring means having a strain gauge adhered thereto is used, and a plate-like elastic body is attached to one side thereof. .

Further, the plate-like elastic body attached to one side of the pressure measuring means as described above is characterized in that it has flexibility so that the pressure value can be detected by the pressure measuring means. A plurality of such pressure measuring means are fitted and disposed on an elastic plate member having appropriate hardness, and the elastic plate member is interposed between porous elastic plate members which are made more flexible. Or, a disk-shaped processing member is provided between the lower surface plate and the upper surface plate, and a plurality of pressure distribution measuring mechanisms having the above-described configuration are equiangularly formed between the processing members. A pressure distribution measuring device characterized by being provided can be provided.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Specific embodiments of the present invention as described above will be described with reference to the accompanying drawings as appropriate. In the present invention, a pressure distribution measurement as shown in FIGS. A plurality of pressure measuring means 1 are accommodated in three accommodating portions 3 formed at equal intervals on a cushioning spacer 2 and set between upper and lower elastic sheet members 4 and 5, respectively. The weight distribution is measured when the weight 7 is placed on the support table 6 and the pressurized object 7 is larger than the spacer 2 and the elastic sheet members 4 and 5, and is placed in a balanced manner at the center thereof. Things.

As for the pressure measuring means 1 of the measuring apparatus as described above, as shown in FIGS. 3 and 4, a disk having a diameter of 4 to 20 mm and a thickness of about 0.422 mm is formed. A measuring part 9 such as a strain gauge is attached to the inner surface of the central part of the diaphragm 8 attached to the diaphragm 8. When a pressure acts on the diaphragm 8 and the diaphragm 8 bends as shown by an imaginary line shown in FIG. This strain is converted into pressure by a digital static strain meter.

The inventor of the present invention has proposed a pressure measuring means 1 having a diameter of 6 mm and a thickness of 0.6 mm in a disk shape. A strain gauge of about 2 mm was stuck, and a digital static strain meter was used as a measuring device to measure the pressure distribution by adopting a mechanism for converting strain into pressure. That is, in this case, the spacers 2 having the same thickness as the measuring means 1 and the elastic sheet members 4 and 5 used above and below the measuring means 1 are essentially provided so as to uniformly apply the pressure caused by the weight 7 or the like. It is an auxiliary material that causes the applied pressure to act on the pressure measuring means 1 properly. However, the flexibility (hardness on the other hand) is required to have a function of optimizing the direction or state of action of the pressure on the measuring means 1 and a function of increasing the efficiency of the pressure action. However, if it is an elastic material, not all materials can be made preferable, and it is necessary to select its flexibility appropriately.

Therefore, the inventors of the present invention have made the spacer 6 and the elastic sheet members 4 and 5 having the diameter 6
Urethane rubber, silicone rubber, and silicone sponge, which are estimated to be preferable under the conditions of the diaphragm type measuring means 1 using a strain gauge and having a thickness of 0.6 mm, are used. The combination relation was examined. The compression elastic modulus of these elastic materials specifically used is as shown in Table 1 below.

[0014]

[Table 1]

However, such an elastic material is appropriately adopted,
The measurement was carried out using a measuring apparatus as shown in FIGS.

[0016]

[Table 2]

Combination relationship as shown in Table 2 above
FIG. 5 summarizes the measurement results in the case of FIG.
To FIG. 9, wherein three pressure measuring means 1, 1,
The dispersion state of the measured values obtained from FIG. 1 is shown by a vertical line in these figures, but when sponge rubber having a low compression modulus is laid on the pressure detecting surface side of the pressure detecting means 1, FIG. As shown in FIGS. 5 to 7, it was confirmed that the width of the pressure measured by each measuring means 1 was small and almost equal to the load pressure was obtained irrespective of the elastic material on the opposite surface as shown in FIG. 6. The thicknesses of the elastic members 2, 4, and 5 are preferably selected so as to exhibit appropriate elastic behavior according to the degree of pressure to be measured.

The above is a case of the pressure measuring mechanism which is relatively small and is suitable for a case where the pressing force is relatively small. However, in the case of a larger size or a larger pressing force, Although it is natural that the mechanical structure or the elastic material is strengthened, the pressure detecting means 1 is preferably small and highly accurate because it is preferable to perform as precise measurement as possible. Regarding 5 also, one with extremely different performance should be avoided.

As described above, when the pressure distribution is measured by the method shown in FIGS. Since it was confirmed that the pressure was obtained, the present inventors further produced a mechanism for measuring the pressure distribution on the grinding surface in the rotary grinding mechanism. That is, FIG. 10 shows an outline of a magnetic disk substrate grinding machine as a typical example of such a rotary grinding mechanism.
A lower grindstone 14 is attached to the lower lapping plate 12 as an example of a processing member, and the upper and lower lapping stones 13 and 14 are ground to grind a disk substrate or the like. Is configured so that a plurality of points (for example, six points) on the circumference near the inner periphery of the upper surface plate can be appropriately lifted by a lifting mechanism 16 operated by an air cylinder 15.

The pressure distribution measuring unit 20 for the above-mentioned rotary grinding machine is separately shown in FIGS. 11 to 13 and uses a pressure measuring means 1, a spacer 2, and elastic sheet members 4 and 5 per se. Are similar to those in FIGS. 1 and 2, but these members are formed into a fan shape as shown in FIG.
In addition, as shown in FIG. 13 together with FIG. 11, they are all mounted on a substrate 10 made of urethane rubber, and a plurality of such pressure distribution measuring units 20 are mounted on the lower grinding wheel 12 of the lower platen 12 shown in FIG. 14 at 120 ° as shown in FIG.
We arranged at intervals to address.

As a specific example, the upper and lower whetstones 13 and 14 are donut-shaped disc members having an outer diameter of 1130 mm and an inner diameter of 370 mm, and each measuring unit 20 has a thickness of 0.6 made of silicon rubber.
Ten measuring means 1 are arranged in a row on a spacer 2 having a thickness of 2 mm, and elastic sheets 4 and 5 each having a thickness of 2 mm made of silicon sponge are layered on the upper and lower sides thereof, and a base plate 10 made of urethane rubber having a thickness of 1 mm is attached. As shown in FIG. 14, the upper surface plate 11 and the upper surface
Was measured under the condition where the load pressure was changed.

That is, under the conditions described above, the load pressure is 9
FIG. 16 shows the measurement results obtained by changing the pressure to ５４54 kPa. It was known that there was a portion where the pressure was slightly reduced uniformly at a distance of 280 mm from the center. With such a change, the absolute value of the pressure distribution at each position could be obtained.

Further, as described above, the absolute value of the pressure distribution in each part is obtained, so that the amount of grinding can be obtained from the trajectory analysis of the abrasive grains. Efficient and accurate grinding can be performed by controlling the amount of grinding or controlling the number of revolutions of the planetary gears and the number of revolutions of the upper and lower platens for increasing the grinding speed.

[0024]

According to the present invention as described above, the pressure distribution in the press-contact operating mechanism and the like can be appropriately measured, and the absolute value of the pressure distribution can be appropriately measured. The present invention has the effect of elucidating the characteristics of various working machines and the like, and realizing a rational and accurate operation by finding appropriate processing conditions, and is an industrially significant invention.

[Brief description of the drawings]

FIG. 1 is a plan view showing an example of a pressure distribution measuring device according to the present invention.

FIG. 2 is a side view of what is shown in FIG.

FIG. 3 is a side view also showing a pressure receiving state of a representative example of the pressure sensor.

FIG. 4 is a plan view of what is shown in FIG.

FIG. 5 is a table showing measurement results when silicon sponges are used on the pressure detection side and the opposite side in the apparatus shown in FIGS.

FIG. 6 shows the same pressure detection measurement results as in FIG. 3, in which a silicone sponge is used on the pressure detection side and silicon rubber is used on the opposite side.

FIG. 7 is a chart of pressure detection results similar to those in FIGS. 5 and 6, in which a silicon sponge is used on the pressure detection side and urethane rubber is used on the opposite side.

FIG. 8 is a chart of pressure detection results similar to FIGS. 5 to 7, in which silicon rubber is used on the pressure detection side and silicon sponge is used on the opposite side.

FIG. 9 is a chart of pressure detection results similar to FIGS. 5 to 8, in which urethane rubber is used on the pressure detection side and silicon sponge is used on the opposite side.

FIG. 10 is an explanatory diagram showing a configuration of a magnetic disk substrate grinding machine used by the present inventors.

11 is a plan view of a pressure distribution measuring sensor used in the magnetic disk substrate grinding machine of FIG.

FIG. 12 is a side view of the sensor shown in FIG.

FIG. 13 is an end view of the one shown in FIGS.

FIG. 14 is a plan view showing a state in which the components shown in FIGS. 11 to 13 are disposed on the lower grindstone shown in FIG. 10;

FIG. 15 is a side view of FIG. 14;

16 to FIG. 13 as shown in FIG. 14 and FIG.
FIG. 11 is a table showing the results of measuring the pressure distribution by varying the load pressure in the magnetic disk substrate grinding machine shown in FIG.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Pressure measuring means 2 Cushioning spacer 3 Housing part 4 Elastic material (upper part) 5 Elastic material (lower part) 6 Supporting stand 7 Heavy material 8 Diaphragm 9 Measuring part (strain gauge etc.) 10 Base plate 11 Upper surface plate 12 Lower surface plate 13 Upper whetstone 14 Lower whetstone 15 Air cylinder 16 Lifting mechanism 20 Pressure distribution measuring unit

Claims (9)

[Claims] 1. A pressure distribution measuring method characterized by measuring a pressure distribution at a plurality of positions on one or both surfaces when opposing surfaces are pressed against each other. 2. The pressure distribution at each of a plurality of positions is measured by interposing a cushioning spacer surrounding the pressure measuring means on the peripheral side of each pressure measuring means. Pressure measurement method described in 1. 3. The pressure distribution according to claim 2, wherein the pressure distribution at each of a plurality of positions is measured by sandwiching the cushioning spacer between elastic materials having the same or lower compression elastic modulus. Measuring method. 4. The pressure distribution measurement according to claim 3, wherein the compression elastic modulus of the elastic material used on the pressure side of the cushioning spacer is lower than that of the cushioning spacer and the elastic material used on the pressure receiving side. Method. 5. A method according to claim 1, further comprising: a plurality of pressure measuring means for measuring pressure distribution at each position when a pressing force is applied between the opposing surfaces. Pressure distribution measuring device. 6. A pressure measuring means comprising a diaphragm on one side thereof, a disc-shaped pressure measuring means having a strain gauge attached thereto, and a plate-like elastic body attached to one side thereof. The pressure distribution measuring device according to claim 5. 7. The pressure distribution according to claim 6, wherein a plate-like elastic body attached to one side of the pressure measuring means has flexibility so that the pressure value can be detected by the pressure measuring means. measuring device. 8. A plurality of pressure measuring means are fitted and disposed on an elastic plate member having appropriate hardness, and the elastic plate member is interposed between porous elastic plate members which are made more flexible. The pressure distribution measuring device according to any one of claims 5 to 7, wherein: 9. A disk-shaped processing member is provided between the lower surface plate and the upper surface plate, and a plurality of pressure distribution measuring mechanisms having the configuration according to claim 8 are equiangularly arranged between the processing members. Pressure distribution measuring device characterized by being arranged in a shape.