JPH10339705A - Method and equipment for inspecting defect of planar transparent body - Google Patents
Method and equipment for inspecting defect of planar transparent bodyInfo
- Publication number
- JPH10339705A JPH10339705A JP15077797A JP15077797A JPH10339705A JP H10339705 A JPH10339705 A JP H10339705A JP 15077797 A JP15077797 A JP 15077797A JP 15077797 A JP15077797 A JP 15077797A JP H10339705 A JPH10339705 A JP H10339705A
- Authority
- JP
- Japan
- Prior art keywords
- transparent body
- plate
- shaped transparent
- defect
- illumination light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
Description
【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION
【０００１】[0001]
【発明の属する技術分野】本発明は板状透明体の欠陥検
査方法及びその装置に係り、特に板ガラスの欠陥をエッ
ジライト法により検出する板状透明体の欠陥検査方法及
びその装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for inspecting a defect of a plate-shaped transparent body, and more particularly to a method and an apparatus for inspecting a sheet-shaped transparent body for detecting a defect of a sheet glass by an edge light method.
【０００２】[0002]
【従来の技術】従来、板ガラス等の板状透明体の内部又
は内表面に発生した欠陥部位を検出する方法として、エ
ッジライト法が知られている。エッジライト法は、板ガ
ラスの側面から、側面に対して垂直方向に照明光を照射
し、板状透明体の欠陥部位によって散乱される散乱光を
板状透明体外部で検出する。これにより、板状透明体の
欠陥部位を検出することができる。2. Description of the Related Art Heretofore, an edge light method has been known as a method for detecting a defective portion generated inside or on an inner surface of a plate-shaped transparent body such as a plate glass. The edge light method irradiates illumination light from a side surface of a sheet glass in a direction perpendicular to the side surface, and detects scattered light scattered by a defective portion of the sheet transparent body outside the sheet transparent body. This makes it possible to detect a defective portion of the plate-shaped transparent body.
【０００３】[0003]
【発明が解決しようとする課題】しかしながら、従来の
エッジライト法では、板状透明体の側面に対して垂直方
向に照明光を入射させる際に、照明光の一部が板状透明
体の外表面を照射し、この照明光が板状透明体の表面上
に付着したゴミ等の汚れに散乱される場合がある。この
ため、板状透明体の表面に付着した検出対象外の汚れを
欠陥として検出してしまうという問題があった。However, in the conventional edge light method, when the illumination light is incident on the side surface of the plate-shaped transparent body in a vertical direction, a part of the illumination light is outside the plate-shaped transparent body. The surface is irradiated, and this illumination light may be scattered by dirt such as dust attached to the surface of the plate-shaped transparent body. For this reason, there has been a problem that dirt outside the detection target adhered to the surface of the plate-shaped transparent body is detected as a defect.
【０００４】この不具合を解消するためには、板状透明
体の側面周辺を遮光部材によって遮光し、板状透明体の
外表面に照明光が照射されないようにする方法も考えら
れるが、この場合、遮光部材を板状透明体に接触させ
て、隙間なく板状透明体周辺を遮光する必要があるた
め、この方法を搬送中の板状透明体にオンラインで適用
するのは困難であるという問題があった。In order to solve this problem, a method of shielding the periphery of the side surface of the plate-shaped transparent body with a light-shielding member so that the outer surface of the plate-shaped transparent body is not irradiated with illumination light can be considered. However, it is difficult to apply this method online to the plate-shaped transparent body being transported because it is necessary to contact the light-shielding member with the plate-shaped transparent body to shield the area around the plate-shaped transparent body without any gap. was there.
【０００５】本発明はこのような事情に鑑みてなされた
もので、板状透明体の表面に付着した検出対象外の汚れ
を検出することなく、板状透明体の内部又は内表面に存
在する欠陥のみを板状透明体の搬送中にオンラインで検
出することができる板状透明体の欠陥検査方法及びその
装置を提供することを目的とする。[0005] The present invention has been made in view of such circumstances, and the present invention does not detect dirt attached to the surface of a plate-shaped transparent body but is outside the detection target, and exists inside or inside the plate-shaped transparent body. An object of the present invention is to provide a method and an apparatus for inspecting a defect of a plate-shaped transparent body, which can detect only a defect online while the plate-shaped transparent body is being transported.
【０００６】[0006]
【課題を解決するための手段】本発明は上記目的を達成
するために、板状透明体が搬送される搬送路の所定位置
において、前記搬送路上を走行する板状透明体の側面に
対して前記板状透明体の内表面で全反射するように一方
向に指向性を有する照明光を斜めに入射させて前記板状
透明体の内部を照明する照明手段と、前記照明光が前記
板状透明体の内部又は内表面に存在する欠陥によって散
乱された散乱光を検出する散乱光検出手段と、からなる
ことを特徴としている。According to the present invention, in order to achieve the above object, at a predetermined position of a transport path on which a plate-shaped transparent body is transported, the side surface of the plate-shaped transparent body traveling on the transport path is provided. Illuminating means for illuminating the interior of the plate-shaped transparent body by obliquely entering illumination light having directivity in one direction so as to be totally reflected on the inner surface of the plate-shaped transparent body; and And scattered light detection means for detecting scattered light scattered by a defect existing inside or on the inner surface of the transparent body.
【０００７】本発明によれば、搬送路上を走行する板状
透明体の側面から板状透明体内表面で全反射するように
一方向に指向性を有する照明光を斜めに入射し、前記板
状透明体の内部を照明する。そして、板状透明体の内部
又は内表面の欠陥によって散乱される散乱光を検出す
る。これにより、遮光部材によって板状透明体の側面周
辺を遮光しなくても板状透明体の外表面を照明すること
なく板状透明体の内部のみを照明することができ、オン
ラインで容易に板状透明体の欠陥を検出することができ
る。According to the present invention, illumination light having directivity in one direction is obliquely incident from the side surface of the plate-shaped transparent body traveling on the transport path so as to be totally reflected on the surface of the plate-shaped transparent body. Illuminates the inside of the transparent body. Then, scattered light scattered by a defect inside or inside the plate-shaped transparent body is detected. Accordingly, only the inside of the plate-shaped transparent body can be illuminated without illuminating the outer surface of the plate-shaped transparent body without shading the periphery of the side surface of the plate-shaped transparent body with the light shielding member, and the plate can be easily online. The defect of the transparent body can be detected.
【０００８】[0008]
【発明の実施の形態】以下添付図面に従って本発明に係
る板状透明体の欠陥検査方法及びその装置について詳説
する。図１は、板ガラスの製造工程において本発明に係
る板状透明体の欠陥検査装置が適用される場合の一実施
の形態を示した構成図である。同図に示すように、切断
されたまま、もしくは面取りされた側面を有する板ガラ
ス１０はガイドローラ１２、１２、…により搬送路上を
搬送され、本発明に係る欠陥検査装置が設置された欠陥
検査部を通過する。欠陥検査部の搬送路周辺には、光電
スイッチ１４、照明光源１６、１８、ラインセンサ２
０、２２が配設される。また、同図に示す収納室２４
に、カメラ用電源２６、パソコン２８、画像処理装置３
０、モニタ３２、照度計本体３４、３６、キーボード３
８等の各種機器が収納される。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a method and an apparatus for inspecting a plate-like transparent body according to the present invention will be described in detail with reference to the accompanying drawings. FIG. 1 is a configuration diagram showing an embodiment in which a plate-like transparent body defect inspection apparatus according to the present invention is applied in a manufacturing process of a sheet glass. As shown in the figure, a sheet glass 10 having a cut side or a chamfered side surface is transported on a transport path by guide rollers 12, 12,..., And a defect inspection unit in which a defect inspection apparatus according to the present invention is installed. Pass through. A photoelectric switch 14, illumination light sources 16 and 18, a line sensor 2
0 and 22 are provided. The storage room 24 shown in FIG.
, A camera power supply 26, a personal computer 28, an image processing device 3
0, monitor 32, illuminometer main body 34, 36, keyboard 3
8 and the like are stored.
【０００９】上記光電スイッチ１４は、欠陥検査部に板
ガラス１０が搬送される直前の位置に配設され、搬送路
上を走行する板ガラス１０の先端及び後端を検出する。
光電スイッチ１４によって板ガラス１０の先端又は後端
が検出されると、これらの検出信号はパソコン２８に入
力され、欠陥検査の開始及び終了が制御される。上記照
明光源１６及び照明光源１８は、搬送路の両端に配設さ
れ、それぞれメタルハライドランプ１６Ａ、１６Ａ、１
８Ａ、１８Ａ、光ファイバ１６Ｂ、１６Ｂ、１８Ｂ、１
８Ｂ及びロッドレンズ１６Ｃ、１８Ｃから構成される。
この照明光源１６（又は照明光源１８）は、２台のメタ
ルハライドランプ１６Ａ、１６Ａ（又はメタルハライド
ランプ１８Ａ、１８Ａ）から照明光を発生させる。そし
て、この照明光をガラスファイバ１６Ｂ、１６Ｂ（又は
ガラスファイバ１８Ｂ、１８Ｂ）を介してロッドレンズ
１６Ｃ（又はロッドレンズ１８Ｃ）に導き、ロッドレン
ズ１６Ｃ（又はロッドレンズ１８Ｃ）によって一方向に
高い指向性を有する照明光（平行光）を成形して欠陥検
査部の搬送路を走行する板ガラス１０の側面に照射す
る。尚、ロッドレンズ１６Ｃ、１８Ｃの先端の一部にそ
れぞれ照度計受光部１６Ｄ、１８Ｄが設けられており、
この照度計受光部１６Ｄ、１８Ｄによってロッドレンズ
１６Ｃ、１８Ｃから出射される照明光の光量が検出され
る。そして、検出された照明光の光量はそれぞれ収納室
２４の照度計本体３４、３６に表示される。これによ
り、照明光源１６、１８の光量を確認することができ
る。The photoelectric switch 14 is disposed at a position immediately before the glass sheet 10 is conveyed to the defect inspection unit, and detects the front end and the rear end of the glass sheet 10 traveling on the conveyance path.
When the leading end or the trailing end of the glass sheet 10 is detected by the photoelectric switch 14, these detection signals are input to the personal computer 28, and the start and end of the defect inspection are controlled. The illumination light source 16 and the illumination light source 18 are disposed at both ends of the transport path, and are respectively provided with metal halide lamps 16A, 16A, 1A.
8A, 18A, optical fibers 16B, 16B, 18B, 1
8B and rod lenses 16C and 18C.
The illumination light source 16 (or the illumination light source 18) generates illumination light from the two metal halide lamps 16A, 16A (or the metal halide lamps 18A, 18A). Then, the illumination light is guided to the rod lens 16C (or the rod lens 18C) via the glass fibers 16B, 16B (or the glass fibers 18B, 18B), and is highly directional in one direction by the rod lens 16C (or the rod lens 18C). And irradiates the side surface of the sheet glass 10 traveling on the conveyance path of the defect inspection section. In addition, illuminometer light receiving sections 16D and 18D are provided at a part of the tip of the rod lenses 16C and 18C, respectively.
The illuminometer light receiving units 16D and 18D detect the amounts of illumination light emitted from the rod lenses 16C and 18C. Then, the detected light amounts of the illumination light are displayed on the illuminometer main bodies 34 and 36 of the storage room 24, respectively. Thereby, the light amounts of the illumination light sources 16 and 18 can be confirmed.
【００１０】また、照明光源１６、１８のロッドレンズ
１６Ｃ、１８Ｃは、照明光が板ガラス１０側面に対して
所定角度をもって入射するように斜めに設置されてお
り、板ガラス１０の内部に入射した照明光が板ガラス１
０内表面で全反射するような角度に設定される。これに
より、板ガラス１０内部に入射した照明光は、板ガラス
１０の内表面で全反射を繰り返して板ガラス１０内部を
進行する。尚、詳細は後述する。The rod lenses 16C and 18C of the illumination light sources 16 and 18 are installed obliquely so that the illumination light is incident on the side surface of the glass sheet 10 at a predetermined angle. Is a sheet glass 1
The angle is set so that the light is totally reflected on the inner surface of the zero. Thereby, the illumination light that has entered the inside of the glass sheet 10 travels inside the glass sheet 10 by repeating total reflection on the inner surface of the glass sheet 10. The details will be described later.
【００１１】上記ラインセンサ２０、２２はそれぞれ、
照明光源１６、１８が照明光を出射する位置の搬送路を
走行する板ガラス１０の上面上方及び下面下方に設置さ
れ、搬送方向と直交する所定ライン上の板ガラス１０の
上面及び下面を撮影する。ラインセンサ２０（又はライ
ンセンサ２２）は図１に示すように、平行に配設された
３台のラインセンサカメラ２０Ａ、２０Ａ、２０Ａ（又
はラインセンサカメラ２２Ａ、２２Ａ、２２Ａ）を収納
ボックス２０Ｂ（又は収納ボックス２２Ｂ）内に収納
し、これらのラインセンサカメラ２０Ａ、２０Ａ、２０
Ａ（又はラインセンサカメラ２２Ａ、２２Ａ、２２Ａ）
に収納ボックス２０Ｂ（又は収納ボックス２２Ｂ）の開
口部２０Ｃ（又は開口部２２Ｃ）からミラー２０Ｄ（又
はミラー２２Ｄ）を介して画像光を入射して板ガラス１
０の幅方向の全域を撮影する。The line sensors 20 and 22 are respectively
The illumination light sources 16 and 18 are installed above and below the lower surface of the glass sheet 10 traveling on the conveyance path at the position where the illumination light is emitted, and photograph the upper and lower surfaces of the glass sheet 10 on a predetermined line orthogonal to the conveyance direction. As shown in FIG. 1, the line sensor 20 (or the line sensor 22) includes three line sensor cameras 20A, 20A, 20A (or the line sensor cameras 22A, 22A, 22A) arranged in parallel in a storage box 20B ( Alternatively, the line sensor cameras 20A, 20A, 20A are stored in the storage box 22B).
A (or line sensor camera 22A, 22A, 22A)
The image light is incident on the sheet glass 1 from the opening 20C (or opening 22C) of the storage box 20B (or storage box 22B) via the mirror 20D (or mirror 22D).
The entire area in the width direction of 0 is photographed.
【００１２】そして、ラインセンサ２０、２２から出力
された画像信号は収納室２４の画像処理装置３０に入力
され、後述するように画像処理装置３０によってシェー
ディング補正等の信号処理が行われた後、パソコン２８
に入力される。以上のように構成された板状透明体の欠
陥検査装置において、上記照明光源１６、１８と上記ラ
インセンサ２０、２２によって板ガラス１０の欠陥を検
出する原理を図２の説明図を用いて説明する。図２
（Ａ）に示すように、照明光源１６又は照明光源１８に
よって板ガラス１０側面から照明光を斜めに入射させる
と（図２（Ａ）では一方向からの照明光のみ示す。）、
図２（Ｂ）に示すようにこの照明光は板ガラス１０内表
面で全反射しながら板ガラス１０内部を進行する。板ガ
ラス１０に欠陥が存在しない（板ガラス１０が正常な）
場合は、この板ガラス１０内部に入射した照明光はほと
んど散乱されることなく板ガラス１０内部を進行する。
従ってこの場合、図２（Ａ）のように板ガラス１０の上
面上方に設置されたラインセンサ２０によって板ガラス
１０内部から強い散乱光を検出することはない。また、
図には示さないが板ガラス１０の下面下方に設置された
ラインセンサ２２でも同様である。The image signals output from the line sensors 20 and 22 are input to the image processing device 30 in the storage room 24, and after the image processing device 30 performs signal processing such as shading correction as described later, PC 28
Is input to The principle of detecting defects of the glass sheet 10 by the illumination light sources 16 and 18 and the line sensors 20 and 22 in the defect inspection apparatus for a plate-shaped transparent body configured as described above will be described with reference to the explanatory diagram of FIG. . FIG.
As shown in FIG. 2A, when the illumination light 16 or the illumination light source 18 causes the illumination light to be obliquely incident from the side surface of the glass sheet 10 (FIG. 2A shows only the illumination light from one direction).
As shown in FIG. 2B, the illumination light travels inside the glass sheet 10 while being totally reflected on the inner surface of the glass sheet 10. No defects exist in the glass sheet 10 (the glass sheet 10 is normal)
In this case, the illumination light incident on the inside of the glass sheet 10 travels inside the glass sheet 10 without being scattered.
Therefore, in this case, strong scattered light from the inside of the glass sheet 10 is not detected by the line sensor 20 installed above the upper surface of the glass sheet 10 as shown in FIG. Also,
Although not shown, the same applies to the line sensor 22 installed below the lower surface of the glass sheet 10.
【００１３】また、このように照明光を板ガラス１０側
面に対して斜めに入射させることにより（板ガラス１０
内部を全反射で進行させることにより）、図２（Ｂ）に
示すように、板ガラス１０上面又は下面上に検出対象外
のゴミ等の汚れが付着している場合でも、この汚れに照
明光が照射されることはなく、ラインセンサ２０又はラ
インセンサ２２によって汚れによる散乱光が検出される
ことはない。尚、照明光源１６、１８から出射された照
明光の一部が直接板ガラス１０の外表面（上面）を照射
してしまう場合でも、この照明光は板ガラス１０の外表
面（特に、板ガラス１０の側面付近の外表面）で一度反
射して板ガラス１０の外部空間に放出されるため、この
照明光が板ガラス１０の外表面に付着した汚れを照明す
ることはなく、外表面に付着した汚れによる散乱光が検
出されることはない（尚、実験的には、板ガラス１０の
側面の垂直方向に対して（板ガラス１０の外表面に対し
て）１５°から４５°の範囲の角度方向から照明光を照
射すれば、外表面に付着した汚れを検出することがなく
好適であることが確認されている）。また、板ガラス１
０の両端部が走行する位置に遮光部材を板ガラス１０に
接触しない程度に近接させて設置しておけば、板ガラス
１０の外表面を直接照射する照明光を制限することがで
きる。In addition, the illumination light is obliquely incident on the side surface of the glass sheet 10 (the glass glass 10).
As shown in FIG. 2 (B), even if dirt such as dust not to be detected adheres to the upper surface or lower surface of the glass sheet 10 as shown in FIG. There is no irradiation, and no scattered light due to dirt is detected by the line sensor 20 or the line sensor 22. In addition, even when a part of the illumination light emitted from the illumination light sources 16 and 18 directly irradiates the outer surface (upper surface) of the glass sheet 10, the illumination light is applied to the outer surface of the glass sheet 10 (particularly, the side surface of the glass sheet 10). (The outer surface in the vicinity) is reflected once and emitted to the outer space of the glass sheet 10, so that the illumination light does not illuminate the dirt attached to the outer surface of the glass sheet 10, but is scattered by the dirt attached to the outer surface. Is not detected (experimentally, illumination light is applied from an angle in the range of 15 ° to 45 ° with respect to the vertical direction of the side surface of the glass sheet 10 (with respect to the outer surface of the glass sheet 10). In this case, it is confirmed that dirt adhering to the outer surface is suitable without being detected.) In addition, sheet glass 1
If the light-shielding member is placed close to the position where both ends of the zero run so as not to contact the glass sheet 10, the illumination light that directly irradiates the outer surface of the glass sheet 10 can be limited.
【００１４】一方、板ガラス１０に欠陥が存在する場合
には、この欠陥によって照明光の一部が散乱される。例
えば、図２（Ｂ）に示すように板ガラス１０内部に泡等
の欠陥部位が存在する場合には、この位置を通過する照
明光が散乱され、この散乱光の一部が板ガラス１０上面
上方又は下面下方に放出される。ラインセンサ２０又は
ラインセンサ２２は、この散乱光を強い光（欠陥のない
板ガラス１０によって観測されるより光よりも強い光）
として検出する。On the other hand, when a defect exists in the glass sheet 10, a part of the illumination light is scattered by the defect. For example, as shown in FIG. 2B, when there is a defective portion such as a bubble inside the glass sheet 10, the illumination light passing through this position is scattered, and a part of the scattered light is above the upper surface of the glass sheet 10 or Released below the lower surface. The line sensor 20 or the line sensor 22 converts the scattered light into intense light (light that is stronger than the light observed by the glass sheet 10 having no defect).
Detected as
【００１５】このように、板ガラス１０に欠陥が存在す
ると、ラインセンサ２０又はライセンサ２２によって強
い散乱光が検出されるため、この散乱光の検出により板
ガラス１０の欠陥の有無を判別することが可能となる。
尚、ラインセンサ２０又はラインセンサ２２は板ガラス
１０上面上方又は下面下方の何れかに設置すればよい
が、ラインセンサ２０とラインセンサ２２を板ガラス１
０上面上方及び下面下方の両方に設置すると、図３に示
すように板ガラス１０内表面（上面）に欠陥部位が存在
する場合に特に効果がある。同図に示すように、板ガラ
ス１０の上面に欠陥部位が存在する場合、板ガラス１０
上面上方に散乱される散乱光は弱く上面上方のラインセ
ンサ２０では検出が難しいが、板ガラス１０の下面下方
に散乱される散乱光は強く下面下方のラインセンサ２２
ではこの欠陥を容易に検出することができる。また、こ
れらのラインセンサ２０、２２によって検出された光の
強度を比較することにより、板ガラス１０のいずれの面
に欠陥が生じているかを検出することができる。As described above, if a defect exists in the sheet glass 10, strong scattered light is detected by the line sensor 20 or the licensor 22. Therefore, the presence or absence of a defect in the sheet glass 10 can be determined by detecting the scattered light. Become.
The line sensor 20 or the line sensor 22 may be installed either above the upper surface of the plate glass 10 or below the lower surface thereof.
0 When installed above both the upper surface and the lower surface, it is particularly effective when there is a defective portion on the inner surface (upper surface) of the sheet glass 10 as shown in FIG. As shown in the figure, when a defective portion is present on the upper surface of the
The scattered light scattered above the upper surface is weak and difficult to detect with the line sensor 20 above the upper surface, but the scattered light scattered below the lower surface of the sheet glass 10 is strongly detected by the line sensor 22 below the lower surface.
Then, this defect can be easily detected. Further, by comparing the intensities of the light detected by these line sensors 20 and 22, it is possible to detect which surface of the plate glass 10 has a defect.
【００１６】以上の原理に基づいて、収納室２４に収納
された画像処理装置３０及びパソコン２８はラインセン
サ２０、２２から出力される信号を入力して以下の処理
を実行する。先ず、画像処理装置３０は、ラインセンサ
２０、２２から板ガラス１０の上面及び下面を撮影した
画像信号を入力し、シェーディング補正を行う。図４は
板ガラス１０の内部を伝播する光の透過光量を相対値で
示したものであり、欠陥を照明する光の強度分布に等し
い。従って、同等の欠陥でも散乱光の強さは図４に示す
分布で変化し、ラインセンサ２０、２２の各画素位置に
おいて、同等の欠陥の散乱光にて検出される光量の相対
値は図４と等しい分布になる。Based on the above principle, the image processing device 30 and the personal computer 28 housed in the housing room 24 input signals output from the line sensors 20 and 22 and execute the following processing. First, the image processing apparatus 30 receives image signals of the upper and lower surfaces of the glass sheet 10 from the line sensors 20 and 22 and performs shading correction. FIG. 4 shows the transmitted light amount of the light propagating inside the glass sheet 10 as a relative value, which is equal to the intensity distribution of the light illuminating the defect. Therefore, the intensity of the scattered light changes with the distribution shown in FIG. 4 even for the equivalent defect, and the relative value of the light amount detected by the scattered light of the equivalent defect at each pixel position of the line sensors 20 and 22 is as shown in FIG. Distribution equal to
【００１７】通常、最も弱い散乱光となる欠陥は、検出
対象となる欠陥のうち最小サイズの欠陥である。すなわ
ち、ラインセンサ２０、２２の各画素において検出され
た光量が、最小サイズの欠陥による散乱光の強度分布に
到達している場合には、板ガラス１０に欠陥が存在する
と判定することができる。ラインセンサ２０、２２の各
画素毎に、板ガラス１０の欠陥による散乱光を判別する
判定レベルを設定するのは、処理が煩雑になるため、ラ
インセンサ２０、２２から画像信号を入力した画像処理
装置３０は、各画素毎に信号の増幅度を調整し、検出し
たい欠陥による散乱光の信号レベルが一定となるよう
に、シェーディング補正し、各画素の感度を均一にす
る。Usually, the defect that causes the weakest scattered light is the defect having the smallest size among the defects to be detected. That is, when the light amount detected in each pixel of the line sensors 20 and 22 reaches the intensity distribution of the scattered light due to the defect having the minimum size, it can be determined that the sheet glass 10 has a defect. Setting the determination level for determining the scattered light due to the defect of the glass sheet 10 for each pixel of the line sensors 20 and 22 complicates the processing. Therefore, the image processing apparatus which inputs the image signals from the line sensors 20 and 22 30 adjusts the signal amplification for each pixel, performs shading correction so that the signal level of the scattered light due to the defect to be detected becomes constant, and makes the sensitivity of each pixel uniform.
【００１８】これにより、ラインセンサ２０、２２の画
素位置によらず、所定の判定レベルにより板ガラス１０
の欠陥による散乱光を検出することができる。このよう
に画像処理装置３０によってシェーディング補正された
画像信号は、上述したように所定の判定レベルによっ
て、板ガラス１０の欠陥による散乱光の有無を判定す
る。最も弱い散乱光となる欠陥の信号レベルに基づい
て、予め異常とみなせる判定レベルを設定しておき、画
像信号がこの判定レベルより小さい場合には、板ガラス
１０は正常と判定し、逆に判定レベルより大きい場合に
は、板ガラス１０に欠陥が存在すると判定する。この判
定結果は、画像処理装置３０からパソコン２８に送り、
判定結果はモニタ３２に表示する。Thus, the sheet glass 10 can be set at a predetermined judgment level regardless of the pixel positions of the line sensors 20 and 22.
Scattered light due to the defect can be detected. As described above, the presence or absence of scattered light due to a defect in the glass sheet 10 is determined for the image signal that has been subjected to the shading correction by the image processing device 30 at the predetermined determination level as described above. Based on the signal level of the defect that becomes the weakest scattered light, a judgment level that can be regarded as abnormal is set in advance. If the image signal is smaller than this judgment level, the sheet glass 10 is judged to be normal, and conversely, the judgment level If it is larger, it is determined that the sheet glass 10 has a defect. This determination result is sent from the image processing device 30 to the personal computer 28,
The judgment result is displayed on the monitor 32.
【００１９】以上説明した欠陥検査装置の検査手順につ
いて説明すると、板ガラス１０の製造行程において、切
り面された板ガラス１０が欠陥検査部に搬送されてくる
と、まず、光電スイッチ１４がこの板ガラス１０の先端
を検出する。これにより、上記欠陥検査装置は欠陥検査
を開始する。即ち、光電スイッチ１４が板ガラス１０の
先端を検出すると、上述のように搬送路を走行する板ガ
ラス１０の側面に照明光源１６、１８から照明光を斜め
に照射し、板ガラス１０を斜めに照明するとともに、ラ
インセンサ２０、２２によって板ガラス１０の上面およ
び下面を１ラインずつ撮影する。そして、このラインセ
ンサ２０、２２によって撮影した板ガラス１０の上面及
び下面の画像信号を順次画像処理装置３０に入力して、
画像処理装置３０によってシェーディング補正した後、
所定の判定レベルによって欠陥の有無を判定し、検査結
果をパソコン２８に送り、モニタ３２に表示する。The inspection procedure of the above-described defect inspection apparatus will be described. In the manufacturing process of the glass sheet 10, when the cut glass sheet 10 is conveyed to the defect inspection section, first, the photoelectric switch 14 firstly operates the glass sheet 10. Detect the tip. Thereby, the defect inspection apparatus starts the defect inspection. That is, when the photoelectric switch 14 detects the leading end of the glass sheet 10, the illumination light sources 16 and 18 illuminate the side surfaces of the glass sheet 10 obliquely with the illumination light to illuminate the glass sheet 10 as described above. The upper and lower surfaces of the glass sheet 10 are photographed line by line by the line sensors 20 and 22. Then, image signals of the upper surface and the lower surface of the glass sheet 10 photographed by the line sensors 20 and 22 are sequentially input to the image processing device 30,
After shading correction by the image processing device 30,
The presence or absence of a defect is determined based on a predetermined determination level, and the inspection result is sent to the personal computer 28 and displayed on the monitor 32.
【００２０】一枚の板ガラス１０について欠陥の有無の
判定が終了し、光電スイッチ１４が板ガラス１０の後端
を検出すると、欠陥検査を終了する。もし、搬送されて
きた一枚の板ガラス１０について欠陥が検出されなかっ
た場合には、この板ガラス１０は正常と判定し、欠陥が
検出された場合には、この板ガラス１０は不良と判定す
る。When the determination of the presence or absence of a defect with respect to one sheet of glass 10 is completed and the photoelectric switch 14 detects the rear end of the sheet glass 10, the defect inspection ends. If no defect is detected in one of the conveyed glass sheets 10, the glass sheet 10 is determined to be normal, and if a defect is detected, the glass sheet 10 is determined to be defective.
【００２１】尚、上記実施の形態では、板ガラスの欠陥
検査装置について説明したが、板ガラスに限らず他の板
状透明体に上述の欠陥検査装置を適用することができ
る。また、上記実施の形態では照明光源に、メタルハラ
イドランプを用いたが、これに限らず例えばレーザを用
いてもよい。また、上記実施の形態では、板ガラス１０
の側面は板ガラス１０の表面に対して垂直に成形されて
いる場合を考えて、照明光を板ガラス１０の側面に対し
て斜めに照射し、板ガラス１０の内表面で全反射させる
と説明したが、板ガラス１０の側面が板ガラス１０の表
面に対して垂直に成形されていない場合には、板ガラス
１０の内表面で照明光が全反射するような角度から照明
光を側面に照射すればよい。その際にも、外表面に付着
した汚れを検出しないために、この角度を板ガラスの外
表面に対して１５°から４５°の範囲内で設定すること
が好ましい。In the above-described embodiment, the apparatus for inspecting defects of sheet glass has been described. However, the above-described apparatus for inspecting defects can be applied not only to sheet glass but also to other sheet-like transparent bodies. Further, in the above-described embodiment, a metal halide lamp is used as an illumination light source, but the present invention is not limited to this, and a laser, for example, may be used. In the above embodiment, the sheet glass 10
In consideration of the case where the side surface is formed perpendicular to the surface of the glass sheet 10, it has been described that the illumination light is irradiated obliquely to the side surface of the glass sheet 10 and totally reflected by the inner surface of the glass sheet 10, When the side surface of the glass sheet 10 is not formed perpendicular to the surface of the glass sheet 10, the illumination light may be applied to the side surface at an angle such that the illumination light is totally reflected on the inner surface of the glass sheet 10. In this case, it is preferable to set this angle within a range of 15 ° to 45 ° with respect to the outer surface of the sheet glass so as not to detect dirt attached to the outer surface.
【００２２】また、板ガラス側面が面取加工がされてい
ても、照明光がガラス内部に入射できれば検査が可能で
ある（Ｒ面取りされている場合でも問題は生じない）。In addition, even if the side surface of the glass sheet is chamfered, the inspection can be performed as long as the illumination light can enter the inside of the glass.
【００２３】[0023]
【発明の効果】以上本発明に係る板状透明体の欠陥検査
方法及びその装置によれば、搬送路上を走行する板状透
明体の側面から板状透明体内表面で全反射するように一
方向に指向性を有する照明光を斜めに入射して前記板状
透明体の内部を照明し、板状透明体の内部又は内表面の
欠陥によって散乱される散乱光を検出する。これによ
り、遮光部材によって板状透明体の側面周辺を遮光しな
くても板状透明体の外表面を照明することなく板状透明
体の内部のみを照明することができるようになり、オン
ラインで板状透明体の欠陥を正確に検出することができ
る。As described above, according to the method and the apparatus for inspecting a defect of a plate-shaped transparent body according to the present invention, the plate-shaped transparent body traveling on the transport path is unidirectionally reflected so as to be totally reflected from the side surface of the plate-shaped transparent body. Illumination light having directivity is obliquely incident on the plate-shaped transparent body to illuminate the inside of the plate-shaped transparent body, and scattered light scattered by defects in the inside or the inner surface of the plate-shaped transparent body is detected. Thereby, it becomes possible to illuminate only the inside of the plate-shaped transparent body without illuminating the outer surface of the plate-shaped transparent body without shading the periphery of the side surface of the plate-shaped transparent body with the light-shielding member. The defect of the plate-shaped transparent body can be accurately detected.
【図１】図１は、板ガラスの製造工程において本発明に
係る板状透明体の欠陥検査装置が適用される場合の一実
施の形態を示した構成図である。FIG. 1 is a configuration diagram showing an embodiment in which a plate-like transparent body defect inspection apparatus according to the present invention is applied in a manufacturing process of a glass sheet.
【図２】図２は、本発明に係る欠陥検査装置において板
ガラス１０の欠陥を検出する原理の説明に用いた説明図
である。FIG. 2 is an explanatory diagram used for explaining the principle of detecting a defect of the sheet glass 10 in the defect inspection apparatus according to the present invention.
【図３】図３は、板ガラスの内表面に欠陥部位が存在す
る場合の散乱光の様子を示した図である。FIG. 3 is a diagram showing a state of scattered light when a defect site exists on the inner surface of a sheet glass.
【図４】図４は、板ガラス内部を伝播する照明光の減衰
を透過光量分布を相対値で示した図である。FIG. 4 is a diagram showing attenuation of illumination light propagating in the inside of a glass sheet, showing a distribution of transmitted light amount as a relative value.
１０…板ガラス １２…ガイドローラ １４…光電スイッチ １６、１８…照明光源 ２０、２２…ラインセンサ ２８…パソコン ３０…画像処理装置 ３２…モニタ ３４、３６…照度計本体 DESCRIPTION OF SYMBOLS 10 ... Plate glass 12 ... Guide roller 14 ... Photoelectric switch 16, 18 ... Illumination light source 20, 22 ... Line sensor 28 ... Personal computer 30 ... Image processing apparatus 32 ... Monitor 34, 36 ... Illuminometer main body
Claims (8)
において、前記搬送路上を走行する板状透明体の側面に
対して前記板状透明体の内表面で全反射するように一方
向に指向性を有する照明光を斜めに入射させて前記板状
透明体の内部を照明し、該照明光が前記板状透明体の内
部又は内表面に存在する欠陥によって散乱された散乱光
を検出することにより、板状透明体の欠陥を検査するこ
とを特徴とする板状透明体の欠陥検査方法。At a predetermined position of a transport path on which the plate-shaped transparent body is transported, one side of the plate-shaped transparent body traveling on the transport path is so reflected as to be totally reflected by an inner surface of the plate-shaped transparent body. Illuminating the inside of the plate-shaped transparent body by illuminating the illumination light having directivity in the direction obliquely, and scattered light scattered by defects present in the inside or the inner surface of the plate-shaped transparent body. A defect inspection method for a plate-shaped transparent body, wherein a defect of the plate-shaped transparent body is inspected by detecting.
して１５°から４５°の範囲で前記板状透明体の側面に
入射させることを特徴とする請求項１の板状透明体の欠
陥検査方法。2. The plate-shaped transparent body according to claim 1, wherein said illumination light is incident on a side surface of said plate-shaped transparent body in a range of 15 ° to 45 ° with respect to an outer surface of said plate-shaped transparent body. Body defect inspection method.
において、前記搬送路上を走行する板状透明体の側面に
対して前記板状透明体の内表面で全反射するように一方
向に指向性を有する照明光を斜めに入射させて前記板状
透明体の内部を照明する照明手段と、 前記照明光が前記板状透明体の内部又は内表面に存在す
る欠陥によって散乱された散乱光を検出する散乱光検出
手段と、 からなることを特徴とする板状透明体の欠陥検査装置。3. A predetermined position of a transport path on which the plate-shaped transparent body is transported, wherein one side of the plate-shaped transparent body traveling on the transport path is reflected so as to be totally reflected on an inner surface of the plate-shaped transparent body. Illuminating means for illuminating the inside of the plate-shaped transparent body by irradiating illumination light having directivity in a direction obliquely, and the illumination light is scattered by a defect existing inside or on the inner surface of the plate-shaped transparent body. A scattered light detection means for detecting scattered light, comprising: a plate-like transparent body defect inspection apparatus;
明体の外表面に対して１５°から４５°の範囲で前記板
状透明体の側面に入射させることを特徴とする請求項３
の板状透明体の欠陥検査装置。4. The illuminating means according to claim 1, wherein said illuminating light is incident on a side surface of said plate-shaped transparent body within a range of 15 ° to 45 ° with respect to an outer surface of said plate-shaped transparent body. 3
Inspection system for plate-shaped transparent body.
って照明される位置を通過する板状透明体の表面の画像
を搬送方向と垂直方向に１ライン分撮影するラインセン
サと、 前記ラインセンサから出力された画像信号の信号レベル
に基づいて前記板状透明体の欠陥によって散乱された前
記散乱光を検出する信号処理手段と、 からなることを特徴とする請求項３の板状透明体の欠陥
検査装置。5. A line sensor for photographing an image of a surface of a plate-shaped transparent body passing through a position illuminated by the illuminating unit for one line in a direction perpendicular to a conveying direction, the line sensor comprising: 4. A signal processing means for detecting the scattered light scattered by a defect of the plate-shaped transparent body based on a signal level of an image signal output from the plate-shaped transparent body. Defect inspection equipment.
部の各位置における照明光の強度分布に応じて前記ライ
ンセンサから出力される画像信号の各画素の信号レベル
を補正することを特徴とする請求項５の板状透明体の欠
陥検査装置。6. The apparatus according to claim 1, wherein the signal processing means corrects the signal level of each pixel of the image signal output from the line sensor in accordance with the intensity distribution of the illumination light at each position inside the transparent plate. The defect inspection apparatus for a plate-shaped transparent body according to claim 5, wherein
の内部の各位置に同等の欠陥が生じた場合に、前記ライ
ンセンサの各画素で検出される光強度が一定となるよう
に補正することを特徴とする請求項６の板状透明体の欠
陥検査装置。7. The signal level is corrected such that, when an equivalent defect occurs at each position inside the plate-shaped transparent body, the light intensity detected by each pixel of the line sensor becomes constant. 7. The apparatus according to claim 6, wherein the defect is corrected.
過する板状透明体の上面上方及び下面下方に前記ライン
センサを設けたことを特徴とする請求項５の板状透明体
の欠陥検査装置。8. The apparatus for inspecting defects of a plate-shaped transparent body according to claim 5, wherein said line sensor is provided above an upper surface and below a lower surface of the plate-shaped transparent body passing through a position illuminated by said illuminating means. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15077797A JP3329233B2 (en) | 1997-06-09 | 1997-06-09 | Defect inspection method and apparatus for plate-shaped transparent body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15077797A JP3329233B2 (en) | 1997-06-09 | 1997-06-09 | Defect inspection method and apparatus for plate-shaped transparent body |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH10339705A true JPH10339705A (en) | 1998-12-22 |
| JP3329233B2 JP3329233B2 (en) | 2002-09-30 |
Family
ID=15504207
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15077797A Expired - Lifetime JP3329233B2 (en) | 1997-06-09 | 1997-06-09 | Defect inspection method and apparatus for plate-shaped transparent body |
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|---|---|
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| WO2006057125A1 (en) | 2004-11-24 | 2006-06-01 | Asahi Glass Company, Limited | Method and device for inspecting defect of transparent plate body |
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