JPH10325567A - Constant temperature constant moisture air feeding device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a constant temperature constant moisture air feeding device wherein a repair can be easily and quickly performed by one worker just in case of a failure. SOLUTION: For a constant temperature constant moisture air feeding device constituted in such a manner that on an air passage 75 equipped with a blower 60, an air cooler, an air heater 82 and a humidifier 50 are arranged, an air introduction port is divided into a plurality of openings 72a, 72b, and in respective openings, a plurality of air coolers 1a, 1b comprising a cooling cave 2, a thermoelectric converting element 3, and a radiator 5, are detachably fitted. Then, on respective air coolers 1a, 1b, an air temperature detector, and controllers 9a, 9b to control the operation of the thermoelectric converting element of the air cooler to which the air temperature detector belongs, by an air temperature detecting signal of the air temperature detector, are provided.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for supplying air with controlled temperature and humidity with high accuracy to a target space such as a clean room or various types of test equipment for semiconductor devices.

[0002]

2. Description of the Related Art As an example of this type of apparatus, an apparatus as shown in FIG. 4 is known. An air cooler 112, an air heater 106 including an electric heater, and a humidifying dish installed in the air flow path are arranged from an air inlet 123 of an air flow path 113 formed of a box-shaped case toward an air supply port 110. Humidifier 107 having electric heater 117 therein, blower 10
8 are arranged in this order.

In order to achieve a target temperature and humidity, this type of apparatus knows the dew point of air having a target temperature and humidity from a psychrometric chart and the like, and takes in the taken-in air by an air cooler. Once cooled to a temperature below the air dew point,
Then, by heating to the target temperature with an air heater and supplementing the insufficient humidity with a humidifier,
This is done by a method that achieves the target conditions.

[0004] As the air cooler, a refrigerator of a refrigerant vapor (such as Freon) compression type, a thermoelectric refrigeration cycle, or the like is used. In particular, when using a thermoelectric refrigeration cycle, the air cooler 112 is provided with a fin tube 102 formed by forming a large number of heat transfer fins on the outer surface of the brine conduit across the duct, thereby providing air cooling. The heat exchange area of the fin tube is increased by increasing the heat exchange area of the fin tube, and the fin tube is connected to the fin tube by a pipeline provided with a heat exchanger 104 having a thermoelectric refrigeration unit 105 as a cooling heat source. Connected to the storage tank 103 containing
It is configured to create a brine circulation channel.

The air that has entered through the air inlet 123 is cooled to a predetermined temperature while passing between the fin tubes, and enters the air heater 106. Air heater 106 is made electric heater, a detection signal of the temperature sensor 109 mounted on the air supply port 110 is input to the controller C ₁ of the air heater, as compared with the setting value is a target temperature, the By feeding back the deviation output to the air heater, the air temperature is maintained at the target temperature. The temperature-adjusted air is similarly humidified to the target humidity by the controller C ₂ controlling the operation of the electric heater 117 based on the detection signal of the humidity sensor 119, and is supplied to the target space. Reference numeral 114 denotes a heat exchanger for heat radiation of the thermoelectric conversion element.

In such a conventional constant-temperature and constant-humidity air supply device, if corrosive components such as acid gas are contained in the passing air, the corrosive components dissolved in the dew condensation water adhering to the surface of the fin tube. However, this may cause erosion of the circulating fluid by eroding the tubular body. Furthermore, since the temperature control operation of the air cooler is performed by an indirect method in which the temperature of the brine is changed by a thermoelectric refrigeration system, there is a disadvantage that the response speed to a request for a change in temperature and humidity is reduced. Therefore, there is a disadvantage that the characteristics of the thermoelectric refrigeration apparatus characterized by the quick response speed cannot be sufficiently exhibited.

In order to avoid the drawbacks of an air cooler of the type in which brine cooled by a thermoelectric refrigerator is circulated through such a fin tube, an outer surface of a cooling cave formed by passing an air flow passage through an aluminum block is provided. , One side of the thermoelectric conversion element is brought into contact with the other side 2 of the thermoelectric conversion element,
By using an air cooler having a configuration in which the heat exchanger for heat radiation is brought into contact with the heat exchanger to cool the air passing through the cooling cavity to a temperature lower than the dew point of the air having the target supply air condition, the response speed of the feedback control is increased. Is used.

However, when the performance of the conventional apparatus is to be exhibited by this method, the size of the cooler is increased and the weight is increased as compared with the conventional apparatus. In response to failures caused by
Repair and parts replacement are not easy,
There is a disadvantage that the work cannot be performed by one worker and is heavy because of heavy work, and that the constant temperature / humidity air supply device must be stopped for a long time.

[0009]

A first object of the present invention is to disclose a constant-temperature and constant-humidity air supply device which has a high responsiveness and can supply a constant-temperature and constant-humidity air adjusted with high precision. A second object of the present invention is to disclose a constant-temperature and constant-humidity air supply device that can be easily and promptly repaired by one worker in the event of a failure.

[0010]

A first gist of the present invention is to dispose an air cooler, an air heater and a humidifier in an air flow path provided with a blower from an air inlet to an air supply port. In the constant temperature / humidity air supply device, the air inlet is divided into a plurality of openings, and each of these openings is provided with a cooling cavity made of a heat conductive material as the air cooler. A plurality of air coolers each including a thermoelectric conversion element that comes into contact with the outer surface of the cooling cave so as to be able to exchange heat and a radiator that comes into contact with the thermoelectric conversion element so as to be able to exchange heat are detachably attached to each of the air cooling units. The air conditioner is provided with an air temperature detector and a controller for controlling the operation of a thermoelectric conversion element of an air cooler to which the air temperature detector belongs according to the air temperature detection signal of the air temperature detector. The constant temperature / humidity air supply device is characterized in that:

[0011] In the above, the cooling cavity has an air cooling channel formed by being surrounded by a thick plate made of aluminum, copper, an alloy containing these metals, or graphite, or has a block shape. An example in which an air cooling channel is formed in these materials can be given.
It is necessary that the outer surface has a smooth flat surface to which the thermoelectric conversion element can closely exchange heat. In order to improve the heat exchange efficiency, heat transfer fins are traversed through the air cooling flow path or from the inner peripheral surface of the cooling cave toward the center of the air cooling flow path to improve the heat exchange efficiency. It may be extended integrally.

[0012] Such a cooling cavity is connected to each of a plurality of sections thereof at an air inlet of an air flow path where an air flow is secured by a blower, and the plurality of cooling cavities and the air flow path are connected in series. Of the air flow path. The radiator that contacts the other side of the thermoelectric conversion element that contacts the cooling cave is, for example, a heat exchanger in which a meandering flow path of the cooling water is formed.The air cooler includes the cooling cave and the thermoelectric conversion element. And the radiator are integrally fixed by appropriate fixing means.

[0013] Even if the cooling cavities of these air coolers are configured to have the same dimensions, the flow rate and the flow velocity of the air flowing therethrough are slightly different depending on the mounting positions. By installing a temperature sensor near the air cooling channel or its outlet, and performing feedback control of the thermoelectric conversion element based on the detection signal, the temperature of the outgoing air of the plurality of air coolers attached to the air inlet is the same. Temperature.

According to a second aspect of the present invention, there is provided a constant temperature / humidity air supply device defined by the first aspect, wherein a plurality of air blowers are detachably connected to air inlets of respective cooling cavities. A constant-temperature and constant-humidity air supply device, which is detachably connected to respective air coolers via an air supply duct having the following.

The blower may be provided at any place in the air flow path. However, considering the miniaturization of the apparatus, the end of the air flow path is preferable, and the air flow is uniformly distributed to a plurality of air coolers. In consideration of the above, it is desirable to provide it upstream of the air cooler. The air cooler can be easily removed as needed, because the air inlet and the cooling cavity of the cooler are removable.
Mounting becomes possible.

According to a third aspect of the present invention, there is provided a constant temperature / humidity air supply device defined in the first aspect or the second aspect.
A plurality of openings provided by dividing the air inlet are formed in the same shape, and a plurality of air coolers are configured by air cooler modules unitized to the same specification, thereby providing an air cooler. The constant-temperature and constant-humidity air supply device is characterized by being configured to be replaceable.

[0017] The air cooler is a constant temperature / humidity air supply device having different specifications even if it is provided in parallel.
The object of the present application can be achieved if each specification is unitized. However, if the unitization is further promoted and a plurality of air coolers are unitized as a module, it becomes extremely efficient in each of production, distribution and maintenance.

[0018]

1 to 3 are explanatory views conceptually showing one embodiment of the present invention. A pair of upper and lower openings 72a and 72b of the same shape and size are formed on one side surface 71 on one side of a box-shaped case 70 made of a heat insulating wall to form an air inlet. In addition, on the side of the case farthest from the air inlet, a suction port 61 of a blower 60 is opened, and a series of air flow paths 75 from the opening 72 to the discharge side flow path 62 of the blower 60, It is formed in the case 70.

Square mounting frames 73a and 73b are provided outside the case so as to surround the openings 72a and 72b, respectively. The mounting frames 73a and 73b are provided to ensure heat insulation and airtightness. Packings 74a and 74b made of elastic material such as rubber, plastic, or foams thereof are fixedly provided. An airflow distribution plate 81 made of a perforated plate is vertically provided from the case ceiling so as to face the pair of upper and lower openings 72a and 72b, and a slight gap is provided between the airflow distribution plate 81 and the surface of the sheathed heater. An air heater 82 having a structure in which a large number of heat transfer fins are integrally formed is provided. 53
Is a humidification port that opens in the middle of the air flow path from the air heater 82 to the blower suction port 61. The humidification port 53 is provided through a steam supply pipe 54 that penetrates the case side wall and projects outside the case. It communicates with a steam chamber 52 which is an upper space of a steam generation tank 51 provided outside the case.

An electric heater 5 is provided in the steam generation tank 51.
7, a water supply pipe 58, and a level switch 56 for maintaining the water level of the steam generation tank at a predetermined level.
When the water level falls below a predetermined level, the level switch 56 opens and closes an electromagnetic on-off valve interposed in the water supply pipe 58 to recover the water level. Reference numerals 91 and 95 denote temperature detectors and humidity detectors for supply air, respectively, and the detection signals are supplied to a temperature controller 9.
3. It is inputted to the humidity controller 96 and is compared with the target air temperature and humidity preset in the temperature setter 94 and the humidity setter 98, and the current adjusters 92 and 96 are obtained by the deviation signal.
Adjusts the operation of the air heater 82 and the electric heater 57 for the humidifier.

The air coolers 1a, 1b are provided in the openings 72a, 72b, which form the air inlets of the air flow path having the above-described structure.
Are provided. Each of the air coolers 1a and 1b has exactly the same specifications, and as shown in FIG. 2, a thick rectangular cylinder 2a made of an aluminum alloy or the like is provided with a space between opposed inner surfaces of the rectangular cylinder. A cooling cavity 2 having a large number of heat transfer fins 2b provided so as to be integrally connected, thermoelectric conversion elements 3, 3,... Fixed closely to the left and right side surfaces of the cooling cavity 2, and the thermoelectric conversion element 3 And the radiators 5 and 5 which are in close contact with the other side of the element so as to sandwich the pressure with the cooling cavity 2.

The cooling cavity 2 has a plurality of thin plate-like heat transfer fins which are integrally connected to each other and intersect to form a lattice.
It has a configuration in which it is integrally housed in a rectangular tube formed of a thick heat transfer plate. This can be easily manufactured by casting or the like, but the heat transfer fins are used to improve the cooling efficiency and prevent the airflow passing through the cooling cave from generating a large temperature difference depending on the passage area. Thus, the thermoelectric conversion element is determined to have an appropriate shape in consideration of the mounting position, pressure loss, ease of manufacture and maintenance, and the like. The radiator 5 has a meandering channel for liquid provided in an aluminum sealed container having a smooth flat surface on one side, and cooling water sent out by a circulation pump (not shown) also serves as a hose mounting port. Entrance 5
a into the radiator 5 and meandering,
, And similarly returns to a cooling water tank (not shown) from the outlet 5b which is detachable from the cooling water conduit. The members constituting these air coolers are integrally fixed by a fixing frame (not shown).

The air cooler 1a having such a configuration
1b is supported by supporting frames 75a, b provided near a pair of upper and lower openings 72a, b forming an air introduction port of the air flow passage 75 in a state of being slightly inclined toward the opening, and mounting the opening. The air outlet side end 2 of the cooling cavity is provided in the frames 73a and 73b.
c and 2c are abutted and fixed without gaps via the packings 74a and 74b. Reference numerals 6 and 6 denote drain pans provided below the air cooler.

Each of the air coolers 1a and 1b has a cooling cavity 2
a, temperature detector 7 for detecting the temperature of air passing through 2a
a and 7b are installed near the exit of the cooling cave, and the detection signal is a cooler to which a signal of the cooler temperature setter 8 whose temperature is set several degrees lower than the dew point of the supply air is input. It is input to the temperature controllers 9a and 9b, compared with the set value, and based on the deviation signal, the DC current controller 10
a, 10b control the operation of the thermoelectric conversion elements 3, 3,... of the respective air coolers 1a, 1b.

In the above-described embodiment, an example in which the blower 60 is provided at the end of the air flow path 75 has been described. However, as shown in FIG. 22 is rotatably supported by a blower outlet 20a by a pivot 23 provided at an end of the blower base 21. An air flow distribution port 24 is provided in the air supply duct 22.
a, 24b are open, and the air flow distribution ports 24a, 24b,
The connection frames 25a and 25b are provided so as to surround b. When such an air duct is connected to the blower outlet 20a in an upright state, the upper and lower openings 7
The connection frames 25a, 25b can be connected to the air inlets 2d, 2d of the cooling cavities of the air coolers 1a, 1b connected to the 2a, 2b via packing (not shown) provided on the inner peripheral surface thereof. Distribution ports 24a and 24b are positioned as described above. 7
Reference numerals 9 and 79 denote baffle plates, which are provided to make temperature and humidity uniform. In FIG. 3, members having the same functions as those in the embodiment of FIG. 1 are denoted by the same reference numerals, and description thereof is omitted.

[0026]

The constant-temperature and constant-humidity air supply device of the present invention having the above-described structure slightly deviates from the dew point of the air having the target temperature / humidity condition of the supply air when passing through the air coolers 1a and 1b.
(Appropriately selected in the range of ~ 5 ° C). The temperatures of the air coolers (which may of course be installed in the horizontal direction or in the vertical and horizontal directions) installed in the vertical direction are adjusted to substantially the same temperature by the controllers 9a and 9b. The mixture is further uniformly mixed by 81 and passes through an air heater 82. (In the embodiment of FIG. 3, a confluence chamber provided upstream of the air heater 82 serves to mix and homogenize the air flows from both air coolers.)

The air that has passed through the air heater 82 accurately reaches the target temperature, and then receives the insufficient water from the humidifying port 53 to supply insufficient water. Supplied to. Of course, warm
Humidifier 50 and heater 8 by humidity detectors 91 and 95
Operation 2 is controlled as described above. If the air cooler breaks down due to disconnection of the thermoelectric conversion element, the connection between the air cooler piping and the electrical wiring is separated, and the entire air cooler is removed. By installing an air cooler unit manufactured to the same specification, the repair is completed immediately. In the embodiment of FIG. 3, the same operation may be performed after rotating the air supply duct.

[0028]

The constant-temperature and constant-humidity air supply device of the present invention is constituted by an electronic refrigerator using a Peltier element, and a plurality of small air coolers including a cooling cavity and a radiator. Can be repaired only by replacing the air cooler unit, and an emergency repair can be performed by a single worker without requiring a skilled technician. Also, the time required for repair is greatly reduced. In addition, as a unit, assembly becomes easy and cost reduction can be achieved.

[Brief description of the drawings]

FIG. 1 is a conceptual diagram showing one embodiment of the present invention.

FIG. 2 is an explanatory view of the air cooler of FIG. 1 as viewed from an air inlet direction.

FIG. 3 is a conceptual diagram showing a main part of another embodiment of the present invention.

FIG. 4 is a conceptual diagram showing an example of a conventional technique.

[Explanation of symbols]

 1a, b air cooler 2 cooling tunnel 3 thermoelectric conversion element 5 radiator 6 drain pan 7a, b temperature detector 8 cooler temperature setter 9a, b temperature controller 10a, b DC current regulator 22 air duct 23 pivot Reference Signs List 50 humidifier 53 humidifying port 20, 60 blower 70 case 75 air flow path 81 airflow distribution plate 82 air heater 91 temperature detector 95 humidity detector

Claims (3)

[Claims] 1. A constant-temperature and constant-humidity air supply device comprising an air flow path provided with a blower, an air cooler, an air heater and a humidifier arranged from an air inlet to an air supply port. The air inlet is divided into a plurality of openings, and each of these openings is provided with a cooling cavity made of a thermally conductive material and an outer surface of the cooling cavity as the air cooler so that heat can be transferred to and from the cooling cavity. A plurality of air coolers constituted by a thermoelectric conversion element in contact with and a radiator in heat exchange with the thermoelectric conversion element are detachably mounted.Each air cooler has an air temperature detector and the air temperature detector. And a controller for controlling the operation of a thermoelectric conversion element of an air cooler to which the air temperature detector belongs according to an air temperature detection signal of the air temperature detector. apparatus. 2. A blower is detachably connected to each air cooler via an air duct having a plurality of air outlets detachably connectable to air inlets of respective cooling cavities. Item 2. A constant temperature and constant humidity air supply device according to Item 1. 3. A plurality of openings provided by dividing an air inlet are formed in the same shape, and a plurality of air coolers are provided.
The constant temperature / humidity air supply device according to claim 1 or 2, wherein the air cooler is configured to be replaceable by being configured by air cooler modules unitized to the same specification.