JPH10314639A - Liquid material coating applicator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve the accuracy of uniform coating and to make constitution simpler and more inexpensive with a liquid material coating applicator for applying a liquid material for adhesion or electrical connection to members to be coated, such as semiconductor chips. SOLUTION: A single hole nozzle is mounted at the front end of a syringe for coating mounted at a Z-axis moving block. An X-axis moving block 12 and Y-axis moving block 21 which move this Z-axis moving block in an X-axis direction and a Y-axis direction exist. A single rotating/linear motion converting mechanism exists as the mechanism for moving the X-axis moving block 12 and the Y-axis moving block 21. This mechanism is a position assignment type motor and two eccentric disks 32, 33 mounted at its output shaft 31a. The one eccentric disk 32 comes into contact with the end face 12a of the X-axis moving block 12 and the other eccentric disk 33 comes into contact with the end face 21a of the Y-axis moving block 21.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid material applying apparatus for applying a liquid material to a member to be coated for bonding, bonding, coating for electrical connection or protection, and the like. In the present invention,
Liquid materials are not only ordinary liquids, but also gel-like ones.
This includes liquid and viscous substances in a broad sense, such as paste-like substances, and also includes those containing granular substances in liquid and viscous substances such as conductive adhesives. In addition, the characteristics of the liquid material are not limited to the above representative examples, but may be arbitrary. A typical example of a member to be coated is a semiconductor chip, and as a liquid material applied to the member, a material for bonding or electrically connecting the semiconductor chip to a printed circuit board can be cited as a typical example. The material is not limited to this, but is optional.

[0002]

2. Description of the Related Art FIG. 16 (a) is a perspective view showing an outline of a coating syringe 81 in a conventional liquid material coating apparatus, and FIG. 16 (b) is a bottom view of the coating syringe 81. This conventional syringe 81 for application has a multi-aperture nozzle 82 composed of a plurality of nozzles 82a for discharging a liquid material attached to the tip (lower end) thereof. The application syringe 81 is configured to be vertically movable along the Z-axis direction (vertical direction). The application syringe 81 is lowered in a state where the application syringe 81 is positioned directly above a member to be applied (for example, a semiconductor chip) (not shown), and the multi-hole nozzle 82 is positioned on the surface to be applied, which is the horizontal upper surface of the member to be applied. The liquid material is simultaneously applied to the surface to be applied from a plurality of nozzles 82a.

In the case of this conventional example, it is not necessary to move the application syringe 81 in the X and Y directions when applying the liquid material to a plurality of points, and since the application is performed simultaneously at a plurality of points, the structure is simplified and the work efficiency is improved. There are advantages.

FIG. 17 shows an external structure of another conventional liquid material coating apparatus. Nozzle 1 at tip of application syringe 91
One single-hole nozzle 92 is attached, and the application syringe 9
1 is configured to be moved up and down along the Z-axis direction by a Z-axis moving mechanism 93. X axis moving mechanism 94
Is an X-axis moving block 95 movable along the X-axis direction.
And a position designating motor 96 such as a stepping motor or a servo motor for driving the X-axis moving block 95.
It is composed of A ball screw (not shown) is attached to the output shaft of the position designation motor 96, and the ball screw is linked to a bearing follower of the X-axis moving block 95. The Z-axis moving mechanism 93 is mounted on a rising portion of the X-axis moving block 95. The Y-axis moving mechanism 97 includes a Y-axis moving block 98 that is movable along the Y-axis direction, and a position-designating motor 99 such as a stepping motor or a servo motor that drives the Y-axis moving block 98. A ball screw (not shown) is attached to an output shaft of the position designation type motor 99, and the ball screw is linked to a bearing follower of the Y-axis moving block 98. The X-axis moving mechanism 94 is attached to the Y-axis moving block 98. When a system is configured to apply a liquid material from a single-hole nozzle 92 to a plurality of points on a surface of a member to be coated (for example, a semiconductor chip), data of the XY coordinates of the plurality of points is previously stored in a control system. The setting and registration are performed, and the amount of rotation of the position designating motor 96 of the X-axis moving mechanism 94 and the position designating motor 99 of the Y-axis moving mechanism 97 is controlled based on the coordinate data, and registered in advance. The liquid material is sequentially applied to a plurality of application points on the application surface. In this case, since the XY coordinate data can be arbitrarily set and registered, the liquid material can be applied to an arbitrary number of plural points at an arbitrary position.

[0005]

In the case of the conventional example shown in FIG. 16, since a plurality of nozzles 82a in the multi-hole nozzle 82 have different lengths and inner diameters because the multi-point simultaneous coating is employed, Variations in the amount of liquid material applied to multiple points on the surface to be applied are likely to occur, and in some cases, the amount of application may be insufficient at some points or may not be applied. There was a problem that accuracy was not good.

In the case of the prior art shown in FIG. 17, a dedicated position designating motor 96 for moving the coating syringe 91 in the X-axis direction and a position designating motor 99 for moving the coating syringe 91 in the Y-axis direction are provided. The above two types of position-designating motors are required, and a complicated structure mechanism for screwing with a ball screw is used.

The present invention has been made in view of such circumstances, and provides a liquid material coating apparatus capable of improving the accuracy of uniform coating and simplifying and reducing the configuration. It is intended to be.

[0008]

A liquid material application apparatus according to the present invention comprises an X-axis moving block and a Y-axis, which are provided with a coating syringe for discharging a liquid material from a nozzle at the tip and applying the liquid material to a surface to be coated when the liquid material is lowered. It is premised on a configuration mounted on a moving block. And since the nozzle uses one single-hole nozzle as the nozzle and sequentially applies the coating to a plurality of application locations, compared to the conventional case of simultaneous application using a multi-nozzle consisting of a plurality of nozzles, Variations in the amount of liquid material applied to a plurality of application locations are reduced, and the accuracy of uniform application is improved. Further, in order to transition the application syringe / single-hole nozzle along a predetermined trajectory where the plurality of application locations exist, a single rotation / single rotation type driving both the X-axis moving block and the Y-axis moving block. Equipped with a linear motion conversion mechanism, which simplifies the configuration as compared with the conventional example which requires two position designating motors for X-axis movement and Y-axis movement and a mechanism for each ball screw. And cost reduction.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a specific embodiment of a liquid material application apparatus according to the present invention will be described in detail with reference to the drawings.

[First Embodiment] FIG. 2 is a front view showing a schematic configuration of a liquid material application apparatus according to a first embodiment.
(A) is a plan view (AA ′ in FIG. 2) showing a schematic configuration of a Y-axis moving mechanism 200 in the liquid material application apparatus.
FIG. 1B is a plan view (a cross-sectional view taken along the line BB ′ in FIG. 2) illustrating a schematic configuration of the X-axis moving mechanism 100.

The X-axis moving mechanism 100 is configured as follows. Two (one not shown) X-axis linear guide rails 11 along the mutually parallel X-axis direction are fixed to a fixed frame (not shown). Two X-axis linear guide rails 11 each having a guide body 13 fixed to four front, rear, left and right positions on the bottom surface of a rectangular X-axis moving block 12 in plan view
And the X-axis moving block 12 is slidable along the X-axis direction. A pin 14 protrudes from the end surface of the X-axis moving block 12 in the Y-axis direction, and a pin 15 protrudes from a fixed frame (not shown). A tension spring 16 extends between the pins 14 and 15 along the X-axis direction. are bridged, X ₁ direction (the drawing, the right direction) by the biasing force of the X-moving block 12 tension spring 16 is biased attracted to. On the upper surface of the X-axis moving block 12, two mutually parallel Y-axis linear guide rails 17 along the Y-axis direction are attached. The above is the configuration of the X-axis moving mechanism 100.

The Y-axis moving mechanism 200 is configured as follows. Y-axis moving block 21 having an L-shape in plan view
Slide bearings 22 are provided on the left and right sides of the bottom surface of the X-axis moving block 12 so as to be slidably engaged with and guided by two Y-axis linear guide rails 17 on the X-axis moving block 12, and the Y-axis moving block 21 is moved in the Y-axis direction. Is slidable along. A pin 23 projects from an end surface of the Y-axis moving block 21 in the X-axis direction, and a pin 24 projects from a fixed frame (not shown).
Are bridged the tension spring 25 along the Y-axis direction over between 3, 24, Y-moving block 21 is tension spring 25 Y ₁ direction (in the drawing, the lower direction) by the urging force of biased attracted to I have. The above is the configuration of the Y-axis moving mechanism 200.

A rotation / linear motion conversion mechanism 300 is disposed at the corner of the L-shaped Y-axis moving block 21.
The rotation / linear motion conversion mechanism 300 includes a position designating motor 31 such as a stepping motor (pulse motor) or a servomotor, and two upper and lower eccentric disks 3 attached to an output shaft 31 a of the position designating motor 31.
2, 33. A position-designated motor is a type of motor that controls the amount of rotation in extremely small angular units and can precisely specify the position of the stop phase, such as the stepping motor and servo motor mentioned above as typical examples. Refers to general. Eccentric disc 32 and the lower outer peripheral surface thereof is in contact with a vertical end face 12a of the X ₁ direction side of the X-axis moving block 12. The position of the X-axis moving block 12 urged by the tension spring 16 is regulated by contact with the lower eccentric disk 32. The outer peripheral surface of the upper eccentric disk 33 is Y
Are in contact with the vertical end surface 21a facing the Y ₁ direction enters corner of the shaft moving block 21. Tension spring 25
The position of the Y-axis moving block 21 which is attracted and biased by the abutment on the upper eccentric disk 33 is regulated. The two eccentric disks 32 and 33 are identical in shape and size to each other, have a perfect circular outer peripheral surface, and have the same phase relationship with each other at a position eccentric with respect to the output shaft 31a of the position designation type motor 31 by the same amount. Installed with.

A Z-axis moving mechanism 500 is mounted on the upper surface of the Y-axis moving block 21 via an XY fine movement adjustment stage 400. The XY fine movement adjustment stage 400 is configured so that the Z axis movement mechanism 500 can be finely adjusted independently of each other along the X axis direction and the Y axis direction by manual operation. As the XY fine movement adjustment stage 400, a known one can be used. Therefore, a detailed description of the configuration of the XY fine movement adjustment stage 400 is omitted. X
The Y fine movement adjustment stage 400 is for finely adjusting the relative positional relationship of the application nozzle (this is a single-hole nozzle as will be described later) with respect to the member to be applied which is sequentially changed.

The Z-axis moving mechanism 500 is configured as follows. An L-shaped support block 51 is mounted on the XY fine movement adjustment stage 400. Support block 51
The two (one not shown) Z-axis linear guide rails 52 along the parallel Z-axis direction are fixed to the side surfaces of. Guide bodies 54 fixed to four front, rear, left, and right sides of one side surface of the Z-axis moving block 53 are slidably fitted to the two Z-axis linear guide rails 52 and fitted via slide bearings (not shown) in a state where they are prevented from coming off. The Z-axis moving block 53 is slidable along the Z-axis direction. A syringe elevating motor 55 is mounted on the back side of the column block 51, and an elevating cam 56 is attached to an output shaft of the syringe elevating motor 55, while a lower end of the Z-axis moving block 53 is driven by the lower end. A roller bearing 57 is attached, and the uppermost portion of the outer peripheral surface of the elevating cam 56 is in contact with the driven roller bearing 57. Syringe lifting motor 55
Positioning type motors such as stepping motors and servo motors are also used. Z axis moving block 53
A syringe holder 58 protrudes forward from the front of the device, and a syringe for application (dispense syringe) 59 is attached to the syringe holder 58 in a vertical posture. The application syringe 59 is of a single-hole type in which a single-hole nozzle 60 as a single nozzle is set at the tip (lower end).

At the upper end of the Z-axis moving block 53, a lowest point height adjusting screw 61 for adjusting the lowest point height of the vertical movement range of the single hole nozzle 60 of the application syringe 59 is mounted. The tip (lower end) of the lowermost point height adjusting screw 61 comes into contact with the upper surface of the stopper 51 a of the column block 51. With the rotation of the lifting / lowering cam 56, the minimum diameter portion is located directly above, and at the timing when the minimum diameter portion contacts the lowermost end portion of the driven roller bearing 57, the lowermost point height adjusting screw 61 The tip is a prop block 5
In a state in which the stopper 51a is not in contact with the upper surface of the first stopper 51a but is separated therefrom, the single roller set in the application syringe 59 that moves up and down via the driven roller bearing 57, the Z-axis moving block 53, and the syringe holder 58 is set. The lowermost discharge port of the hole nozzle 60 is also located at the lowermost end of the vertical movement range. The height of the coating surface (upper surface) of the member to be coated (not shown) on which the liquid material (paste) is coated is the surface to be coated with the liquid material discharged from the discharge port in a positional relationship with the discharge port of the single-hole nozzle 60. It is sufficient if the height is optimal for the state of application to the substrate. However, when the height position of the surface to be coated is higher than the lowermost end of the vertical movement range of the single-hole nozzle 60, not only the liquid material is not normally applied, but also the surface The single-hole nozzle 60 may collide and damage the single-hole nozzle 60 or the member to be coated. In order to avoid such a situation, the lowermost point height adjusting screw 61 is provided. That is, the screw advance / retreat amount of the lowest point height adjusting screw 61 is adjusted according to the change in the height position of the surface to be coated, and the minimum diameter portion of the elevating cam 56 is positioned directly above and the driven roller bearing 57 In the appropriate rotation phase of the elevating cam 56 before the timing of contact with the lowermost end of the lower end, the tip of the lowermost point height adjusting screw 61 has already reached the stopper 51 of the support block 51.
a, the lowermost movement point of the single-hole nozzle 60 is regulated, and the lowermost movement point remains unchanged regardless of the rotation of the lift cam 56 thereafter. Yes, single-hole nozzle 60 for the surface to be coated
To prevent collisions.

In FIG. 2, reference numeral 62 denotes a cap of the application syringe 59, and reference numeral 63 denotes a joint for connecting a pneumatic control tube (not shown).

An important difference in comparison with the conventional example in the configuration of the liquid material application apparatus configured as described above is that when driving the X-axis moving mechanism 100 and the Y-axis moving mechanism 200, a single Positioning type motor 31 which is the driving source of
That is, it is configured to be driven by a single rotation / linear motion conversion mechanism 300 composed of a combination of the two eccentric disks 32 and 33.

Next, the operation of the liquid material coating apparatus having the above configuration will be described with reference to the flowchart of FIG. 3 and the operation explanatory diagrams of FIGS. 4, 5 and 6. Eccentric disks 32, 33 shown in FIG.
Is the initial state. This initial state is also the state shown in FIG. When a start of application is instructed in a control system (not shown), the operation from step S1 is started. In step S1, the syringe elevating motor 55 of the Z-axis moving block 53 is driven by 180 °, and the elevating cam 56 is moved from the state where the maximum diameter portion is directly above to the state where the minimum diameter portion is directly above. Rotate. As a result, the Z-axis moving block 53 in which the driven roller bearing 57 at the lower end thereof is in contact with the elevating cam 56 is lowered, and accordingly, the application syringe 59 and the single-hole nozzle 60 are lowered, and the single-hole nozzle A discharge port at the lower end of 60 reaches immediately above the surface to be coated of a member to be coated (for example, a semiconductor chip) (not shown). In step S2, a predetermined amount of liquid material from the discharge port of the leading end of a predetermined pressure is applied to the coating syringe 59 single-hole nozzle 60 (e.g., liquid adhesive) are to the first point P ₁ of the coated surface When the application is completed, the discharge pressure is released. In step S3, the syringe elevating motor 55 is further driven by 180 °, and the elevating cam 56 is rotated from the state where the minimum diameter portion is directly above to the state where the maximum diameter portion is directly above. Thus, the Z-axis moving block 53 is raised, the application syringe 59 and the single-hole nozzle 60 are raised, and the discharge port of the single-hole nozzle 60 is separated from the surface to be coated.

In the following description, eccentric disks 32, 33
Regarding the effective radii r ₁ , r ₂ , r ₃ , the magnitude relation is r ₁ <r ₂ <r ₃ . Further, a ₀ , a ₋ , a at the position in the X-axis direction of the end surface 12 a of the X-axis moving block 12.
_{For +} , the magnitude relationship of the coordinate values is a ₊ <a ₀ <
a ₋ , and b ₀ , b ₋ , b _{+ at} the position of the end surface 21a of the Y-axis moving block 21 in the Y-axis direction have a magnitude relationship of b ₋ <b ₀ <b ₊ . The usage of the suffixes "+" and "-" is reversed for a and b. That is, the output shaft 31a of the position designation type motor 31 is set to have a plus side on the far side and a minus side on the approach side. Also, (a), (b), (c) and (d) shown in FIG.
(B), (c), and (d) respectively.

As shown in FIG. 5 (a), in the initial phase state of the eccentric disks 32, 33 attached to the output shaft 31a of the position-designating motor 31, the end surface 12a of the X-axis moving block 12 The radius from the center of the output shaft 31a of the position designating motor 31 to the contact point with the X-axis moving block 12, that is, the effective radius of the lower eccentric disk 32 in contact with, is r ₂ , and the Y-axis moving block effective radius of the end face 21a of 21 the upper eccentric disc 33 which abuts the center of the output shaft 31a to the contact point of the Y-moving block 21 is r _1, a relationship of r ₁ <r ₂ . Then, as shown by the solid line in FIG.
X-axis X-axis direction position of the end face 12a of the movable block 12 in this case is a _0, the end faces of the Y-moving block 21 2
Y-axis direction position of 1a is b _- a. The X-axis direction distance between the end surface 12a and the single-hole nozzle 60 of the X-moving blocks 12 and x _0, and the distance in the Y-axis direction between the end surface 21a and the single-hole nozzle 60 of the Y-moving blocks 21 and y ₀ , Regardless of the phase of the eccentric disks 32, 33,
Regardless of the position of the end faces 12a and 21a, the distance x ₀ ,
It goes without saying that y ₀ always keeps a constant value. In the case of FIG. 5A and FIG. 6A, the distance x ₀ from the position a ₀ of the end face 12a to the plus side in the X-axis direction and the end face 21
position of a b _- from a position of the coordinate point distance y ₀ in the Y-axis minus direction side single-hole nozzle 60, thereby, the application point of the liquid material by the single-hole nozzle 60 is a first point P ₁ Will be understood.

In step S4, the position designating motor 31 in the rotary / linear motion conversion mechanism 300 is driven counterclockwise by 90 ° in a plan view, and the two eccentric disks 32, 3 are driven.
3 by 90 ° in the same direction. Then, as shown in FIG. 5B, the effective radius of the lower eccentric disk 32 from the center of the output shaft 31a of the position designation type motor 31 to the contact point with the end surface 12a of the X-axis moving block 12 is: r _{1 and the} output shaft 31a of the upper eccentric disk 33
Center from the effective radius to the contact point between the end face 21a of the Y-moving block 21 becomes r _2. When changing from FIG. 5A to FIG. 5B, the end face 1 of the X-axis moving block 12 is changed.
2a is shifted to the right side by the decrease of the effective radius r ₂ → r ₁ (r ₂ −
r ₁ ), and the end surface 21 a of the Y-axis moving block 21
Is increased by increasing the effective radius r ₁ → r ₂ (r ₂ −r
₁ ) Just move. At this time, as shown by the dotted line in FIG. 6B, the position of the end surface 12a of the X-axis moving block 12 in the X-axis direction is a ₋ , and the position of the end surface 21a of the Y-axis moving block 21 in the Y-axis direction is b ₀ . In the case of FIG. 5B and FIG. 6B, the distance x ₀ from the position a ₋ of the end surface 12a to the plus side in the X-axis direction and the end surface 21
coordinate point distance y ₀ from the position b ₀ of a Y-axis direction negative side is the position of the single-hole nozzle 60, thereby, the position is the second point P of the single hole nozzle 60 of the coating syringe 59
Transitions to ₂ . Since the outer peripheral surfaces of both the eccentric disks 32 and 33 are perfect circles, the first point P ₁ and the second point P
Locus of transition of the single hole nozzle 60 to ₂ an arc-shaped locus L ₁ equivalent 1 yen quarter.

In step S5, the application syringe 59 and the single-hole nozzle 6 are operated in the same manner as in step S1.
0 is lowered, and the discharge port of the single-hole nozzle 60 is set immediately above the surface of the member to be coated (not shown). In step S6, the point to be applied to the second point P ₂ of the coated surface a predetermined amount of the liquid material from the discharge port of the single-hole nozzle 60 of the coating syringe 59 by the same operation as in step S2. In step S7, the application syringe 59 and the single-hole nozzle 60 are raised by the same operation as in step S3, and the discharge port of the single-hole nozzle 60 is separated from the surface to be coated.

In step S8, the position-designating motor 31 in the rotary / linear motion conversion mechanism 300 is further driven counterclockwise by 90 °, and the eccentric disks 32, 33 are rotated.
Are rotated by 90 ° in the same direction. Then, as shown in FIG. 5C, the effective radius of the lower eccentric disk 32 from the center of the output shaft 31a of the position designation type motor 31 to the contact point with the end surface 12a of the X-axis moving block 12 is: r ₂ , and the output shaft 31 a for the upper eccentric disk 33.
It becomes r ₃ effective radius from the center to the contact point between the end face 21a of the Y-axis moving block _{21 (r 1 <r 2 <} r 3).
When the state changes from (b) to (c) in FIG. 5, the end surface 12a of the X-axis moving block 12 is now inverted by the increase of the effective radius r ₁ → r ₂ , and only the left side is (r ₂ −r ₁ ). And the end face 21a of the Y-axis moving block 21 has an effective radius r ₂
→ Following the increase of r ₃ moves to the rear side only (r ₃ -r _2). At this time, as shown by the dashed line in FIG.
The position in the axial direction is a ₀ , and the position in the Y-axis direction of the end face 21 a of the Y-axis moving block 21 is b ₊ . FIG. 5 (c)
In the case of FIG. 6C, the position a _{0 of the} end face 12a is set.
Coordinate point distance y ₀ from the position b ₊ Y-axis direction negative side of the X-axis direction positive side distance x ₀ a and the end surface 21a is the position of the single-hole nozzle 60 from which the single coating syringe 59 position of the hole nozzle 60 is changed to the third point P _3. Locus of transition of the single hole nozzle 60 from the second point P ₂ to the third point P ₃ is an arc-shaped locus L ₂ equivalent 1 yen quarter.

In step S9, steps S1, S
The application syringe 59 and the single-hole nozzle 60 are lowered by the same operation as in Step 5, and the discharge port of the single-hole nozzle 60 is set immediately above the coating surface of the member to be coated (not shown). In step S10, the point to be applied with respect to step S2, S6 and third points P ₃ of the coated surface a predetermined amount of the liquid material from the discharge port of the single-hole nozzle 60 of the coating syringe 59 by the same operation. In step S11, the application syringe 59 and the single-hole nozzle 60 are raised by the same operation as steps S3 and S7, and the discharge port of the single-hole nozzle 60 is separated from the surface to be coated.

In step S12, the position designating motor 31 in the rotation / linear motion conversion mechanism 300 is driven counterclockwise by 90 ° to rotate both eccentric disks 32 and 33 by 90 ° in the same direction. Then, as shown in FIG. 5D, the effective radius of the lower eccentric disk 32 from the center of the output shaft 31a of the position designation type motor 31 to the contact point with the end surface 12a of the X-axis moving block 12 is: r _3, and the effective radius from the center of the output shaft 31a for the upper eccentric disc 33 to the contact point between the end face 21a of the Y-moving block 21 becomes _{r 2 (r 1 <r 2} <r 3). This figure 5
(C) changes from (c) to (d), the end surface 12a of the X-axis moving block 12 continues to move to the left by (r ₃ −r ₂ ) due to the increase of the effective radius r ₂ → r ₃ , and the Y-axis moving block 12 The end surface 21a of the mirror 21 is now inverted by the decrease of the effective radius r ₃ → r ₂ and moves toward the front by (r ₃ −r ₂ ). At this time, the position of the end surface 12a of the X-axis moving block 12 in the X-axis direction is a ₊ , and the end surface 21a of the Y-axis moving block 21 is indicated by a two-dot chain line in FIG.
Is b _{0 in} the Y-axis direction. In the case of FIG. 5D and FIG. 6D, the distance x ₀ is on the plus side in the X-axis direction from the position a ₊ of the end face 12a and the distance is on the minus side in the Y-axis direction from the position b _{0 of the} end face 21a. The coordinate point of y _{0 is} the position of the single-hole nozzle 60, whereby the position of the single-hole nozzle 60 of the application syringe 59 transitions to the fourth point P ₄ . Third arcuate trajectory trajectory equivalent 1 yen quarter of the transition of single-hole nozzle 60 from point P ₃ to the fourth point P ₄ L
It becomes ₃ .

In step S13, steps S1,
The application syringe 59 and the single-hole nozzle 60 are lowered by the same operation as S5 and S9, and the discharge port of the single-hole nozzle 60 is set immediately above the surface of the member to be coated (not shown). In step S14, step S2
S6, S10 points to be applied for the fourth point P ₄ of the coated surface a predetermined amount of the liquid material from the discharge port of the single-hole nozzle 60 of the coating syringe 59 by the same operation as the. In step S15, the application syringe 59 and the single-hole nozzle 60 are operated in the same manner as in steps S3, S7, and S11.
And the discharge port of the single-hole nozzle 60 is separated from the surface to be coated.

In step S16, the position designating motor 31 of the rotation / linear motion conversion mechanism 300 is driven counterclockwise by 90 ° to rotate both eccentric disks 32, 33 by 90 ° in the same direction. Then, as shown in FIG. 5A, the effective radius of the lower eccentric disk 32 from the center of the output shaft 31a of the position designation type motor 31 to the contact point with the end surface 12a of the X-axis moving block 12 is: r ₂ , and the effective radius of the upper eccentric disk 33 from the center of the output shaft 31 a to the contact point with the end surface 21 a of the Y-axis moving block 21 is r ₁ (r ₁ <r ₂ <r ₃ ). This figure 5
(D) from (d) to (a), the end face 12a of the X-axis moving block 12 is now inverted by the decrease of the effective radius r ₃ → r ₂ and moves rightward by (r ₃ −r ₂ ), The end surface 21a of the Y-axis moving block 21 subsequently moves forward (r ₂ −r ₁ ) due to the decrease in the effective radius r ₂ → r ₁ . At this time, as shown by the solid line in FIG. 6A, the position of the end surface 12a of the X-axis moving block 12 in the X-axis direction is a ₀ , and the position of the end surface 21a of the Y-axis moving block 21 in the Y-axis direction is b _- to become. FIG. 5A and FIG.
In the case of (a), the coordinate point of the distance x ₀ from the position a ₀ of the end face 12a on the plus side in the X-axis direction and the distance y ₀ from the position b _{− of the} end face 21a on the minus side in the Y-axis direction is a single-hole nozzle. 6
0 is the position of, thereby, the position of the single-hole nozzle 60 of the coating syringe 59 is regression transitions to the first point P _1. Locus of transition of the fourth single-hole nozzle 60 from the point P ₄ to the first point P ₁ is an arc-shaped locus L ₄ equivalent 1 yen quarter.

The four arc-shaped trajectories L ₁ , L ₂ , L ₃ , L ₄ corresponding to a quarter circle described above are collected as a single common arc-shaped trajectory L. This arc-shaped trajectory L is also described in FIGS. The rotation direction of the single common arc-shaped locus L is the same as the rotation direction of the position designation type motor 31 and is counterclockwise. The single common arc-shaped trajectory L is a true circle having a radius of eccentricity δ between the center of the output shaft 31a of the position designation type motor 31 and the center of a perfect circle which is the outer peripheral surface of both eccentric disks 32, 33. It is a locus of. Assuming that the radius of the eccentric disks 32 and 33 is r ₀ , 2 · r ₀ = r ₁ + r ₃ and the amount of eccentricity δ is δ = r ₀ −r ₁ = r ₃ −r ₀ = (r ₃ −r ₁ )
/ 2.

Returning from step S16 to step S1, during this time the applied member to be applied is carried out, and the next unapplied member to be applied is carried in and replaced.
Hereinafter, the same operation as described above is repeated.

In the liquid material application apparatus according to the present embodiment, a single position designating motor 31 and two eccentric disks 3
2 and 33, a plurality of points P ₁ on a single common arc-shaped trajectory L.
It is possible to sequentially applying a liquid material to to P _4, requires a mechanism of two positions specified type motors 96 and 99 and each of the ball screw of the X-axis direction moving the Y-axis direction movement This is effective in simplifying the configuration and reducing the cost as compared with the conventional example described above. In addition, since the application is performed sequentially on a plurality of points P _{1 to} P ₄ using the single-hole nozzle 60, the application amount of the liquid material to the plurality of points is smaller than in the case of simultaneous application using the multi-hole nozzle 82. Can be reduced, and the accuracy of uniform application can be improved.

[Embodiment 2] FIG. 8 is a front view showing a schematic configuration of a liquid material application apparatus according to Embodiment 2, and FIG.
(A) is a plan view schematically showing a configuration of a Y-axis moving mechanism 200 in the liquid material application apparatus (CC ′ in FIG. 8).
FIG. 7B is a plan view (a cross-sectional view taken along the line DD ′ in FIG. 8) illustrating a schematic configuration of the X-axis moving mechanism 100. In these figures, the same reference numerals as those in FIGS. 1 and 2 according to the first embodiment denote the same elements in the second embodiment, and thus description thereof will be omitted. The configuration of the second embodiment is different from that of the first embodiment as follows.

In the first embodiment, the rotation / linear motion conversion mechanism 300 includes a position designation type motor 31 and two upper and lower eccentric disks 32, 33 attached to its output shaft 31a.
And was composed of On the other hand, Embodiment 2
In the above, the eccentric cams 32a and 33a are used instead of the eccentric discs.
Is used. That is, the lower eccentric cam 32a
The outer peripheral surface thereof is in contact with a vertical end face 12a of the X ₁ direction side of the X-axis moving block 12. The upper eccentric cam 33a is an outer circumferential surface thereof is in contact with a vertical end face 21a facing the Y ₁ direction enters corner of the Y-moving block 21. The two eccentric cams 32a and 33a have the same shape and size, and their outer peripheral surfaces are not perfect circles.
As shown in the characteristic diagram of the allocation angle-displacement amount of
In the angle range from 180 ° to 180 °, the distance from the output shaft 31a of the position designation type motor 31 to the outer peripheral surface increases linearly in proportion to the angle, and in the angle range from 180 ° to 360 °, the output shaft 31a. The distance from to the outer peripheral surface decreases linearly in inverse proportion to the angle, and the displacement becomes 18
It is symmetrical about the 0 ° phase position. The two eccentric cams 32a and 33a are mounted in the same phase relationship.

When the liquid material application device configured as described above is operated according to the processing of the flowchart of FIG.
It looks like this: This will be described with reference to FIG. In step S2, the single-hole nozzle 6 of the application syringe 59
A predetermined amount of liquid material from the discharge port of 0 to point to application to the first point to Q ₁ the coated surface of the coating member (for example, a semiconductor chip), in step S4, the single-hole nozzle 60
The along a linear trajectory M ₁ diagonal right back 45 degrees to transition to the second point Q _2, in step S6, the second point Q of the coated surface a predetermined amount of the liquid material from the discharge port of the single-hole nozzle 60 _In step S8, the single-hole nozzle 60 is moved obliquely to the left 45 degrees in a linear locus M _2.
To the third point Q ₃ along
In, a predetermined amount of liquid material from the discharge port of the single-hole nozzle 60 points to applying the third point Q ₃ of the coated surface, in step S12, the single-hole nozzle 60 of the oblique left front 45 degree linearly the fourth point Q along Jo locus _{M 3
4} and in step S14, the single-hole nozzle 6
0 predetermined amount of liquid material from the discharge port of the point to be applied for the fourth point Q ₄ of the coated surface, in step S16, the linear locus M of a single-hole nozzle 60 obliquely right front 45 degrees
₄ is a regression transition to the first point Q ₁ along.

The four linear trajectories M ₁ , M described above
₂ , M ₃ and M ₄ form a square locus M. This square locus M is also described in FIG. From the single-hole nozzle 60 of the application syringe 59, the liquid material is applied to the surface to be applied to the four vertices of the square locus M.

In the liquid material applying apparatus according to the present embodiment, a single position designating motor 31 and two eccentric cams 3 are provided.
Rotary / linear motion conversion mechanism 300 comprising 2a and 33a
A plurality of points M _{1 to} M on the square locus M
Conventionally, it is possible to sequentially apply a liquid material to the ₄ and requires two position designating motors 96, 99 for X-axis movement and Y-axis movement, and a mechanism of each ball screw. This is effective in simplifying the configuration and reducing the cost as compared with the example. In addition, a single-hole nozzle 6
Since the application is performed sequentially on a plurality of points M _{1 to} M ₄ using 0, variation in the application amount of the liquid material to the plurality of points is reduced as compared with the case of simultaneous application using the multi-hole nozzle 82. In addition, the accuracy of uniform application can be improved.

[Third Embodiment] As a modification of the first embodiment, if the rotation angle per rotation of the position designation type motor 31 is set to 1/2 of 45 ° instead of 90 °, as shown in FIG. As shown in FIG. 11A, the liquid material can be uniformly applied to _eight points P _{1 to} P ₈ obtained by equally dividing the arc-shaped trajectory L into eight parts. As described above, the liquid material can be evenly applied to the _six points P _{1 to} P ₆ obtained by equally dividing the arc-shaped locus L into six. Arc-shaped locus L
Is equally arbitrary. However, the circular locus L
May be applied unequally.

[Fourth Embodiment] As a modification of the first embodiment, the lower eccentric disk 3 which is in contact with the X-axis
When the diameter of the nozzle 2 is larger than the diameter of the upper eccentric disk 33 that contacts the Y-axis moving block 21, the single-hole nozzle 60 moves as shown in FIG. Will be drawn. Further, when the diameter of the upper eccentric disk 33 abutting on the Y-axis moving block 21 is made larger than the diameter of the lower eccentric disk 32 abutting on the X-axis moving block 12, the single-hole nozzle 60 becomes the one shown in FIG. (B)
A long elliptical locus L ″ is drawn in the depth direction as shown in FIG. 5. The application point may be a point obtained by dividing the elliptical locus L ′, L ″ in any manner.

[Fifth Embodiment] As a modification of the second embodiment, if the rotation angle per rotation of the position designation type motor 31 is set to 1/2 of 45 ° instead of 90 °, as shown in FIG. Points M _{1 obtained} by equally dividing the square locus M into eight
The liquid material can be uniformly applied against ~M _8. It is arbitrary how the square locus M is divided. Of course, the square locus M may be unequally divided and applied.

[Sixth Embodiment] As a modification of the second embodiment, the lower eccentric cam 3 abutting on the X-axis moving block 12
When the size of 2a (the amount of displacement with respect to the allocation angle) is larger than the size of the upper eccentric cam 33a (the amount of displacement with respect to the allocation angle) that abuts on the Y-axis moving block 21, the single-hole nozzle 60 is moved to the position shown in FIG. As shown in a), a long locus M 'is drawn in the left-right direction. In addition, the size of the upper eccentric cam 33a that abuts on the Y-axis moving block 21 is reduced by the size of the lower eccentric cam 32a that abuts on the X-axis moving block 12.
14B, the single-hole nozzle 60 draws a long locus M ″ in the depth direction as shown in FIG. 14B. The point may be divided in any way.

[Seventh Embodiment] In any one of the first to sixth embodiments, the application syringe 59 is lowered, the single-hole nozzle 60 is brought close to the surface to be coated, and the position is designated as it is. When the mold motor 31 is configured to be driven over a predetermined angle, FIG.
As shown in (f), the liquid material can be applied over a predetermined length in a continuous line along an arc-shaped trajectory, an elliptical trajectory, a square trajectory, or a diamond-shaped trajectory. Of course, if the position designation type motor 31 is continuously rotated once, it is possible to apply the liquid material in a state of making one round of the trajectory as shown in FIGS.
The bold line indicates the application locus.

[0042]

According to the liquid material applying apparatus of the first aspect of the present invention, a single-hole nozzle is used as a nozzle for ejecting the liquid material and applying the liquid material to the surface to be applied. Since it is configured to perform coating sequentially, the variation in the application amount of the liquid material to the plurality of application locations is smaller than that in the case of the conventional simultaneous application using a multi-aperture nozzle composed of a plurality of nozzles. Thus, the accuracy of uniform application can be improved. Further, in order to transition the single-hole nozzle and thus the application syringe along a predetermined trajectory where the plurality of application locations are present, a single-type single rotation / drive that drives both the X-axis moving block and the Y-axis moving block is used. Equipped with a linear motion conversion mechanism, which simplifies the configuration as compared with the conventional example which requires two position designating motors for X-axis movement and Y-axis movement and a mechanism for each ball screw. And cost reduction.

According to a second aspect of the present invention, there is provided the liquid material applying apparatus, wherein the single rotary / linear motion converting mechanism is a position-designating motor and an X-axis mounted on the output shaft of the position-designating motor. The eccentric disk for X-axis movement for reciprocating the moving block in the X-axis direction and the eccentric disk for Y-axis movement for reciprocating the Y-axis moving block in the Y-axis direction. While rotating the single-hole nozzle along an arc-shaped trajectory or an elliptical trajectory or a trajectory having a shape similar thereto, the liquid material is applied to the surface to be coated at a plurality of points on the trajectory in a point-like or linear manner. It can be applied uniformly.

According to a third aspect of the present invention, there is provided a liquid material applying apparatus, wherein the single rotary / linear motion converting mechanism is a position-designating motor and an X-axis mounted on the output shaft of the position-designating motor. Since the eccentric cam for X-axis movement for reciprocating the moving block in the X-axis direction and the eccentric cam for Y-axis movement for reciprocating the Y-axis moving block in the Y-axis direction are provided, While rotating the hole nozzle along a square locus or a lozenge locus or a locus similar to these shapes, the liquid material is uniformly distributed in a point-like or linear manner on the surface to be coated at a plurality of points on the locus. Can be applied.

[Brief description of the drawings]

FIG. 1 is a plan view showing a schematic configuration of a Y-axis moving mechanism and an X-axis moving mechanism in a liquid material application apparatus according to Embodiment 1 of the present invention.

FIG. 2 is a front view showing a schematic configuration of the liquid material application device according to the first embodiment.

FIG. 3 is a flowchart for explaining the operation of the liquid material application apparatus according to the first embodiment.

FIG. 4 is a perspective view showing an arc-shaped trajectory drawn by a single-hole nozzle of the liquid material application apparatus according to Embodiment 1 and a plurality of application points.

FIG. 5 is a plan view illustrating the operation of two eccentric disks in the rotation / linear motion conversion mechanism of the liquid material application device according to the first embodiment.

FIG. 6 is a principle explanatory diagram illustrating how a trajectory drawn by a single-hole nozzle of the liquid material application device according to the first embodiment is formed.

FIG. 7 is a plan view showing a schematic configuration of a Y-axis moving mechanism and an X-axis moving mechanism in a liquid material application apparatus according to Embodiment 2 of the present invention.

FIG. 8 is a front view showing a schematic configuration of a liquid material application device according to a second embodiment.

FIG. 9 is a characteristic diagram of the allocation angle-displacement amount of the eccentric cam in the liquid material application device according to the second embodiment.

FIG. 10 is a plan view showing a square locus drawn by a single-hole nozzle and a plurality of application points of a liquid material application apparatus according to a second embodiment.

FIG. 11 is a plan view showing an arc-shaped trajectory of a single-hole nozzle and a plurality of application points in a liquid material application apparatus according to Embodiment 3 of the present invention.

FIG. 12 is a plan view showing an elliptical trajectory of a single-hole nozzle and a plurality of application points in a liquid material application apparatus according to Embodiment 4 of the present invention.

FIG. 13 is a plan view showing a square locus drawn by a single-hole nozzle and a plurality of application points of a liquid material application apparatus according to Embodiment 5 of the present invention.

FIG. 14 is a plan view showing a lozenge-shaped locus drawn by a single-hole nozzle and a plurality of application points in a liquid material application apparatus according to Embodiment 6 of the present invention.

FIG. 15 is a plan view showing traces of various shapes drawn by a single-hole nozzle and a state of linear coating drawn by a single-hole nozzle summarized as a seventh embodiment of the present invention.

FIG. 16 is a perspective view showing an outline of a coating syringe in a conventional liquid material coating apparatus and a bottom view of the coating syringe.

FIG. 17 is a perspective view showing an external structure of another conventional liquid material applying apparatus.

[Explanation of symbols]

100 X-axis movement mechanism 200 Y-axis movement mechanism 300 Rotation / linear motion conversion mechanism 400 XY fine movement adjustment stage 500 Z-axis movement mechanism 12 X-axis movement block 12a Lower eccentricity End face with which the disc or eccentric cam contacts 21... Y-axis moving block 21a... End face with which the upper eccentric disc or eccentric cam contacts 31... Position specifying motor 31a. Side eccentric disk 33 Upper eccentric disk 32a Lower eccentric cam 33a Upper eccentric cam 53 Z-axis moving block 55 Syringe elevating motor 56 Elevating cam 57 use roller bearings 59 ...... applied for syringe 60 ...... single-hole nozzle P _i ... application of the point Q _i ... application point L ...... arc-shaped trajectory M ...... square-shaped locus L of ', L "... Oval locus M ', M" ... Rhombus locus

Claims (3)

[Claims] An application syringe is provided which is vertically movable and discharges a liquid material from a nozzle at the tip at the time of descent and applies the application material to an application surface. The application syringe is provided in an X-axis movement block and a Y-axis movement block. A liquid material coating apparatus to be mounted, wherein a single-hole nozzle is attached to a coating syringe as the nozzle, and the X-axis moving block and the Y-axis moving block are rotated by a single rotation / linear motion conversion mechanism. When driven, the single-hole nozzle is moved along a predetermined trajectory, and the liquid material is applied to the surface to be coated from the single-hole nozzle at a plurality of points on the predetermined trajectory in a dot or linear manner. A liquid material application device, characterized in that the device is applied. 2. A single rotary / linear motion conversion mechanism is provided with a position-designating motor and an X-axis movement that is attached to an output shaft of the position-designation motor and reciprocates the X-axis movement block in the X-axis direction. 2. The liquid material applying apparatus according to claim 1, further comprising an eccentric disk for Y-axis movement for reciprocating the Y-axis moving block in the Y-axis direction. 3. A single rotary / linear motion converting mechanism, and a X-axis movement for reciprocating an X-axis moving block in the X-axis direction by being attached to a position-designating motor and an output shaft of the position-designating motor, respectively. 2. The liquid material applying apparatus according to claim 1, further comprising an eccentric cam for Y-axis movement for reciprocating the Y-axis moving block in the Y-axis direction.