JP3769261B2 - Display panel pattern forming method and forming apparatus - Google Patents

Description

（１）式において、Ｐは圧力、μは流体の粘性係数、ｈは対向面間の隙間、ｒは半径方向位置、ｔは時間、Ｕはｘ方向相対速度、Ｖはｙ方向相対速度、である。また、右辺が、隙間が変化するときに発生するスクイーズアクション効果をもたらす項である。
【０１６１】
（１）塗布開始時
塗布開始前の状態では、モータの回転は停止しており、ピストンはその対向面との間隙：Ｘｐ＝４０μｍの状態にある。ｔ＝０．０２秒でピストンが間隙：Ｘｐ＝４０→３０μｍへ急降下を開始すると、吐出ノズルの上流側圧力：Ｐｎは急上昇する。その理由は、（１）式のＲｅｙｎｏｌｄｓ方程式がｄｈ／ｄｔ＜０のとき発生するスクイーズ作用によるものである。スクイーズ作用は、粘性流体を用いた流体軸受の動圧効果の一種である。このスクイーズ効果による急峻なピーク圧力（オーバーシュート）の発生により、吐出ノズル先端での表面張力に打ち勝つ大きな運動エネルギが流体に与えられるために、ノズル先端に流体塊を作ることなく塗布を開始できる。
【０１６２】
始点における塗布線をスムーズに描かせるためオーバーシュート圧力は、ピストンのストロークが大きい程、立ち上がり時間が短い程大きい。すなわち、吐出ノズル先端の流体の表面張力に打ち勝ちと共に、始点での塗布線の「太り」にならない範囲で、このオーバーシュート圧力の大きさを設定すればよい。
【０１６３】
（２）定常走行時
０．０３＜ｔ＜０．０７秒の間は、ピストンはその対向面との間隙：Ｘｐ＝３０μｍの状態を保ちながら、ねじ溝の回転によるポンピング圧力Ｐｂによる定量吐出により、連続線が塗布される。ピストンとその対向面の間にも流体抵抗があるが、間隙：Ｘｐ＝３０μｍの流体抵抗は十分に小さいために、必要流量を吐出させることができた。
【０１６４】
この区間ではスクイーズ圧力の発生はない。この理由は、スクイーズ圧力は隙間ｈが変化しているときのみ発生するからである。
【０１６５】
（３）塗布終了時
ｔ＝０．０７秒で，モータの減速と同時に、ピストンが間隙：Ｘｐ＝３０→４０μｍへ上昇を開始すると、吐出ノズルの上流側圧力Ｐｎは、図１１で示すように、一時的に急降下する。圧力が急降下する理由は、ピストンが急上昇してもスラスト端面とその対向面で形成される空隙部のギャップはまだ十分に狭く、空隙部の外周部から中心部の間で、求心方向の流体抵抗があるからである。この流体抵抗により、容易には外周部から流体は補給されず、圧力は降下する。理論的には、Ｒｅｙｎｏｌｄｓ方程式（（１）式）のｄｈ／ｄｔ＞０となる逆スクイーズ作用とも言うべき効果による。
【０１６６】
大きなマイナス圧力となっているのは、Ｒｅｙｎｏｌｄｓ方程式が流体の圧縮性を考慮していないからである。実際は気泡などの発生により流体圧力は絶対圧力ゼロ以下（Ｐｎ＜０．０ＭＰａ）にはならない。
【０１６７】
この急峻な負圧発生によって、吐出ノズルからの流体が遮断されるだけでなく、ノズル先端の流体塊をノズル内部に若干量吸引させるサックバックの効果が得られる。スクイーズ圧力による負圧発生後は、モータの回転は停止しているため、ねじ溝のポンピング圧力による吐出はない。従って、ノズルが非有効表示領域（Ｕターン区間）を通過している間、ノズル内部の流体のメニスカスは、ノズル先端で流体塊を作ることなく同一の位置を保ち続ける。そのため、前述した流体塊のボタ落ちなどのトラブルは回避できる。
【０１６８】
なお、実施形態では、ピストンとその対向面の最小隙間は、Ｘｍｉｎ＝２０μｍに設定している。実施形態の蛍光体の粒径はφｄ＝７〜９μｍであり、Ｘｍｉｎ＞φｄであるため、吸入口から吐出口に至る通路で蛍光体の微粒子を機械的に圧搾・破損することはない。
【０１６９】
すなわち、上記ピストンとその対向面の隙間は、上記ペースト遮断時、吐出材料に含まれる粒子の粒径よりも大きく形成されている。上記吸入口から上記吐出ノズルに至る流通路において、上記ペースト遮断時の最小隙間は、８μｍ以上が好ましい。
【０１７０】
【表１】

【０１７１】
上記第２実施形態では、塗布線の始点・終点をスムーズに描かせるためのオーバーシュート圧力とサックバック圧力を、ピストンの軸方向運動によって得ることができた。上記第２実施形態では、ピストン変位曲線（図８に一例を示す）は任意の形状を設定することができる。また、ピストンを駆動する超磁歪素子は高い応答性をもつために、変位曲線が急峻な変化をしても十分に追従できる。すなわち、超磁歪素子の変位・速度制御により、モータの回転数制御ではできない微妙な始終端の吐出圧力と流量の制御ができる。
【０１７２】
上記第２実施形態では、超磁歪素子の軸方向変位の制御と、モータの回転数制御を組み合わせることにより、連続塗布線の始終端の課題を解決すると共に、Ｕターン区間において、吐出ノズルから材料のリークが無い完全遮断状態を任意の時間保つことができる。第１実施形態で示したように、モータ回転数の基本入力波形Ｎｓに、補正項ΔＮを加える方法と上記第２実施形態の方法を組み合わせてもよい。
【０１７３】
Ｕターン区間を十分に短く設定できる場合は、後述する実施形態のように、モータの回転を維持したままで、ピストンのみの駆動により終点での流量遮断と始点での開放ができる。
【０１７４】
上記第２実施形態では、超磁歪素子を用いた２自由度アクチュエータにより、ピストンに軸方向移動と回転の両方の機能を与えてポンプ部を構成した。この構成の代わりに、例えば、軸方向に移動しない回転軸（外周側ピストン）を円筒形状として、この回転軸に中心軸（内周側ピストン）を挿入し、回転軸をモータで駆動し、中心軸を固定側に設置された電磁歪素子等で軸方向に駆動させる構成でもよい。この場合、内周側ピストンの吐出側端面とその対向面の隙間を増減させることにより、終点での流量遮断と始点での開放ができる。要は、流体輸送室の空間を増減できればよいのである。また、外周側ピストンとこの外周側ピストンを収納する固定側の相対移動面にねじ溝を形成すれば、上記第２実施形態と同様に流体圧送手段（機構又は装置）にできる。
【０１７５】
ディスプレイパネルのＰＤＰ用基板６１の外周部（図２の６３）に障害物（例えばウオール）がある場合は、ディスペンサーの本体と障害物が接触しない範囲で、吐出ノズル３３の全長を長くとればよい。
【０１７６】
また、流体圧送手段（機構又は装置）であるねじ溝ポンプは、本発明を実施する上で必ずしも必要ではない。外部に設置された圧力源（ポンプ或いはエアー圧）を利用して、流体をポンプ室３１に供給してもよい。この場合はピストンにねじ溝は形成する必要は無い。例えば、流体圧送手段（機構又は装置）にエアー圧を利用して、かつＵターン区間を十分に短く設定できる場合は、ピストンのみの駆動により、始終点での流量遮断と開放の制御をすればよい。
【０１７７】
以下、本発明の第３実施形態について、図１２〜図１６を用いて説明する。第３実施形態は、ディスプレイパネルのＰＤＰ用基板６１における塗布行程においては、連続吐布停止後、塗布を再開させるまでの時間、すなわち、ディスペンサーが非表示領域（Ｕターン区間）を走行するために与えられる時間は、極めて短い時間しか許されないという量産上の制約条件を逆に利用したものである。すなわち、この「短い有限の時間のみ有効な流量制御手段（機構又は装置）」を有するマイクロ・ディスペンサー（仮称）と、外部に設置された「流体圧力の発生源」を組み合わせることにより、極めてシンプルな構成で、前述したディスペンサー塗布方式における始終端の課題を解決したものである。
【０１７８】
図１２に、本発明の第３実施形態に適用したマイクロ・ディスペンサー２００の正面断面図を示す。２０１は直動型のアクチュエータであり、超磁歪素子等による電磁歪型のアクチュエータ、静電型アクチュエータ或いは電磁ソレノイド等より構成される。上記第３実施形態では、高い位置決め精度が得られ、高い応答性を持つと共に大きな発生荷重が得られる超磁歪素子を用いた。
【０１７９】
２０２は第１のアクチュエータ２０１によって駆動されるピストン、２０３はこのピストン２を吐出側端部で収納する固定スリーブ、２０４はアクチュエータ２０１を収納するハウジング、２０５は固定スリーブ２０３を吐出側で固定する下部ハウジングである。２０６は超磁歪材料から構成される円筒形状の超磁歪ロッドであり、この超磁歪ロッド２０６は第１及び第２バイアス永久磁石２０７、２０８を上下に挟んだ形で、上部ヨーク２０９とヨーク材を兼ねた固定スリーブ２０３の間に固定されている。２１０は超磁歪ロッド２０６の長手方向に磁界を与えるための磁界コイル、２１１は円筒形状のヨークでありハウジング２０４に収納されている。超磁歪ロッド２０６→第１バイアス永久磁石２０７→上部ヨーク２０９→ヨーク２１１→固定スリーブ２０３→第２バイアス永久磁石２０８→超磁歪ロッド２０６により、超磁歪ロッド２０６の伸縮を制御する閉ループ磁気回路を形成している。すなわち、部材２０６〜２１１により、磁界コイルに与える電流で超磁歪ロッドの軸方向の伸縮量を制御できる超磁歪アクチュエータ１を構成している。ピストン２０２は円筒形状をした上部ヨーク２０９と一体化して上方向にも伸びており、上部スリーブ２１２に収納されている。ピストン２０２はこの上部スリーブ２１２に対して、軸方向に移動可能なように、軸受部２１３によって支持されている。上部スリーブ２１２と上部ヨーク２０９の間には、超磁歪ロッド２０６に機械的な軸方向与圧を与えるバイアスバネ２１４が設けられている。上部スリーブ２１２の上端の中心部には、ピストン２０２の端面位置を検出する変位センサー２１５が調節自在に配置されている。２１６はピストン２０２の小径部であるピストン細径軸、２１７は下部ハウジング２０５に形成された吸入口、２１８はノズル部、２１９はこのノズル部２１８に形成された吐出ノズルである。吸入口２１７から流入した加圧流体は、固定スリーブ２０３と下部ハウジング２０５で形成される流体貯蔵室２２０に流入し、さらに後述する流体絞り部２２１を経て、吐出ノズル２１９に流入する。ピストン細径軸２１６の吐出側端面とその対向面及び下部ハウジング２０５の間で、吐出流量を制御する流量制御部２２２が構成されている。
【０１８０】
図１３は前述した流量制御部２２２の近傍の拡大図であり、２２３はピストン細径軸２１６（ピストン２０２）の吐出側端面、２２４はスリーブ２０３の吐出側端面、２２５は２２３，２２４の対向面である。２２６はピストン細径軸２１６と固定スリーブ２０３の内面の間に設けられた流体シールである。２２８は吐出ノズルの入口部に形成された液溜まり部である。ピストン細径軸２１６の吐出側端面２２３とその対向面２２５により、ピストン２０２の上昇・下降によって、容積の変化するポンプ室２２７（流体輸送室）を形成している。
【０１８１】
以下、流体制御部２２２が下記表２の条件で構成された場合について、前述したＲｅｙｎｏｌｄｓ方程式（（１）式）を用いて、吐出流量を求める解析を行なった。
【０１８２】
解析条件は、流体の粘度：μ＝１０，０００ｃｐｓ、体積弾性係数：Ｋ＝３００ｋｇ／ｃｍ^２、（２９．５ＭＰａ）、境界部（流体絞り部２２１の外周部）圧力：Ｐｓ＝２０ｋｇ／ｃｍ^２（２．０６ＭＰａ）である。
【０１８３】
【表２】

【０１８４】
上記条件下で得られる吐出流量の解析結果を図１４に示す。
【０１８５】
（１） 解析のスタート段階（ｔ＝０）では、流量（圧力）の初期値を適当な値を仮定しているが、すみやかに一定値に収束する。０＜ｔ＜０．０３秒の間は連続描画の状態にある。
【０１８６】
（２） ｔ＝０．０３秒でピストンが上昇を始めると、吐出流量は急速に低下し、開始から０．００３ｓｅｃ（３ｍｓｅｃ）程度の立下り時間でたちまち吐出は遮断される。
【０１８７】
（３） ０．０３＜ｔ＜０．０８秒の区間では、吐出流量はゼロである。この区間はピストンは一定の速度で上昇中である。
【０１８８】
表２から、実施形態ではピストンストローク：Ｘｓｔ＝５０μｍ、ピストン動作時間：Ｔｐ＝０．０５ｓｅｃであるため、ピストンの上昇速度：ｖ＝５０μｍ／０．０５ｓｅｃ＝１．０ｍｍ／ｓｅｃである。
【０１８９】
（４） ｔ＝０．０８秒でピストンが停止すると、以降０．０１ｓｅｃ程度の立ち上がり時間で連続塗布の状態にすみやかに復帰する。
【０１９０】
以上の結果から、応答性の優れたアクチュエータを用いて、吐出流路の内部空間を急峻に増大させる実施形態の方法により、０．０１秒或いはそれ以下のオーダーの極めて応答性の優れた流量制御ができることがわかる。
【０１９１】
但し、吐出流量がゼロである時間はピストンが上昇している間だけである。この遮蔽時間は、アクチュエータの限界ストロークと上昇速度により決まる。
【０１９２】
超磁歪素子を用いたアクチェータの場合、素子１０ｍｍの長さでほぼ１０μｍの変位が得られる。圧電素子を採用するならば、ほぼその半分の変位となる。
【０１９３】
従って、図１２の実施形態において、表２の条件下では、例えば、５０ｍｍの長さの超磁歪素子のロット２０６を用いれば、Ｔｐ＝０．０５秒の間、吐出量をＯＦＦにできる。
【０１９４】
上記解析では、液溜り部２２８の容積を大きく設定し、また、液溜り部２２８の流体の圧縮性を考慮しているが、非圧縮性に近い流体ならば、前述した立ちあがり・立下り時間は、アクチュエータの応答性の限界に近いところまで小さくできる。
【０１９５】
ちなみに、超磁歪素子、圧電素子などの電磁歪素子の場合、通常、１０^―４ｓｅｃのオーダーの応答性が得られる。
【０１９６】
電磁ソレノイド等のアクチェータも適用可能であり、電磁歪素子と比べて応答性は１桁程悪くなるが、ストロークの制約（すなわち許容停止時間）は大幅に緩和される。
【０１９７】
本発明の原理を直感的に理解しやすくするために、図１３の流量制御部２２２を図１５のような電気回路モデルに置き換えてみる。
【０１９８】
図１５において、Ｐｓは流体絞り部２２１の境界圧力、Ｒ_０は流体絞り部２２１の流体抵抗、Ｒｎは吐出ノズル１９の流体抵抗、Ｑｐはピストン細径軸２１６の上昇速度とピストン面積で決まる流量源の大きさ、Ｑｎは吐出ノズル２１９を通過する流量を示す。
【０１９９】
ここで、吐出ノズル２１９を通過する流量Ｑｎは、
【０２００】
【数２】

【０２０１】
Ｑｎ＜０のとき、すなわち、次の条件のとき吐出は遮断される。
【０２０２】
【数３】

【０２０３】
上記（３）式から、流量制御を可能にするためには、流体絞り部２２１を設けて、かつ、流体絞り部２２１がある値以上の流体抵抗Ｒ_０を持つことが必要条件ということが分かる。この流体絞り部に相当する部分（流路面積が他の通路と比べて絞られた部分）は、流体の供給源から流量制御部に至る通路のいずれかに設ければ良い。
【０２０４】
ピストンの最下点における対向面との隙間Ｘｍｉｎを十分に小さく設定した場合は、ピストンの吐出側端面２２４とその対向面２２５間の半径方向の流体抵抗Ｒｓにより、この流体抵抗Ｒｓを上記流体抵抗Ｒ_０に置き換えることができる。この場合は、固定スリーブ２０３は省略できる。但し、流体抵抗Ｒｓが有効な値を持つのは、ピストンとその対向面との隙間が十分に小さい間だけであり、ピストンが高く上昇した状態では流量遮断の条件である式（３）は保てなくなる。その結果、遮断状態を保てる時間は小さくなる。
【０２０５】
上記第３実施形態では、「短い有限の時間のみ有効な流量制御手段（機構又は装置）」を有するディスペンサーと、外部に設置された「流体圧力の発生源」の２つを組み合わせて、描画線の始終端の課題の解決を図っている。千本〜数千本のスクリーンストライプを、高い生産効率でディスプレイパネルに描くためには、塗布装置に配置できるディスペンサーの本数はできるだけ多い方が好ましい。上記第３実施形態の場合、ディスペンサーは細径でかつシンプルな構成にできるため、図１６に示すように、マルチヘッド化が容易である。
【０２０６】
図１６において、２５０は「短い有限の時間のみ有効な流量制御手段（機構又は装置）」を有するマイクロ・ディスペンサー、２５１は「流体圧力の発生源」であるマスターポンプ、２５２はガラス基板である。マスターポンプ２５１は、等ピッチで配設された複数本のマイクロ・ディスペンサーに、同時に、図２５に示すように、複数本のストライプ状の塗布線を描かせるための流量供給能力と、発生圧力が必要である。
【０２０７】
ここで、図１６のマルチヘッド化されたパターン形成装置でＰＤＰ用基板６１に、複数の蛍光体ペースト層を同時的に吐出形成する例を図２５に示す。図２５において、ディスペンサー５５の図２の準備位置ａ、塗布開始位置ｂ、塗布終了位置ｃ、屈曲位置ｄ、屈曲位置ｅ、塗布開始位置ｆ、塗布終了位置ｇは、それぞれ、１つ目のマイクロ・ディスペンサーに対しては、準備位置ａ_１、塗布開始位置ｂ_１、塗布終了位置ｃ_１、屈曲位置ｄ_１、屈曲位置ｅ_１、塗布開始位置ｆ_１とが対応し、２つ目のマイクロ・ディスペンサーに対しては、準備位置ａ_２、塗布開始位置ｂ_２、塗布終了位置ｃ_２、屈曲位置ｄ_２、屈曲位置ｅ_２、塗布開始位置ｆ_２とが対応し、３つ目のマイクロ・ディスペンサーに対しては、準備位置ａ_３、塗布開始位置ｂ_３、塗布終了位置ｃ_３、屈曲位置ｄ_３、屈曲位置ｅ_３、塗布開始位置ｆ_３とが対応する。そして、これらの３本の塗布線は、３本のマイクロ・ディスペンサーが同期して移動することにより、同時的に吐出されて塗布される。
【０２０８】
なお、マスターポンプ２５１は、図１６に示すように、多数のマイクロ・ディスペンサーに対して１個配置するものに限らず、任意の本数のマイクロ・ディスペンサーにグループ分けして、各グループに対して１個配置するようにしてもよいし、１本のマイクロ・ディスペンサーに対して１個配置するようにしてもよい。
【０２０９】
上記第３実施形態では、このマスターポンプ２５１に、第１の実施形態（図３参照）と同様の構造であるねじ溝ポンプを用いる。ねじ溝ポンプの場合、▲１▼粉粒体（蛍光体材料）を機械的に非接触の状態で、吸入口から吐出口に輸送できる、▲２▼流量を回転数によって可変できる、▲３▼定流量特性が得られる、▲４▼流動性の悪い蛍光体材料に、回転によるせん断力を与えることにより低粘度化が図れる、等の特徴を有する。
【０２１０】
マスターポンプとしては、ねじ溝ポンプ以外にも、ギヤポンプ、トロコイドポンプ、モーノポンプなどが本発明に適用できる。また、ポンプの代わりに外部に設置されたエアー源を利用して、エアー圧でもってマイクロ・ディスペンサーに蛍光体材料を供給すれば、塗布装置全体は大幅に簡素化される。
【０２１１】
なお、回転運動と直線運動の「２自由度アクチュエータ」を有する第２実施形態のディスペンサーの場合でも、直線運動を与えるアクチュエータのストロークを十分大きくとれるならば、Ｕターン区間において、本実施形態と同様の流量制御ができる。すなわち、モータの回転を維持したままで、ピストンの直線運動のみを制御することにより、有効表示領域と非有効表示領域における蛍光体ペーストの吐出遮断・開放を制御できる。すなわち、モータの回転状態を維持したままで、
▲１▼塗布開始時には、ピストンを降下させる。
【０２１２】
▲２▼塗布終了時には、ピストンを上昇させる。
【０２１３】
この場合、流量制御を可能にするための条件、流体絞り部を有しかつその流体絞り部がある値以上の流体抵抗Ｒ_０を持つという条件を満たすためには、ピストンとその対向面間のスラスト抵抗以外に、ねじ溝ポンプ自身が持つ内部抵抗を利用すればよい。ねじ溝ポンプが定流量特性である程、また、流量が小さい程、吐出遮断状態を長く保てることができる。
【０２１４】
以下、本発明の第４実施形態について、図１７〜図１９を用いて説明する。第４実施形態は、第３実施形態におけるピストンとこのピストンを収納するスリーブのいずれも軸方向移動できる機能を与えることにより、塗布始終端のさらなる改良を図ったものである。第３実施形態における「１重ピストン方式」に対して、以下、第４実施形態のディスペンサーを「２重ピストン方式」と呼ぶことにする。
【０２１５】
図１７において、５０１は上部アクチェータ、５０２は下部アクチェータ、５０３はこの下部アクチェータの自由端側に固定された可動スリーブ、５０４は上記上部アクチェータの自由端側５０５に固定されたピストン、５０６はこのピストンの細径部である。５０７は上記アクチェータ５０１、５０２を収納する上部ハウジングであり、５０８は上記アクチェータ５０１、５０２を構成する各圧電素子の固定部である。５０９は下部ハウジングであり、上部ハウジング５０７と締結されている。５１０は可動スリーブ５０３と下部ハウジング５０９間に装着された接触型のシール部、５１１は吸入口である。
【０２１６】
５１２は下部アクチェータ５０２に軸方向バイアス荷重を与えるためのバイアスバネであり、可動スリーブ５０３と下部ハウジング５０７間に装着されている。５１３は下部ハウジング５０９に固定された下部プレート、５１４はこの下部プレートの中心部でピストン細径部５０６の端面５１５の対向面に位置するところに形成された吐出口の開口部である。５１６は下部プレート５１３に締結された吐出ノズルである。５１７は可動スリーブ５０３と下部ハウジング５０９で形成される空間を利用した流体貯蔵部であり、外部に配置された流体供給源（図示せず）と、吸入口５１１を介して繋がっている。５１８は、可動スリーブ５０３、ピストン細径部５０６、下部プレート５１３で形成される空間であるポンプ室（流体輸送室）である。
【０２１７】
５１９はピストン５０４の上端で、上部プレート５２０に固定されたピストン用変位センサーであり、ピストン５０４の固定側に対する絶対位置を検出する。５２１は上部ハウジング５０７の内面に固定された差動トランス式変位センサーのステータ部、５２２は可動スリーブ５０３側に固定されたロータ部である。差動トランスは電気マイクロメータなどに用いられているもので、可動スリーブ５０３の軸方向位置を検出する。５２３は上部アクチェータ５０１（圧電素子）に軸方向バイアス荷重を与えるためのバイアスバネであり、ピストン５０４と上部プレート５２０間に装着されている。
【０２１８】
上記第４実施形態では、可動スリーブ５０３の軸方向位置は、差動トランスによる変位センサーにより、正確に検出できる。そのため、２つのアクチェータ５０１、５０２の動作のタイミングを適格に合わせた制御が可能になると共に、両アクチェータの厳密な変位と速度制御ができる。
【０２１９】
また、上記第４実施形態で示したように、可動スリーブの位置検出に中空の検出用ロータ５２２と検出用ステータ５２１から構成される変位センサーを用いることにより、円筒形状のハウジング５０７，５０９が細径のままで、ディスペンサ−全体を構成できる。
【０２２０】
上記第４実施形態では、２つのアクチェータ、２つのセンサー、ピストン、吐出ノズルをいずれも軸方向に軸対称配置した構成となっている。例えば、超磁歪素子、圧電素子は、周知のようにその外径を数ミリ以下の小型化が可能である。
【０２２１】
従って、「２重ピストン方式」である上記第４実施形態を用いれば、第３実施形態と同様に、マスターポンプと組み合わせたマルチヘッド・ディスペンサーが容易に実現できる。
【０２２２】
図１８（Ａ）は本発明の第４の実施形態を適用したバルブの時間ｔに対するピストンの変位Ｘｐと可動スリーブＸｓの一例を示す。図１８（Ｂ）はバルブのモデル図を示し、５５０はピストン、５５１は可動スリーブ、５５２はポンプ室（流体輸送室）、５５３は吐出ノズルである。
【０２２３】
図１９は、本発明の第４の実施形態を適用したバルブの「時間に対する吐出ノズル上流側の圧力Ｐｎ特性」を、従来バルブの対比のもとで示すものである。ここで、従来バルブとは、吐出ノズルの入口部にニードルバルブを設けて、このニードルバルブを構成するスプールを軸方向に移動させることにより、吐出口を開閉させるディスペンサーの形態を示す。すなわち、▲１▼流体の吐出開放時にピストン端面間のギャップを増大させる、▲２▼吐出遮断時にはピストン端面間のギャップを減少させる構造を示す。従って、第３の実施形態（１重ピストン方式）と比べて、ピストンの動作▲１▼、▲２▼は逆となる。
【０２２４】
従来のバルブを用いて、流体を開放するためにピストン（図示せず）とその対向面のギャップＸを増加させたとき、流体輸送室であるポンプ室（図示せず）の容積増大により吐出ノズル上流側（ポンプ室）の圧力Ｐは、図１８（Ａ）で示すように大きく降下する。この吐出ノズル上流側の負圧発生は、「描画の始点で線が描けない」、或いは「描画線の細り」などの要因となる。
【０２２５】
さらに、流体を遮断するためにギャップＸを小さくしたとき、吐出ノズル上流側の圧力Ｐは逆に大きく増大する。この高圧発生は、流体の圧縮、或いはスクイーズ作用と呼ばれる流体軸受の動圧効果によるものである。この高圧発生が不利な方向に作用して、描画の終点で「液溜まり発生」の要因となる。
【０２２６】
さて、本発明の第４の実施形態を適用したバルブ用いて、図１８（Ａ）のごとく、ピストン５５０と可動スリーブ５５１を逆位相で駆動させる。
【０２２７】
このとき、ピストン５５０と可動スリーブ５５１の軸方向移動が逆位相であるために、ポンプ室の容積変化はキャンセルされる。その結果、「描画線の細り」「液溜まり発生」などのトラブルが発生する図１９のＡに対して、図１９にＢで示すごとく、描画開始時の負圧発生と終了時の高圧発生が低減し、「描画線の細り」「液溜まり発生」などのトラブルが解消されるのである。
【０２２８】
なお、ピストン５５０の変位Ｘｐが最下点の位置にあるＸｐ＝Ｘｐｍｉｎのときでも、Ｘｐｍｉｎを十分大きく設定しておけば、ピストン５５０の存在が流路抵抗（すなわち流量）に与える影響を小さくできる。
【０２２９】
第１、第２のアクチュエータを駆動するドライバーはそれぞれ独立して設けてもよいし、或いは１台でそれぞれのアクチュエータを逆位相で駆動してもよい。
【０２３０】
ピストン或いは可動スリーブの吐出側端面とその対向面の形状が平坦面でないバルブの場合でも、従来バルブが抱える問題点と本発明の第４の実施形態の適用による効果は同様である。例えば、ピストンの先端を鋭敏な凸面とし、その対向面を凹面としてバルブを構成しても、本発明を適用することができる。この場合は、ピストンの凸面と対向面（固定側）の凹面を近接させることにより流体を遮断する。そのため、図１７の第４実施形態とは異なり、可動スリーブが上昇してピストンが降下するとき流体は遮断され、逆の場合は流体は開放される。
【０２３１】
この場合は、可動スリーブの変位Ｘｓが最下点の位置にあるＸｓ＝ＸｓｍｉｎのときでもＸｓｍｉｎが十分大きくなるように設定しておけばよい。
【０２３２】
いずれの場合も最適な描画線を描くためには、適用するプロセスと塗布材料の特性に合わせて、ピストンと可動スリーブの変位曲線を微調整すればよい。
【０２３３】
第３実施形態における「１重ピストン方式」と比べて、「２重ピストン方式」である上記第４実施形態の長所は次のようである。
【０２３４】
塗布開放時及び定常塗布時では、ピストン５５０の下降と同時に、スリーブ５５１を大きく上昇できる。スリーブ５５１とその対向面の隙間：Ｘｓを十分に大きくとれるため、吸入口から吐出ノズルに至る流通路に大きな流体抵抗Ｒ_０｛（３）式｝を設けなくてよく、十分な吐出流量を確保できる。
【０２３５】
また、塗布遮断時には、逆にスリーブ５５１とその対向面の隙間：Ｘｓを十分に小さくできるため、ポンプ室５５２は外部と遮断された密閉状態となる。この密閉状態でピストン５５０を上昇することにより、ポンプ室５５２の圧力を急速に降下できるため、レスポンスの一層高い吐出遮断が可能となる。
【０２３６】
上記第４実施形態のディスペンサーでは、ピストンとスリーブの変位曲線は任意に設定できるため、始点におけるオーバーシュート圧力と、終点におけるサックバック圧力は要求されるプロセス条件に合わせて自由に設定できる。ピストンとスリーブの変位曲線は完全な逆位相でなくてもよい。
【０２３７】
また、超磁歪素子を用いて、第２実施形態のごとくスリーブを回転させる構造にすれば、動圧シールによる永続的な吐出遮断ができる構成も可能である。
【０２３８】
以下、本発明を、第５実施形態として蛍光体層形成方法及び形成装置に適用したディスペンサーについて、図２０〜２２を用いて説明する。
【０２３９】
以下に示す第５実施形態のディスペンサーは、ピストンに回転運動と直線運動を同時に与える２自由度アクチュエータを用いているという点は、第２実施形態同様である。第５実施形態では、流体の遮断方法に第２〜４実施形態で示したスクイーズ効果を用いるのではなく、スラスト動圧シールによるくさび効果を利用している。すなわち、
▲１▼ピストンの吐出側端面とその相対移動面の間にスラスト動圧シールを形成し、第１のアクチュエータでピストンを直線駆動させて、ピストン端面間のギャップを調節することにより、流体の遮断・開放を制御する。
【０２４０】
▲２▼回転運動を与える第２のアクチュエータで、ねじ溝が形成されたピストンを回転させて、塗布流体を吐出側に圧送するポンピング圧力を発生させる。
【０２４１】
上記▲１▼、▲２▼を同時に実現したものである。
【０２４２】
図２０において、１０１は第１のアクチェータであり、第２実施形態同様、超磁歪素子を用いている。１０２は第１のアクチェータ１０１によって駆動される主軸（ピストン）である。上記第１のアクチェータは、下部ハウジング１０３に収納されており、この下部ハウジング１０３の下端部（フロント側）に、主軸１０２を収納するポンプ部１０４が装着されている。
【０２４３】
１０５は第２のアクチェータであり、主軸１０２とハウジング１０３の間に相対的な回転運動を与えるものである。モータロータ１０６は上部主軸１０７に固着され、また、モータステータ１０８は上部ハウジング１０９に収納されている。
【０２４４】
１１１、１１２は超磁歪素子から構成される円筒形状のリア側超磁歪ロッド及びフロント側超磁歪ロッドである。１１３は超磁歪ロッド１１，１２の長手方向に磁界を与えるための磁界コイルである。１１４、１１５、１１６は超磁歪ロッド１１１，１１２にバイアス磁界を与えるためのリア側、中間部、フロント側の永久磁石である。リア側とフロント側の永久磁石１１４、１１６が、超磁歪ロッド１１１，１１２と中間部永久磁石１１５を矜持する形で配置されている。
【０２４５】
１１７は超磁歪ロッド１１１のリア側に配置され、磁気回路のヨーク材をであるリア側ヨーク、１１８は超磁歪ロッド１１２のフロント側に配置され、ヨーク材を兼ねたフロント側スリーブ、１１９は磁界コイル１１３の外周部に配置された円筒形状のヨーク材である。
【０２４６】
すなわち、超磁歪ロッド１１１，１１２、磁界コイル１１３、永久磁石１１４〜１１６、リア側ヨーク１１７、フロント側スリーブ１１８、ヨーク材１１９により、磁界コイルに与える電流で超磁歪ロッドの軸方向の伸縮を制御できる超磁歪アクチェータ（第１のアクチェータ１０１）を構成している。
【０２４７】
１２０は上部主軸７を回転自在、かつ軸方向に移動可能に収納するリア側スリーブである。このリア側スリーブ１２０もまた、軸受１３９により、中間ハウジング１２１に対して回転自在に支持されている。
【０２４８】
１２２はリア側ヨーク１１７とリア側スリーブ１２０の間に装着されたバイアスバネである。このバイアスバネ１２２から加わる軸方向荷重により、超磁歪ロッド１１１，１１２はバイアス永久磁石１１４〜１１６を介在して、上下のリア側ヨーク１１７，フロント側スリーブ１１８に押圧される形で把持されている。フロント側スリーブ１１８は主軸２を軸方向移動可能に収納している。モータ１０５から伝達された主軸１０２の回転動力は、主軸１０２、フロント側スリーブ１１８の間に設けられた回転伝達キー１２３によってフロント側スリーブ１１８に伝達される。また、フロント側スリーブ１１８も軸受１２４によって、ハウジング１０３に回転自在に支持されている。
【０２４９】
１２５は上部主軸１０７の回転位置情報を検出するためのエンコーダ、１２６は上部主軸１０７（及び主軸１０２）の上端面１２７の軸方向変位を検出するための変位センサーである。
【０２５０】
上記構成により、第２の実施形態同様に、装置の主軸１０２が回転運動と微少変位の直線運動の制御を同時に、かつ独立して行うことができる「２自由度・複合動作アクチュエータ」が実現できる。
【０２５１】
さて、上記第５実施形態では、主軸１０２の軸方向位置決め機能を用いて、主軸１０２の定常回転状態を保ったままで、主軸１０２の吐出側端面の隙間の大きさを任意に制御することができる。この機能を用いて、吸入口１３２から吐出ノズル１３３に至るいかなる流通路の区間も機械的に非接触の状態で、始終端における粉粒体の遮断・開放の制御ができる。
【０２５２】
すなわち、ディスペンサーの吐出ノズル１３３と基板が有効表示領域６０ａ内［図２参照］を相対的に走行するときは、主軸１０２は上昇した位置にあり、吐出側端面の隙間は十分に大きく、蛍光体ペーストの吐出は開放されている。また、吐出ノズル１３３と基板が非有効表示領域６０ｂ内［図２参照］を相対的に走行を始める手前で主軸１０２は下降を開始する。その結果、スラスト動圧シールの機能がすみやかに働き、蛍光体ペーストの吐出は遮断される。
【０２５３】
以下、スラスト動圧シールの原理を、ポンプ部１０４の詳細図である図２１と動圧シールの変位と発生圧力の関係を示す図２２（Ａ）〜（Ｃ）を用いて説明する。
【０２５４】
１２８は主軸１０２の外表面に形成された流体を吐出側に圧送するためのラジアル溝（図２０では溝の部分を黒く塗りつぶしている一方、図２１では溝の部分にハッチングしている。）、１２９は流体シール、１３０はシリンダである。
【０２５５】
この主軸１０２とシリンダ１３０の間で、主軸１０２とシリンダ１３０の相対的な回転によってポンピング作用を得るためのポンプ室１３１を形成している。また、シリンダ１３０には、ポンプ室１３１と連絡する吸入孔１３２が形成されている。１３３はシリンダ１３０の下端部に装着された吐出ノズル、１３４はシリンダ１３０の吐出側端面に締結された吐出プレートである。１３５は主軸１０２の吐出側端面に締結されたスラストプレートである。主軸１０２の吐出側端面１３６の対向面１３７の中央部に吐出ノズル１３３の開口部１３８が形成されている。
【０２５６】
また、スラストプレート１３５の吐出側端面１３６スラスト動圧シールの溝１３９（図２２（Ｂ）では溝の部分を黒く塗りつぶしている。）が形成されている。
【０２５７】
シール用スラスト溝１３９は、スラスト動圧軸受として知られている公知のものである。
【０２５８】
さて、スラスト軸受の発生できるシール圧力Ｐｓは次式で与えられる。
【０２５９】
【数４】

【０２６０】
（４）式において、ωは回転角速度、ｒ_０はスラスト軸受の外半径、ｒ_ｉはスラスト軸受の内半径、ｆは溝深さ、溝角度、グルーブ幅とリッジ幅などで決まる関数である。
【０２６１】
図２２（Ｃ）のグラフにおける曲線（Ｉ）は、下記表３の条件下で、スパイラルグルーブ型スラスト溝を用いた場合のギャップδに対するシール圧力Ｐ_Ｓの特性を示すものである。図２２（Ｃ）のグラフにおける曲線（ＩＩ）は、軸方向流動が無い場合について、ラジアル溝のポンピング圧力と軸先端のギャップδの関係を示す一例である。このラジアル溝のポンピング圧力は、上記スラスト溝同様、ラジアル隙間、溝深さ、溝角度の選択によって広い範囲で選ぶことができる。しかし定性的には、ラジアル溝のポンピング圧力Ｐｒは軸先端の空隙の大きさ（すなわちギャップδの大きさ）に依存しない。
【０２６２】
さて、シール用スラスト溝のギャップδが十分大きいとき、例えばギャップδ＝１５μｍのとき、発生圧力はＰ＝０．０６ｋｇ／ｍｍ^２（０．６９ＭＰａ）である。
【０２６３】
軸を回転させたままで、主軸１０２の端面を固定側の対向面に接近させる。ギャップδ＜１０．０μｍなると、シール圧力がラジアル溝のポンピング圧力Ｐｒより大きくなり、流体の吐出口側への流出は遮断される。
【０２６４】
図２１は流体の流出が遮断された状態を示し、吐出ノズルの開口部１３８近傍の流体は、スラスト溝１３９によって遠心方向のポンピング作用［図２１の矢印参照］を受けているために、開口部１３８近傍は負圧（大気圧以下）となる。この効果により、遮断後、吐出ノズル１３３内部に残存していた流体は再びポンプ内部に吸引される。その結果、吐出ノズル先端で表面張力による流体魂ができることはなく、糸引き、洟垂れが解消されるのである。
【０２６５】
さて、本発明の上記第５実施形態では、回転軸を１０〜数１０μｍ程度軸方向に移動させることにより、流体の吐出状態のＯＮ，ＯＦＦを自在に制御することができる。
【０２６６】
本発明の上記実施形態のポイントを要約すれば、スラスト溝によるシール圧力は、ギャップδが小さくなると急激に増大するのに対して、ラジアル溝のポンピング圧力はギャップδの変化に対して極めて鈍感である、という点を利用している。
【０２６７】
なお、ラジアル溝、スラスト溝いずれも回転側、固定側のどちらに形成してもよい。
【０２６８】
また、微少粒子が含まれた蛍光体、電極材料のような粉粒体を塗布する場合は、ギャップδの最小値δｍｉｎは微少粒子径φｄよりも大きく設定すればよい。
【０２６９】
【数５】
δｍｉｎ＞φｄ ……（５）
【０２７０】
同一の発生圧力に対して、より大きなギャップを得るためには、回転数を高くするか、スラストプレート１３５の外径を大きくかつ溝深さ、溝角度等に適切な値を選べば良い。
【０２７１】
【表３】

【０２７２】
上記第５実施形態では、スラスト動圧シールが形成された吐出部に蛍光体ペーストを供給する圧力源として、ねじ溝ポンプを用いた。このねじ溝ポンプの代わりに、外部に設置されたポンプを塗布流体の圧力源としてもよい。或いは、工場内で常備されたエアー圧でもよい。要は、スラスト動圧シールが発生できる最大シール圧力以下に、圧力源の供給圧を設定すればよい。
【０２７３】
以下、上記第１〜５実施形態ともであるが、高粘度流体を吐出させる場合、ポンピング圧力、スクイーズ圧力共極めて大きな流体圧の発生が予想される。この場合、ピストンを駆動する第１のアクチェータには、高い流体圧に抗する大きな推力が要求されるため、数百〜数千Ｎの力が容易に出せる電磁歪型アクチェータの適用が効果的である。電磁歪素子は、数ＭＨＺ以上の周波数応答性を持っているため、主軸を高い応答性で直線運動させることができる。そのため、高粘度流体の吐出量を高いレスポンスで高精度に制御できる。
【０２７４】
また、軸方向駆動手段（機構又は装置）に超磁歪素子を用いた場合、圧電素子を用いる場合と比べて、伝導ブラシも省略できることから、モータ（回転手段（機構又は装置））の負荷を軽減できると共に、全体構成が極めてシンプルとなるため、可動部の慣性モーメントを極力小さくでき、ディスペンサーの細径化が可能である。
【０２７５】
以上、ＰＤＰ用基板として背面板に蛍光体を塗布する場合の実施形態について説明したが、本発明は、別の実施形態として、例えばＰＤＰ用基板としての表面板の電極形成にも適用することができる。
【０２７６】
図２６はＰＤＰ用表面板の別の例を示すもので、７００はＰＤＰの有効表示部に対応する「有効表示領域」（バス電極部）であり、蛍光体が塗布される背面板の前述した有効表示領域６０ａ（図２参照）と表裏一体の領域である。７０１Ａ、７０１Ｂは端子部であり、「準有効表示領域」と呼ぶことにする。有効表示領域７００、端子部７０１Ａ、端子部７０１Ｂでガラス基板より構成されるＰＤＰ表面板７０２を構成している。７０３はタブ接合部である。
【０２７７】
７０４は表面板７０２の外部の両側部（図２６の左右の側部）に設けられたペースト塗布のための仮想領域であり、「非有効表示領域」と呼ぶことにする。
【０２７８】
例えば、表面板の左側端部を始点位置（塗布開始位置）Ａ（或いは終点位置（塗布終了位置））とする、電極層の一例としての電極線７０５は、準有効表示領域７０１Ａ内でかつ塗布開始位置Ａから屈曲位置Ｂまでのタブ接合部７０３と、準有効表示領域７０１Ａ内でかつ屈曲位置Ｂから屈曲位置Ｃまでの傾斜部と、準有効表示領域７０１Ａ内でかつ屈曲位置Ｃから有効表示境界位置Ｄまでの有効表示境界近傍部と、有効表示領域７００内でかつ有効表示境界位置Ｄから有効表示境界位置Ｅまでの有効表示直線部と、準有効表示領域７０１Ａ内でかつ有効表示境界位置Ｅから塗布終了位置Ｆまでの終了近傍直線部とより構成されている。従って、電極線７０５は、準有効表示領域７０１Ａを通過して、有効表示境界位置Ｄで有効表示領域７００に入る。さらに有効表示領域７００を通過した電極線７０５は、有効表示境界位置Ｅで右側の準有効表示領域７０１Ｂに入り、その直後に塗布終了位置Ｆで停止する。すなわち、準有効表示領域７０１Ｂ内の塗布終了位置Ｆは、電極線７０５の終点位置（塗布終了位置）（或いは始点位置（塗布開始位置））となる。他の電極線７０８，７０９，７０７も全く同一構成であり、さらに、電極層の一例としての別の電極線７０６，７１１，７１０は、塗布開始位置が表面板の右側端部を始点位置（塗布開始位置）Ｇとなり、左右反対になるだけで、基本的な構成は同じである。よって、電極線７０６，７１１，７１０のそれぞれの傾斜部は同一の傾斜角であり、電極線７０５，７０８，７０９，７０７のそれぞれの傾斜部は同一の傾斜角である。
【０２７９】
電極線７０５に隣接した電極線７０６は、電極線７０５に対して始点位置、終点位置の位置は左右逆に形成される。電極線７０６に隣接した電極線７０７は、電極線７０６に対して始点位置、終点位置の位置は左右逆に形成される。このように、実施形態のＰＤＰでは、左右の準有効表示領域で停止位置を有する電極線が交互に入れ替わるように形成される。
【０２８０】
さて、まず、塗布方法の具体例（Ｉ）について説明する。ＰＤＰの表面板の電極形成を目的とした、この実施形態では、前述した第２実施形態と同様な方法を適用する。すなわち、「２自由度アクチュエータ」を有するディスペンサを用いて、
▲１▼第１のアクチュエータでピストンを直線駆動することにより、ピストンの吐出側端面に正負のスクイーズ圧力を発生させる。
【０２８１】
▲２▼回転運動を与える第２のアクチュエータで、ねじ溝が形成されたピストンを回転させてポンピング圧力を発生させ、塗布流体を吐出側に圧送する。
【０２８２】
上記▲１▼、▲２▼の組み合わせにより、
（１） 有効表示領域における連続線塗布と、
（２） 有効表示領域と非有効表示領域の境界部における塗布線の遮断・開放の制御と、
（３） 準有効表示領域内での塗布線の遮断・開放の制御と、
を実現するものである。
【０２８３】
以下、電極線７０５に注目し、電極材である銀ペーストを塗布する場合について説明する。
【０２８４】
（ｉ）塗布開始時
塗布開始前の状態では、吐出ノズル３３（第２実施形態の図６参照）の先端は準有効表示領域７０１Ａの領域にある。このとき、モータの回転は停止しており、ピストン（主軸２）は上昇した位置にある。ディスペンサーは、準有効表示領域７０４内の電極線７０７の塗布開始位置Ａ'から図２６の下向きに走行開始した後、塗布開始位置Ａを通過する直前のタイミングで、モータを回転させると同時にピストンを降下させる。既に述べたように、塗布開始位置Ａにおける塗布線をスムーズに描かせるため、オーバーシュート圧力は、ピストンのストロークが大きい程、立ち上がり時間が短い程、大きい。すなわち、吐出ノズル先端の流体の表面張力に打ち勝つと共に、塗布開始位置Ａでの塗布線の「太り」にならない範囲で、このオーバーシュート圧力の大きさを設定すればよい。
【０２８５】
（ｉｉ）準有効表示領域内での走行
ピストンは、その対向面との間隙を一定に保ちながら、ねじ溝のポンピング圧力による定量吐出により、塗布開始位置Ａから屈曲位置Ｂ及び屈曲位置Ｃを経て有効表示境界位置Ｄまで、連続線を塗布する。この区間ではスクイーズ圧力の発生はない。実施形態では、準有効表示領域７０１Ａ内の電極線７０５の線幅は、例えば、ｂ_２＝０．１ｍｍであり、有効表示領域７００内の線幅：ｂ_１＝０．０７５ｍｍより大きかった。そのため、吐出ノズルが準有効表示領域内７０１Ａ及び７０１Ｂを走行するときは、有効表示領域７００を走行するときよりも、ねじ溝の回転数を上げた状態で塗布する。
【０２８６】
（ｉｉｉ）有効表示領域内での走行
有効表示境界位置Ｄから有効表示境界位置Ｅにかけての区間では、ピストンは、その対向面との間隙を一定に保ちながら、線幅：ｂ_１＝０．０７５ｍｍを保つように、ねじ溝の回転数を上記（ｉｉ）よりも下げた状態で塗布を行なう。
【０２８７】
（ｉｖ）準有効表示領域内での走行及び遮断
有効表示境界位置Ｅを通過した後の塗布終了位置Ｆまでの塗布条件は、上記（ｉｉ）と同様である。塗布終了位置Ｆに到達する直前のタイミングで、モータを停止させると同時にピストンを急上昇させる。このとき、ｈは対向面間の隙間、ｔは時間として、（ｄｈ／ｄｔ）＞０としたときの負圧発生の効果により、吐出は一瞬にして遮断される。その後、吐出ノズル先端は、吐出遮断状態のまま、塗布終了位置Ｆの位置から、最短距離にある準有効表示領域７０４の右端の位置Ｇ’にすみやかに移行し、位置Ｇを始点位置として塗布を開始する。
【０２８８】
以降、上記（ｉ）〜（ｉｖ）と同様な方法で連続線を繰り返し塗布していく。
【０２８９】
以上述べた方法により、吐出ノズル３３と、表面板を位置決め保持するＸＹステージとを相対的に走行させる時間のロスを極力低減することができて効率の良い塗布ができる。
【０２９０】
上記（ｉｖ）の行程において、準有効表示領域７０１Ａ，７０１Ｂ内でピストンを上昇させて吐出を遮断しているが、この方法により、描画線の塗布終了位置Ｆを確実なタイミングでかつ極めて高品位に形成できる。すなわち、塗布終了位置Ｆにおける描画線の「太り」又は「溜まり」などが発生しない。もし「太り」又は「溜まり」が大きく発生すれば、近接する電極線間での電気特性に重大な影響を与えてしまう。終端位置Ｆを逆に始点位置として描画線を描く方法もあるが、最適なオーバーシュート圧力の設定方法が終端制御の場合と比べてややデリケートとなる。有効表示領域７００内の線幅と、準有効表示領域内７０１Ａ、７０１Ｂの線幅の設定は、ねじ溝の回転数以外では、吐出ノズルとステージの相対速度を調節してもよい。
【０２９１】
次に、塗布方法の具体例（ＩＩ）として、マルチヘッドで電極線を塗布する場合について述べる。マルチヘッドのシステムとしては、１個のマスターポンプと複数個のマイクロポンプの組み合わせによる、例えば図１６に示す様な構成でもよい。
【０２９２】
準有効表示領域内７０１Ａ及び７０１Ｂでは、各電極線の傾斜角が異なるために、並列ピッチで配置されたマルチヘッドでは、同時に準有効表示領域内の複数本の電極線を塗布することは困難である。そのために、次の方法で塗布を行った。
【０２９３】
まず、ステップＳ１として、電極線７０５を描く場合、準有効表示領域内７０１Ａの位置Ｃを始点として有効表示領域７００を通過し、準有効表示領域内７０１Ｂの位置Ｆで塗布を終了させる。このとき同時に、同一のパターンを有する他の電極線（例えば７０７）も、並列ピッチで配置されたヘッドにより、位置Ｃ’を始点として、位置Ｆ’で塗布を終了させる。マルチヘッド全体を左側から右側へ走行させた後、次は、ヘッド全体を右側から左側へ走行させて塗布する。この繰り返し動作により、複数平行線から構成される電極線塗布は完了する。
【０２９４】
次に、ステップＳ２の塗布に進む。準有効表示領域７０１Ａ，７０１Ｂ内において、傾斜角が異なる各電極線をマルチヘッドで描く場合は次のような方法を用いる。準有効表示領域７０１Ａ，７０１Ｂ内において、それぞれの傾斜角が異なる電極線から構成される電極線のグループをＡＡ_１〜ＡＡ_ｎ（図２６参照、ｎはグループの総数）とすると、このグループはＰＤＰの表面板では複数セット形成される。そこで、複数個のグループＡＡ_１〜ＡＡ_ｎの中から同一の傾斜角を有する電極線を選び、それをグループＢＢとする。グループＢＢは、例えば、電極線７０５、７０８、７０９である。グループＢＢの各電極線は、ノズルとＰＤＰの表面板を保持するＸＹステージとを相対的にＸＹ方向に移動させれば、同時に塗布することができる。
【０２９５】
以上、マルチヘッドを用いて、有効表示領域内で複数平行線の電極線を描くプロセス（ステップＳ１）と、準有効表示領域内において、同一傾斜角の電極線を描くプロセス（ステップＳ２）を分けて行う場合について説明した。
【０２９６】
有効表示領域内での複数電極線の塗布（ステップＳ１）は、電極線の長さが長いためにヘッド数が多いほど、生産タクトの点で有利となる。
【０２９７】
準有効表示領域内での電極線の塗布（ステップＳ２）は、マルチヘッドの中から、ふさわしい位置にあるヘッド（図２６ではｎ＝３個）だけを選び、塗布に用いることになる。この場合、ステップＳ１と比べて、塗布の繰り返し回数が多くなるが、準有効表示領域内での電極線は長さが短いために、さほどのタクトの遅れにはならない。上記準有効表示領域内での塗布方法では、塗布線の「始端」と「終端」の両方に高品位の塗布が要求される。マルチヘッドを１個のマスターポンプと複数個のマイクロポンプの組み合わせで構成し、かつ、このマイクロポンプに第４実施形態で説明した「２重ピストン方式」を用いれば、描画線の始終端は共に高品位で描くことができる。
【０２９８】
さらに、塗布方法の具体例（ＩＩＩ）として、マルチヘッドで、有効表示領域７００と準有効表示領域７０１Ａ、７０１Ｂ内にある電極線を一気に描く場合について述べる。この場合は、描画線は、例えば「終端」のみの制御で良く、マルチヘッドのヘッド数は、グループＡＡ_１〜ＡＡ_ｎの数（図２６ではｎ＝３個）だけでよい。マルチヘッドのシステム構成としては、１個のマスターポンプと複数個のマイクロポンプの組み合わせによる、例えば図１６に示す様な構成でもよい。マイクロポンプは、ピストンの上昇・下降に伴う負圧・正圧の発生を利用して、描画線の始終端の制御を行う方法を用いれば、シンプルな構造を採用できる。或いは、上記具体例（Ｉ）で説明した、２自由度アクチュエータを有するディスペンサを複数本配列してもよい。
【０２９９】
具体的には、図２６において、同一の傾斜角を有する電極線として、例えば、電極線７０５、７０８、７０９を選ぶ。各ヘッドのノズル間の間隔は、電極層の塗布パターンから予め決められているものである。以降の各ヘッドの塗布方法は、具体例（Ｉ）と同様な方法が採用できるため、詳細は省略する。
【０３００】
また、上記基板に対して上記ディスペンサーが相対的に走行する別の例として、図２７に示すように、ディスペンサー３０４を固定フレーム３０３に取付けた状態で、ＸＹステージを直交するＸＹ方向に移動させる機構について説明する。Ｚ軸用モータ３０２によりＺ軸方向にのみ昇降可能にディスペンサー３０４を固定フレーム３０３に取付けた状態で、ＸＹステージを直交するＸＹ方向に移動させる機構について説明する。これに対して、固定フレーム側に固定されたＸ軸用モータ３００の駆動により、Ｙ軸テーブル３０７がＸ方向に進退し、Ｙ軸テーブル３０７に固定されたＹ軸用モータ３０１の駆動により、基板３０６が位置決め保持される基板載置テーブル３０５がＹ方向に進退する。
【０３０１】
このように構成すれば、ディスペンサー３０４は、Ｚ軸用モータ３０２によりＺ軸方向にのみ昇降させるだけで、ＸＹ方向に対しては、基板載置テーブル３０５がそれぞれの方向に移動することにより、上記基板に対する上記ディスペンサーの相対的な走行を実現することができる。
【０３０２】
上記実施形態において、上記ディスペンサーと上記基板が上記有効表示領域から上記非有効表示領域へ相対的に移行するとき、上記ねじ溝式ディスペンサーの上記回転軸の回転数を減小させた後に停止させることにより上記吐出を停止させ、或いは、減小させた後に停止し、さらに、上記回転軸を例えば１０ｍｓｅｃ以下の間のみ逆転させて例えば１０μｍ程度ペーストを持ち上げることにより上記吐出を停止させるようにしてもよい。
【０３０３】
また、これに代えて、上記ディスペンサーと上記基板が上記非有効表示領域から上記有効表示領域へ相対的に移行するとき、上記ねじ溝式ディスペンサーの上記回転軸の回転数を増加させた後、上記回転軸の一定回転を維持して吐出を行なうか、或いは、増加させた後、減小させてしかる後、上記回転軸の一定回転を維持して吐出を行なうようにしてもよい。
【０３０４】
さらに、上記実施形態において、複数本のねじ溝式ディスペンサーが配置されているとき、複数本のねじ溝式ディスペンサーの回転数を個別に調節して、所定の流量を設定することもできる。
【０３０５】
上記種々の実施形態では、ピストンに軸方向駆動させる装置に超磁歪アクチュエータを用いている。しかしながら、もし、描画線の始終端を、それ程、高品位に形成する必要がなければ、超磁歪アクチュエータの代わりに、応答性は低下するが、リニアモータ、電磁ソレノイド等を用いてもよい。
【０３０６】
以上、ディスプレイパネルに連続線を描く連続塗布の実施形態について説明したが、本発明は、間欠塗布にも適用できる。この場合も、塗布開始と終了時における始終端制御の考え方を適用することができる。或いは、超高速の間欠塗布で、隣接する流体塊を自然流動により連結させて、擬似的な連続線にする塗布にも適用できる。
【０３０７】
なお、上記様々な実施形態のうちの任意の実施形態を適宜組み合わせることにより、それぞれの有する効果を奏するようにすることができる。
【０３０８】
本発明は、添付図面を参照しながら好ましい実施形態に関連して充分に記載されているが、この技術の熟練した人々にとっては種々の変形や修正は明白である。そのような変形や修正は、添付した請求の範囲による本発明の範囲から外れない限りにおいて、その中に含まれると理解されるべきである。
【０３０９】
【発明の効果】
本発明のディスプレイパネルのパターン形成方法及び形成装置により、従来のスクリーンマスクを用いることなく、例えば基板仕様を数値設定するだけで、任意のサイズの基板に対して、例えば蛍光体層、電極層などを精度よく形成することができると共に、基板の仕様変更に容易に対応できる。また、高速プロセスに対応できるために、従来工法と比べても生産タクトの点で遜色がなく、廃棄する材料がないために、材料ロスを大幅に削減できる。
【０３１０】
製造行程及び製造ラインとも規模を拡大させる必要がなく、単体の装置でスクリーニングすることを可能にし、また、多品種少量生産のディスプレイパネルに対して量産効果を上げて製造させ、さらに単体でスクリーニングするため自動化ラインを小規模なマシンで稼動できる。その効果は絶大である。
【図面の簡単な説明】
【図１】 本発明のディスプレイパネルのパターン形成方法を実施するためのパターン形成装置を、第１実施形態として、ＰＤＰ用基板の蛍光体層形成装置に適用した場合の概略斜視図である。
【図２】 上記ＰＤＰ用基板の有効表示領域と非有効表示領を示す図である。
【図３】 本発明に適用した第１実施形態によるディスペンサーを示す正面断面図である。
【図４】 第１実施形態において、時間に対するディスペンサーの移動速度を示す図である。
【図５】 （Ａ）は第１実施形態における時間に対するねじ溝回転数基本成分を示す図、（Ｂ）は第１実施形態における時間に対するねじ溝回転数補正分を示す図、（Ｃ）は第１実施形態における時間に対するねじ溝回転数を示す図である。
【図６】 本発明に適用した第２実施形態によるディスペンサーを示す正面断面図である。
【図７】 図６の吐出部詳細図である。
【図８】 第２実施形態において、時間に対するピストン変位を示す図である。
【図９】 第２実施形態において、時間に対するねじ溝圧力を示す図である。
【図１０】 第２実施形態において、時間に対するスクイーズ圧力を示す図である。
【図１１】 第２実施形態において、時間に対する吐出ノズル上流側圧力を示す図である。
【図１２】 本発明に適用した第３実施形態によるディスペンサーを示す正面断面図である。
【図１３】 図１２の流量制御部詳細図である。
【図１４】 第３実施形態において、時間に対する吐出流量を示す図である。
【図１５】第３実施形態において、流量制御部の電気回路モデルを示す図である。
【図１６】 本実施形態のパターン形成装置をＣＲＴの蛍光体層装置やＰＤＰ用基板のパターン形成装置などに適用して多数のスクリーンストライプを同時的に描く場合の概略斜視図である。
【図１７】 本発明に適用した第４実施形態によるディスペンサーを示す正面断面図である。
【図１８】 （Ａ），（Ｂ）は、それぞれ、第４の実施形態において、時間に対するピストンとスリーブの変位を示す図である。
【図１９】 第４の実施形態において、時間に対する吐出ノズル上流側圧力を示す図である。
【図２０】 本発明に適用した第５実施形態によるディスペンサーを示す正面断面図である。
【図２１】 第５の実施形態において、ポンプ部の拡大図である。
【図２２】 （Ａ），（Ｂ），（Ｃ）は、それぞれ、第５の実施形態において、シール圧力とギャップの関係を示す図である。
【図２３】 従来に提案されたディスペンサー方式蛍光体層装置の概略斜視図である。
【図２４】 従来のエアー式ディスペンサーを示す図である。
【図２５】 図１６のパターン形成装置により、複数本のマイクロ・ディスペンサーで、同時に、複数の塗布線を描かせる状態を説明するための説明図である。
【図２６】 上記実施形態のパターン形成装置により、ＰＤＰ用基板の電極線を描く状態を説明するための説明図である。
【図２７】 本発明の別の実施形態にかかるパターン形成装置であって、ディスペンサーを固定してパネル側を移動させるパターン形成装置の斜視図である。
【図２８】図２の変形例にかかる上記ＰＤＰ用基板の有効表示領域と非有効表示領を示す図である。
【符号の説明】
１…第１のアクチェータ、２…主軸、３…ハウジング、４…ポンプ部、５…第２のアクチェータ、６…モータロータ、７…上部主軸、８…モータステータ、９…上部ハウジング、１１，１２…リア側超磁歪ロッド及びフロント側超磁歪ロッド、１３…磁界コイル、１４、１５、１６…リア側、中間部、フロント側の永久磁石、１７…リア側ヨーク、１８…フロント側スリーブ、１９…ヨーク材、２０…リア側スリーブ、２１…中間ハウジング、２２…バイアスバネ、２３…回転伝達キー、２４…軸受、２５…エンコーダ、２６…変位センサー、２７…上端面、２８…ラジアル溝、２９…流体シール、３０…シリンダ、３１…ポンプ室、３２…吸入口、３３…吐出ノズル、３４…吐出プレート、３５…吐出側端面、３６…対向面、３７…開口部、３８…軸受、５０…載置台、５１，５２…Ｙ軸方向搬送装置、５３…Ｘ軸方向搬送装置、５４…Ｚ軸方向搬送装置、５５…ディスペンサー、５６…シリンジ装着部、５７ａ、５７ｂ…Ｙ軸モータ、５８…Ｘ軸用モータ、５９…シリンジ、６０ａ，７００…有効表示領域、６０ｂ，７０４…非有効表示領域、６１…ＰＤＰ用基板、６２…吐出ノズル、６３…ＰＤＰ用基板の外周部、８９…Ｚ軸用モータ、９０…基板位置検出カメラ、９１ａ，９１ｂ…モータドライバ、９２…モータドライバ、９３…モータドライバ、９４…ディスペンサー制御部、１００…制御装置、１０１…メモリ、１０２…主軸、１０３…下部ハウジング、１０４…ポンプ部、１０５…第２のアクチェータ、１０６…モータロータ、１０７…上部主軸、１０８…モータステータ、１０９…上部ハウジング、１１１，１１２…リア側超磁歪ロッド及びフロント側超磁歪ロッド、１１３…磁界コイル、１１４，１１５，１１６…リア側、中間部、フロント側の永久磁石、１１７…リア側ヨーク、１１８…フロント側スリーブ、１１９…ヨーク材、１２０…リア側スリーブ、１２１…中間ハウジング、１２２…バイアスバネ、１２３…回転伝達キー、１２４…軸受、１２５…エンコーダ、１２６…変位センサー、１２７…上端面、１２８…ラジアル溝、１２９…流体シール、１３０…シリンダ、１３１…ポンプ室、１３２…吸入孔、１３３…吐出ノズル、１３４…吐出プレート、１３５…スラストプレート、１３６…吐出側端面、１３７…対向面、１３８…開口部、１３９…軸受、２００…マイクロ・ディスペンサー、２０１…直動型のアクチュエータ、２０２…ピストン、２０３…固定スリーブ、２０４…ハウジング、２０５…下部ハウジング、２０６…超磁歪ロッド、２０７，２０８…第１及び第２バイアス永久磁石、２０９…上部ヨーク、２１０…磁界コイル、２１１…ヨーク、２１２…上部スリーブ、２１３…軸受部、２１４…バイアスバネ、２１５…変位センサー、２１６…ピストン細径軸、２１７…吸入口、２１８…ノズル部、２１９…吐出ノズル、２２０…流体貯蔵室、２２１…流体絞り部、２２２…流量制御部、３００…Ｘ軸用モータ、３０１…Ｙ軸用モータ、３０２…Ｚ軸用モータ、３０３…固定フレーム、３０４…ディスペンサー、３０５…基板載置テーブル、３０６…基板、３０７…Ｙ軸テーブル、７０１Ａ、７０１Ｂ…準有効表示領域、７０２…ＰＤＰ表面板、７０３…タブ接合部、７０５、７０８、７０９…電極線、７０６…電極層、ａ…準備位置、ｂ，ｆ…塗布開始位置、ｃ，ｇ…塗布終了位置、ｄ，ｅ，ｈ…屈曲位置。[0001]
BACKGROUND OF THE INVENTION
The present invention belongs to the technical field of manufacturing display panels such as PDP (Plasma Display Panel), liquid crystal, organic EL (Electro-Luminecence), and CRT (Cathode Ray Tube).
[0002]
[Prior art]
Hereinafter, the problem of the prior art will be described by taking as an example the case where a screen stripe made of a phosphor material or an electrode material is formed on a display panel.
[0003]
First, the case of a phosphor material will be described.
[0004]
A plasma display panel (hereinafter referred to as PDP) that performs color display has phosphor layers made of phosphor materials that emit light in RGB colors on the front plate / back plate.
[0005]
In this phosphor layer, three pairs of stripes filled with phosphor materials of RGB colors are formed between the barrier ribs formed in parallel lines on the front plate / back plate (that is, on the address electrodes). These three structures are arranged in parallel and adjacent to each other. This phosphor layer is formed by a screen printing method, a photolithography method or the like.
[0006]
When the screen is enlarged, it is difficult to align the screen printing plate with high accuracy by the conventional screen printing method, and when trying to fill the phosphor material, the material is placed on the top part of the partition wall and removed. Therefore, measures such as the introduction of a polishing process were necessary. Moreover, the filling amount of the phosphor material changes due to the difference in the squeegee pressure, and the pressure adjustment is very delicate and often depends on the skill level of the operator. Therefore, it is not easy to obtain a constant filling amount over the entire surface of the front plate / back plate.
[0007]
A phosphor layer can also be formed by photolithography using a photosensitive phosphor material, but it requires exposure and development processes, and the number of processes is increased compared to the screen printing system. There was a problem that the cost was high.
[0008]
The phosphor screen stripe of the color cathode ray tube panel is usually manufactured by a photographic development method using an exposure table. In this method, first, phosphors of one of the three primary colors are applied to the entire panel.
[0009]
As this coating method, for example, a so-called “swinging method” is used in which the phosphor liquid is injected into the inner surface of the panel, the panel body is rotated, and centrifugal force is applied to the phosphor liquid to uniformize the phosphor material over the entire panel surface. .
[0010]
Next, the above-mentioned panel coated with the phosphor and the mask are combined, and only the stripe position of this color phosphor is exposed on an exposure stand, and a chemical treatment for development is performed to leave the exposed area, and the remaining mask covering area Remove. Next, the photolithography process for mask exposure and development is repeated for each of the other three color phosphors. Therefore, the photolithography process is repeated three times.
[0011]
In addition, an electrostatic coating method is also applied as a method of forming the phosphor screen stripe. This method is the same as the photographic development method in principle, but differs in that a charging material is used as the stripe color phosphor and it is applied by dry coating.
[0012]
When the phosphor screen stripe of the cathode ray tube panel is formed by both of the methods described above, a large-scale manufacturing apparatus is required because any of the methods requires many complicated steps. Therefore, although it is suitable for mass production, there is a drawback in that it is inefficient for high-mix low-volume production.
[0013]
In order to solve the problems for forming screen stripes, that is, the screen printing method in the PDP and the above-mentioned problem relating to the “swinging method → photo developing method” in the color CRT panel, a direct drawing method using a dispenser ( Direct patterning) has already been proposed.
[0014]
FIG. 23 is disclosed in Patent Document 1 and shows a phosphor layer forming apparatus and a forming method for a PDP.
[0015]
Reference numeral 450 denotes a substrate, 451 denotes a mounting table on which the substrate 450 is placed, 452 denotes a dispenser that discharges a paste-like phosphor, and 453 denotes a discharge nozzle of the dispenser 452.
[0016]
In order to configure a transport unit that relatively moves the discharge nozzle 453 and the mounting table 451, a pair of Y-axis direction transporting devices 454a and 454b are provided on both sides of the mounting table 451. An X-axis direction transport device 455 on which the dispenser 452 is supported is mounted so as to be movable in the Y-axis direction by the Y-axis direction transport devices 454a and 454b. Further, a Z-axis direction transport device 456 is mounted so as to be movable in the X-axis direction by the X-axis direction transport device 455.
[0017]
According to the above proposal, the phosphor is ejected from the nozzle 453 that moves on the substrate 450 and is applied to the groove between the ribs of the substrate 450 by simply setting the numerical value of the substrate specification without using a conventional screen mask. In addition, the phosphor layer can be accurately formed on the substrate 450 having an arbitrary size, and the specification change of the substrate 450 can be easily handled.
[0018]
A similar proposal has already been disclosed in Patent Document 2 for a phosphor layer forming apparatus for a color cathode ray tube panel. According to this proposal, it is not necessary to increase the scale of both the production process and the production line, it is possible to perform screening with a single device, and to produce a mass production effect for a large variety of small volume production CRT, Furthermore, because it screens alone, it has the advantage of operating the automated line on a small machine.
[0019]
By the way, even when forming a phosphor screen stripe on the panel surface using a dispenser, a production tact equivalent to that of the screen printing method is desired.
[0020]
However, the number of dispensers that can be arranged in the coating apparatus is limited, and in order to draw 1000 to thousands of screen stripes in as short a time as possible, the relative speed between the panel and the nozzle needs to be sufficiently large.
[0021]
For this purpose, it is necessary to reciprocate the transport table on which the dispenser or the panel is mounted with high accuracy and high speed.
[0022]
Here, the panel surface is disposed on an “effective display area” (a rectangular area 60a surrounded by a dotted line in FIG. 2) that forms the phosphor layer, and on the outer periphery of the effective display area. It is assumed that it has an “ineffective display area” (a square frame area 60b outside the square area 60a in FIG. 2) that is not formed.
[0023]
Further, it is assumed that the dispenser is mounted on the transport table, and attention is paid to the behavior of one discharge nozzle. When the nozzle that has traveled at a high speed while continuously applying the “effective display area” on the panel surface approaches the end surface of the panel, the nozzle decreases its speed through a deceleration zone and enters the “ineffective display area”. After making a U-turn in this non-effective display area, the vehicle continuously travels through the effective display area again through the approach section.
[0024]
That is, the relative speed between the nozzle and the panel changes greatly before and after the U-turn section. At this time, the dispenser desirably has the following functions.
[0025]
(1) The flow rate can be varied according to the relative speed between the nozzle and the panel.
[0026]
{Circle around (2)} The discharge amount can be completely blocked in the U-turn section (the section that travels in the ineffective display area) on the end face of the panel.
[0027]
(3) After the U-turn section, no “thinning” or “cut” occurs at the start point of the coating line at the start of coating. Similarly, no “thickness” or “retention” occurs at the end point of the coating line at the end of coating.
[0028]
If the above (1) cannot be realized, for example, if the discharge rate cannot be reduced even though the relative speed between the nozzle and the panel is smaller than in the case of steady running, the line width and thickness of the fluorescent coating line Will exceed the specified spec.
[0029]
The higher the production tact, the shorter the rise and fall times and the greater the relative rate of change. That is, the dispenser is required to have a higher flow rate control response.
[0030]
The necessity of (2) above is as follows. When the nozzle travels in the U-turn section (ineffective display area) on the end face of the panel, the relative speed between the nozzle and the panel is zero and extremely low before and after that.
[0031]
If material flows out of the nozzle in this section, the material is deposited on the panel because a plurality of stripes overlap even at a small flow rate. As a result, the deposited material adheres to the tip of the discharge nozzle. When the application was started again in this state, the fluid mass attached to the tip of the discharge nozzle dissipated discontinuously on the panel surface, causing troubles such as remarkably degrading the accuracy of the drawing line. That is, it is preferable that the dispenser can completely block the discharge amount in the U-turn section of the end face of the panel.
[0032]
The above (3) is an indispensable condition for ensuring the quality equivalent to or higher than that of the conventional method, for example, the screen printing method.
[0033]
In summary, in order to form a phosphor screen stripe on the panel surface with high production efficiency using a dispenser, the dispenser has a function that can optionally shut off and open the fluid, and has a high flow control response. It is desirable to have high flow accuracy. However, for example, Patent Document 1 and Patent Document 2 which are prior examples of the dispenser method do not have a detailed description of this point.
[0034]
Now, dispensers (liquid ejecting devices) have been used in various fields, but in response to the recent needs for downsizing and high recording density of electronic components, a small amount of fluid material can be accurately and stably stabilized. Therefore, a technology for controlling the supply is demanded. Conventionally, as a liquid ejecting apparatus, an air-type dispenser as shown in FIG. 24 has been widely used. For example, Non-Patent Document 1 discloses the technique.
[0035]
The dispenser according to this system applies a constant amount of air supplied from a constant pressure source in a container 600 (cylinder) in a pulsed manner, and discharges a predetermined amount of liquid corresponding to the pressure increase in the cylinder 601 from the nozzle 602. Is.
[0036]
[Patent Document 1]
Japanese Patent Laid-Open No. 10-27543
[Patent Document 2]
Japanese Patent Publication No.57-21223
[Non-Patent Document 1]
"Automation Technology '93 .25 Volume 7"
[0037]
[Problems to be solved by the invention]
This air-type dispenser has the following problems.
[0038]
(1) Discharge variation due to discharge pressure pulsation.
[0039]
(2) Dispersion of discharge amount due to water head difference.
[0040]
(3) Discharge amount change due to liquid viscosity change.
[0041]
The phenomenon (1) is more noticeable as the tact time is shorter and the discharge time is shorter. For this reason, a contrivance has been made such as providing a stabilization circuit for making the height of the air pulse uniform.
[0042]
In (2), since the volume of the gap 601 in the cylinder varies depending on the remaining amount of liquid H, when a certain amount of high-pressure air is supplied, the degree of pressure change in the gap 601 depends on the remaining amount of liquid H. The reason is that it changes a lot. If the remaining liquid amount H is lowered, there is a problem that the coating amount is reduced by, for example, about 50 to 60% compared to the maximum value. For this purpose, measures are taken such as detecting the remaining amount of liquid H for each discharge and adjusting the pulse duration so that the discharge amount becomes uniform.
[0043]
The above (3) occurs, for example, when the viscosity of a material containing a large amount of solvent changes with time. As countermeasures, measures such as adjusting the pulse width have been taken so that the tendency of the viscosity change with respect to the time axis is programmed in advance in a computer and the influence of the viscosity change is corrected.
[0044]
In any of the above measures, the control system including the computer becomes complicated, and it is difficult to cope with irregular environmental conditions (temperature, etc.), so that it has not become a drastic solution.
[0045]
In addition to the above problems of the air method, this type of dispenser has a drawback of poor responsiveness. This drawback is due to the compressibility of the air confined in the cylinder 600 and the nozzle resistance when the air passes through a narrow gap. That is, in the case of the air system, the time constant of the fluid circuit determined by the cylinder volume: C and the nozzle resistance: R is large: T = RC, and after applying the input pulse, for example, 0.07 to 0.1 at the start of discharge A time delay of about a second must be expected.
[0046]
In order to eliminate the disadvantages of the air system, a dispenser that opens and closes the discharge port by providing a needle valve at the inlet of the discharge nozzle and moving a small-diameter spool constituting the needle valve in the axial direction at high speed Has been put to practical use. However, in this case, when the fluid is shut off, the gap between the relatively moving members becomes zero, and the powder having an average particle diameter of several microns to several tens of microns is mechanically squeezed and destroyed. Due to various problems that occur as a result, it is often difficult to apply the present invention to a phosphor or the like that is the subject of the present invention.
[0047]
For the above reasons, even if the structure or application method of the conventional dispenser is introduced as it is, it is difficult to satisfy the conditions for forming the phosphor screen stripe on the panel surface with high production efficiency.
[0048]
The problem of the prior art has been described above by taking as an example the case where a screen stripe made of a phosphor material is formed on a display panel. The problem is similar in the case of pattern formation using a material other than the phosphor screen stripe, such as an electrode material.
[0049]
Therefore, an object of the present invention is to provide a condition for forming a thin film pattern such as a phosphor and an electrode material on the display panel surface with high production efficiency by giving the dispenser functions of high-speed discharge blocking, high-speed discharge opening, and flow rate control. ,
(1) The flow rate can be varied with high responsiveness according to the acceleration / deceleration of the dispenser.
(2) The fluid can be shut off and opened at will when the nozzle tip of the dispenser moves from the application area to the non-application area or vice versa.
The present invention provides a display panel pattern forming method and a forming apparatus that satisfy the above requirements.
[0050]
[Means for Solving the Problems]
In order to achieve the above object, the present invention is configured as follows.
[0051]
The pattern forming method of the display panel of the present invention generally forms a pattern by sequentially applying paste at predetermined positions by discharging paste while moving a variable flow rate-type dispenser relative to the substrate. In the display panel pattern forming method, when the dispenser and the substrate are relatively running in a region where the pattern is not formed, the discharge of the paste is kept in a blocked state.
[0052]
According to the first aspect of the present invention, the paste is ejected sequentially to the position to be ejected on the substrate by ejecting the paste while moving the variable flow rate-type dispenser relative to the substrate. In the display panel pattern forming method for forming a paste layer of a certain pattern,
The dispenser relatively runs in the effective display area of the substrate having the effective display area for forming the paste layer and the non-effective display area for forming the paste layer outside the effective display area. There is provided a pattern forming method for a display panel that ejects the paste when the dispenser is relatively running in the ineffective display area.
[0053]
According to the second aspect of the present invention, the paste is discharged while moving the dispenser relative to the substrate on which the plurality of light absorption layers are formed in parallel on the surface, thereby discharging between the light absorption layers. In the pattern forming method of the display panel according to the first aspect, in which the paste layer is formed by discharging the paste sequentially at the power position,
A display panel pattern forming method for controlling discharge of the paste by using a variable flow rate dispenser as the dispenser.
[0054]
According to a third aspect of the present invention, there is provided the pattern forming method for a display panel according to the second aspect, wherein the dispenser is controlled to vary the discharge amount of the paste in accordance with the relative speed between the dispenser and the substrate. provide.
[0055]
According to the fourth aspect of the present invention, the effective display area of the substrate having the effective display area for forming the paste layer and the non-effective display area for forming no paste layer outside the effective display area is defined as A second mode in which the paste is discharged when the dispenser is running relatively, while the non-effective display area is cut off when the dispenser is running relatively. A display panel pattern forming method is provided.
[0056]
According to a fifth aspect of the present invention, the display according to the second aspect, wherein a screw groove type dispenser is used as the dispenser, and the discharge of the paste is controlled by rotation control of the rotation shaft of the screw groove type dispenser. A panel pattern forming method is provided.
[0057]
According to the sixth aspect of the present invention, when a thread groove type dispenser is used as the dispenser and the dispenser and the substrate are relatively running in the non-effective display area, the thread groove type dispenser is According to a fourth aspect of the present invention, there is provided the display panel pattern forming method according to the fourth aspect, wherein the rotation axis is stopped or the rotation axis is reversed relative to when the effective display area is running.
[0058]
According to the seventh aspect of the present invention, when the dispenser and the substrate relatively move from the effective display area to the ineffective display area, the rotational speed of the rotating shaft of the thread groove dispenser is reduced. The pattern formation of the display panel according to the fifth aspect, wherein the discharge is stopped by stopping after being stopped, or stopped after being reduced, and further, the discharge is stopped by reversing the rotating shaft. Provide a method.
[0059]
According to the eighth aspect of the present invention, when the dispenser and the substrate relatively move from the ineffective display area to the effective display area, the rotational speed of the rotating shaft of the thread groove dispenser is increased. After that, the discharge is performed while maintaining the constant rotation of the rotation shaft, or after being increased and decreased, the discharge is performed while maintaining the constant rotation of the rotation shaft. A display panel pattern forming method is provided.
[0060]
According to the ninth aspect of the present invention, a plurality of thread groove type dispensers are used as the dispenser, and the number of rotations of the plurality of thread groove type dispensers is individually adjusted to set a predetermined flow rate. A display panel pattern forming method according to the fifth aspect is provided.
[0061]
According to a tenth aspect of the present invention, the dispenser supplies the paste to a fluid transport chamber formed by a cylinder and a piston as a paste pumping device, and gives a relative axial movement to the cylinder and the piston. Thus, the display panel pattern forming method according to the second aspect, in which the amount of discharge of the paste is varied by increasing / decreasing the space of the fluid transport chamber, is provided.
[0062]
According to an eleventh aspect of the present invention, in the display panel pattern according to the tenth aspect, the paste is pumped by giving a relative rotational motion to a thread groove formed on a relative movement surface of the cylinder and the piston. A forming method is provided.
[0063]
According to the twelfth aspect of the present invention, when the nozzle tip and the substrate move relatively from the effective display area to the ineffective display area, the space of the fluid transport chamber is increased to discharge the paste. A display panel pattern forming method according to a tenth aspect of stopping is provided.
[0064]
According to the thirteenth aspect of the present invention, when the nozzle tip and the substrate relatively move from the ineffective display area to the effective display area, the space of the fluid transport chamber formed by the cylinder and the piston. The pattern forming method for a display panel according to the tenth aspect, wherein the paste is discharged while reducing the above.
[0065]
According to the fourteenth aspect of the present invention, when the nozzle tip and the substrate are traveling relatively in the ineffective display area, the space of the fluid transport chamber formed by the cylinder and the piston is increased. The display panel pattern forming method according to the tenth aspect, in which the discharge of the paste is continuously stopped.
[0066]
According to a fifteenth aspect of the present invention, the dispenser pumps the paste into a fluid transport chamber formed by a cylinder, a piston, and a sleeve that houses at least a part of the piston as a paste pumping device. The pattern formation of the display panel according to the second aspect, in which the piston and the piston and the sleeve are given relative axial movements to increase / decrease the space of the fluid transport chamber to vary the discharge amount of the paste. Provide a method.
[0067]
According to the sixteenth aspect of the present invention, the relative displacement curve of the cylinder and the piston and the relative displacement curve of the piston and the cylinder are set in a substantially opposite phase, or the movement direction is reversed. The display panel pattern forming method according to the fifteenth aspect, wherein the paste starts or stops being discharged.
[0068]
According to a seventeenth aspect of the present invention, the variable flow rate dispenser changes the gap of the flow passage between the shaft and the housing by driving the shaft and the housing relatively in the axial direction to change the flow path. The display panel pattern forming method according to the second aspect, wherein the flow rate of the paste is controlled by increasing or decreasing the fluid resistance of the paste.
[0069]
According to an eighteenth aspect of the present invention, the dispenser discharges the paste by generating a pumping pressure for rotating the shaft and the housing relative to each other to pump the paste from the suction port to the discharge port of the housing. The display panel pattern forming method according to the seventeenth aspect is provided.
[0070]
According to a nineteenth aspect of the present invention, there is provided the pattern forming method for a display panel according to the seventeenth aspect, wherein the paste outflow is shielded by a dynamic pressure seal formed on a relative moving surface between the shaft and the housing. provide.
[0071]
According to a twentieth aspect of the present invention, the dispenser rotates the shaft and the housing relative to each other and moves the shaft and the housing relative to each other in the axial direction to move the shaft and the housing. The display panel pattern forming method according to the nineteenth aspect, wherein the flow rate of the paste is controlled by changing the gap of the flow passage in which the pressure seal is formed to increase or decrease the fluid resistance of the paste.
[0072]
According to a twenty-first aspect of the present invention, there is provided a pattern forming apparatus for a display panel for forming a paste layer having a pattern by discharging a paste between a plurality of light absorption layers provided in parallel on a substrate surface,
A mounting table for mounting the substrate;
A dispenser having at least one nozzle for discharging the paste;
A transport unit that relatively moves the nozzle and the mounting table;
A control device for controlling the transport unit and the dispenser so that the paste is sequentially discharged to a predetermined position between the light absorption layers;
With
The dispenser is a thread groove type display panel pattern forming apparatus.
[0073]
According to a twenty-second aspect of the present invention, the dispenser comprises:
A cylinder having a suction hole and a discharge hole for the paste and having a fluid transport chamber formed therein;
A piston housed in the cylinder;
An actuator for imparting relative motion to the cylinder and the piston in order to increase or decrease the internal space formed by the cylinder and the piston;
With
The display panel pattern forming apparatus according to the twenty-first aspect, wherein the paste that has flowed into the fluid transport chamber from the suction hole flows out to the discharge hole through a flow path connected to the internal space. provide.
[0074]
According to a twenty-third aspect of the present invention, the dispenser is replaced with a thread groove type dispenser,
A first actuator;
A piston driven linearly by the first actuator;
A housing that houses the piston and has a suction hole and a discharge hole for the paste;
A cylinder arranged coaxially with the piston;
A second actuator for providing a relative rotational movement between the piston and the cylinder;
A pump chamber communicating with the suction hole and the discharge hole is formed between the piston and the housing, and a relative rotational movement of the piston and the cylinder by driving the first actuator or the second actuator. Alternatively, the pump chamber is configured to be pumped by linear motion, and the first actuator is moved or expanded / contracted by being supplied with electromagnetic non-contact power from the outside to move the piston. A display panel pattern forming apparatus according to a twenty-first aspect is provided.
[0075]
According to a twenty-fourth aspect of the present invention, the dispenser is replaced with a thread groove type dispenser,
The axis,
A housing that houses the shaft and has a suction port and a discharge port for the paste that communicates with the pump chamber formed between the shaft and the outside;
A device for relatively rotating the shaft and the housing;
An axial drive device for providing an axial relative displacement between the shaft and the housing;
A device for pumping the paste flowing into the pump chamber to the discharge port side,
In a twenty-first aspect, the gap between the shaft and the housing is changed by the axial drive device in order to increase or decrease the fluid resistance of the paste between the pump chamber and the discharge port. A display panel pattern forming apparatus is provided.
[0076]
According to a 25th aspect of the present invention, the dispenser comprises:
A piston,
A housing that houses the piston and has a suction port and a discharge port for the paste;
A first actuator for relatively moving the piston and the housing;
A cylinder having at least a part of the piston and having a space penetrating in the axial direction;
A second actuator for relatively moving the cylinder and the housing;
The display panel pattern forming apparatus according to the twenty-first aspect, wherein the paste is supplied from the suction port to the pump chamber formed by the piston, the cylinder, and the housing and discharged from the discharge port. .
[0077]
According to a twenty-sixth aspect of the present invention, the dispenser comprises:
A piston housed in a cylinder;
An actuator for imparting relative motion to the cylinder and the piston in order to increase or decrease the internal space formed by the cylinder and the piston;
A housing that houses the cylinder or is integrated with the cylinder, and has a suction hole and a discharge hole for the paste;
Consists of a fluid transport chamber formed inside the housing,
The display panel pattern forming apparatus is configured such that the paste flowing into the fluid transport chamber from the suction hole flows out to the discharge hole through a flow path connected to the internal space.
[0078]
According to a twenty-seventh aspect of the present invention, in the twenty-sixth aspect, the gap between the piston and the opposing surface is a dispenser that is formed larger than the particle size of the particles contained in the discharge material when blocking the paste. A display panel pattern forming apparatus according to an aspect is provided.
[0079]
According to a twenty-eighth aspect of the present invention, there is provided the pattern forming apparatus for a display panel according to the twenty-seventh aspect, wherein a minimum gap when the paste is blocked is 8 μm or more in the flow path from the suction port to the discharge nozzle. provide.
[0080]
According to a twenty-ninth aspect of the present invention, the control device includes: an effective display area that forms the paste layer; and an ineffective display area that does not form the paste layer outside the effective display area. When the dispenser is relatively traveling in the effective display area, the paste is discharged, while when the dispenser is relatively traveling in the non-effective display area, the discharge of the paste is cut off. The display panel pattern forming apparatus according to the twenty-first aspect is provided.
[0081]
According to the thirtieth aspect of the present invention, an effective display region for forming an electrode layer as the paste layer, and a continuous electrode layer and a discontinuous electrode layer that are arranged adjacent to the effective display region and are formed are formed. The effective display region, the effective display region, and the non-effective display region which is virtually provided outside the semi-effective display region and does not form an electrode layer. When the dispenser is relatively traveling with the effective display area, the paste is discharged, while when the dispenser is relatively traveling with the non-effective display area, the discharge of the paste is cut off. A display panel pattern forming method according to the first aspect is provided.
[0082]
According to the thirty-first aspect of the present invention, the second aspect is such that the discharge of the paste is started in the quasi-effective display area or the discharge in the effective display area is blocked in the quasi-effective display area. A display panel pattern forming method described in 1. above.
[0083]
According to the thirty-second aspect of the present invention, a plurality of striped discharges of the paste in the semi-effective display area adjacent to the effective display area by a dispenser having a plurality of nozzles arranged at an equal pitch. A third mode in which the plurality of striped discharges of the paste are cut off in the quasi-effective display area adjacent to the other side of the effective display area via the effective display area A display panel pattern forming method described in 1. above.
[0084]
According to the thirty-third aspect of the present invention, a plurality of bent stripes having the same inclination angle in the paste layer in the semi-effective display area by a dispenser having a plurality of nozzles arranged at an equal pitch. Choose only the electrode layer
The second aspect in which the plurality of stripe-like discharges are simultaneously performed in the quasi-effective display region and / or the effective display region to form the plurality of stripe-like electrode layers. A display panel pattern forming method is provided.
[0085]
According to the thirty-fourth aspect of the present invention, when the discharge of the paste is cut off in the semi-effective display area, the discharge cut-off is made utilizing the generation of negative pressure accompanying the increase in the gap of the internal flow path of the dispenser. A display panel pattern forming method according to a third aspect is provided.
[0086]
DETAILED DESCRIPTION OF THE INVENTION
Before continuing the description of the present invention, the same parts are denoted by the same reference numerals in the accompanying drawings.
[0087]
Embodiments according to the present invention will be described below in detail with reference to the drawings.
[0088]
FIG. 1 is a schematic diagram illustrating a first embodiment in which a pattern forming method and a forming apparatus for a display panel according to the present invention are applied to a phosphor layer forming method and a forming apparatus for a PDP substrate 61 of a plasma display panel (hereinafter referred to as PDP). This will be described using a perspective view.
[0089]
Reference numeral 50 denotes a mounting table for mounting a PDP substrate 61 that constitutes a part of the panel. The mounting table 50 includes, for example, a simple fixed plate or an XY stage that can position and hold the PDP substrate 61. A pair of Y-axis direction transfer devices 51 and 52 are provided across both sides of the mounting table 50. Further, the X-axis direction transport device 53 is mounted on the Y-axis direction transport devices 51 and 52 so as to be movable in the YY ′ direction. Further, a Z-axis direction transport device 54 is mounted on the X-axis direction transport device 53 so as to be movable in the direction of arrow XX ′.
[0090]
On the Z-axis direction transport device 54, a syringe mounting portion 56 on which the dispenser 55 is detachably mounted is mounted so as to be movable in the ZZ ′ direction.
[0091]
The Y-axis direction conveyance devices 51 and 52 convey the X-axis direction conveyance device 53 in the YY ′ direction by driving Y-axis motors 57a and 57b with encoders. Output information (in other words, transport position information) from the encoder is input to the control device 100 and used for operation control of the Y-axis motors 57a and 57b.
[0092]
Further, the X-axis direction transport device 53 transports the Z-axis direction transport device 54 in the XX ′ direction by driving an X-axis motor 58 with an encoder. Output information from the encoder (in other words, conveyance position information) is input to the control device 100 and used for operation control of the X-axis motor 58 and the like.
[0093]
Further, the Z-axis direction transport device 54 transports the syringe mounting portion 56 in the ZZ ′ direction by driving a Z-axis motor 89 with an encoder. Output information from the encoder (in other words, transport position information) is input to the control device 100 and used for operation control of the Z-axis motor 89 and the like.
[0094]
The Y-axis motors 57a and 57b are connected to the motor drivers 91a and 91b, the X-axis motor 58 is connected to the motor driver 92, the Z-axis motor 89 is connected to the motor driver 93, and the dispenser 55 is connected to the dispenser controller 94. Respectively, to the control device 100. The operations of the Y-axis motors 57a and 57b, the X-axis motor 58, the Z-axis motor 89, and the dispenser 55 are controlled by the control device 100 based on output information from the respective encoders.
[0095]
The X-axis direction conveyance device 53 and the Y-axis direction conveyance devices 51 and 52 constitute an example of a conveyance unit that moves the discharge nozzle relative to the mounting table 50. Another example of the transport unit is an XY table shown in FIG. 27 and described later.
[0096]
A substrate position detection camera 90 such as a CCD sensor or a line sensor as an example of a substrate imaging device is fixed to the dispenser 55, and image information captured by the substrate position detection camera 90 is input to the control device 100. A memory 101 for storing data and programs is connected to the control device 100.
[0097]
A phosphor layer is formed on the PDP substrate 61 by the pattern forming apparatus having the above-described configuration.
[0098]
First, a syringe 59 containing a paste-like phosphor for forming a red (R) phosphor layer is detachably attached to the dispenser 55.
[0099]
As shown in FIG. 2, the PDP substrate 61 includes an effective display area 60a that forms a phosphor layer corresponding to the effective display section of the PDP, and is disposed on the outer side of the effective display area 60a, for example, on the outer periphery thereof. And the non-effective display area 60b that does not form. The substrate 61 is placed and fixed at a predetermined position on the mounting table 50.
[0100]
For example, in the case of a 42-inch PDP substrate, the effective display area 60a of the substrate 61 made of a glass plate having a thickness of 3.0 mm has a length L = 560 mm and a height H in parallel with the arrow XX ′ direction in advance. 1921 ribs (light absorption layers or) having a pitch of 100 μm and a width of W = 50 μm are formed with a pitch P interval. Since 1920 grooves are formed by the 1921 ribs, the R, G, and B phosphors are respectively applied to 640 (= 1920/3) grooves.
[0101]
First, as a preparatory operation, a method for determining the position of the image line of the phosphor layer by the dispenser 55 with respect to the PDP substrate 61 will be described.
[0102]
For example, the substrate position detection camera 90 is used to detect alignment marks (alignment marks) formed at two positions (for example, two diagonal positions) or three positions of a substantially square PDP substrate 61.
[0103]
Next, the position information of the light absorption layer of the PDP substrate 61 is detected by the substrate position detection camera 90. At this time, the light absorption layer is detected by reflection on the PDP substrate 61 of the transmitted light projected from the mounting table 50 side and penetrating the PDP substrate 61 or the projection light provided on the dispenser 55 side. If necessary, image processing is performed to clarify black and white. The obtained position information of the light absorption layer is stored in the memory 101 by the control device 100. At this time, all the light absorption layers may be detected, or some light absorption layers appropriately selected from all the light absorption layers are detected, and the position information of the other light absorption layers is inferred. You may do it.
[0104]
Further, instead of the above-described detection operation of the light absorption layer, the position information of the light absorption layer may be stored in the memory 101 in advance, and the stored position information of the light absorption layer may be read by the control device 100. .
[0105]
Next, based on the position information of the alignment mark, based on the position information of the light absorption layer, the XY coordinates of the coating start position b (position where the stripe starts to be written) viewed from the coordinate axis of the upper pattern forming apparatus are determined. In this case, for example, after determining the XY coordinates of the coating start position b on the basis of the position information of the alignment mark, the position information of the light absorption layer (for example, distance information between the position b and the position c) is used. And other positions (preparation position a, application start position b, application end position c, bending position d, bending position e, application start position f, application end position g, bending position h, ..., etc.) The XY coordinates of are determined. Here, the application start position b, the application end position c, the application start position f, and the application end position g are boundary positions between the effective display area 60a and the ineffective display area 60b, respectively. The bending position d, the bending position e, and the bending position h are positions where the dispenser 55 is moved so as to be bent by switching the movement direction between the X or X ′ direction and the Y or Y ′ direction, respectively.
[0106]
As a modification of FIG. 2, in FIG. 28, the application start position b, the application end position c, and the application start position f are not the boundary between the effective display area 60 a and the ineffective display area 60 b, but the ineffective display area. The case where it is located in 60b is illustrated. Therefore, generally speaking, the application start position and the application end position are each an arbitrary position in the ineffective display area 60b or a boundary position between the effective display area 60a and the ineffective display area 60b. The bending position is always an arbitrary position in the non-effective display area 60b.
[0107]
Next, when detecting the position information of the light absorption layer, the Z-axis information (the distance between the nozzle tip of the dispenser 55 and its opposing surface, such as undulation or bending, may be used in some cases. Information). When the PDP substrate 61 is wavy or curved, this Z-axis information is necessary when driving the Z-axis so that the distance between the nozzle tip of the dispenser 55 and its opposing surface is constant. . Also in this case, instead of directly reading the Z-axis information using a laser or the like, the previously detected Z-axis information is stored in the memory 101 in advance, and the stored Z-axis information is stored in the control device 100. You may make it read.
[0108]
Next, the discharge operation by the control of the control device 100 will be described.
[0109]
First, the dispenser 55 is moved to the preparation position a to start application of the R (red) phosphor (hereinafter referred to as “R phosphor”), and the operation control of the control device 100 is performed based on the Z-axis information. Thus, the Z-axis motor 89 is driven to position the tip of the discharge nozzle 62 at a predetermined height.
[0110]
Next, the X-axis motor 58 is driven under the control of the control device 100 to move the discharge nozzle 62 in the arrow X direction, and the discharge nozzle 62 is moved by the control device 100 according to the output information from the encoder of the X-axis motor 58. It is detected that it is located at the application start position b. Then, under the control of the control device 100, the discharge of the R phosphor from the discharge nozzle 62 is started, and at the same time, the discharge nozzle 62 is further moved at a constant speed in the direction of the arrow X to apply the stripe-shaped phosphor to the PDP substrate 61. To start. The discharge nozzle 62 draws a coating line by the length L (FIG. 2) of one rib, and the tip of the discharge nozzle 62 is moved from the effective display area 60a by the control device 100 based on the output information from the encoder of the X-axis motor 58. It is detected that the application end position c that enters the ineffective display area 60b has been reached. Then, the discharge of the phosphor is stopped under the control of the control device 100. Thereafter, under the control of the control device 100, the discharge nozzle 62 continues to move in the X direction, and the control device 100 detects that the bending position d has been reached based on the output information from the encoder of the X-axis motor 58. . Then, the driving of the X-axis motor 58 is stopped, and the movement of the discharge nozzle 62 in the X direction is stopped.
[0111]
Next, with the discharge nozzle 62 stopped discharging the phosphor, the Y-axis motors 57a and 57b are driven synchronously under the control of the control device 100, and the discharge nozzle 62 moves from the bending position d toward the bending position e. It moves in the arrow Y direction by 3P (that is, an interval that is three times the arrangement pitch P of the ribs (or light absorption layers)). That is, when the control device 100 detects that the discharge nozzle 62 has reached the bending position e based on the output information from the encoders of the Y-axis motors 57a and 57b, the control device 100 controls the Y-axis motors 57a and 57b. The drive is stopped and the movement of the discharge nozzle 62 in the Y direction is stopped.
[0112]
Next, the X-axis motor 58 is driven again under the control of the control device 100 to start moving the discharge nozzle 62 in the X ′ direction from the bending position e toward the application start position f. When the control device 100 detects that the discharge nozzle 62 has reached the application start position f from the output information from the encoder of the X-axis motor 58, the discharge of the R phosphor from the discharge nozzle 62 is started again, and at the same time, the arrow X The discharge nozzle 62 is further moved in the direction at a constant speed, and the stripe-shaped phosphor coating on the PDP substrate 61 is resumed. The discharge nozzle 62 draws a coating line by the length L (FIG. 2) of one rib, and the tip of the discharge nozzle 62 is moved from the effective display area 60a by the control device 100 based on the output information from the encoder of the X-axis motor 58. It is detected that the application end position g entering the ineffective display area 60b has been reached. Then, the discharge of the phosphor is stopped under the control of the control device 100. Thereafter, under the control of the control device 100, the discharge nozzle 62 continues to be moved in the X ′ direction, and it is detected by the control device 100 that the bending position h has been reached based on the output information from the encoder of the X-axis motor 58. To do. Then, the driving of the X-axis motor 58 is stopped, and the movement of the discharge nozzle 62 in the X ′ direction is stopped.
[0113]
Here, the bending position h is read as the previous bending position d, and moved to the arrow Y direction by 3P (that is, an interval that is three times the arrangement pitch P of the ribs (or the light absorption layer)), and a new preparation position a When the number of coatings reaches 640, the operation with the R phosphor is finished.
[0114]
The above are the basic steps of applying the phosphor. The remaining G (green) phosphor (hereinafter referred to as “G phosphor”) and B (blue) phosphor (hereinafter referred to as “B phosphor”). .)), The PDP substrate 61 is sequentially placed on the G phosphor pattern forming apparatus having the G phosphor dedicated mounting table and the B phosphor pattern forming apparatus having the B phosphor dedicated mounting table. It may be transferred to perform pattern formation by each pattern forming apparatus. Alternatively, three types of dispensers (for R (red), G (green), and B (blue) phosphor coating)) are arranged on the Z-axis direction conveying device 54 of the same pattern forming device, and for each color. You may make it perform fluorescent substance discharge operation | movement.
[0115]
As described above, the start / end positions of the discharge nozzle 62 (application start position b, application end position c, application start position f, application end position g, etc.), application start / end timing, and dispenser, Control of the coating amount in synchronization with the moving speed of the discharge nozzle 62 is performed by the control device 100 based on pre-programmed start and end position information and displacement / speed information from the discharge nozzle 62. In this way, when all the operations for forming the R, G, and B phosphor layers along the inner surface shape of the groove between the ribs are completed, the tip position of the discharge nozzle 62 of the dispenser 55 is set to the home position (for example, FIG. 2). Return to the preparation position a). As described above, when the screen stripe application process is completed, the substrate 61 is transferred, and then the process proceeds to the phosphor drying process.
[0116]
[1] Thread groove type dispenser
Hereinafter, a more specific structure of the phosphor layer forming method and forming apparatus on the PDP substrate 61 according to the first embodiment of the present invention will be described with reference to FIGS.
[0117]
In FIG. 3, 350 is a rotation shaft of a thread groove type dispenser (corresponding to the dispenser 55 described above), 351 is a sleeve for storing the discharge side of the rotation shaft, 352 is an inner surface of the sleeve 351 and the rotation shaft 350. Thread groove formed on the relative movement surface (the groove portion is blacked out), 353 is a suction port formed in the sleeve 351, 354 is a discharge portion disposed at the tip of the sleeve 351, 355 is this discharge portion 354 is a discharge nozzle (corresponding to the discharge nozzle 62 described above), 356 is a motor rotor fixed to the rotary shaft 350, 357 is a motor stator, 358 and 359 are bearings for supporting the rotary shaft 350, Reference numerals 360 and 361 denote upper and lower housings for housing the bearings 358 and 359 and the motor stator 357, and reference numeral 352 denotes a motor rotation. An encoder for outputting to the control unit 100 detects the number.
[0118]
The screen stripe forming method in the first embodiment is as follows. Referring to FIG. 2, when the discharge nozzle 355, in other words, the thread groove type dispenser starts running, the tip of the discharge nozzle 355 is in the non-effective display area 60b [see the preparation position a in FIG. 2]. It shall be. Normally, a time constant of 0.01 to 0.1 seconds is required until the dispenser reaches a steady speed after the X-axis direction conveyance device 53 as a dispenser driving device starts driving. The magnitude of the time constant of the control system is determined by the mass of the transferred object, the power of the motor, the magnitude of vibration allowed in the transient state, and the like. Hereinafter, the movement speed of the dispenser will be described in two cases: [1] a steady speed in the non-effective display area, and [2] a steady speed in the effective display area.
[0119]
[1] When the steady speed is reached in the non-effective display area
FIG. 4 shows the “moving speed of the dispenser with respect to time” in the first embodiment. FIG. 5C shows a “relationship between screw groove rotation speed and time”, and Ns is a basic input waveform that is a basic component of the screw groove rotation speed. Note that “a, b, c, d” on the horizontal axis in FIGS. 4 to 5C means the time for passing through the preparation position a, the application start position b, the application end position c, and the bending position d, respectively. To do.
[0120]
The total amount per unit length of the coating line applied on the substrate 61 is inversely proportional to the speed of the dispenser. In addition, it should be noted that in the steady state, the rotational speed of the thread groove and the discharge flow rate Q are linearly proportional. Therefore, in the first embodiment, the basic input waveform: Ns, which is the basic component of the rotational speed of the thread groove, is set by a relational expression inversely proportional to the speed of the dispenser: Vs.
[0121]
In the first embodiment, when the speed of the dispenser is sufficiently low, a continuous line including the start and end points can be applied without hindrance using the basic input waveform of rotation speed: Ns.
[0122]
However, for example, when the speed of the dispenser is set to Vs> 100 mm / sec in order to increase the production tact time, the following problem occurs.
[0123]
(1) Issues at the start of application
At the same time as the nozzle tip relatively moves to the effective display area, the rotation of the rotating shaft 350 in which the thread groove 352 is formed starts steeply. At this time, drawing lines cannot be drawn on the substrate 61 at the same time as the rotation starts, and problems such as missing or thinning of coating lines occur until a continuous drawing line can be drawn. The reason for this is as follows. The fluid that flows out from the tip of the discharge nozzle 355 cannot be separated from the nozzle 355 because the flow velocity is small immediately after the start of the outflow, and a fluid mass due to surface tension is formed at the nozzle tip. When the flow velocity increases and the kinetic energy of the coating fluid increases, the surface tension is overcome and the fluid leaves the nozzle 355. At this time, since the fluid mass at the tip of the nozzle is also dripped onto the substrate 61 at the same time, a dropout portion occurs after the missing or thinning of the coating line.
[0124]
(2) Issues at the end of application
At the end point of application, it is as follows. The rotation of the screw groove 352 is suddenly lowered before the nozzle tip relatively moves from the effective display area 60a to the ineffective display area 60b. As a result, the application to the substrate 61 stops, but the fluid outflow from the tip of the nozzle does not stop completely, so the nozzle 355 is also running in the U-turn section (for example, the section from the bending position d to the bending position e). The fluid mass at the nozzle tip continues to grow.
[0125]
When rotation starts before the nozzle tip moves from the non-effective display area 60b to the effective display area 60a, first, a fluid drop at the tip of the nozzle occurs.
[0126]
Thereafter, as described above, missing or thinning of the coating line occurs.
[0127]
In contrast to the problems (1) and (2) above, in the first embodiment, the above-described problems related to the start and end are solved by the following method.
[0128]
According to an input waveform Nt [FIG. 5C] obtained by adding a correction term (correction) ΔN [FIG. 5B] to a basic input waveform Ns [FIG. Rotate. The correction term ΔN corrects the transient flow rate characteristics of the dispenser. At the starting point of application, the rotation of the screw groove 352 is accelerated and then immediately returned to the steady rotation. As a result, since large kinetic energy that overcomes the surface tension is given to the fluid immediately after the start of discharge, application can be started without forming a fluid mass at the nozzle tip.
[0129]
At the end point of application, as shown in FIG. 5C, the rotation of the thread groove 352 is rapidly decelerated and stopped. As a result, the fluid mass at the tip of the nozzle can be made small before traveling in the U-turn section (ineffective display area 60b), and it is possible to prevent dripping at the start of application.
[0130]
Further, while traveling in the U-turn section, the screw groove 352 is gently reversed to keep the fluid mass at the tip of the nozzle slightly sucked into the nozzle, thereby further preventing the dropping of the liquid at the start of application. It can be effectively prevented.
[0131]
[2] When steady speed is reached within the effective display area
In this case as well, as in [1], the basic input waveform Ns determined in proportion to the moving speed of the dispenser is added with a correction term ΔN for preventing discharge delay at the start of application and generation of a fluid mass at the end of application. The thread groove may be rotated by the waveform Nt.
[0132]
When the screen stripe is formed by the direct drawing method using the dispenser, it is preferable that a plurality of dispensers are arranged from the production tact surface. In this case, how to match the flow rates of the respective dispensers becomes a big problem. Even if the dimensions of the dispenser including the pump unit and the driving conditions such as the motor are set to be the same, the flow rate of each dispenser often varies. In the first embodiment, by utilizing the fact that the flow rate is substantially proportional to the rotational speed of the thread groove, the flow rate can be corrected by individually correcting the rotational speed of each dispenser by δNs based on the basic rotational speed of the motor: Ns. Can be matched. Even when the flow characteristics of the phosphors of R, G, and B each cause a difference in flow rate, it can be corrected by setting the rotational speed of the motor. This method can also be applied to the following second to fifth embodiments using a thread groove type.
[0133]
Hereinafter, as a second embodiment of the present invention, a dispenser applied to a phosphor layer forming method and a forming apparatus will be described with reference to FIGS.
[0134]
The dispenser of the second embodiment shown below has a “two-degree-of-freedom actuator” that simultaneously gives a relative rotational motion and a linear motion between a piston and a sleeve that houses the piston. That is,
(1) Positive and negative squeeze pressure is generated on the discharge side end face of the piston by linearly driving the piston with the first actuator.
[0135]
{Circle around (2)} A second actuator that imparts a rotational motion rotates a piston having a thread groove to generate a pumping pressure, and pumps the application fluid to the discharge side.
[0136]
By combining the above (1) and (2), high-speed blocking / high-speed opening control of the coating line at the boundary between the effective display area and the non-effective display area is realized.
[0137]
In FIG. 6, reference numeral 1 denotes a first actuator. In the second embodiment, a giant magnetostrictive element that can obtain high positioning accuracy, has high responsiveness, and obtains a large generated load is used. Reference numeral 2 denotes a main shaft (piston) driven by the first actuator 1. The first actuator 1 is accommodated in a housing 3, and a pump portion 4 that accommodates the main shaft 2 is attached to a lower end portion (front side) of the housing 3.
[0138]
Reference numeral 5 denotes a second actuator, which gives a relative rotational movement between the main shaft 2 and the housing 3. The motor rotor 6 is fixed to the upper main shaft 7, and the motor stator 8 is accommodated in the upper housing 9.
[0139]
Reference numerals 11 and 12 denote a cylindrical rear-side giant magnetostrictive rod and a front-side giant magnetostrictive rod composed of giant magnetostrictive elements. Reference numeral 13 denotes a magnetic field coil for applying a magnetic field in the longitudinal direction of the giant magnetostrictive rods 11 and 12. Reference numerals 14, 15, and 16 denote rear side, intermediate, and front side permanent magnets for applying a bias magnetic field to the giant magnetostrictive rods 11 and 12. The rear-side and front-side permanent magnets 14 and 16 are arranged so as to sandwich the giant magnetostrictive rods 11 and 12 and the intermediate permanent magnet 15.
[0140]
The permanent magnets 14 to 16 apply a magnetic field to the giant magnetostrictive rods 11 and 12 in advance to increase the operating point of the magnetic field. This magnetic bias can improve the linearity of the giant magnetostriction with respect to the strength of the magnetic field.
[0141]
Reference numeral 17 denotes a rear side yoke which is disposed on the rear side of the giant magnetostrictive rod 11 and serves as a yoke material of the magnetic circuit. Reference numeral 18 denotes a front side sleeve which is disposed on the front side of the giant magnetostrictive rod 12 and also serves as the yoke material. A cylindrical yoke material disposed on the outer periphery of the magnetic field coil 13.
[0142]
The giant magnetostrictive rod 12 → the permanent magnet 15 → the giant magnetostrictive rod 11 → the permanent magnet 14 → the rear side yoke 17 → the yoke material 19 → the front side sleeve 18 → 16 → the giant magnetostrictive rod 12 controls the expansion and contraction of the giant magnetostrictive rods 11 and 12. A closed loop magnetic circuit is formed. The main shaft 2 is made of a nonmagnetic material so as not to affect the magnetic circuit. That is, the giant magnetostrictive rods 11 and 12, the magnetic field coil 13, the permanent magnets 14 to 16, the rear side yoke 17, the front side sleeve 18, and the yoke material 19, the axial direction of the giant magnetostrictive rods 11 and 12 with the current applied to the magnetic field coil 13. A giant magnetostrictive actuator (first actuator 1) that can control the expansion and contraction of the actuator is configured.
[0143]
A rear sleeve 20 accommodates the upper main shaft 7 so as to be rotatable and movable in the axial direction. The rear sleeve 20 is also supported by the bearing 38 so as to be rotatable with respect to the intermediate housing 21.
[0144]
A bias spring 22 is mounted between the rear side yoke 17 and the rear side sleeve 20. Due to the axial load applied from the bias spring 22, the giant magnetostrictive rods 11 and 12 are held in such a manner that they are pressed against the upper and lower rear yokes 17 and the front sleeve 18 through the permanent magnets 14 to 16. . As a result, since the compressive stress is always applied to the giant magnetostrictive rods 11 and 12 in the axial direction, the drawback of the giant magnetostrictive element that is weak against tensile stress is eliminated when repeated stress is generated.
[0145]
The front sleeve 18 accommodates the main shaft 2 so as to be movable in the axial direction. The rotational power of the main shaft 2 transmitted from the motor 5 is transmitted to the front side sleeve 18 by a rotation transmission key 23 provided between the main shaft 2 and the front side sleeve 18. The front sleeve 18 is also rotatably supported by the housing 3 by a bearing 24.
[0146]
With the above configuration, the rotational power of the motor 5 is transmitted only to the main shaft 2 and the front side sleeve 18, and no twisting torque is generated in the giant magnetostrictive element that is a brittle material.
[0147]
Further, the giant magnetostrictive elements 11 and 12 and the permanent magnets 14 to 16 formed in a ring shape are arranged so as to penetrate the main shaft 2 of a nonmagnetic material. Moreover, the clearance gap between the outer peripheral part of the main axis | shaft 2, the said super magnetostrictive rod, and the inner peripheral part of the said permanent magnet is set small enough. As a result, the shafts of the giant magnetostrictive rod and the permanent magnet do not deviate greatly due to the influence of the centrifugal force applied to each member during the rotation of the apparatus.
[0148]
That is, the main shaft 2 provided through each member has both a “protective function” that gives only the compressive stress to the giant magnetostrictive element, which is a brittle material, and a “preventive function of axial misalignment” during rotation. ing.
[0149]
Reference numeral 25 denotes an encoder for detecting rotational position information of the upper main shaft 7 disposed on the upper portion of the motor 5 serving as the second actuator. Reference numeral 26 denotes a displacement sensor for detecting the axial displacement of the upper end surface 27 of the upper main shaft 7 (and the main shaft 2).
[0150]
With the above-described configuration, it is possible to realize a “two-degree-of-freedom / composite operation actuator” that can simultaneously and independently control the rotational motion and the linear motion of minute displacement. Further, in the second embodiment, since the giant magnetostrictive element is used for the first actuator, the power for linearly moving the giant magnetostrictive rods 11 and 12 (and the main shaft 2) can be applied from the outside without contact. it can.
[0151]
Since the input current applied to the giant magnetostrictive element and the displacement are proportional, the axial positioning control of the spindle 2 is possible even in open loop control without a displacement sensor. However, if the position detection means (mechanism or apparatus) as in the second embodiment is provided and feedback control is performed, the hysteresis characteristics of the giant magnetostrictive element can be improved, so that positioning with higher accuracy can be performed.
[0152]
In the second embodiment, the axial positioning function of the main shaft 2 can be used to arbitrarily control the size of the gap on the discharge side end surface of the main shaft 2 while maintaining the steady rotation state of the main shaft 2. . Using this function, it is possible to control the blocking / opening of the powder particles at the start and end in a mechanically non-contact state in any flow path section from the suction port 32 to the discharge nozzle 33. The principle will be described with reference to FIG. 7 which is a detailed view of the pump unit 4 and FIGS. 8 to 11 showing the relationship between the displacement of the piston and the generated pressure.
[0153]
In FIG. 7, 28 is a radial groove for pumping the fluid formed on the outer surface of the main shaft 2 to the discharge side (in FIG. 6, the groove portion is blacked out, whereas in FIG. 7, the groove portion is hatched. , 29 is a fluid seal, and 30 is a cylinder.
[0154]
A pump chamber 31 (fluid transport chamber) for obtaining a pumping action is formed between the main shaft 2 and the cylinder 30 by relative rotation of the main shaft 2 and the cylinder 30. Further, the cylinder 30 is formed with a suction hole 32 communicating with the pump chamber 31. Reference numeral 33 denotes a discharge nozzle attached to the lower end portion of the cylinder 30, and 34 denotes a discharge plate fastened to the discharge side end face of the cylinder 30. An opening 37 of the discharge nozzle 33 is formed in the central portion of the discharge side end surface 35 of the main shaft 2 and the opposed surface 36 of the discharge side end surface 35 of the main shaft 2. The radial groove 28 which is the fluid pressure feeding means (mechanism or apparatus) described in FIG. 4 is a known one known as a spiral groove dynamic pressure bearing, and is also used as a thread groove pump.
[0155]
Now, in the embodiment, by utilizing the fact that the main shaft 2 (hereinafter referred to as a piston) driven by the giant magnetostrictive element can perform a high-speed linear motion simultaneously with the rotation, the problem relating to the start and end of the coating wire can be solved by the following method. I planned.
[0156]
(1) At the start of application, the piston is rapidly lowered and simultaneously the motor starts to rotate.
[0157]
(2) At the end of coating, the piston is raised and the motor is stopped.
[0158]
In the second embodiment, since the piston is driven by the giant magnetostrictive element, the response of the output displacement to the input signal of the piston is on the order of 10-3 sec (1000 Herz). Since the time delay between the generation of the squeeze pressure with respect to the change in the gap is small, the responsiveness of the flow rate control is 1 to 2 digits higher than that in the first embodiment in which the rotation speed control is performed by the motor.
[0159]
FIG. 8 shows the displacement curve of the piston driven by the giant magnetostrictive element, and FIG. 9 shows the pumping pressure Pp of the thread groove generated when the rotational speed of the motor is raised from N = 0 rpm to N = 200 rpm. FIG. 10 shows the analysis result of the squeeze pressure Ps on the upstream side of the discharge nozzle, which is generated by raising and lowering the piston. FIG. 11 shows the pressure Pn (= Pp + Ps) obtained by combining the pumping pressure Pp and the squeeze pressure Ps of the thread groove. The squeeze pressure Ps is obtained by solving the Reynolds equation of the following equation (1) under the conditions shown in Table 1.
[0160]
[Expression 1]

In equation (1), P is the pressure, μ is the viscosity coefficient of the fluid, h is the gap between the opposed surfaces, r is the radial position, t is the time, U is the relative velocity in the x direction, and V is the relative velocity in the y direction. is there. The right side is a term that provides a squeeze action effect that occurs when the gap changes.
[0161]
(1) At the start of application
In the state before the start of coating, the rotation of the motor is stopped, and the piston is in the state of the gap with the facing surface: Xp = 40 μm. When the piston starts to rapidly drop to the gap: Xp = 40 → 30 μm at t = 0.02 seconds, the upstream pressure: Pn of the discharge nozzle suddenly rises. The reason is due to the squeeze action that occurs when the Reynolds equation of equation (1) is dh / dt <0. The squeeze action is a kind of dynamic pressure effect of a fluid bearing using a viscous fluid. Due to the generation of a steep peak pressure (overshoot) due to the squeeze effect, a large kinetic energy that overcomes the surface tension at the tip of the discharge nozzle is given to the fluid, so that application can be started without creating a fluid mass at the tip of the nozzle.
[0162]
In order to smoothly draw the coating line at the starting point, the overshoot pressure increases as the piston stroke increases and the rise time decreases. That is, the magnitude of the overshoot pressure may be set within a range where the surface tension of the fluid at the tip of the discharge nozzle is overcome and the coating line does not become “thick” at the start point.
[0163]
(2) During steady running
During 0.03 <t <0.07 seconds, the piston is applied with a continuous line by constant discharge with pumping pressure Pb due to rotation of the thread groove while maintaining a gap of Xp = 30 μm with the opposed surface. The Although there is fluid resistance between the piston and its opposing surface, the required flow rate can be discharged because the fluid resistance of the gap: Xp = 30 μm is sufficiently small.
[0164]
There is no squeeze pressure in this section. This is because the squeeze pressure is generated only when the gap h changes.
[0165]
(3) At the end of application
At t = 0.07 seconds, simultaneously with deceleration of the motor, when the piston starts to rise to the clearance: Xp = 30 → 40 μm, the upstream pressure Pn of the discharge nozzle suddenly drops as shown in FIG. . The reason for the sudden drop in pressure is that the gap between the thrust end face and the opposing face is still narrow enough even if the piston suddenly rises, and the fluid resistance in the centripetal direction is between the outer circumference and the center of the gap. Because there is. Due to this fluid resistance, the fluid is not easily replenished from the outer periphery, and the pressure drops. Theoretically, this is due to an effect that should be called a reverse squeeze action in which the dh / dt> 0 of the Reynolds equation (equation (1)).
[0166]
The reason for the large negative pressure is that the Reynolds equation does not consider the compressibility of the fluid. Actually, the fluid pressure does not become absolute pressure zero or less (Pn <0.0 MPa) due to generation of bubbles or the like.
[0167]
This steep negative pressure generation not only shuts off the fluid from the discharge nozzle, but also provides a suck back effect of sucking a small amount of fluid mass at the tip of the nozzle into the nozzle. After the negative pressure due to the squeeze pressure is generated, the rotation of the motor is stopped, so that there is no discharge due to the pumping pressure of the thread groove. Therefore, while the nozzle passes through the ineffective display area (U-turn section), the meniscus of the fluid inside the nozzle keeps the same position without forming a fluid mass at the nozzle tip. For this reason, the above-mentioned troubles such as dropping of the fluid block can be avoided.
[0168]
In the embodiment, the minimum gap between the piston and its opposing surface is set to Xmin = 20 μm. The particle diameter of the phosphor of the embodiment is φd = 7 to 9 μm and Xmin> φd. Therefore, the phosphor fine particles are not mechanically squeezed or damaged in the passage from the suction port to the discharge port.
[0169]
That is, the gap between the piston and the opposing surface is formed larger than the particle size of the particles contained in the discharge material when the paste is cut off. In the flow path from the suction port to the discharge nozzle, the minimum gap when the paste is cut off is preferably 8 μm or more.
[0170]
[Table 1]

[0171]
In the second embodiment, the overshoot pressure and suck back pressure for smoothly drawing the start point and end point of the coating line can be obtained by the axial movement of the piston. In the second embodiment, an arbitrary shape can be set for the piston displacement curve (an example is shown in FIG. 8). In addition, since the giant magnetostrictive element that drives the piston has high responsiveness, it can sufficiently follow even if the displacement curve changes sharply. That is, by controlling the displacement and speed of the giant magnetostrictive element, it is possible to control the discharge pressure and flow rate at the delicate start and end, which cannot be achieved by controlling the rotational speed of the motor.
[0172]
In the second embodiment, the problem of the start and end of the continuous coating line is solved by combining the axial displacement control of the giant magnetostrictive element and the rotation speed control of the motor, and the material from the discharge nozzle in the U-turn section. It is possible to maintain a complete shut-off state without any leakage for an arbitrary time. As shown in the first embodiment, the method of adding the correction term ΔN to the basic input waveform Ns of the motor rotation number may be combined with the method of the second embodiment.
[0173]
When the U-turn section can be set sufficiently short, the flow rate can be shut off at the end point and opened at the start point by driving only the piston while maintaining the rotation of the motor, as in the embodiment described later.
[0174]
In the second embodiment, the pump unit is configured by giving the piston both a function of axial movement and rotation by a two-degree-of-freedom actuator using a giant magnetostrictive element. Instead of this configuration, for example, a rotating shaft (outer peripheral piston) that does not move in the axial direction is formed into a cylindrical shape, a central shaft (inner peripheral piston) is inserted into this rotating shaft, the rotating shaft is driven by a motor, The shaft may be driven in the axial direction by an electrostrictive element or the like installed on the fixed side. In this case, by increasing or decreasing the gap between the discharge side end surface of the inner peripheral side piston and the opposing surface, the flow rate can be shut off at the end point and opened at the start point. In short, it is only necessary to increase or decrease the space of the fluid transport chamber. Further, if a thread groove is formed on the outer peripheral side piston and the fixed side relative movement surface that accommodates the outer peripheral side piston, the fluid pressure feeding means (mechanism or device) can be obtained as in the second embodiment.
[0175]
When there is an obstacle (for example, a wall) on the outer peripheral portion (63 in FIG. 2) of the PDP substrate 61 of the display panel, the entire length of the discharge nozzle 33 may be increased as long as the obstacle does not contact the main body of the dispenser. .
[0176]
Further, a thread groove pump which is a fluid pressure feeding means (mechanism or apparatus) is not always necessary for carrying out the present invention. The fluid may be supplied to the pump chamber 31 using a pressure source (pump or air pressure) installed outside. In this case, it is not necessary to form a thread groove in the piston. For example, if air pressure is used for the fluid pumping means (mechanism or device) and the U-turn section can be set sufficiently short, the flow rate cut-off and release control at the start and end points can be controlled by driving only the piston. Good.
[0177]
Hereinafter, a third embodiment of the present invention will be described with reference to FIGS. In the third embodiment, in the application process on the PDP substrate 61 of the display panel, the time until the application is restarted after the continuous spraying is stopped, that is, the dispenser travels in the non-display area (U-turn section). The time given is the reverse of the mass production constraint that only a very short time is allowed. In other words, by combining this micro dispenser (provisional name) having a “flow control means (mechanism or apparatus) effective only for a short finite time” with an external “fluid pressure source”, it is extremely simple. The configuration solves the problem of the start and end in the dispenser coating method described above.
[0178]
FIG. 12 is a front sectional view of a micro dispenser 200 applied to the third embodiment of the present invention. Reference numeral 201 denotes a direct-acting actuator, which includes an electrostrictive actuator such as a giant magnetostrictive element, an electrostatic actuator, or an electromagnetic solenoid. In the third embodiment, a giant magnetostrictive element that can obtain high positioning accuracy, has high responsiveness, and obtains a large generated load is used.
[0179]
202 is a piston driven by the first actuator 201, 203 is a fixed sleeve for storing the piston 2 at the discharge side end, 204 is a housing for storing the actuator 201, 205 is a lower part for fixing the fixed sleeve 203 on the discharge side It is a housing. Reference numeral 206 denotes a cylindrical super magnetostrictive rod made of a super magnetostrictive material. The super magnetostrictive rod 206 sandwiches the first and second bias permanent magnets 207 and 208 up and down, and connects the upper yoke 209 and the yoke material. It is fixed between the fixed sleeves 203 that also serve as the same. Reference numeral 210 denotes a magnetic field coil for applying a magnetic field in the longitudinal direction of the giant magnetostrictive rod 206, and 211 denotes a cylindrical yoke housed in the housing 204. The super magnetostrictive rod 206 → the first bias permanent magnet 207 → the upper yoke 209 → the yoke 211 → the fixed sleeve 203 → the second bias permanent magnet 208 → the super magnetostrictive rod 206 forms a closed loop magnetic circuit for controlling expansion and contraction of the super magnetostrictive rod 206. is doing. That is, the members 206 to 211 constitute the giant magnetostrictive actuator 1 that can control the amount of expansion and contraction in the axial direction of the giant magnetostrictive rod by the current applied to the magnetic field coil. The piston 202 is integrated with the cylindrical upper yoke 209 and extends upward, and is accommodated in the upper sleeve 212. The piston 202 is supported by the bearing portion 213 so as to be movable in the axial direction with respect to the upper sleeve 212. A bias spring 214 is provided between the upper sleeve 212 and the upper yoke 209 to apply a mechanical axial pressure to the giant magnetostrictive rod 206. A displacement sensor 215 that detects the position of the end surface of the piston 202 is disposed at the center of the upper end of the upper sleeve 212 so as to be adjustable. Reference numeral 216 denotes a piston small-diameter shaft which is a small diameter portion of the piston 202, 217 denotes a suction port formed in the lower housing 205, 218 denotes a nozzle portion, and 219 denotes a discharge nozzle formed in the nozzle portion 218. The pressurized fluid flowing from the suction port 217 flows into the fluid storage chamber 220 formed by the fixed sleeve 203 and the lower housing 205, and further flows into the discharge nozzle 219 through a fluid throttle portion 221 described later. A flow rate control unit 222 that controls the discharge flow rate is configured between the discharge-side end surface of the piston small-diameter shaft 216 and its opposing surface and the lower housing 205.
[0180]
FIG. 13 is an enlarged view of the vicinity of the flow rate control unit 222 described above. 223 is a discharge side end surface of the piston small diameter shaft 216 (piston 202), 224 is a discharge side end surface of the sleeve 203, and 225 is a facing surface of 223 and 224. It is. A fluid seal 226 is provided between the piston small diameter shaft 216 and the inner surface of the fixed sleeve 203. Reference numeral 228 denotes a liquid reservoir formed at the inlet of the discharge nozzle. The discharge side end surface 223 of the piston small diameter shaft 216 and its opposing surface 225 form a pump chamber 227 (fluid transport chamber) whose volume changes as the piston 202 moves up and down.
[0181]
Hereinafter, for the case where the fluid control unit 222 is configured under the conditions shown in Table 2 below, an analysis for determining the discharge flow rate was performed using the Reynolds equation (Equation (1)) described above.
[0182]
The analysis conditions are: fluid viscosity: μ = 10,000 cps, bulk modulus: K = 300 kg / cm ² , (29.5 MPa), boundary portion (outer peripheral portion of the fluid throttle portion 221) pressure: Ps = 20 kg / cm ² (2.06 MPa).
[0183]
[Table 2]

[0184]
FIG. 14 shows the analysis result of the discharge flow rate obtained under the above conditions.
[0185]
(1) At the start stage of analysis (t = 0), the initial value of the flow rate (pressure) is assumed to be an appropriate value, but quickly converges to a constant value. During 0 <t <0.03 seconds, continuous drawing is in progress.
[0186]
(2) When the piston starts to rise at t = 0.03 seconds, the discharge flow rate rapidly decreases, and the discharge is interrupted immediately with a fall time of about 0.003 sec (3 msec) from the start.
[0187]
(3) In the section of 0.03 <t <0.08 seconds, the discharge flow rate is zero. In this section, the piston is rising at a constant speed.
[0188]
From Table 2, the piston stroke: Xst = 50 μm and the piston operating time: Tp = 0.05 sec in the embodiment, the piston ascending speed: v = 50 μm / 0.05 sec = 1.0 mm / sec.
[0189]
(4) When the piston stops at t = 0.08 seconds, the state immediately returns to the continuous application state with a rise time of about 0.01 sec.
[0190]
From the above results, the flow rate control with extremely excellent responsiveness of the order of 0.01 second or less is achieved by the method of the embodiment in which the internal space of the discharge flow path is sharply increased by using an actuator having excellent responsiveness. You can see that
[0191]
However, the time when the discharge flow rate is zero is only while the piston is rising. This shielding time is determined by the limit stroke and the rising speed of the actuator.
[0192]
In the case of an actuator using a giant magnetostrictive element, a displacement of approximately 10 μm is obtained with a length of 10 mm. If a piezoelectric element is employed, the displacement is almost half that amount.
[0193]
Therefore, in the embodiment of FIG. 12, under the conditions shown in Table 2, for example, if the lot 206 of giant magnetostrictive elements having a length of 50 mm is used, the discharge amount can be turned OFF for Tp = 0.05 seconds.
[0194]
In the above analysis, the volume of the liquid reservoir 228 is set large, and the compressibility of the fluid in the liquid reservoir 228 is taken into consideration. However, if the fluid is nearly incompressible, the above-described rise and fall times are It can be reduced to a point close to the limit of the response of the actuator.
[0195]
Incidentally, in the case of an electrostrictive element such as a giant magnetostrictive element or a piezoelectric element, usually 10 ^―4 Responsiveness of the order of sec can be obtained.
[0196]
An actuator such as an electromagnetic solenoid can also be applied, and the responsiveness is deteriorated by an order of magnitude compared to the electromagnetic strain element, but the stroke restriction (that is, the allowable stop time) is greatly relaxed.
[0197]
In order to make it easy to understand the principle of the present invention intuitively, the flow control unit 222 in FIG. 13 is replaced with an electric circuit model as shown in FIG.
[0198]
In FIG. 15, Ps is the boundary pressure of the fluid restrictor 221 and R ₀ Is the fluid resistance of the fluid restrictor 221, Rn is the fluid resistance of the discharge nozzle 19, Qp is the size of the flow rate source determined by the rising speed and piston area of the piston small diameter shaft 216, and Qn is the flow rate passing through the discharge nozzle 219 .
[0199]
Here, the flow rate Qn passing through the discharge nozzle 219 is:
[0200]
[Expression 2]

[0201]
When Qn <0, that is, under the following conditions, the discharge is shut off.
[0202]
[Equation 3]

[0203]
From the above equation (3), in order to enable the flow rate control, the fluid restrictor 221 is provided, and the fluid restrictor R equal to or greater than a certain value is provided. ₀ It is clear that having is a necessary condition. The portion corresponding to the fluid restricting portion (the portion where the flow path area is restricted as compared with other passages) may be provided in any of the passages from the fluid supply source to the flow rate control portion.
[0204]
When the gap Xmin with the facing surface at the lowest point of the piston is set to be sufficiently small, the fluid resistance Rs is set to the fluid resistance by the radial fluid resistance Rs between the discharge side end surface 224 of the piston and the facing surface 225. R ₀ Can be replaced. In this case, the fixing sleeve 203 can be omitted. However, the fluid resistance Rs has an effective value only when the gap between the piston and its opposing surface is sufficiently small. Equation (3), which is the condition for shutting off the flow rate when the piston is raised high, is maintained. It ’s gone. As a result, the time during which the shut-off state can be maintained is reduced.
[0205]
In the third embodiment, a dispenser having a “flow rate control means (mechanism or apparatus) effective only for a short finite time” and a “fluid pressure source” installed outside are combined into a drawing line. We are trying to solve the problem of the beginning and end of. In order to draw thousands to thousands of screen stripes on the display panel with high production efficiency, it is preferable that the number of dispensers that can be arranged in the coating apparatus is as large as possible. In the case of the third embodiment, since the dispenser can have a small diameter and a simple configuration, it is easy to make a multi-head as shown in FIG.
[0206]
In FIG. 16, 250 is a micro dispenser having “a flow control means (mechanism or apparatus) effective only for a short finite time”, 251 is a master pump which is “a source of fluid pressure”, and 252 is a glass substrate. As shown in FIG. 25, the master pump 251 has a flow supply capability and a generated pressure for simultaneously drawing a plurality of stripe-shaped coating lines on a plurality of micro dispensers arranged at an equal pitch. is necessary.
[0207]
Here, FIG. 25 shows an example in which a plurality of phosphor paste layers are simultaneously discharged and formed on the PDP substrate 61 by the multi-head pattern forming apparatus of FIG. 25, the preparation position a, the application start position b, the application end position c, the bending position d, the bending position e, the application start position f, and the application end position g of the dispenser 55 shown in FIG.・ Preparation position a for the dispenser ₁ Application start position b ₁ Application end position c ₁ , Bending position d ₁ , Bending position e ₁ Application start position f ₁ For the second micro dispenser, the preparation position a ₂ Application start position b ₂ Application end position c ₂ , Bending position d ₂ , Bending position e ₂ Application start position f ₂ For the third micro-dispenser, preparation position a ₃ Application start position b ₃ Application end position c ₃ , Bending position d ₃ , Bending position e ₃ Application start position f ₃ Corresponds. Then, these three coating lines are simultaneously ejected and coated by the three micro dispensers moving in synchronization.
[0208]
In addition, as shown in FIG. 16, the master pump 251 is not limited to one arranged for a large number of micro dispensers, but is grouped into an arbitrary number of micro dispensers, and one for each group. One piece may be arranged, or one piece may be arranged for one micro dispenser.
[0209]
In the third embodiment, a thread groove pump having the same structure as that of the first embodiment (see FIG. 3) is used as the master pump 251. In the case of a thread groove pump, (1) the granular material (phosphor material) can be transported from the suction port to the discharge port in a mechanical non-contact state, (2) the flow rate can be changed by the rotational speed, (3) (4) It has characteristics such that a constant flow rate characteristic can be obtained, and (4) low viscosity can be achieved by applying a shearing force by rotation to a phosphor material having poor fluidity.
[0210]
As the master pump, a gear pump, a trochoid pump, a mono pump, etc. can be applied to the present invention in addition to the thread groove pump. Further, if the phosphor material is supplied to the micro dispenser with air pressure using an air source installed outside instead of the pump, the entire coating apparatus is greatly simplified.
[0211]
Even in the case of the dispenser of the second embodiment having the “two-degree-of-freedom actuator” of the rotary motion and the linear motion, if the stroke of the actuator that gives the linear motion can be made sufficiently large, the U-turn section is the same as the present embodiment. The flow rate can be controlled. That is, by controlling only the linear motion of the piston while maintaining the rotation of the motor, it is possible to control the discharge blocking / opening of the phosphor paste in the effective display area and the ineffective display area. That is, while maintaining the rotation state of the motor,
(1) At the start of application, the piston is lowered.
[0212]
(2) At the end of application, the piston is raised.
[0213]
In this case, a condition for enabling flow rate control, a fluid resistance R having a fluid constriction portion and a fluid constriction portion greater than a certain value. ₀ In order to satisfy the condition of having, the internal resistance of the thread groove pump itself may be used in addition to the thrust resistance between the piston and its opposing surface. The more the thread groove pump has a constant flow rate characteristic and the smaller the flow rate, the longer the discharge cut-off state can be maintained.
[0214]
Hereinafter, a fourth embodiment of the present invention will be described with reference to FIGS. In the fourth embodiment, the application start and end points are further improved by providing a function in which both the piston and the sleeve accommodating the piston in the third embodiment can move in the axial direction. In contrast to the “single piston system” in the third embodiment, the dispenser of the fourth embodiment is hereinafter referred to as “double piston system”.
[0215]
In FIG. 17, 501 is an upper actuator, 502 is a lower actuator, 503 is a movable sleeve fixed to the free end side of the lower actuator, 504 is a piston fixed to the free end side 505 of the upper actuator, and 506 is this piston. It is a narrow diameter part. Reference numeral 507 denotes an upper housing for accommodating the actuators 501 and 502, and reference numeral 508 denotes a fixing portion for each piezoelectric element constituting the actuators 501 and 502. Reference numeral 509 denotes a lower housing, which is fastened to the upper housing 507. 510 is a contact-type seal portion mounted between the movable sleeve 503 and the lower housing 509, and 511 is a suction port.
[0216]
512 is a bias spring for applying an axial bias load to the lower actuator 502, and is mounted between the movable sleeve 503 and the lower housing 507. Reference numeral 513 denotes a lower plate fixed to the lower housing 509, and reference numeral 514 denotes an opening portion of a discharge port formed in a central portion of the lower plate and located on a surface facing the end surface 515 of the piston small diameter portion 506. Reference numeral 516 denotes a discharge nozzle fastened to the lower plate 513. Reference numeral 517 denotes a fluid storage unit that utilizes a space formed by the movable sleeve 503 and the lower housing 509, and is connected to an external fluid supply source (not shown) via an inlet 511. Reference numeral 518 denotes a pump chamber (fluid transport chamber) which is a space formed by the movable sleeve 503, the piston small diameter portion 506, and the lower plate 513.
[0217]
Reference numeral 519 denotes an upper end of the piston 504, which is a piston displacement sensor fixed to the upper plate 520, and detects the absolute position of the piston 504 with respect to the fixed side. Reference numeral 521 denotes a stator portion of a differential transformer type displacement sensor fixed to the inner surface of the upper housing 507, and 522 denotes a rotor portion fixed to the movable sleeve 503 side. The differential transformer is used in an electric micrometer or the like, and detects the position of the movable sleeve 503 in the axial direction. Reference numeral 523 denotes a bias spring for applying an axial bias load to the upper actuator 501 (piezoelectric element), and is mounted between the piston 504 and the upper plate 520.
[0218]
In the fourth embodiment, the axial position of the movable sleeve 503 can be accurately detected by a displacement sensor using a differential transformer. Therefore, it is possible to control the timings of the two actuators 501 and 502 appropriately, and to precisely control the displacement and speed of both actuators.
[0219]
Further, as shown in the fourth embodiment, the cylindrical housings 507 and 509 are thinned by using a displacement sensor composed of a hollow detection rotor 522 and a detection stator 521 for detecting the position of the movable sleeve. The entire dispenser can be constructed with the diameter unchanged.
[0220]
In the fourth embodiment, the two actuators, the two sensors, the piston, and the discharge nozzle are all arranged symmetrically in the axial direction. For example, as is well known, giant magnetostrictive elements and piezoelectric elements can be downsized by several millimeters or less in outer diameter.
[0221]
Therefore, if the above-described fourth embodiment which is a “double piston system” is used, a multi-head dispenser combined with a master pump can be easily realized as in the third embodiment.
[0222]
FIG. 18A shows an example of piston displacement Xp and movable sleeve Xs with respect to time t of the valve to which the fourth embodiment of the present invention is applied. FIG. 18B shows a model diagram of the valve, 550 is a piston, 551 is a movable sleeve, 552 is a pump chamber (fluid transport chamber), and 553 is a discharge nozzle.
[0223]
FIG. 19 shows the “pressure Pn characteristics on the upstream side of the discharge nozzle with respect to time” of a valve to which the fourth embodiment of the present invention is applied, in comparison with a conventional valve. Here, the conventional valve refers to a dispenser that opens and closes the discharge port by providing a needle valve at the inlet portion of the discharge nozzle and moving the spool constituting the needle valve in the axial direction. That is, (1) a structure in which the gap between the piston end faces is increased when fluid discharge is released, and (2) the gap between the piston end faces is reduced when discharge is cut off. Therefore, the operations (1) and (2) of the piston are reversed compared to the third embodiment (single piston system).
[0224]
When a conventional valve is used to increase the gap X between a piston (not shown) and its opposing surface to release fluid, the discharge nozzle is increased by increasing the volume of a pump chamber (not shown) that is a fluid transport chamber. The pressure P on the upstream side (pump chamber) greatly drops as shown in FIG. The generation of the negative pressure upstream of the discharge nozzle causes factors such as “a line cannot be drawn at the drawing start point” or “the drawing line is thin”.
[0225]
Further, when the gap X is reduced in order to shut off the fluid, the pressure P on the upstream side of the discharge nozzle greatly increases. This high pressure generation is due to the fluid pressure dynamic effect of the fluid bearing called fluid compression or squeeze action. This generation of high pressure acts in a disadvantageous direction and causes “liquid pooling” at the end of drawing.
[0226]
Now, using the valve to which the fourth embodiment of the present invention is applied, as shown in FIG. 18A, the piston 550 and the movable sleeve 551 are driven in opposite phases.
[0227]
At this time, since the axial movement of the piston 550 and the movable sleeve 551 is in an opposite phase, the change in volume of the pump chamber is cancelled. As a result, as shown in FIG. 19B, a negative pressure is generated at the start of drawing and a high pressure is generated at the end as shown in FIG. Thus, troubles such as “thinning of drawing lines” and “occurrence of liquid pool” are eliminated.
[0228]
Even when the displacement Xp of the piston 550 is at the lowest point position Xp = Xpmin, if Xpmin is set sufficiently large, the influence of the presence of the piston 550 on the channel resistance (that is, the flow rate) can be reduced. .
[0229]
The drivers for driving the first and second actuators may be provided independently, or each actuator may be driven in the opposite phase by one unit.
[0230]
Even in the case of a valve in which the shape of the discharge side end surface of the piston or the movable sleeve and the opposed surface thereof are not flat, the problems of the conventional valve and the effects of the application of the fourth embodiment of the present invention are the same. For example, the present invention can be applied even if the valve is configured with a sharp convex surface at the tip of the piston and a concave surface as the opposite surface. In this case, the fluid is blocked by bringing the convex surface of the piston close to the concave surface of the opposing surface (fixed side). Therefore, unlike the fourth embodiment of FIG. 17, when the movable sleeve is raised and the piston is lowered, the fluid is blocked, and in the opposite case, the fluid is released.
[0231]
In this case, Xsmin may be set to be sufficiently large even when the displacement Xs of the movable sleeve is Xs = Xsmin at the lowest point position.
[0232]
In any case, in order to draw an optimum drawing line, the displacement curve of the piston and the movable sleeve may be finely adjusted according to the process to be applied and the characteristics of the coating material.
[0233]
Compared with the “single piston system” in the third embodiment, the advantages of the above-described fourth embodiment that is the “double piston system” are as follows.
[0234]
At the time of application opening and at the time of steady application, the sleeve 551 can be greatly raised simultaneously with the lowering of the piston 550. A gap between the sleeve 551 and the opposite surface: Xs can be made sufficiently large, so that a large fluid resistance R is generated in the flow path from the suction port to the discharge nozzle. ₀ It is not necessary to provide {(3)}, and a sufficient discharge flow rate can be secured.
[0235]
In addition, when the application is cut off, the gap XS between the sleeve 551 and the facing surface can be made sufficiently small, so that the pump chamber 552 is sealed off from the outside. By raising the piston 550 in this sealed state, the pressure in the pump chamber 552 can be rapidly lowered, so that the discharge can be cut off with higher response.
[0236]
In the dispenser of the fourth embodiment, since the displacement curve of the piston and the sleeve can be set arbitrarily, the overshoot pressure at the start point and the suck back pressure at the end point can be freely set according to the required process conditions. The displacement curve of the piston and sleeve need not be completely antiphase.
[0237]
Further, if a structure is used in which the sleeve is rotated as in the second embodiment using a giant magnetostrictive element, a configuration capable of permanently blocking discharge by a dynamic pressure seal is also possible.
[0238]
Hereinafter, the dispenser which applied this invention to the fluorescent substance layer forming method and forming apparatus as 5th Embodiment is demonstrated using FIGS.
[0239]
The dispenser of the fifth embodiment described below is the same as that of the second embodiment in that a two-degree-of-freedom actuator that simultaneously gives a rotational motion and a linear motion to the piston is used. In the fifth embodiment, the wedge effect by the thrust dynamic pressure seal is used instead of the squeeze effect shown in the second to fourth embodiments in the fluid blocking method. That is,
(1) Cut off the fluid by forming a thrust dynamic pressure seal between the discharge end surface of the piston and its relative movement surface, and linearly driving the piston with the first actuator to adjust the gap between the piston end surfaces. -Control the opening.
[0240]
{Circle around (2)} A second actuator that imparts a rotational motion rotates a piston having a thread groove to generate a pumping pressure that pumps the application fluid to the discharge side.
[0241]
The above (1) and (2) are realized simultaneously.
[0242]
In FIG. 20, reference numeral 101 denotes a first actuator, which uses a giant magnetostrictive element as in the second embodiment. Reference numeral 102 denotes a main shaft (piston) driven by the first actuator 101. The first actuator is housed in the lower housing 103, and a pump unit 104 that houses the main shaft 102 is attached to the lower end (front side) of the lower housing 103.
[0243]
Reference numeral 105 denotes a second actuator, which gives a relative rotational movement between the main shaft 102 and the housing 103. The motor rotor 106 is fixed to the upper main shaft 107, and the motor stator 108 is accommodated in the upper housing 109.
[0244]
Reference numerals 111 and 112 denote cylindrical rear-side giant magnetostrictive rods and front-side giant magnetostrictive rods composed of giant magnetostrictive elements. Reference numeral 113 denotes a magnetic field coil for applying a magnetic field in the longitudinal direction of the giant magnetostrictive rods 11 and 12. Reference numerals 114, 115, and 116 denote rear, middle, and front permanent magnets for applying a bias magnetic field to the giant magnetostrictive rods 111 and 112. Rear-side and front-side permanent magnets 114 and 116 are arranged so as to sandwich the giant magnetostrictive rods 111 and 112 and the intermediate permanent magnet 115.
[0245]
117 is arranged on the rear side of the giant magnetostrictive rod 111, the yoke on the magnetic circuit is the rear side yoke, 118 is arranged on the front side of the giant magnetostrictive rod 112, and the front side sleeve also serves as the yoke material, 119 is the magnetic field This is a cylindrical yoke material disposed on the outer periphery of the coil 113.
[0246]
That is, the giant magnetostrictive rods 111 and 112, the magnetic field coil 113, the permanent magnets 114 to 116, the rear side yoke 117, the front side sleeve 118, and the yoke material 119 are used to control the expansion and contraction of the giant magnetostrictive rod in the axial direction by the current applied to the magnetic field coil. A possible giant magnetostrictive actuator (first actuator 101) is configured.
[0247]
A rear sleeve 120 accommodates the upper main shaft 7 so as to be rotatable and movable in the axial direction. The rear sleeve 120 is also rotatably supported with respect to the intermediate housing 121 by a bearing 139.
[0248]
Reference numeral 122 denotes a bias spring mounted between the rear yoke 117 and the rear sleeve 120. Due to the axial load applied from the bias spring 122, the giant magnetostrictive rods 111 and 112 are held in such a manner that they are pressed against the upper and lower rear yokes 117 and the front sleeve 118 through the bias permanent magnets 114 to 116. . The front sleeve 118 accommodates the main shaft 2 so as to be movable in the axial direction. The rotational power of the main shaft 102 transmitted from the motor 105 is transmitted to the front side sleeve 118 by a rotation transmission key 123 provided between the main shaft 102 and the front side sleeve 118. Further, the front sleeve 118 is also rotatably supported by the housing 103 by a bearing 124.
[0249]
125 is an encoder for detecting rotational position information of the upper main shaft 107, and 126 is a displacement sensor for detecting the axial displacement of the upper end surface 127 of the upper main shaft 107 (and the main shaft 102).
[0250]
With the above configuration, as in the second embodiment, a “two-degree-of-freedom combined operation actuator” can be realized in which the main shaft 102 of the apparatus can simultaneously and independently control the rotational movement and the linear movement of the minute displacement. .
[0251]
In the fifth embodiment, the axial positioning function of the main shaft 102 can be used to arbitrarily control the size of the gap on the discharge side end surface of the main shaft 102 while maintaining the steady rotation state of the main shaft 102. . By using this function, it is possible to control the blocking / opening of the granular material at the start / end in a state where any flow path section from the suction port 132 to the discharge nozzle 133 is not mechanically in contact.
[0252]
That is, when the discharge nozzle 133 of the dispenser and the substrate travel relatively in the effective display area 60a [see FIG. 2], the main shaft 102 is in the raised position, and the gap on the discharge side end surface is sufficiently large, and the phosphor Paste discharge is open. Further, the main shaft 102 starts to descend immediately before the discharge nozzle 133 and the substrate relatively start to travel in the ineffective display area 60b [see FIG. 2]. As a result, the function of the thrust dynamic pressure seal works quickly, and the discharge of the phosphor paste is blocked.
[0253]
Hereinafter, the principle of the thrust dynamic pressure seal will be described with reference to FIG. 21 which is a detailed view of the pump unit 104 and FIGS. 22A to 22C showing the relationship between the displacement of the dynamic pressure seal and the generated pressure.
[0254]
Reference numeral 128 denotes a radial groove for pumping the fluid formed on the outer surface of the main shaft 102 to the discharge side (in FIG. 20, the groove portion is blacked out, while in FIG. 21, the groove portion is hatched). 129 is a fluid seal and 130 is a cylinder.
[0255]
A pump chamber 131 for obtaining a pumping action is formed between the main shaft 102 and the cylinder 130 by relative rotation of the main shaft 102 and the cylinder 130. Further, the cylinder 130 is formed with a suction hole 132 communicating with the pump chamber 131. Reference numeral 133 denotes a discharge nozzle attached to the lower end of the cylinder 130, and 134 denotes a discharge plate fastened to the discharge side end face of the cylinder 130. Reference numeral 135 denotes a thrust plate fastened to the discharge side end surface of the main shaft 102. An opening 138 of the discharge nozzle 133 is formed at the center of the opposing surface 137 of the discharge-side end surface 136 of the main shaft 102.
[0256]
Further, a groove 139 of the discharge side end surface 136 thrust dynamic pressure seal of the thrust plate 135 (the groove portion is blacked out in FIG. 22B) is formed.
[0257]
The sealing thrust groove 139 is a known one known as a thrust dynamic pressure bearing.
[0258]
The seal pressure Ps that can be generated by the thrust bearing is given by the following equation.
[0259]
[Expression 4]

[0260]
In equation (4), ω is the rotational angular velocity, r ₀ Is the outer radius of the thrust bearing, r _i Is a function determined by the inner radius of the thrust bearing, f is the groove depth, groove angle, groove width and ridge width.
[0261]
Curve (I) in the graph of FIG. 22C shows the seal pressure P with respect to the gap δ when the spiral groove type thrust groove is used under the conditions shown in Table 3 below. _S This shows the characteristics. Curve (II) in the graph of FIG. 22C is an example showing the relationship between the radial groove pumping pressure and the shaft tip gap δ when there is no axial flow. The pumping pressure of the radial groove can be selected in a wide range by selecting the radial gap, the groove depth, and the groove angle, like the thrust groove. However, qualitatively, the radial groove pumping pressure Pr does not depend on the size of the gap at the tip of the shaft (that is, the size of the gap δ).
[0262]
When the gap δ of the sealing thrust groove is sufficiently large, for example, when the gap δ = 15 μm, the generated pressure is P = 0.06 kg / mm. ² (0.69 MPa).
[0263]
While the shaft is rotated, the end surface of the main shaft 102 is brought close to the opposing surface on the fixed side. When the gap δ <10.0 μm, the seal pressure becomes larger than the radial groove pumping pressure Pr, and the outflow of fluid to the discharge port side is blocked.
[0264]
FIG. 21 shows a state where the outflow of fluid is blocked, and the fluid in the vicinity of the opening 138 of the discharge nozzle is subjected to a centrifugal pumping action [see the arrow in FIG. 21] by the thrust groove 139. The vicinity of 138 is a negative pressure (below atmospheric pressure). Due to this effect, the fluid remaining inside the discharge nozzle 133 after being shut off is again sucked into the pump. As a result, there is no fluid soul due to surface tension at the tip of the discharge nozzle, and stringing and drooping are eliminated.
[0265]
By the way, in the said 5th Embodiment of this invention, ON / OFF of the discharge state of a fluid can be freely controlled by moving a rotating shaft about 10 to several tens of micrometers in an axial direction.
[0266]
To summarize the points of the above embodiment of the present invention, the sealing pressure by the thrust groove increases rapidly as the gap δ decreases, whereas the pumping pressure of the radial groove is extremely insensitive to changes in the gap δ. The point that there is.
[0267]
Note that both the radial groove and the thrust groove may be formed on either the rotating side or the fixed side.
[0268]
Further, when applying a powder or a granular material such as an electrode material containing fine particles, the minimum value δmin of the gap δ may be set larger than the fine particle diameter φd.
[0269]
[Equation 5]
δmin> φd (5)
[0270]
In order to obtain a larger gap with respect to the same generated pressure, the rotational speed is increased, or the outer diameter of the thrust plate 135 is increased and appropriate values are selected for the groove depth, groove angle, and the like.
[0271]
[Table 3]

[0272]
In the fifth embodiment, the thread groove pump is used as a pressure source for supplying the phosphor paste to the discharge portion where the thrust dynamic pressure seal is formed. Instead of this thread groove pump, an externally installed pump may be used as a pressure source for the applied fluid. Alternatively, the air pressure provided in the factory may be used. In short, the supply pressure of the pressure source may be set below the maximum seal pressure that can generate a thrust dynamic pressure seal.
[0273]
Hereinafter, although it is also with the said 1st-5th embodiment, when discharging a highly viscous fluid, generation | occurrence | production of a very large fluid pressure is anticipated for both a pumping pressure and a squeeze pressure. In this case, since the first actuator that drives the piston is required to have a large thrust against a high fluid pressure, it is effective to apply an electromagnetic strain actuator that can easily generate a force of several hundred to several thousand N. is there. Since the magnetostrictive element has a frequency response of several MHz or more, the main axis can be linearly moved with high response. Therefore, the discharge amount of the high-viscosity fluid can be controlled with high response and high accuracy.
[0274]
Also, when a giant magnetostrictive element is used for the axial drive means (mechanism or apparatus), the conductive brush can be omitted compared to the case where a piezoelectric element is used, so the load on the motor (rotating means (mechanism or apparatus)) is reduced. In addition, since the overall configuration is extremely simple, the moment of inertia of the movable part can be minimized and the diameter of the dispenser can be reduced.
[0275]
As described above, the embodiment in which the phosphor is applied to the back plate as the PDP substrate has been described. However, the present invention can be applied to another embodiment, for example, the electrode formation of the surface plate as the PDP substrate. it can.
[0276]
FIG. 26 shows another example of the surface plate for PDP. 700 is an “effective display area” (bus electrode portion) corresponding to the effective display portion of the PDP, and the back plate on which the phosphor is applied is described above. The effective display area 60a (see FIG. 2) is an area integrated with the front and back. Reference numerals 701A and 701B denote terminal portions, which are referred to as “semi-effective display areas”. The effective display area 700, the terminal portion 701A, and the terminal portion 701B constitute a PDP surface plate 702 made of a glass substrate. Reference numeral 703 denotes a tab joint.
[0277]
Reference numeral 704 denotes a virtual area for paste application provided on both sides (the left and right sides in FIG. 26) outside the surface plate 702, and is referred to as an “ineffective display area”.
[0278]
For example, an electrode line 705 as an example of an electrode layer having a left end portion of the surface plate as a start point position (application start position) A (or an end point position (application end position)) is applied in the semi-effective display area 701A and applied. The tab joint 703 from the start position A to the bending position B, the inclined portion from the bending position B to the bending position C in the semi-effective display area 701A, and the effective display from the bending position C in the semi-effective display area 701A The effective display boundary vicinity to the boundary position D, the effective display straight line portion from the effective display boundary position D to the effective display boundary position E in the effective display area 700, and the effective display boundary position in the semi-effective display area 701A And an end vicinity straight line portion from E to the application end position F. Accordingly, the electrode line 705 passes through the semi-effective display area 701A and enters the effective display area 700 at the effective display boundary position D. Furthermore, the electrode line 705 that has passed through the effective display area 700 enters the quasi-effective display area 701B on the right side at the effective display boundary position E, and stops immediately after that at the application end position F. That is, the application end position F in the semi-effective display area 701B is the end point position (application end position) (or start point position (application start position)) of the electrode line 705. The other electrode lines 708, 709, and 707 have the same configuration. Further, the other electrode lines 706, 711, and 710 as an example of the electrode layer have the application start position at the right end of the surface plate (the application position) The basic configuration is the same except that the start position is G and the left and right are reversed. Accordingly, the inclined portions of the electrode lines 706, 711, and 710 have the same inclination angle, and the inclined portions of the electrode lines 705, 708, 709, and 707 have the same inclination angle.
[0279]
The electrode line 706 adjacent to the electrode line 705 is formed so that the start point position and the end point position are opposite to the electrode line 705 in the left-right direction. The electrode line 707 adjacent to the electrode line 706 is formed so that the position of the start point position and the end point position with respect to the electrode line 706 is reversed left and right. Thus, in the PDP of the embodiment, the electrode lines having the stop positions in the left and right quasi-effective display areas are formed so as to be alternately switched.
[0280]
First, a specific example (I) of the coating method will be described. In this embodiment for the purpose of forming electrodes on the surface plate of the PDP, the same method as in the second embodiment described above is applied. That is, using a dispenser having a “two-degree-of-freedom actuator”,
(1) Positive and negative squeeze pressure is generated on the discharge side end face of the piston by linearly driving the piston with the first actuator.
[0281]
{Circle around (2)} A second actuator that imparts a rotational motion rotates a piston having a thread groove to generate a pumping pressure, and pumps the application fluid to the discharge side.
[0282]
By the combination of (1) and (2) above,
(1) Continuous line application in the effective display area;
(2) Control of blocking / opening of the coating line at the boundary between the effective display area and the non-effective display area;
(3) Control of coating line blocking / opening within the semi-effective display area;
Is realized.
[0283]
Hereinafter, the case where silver paste which is an electrode material is applied will be described by paying attention to the electrode wire 705.
[0284]
(I) At the start of application
In the state before the start of application, the tip of the discharge nozzle 33 (see FIG. 6 of the second embodiment) is in the area of the semi-effective display area 701A. At this time, the rotation of the motor is stopped and the piston (main shaft 2) is in the raised position. The dispenser starts running downward from the coating start position A ′ of the electrode line 707 in the semi-effective display area 704 in FIG. 26, and then rotates the motor at the timing immediately before passing the coating start position A, and simultaneously moves the piston. Lower. As described above, in order to smoothly draw the coating line at the coating start position A, the overshoot pressure increases as the piston stroke increases and the rise time decreases. That is, the magnitude of this overshoot pressure may be set within a range where the surface tension of the fluid at the tip of the discharge nozzle is overcome and the coating line does not become “thick” at the coating start position A.
[0285]
(Ii) Driving in the semi-effective display area
The piston applies a continuous line from the application start position A to the effective display boundary position D through the bending position B and the bending position C by constant discharge by the pumping pressure of the thread groove while keeping the gap with the opposing surface constant. To do. There is no squeeze pressure in this section. In the embodiment, the line width of the electrode line 705 in the semi-effective display area 701A is, for example, b ₂ = 0.1 mm, line width in effective display area 700: b ₁ = Greater than 0.075 mm. Therefore, when the discharge nozzle travels in the quasi-effective display areas 701A and 701B, it is applied in a state in which the number of rotations of the thread groove is increased as compared to when traveling in the effective display area 700.
[0286]
(Iii) Driving within the effective display area
In the section from the effective display boundary position D to the effective display boundary position E, the piston has a line width: b while maintaining a constant gap with the facing surface. ₁ = Coating is performed in a state where the rotational speed of the thread groove is lower than the above (ii) so as to keep 0.075 mm.
[0287]
(Iv) Running and blocking in the semi-effective display area
The coating conditions up to the coating end position F after passing through the effective display boundary position E are the same as (ii) above. At the timing immediately before reaching the application end position F, the motor is stopped and at the same time the piston is rapidly raised. At this time, h is the gap between the opposing surfaces, t is the time, and the discharge is interrupted instantaneously due to the negative pressure generation effect when (dh / dt)> 0. Thereafter, the tip of the discharge nozzle immediately shifts from the position of the application end position F to the right end position G ′ of the semi-effective display area 704 at the shortest distance while the discharge is cut off, and the application is performed with the position G as the start position. Start.
[0288]
Thereafter, continuous lines are repeatedly applied in the same manner as in the above (i) to (iv).
[0289]
By the method described above, it is possible to reduce loss of time for relatively running the discharge nozzle 33 and the XY stage for positioning and holding the surface plate as much as possible, and efficient coating can be performed.
[0290]
In the process (iv), the piston is raised in the semi-effective display areas 701A and 701B to block the discharge. By this method, the application end position F of the drawing line can be determined at a reliable timing with extremely high quality. Can be formed. That is, the “thickness” or “reservation” of the drawing line at the application end position F does not occur. If “fat” or “retention” occurs greatly, the electrical characteristics between adjacent electrode lines are seriously affected. Although there is also a method of drawing a drawing line with the end position F as the start point position, the optimal overshoot pressure setting method is slightly more delicate than in the case of the end control. For setting the line width in the effective display area 700 and the line widths in the semi-effective display areas 701A and 701B, the relative speed between the discharge nozzle and the stage may be adjusted in addition to the number of rotations of the thread groove.
[0291]
Next, as a specific example (II) of the coating method, a case where electrode wires are coated with a multi-head will be described. As a multi-head system, for example, a configuration as shown in FIG. 16 by a combination of one master pump and a plurality of micro pumps may be used.
[0292]
In the quasi-effective display area 701A and 701B, since the inclination angles of the electrode lines are different, it is difficult to apply a plurality of electrode lines in the quasi-effective display area at the same time with a multi-head arranged at a parallel pitch. is there. For this purpose, coating was performed by the following method.
[0293]
First, when drawing the electrode line 705 as step S1, the coating passes through the effective display area 700 with the position C in the quasi-effective display area 701A as the starting point, and the application is terminated at the position F in the quasi-effective display area 701B. At the same time, other electrode lines (for example, 707) having the same pattern are also applied at the position F ′ with the head arranged at the parallel pitch, starting at the position C ′. After running the entire multihead from the left side to the right side, the next step is to apply the entire head from the right side to the left side. By repeating this operation, the application of electrode lines composed of a plurality of parallel lines is completed.
[0294]
Next, it progresses to application | coating of step S2. In the semi-effective display areas 701A and 701B, the following method is used when drawing each electrode line having a different inclination angle with a multi-head. In the semi-effective display areas 701A and 701B, a group of electrode lines composed of electrode lines having different inclination angles is represented by AA. ₁ ~ AA _n (See FIG. 26, where n is the total number of groups), a plurality of groups are formed on the surface plate of the PDP. Therefore, a plurality of groups AA ₁ ~ AA _n An electrode line having the same inclination angle is selected from the above, and it is set as a group BB. The group BB is, for example, electrode lines 705, 708, and 709. Each electrode line of the group BB can be applied simultaneously if the nozzle and the XY stage holding the surface plate of the PDP are relatively moved in the XY direction.
[0295]
As described above, the process of drawing electrode lines of a plurality of parallel lines in the effective display area using the multi-head (step S1) and the process of drawing electrode lines of the same inclination angle in the quasi-effective display area (step S2) are separated. The case where it performs is explained.
[0296]
The application of a plurality of electrode lines within the effective display area (step S1) is more advantageous in terms of production tact as the number of heads increases because the length of the electrode lines is longer.
[0297]
In the application of the electrode lines in the quasi-effective display area (step S2), only the heads (n = 3 in FIG. 26) at appropriate positions are selected from the multi-heads and used for the application. In this case, compared with step S1, the number of times of application is increased, but the electrode lines in the quasi-effective display area are short, so that the tact time is not delayed so much. In the coating method in the quasi-effective display area, high-quality coating is required for both the “start end” and “end” of the coating line. If the multi-head is composed of a combination of one master pump and a plurality of micro pumps, and the “double piston system” described in the fourth embodiment is used for this micro pump, both the start and end of the drawing line will be Can be drawn with high quality.
[0298]
Furthermore, as a specific example (III) of the coating method, a case will be described in which electrode lines in the effective display area 700 and the semi-effective display areas 701A and 701B are drawn at a stroke with a multi-head. In this case, for example, the drawing line may be controlled only by the “end”, and the number of heads of the multi-head is the group AA. ₁ ~ AA _n (N = 3 in FIG. 26) is sufficient. As a multi-head system configuration, for example, a configuration as shown in FIG. 16 by a combination of one master pump and a plurality of micro pumps may be used. The micropump can adopt a simple structure by using a method for controlling the start and end of the drawing line by utilizing the generation of negative pressure and positive pressure accompanying the rise and fall of the piston. Alternatively, a plurality of dispensers having a two-degree-of-freedom actuator described in the specific example (I) may be arranged.
[0299]
Specifically, in FIG. 26, for example, electrode lines 705, 708, and 709 are selected as electrode lines having the same inclination angle. The interval between the nozzles of each head is determined in advance from the coating pattern of the electrode layer. Since the subsequent application methods for each head can be the same as those in the specific example (I), the details are omitted.
[0300]
As another example in which the dispenser travels relative to the substrate, as shown in FIG. 27, a mechanism for moving the XY stage in the XY directions orthogonal to each other with the dispenser 304 attached to the fixed frame 303. Will be described. A mechanism for moving the XY stage in the XY directions orthogonal to each other while the dispenser 304 is attached to the fixed frame 303 so that the Z-axis motor 302 can be moved up and down only in the Z-axis direction will be described. In contrast, the Y-axis table 307 moves forward and backward in the X direction by driving the X-axis motor 300 fixed to the fixed frame side, and the substrate is driven by driving the Y-axis motor 301 fixed to the Y-axis table 307. The substrate mounting table 305 on which the position 306 is positioned is moved back and forth in the Y direction.
[0301]
If comprised in this way, the dispenser 304 only raises / lowers only in the Z-axis direction by the Z-axis motor 302, and the substrate mounting table 305 moves in the respective directions in the XY directions, thereby The relative running of the dispenser with respect to the substrate can be realized.
[0302]
In the above embodiment, when the dispenser and the substrate relatively move from the effective display area to the ineffective display area, the number of rotations of the rotary shaft of the thread groove type dispenser is reduced and then stopped. The discharge may be stopped by or after being reduced, and the discharge may be stopped by reversing the rotating shaft only for 10 msec or less and lifting the paste by, for example, about 10 μm. .
[0303]
Alternatively, when the dispenser and the substrate relatively move from the ineffective display area to the effective display area, after increasing the rotational speed of the rotary shaft of the thread groove dispenser, Discharging may be performed while maintaining a constant rotation of the rotating shaft, or after increasing and then decreasing, discharging may be performed while maintaining a constant rotation of the rotating shaft.
[0304]
Further, in the above embodiment, when a plurality of thread groove type dispensers are arranged, the number of rotations of the plurality of thread groove type dispensers can be individually adjusted to set a predetermined flow rate.
[0305]
In the various embodiments described above, a giant magnetostrictive actuator is used as a device for driving the piston in the axial direction. However, if it is not necessary to form the start and end of the drawing line with such a high quality, the responsiveness is lowered instead of the giant magnetostrictive actuator, but a linear motor, an electromagnetic solenoid, or the like may be used.
[0306]
As mentioned above, although embodiment of the continuous application | coating which draws a continuous line on a display panel was demonstrated, this invention is applicable also to intermittent application | coating. In this case as well, the concept of start / end control at the start and end of application can be applied. Or it is applicable also to the application | coating which connects the adjacent fluid mass by a natural flow by a super-high-speed intermittent application, and makes a quasi-continuous line.
[0307]
It is to be noted that, by appropriately combining arbitrary embodiments of the various embodiments described above, the effects possessed by them can be produced.
[0308]
Although the present invention has been fully described in connection with preferred embodiments with reference to the accompanying drawings, various variations and modifications will be apparent to those skilled in the art. Such changes and modifications are to be understood as being included therein, so long as they do not depart from the scope of the present invention according to the appended claims.
[0309]
【The invention's effect】
With the display panel pattern forming method and forming apparatus of the present invention, for example, a phosphor layer, an electrode layer, etc. can be applied to a substrate of any size, for example, by simply setting the substrate specifications numerically without using a conventional screen mask. Can be formed with high accuracy and can easily cope with a change in the specifications of the substrate. In addition, since it can cope with high-speed processes, there is no inferior production tact in comparison with the conventional method, and there is no material to be discarded, so that material loss can be greatly reduced.
[0310]
It is not necessary to increase the scale of both the manufacturing process and the manufacturing line, making it possible to perform screening with a single device. Also, it is possible to produce a large variety of small-quantity display panels with a mass production effect, and further screen alone. Therefore, the automation line can be operated with a small machine. The effect is enormous.
[Brief description of the drawings]
FIG. 1 is a schematic perspective view when a pattern forming apparatus for carrying out a display panel pattern forming method of the present invention is applied to a phosphor layer forming apparatus for a PDP substrate as a first embodiment.
FIG. 2 is a diagram showing an effective display area and an ineffective display area of the PDP substrate.
FIG. 3 is a front sectional view showing the dispenser according to the first embodiment applied to the present invention.
FIG. 4 is a diagram showing a moving speed of the dispenser with respect to time in the first embodiment.
5A is a diagram showing a thread groove rotational speed basic component with respect to time in the first embodiment, FIG. 5B is a diagram showing thread groove rotational speed correction with respect to time in the first embodiment, and FIG. It is a figure which shows the thread groove rotation speed with respect to time in 1st Embodiment.
FIG. 6 is a front sectional view showing a dispenser according to a second embodiment applied to the present invention.
FIG. 7 is a detailed view of the discharge section of FIG.
FIG. 8 is a diagram showing piston displacement with respect to time in the second embodiment.
FIG. 9 is a diagram showing thread groove pressure with respect to time in the second embodiment.
FIG. 10 is a diagram showing squeeze pressure with respect to time in the second embodiment.
FIG. 11 is a diagram showing discharge nozzle upstream pressure with respect to time in the second embodiment.
FIG. 12 is a front sectional view showing a dispenser according to a third embodiment applied to the present invention.
FIG. 13 is a detailed view of the flow rate control unit of FIG.
FIG. 14 is a diagram showing a discharge flow rate with respect to time in the third embodiment.
FIG. 15 is a diagram showing an electric circuit model of a flow rate control unit in the third embodiment.
FIG. 16 is a schematic perspective view when a pattern forming apparatus according to the present embodiment is applied to a CRT phosphor layer apparatus, a PDP substrate pattern forming apparatus, and the like, and a large number of screen stripes are drawn simultaneously.
FIG. 17 is a front sectional view showing a dispenser according to a fourth embodiment applied to the present invention.
FIGS. 18A and 18B are views showing displacements of a piston and a sleeve with respect to time in the fourth embodiment, respectively.
FIG. 19 is a diagram showing the discharge nozzle upstream pressure with respect to time in the fourth embodiment.
FIG. 20 is a front sectional view showing a dispenser according to a fifth embodiment applied to the present invention.
FIG. 21 is an enlarged view of a pump unit in the fifth embodiment.
FIGS. 22A, 22B, and 22C are diagrams showing the relationship between the seal pressure and the gap in the fifth embodiment, respectively.
FIG. 23 is a schematic perspective view of a conventionally proposed dispenser-type phosphor layer device.
FIG. 24 is a view showing a conventional air dispenser.
FIG. 25 is an explanatory diagram for explaining a state in which a plurality of application lines are simultaneously drawn with a plurality of micro dispensers by the pattern forming apparatus of FIG. 16;
FIG. 26 is an explanatory diagram for explaining a state in which the electrode lines of the PDP substrate are drawn by the pattern forming apparatus of the embodiment.
FIG. 27 is a perspective view of a pattern forming apparatus according to another embodiment of the present invention, in which a dispenser is fixed and the panel side is moved.
FIG. 28 is a diagram illustrating an effective display area and an ineffective display area of the PDP substrate according to the modification of FIG. 2;
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... 1st actuator, 2 ... Main shaft, 3 ... Housing, 4 ... Pump part, 5 ... Second actuator, 6 ... Motor rotor, 7 ... Upper main shaft, 8 ... Motor stator, 9 ... Upper housing, 11, 12 ... Rear side giant magnetostrictive rod and front side giant magnetostrictive rod, 13 ... magnetic field coil, 14, 15, 16 ... rear side, intermediate part, front side permanent magnet, 17 ... rear side yoke, 18 ... front side sleeve, 19 ... yoke 20: Rear sleeve, 21 ... Intermediate housing, 22 ... Bias spring, 23 ... Rotation transmission key, 24 ... Bearing, 25 ... Encoder, 26 ... Displacement sensor, 27 ... Upper end surface, 28 ... Radial groove, 29 ... Fluid Seal, 30 ... Cylinder, 31 ... Pump chamber, 32 ... Suction port, 33 ... Discharge nozzle, 34 ... Discharge plate, 35 ... Discharge end surface, 36 ... Counter surface, 37 ... Opening 38 ... Bearing, 50 ... Mounting table, 51, 52 ... Y-axis direction transport device, 53 ... X-axis direction transport device, 54 ... Z-axis direction transport device, 55 ... Dispenser, 56 ... Syringe mounting part, 57a, 57b ... Y Axis motor, 58 ... X-axis motor, 59 ... Syringe, 60a, 700 ... Effective display area, 60b, 704 ... Non-effective display area, 61 ... PDP substrate, 62 ... Discharge nozzle, 63 ... Outer periphery of PDP substrate 89 ... Z-axis motor, 90 ... Substrate position detection camera, 91a, 91b ... Motor driver, 92 ... Motor driver, 93 ... Motor driver, 94 ... Dispenser controller, 100 ... Control device, 101 ... Memory, 102 ... Spindle DESCRIPTION OF SYMBOLS 103 ... Lower housing 104 ... Pump part 105 ... Second actuator 106 ... Motor rotor 107 ... Upper main shaft 108 ... Motors 109, upper housing, 111, 112 ... rear side giant magnetostrictive rod and front side giant magnetostrictive rod, 113 ... magnetic field coil, 114, 115, 116 ... rear side, middle part, front side permanent magnet, 117 ... rear Side yoke 118 ... Front side sleeve 119 ... Yoke material 120 ... Rear side sleeve 121 ... Intermediate housing 122 ... Bias spring 123 ... Rotation transmission key 124 ... Bearing 125 ... Encoder 126 ... Displacement sensor 127 ... upper end surface, 128 ... radial groove, 129 ... fluid seal, 130 ... cylinder, 131 ... pump chamber, 132 ... suction hole, 133 ... discharge nozzle, 134 ... discharge plate, 135 ... thrust plate, 136 ... discharge side end surface, 137 ... opposing surface, 138 ... opening, 139 ... bearing, 200 ... micro dispenser, DESCRIPTION OF SYMBOLS 201 ... Linear motion type actuator, 202 ... Piston, 203 ... Fixed sleeve, 204 ... Housing, 205 ... Lower housing, 206 ... Giant magnetostrictive rod, 207, 208 ... First and second bias permanent magnets, 209 ... Upper yoke, 210 ... magnetic field coil, 211 ... yoke, 212 ... upper sleeve, 213 ... bearing part, 214 ... bias spring, 215 ... displacement sensor, 216 ... piston small diameter shaft, 217 ... suction port, 218 ... nozzle part, 219 ... discharge nozzle , 220 ... Fluid storage chamber, 221 ... Fluid restricting section, 222 ... Flow control section, 300 ... X-axis motor, 301 ... Y-axis motor, 302 ... Z-axis motor, 303 ... Fixed frame, 304 ... Dispenser, 305 ... Substrate mounting table, 306 ... Substrate, 307 ... Y-axis table, 701A, 701B ... Semi-effective display area 702 ... PDP surface plate, 703 ... tab joint, 705, 708, 709 ... electrode wire, 706 ... electrode layer, a ... preparation position, b, f ... application start position, c, g ... application end position, d, e, h: bending position.

Claims (1)

While relatively moving the de Isupensa over against the base plate, by ejecting paste, in a position to be discharged of the substrate, successively, by discharging the paste, to form a paste layer of a pattern display In the panel pattern forming method,
The dispenser has a piston moves up and down, and, with respect to the substrate having the effective display area for forming the paste layer, the non-effective display area that does not form the paste layer on the outside of the effective display area, When discharging the paste, the piston is lowered and simultaneously the master pump motor for supplying the paste to the dispenser is started to rotate, and then the dispenser is relatively run while rotating the motor . When the paste is discharged to the effective display area, the piston is raised and simultaneously the rotation of the motor is stopped so that the non-effective display area is relatively moved by the dispenser. When the vehicle is running, the display panel performance is blocked. Over emissions forming method.

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