JPH10303027A - Multilayer microwave induction device - Google Patents

Multilayer microwave induction device

Info

Publication number
JPH10303027A
JPH10303027A JP10902797A JP10902797A JPH10303027A JP H10303027 A JPH10303027 A JP H10303027A JP 10902797 A JP10902797 A JP 10902797A JP 10902797 A JP10902797 A JP 10902797A JP H10303027 A JPH10303027 A JP H10303027A
Authority
JP
Japan
Prior art keywords
line
coil
coiled
microwave induction
cross
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10902797A
Other languages
Japanese (ja)
Other versions
JP3897192B2 (en
Inventor
Yasunori Yamane
康典 山根
Kyozo Ogawa
共三 小川
Shunichi Nishiyama
俊一 西山
Toshihiko Tanaka
俊彦 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Proterial Ltd
Original Assignee
Hitachi Metals Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Metals Ltd filed Critical Hitachi Metals Ltd
Priority to JP10902797A priority Critical patent/JP3897192B2/en
Publication of JPH10303027A publication Critical patent/JPH10303027A/en
Application granted granted Critical
Publication of JP3897192B2 publication Critical patent/JP3897192B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To make an electric field between the adjacent coil-like lines not uniform so as to reduce the potential difference between the coil-like lines and reduce the capacitive component by making the cross-section of the coil-like line flat and its surface protruding. SOLUTION: The cross-section of a coil-like line 2 is made flat and substantially oval and a stray capacitance between the adjoining coil-shaped lines 2 is reduced by end face effects. The coil-like line 2 is formed accurately with excellent reproducibility by previously forming a recessed part on a conductor line forming part on an insulating layer, printing a paste conductor of a metal material having a high conductivity, such as Ag and Cu. The insulating layer is formed of a green sheet composed of a dielectric whose major component is a magnetic body that can be sintered at a low temperature, such as Ni-Zn based ferrite, and AlO. At the time of forming the recessed part, the green sheet is heat-pressed to make the thickness uniform. Thus, the stray capacitance and its variation are reduced without deteriorating the performance of a microwave induction device.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、VHF帯、UHF
帯、マイクロ波帯等の高周波帯域で用いられる積層マイ
クロ波誘導素子に関する。
The present invention relates to a VHF band, a UHF band,
The present invention relates to a laminated microwave induction element used in a high frequency band such as a band and a microwave band.

【0002】[0002]

【従来の技術】積層マイクロ波誘導素子は、積層技術に
よって一体焼結した誘導素子であって特にマイクロ波帯
等の高周波での使用に適した素子である。この積層マイ
クロ波誘導素子は、インダクタとして使用したり、容量
素子と組み合わせてフィルターとして使用したり、ある
いは2次側の導体線路を加えて相互誘導を利用したトラ
ンスとして使用し、これらは例えばVHF帯、UHF
帯、マイクロ波帯等の高周波帯域を利用した携帯電話や
自動車電話等に代表される移動体通信機器の様々な部分
に使用される。
2. Description of the Related Art A laminated microwave induction element is an induction element integrally sintered by a lamination technique and is particularly suitable for use in a high frequency such as a microwave band. This laminated microwave induction element is used as an inductor, used as a filter in combination with a capacitive element, or used as a transformer using mutual induction by adding a conductor line on the secondary side. , UHF
It is used in various parts of mobile communication devices typified by mobile phones and car phones utilizing a high frequency band such as a band and a microwave band.

【0003】上述のような積層マイクロ波誘導素子は従
来より種々提案されてきた。第1の従来例として厚膜印
刷法による積層インダクタがある。図3は該積層インダ
クタの部分透視斜視図であり図4はそのABCD断面図
である。当該積層インダクタの構造を図3、図4を用い
て説明する。なお以下のすべての図において同一機能の
部分には同一符号を付けるものとする。この積層インダ
クタは、表面に導体線路(2)を厚膜印刷法などで形成
した磁性体や誘電体などの複数の絶縁体層(1)を積層
し、この導体線路は絶縁体層(1)に設けたスルーホー
ル(図示せず)などを介して電気的に接続し周回するコ
イル状線路を形成する。このようにして得た積層体を焼
結した後、積層体の外周に導電ペーストなどを塗布もし
くは印刷し焼き付けて外部端子(3)を形成する。
[0003] Various kinds of laminated microwave induction elements as described above have been proposed in the past. A first conventional example is a laminated inductor formed by a thick film printing method. FIG. 3 is a partially transparent perspective view of the multilayer inductor, and FIG. 4 is a cross-sectional view of the multilayer inductor. The structure of the multilayer inductor will be described with reference to FIGS. In all the drawings, the same reference numerals are given to parts having the same function. This laminated inductor is formed by laminating a plurality of insulator layers (1) such as a magnetic material or a dielectric material on the surface of which a conductor line (2) is formed by a thick film printing method or the like, and the conductor line is an insulator layer (1). A coiled line that is electrically connected and circulated through a through-hole (not shown) provided in the above is formed. After sintering the thus obtained laminate, an external terminal (3) is formed by applying or printing a conductive paste or the like on the outer periphery of the laminate and baking.

【0004】第2の従来例として、特公平−02161
1号公報に記載の積層インダクタがある。この構造を図
5の断面図を用いて説明する。本従来例では導体線路
(2)の少なくとも上下に隣接した部分の大部分を、互
いにくい違いに配置している。
As a second conventional example, Japanese Patent Publication No.
There is a multilayer inductor described in Japanese Patent Application Laid-Open Publication No. 1 (1999). This structure will be described with reference to the sectional view of FIG. In this conventional example, at least most of the vertically adjacent portions of the conductor line (2) are arranged so as to be hardly different from each other.

【0005】第3の従来例として、特開平05−006
823号公報に記載のインダクタがある。この構造を図
6の断面図を用いて説明する。本従来例では、導体線路
(2)の周囲に低誘電率の誘電体層(4)を形成してい
る。
As a third conventional example, Japanese Patent Application Laid-Open No. 05-006
No. 823 discloses an inductor. This structure will be described with reference to the sectional view of FIG. In this conventional example, a low dielectric constant dielectric layer (4) is formed around the conductor line (2).

【0006】[0006]

【発明が解決しようとする課題】第1の従来例のインダ
クタは、導体線路が積層方向に周回するコイルを形成す
る構造であるので、絶縁層を介し積層方向に隣り合う導
体線路間で容量(浮遊容量Cf)が形成される。前記浮
遊容量Cfは絶縁層間で対向する導体線路の重畳する部
分の面積Sと、絶縁層間で対向する導体線路の間隔d
と、絶縁体層の比誘電率εrによって決まる。
Since the inductor of the first prior art has a structure in which the conductor line forms a coil that circulates in the stacking direction, the capacitance between the conductor lines adjacent to each other in the stacking direction via the insulating layer (ie, the capacitance ( A stray capacitance C f ) is formed. The stray capacitance C f is determined by the area S of the overlapping portion of the conductor lines facing each other between the insulating layers and the distance d between the conductor lines facing each other between the insulating layers.
And the relative dielectric constant ε r of the insulator layer.

【0007】式1は浮遊容量Cfを表す関係式である。 Cf=εo・εr・S/d (式1) ここでεoは真空中での誘電率である。[0007] Formula 1 is a relational expression that represents the stray capacitance C f. C f = ε o · ε r · S / d ( Equation 1) where epsilon o is the dielectric constant in vacuum.

【0008】一般的に第1の従来例のインダクタは等価
的に並列共振回路とされ、その自己共振周波数frは、
インダクタンスLと浮遊容量Cfとで表される。式2は
自己共振周波数frを表す関係式である。 fr=1/(2・π・(L・Cf1/2) (式2)
In general, the first conventional inductor is equivalently formed as a parallel resonance circuit, and its self-resonant frequency fr is
Represented by the inductance L and the stray capacitance C f. Equation 2 is a relational expression representing the self-resonant frequency f r. fr = 1 / (2.pi. ( L.Cf ) 1/2 ) (Equation 2)

【0009】マイクロ波帯などの高周波帯域で使用する
インダクタは、少なくとも自己共振周波数frがインダ
クタの使用周波数よりも高くなければ部品としての機能
をはたさない。よって誘導成分、容量成分ともに小さい
ことが必要である。
[0009] The inductor used in a high frequency band such as a microwave band, at least the self-resonant frequency f r does not fulfill the function as parts to be higher than the frequency used in the inductor. Therefore, it is necessary that both the induction component and the capacitance component are small.

【0010】しかしながら、第1の従来例では導体線路
が幅広く平滑に形成されているという構造上、大きな浮
遊容量Cfが発生し、自己共振周波数frが使用周波数よ
りも低周波数側に現れる。また浮遊容量Cfの変化率が
直接自己共振周波数frに影響し、電気的特性もこれに
伴いばらつく。このように高周波での使用に適さない種
々の問題があり、浮遊容量Cfを低減し、かつそのばら
つきも低減する必要があった。
[0010] However, the first conventional example in structural as conductor lines are widely smoothly formed, a large stray capacitance C f is generated, the self-resonant frequency f r appears on the lower frequency side than the frequency used. The rate of change in the stray capacitance C f is directly affect the self-resonant frequency f r, varies with the also electric properties. As described above, there are various problems that are not suitable for use at high frequencies, and it is necessary to reduce the stray capacitance Cf and reduce its variation.

【0011】第2の従来例で説明した積層インダクタ
は、積層方向に隣接した導体線路を食い違いに配置し、
層間で対向する導体線路の面積Sを小さくすることで第
1の従来例で問題となった浮遊容量Cfの低減を提案し
ている。しかし導体線路を食い違いに配置する事で該導
体線路の配置面積が増加し、これにともなって部品の外
形寸法が大きくなってしまうこと、漏れ磁束が増加する
こと、磁束が通過する面積(有効断面積)が狭くなりイ
ンダクタンスが減少するなどインダクタとしての特性が
著しく劣るものであった。さらに浮遊容量のCfばらつ
きを抑える手段としては無力であった。
In the multilayer inductor described in the second conventional example, the conductor lines adjacent in the stacking direction are staggered,
It proposes to reduce the stray capacitance C f in question in the first conventional example by reducing the area S of the conductor lines facing the layers. However, arranging the conductor lines in a staggered manner increases the arrangement area of the conductor lines, thereby increasing the external dimensions of the components, increasing the leakage magnetic flux, and increasing the area through which the magnetic flux passes (the effective cutting distance). The characteristics of the inductor were remarkably inferior, for example, the area) was reduced and the inductance was reduced. Furthermore, it is ineffective as a means for suppressing the C f variation of the stray capacitance.

【0012】第3の従来例で説明したインダクタは、低
誘電率の誘電体層を生成させるための拡散剤を添加した
導電ペーストで導体線路を印刷し、焼結時に低誘電率の
誘電体層(4)を導体線路の周囲に形成することで、導
体線路間の絶縁体層の誘電率εrを小さくし浮遊容量Cf
の低減を提案している。しかし低誘電率の誘電体層を再
現性よく精密に導体線路の周囲に形成するのは至難であ
り、デラミネーションなどの構造欠陥を誘発しやすく、
また導体線路の導電性などに著しい悪影響を及ぼし、さ
らに浮遊容量Cfのばらつきがきわめて大となることが
明白であり、ほとんど現実性のない提案であった。
In the inductor described in the third conventional example, a conductor line is printed with a conductive paste to which a diffusing agent for forming a dielectric layer having a low dielectric constant is added, and the dielectric layer having a low dielectric constant is sintered at the time of sintering. By forming (4) around the conductor line, the dielectric constant ε r of the insulator layer between the conductor lines is reduced, and the stray capacitance C f
Is proposed. However, it is extremely difficult to form a low dielectric constant dielectric layer around the conductor line with good reproducibility and it is easy to induce structural defects such as delamination.
Also have a significant adverse effect on the conductivity of the conductor lines is evident that further variations of the stray capacitance C f is very large, it was almost proposed no reality.

【0013】上述のように、従来マイクロ波帯などの高
周波数帯域での使用に適した、すなわち浮遊容量Cf
小さく、そのばらつきも小さい積層マイクロ波誘導素子
はなかった。本発明の目的は上記従来例の問題を解消
し、容易に浮遊容量Cfとそのばらつきをともに減少さ
せ、マイクロ波帯等の高周波数帯での使用に適した積層
マイクロ波誘導素子を提供することである。
[0013] As described above, suitable for use in a high frequency band, such as a conventional microwave band, that is, stray capacitance C f small, the variation was not also small laminated microwave inductive element. SUMMARY OF THE INVENTION An object of the present invention is to provide a laminated microwave induction element which solves the above-mentioned problems of the prior art, easily reduces both stray capacitance Cf and its variation, and is suitable for use in a high frequency band such as a microwave band. That is.

【0014】[0014]

【課題を解決するための手段】上記の課題を解決するた
めに鋭意研究の結果、発明者らは著しく構造を改善した
積層マイクロ波誘導素子に想到したものである。すなわ
ち、第1の発明は、表面に導体線路を形成した絶縁体か
らなる複数のシートを積層し一体焼結した積層体で、前
記導体線路が前記絶縁体からなるシートの縁部もしくは
該シートに設けられたスルーホールを介して電気的に接
続し、周回するコイル状線路を形成する積層マイクロ波
誘導素子であって、当該コイル状線路の断面形状が扁平
であって、かつ当該コイル状線路の表面が凸面である積
層マイクロ波誘導素子である。
Means for Solving the Problems As a result of intensive studies to solve the above-mentioned problems, the present inventors have conceived of a laminated microwave induction device having a remarkably improved structure. That is, the first invention is a laminated body obtained by laminating and integrally sintering a plurality of sheets made of an insulator having a conductor line formed on the surface, wherein the conductor line is formed on an edge of the sheet made of the insulator or on the sheet. A laminated microwave induction element that is electrically connected through a provided through hole to form a coiled line that circulates, wherein the cross-sectional shape of the coiled line is flat, and This is a laminated microwave induction element having a convex surface.

【0015】なおここに言うところの、断面形状が扁平
であって、かつ表面が凸面であるコイル状線路とは、図
7に示すような変形した楕円形の断面を有するコイル状
線路である。
The coil-shaped line having a flat cross-section and a convex surface is a coil-shaped line having a deformed elliptical cross-section as shown in FIG.

【0016】第2発明は、表面に導体線路を形成した絶
縁体からなる複数のシートを積層し一体焼結した積層体
で、前記導体線路が前記絶縁体からなるシートの縁部も
しくは該シートに設けられたスルーホールを介して電気
的に接続し、周回するコイル状線路を形成する積層マイ
クロ波誘導素子であって、当該コイル状線路の断面形状
が扁平であって、かつ当該コイル状線路の一面は凸面で
その対向部を凹面とした積層マイクロ波誘導素子であ
る。
According to a second aspect of the present invention, there is provided a laminated body obtained by laminating and integrally sintering a plurality of sheets of an insulator having a conductor line formed on a surface thereof, wherein the conductor line is formed on an edge of the sheet made of the insulator or on the sheet. A laminated microwave induction element that is electrically connected through a provided through hole to form a coiled line that circulates, wherein the cross-sectional shape of the coiled line is flat, and One surface is a laminated microwave induction element having a convex surface and a concave surface facing the opposite surface.

【0017】なおここに言うところの、断面形状が扁平
であって、かつ一面が凸面でその対向部が凹面であるコ
イル状線路とは、図8に示すような変形したU形の断面
を有するコイル状線路である。
The coil-shaped line having a flat cross-sectional shape, a convex surface on one side, and a concave surface on the opposite side has a deformed U-shaped cross-section as shown in FIG. It is a coiled line.

【0018】第1の発明、第2の発明において、コイル
状線路のその表面の一部もしくは全体を平坦でなくする
ことで、隣接するコイル状線路間の電界を一様でなく
し、コイル状線路間での電位差を小さくして容量成分を
減じせしめる(端面効果)のであるから、前記断面形状
は例えば図7、図8に示すような左右対称でなくてもよ
いし、表面の一部が平坦であってもよいし、凸面の一部
が凹部であってもよいし、断面の幅方向の端部に若干の
バリがあってもよいし、端部が切り落としになっていて
も、発明の効果は変わることがない。
According to the first and second aspects of the present invention, the electric field between adjacent coiled lines is made non-uniform by making a part or the whole of the surface of the coiled line non-uniform. Since the potential difference between them is reduced to reduce the capacitance component (edge effect), the cross-sectional shape may not be symmetrical as shown in FIGS. 7 and 8, for example, and a part of the surface may be flat. May be, a part of the convex surface may be a concave portion, there may be a slight burr at the end in the width direction of the cross section, or even if the end is cut off, The effect does not change.

【0019】また、コイル状線路の断面の厚さt、幅W
の比W/tである扁平率が、小さく扁平でないと浮遊容
量Cfが小さく実用上問題とならないこと、また逆に大
きく扁平すぎると、端面効果がうすく発明の効果が少な
いので、前記扁平率は2から30であることが好まし
い。さらに好ましくは7.5から20である。
The thickness t and the width W of the cross section of the coiled line
If the flatness, which is the ratio W / t, is small and not flat, the stray capacitance Cf is small and causes no practical problem. Conversely, if the flatness is large and too flat, the effect of the invention is small because the end face effect is weak. Is preferably 2 to 30. More preferably, it is 7.5 to 20.

【0020】また、コイル状線路の厚さと幅によって決
まる断面積Aが小さいと、抵抗成分が増加し損失が増加
すること、大きいと端面効果がうすく発明の効果が少な
いので、前記断面積は、t・W/2以上、t・W−0.
215・t2未満であることが好ましい。
If the cross-sectional area A determined by the thickness and width of the coil-shaped line is small, the resistance component increases and the loss increases. If the cross-sectional area A is large, the effect of the invention is small because the end face effect is small. t.W / 2 or more, t.W-0.
It is preferably less than 215 · t 2 .

【0021】また、コイル状線路が絶縁層を挟んで隣接
する距離dは、幅方向に大きくなることが好ましく、さ
らに好ましくは端面部よりt/2内側では少なくとも隣
接する最短距離d0よりも大きく、t−t2/W+d0
下である。
Further, the distance d that the coiled line is adjacent to each other across an insulating layer is larger than the shortest distance d 0 is preferable to increase the width direction, more preferably at least adjacent the t / 2 inward from the end face portion , T−t 2 / W + d 0 or less.

【0022】[0022]

【作用】研究において種々試行した結果、コイル状線路
の端部の断面は上下面に接する円弧よりも曲率半径が小
である長円であることを要する。一方端面断面は、菱形
よりも丸み付けされていること、すなわち菱形の対角線
の長さが上記幅Wと厚さtに一致する菱形よりも膨らん
だ形状とする事が望ましいと言うことが判明した。ここ
に上記長円の断面積aは、 a=t・W−0.215・t2 であり、上記菱形の断面積bは、 b>t・W/2 であり a>b であることが望ましい。最も理想的に
は、長径Wと短径tの楕円であることが判明している。
かかる知見をもとに、発明の実施を行った。
As a result of various trials in the research, it is necessary that the cross section of the end of the coil-shaped line is an ellipse having a smaller radius of curvature than the circular arc contacting the upper and lower surfaces. On the other hand, it has been found that the end face cross section is more rounded than the rhombus, that is, it is desirable that the diagonal length of the rhombus is larger than the rhombus corresponding to the width W and the thickness t. . Here, the cross-sectional area a of the ellipse is a = t · W−0.215 · t 2 , and the cross-sectional area b of the rhombus is b> t · W / 2 and a> b. desirable. It has been found that the shape is most ideally an ellipse having a major axis W and a minor axis t.
Based on such knowledge, the present invention was implemented.

【0023】[0023]

【発明の実施の形態】本発明に係る積層マイクロ波誘導
素子の概要をインダクタを例にとって説明する。図1は
その部分透視斜視図であり図2はそのABCD断面であ
る。
BEST MODE FOR CARRYING OUT THE INVENTION An outline of a laminated microwave induction device according to the present invention will be described by taking an inductor as an example. FIG. 1 is a partially transparent perspective view of the same, and FIG. 2 is an ABCD section thereof.

【0024】このインダクタは、絶縁体層(1)、断面
が略楕円形状であるコイル状線路(2)、前記コイル状
線路の引き出し端に形成する外部端子(3)およびスル
ーホール(図示せず)などの接続部を有する。
This inductor comprises an insulator layer (1), a coiled line (2) having a substantially elliptical cross section, an external terminal (3) formed at a leading end of the coiled line, and a through hole (not shown). ).

【0025】本発明では、コイル状線路(2)の断面を
扁平な略楕円形とし、端面効果によって隣接するコイル
状線路間での浮遊容量Cfを低減している。断面が扁平
で略楕円形のコイル状線路(2)は、絶縁体層の導体線
路形成部にあらかじめ凹部を形成し、この上から例え
ば、AgやCuといった高い導電率を有する金属材料を
ペースト状にした導体を印刷し、精密に再現性よく形成
している。上記絶縁層は、前記金属材料と一体焼結可能
な例えば低温焼結可能なNi−Zn系フェライトなどの
磁性体やAl23を主成分とした誘電体からなるグリー
ンシートによって形成する。また前記凹部を形成すると
きに、グリーンシートを加熱加圧する事でその厚さを均
一化している。このようにして、マイクロ波誘導素子の
性能を減じることなく浮遊容量Cf及び、そのばらつき
を低減している。
[0025] In the present invention, the cross-section of the coiled line (2) is a flat substantially oval, thereby reducing the stray capacitance C f between the coiled lines adjacent the end surface effects. The coil-shaped line (2) having a flat cross section and a substantially elliptical shape is formed by forming a concave portion in advance in the conductor line forming portion of the insulator layer, and then depositing a metal material having high conductivity, such as Ag or Cu, on the concave portion. The printed conductor is precisely formed with good reproducibility. The insulating layer is formed of a green sheet made of a magnetic material such as a Ni—Zn ferrite that can be sintered integrally with the metal material, for example, a low-temperature sinterable material, or a dielectric mainly composed of Al 2 O 3 . When forming the concave portion, the thickness of the green sheet is made uniform by heating and pressing. In this way, the stray capacitance Cf and its variation are reduced without reducing the performance of the microwave induction element.

【0026】[0026]

【実施例】以下、本発明に係る積層マイクロ波誘導素子
の実施例について詳細に説明する。実施例は800MH
zでのインピーダンスが50オームとなるインダクタで
ある。
DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the laminated microwave induction device according to the present invention will be described in detail. Example is 800 MH
An inductor whose impedance at z is 50 ohms.

【0027】(実施例1)まずAl23を主成分とした
誘電体グリーンシートをドクターブレード法で約0.1
mmの厚さとなるように成形した後、所定の外形寸法に
切断した。該グリーンシートを、位置決め溝を有し中央
部がグリーンシートの外形よりわずかに小さく四角形に
抜かれたステンレスの枠に貼付けた。
(Example 1) First, a dielectric green sheet containing Al 2 O 3 as a main component was prepared for about 0.1 by a doctor blade method.
After being formed to have a thickness of mm, it was cut into a predetermined outer size. The green sheet was affixed to a stainless steel frame having a positioning groove and having a central portion slightly smaller than the outer shape of the green sheet and cut into a square.

【0028】以降グリーンシートはステンレスの枠に貼
付けた状態で加工する。よって以下状態が変わる迄は特
にステンレス枠については説明を省く。また、以降はス
テンレス枠に設けた位置決め溝を加工基準としている。
Thereafter, the green sheet is processed while being attached to a stainless steel frame. Therefore, a description of the stainless steel frame is omitted until the following state changes. Hereinafter, the positioning groove provided in the stainless steel frame is used as a processing reference.

【0029】前記グリーンシートを、直径が約0.1m
mの打ち抜きピンを有する金型に配置して打ち抜き、ス
ルーホールを形成した。該グリーンシートを導体線路パ
ターンと同形状の凸部を有する金型に配置した。前記金
型はグリーンシートが適度な柔軟性を持つように80℃
から120℃に温度調節している。前記グリーンシート
を0.5Kg/cm2から1Kg/cm2 の圧力で加圧
し、グリーンシート片側表面に、断面がU形状で表面形
状が導体線路パターンである凹部を深さ約0.03mm
で転写した。
The green sheet is about 0.1 m in diameter.
It was arranged in a mold having a punching pin of m and punched out to form a through hole. The green sheet was placed in a mold having a projection having the same shape as the conductor line pattern. The mold is set at 80 ° C so that the green sheet has appropriate flexibility.
To 120 ° C. The green sheet is pressurized at a pressure of 0.5 kg / cm 2 to 1 kg / cm 2 , and a concave portion having a U-shaped cross section and a surface shape of a conductor line pattern is formed on one surface of the green sheet to a depth of about 0.03 mm.
Transcribed.

【0030】次に、再現性よく精密に印刷可能な印刷機
の作業テーブルにグリーンシートを配置した。前記作業
テーブルには吸引機構がもうけられていて、グリーンシ
ートのほぼ全面を吸着しグリーンシートにたわみや歪み
を生じないようにしている。前記グリーンシートの凹部
上から、Agペーストを厚さ約0.008mm、幅約
0.09mmで、この上に厚さ約0.008mm、幅約
0.17mmで、さらに厚さ約0.008mm、幅約
0.09mmで印刷し、略楕円形状の導体線路を形成し
た。なおスルーホール部には前記吸引機構によって印刷
と同時にペーストが吸引充填される。
Next, the green sheets were placed on a work table of a printing machine capable of printing with good reproducibility and precision. The work table is provided with a suction mechanism so that almost the entire surface of the green sheet is sucked to prevent the green sheet from being bent or distorted. From above the concave portion of the green sheet, the Ag paste was about 0.008 mm thick and about 0.09 mm wide, and about 0.008 mm thick, about 0.17 mm wide and further about 0.008 mm thick. Printing was performed with a width of about 0.09 mm to form a substantially elliptical conductor line. The paste is suction-filled into the through-hole simultaneously with printing by the suction mechanism.

【0031】導体線路パターンを印刷した複数のグリー
ンシートを乾燥後、グリーンシートをステンレスの枠よ
り打ち抜き、導体線路が周回する2.5ターンのコイル
状線路(2)となるように重ね100℃から140℃で
加熱圧着した。つぎに、焼結後の外形寸法が3.2mm
×1.6mmとなるように切断し焼結した。この後、焼
結体の外周部にAgを主成分とした導体ペーストを塗布
し、導体外部電極(3)を形成した後焼き付けし、本実
施例のインダクタを得た。本実施例ではコイル状線路の
扁平率を7.5とした場合の実施例である。なおあわせ
て扁平率が、2、20、30となる試料もあわせて作製
した。
After drying a plurality of green sheets on which the conductor line pattern is printed, the green sheets are punched out of a stainless steel frame, and superposed from 100 ° C. so as to form a 2.5-turn coiled line (2) around which the conductor lines circulate. It heat-pressed at 140 degreeC. Next, the outer dimensions after sintering are 3.2 mm.
It was cut to a size of × 1.6 mm and sintered. Thereafter, a conductor paste containing Ag as a main component was applied to the outer peripheral portion of the sintered body, and a conductor external electrode (3) was formed and baked to obtain an inductor of this example. This embodiment is an embodiment in which the flatness of the coiled line is set to 7.5. In addition, samples having an oblateness of 2, 20, and 30 were also manufactured.

【0032】(実施例2)実施例1と同様の方法で準備
した凹部を有するグリーンシートを印刷機の印刷テーブ
ルに配置した。前記グリーンシートの凹部上に厚さ約
0.024mm、幅約0.17mmでAgペーストを印
刷し略U型の導体線路パターンを形成した。以下実施例
1と同様なのでその説明を省く。
Example 2 A green sheet having a concave portion prepared in the same manner as in Example 1 was placed on a printing table of a printing press. An Ag paste was printed on the concave portion of the green sheet at a thickness of about 0.024 mm and a width of about 0.17 mm to form a substantially U-shaped conductor line pattern. Hereinafter, since it is the same as the first embodiment, the description thereof is omitted.

【0033】(比較例)本発明に係る実施例との比較用
として、第1の従来例の試料を作製した。比較例では、
凹部を形成していないグリーンシート上に厚さ約0.0
24mm、幅約0.17mmでAgペーストを印刷し長
方形状の導体線路を形成した。他は実施例1、2と同様
なのでその説明を省く。
(Comparative Example) A sample of the first conventional example was prepared for comparison with the embodiment according to the present invention. In the comparative example,
A thickness of about 0.0 on a green sheet with no recess
Ag paste was printed at a width of 24 mm and a width of about 0.17 mm to form a rectangular conductor line. The other parts are the same as those of the first and second embodiments, and the description thereof will be omitted.

【0033】このようにして得たインダクタのインピー
ダンスが無限大となる共振周波数をベクトルネットワー
クアナライザによって測定した。その結果を表1に示
す。
The resonance frequency at which the impedance of the inductor thus obtained becomes infinite was measured by a vector network analyzer. Table 1 shows the results.

【0034】[0034]

【表1】 [Table 1]

【0035】表1中、扁平率の異なる試料を1から4の
番号を付して区別している。また、表中の共振周波数の
比とは、実施例試料の共振周波数fr’、比較例試料の
共振周波数frであらわされr’/frである本発明
の実施例1、実施例2のインダクタの共振周波数は比較
例のインダクタと比較し、それぞれ約1.02倍から約
1.18倍となった。また共振周波数のばらつきは、比
較例に対し約0.6倍から約0.7倍となった。
In Table 1, samples having different oblate ratios are distinguished by numbers 1 to 4. Further, the ratio of the resonance frequency in the table, the resonance frequency f r of the example sample ', represented by the resonance frequency f r of the comparative sample, f r' is / f r. The resonance frequencies of the inductors of Examples 1 and 2 of the present invention were about 1.02 times to about 1.18 times respectively as compared with the inductor of the comparative example. In addition, the variation of the resonance frequency increased from about 0.6 times to about 0.7 times the comparative example.

【0036】なお、これらの実施例においては導体線路
を積層方向に重ね周回するように配置しコイル状線路を
形成したが、導体線路を同一層上に配置するミアンダラ
インやスパイラルラインであっても、隣接するコンデン
サパターンやアースパターン間で発生する浮遊容量Cf
が端面効果により小さくできることから、本発明の効果
が変わらないことは言うまでもない。
In these embodiments, the coiled line is formed by arranging the conductor lines so as to wrap around in the stacking direction, but a meander line or a spiral line in which the conductor lines are arranged on the same layer. Stray capacitance C f generated between adjacent capacitor patterns and ground patterns
Can be reduced by the end face effect, so that the effect of the present invention does not change.

【0037】[0037]

【発明の効果】本発明によれば、容易に浮遊容量とその
ばらつきをともに減少させ、マイクロ波帯等の高周波数
帯での使用に適した積層マイクロ波誘導素子を提供でき
る。
According to the present invention, it is possible to provide a laminated microwave induction element suitable for use in a high frequency band such as a microwave band by easily reducing both the stray capacitance and its variation.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の一実施例に係る積層マイクロ波誘導素
子の部分透視斜視図である。
FIG. 1 is a partially transparent perspective view of a laminated microwave induction device according to one embodiment of the present invention.

【図2】本発明の一実施例に係るABCD断面図であ
る。
FIG. 2 is an ABCD sectional view according to one embodiment of the present invention.

【図3】第1の従来例の部分透視斜視図である。FIG. 3 is a partially transparent perspective view of a first conventional example.

【図4】第1の従来例のABCD断面図である。FIG. 4 is an ABCD sectional view of a first conventional example.

【図5】第2の従来例のABCD断面図である。FIG. 5 is an ABCD sectional view of a second conventional example.

【図6】第3の従来例のABCD断面図である。FIG. 6 is an ABCD sectional view of a third conventional example.

【図7】本発明に係るコイル状線路の断面図である。FIG. 7 is a sectional view of a coiled line according to the present invention.

【図8】本発明に係るコイル状線路の他の断面図であ
る。
FIG. 8 is another sectional view of the coiled line according to the present invention.

【符号の説明】[Explanation of symbols]

1 グリーンシート、2 導体線路 1 green sheet, 2 conductor lines

───────────────────────────────────────────────────── フロントページの続き (72)発明者 田中 俊彦 鳥取県鳥取市南栄町70番地2号日立金属株 式会社鳥取工場内 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Toshihiko Tanaka 70-2 Minamisakae-cho, Tottori City, Tottori Pref.

Claims (6)

【特許請求の範囲】[Claims] 【請求項1】 表面に導体線路を形成した絶縁体からな
る複数のシートを積層し一体焼結した積層体で、前記導
体線路が前記絶縁体からなるシートの縁部もしくは該シ
ートに設けられたスルーホールを介して電気的に接続
し、周回するコイル状線路を形成する積層マイクロ波誘
導素子であって、当該コイル状線路は断面形状が扁平で
あって、かつ当該コイル状線路の表面が凸面となるよう
に形成したことを特徴とする積層マイクロ波誘導素子。
1. A laminated body obtained by laminating and integrally sintering a plurality of sheets of an insulator having a conductor line formed on the surface, wherein the conductor line is provided on an edge of the sheet of the insulator or on the sheet. A laminated microwave induction element electrically connected through a through-hole to form a circling coiled line, wherein the coiled line has a flat cross-sectional shape, and the surface of the coiled line is convex. A laminated microwave induction element characterized by being formed so that:
【請求項2】 表面に導体線路を形成した絶縁体からな
る複数のシートを積層し一体焼結した積層体で、前記導
体線路が前記絶縁体からなるシートの縁部もしくは該シ
ートに設けられたスルーホールを介して電気的に接続
し、周回するコイル状線路を形成する積層マイクロ波誘
導素子であって、当該コイル状線路は断面形状が扁平で
あって、かつ当該コイル状線路の一面が凸面でその対向
部は凹面であることを特徴とする積層マイクロ波誘導素
子。
2. A laminated body obtained by laminating and integrally sintering a plurality of sheets of an insulator having a conductor line formed on the surface, wherein the conductor line is provided on an edge of the sheet of the insulator or on the sheet. A laminated microwave induction element electrically connected through a through hole to form a circling coiled line, wherein the coiled line has a flat cross section and one surface of the coiled line is convex. Wherein the opposed portion is concave.
【請求項3】 前記コイル状線路断面の最厚部の厚さを
t、幅をWとした時、X=W/tで表す扁平率Xが、2
≦X≦30の範囲内にあることを特徴とする請求項1な
いし請求項2のいずれかに記載の積層マイクロ波誘導素
子。
3. When the thickness of the thickest portion of the cross section of the coiled line is t and the width is W, the oblateness X represented by X = W / t is 2
3. The multilayer microwave induction device according to claim 1, wherein the value falls within a range of ≦ X ≦ 30. 4.
【請求項4】 前記コイル状線路断面の最厚部の厚さを
t、幅をWとした時、X=W/tで表す扁平率Xが、
7.5≦X≦20の範囲内にあることを特徴とする請求
項1ないし請求項2のいずれかに記載の積層マイクロ波
誘導素子。
4. When the thickness of the thickest portion of the cross section of the coil-shaped line is t and the width is W, an oblateness X represented by X = W / t is expressed by:
The multilayer microwave induction device according to claim 1, wherein the range is 7.5 ≦ X ≦ 20.
【請求項5】 前記コイル状線路断面の面積Aが、 (t・W/2)≦A<(t・W−0.215・t2) の範囲内であることを特徴とする請求項1乃至請求項3
のいずれかに記載の積層マイクロ波誘導素子。
5. The method according to claim 1, wherein an area A of the cross section of the coiled line is in a range of (tW / 2) ≦ A <(tW−0.215 · t 2 ). To claim 3
The laminated microwave induction element according to any one of the above.
【請求項6】 絶縁体層を挟んで隣接するコイル状線路
の最短距離をd0とし、少なくともコイル状線路の幅方
向の面部より幅方向にt/2内側の位置で、前記コイル
状線路の絶縁体層を挟んで隣接する距離dが、 d0<d≦(t−t2/W+d0) の範囲内にあることを特徴とする請求項1乃至請求項5
のいずれかに記載の積層マイクロ波誘導素子。
6. The shortest distance between coiled lines adjacent to each other with an insulator layer interposed therebetween is defined as d 0, and at least at a position t / 2 inward in the width direction from the widthwise surface portion of the coiled line, The distance d adjacent to each other across the insulator layer is within a range of d 0 <d ≦ (t−t 2 / W + d 0 ).
The laminated microwave induction element according to any one of the above.
JP10902797A 1997-04-25 1997-04-25 Multilayer microwave induction device Expired - Lifetime JP3897192B2 (en)

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Application Number Priority Date Filing Date Title
JP10902797A JP3897192B2 (en) 1997-04-25 1997-04-25 Multilayer microwave induction device

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Application Number Priority Date Filing Date Title
JP10902797A JP3897192B2 (en) 1997-04-25 1997-04-25 Multilayer microwave induction device

Publications (2)

Publication Number Publication Date
JPH10303027A true JPH10303027A (en) 1998-11-13
JP3897192B2 JP3897192B2 (en) 2007-03-22

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ID=14499756

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Country Status (1)

Country Link
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Cited By (10)

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WO2010082579A1 (en) * 2009-01-14 2010-07-22 株式会社村田製作所 Electronic component and method of producing same
CN102272868A (en) * 2009-01-14 2011-12-07 株式会社村田制作所 Electronic component and method of producing same
US8169288B2 (en) 2009-01-14 2012-05-01 Murata Manufacturing Co., Ltd. Electronic component and method for making the same
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US9240273B2 (en) 2011-10-13 2016-01-19 Murata Manufacturing Co., Ltd. Electronic component and method for producing same
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