JPH1029821A - Forming die of optical element - Google Patents

Forming die of optical element

Info

Publication number
JPH1029821A
JPH1029821A JP8187383A JP18738396A JPH1029821A JP H1029821 A JPH1029821 A JP H1029821A JP 8187383 A JP8187383 A JP 8187383A JP 18738396 A JP18738396 A JP 18738396A JP H1029821 A JPH1029821 A JP H1029821A
Authority
JP
Japan
Prior art keywords
noble metal
molding
thin film
mold
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8187383A
Other languages
Japanese (ja)
Inventor
Takeharu Komiya
毅治 小宮
Hiroaki Iguchi
裕章 井口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP8187383A priority Critical patent/JPH1029821A/en
Publication of JPH1029821A publication Critical patent/JPH1029821A/en
Pending legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B11/00—Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
    • C03B11/06—Construction of plunger or mould
    • C03B11/08—Construction of plunger or mould for making solid articles, e.g. lenses
    • C03B11/084—Construction of plunger or mould for making solid articles, e.g. lenses material composition or material properties of press dies therefor
    • C03B11/086—Construction of plunger or mould for making solid articles, e.g. lenses material composition or material properties of press dies therefor of coated dies
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2215/00—Press-moulding glass
    • C03B2215/02—Press-mould materials
    • C03B2215/08—Coated press-mould dies
    • C03B2215/10—Die base materials
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2215/00—Press-moulding glass
    • C03B2215/02—Press-mould materials
    • C03B2215/08—Coated press-mould dies
    • C03B2215/14—Die top coat materials, e.g. materials for the glass-contacting layers
    • C03B2215/16—Metals or alloys, e.g. Ni-P, Ni-B, amorphous metals
    • C03B2215/17—Metals or alloys, e.g. Ni-P, Ni-B, amorphous metals comprising one or more of the noble meals, i.e. Ag, Au, platinum group metals
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2215/00—Press-moulding glass
    • C03B2215/02—Press-mould materials
    • C03B2215/08—Coated press-mould dies
    • C03B2215/14—Die top coat materials, e.g. materials for the glass-contacting layers
    • C03B2215/26—Mixtures of materials covered by more than one of the groups C03B2215/16 - C03B2215/24, e.g. C-SiC, Cr-Cr2O3, SIALON

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)

Abstract

PROBLEM TO BE SOLVED: To obtain a forming die for optical elements which obviates the occurrence of the roughness on its forming surface and prevents formed glass from sticking to the forming die even in the case heating and forming are executed any number of times by providing the forming surface of a quartz base body having the precisely worked forming surface with a surface layer formed of a noble metal. SOLUTION: This forming die is obtd. by providing the forming surface of the base body 1 which is formed of the quartz and has the precisely worked forming surface with the surface layer 2 formed of the noble metal. The surface layer 2 is preferably a thin film formed of pure platinum having purity of >=99.9wt.%. The similar effect is obtainable as well even if a thin film formed of the noble metal alloy consisting of 60wt.% platinum and at least one kind of element among rhodium, iridium, gold, tungsten and carbon.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【０００１】[0001]

【発明の属する技術分野】本発明は、プレス成形によっ
て研削・研磨を必要としない光学素子を得るために使用
する成形型に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a molding die used for obtaining an optical element which does not require grinding and polishing by press molding.

【０００２】[0002]

【従来の技術】光学機器の分野では、光学装置の構成の
簡略化、軽量化などを達成するために、非球面レンズを
用い光学機器を製造することが増加する傾向にある。従
来、ガラスレンズは研磨法によって製造されていたが、
複雑な形状を有する非球面レンズでは、量産化が困難で
あることから、研磨法に代わる製造方法としてプレス成
形の研究が盛んに行われている。2. Description of the Related Art In the field of optical instruments, there is a tendency to increase the production of optical instruments using aspherical lenses in order to achieve simplification of the configuration of an optical device and reduction in weight. Conventionally, glass lenses were manufactured by a polishing method,
Since it is difficult to mass-produce an aspheric lens having a complicated shape, research on press molding has been actively conducted as a manufacturing method instead of a polishing method.

【０００３】光学ガラスのプレス成形では、ガラス及び
成形型は数百度まで加熱されるため、成形型には加工性
の他に高温強度、耐熱衝撃性、化学的安定性などが要求
される。これらを満足するため、現在ではタングステン
カーバイドや各種サーメットを基体とし、その基体の成
形面にガラスとの化学的反応の少ない貴金属薄膜を形成
した成形型が一般的に使用されている。例えば特開昭６
０−２４６２３０号には超硬合金を母材として、その基
体上に貴金属層を被覆したことを特徴とし、この貴金属
層が、イリジウム（Ｉｒ）、オスニウム（Ｏｓ）、パラ
ジウム（Ｐｄ）、ロージウム（Ｒｈ）、ルテニウム（Ｒ
ｕ）からなる群より選ばれた少なくとも一つの元素とＰ
ｔ（６０〜９９重量％）との貴金属合金であるもの等が
開示されている。In press molding of optical glass, since the glass and the mold are heated to several hundred degrees, the mold is required to have not only workability but also high-temperature strength, thermal shock resistance, chemical stability and the like. In order to satisfy these requirements, at present, a mold is generally used in which tungsten carbide or various cermets are used as a base, and a noble metal thin film having little chemical reaction with glass is formed on a forming surface of the base. For example, JP
No. 0-246230 is characterized in that a hard metal is used as a base material and a noble metal layer is coated on a substrate thereof, and the noble metal layer is made of iridium (Ir), osmium (Os), palladium (Pd), rhodium ( Rh), ruthenium (R
u) at least one element selected from the group consisting of
Noble metal alloys with t (60 to 99% by weight) are disclosed.

【０００４】[0004]

【発明が解決しようとする課題】しかしながら、これら
の成形型は高温強度、耐熱衝撃性などの点で優れている
が、加熱・成形を重ねることで成形面に著しい粗れが生
じる傾向がある。また、更に成形型と成形されるガラス
とが化学的に反応してしまい、成形面上にガラスが付着
するしてしまう欠点を有している。However, these molds are excellent in high-temperature strength, thermal shock resistance, and the like, but they tend to have remarkable roughness on the molding surface due to repeated heating and molding. Further, there is a disadvantage that the molding die and the glass to be molded chemically react with each other, and the glass adheres to the molding surface.

【０００５】したがって、本発明では、加熱・成形を何
回も行っていても、成形面に粗れが生じず、成形される
ガラスが成形型に付着しない光学素子の成形型を得るこ
とを目的とする。Accordingly, an object of the present invention is to provide a mold for an optical element in which the molding surface does not become rough and the glass to be molded does not adhere to the mold even if heating and molding are performed many times. And

【０００６】[0006]

【課題を解決するための手段】本発明では上記問題点を
解決するため、本発明の第１の形態では、石英で形成さ
れ精密に加エされた成形面を有した基体と、基体上に設
けられ貴金属で形成された表面層と備えた。このよう
に、成形面に貴金属で形成された表面層と、化学的反応
の少ない石英を基体とすることで、加熱・成形を重ねる
ことで生じてしまう成形型の成形面の粗れを防止し、研
削・研磨を必要としない高精度な光学素子のプレス成形
と長寿命化を可能とした。According to the present invention, in order to solve the above-mentioned problems, in a first embodiment of the present invention, there is provided a substrate having a molding surface formed of quartz and precisely processed, And a surface layer formed of a noble metal. As described above, by using a surface layer formed of a noble metal on the molding surface and quartz having little chemical reaction as a base, it is possible to prevent the molding surface of the mold from being roughened due to repeated heating and molding. In addition, high precision press forming of an optical element that does not require grinding and polishing and a long life can be realized.

【０００７】また、本発明の第２の形態では、基体の成
形面に形成された表面層に、純度９９．９重量パーセン
ト以上の純白金で形成された薄膜を用いた。このよう
に、同純度でかつ薄膜を用いることで、成形型の成形面
に粗れが発生することを防ぐことができる。また、本発
明の第３の形態では、基体の成形面に形成された表面層
に、６０重量パーセントの白金と、ロージウム、イリジ
ウム、金、タングステンおよび炭素のうちすくなくとも
１種以上の貴金属からなる貴金属台金で形成された薄膜
を用いた。In the second embodiment of the present invention, a thin film made of pure platinum having a purity of 99.9% by weight or more is used for the surface layer formed on the molding surface of the substrate. As described above, by using a thin film having the same purity, it is possible to prevent occurrence of roughness on the molding surface of the mold. In a third embodiment of the present invention, the surface layer formed on the molding surface of the substrate includes a noble metal comprising 60% by weight of platinum and at least one of noble metals of rhodium, iridium, gold, tungsten and carbon. A thin film formed of a base metal was used.

【０００８】次に発明の実施の形態にて、本発明を詳し
く説明する。しかし、本発明は、次に述べる発明の実施
の形態だけに限られたものではない。Next, the present invention will be described in detail in embodiments of the present invention. However, the present invention is not limited to the following embodiments of the invention.

【０００９】[0009]

【発明の実施の形態】本発明者らは、成形面に生じる粗
れやガラスの付着などの現象が基体と貴金属薄膜との間
に生じる拡散に伴う膜質の変化に起因することを確認し
た。本発明の実施の形態では、成形型の基体として石英
を使用し、成形面を所望の形状に精密加工した後、成形
面上にガラスとの化学的反応の少ない貴金属薄膜を形成
した。これにより、６００℃以上の高温における高精度
な光学素子のプレス成形と型の長寿命化が実現できる。DESCRIPTION OF THE PREFERRED EMBODIMENTS The present inventors have confirmed that phenomena such as roughness and adhesion of glass on a molding surface are caused by a change in film quality due to diffusion occurring between a substrate and a noble metal thin film. In the embodiment of the present invention, quartz is used as a base of a molding die, and a molding surface is precisely machined into a desired shape, and then a noble metal thin film having little chemical reaction with glass is formed on the molding surface. Thereby, high-precision press forming of the optical element at a high temperature of 600 ° C. or more and extension of the life of the mold can be realized.

【００１０】本発明の実施の形態における光学素子の成
形型は、以下の様な手法を用いて作製した。石英（Ｓｉ
Ｏ2 ）形成された基体１は、図１に示す様に、外形Ａが
２０ｍｍ、厚さＢが１５ｍｍ、凹面曲率半径Ｒが１００
ｍｍの物を使用した。基体１の成形面（凹面部分）をＲ
ＭＳ値６．０〜８．０オングストローム（Å）程度にな
るまで研削・研磨した。次にスパッタ法により基体１の
成形面上に純度９９．９以上の純白金の薄膜２を厚さ７
００Åになるまで形成した。The mold for the optical element according to the embodiment of the present invention was manufactured by the following method. Quartz (Si
As shown in FIG. 1, the substrate 1 formed with O 2 ) has an outer shape A of 20 mm, a thickness B of 15 mm, and a concave radius of curvature R of 100 mm.
mm was used. The molding surface (concave portion) of the base 1 is R
Grinding and polishing were performed until the MS value was about 6.0 to 8.0 angstroms (Å). Next, a pure platinum thin film 2 having a purity of 99.9 or more was formed on the molding surface of the base 1 by sputtering to a thickness of 7 μm.
It was formed until it reached 00 °.

【００１１】このようにして、本発明の実施の形態にお
ける光学素子の成形型を作製した。作製した成形型は、
それぞれ真空中で７００℃まで加熱し、各種の光学ガラ
スを加圧成形して成形前後の表面粗さを光学式表面粗さ
計および走査型プローブ顕微鏡で観察した。なお、本発
明の実施の形態における成形型について、成形前の表面
粗さは、何れもＲＭＳ値６．０〜８．ＯÅであった。そ
して、光学ガラスを加熱・加圧成形した後の表面粗さ
は、ＲＭＳ値で６．０〜８．ＯÅで程度であった。この
様に加熱・加圧成形の前後で表面状態に変化は見られな
かった。In this manner, a mold for an optical element according to the embodiment of the present invention was manufactured. The prepared mold is
Each of them was heated to 700 ° C. in vacuum, and various optical glasses were molded under pressure, and the surface roughness before and after the molding was observed with an optical surface roughness meter and a scanning probe microscope. In addition, regarding the mold in the embodiment of the present invention, the surface roughness before molding has an RMS value of 6.0 to 8.0. It was OÅ. The surface roughness of the optical glass after heating and pressure molding is 6.0 to 8.0 as an RMS value. It was about OÅ. As described above, no change was observed in the surface state before and after the heat and pressure molding.

【００１２】ところで、比較例として、同一形状のタン
グステンカーバイド（ＷＣ）基体の成形面上に純度９
９．９パーセント以上の純白金の薄膜を７００Åの厚さ
になるまで形成した試料を作製した。この比較例の成形
型について、成形前の表面粗さは、ＲＭＳ値で６．５Å
程度の粗さであった。そして、光学ガラスを加熱・加圧
成形した後の表面粗さは、ＲＭＳ値で３３〜３８Å程度
の粗れが生じた。Incidentally, as a comparative example, a tungsten carbide (WC) substrate having the same shape has a purity of 9% on a molding surface.
A sample was prepared in which a thin film of pure platinum of 9.9% or more was formed to a thickness of 700 °. Regarding the mold of this comparative example, the surface roughness before molding was 6.5% in RMS value.
It was of a degree of roughness. Then, the surface roughness of the optical glass after the heat and pressure molding was about 33 to 38 ° in RMS value.

【００１３】このように、タングステンカーバイドを基
体として純白金の薄膜を成膜した成形型は、加熱・加圧
成形後に粗れが大きくなってしまった。それに対して、
本発明の実施の形態である成形型は、その成形面の粗れ
の変化が無く、加熱・加圧成形を重ねて行っても粗さが
大きくならない。以上の結果を表１にまとめて示した。[0013] As described above, the mold in which a pure platinum thin film is formed using tungsten carbide as a substrate has a large roughness after heating and pressing. On the other hand,
In the molding die according to the embodiment of the present invention, there is no change in the roughness of the molding surface, and the roughness does not increase even if the heating and pressure molding is performed repeatedly. The above results are summarized in Table 1.

【００１４】[0014]

【表１】 [Table 1]

【００１５】一方、走査型プローブ顕微鏡で、本発明の
実施の形態における成形型と比較例で挙げた成形型とを
観察した結果、タングステンカーバイドを基体とする成
形型では部分的にガラスとの反応が見られたが、本発明
の実施の形態である成形型については、ガラスとの反応
は皆無であった。また、以上の本発明の実施の形態の他
に、石英（ＳｉＯ2 ）で形成された基体の成形面に、６
０重量パーセント以上の白金と、ロージウム（Ｒｈ）、
イリジウム（Ｉｒ）、金（Ａｕ）、タングステン（Ｗ）
および炭素（Ｃ）とを含んだ貴金属合金の薄膜を形成し
た成形型でも、光学ガラスの加熱・加圧加工時に成形面
の粗さがほとんど大きくならなかった。On the other hand, as a result of observing the mold in the embodiment of the present invention and the mold described in the comparative example with a scanning probe microscope, the mold with tungsten carbide as a base partially reacted with glass. However, there was no reaction with the glass in the mold according to the embodiment of the present invention. Further, in addition to the above-described embodiment of the present invention, the molding surface of the substrate made of quartz (SiO 2 )
0% by weight or more of platinum, rhodium (Rh),
Iridium (Ir), gold (Au), tungsten (W)
Also, in the molding die formed with a thin film of a noble metal alloy containing carbon and carbon (C), the roughness of the molding surface hardly increased during the heating and pressing of the optical glass.

【００１６】また、光学ガラスの加熱・加圧加工時で、
光学ガラスと成形型との反応も見られなかった。この様
に、石英（ＳｉＯ2 ）で形成された基体の成形面に、６
０重量パーセント以上の白金と、ロージウム（Ｒｈ）、
イリジウム（ｌｒ）、金（Ａｕ）、タングステン（Ｗ）
および炭素（Ｃ）とを含んだ貴金属合金の薄膜を形成し
た成形型でおこなうことによっても、同様な効果が得ら
れる。Also, when heating and pressing the optical glass,
No reaction between the optical glass and the mold was observed. In this manner, the molding surface of the substrate made of quartz (SiO 2 )
0% by weight or more of platinum, rhodium (Rh),
Iridium (lr), gold (Au), tungsten (W)
A similar effect can be obtained by using a mold having a thin film of a noble metal alloy containing carbon and carbon (C).

【００１７】[0017]

【発明の効果】本発明による光学素子成形型は、貴金属
薄膜との化学的反応の少ない石英（ＳｉＯ2 ）を母材と
することで貴金属薄膜との間に生じる拡散に伴う膜質の
変化を防止する。これにより、ガラスとの化学的な反応
は抑えられ、加熱に起因する表面粗れのない成形面によ
る高精度な光学素子のプレス成形と型の長寿命化が可能
となる。The optical element molding die according to the present invention uses quartz (SiO 2 ), which has little chemical reaction with the noble metal thin film, as a base material, thereby preventing a change in film quality due to diffusion occurring between the noble metal thin film and the noble metal thin film. I do. Accordingly, chemical reaction with glass is suppressed, and high-precision press-molding of an optical element using a molded surface free from surface roughness due to heating and extension of the mold life can be achieved.

【図面の簡単な説明】[Brief description of the drawings]

【図１】：本発明の実施の形態の成形型の断面概念図で
ある。FIG. 1 is a conceptual sectional view of a molding die according to an embodiment of the present invention.

【符号の説明】[Explanation of symbols]

１・・・基体 ２・・・貴金届薄膜 Ａ・・・外径 Ｂ・・・厚さ Ｒ・・・凹面曲率半径 DESCRIPTION OF SYMBOLS 1 ... Substrate 2 ... Precious gold thin film A ... Outer diameter B ... Thickness R ... Concave curvature radius

Claims (3)

【特許請求の範囲】[Claims] 【請求項１】 石英で形成され、精密に加エされた成形
面を有した基体と、前記基体上に設けられ、貴金属で形
成された表面層と備えたことを特徴とする光学素子の成
形型1. A molding of an optical element, comprising: a base formed of quartz and having a precisely processed forming surface; and a surface layer provided on the base and formed of a noble metal. Type 【請求項２】前記表面層は、純度９９．９重量パーセン
ト以上の純白金で形成された薄膜であることを特徴とす
る請求項１の光学素子の成形型2. A mold according to claim 1, wherein said surface layer is a thin film formed of pure platinum having a purity of 99.9% by weight or more. 【請求項３】前記表面層は、６０重量パーセントの白金
と、ロージウム、イリジウム、金、タングステンおよび
炭素のうちすくなくとも１種以上の貴金属からなる貴金
属合金で形成された薄膜であることを特徴とする請求項
１の光学素子の成形型3. The method according to claim 1, wherein the surface layer is a thin film formed of 60% by weight of platinum and a noble metal alloy made of at least one noble metal of rhodium, iridium, gold, tungsten and carbon. A mold for the optical element according to claim 1.
JP8187383A 1996-07-17 1996-07-17 Forming die of optical element Pending JPH1029821A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8187383A JPH1029821A (en) 1996-07-17 1996-07-17 Forming die of optical element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8187383A JPH1029821A (en) 1996-07-17 1996-07-17 Forming die of optical element

Publications (1)

Publication Number Publication Date
JPH1029821A true JPH1029821A (en) 1998-02-03

Family

ID=16205061

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8187383A Pending JPH1029821A (en) 1996-07-17 1996-07-17 Forming die of optical element

Country Status (1)

Country Link
JP (1) JPH1029821A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1094104C (en) * 1997-01-23 2002-11-13 洋马农机株式会社 Mobile agricultural machine

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1094104C (en) * 1997-01-23 2002-11-13 洋马农机株式会社 Mobile agricultural machine

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