JPH10286761A5 - - Google Patents

Info

Publication number
JPH10286761A5
JPH10286761A5 JP1997110150A JP11015097A JPH10286761A5 JP H10286761 A5 JPH10286761 A5 JP H10286761A5 JP 1997110150 A JP1997110150 A JP 1997110150A JP 11015097 A JP11015097 A JP 11015097A JP H10286761 A5 JPH10286761 A5 JP H10286761A5
Authority
JP
Japan
Prior art keywords
frame body
frame
pusher
base
transferring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997110150A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10286761A (ja
JP3902830B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP11015097A priority Critical patent/JP3902830B2/ja
Priority claimed from JP11015097A external-priority patent/JP3902830B2/ja
Publication of JPH10286761A publication Critical patent/JPH10286761A/ja
Publication of JPH10286761A5 publication Critical patent/JPH10286761A5/ja
Application granted granted Critical
Publication of JP3902830B2 publication Critical patent/JP3902830B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP11015097A 1997-04-11 1997-04-11 基板の研磨装置 Expired - Fee Related JP3902830B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11015097A JP3902830B2 (ja) 1997-04-11 1997-04-11 基板の研磨装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11015097A JP3902830B2 (ja) 1997-04-11 1997-04-11 基板の研磨装置

Publications (3)

Publication Number Publication Date
JPH10286761A JPH10286761A (ja) 1998-10-27
JPH10286761A5 true JPH10286761A5 (enExample) 2004-12-16
JP3902830B2 JP3902830B2 (ja) 2007-04-11

Family

ID=14528327

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11015097A Expired - Fee Related JP3902830B2 (ja) 1997-04-11 1997-04-11 基板の研磨装置

Country Status (1)

Country Link
JP (1) JP3902830B2 (enExample)

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