JPH10284971A - Vibrator and its production - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a vibrator with a small vibrating deviation after adjustment by providing a shield electrode in the outer surface part of a container opposed to the vibration electrode of a vibration plate, forming an opening part in a container part having the shield electrode, executing adjustment for the vibration electrode part with the opening and covering the opening part by means of a shield plate. SOLUTION: The shield electrode 6 is provided on one surface of the outer part of an upper lid 1 which is opposed to the vibration electrode 5 at the front surface side of the vibration plate 4. Then, the opening part 7 is formed in the upper lid 1 part. A vibration adjusting electrode 10 which is formed by vapor-depositing or sputtering is formed in the vibration electrode 5 with the opening part 7. Then, the opening part 7 is covered by the shield plate 8 so as to be fixed by a conductive adhesive resin, etc. The vibration output is measured, the vibration electrode 5 is provided with the vibration adjusting electrode 10 so as to adjust a vibration frequency before covering the opening part 7 by the shield plate 8 so that the frequency is easily adjusted.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibrator used for various electronic devices and a method for manufacturing the same.

[0002]

2. Description of the Related Art A vibrator of this type is used as an oscillation device in electronic equipment, and its structure is such that a vibrating plate is provided in a container.

[0003]

In the above conventional example, the adjustment of the vibration frequency has been performed by providing a vibration adjusting electrode on the vibration electrode of the diaphragm.

However, when the adjusted diaphragm is stored in a container, there is a problem that the vibration frequency is largely shifted due to a capacity formed between the diaphragm and the container.

Accordingly, an object of the present invention is to provide a vibrator having a small vibration frequency deviation after adjustment.

[0006]

According to the present invention, a shield electrode is provided on an outer surface of a container facing a vibrating electrode of the vibrating plate, and the container is provided with the shield electrode. An opening is formed and this opening is covered with a shield plate, and the frequency can be easily adjusted by adjusting the vibrating electrode portion through the opening of the container. The opening to be covered is formed on the shield electrode surface of the container.Therefore, even if the shield plate is attached, the capacitance between the diaphragm and the diaphragm does not change significantly, the vibration frequency deviation after adjustment is small, and the shield plate If the opening is covered, an electromagnetic shield can be achieved by the shield electrode and the shield plate around the opening.

[0007]

BEST MODE FOR CARRYING OUT THE INVENTION First, the invention of claim 1 comprises a container,
A container provided with a vibration plate housed in the container and a vibration electrode provided on the vibration plate, a shield electrode provided on an outer surface portion of the container facing the vibration electrode of the vibration plate, and a container provided with the shield electrode An opening is formed in a portion, and this opening is covered with a shield plate.Frequency adjustment can be easily performed by adjusting the vibrating electrode portion through the opening of the container, and after the adjustment, the shielding is performed. The opening covered by the plate is formed on the shield electrode surface of the container.Therefore, the capacitance between the diaphragm and the diaphragm does not change significantly even when the shield plate is attached, the vibration frequency shift after adjustment is small, and the shield If the opening is covered with a plate, electromagnetic shielding can be achieved by the shield electrode and the shield plate around the opening.

According to a second aspect of the present invention, a vibration adjusting electrode is provided on the vibration electrode portion facing the opening of the container.
The frequency can be easily adjusted by providing a vibration adjusting electrode on the vibration electrode section through the opening.

Further, the invention according to claim 3 is the vibrator according to claim 1 or 2, wherein the opening of the container has a shape whose diameter becomes smaller toward the vibration electrode. When formed, the particles for the electrode for vibration adjustment are less likely to scatter outside the diaphragm, and thus the frequency adjustment accuracy is high.

According to a fourth aspect of the present invention, there is provided the vibrator according to any one of the first to third aspects, wherein an identification symbol is provided on an outer surface of the shield plate, wherein the identification mark is formed on the outer surface of the shield plate. The symbol allows the characteristics of the vibrator to be easily determined.

According to a fifth aspect of the present invention, a projection is formed on a shield plate portion corresponding to the outer periphery of the opening of the container.
The projection of the shield plate allows the shield plate to be easily and reliably mounted on the opening of the container.

According to a sixth aspect of the present invention, there is provided a container comprising: a container; a vibrating plate housed in the container; and a vibrating electrode provided on the vibrating plate, and an outer surface portion of the vibrating plate facing the vibrating electrode. In a method of manufacturing a vibrator in which a shield electrode is provided and an opening is formed in a container portion where the shield electrode is provided, and the opening is covered with a shield plate, before the opening is covered with a shield plate, This is a method for manufacturing a vibrator in which a vibration adjusting electrode is provided on a vibrating electrode through an opening, and the frequency can be easily adjusted.

The invention according to claim 7 is the method for manufacturing a vibrator according to claim 5, wherein the vibration adjusting electrode is formed together with the shield electrode of the container by vapor deposition or sputtering. The step of forming the vibration adjusting electrode can be performed in the same step, and the productivity is high.

The invention according to claim 8 is the method for manufacturing a vibrator according to claim 6, wherein the opening of the container is reduced in diameter toward the vibrating electrode, wherein the vibration adjusting electrode is formed by vapor deposition or sputtering. In doing so, the particles are less likely to scatter outside, so that the frequency adjustment accuracy is high.

According to a ninth aspect of the present invention, a projection is formed on a shield plate portion corresponding to the outer periphery of the opening of the container, and an identification symbol is formed on the outer surface of the shield plate by laser irradiation. The method for manufacturing a vibrator according to any one of the above, wherein when forming the identification symbol by laser irradiation on the shield plate, the projections increase the strength and enhance the heat radiation effect, and thus the deterioration of the shield plate occurs. It becomes difficult.

According to a tenth aspect of the present invention, after the vibration frequency of the diaphragm is measured, an identification symbol representing a substantial vibration frequency is provided on the outer surface of the shield plate. A method of manufacturing a vibrator, wherein an identification symbol representing a substantial vibration frequency can be easily and appropriately provided on an outer surface of a shield plate.

An embodiment of the present invention will be described below with reference to the accompanying drawings. As shown in FIGS. 1 and 2, the vibrator of the present embodiment includes a container 3 having a quartz upper cover 1 and a lower cover 2, a quartz vibrating plate 4 housed in the container 3, and a vibrating plate 4 and a vibrating electrode 5 provided on the front and back surfaces. Further, a shield electrode 6 is provided on one surface of the outer surface of the upper cover 1 facing the vibration electrode 5 on the front surface side of the vibration plate 4, and an opening 7 is formed in the upper cover 1 provided with the shield electrode 6. The opening 7 is covered with a metal shield plate 8 and fixed with a conductive adhesive or the like.

The vibrating plate 4 has a joining portion 4a in which the outer peripheral portion is integrated with the upper and lower lids 1 and 2 by direct joining of quartz crystals, and an inner portion serves as a tongue-shaped vibrating portion 4b. The vibrating electrode 4 is provided on the vibrating part 4b. One of the front and rear vibrating electrodes 5 is electrically connected to the external electrode 9a, and the other is electrically connected to the external electrode 9b.
Vibration output is taken out through these external electrodes 9a and 9b.

The vibration output is measured, and a vibration adjusting electrode 10 is provided on the vibration electrode 5 through the opening 7 before the opening 7 is covered with the shield plate 8.
The vibration frequency is adjusted, and the frequency can be easily adjusted.

The vibration adjusting electrode 10 is
The shield electrode 6 is formed together with the shield electrode 6 by vapor deposition or sputtering, and the step of forming the shield electrode 6 and the step of forming the vibration adjusting electrode 10 can be performed in the same step, resulting in high productivity.

At this time, the opening 7 of the container 3 is
When the vibration adjusting electrode 10 is formed by vapor deposition or sputtering, the particles are less likely to scatter outside the vibrating electrode 5, and the frequency adjustment accuracy is high.

Further, the amount of adhesion of the vibration adjusting electrode 10 is small, and the amount of adhesion of the shield electrode 6 is also small. However, even with a small amount, the effect as the shield electrode 6 is sufficiently obtained.

When the vibration frequency adjustment is completed, the opening 7 is covered with the shield plate 8. After adjusting the vibration frequency of the vibration plate 4, an identification symbol representing a substantial vibration frequency is provided on the outer surface of the shield plate 8.

When the identification symbol is formed on the outer surface of the shield plate 8 by laser irradiation, it is preferable to form a projection on the shield plate 8 corresponding to the outer periphery of the opening 7 of the container 3. When the identification symbol is formed on the plate 8 by laser irradiation, the projections increase the strength and enhance the heat radiation effect, and thus the deterioration of the shield plate 8 is less likely to occur.

Further, the projections of the shield plate 8 enable the shield plate 8 to be easily and securely mounted on the opening 7 of the container 3.

[0026]

As described above, the present invention comprises a container, a vibrating plate housed in the container, and a vibrating electrode provided on the vibrating plate. A shield electrode is provided on the outer surface, an opening is formed in the container portion where the shield electrode is provided, and the opening is covered with a shield plate. Adjustment to the vibration electrode portion is performed through the opening of the container. The frequency adjustment can be easily performed by performing the above, and the opening covered with the shield plate after the adjustment is formed on the shield electrode surface of the container. If the vibration frequency shift after adjustment does not change much and the opening is covered with a shield plate, the electromagnetic shield can be achieved by the shield electrode and the shield plate on the outer periphery of the opening.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view of one embodiment of the present invention.

FIG. 2 is an exploded perspective view of the same.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 3 Container 4 Vibration plate 5 Vibration electrode 6 Shield electrode 7 Opening 8 Shield plate 10 Vibration adjustment electrode

Claims (10)

[Claims] 1. A container, a vibrating plate housed in the container, and a vibrating electrode provided on the vibrating plate, wherein a shield electrode is provided on an outer surface portion of the container facing the vibrating electrode of the vibrating plate. A vibrator in which an opening is formed in a container portion provided with the shield electrode, and the opening is covered with a shield plate. 2. The vibrator according to claim 1, wherein a vibration adjusting electrode is provided on the vibrating electrode portion facing the opening of the container. 3. The vibrator according to claim 1, wherein the opening of the container has a shape whose diameter decreases toward the vibrating electrode. 4. The vibrator according to claim 1, wherein an identification symbol is provided on an outer surface of the shield plate. 5. The vibrator according to claim 4, wherein a projection is formed on a shield plate portion corresponding to an outer periphery of an opening of the container. 6. A container, a vibrating plate accommodated in the container, and a vibrating electrode provided on the vibrating plate, wherein a shield electrode is provided on an outer surface portion of the container facing the vibrating electrode of the vibrating plate. In the method of manufacturing a vibrator in which an opening is formed in a container portion provided with the shield electrode and the opening is covered with a shield plate, vibrations may be generated through the opening before the opening is covered with the shield plate. A method for manufacturing a vibrator in which a vibration adjusting electrode is provided on an electrode. 7. The method for manufacturing a vibrator according to claim 5, wherein the vibration adjusting electrode is formed together with the shield electrode of the container by vapor deposition or sputtering. 8. The method of manufacturing a vibrator according to claim 6, wherein the diameter of the opening of the container is reduced toward the vibrating electrode. 9. A projection is formed on a shield plate portion corresponding to the outer periphery of the opening of the container, and an identification symbol is formed on the outer surface of the shield plate by laser irradiation.
The method for manufacturing a vibrator according to any one of the above. 10. The method of manufacturing a vibrator according to claim 6, wherein an identification symbol representing a substantial vibration frequency is provided on an outer surface of the shield plate after measuring the vibration frequency of the vibration plate.