JPH10283968A - Beam line slit device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent a beam line slit device from imposing limitations on the layout of a beam line by reducing the space which the slit device occupies transversely. SOLUTION: In a container 10 forming a part of a beam line, first and second slit forming plates 11, 12 are placed in positions slightly moved in the direction of the axis of the beam line and are supported via pins 13, 14 in such a way as to freely rotate relative to the container 10. A slit adjustment mechanism 16 for adjusting slit widths by rotating the first and second slit forming plates 11, 12 through the operation of first and second control members 18A, 18B is provided on top of the container 10.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a beam line slit device which is disposed in the middle of a beam line, mainly for detecting a horizontal position of an ion beam.

[0002]

2. Description of the Related Art In many ion-applied devices, an ion beam accelerated by an accelerator is deflected by a deflector and guided to a plurality of beam lines. For example, in an ion beam analyzer that performs analysis by irradiating various samples with an ion beam, as shown in FIG. 5, an accelerator A, a lens L that converges a beam accelerated by the accelerator, and a lens L converged by the lens. A deflecting device D for deflecting the ion beam, and a number of beam lines B1, B2,... Arranged radially and having one end connected to the deflecting device D;
Are connected to the other ends of the beam lines B1, B2,..., Respectively, and adjust the deflection angle of the beam incident on the deflecting device D to adjust the deflection angles of the beam lines B1, B2,. , And irradiates the sample (target) in the target chamber connected to the beam line with a beam. Each beam line is configured by connecting in series a tubular container extending linearly in the horizontal direction and a container housing necessary devices such as a converging lens and an XY slit for beam shaping.

As described above, in an ion beam analyzer provided with a plurality of beam lines, it is necessary to adjust the beam distribution angle (deflection angle) by the deflecting device D so that the beam is correctly incident on a predetermined beam line. There is.
Therefore, beam line slit devices S1, S2,... For forming slits (X slits) for detecting the horizontal position of the beam are provided upstream of each of the beam lines B1, B2,. While detecting the horizontal position of the beam incident on the beam lines B1, B2,... By the slit device, the deflecting device D is set so that the beam is correctly incident on the center of each beam line.
The beam distribution angle is adjusted.

In a conventional ion beam analyzer, a slit device provided upstream of a beam line for detecting a horizontal position of a beam is configured as shown in FIG. In FIG. 4, reference numeral 1 denotes a container of a slit device which is connected in series to a container constituting a beam line to constitute a part of the beam line, and the container is arranged with its axis oriented in a horizontal direction. You. In the container 1, a first slit forming plate 2a and a second slit forming plate 2b formed in a rectangular shape by using a conductive material have their respective plate surfaces orthogonal to the axis of the container 1 (the axis of the beam line). Are arranged side by side on the same vertical plane.

[0005] A slit forming plate 2a,
First and second fine adjustment mechanisms 3a and 3b are attached so as to be opposed to the direction in which 2b are arranged side by side. The first and second fine adjustment mechanisms 3a and 3b have nuts rotated by knobs 3a1 and 3b1, respectively, and a threaded portion screwed to the nuts. And the resulting movable rods 3a2 and 3b2. The movable rods 3a2 and 3b2 are introduced into the container 1 in a state where the movable rods 3a2 and 3b2 penetrate the wall of the container 1 in an airtight manner, and slit forming plates 2a and 2b are fixed to the tips of the movable rods 3a2 and 3b2, respectively. The first and second fine adjustment mechanisms 3a and 3b are similar to the screw mechanism employed in the micrometer. In this example, the first and second fine adjustment mechanisms 3a and 3b constitute a slit adjustment mechanism that adjusts the positions of the first and second slit forming plates 2a and 2b to adjust the width of the slit. .

In the slit device shown in FIG. 4, the movable rods 3a2 and 3b2 are rotated by rotating the knobs 3a1 and 3b1 of the first and second fine adjustment mechanisms 3a and 3b.
And the first and second slit forming plates 2
The width W of the slit formed between a and 2b is adjusted. The slit forming plates 2a and 2b are insulated from each other, and a lead wire whose one end is electrically connected to both slit forming plates 2a and 2b is led out of the container 1.

[0007]

As described above, in the conventional beam line slit device, the fine adjustment mechanisms 3a and 3b for adjusting the positions of the slit forming plates 2a and 2b are opposed to the container 1 in the horizontal direction. Since it was mounted at the position, the fine adjustment mechanism was in a state of protruding greatly from the slit device, and it was inevitable that the space occupied by the slit device in the lateral direction became large.

Since a slit for detecting the horizontal position of the beam needs to be provided at a position close to the deflecting device (upstream of the beam line), as shown in FIG. 5, the beam is distributed to provide a large number of beam lines. When trying to reduce the angle, the location of the slit device is limited in order to prevent the fine adjustment mechanisms of adjacent slit devices from interfering with each other, and the slit device cannot be optimally installed. was there. Also, if the slit devices are provided at the optimal positions of the respective beam lines, the number of beam lines is limited in order to secure the installation space for the slit devices, or it becomes difficult to perform the adjustment operation of each slit device. There was a problem.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a beam line slit device in which a slit adjustment mechanism for adjusting a position of a slit forming plate does not protrude in a lateral direction, and a space occupied in the lateral direction is reduced. It is in.

[0010]

SUMMARY OF THE INVENTION According to the present invention, a plate surface is disposed in a container constituting a part of a beam line extending in a horizontal direction with a plate surface perpendicular to an axis of the beam line and displaceable. The first and second slits are formed between each other to detect the horizontal position of the ion beam.
And a slit adjusting mechanism for adjusting the positions of the first and second slit forming plates to adjust the width of the slit.

In the present invention, the first and second slit forming plates are arranged so as to be slightly displaced from each other in the axial direction of the beam line, and are rotated in directions approaching each other and moving away from each other. Each of the portions near the upper end is supported on the container via a pin so as to move to change the width of the slit. Further, the first and second slit adjustment mechanisms are provided on the upper portion of the container so as to be operable from outside.
Of the first operating member and the first and second operating members
And a first and second displacement transmission mechanism that converts the displacement into a displacement for rotating the second slit forming plate and transmits the displacement to the first and second slit forming plates.

The slit adjusting mechanism includes, for example, first and second operating members rotatably supported by the container, and first and second operating members respectively rotated by the first and second operating members. And first and second movable rods having screw portions respectively screwed to the first and second nuts and generating linear displacement with rotation of the operating member; and The linear displacement generated in each of the first and second movable rods with the rotation of the second operation member is expressed by the first and second movable rods.
And a first and a second link mechanism for converting the rotational motion of the second slit forming plate.

[0013] The slit adjusting mechanism further includes first and second operating members rotatably supported by the container having an operating portion located outside the container and a screw portion inserted into the container. First and second nuts arranged in the container and screwed to screw portions of the first and second operation members; and first and second nuts associated with rotation of the first and second operation members. And a first and second link mechanism for converting a linear displacement generated in the nut of the first embodiment into a rotational movement of the first and second slit forming plates.

As described above, when the slit adjusting mechanism is arranged above the container, the space occupied by the slit devices in the horizontal direction can be reduced, so that interference between the slit adjusting mechanisms of the slit devices of the adjacent beam lines can be prevented. It is possible to increase the number of beam lines without causing it, and to easily cope with the case where a large number of beam lines are provided.

In the case where the number of beam lines is large, even if a slit device is provided in an upstream portion of each beam line where the space between adjacent beam lines becomes narrower, an adjusting mechanism of the slit device of the adjacent beam lines is provided. Does not interfere with each other, a slit device can always be provided at an optimum position on the upstream side of each beam line.

Further, with the above configuration, since the adjustment of each slit device can be performed at the upper part of the container, the adjustment of the slit can be easily performed.

As described above, when the slit width is adjusted by rotating the two slit forming plates, the slit formed between the two slit forming plates is a slit whose both ends in the width direction are inclined. Are not parallel slits (slits whose both ends in the width direction are parallel), but there is no problem even if the slit for detecting the horizontal position of the beam is not a parallel slit.

[0018]

1 and 2 show an example of the configuration of a slit device according to the present invention. FIG. 1 shows a state in which the slit is closed, and FIG. 2 shows a state in which the slit is almost fully opened. It shows the state where it was turned on. In these figures, reference numeral 10 denotes a container for a slit device which constitutes a part of a beam line. Connected in series. A nozzle section 10a protruding upward is formed at an upper portion of the container 10. 1 and FIG.
0 indicates an ion beam extending along the central axis of the container. A lid plate 15 is attached to a flange 10a1 formed at the upper end of the nozzle portion 10a of the container 10 to hermetically close the opening of the nozzle portion 10a.

In the container 10, first and second slit forming plates 11 and 12 are arranged so that their respective plate surfaces are perpendicular to the axis of the beam line (the axis of the container 10), and that they approach each other. The positions are slightly shifted in the axial direction of the beam line so that they do not come into contact when displaced.

The first slit forming plate 11 has a first side 11a linearly extending from one end side to the other end side in the longitudinal direction.
And approximately 2/3 of the total length on the side opposite to the first side 11a.
Is formed of a conductive metal plate having a second side 11b formed in a shape bulging outward in an arc shape, and a position closer to the second side 11b on one end side in the longitudinal direction. Is formed with a tongue-shaped projection 11c. First
The slit forming plate 11 has the second side 11b
0, the tip of the protruding portion 11c is
It is arranged in a state of being inserted into the nozzle section 10a of the No. 0.
A hole is formed at the tip of the protruding portion 11c, and a pin 13 fitted in the hole is fixed to a stopper 15a attached to a lid plate 15 that closes the opening of the nozzle 10a of the container 10,
The first slit forming plate 11 is rotatably supported with respect to the container 10.

Similarly, the second slit forming plate 12 has a first side 12a that linearly extends from one end in the longitudinal direction to the other end, and a second side on the opposite side to the first side 12a. A portion occupying almost 2/3 is formed of a conductive metal plate having a second side 12b formed in a shape bulging outward in an arc shape, and is closer to the second side 12b on one end side in the longitudinal direction. A protruding portion 12c in the shape of a tongue is formed at the bent position. The second slit forming plate 12 has a second side 12b so that the first and second slit forming plates 11 and 12 are symmetrically arranged on both sides of a vertical plane including the central axis of the container 10.
With the tip of the protrusion 12 c inserted into the nozzle 10 a of the container 10. The second slit forming plate 12 is rotatable with respect to the container 10 by fixing a pin 14 fitted in a hole formed in the projecting portion to a stopper 15 b attached to the lid plate 15. Supported.

The first slit forming plates 11 and 12 are formed by punching a conductive metal plate into the same shape. The first slit forming plates 11 and 12 are turned upside down so as to include the center axis of the container 10 with both sides reversed. What is necessary is just to arrange it symmetrically on both sides of a surface.

First and second slit forming plates 11 and 1
As a metal material constituting 2, such as titanium,
It is preferable to use a material that does not easily generate secondary electrons when ion beams collide.

First and second slit forming plates 11 and 1
2 is a fully closed position in which a part is partially overlapped as shown in FIG. 1 and a slit for passing the ion beam 100 is not formed, and a state in which the slits are separated from each other as shown in FIG. Each first side 11a and 1
It is provided so as to be able to rotate between a fully open position where a slit sufficiently larger than the diameter of the ion beam 20 is formed between the 2a. The first and second slit forming plates 11 and 12 are insulated from each other, and terminals connected to the respective slit forming plates are led out.

The cover plate 15 for closing the opening of the nozzle section 10a of the container 10 in an airtight manner is made of an insulating material.
Is provided with a slit adjustment mechanism 16. In the illustrated example, the first and second cylindrical bodies 17A and 17B respectively corresponding to the first and second slit forming plates 11 and 12 are attached by airtightly penetrating the lid plate 15, and the cylindrical body 17A is attached. The first and second operation members 18A and 18B are rotatably supported by portions of the first and second operation members 18A and 17B located outside the container. First and second cylindrical bodies 17A and 17B
Inside the first and second operating members 18A and 18B
First and second nuts are provided, and the threaded portions provided on the first and second movable rods 19A and 19B are screwed to the first and second nuts. First and second movable rods 19A and 19
B is provided so as to penetrate the axis of the first and second operation members 18A and 18B and the axis of the cylindrical bodies 17A and 17B, and the first and second operation members 18A and 18B The rotation of 18B causes the first and second movable rods 19A and 19B to be linearly displaced vertically.

First and second movable rods 19A and 19
B located inside the container 10 are pins 20A and 20A.
B, the first and second links 21A and 21B are connected to one ends of the first and second links 21A and 21B, respectively.
Is connected to upper portions of the first and second slit forming plates 11 and 12 via pins 22A and 22B, respectively.

In the example shown in FIGS. 1 and 2, by rotating the first and second operating members 18A and 18B, respectively, the first and second movable rods 19A and 19B are displaced vertically. With the displacement of the movable rod, the first and second slit forming plates 11 and 12 are rotated via the links 21A and 21B. In the example shown,
When the first and second operating members 18A and 18B are rotated counterclockwise, the first and second movable rods 19A and 19B are displaced downward, and the first and second slit forming plates 11 and 12 are displaced. Rotate in the direction in which the first and second operation members 18A and 18A are separated from each other.
8B is rotated clockwise, the first and second movable rods 19A and 19B are displaced upward and the first and second movable rods 19A and 19B are displaced upward.
Are rotated to the fully closed position shown in FIG. 1 in a direction in which the slit forming plates 11 and 12 approach each other.

In the example shown in FIGS. 1 and 2, the cylindrical members 17A and 17B, the operating members 18A and 18B, the nuts provided in the cylindrical members 17A and 17B, and the first and second cylindrical members are provided.
The mechanism portion composed of the movable rods 19A and 19B of
This is the same mechanism as that used in ordinary micrometers.

In the illustrated example, like the micrometer,
Scales 18a and 18b arranged in the circumferential direction are respectively engraved on the outer periphery of the lower portion of the first and second operation members 18A and 18B, and the outer periphery of the portion of the cylindrical bodies 17A and 17B located outside the container is axially formed on the outer periphery. Lined scales 17a and 17b
Are marked, and from these scales, the operating member 18A
And the first sides 11a and 12b of the first and second slit forming plates 11 and 12 for each rotation angle position of
The position of the predetermined portion (a, for example, the center portion) with respect to the origin can be accurately read. In this case, for example, a fixed point on a vertical plane including the central axis of the container 10 is used as the origin.

In the illustrated example, first and second operating members 18A and 18B rotatably supported on the container are provided.
First and second nuts (not shown) provided in the cylindrical bodies 17A and 17B and rotated by the first and second operating members, respectively, and screwed to the first and second nuts, respectively. First and second movable rods 19A and 19B having a set screw portion and generating a linear displacement with the rotation of the operation member, links 21A and 21B, and pins 20A and 22.
A, 20B, and 22B, and the first and second operating members 18A and 18B rotate with the rotation of the first and second operating members 18A and 18B.
The first and second link mechanisms for converting the linear displacements generated in the movable rods 19A and 19B into the rotational movements of the first and second slit forming plates 11 and 12, respectively, constitute a slit adjusting mechanism 16. I have. Of these mechanisms, a nut provided in the cylindrical bodies 17A and 17B;
First and second movable rods 19A and 19B, links 21A and 21B, and pins 20A, 22A and 20B, 2
2B, the displacement of the first and second operating members 18A and 18B is controlled by the first and second link mechanisms.
The first and second displacement transmission mechanisms are configured to convert into displacements for rotating the first and second slit forming plates 11 and 12 and to transmit the displacements to the first and second slit forming plates.

When the horizontal position of the beam is detected by using the above-described slit device, the first and second positions are set with the width of the slit sufficiently larger than the diameter of the beam 100 as shown in FIG. The second operation members 18A and 18B are individually rotated clockwise to rotate the slit forming plates 11 and 12 in directions approaching each other. Slit forming plate 11
From the change in the potential of the slit forming plates 11 and 12
Have reached the limit positions where they contact the beam, respectively. When it is detected that the slit forming plates 11 and 12 have reached the limit position where they come into contact with the beam, the operating member 18
The scales corresponding to the indices 18a and 18b of A and 18B are read, and it is detected from the difference between the respective scales to which side in the horizontal direction the beam is shifted.

FIG. 3 shows a modified example of the slit adjusting mechanism 16. In this example, the first adjusting means 16 is attached with the cover plate 15 for closing the nozzle portion provided in the container 10 penetrating therethrough.
And second cylindrical bodies 17A 'and 17B'
And the second operation members 18A 'and 18B' are rotatably supported. The first and second operating members 18A 'and 18B' include operating portions 18A1 'and 18B1' located outside the container 10, and screw portions 18A2 'and 1 inserted into the container.
8B2 ', and first and second nuts 19A' and 19B 'are screwed into the threaded portions 18A2' and 18B2 ', respectively. The nuts 19A 'and 19B' have laterally projecting projections 19a 'and 19b', respectively. One end of each of the links 21A and 21B is connected to one of the pins 20A and 20B by these projections 19a 'and 19b'.
B are connected. The other ends of the links 21A and 21B are connected to the upper portions of the first and second slit forming plates 11 and 12 via pins 22A and 22B, respectively.

In this example, the operating members 18A 'and 18B
′ By rotating the nuts 19A ′ and 19B ′
Is displaced up and down, the displacement of the nuts 19A 'and 19B' is transmitted to the first and second slit forming plates 11 and 12 via the links 21A and 21B, and these slit forming plates are rotated.

In the example shown in FIG. 3, the first and second operation members rotatably supported by the container having an operation portion located outside the container 10 and a screw portion inserted into the container are provided. Member 1
8A 'and 18B', first and second nuts 19A 'and 19B' arranged in the container and screwed to the screw portions of the first and second operating members, links 21A and 21B, and pins 20A. , 21A and 20B, 21B, and the first and second operating members are rotated with the rotation of the first and second operating members.
The first and second link mechanisms for converting the linear displacement generated in the nut into the rotation of the first and second slit forming plates constitute a slit adjusting mechanism 16.

[0035]

As described above, according to the present invention, since the slit adjusting mechanism is arranged on the upper portion of the container, the interference between the slit adjusting mechanisms of the slit devices of the adjacent beam lines does not occur, so that the beam line can be adjusted. This is advantageous in that it is possible to easily cope with the case where a large number of beam lines are provided.

Further, according to the present invention, when the number of beam lines is large, the space between adjacent beam lines becomes narrower even if a slit device is provided at the upstream side of each beam line. Since the adjusting mechanism of the slit device does not interfere with the slit device, the slit device can always be provided at the optimum position on the upstream side of each beam line.

Further, according to the present invention, since the adjustment of each slit device can be performed in the upper portion of the container having a sufficient space, the slit can be easily adjusted.

[Brief description of the drawings]

FIG. 1 is a sectional view showing a state in which a slit forming plate is closed in a configuration example of a slit device according to the present invention.

FIG. 2 is a cross-sectional view showing a state in which a slit forming plate is opened in a configuration example of a slit device according to the present invention.

FIG. 3 is an enlarged sectional view of a main part showing a modification of the slit adjustment mechanism used in the present invention.

FIG. 4 is a cross-sectional view showing a configuration of a conventional beam line slit device.

FIG. 5 is a plan view schematically showing a configuration example of an ion beam analyzer as an example of an ion application device to which the slit device of the present invention is applied.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Container 11 1st slit formation plate 12 2nd slit formation plate 13, 14 pin 16 Slit adjustment mechanism 17A and 17B 1st and 2nd cylindrical body 18A and 18B 1st and 2nd operation member 19A and 19B First and second movable rods 21A, 21B Link

Claims (1)

[Claims] 1. An ion beam, which is disposed in a container constituting a part of a beam line extending in a horizontal direction, with its plate surface orthogonal to the axis of the beam line and displaceable, and in a horizontal direction of the ion beam. First and second slit forming plates for forming slits for detecting the positions of the first and second slits, and adjusting the width of the slits by adjusting the positions of the first and second slit forming plates. A beam line slit device having a mechanism, wherein the first and second slit forming plates are arranged in a state where they are slightly displaced in an axial direction of the beam line, and directions in which the directions approach each other and separate from each other. A portion near each upper end is supported on the container via a pin so as to rotate and change the width of the slit, and the slit adjusting mechanism is provided on an upper portion of the container. The first and second operating members provided so as to be operable from and the displacements of the first and second operating members are converted into displacements for rotating the first and second slit forming plates, respectively. And a first and second displacement transmission mechanism for transmitting the first and second slit forming plates to the first and second slit forming plates.