JPH10282339A - Polarizer and its manufacture - Google Patents
Polarizer and its manufactureInfo
- Publication number
- JPH10282339A JPH10282339A JP10391597A JP10391597A JPH10282339A JP H10282339 A JPH10282339 A JP H10282339A JP 10391597 A JP10391597 A JP 10391597A JP 10391597 A JP10391597 A JP 10391597A JP H10282339 A JPH10282339 A JP H10282339A
- Authority
- JP
- Japan
- Prior art keywords
- polarizer
- light
- plane
- transparent
- plates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Polarising Elements (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、光源から直線偏光
を取り出す偏光子およびその製造方法に関するものであ
り、さらに詳しくは、紫外線領域において、直線偏光の
取り出し効率が高く、かつ偏光度が高く、取り出した偏
光のビーム断面積が大きく（大照射面積の）、安価に製
造できる偏光子およびその製造方法に関するものであ
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a polarizer for extracting linearly polarized light from a light source and a method for producing the same. More specifically, the present invention relates to a polarizer having a high efficiency of extracting linearly polarized light and a high degree of polarization in an ultraviolet region. The present invention relates to a polarizer that has a large beam cross-sectional area (large irradiation area) of extracted polarized light and can be manufactured at low cost, and a method for manufacturing the same.
【０００２】[0002]
【従来の技術】直線偏光を作る偏光子は、二色性を利用
したもの（商品名；ポラロイド、ダイクローム等）、複
屈折性を利用したもの（ニコルプリズム、グラン−トム
ソンプリズム、ウォラストンプリズム等）、ワイヤー格
子を用いたもの、透明体の反射を利用したもの、そし
て、交互多層膜を利用したものに分類される。2. Description of the Related Art Polarizers for producing linearly polarized light are those utilizing dichroism (trade names: polaroid, dichrome, etc.) and those utilizing birefringence (Nicole prism, Gran-Thomson prism, Wollaston prism). Etc.), those using a wire grid, those using the reflection of a transparent body, and those using an alternate multilayer film.
【０００３】前述の二色性を利用した偏光子は、紫外域
において、光の吸収が始まり、偏光度、効率が低下す
る。また、複屈折性を利用した偏光子は、使用されてい
る光学材料が高価であり、大きな照射面積の偏光を得よ
うとすると、コスト高になる。また、ワイヤー格子を用
いた偏光子では、現在のところ、遠赤外線より長波長域
に限られている。[0003] In the polarizer utilizing the above-mentioned dichroism, light absorption starts in the ultraviolet region, and the degree of polarization and efficiency are reduced. Moreover, the optical material used for the polarizer utilizing birefringence is expensive, and the cost becomes high if it is desired to obtain polarized light having a large irradiation area. At present, polarizers using a wire grating are limited to a wavelength region longer than far-infrared rays.
【０００４】また、透明体の反射を利用した偏光子で
は、以下に詳述するように、反射型は効率が低いため実
際に用いられておらず、透過型に利点があるが、この透
過型偏光子には、大面積の偏光ビームを得ようとする
と、全体が大型化してしまうという問題がある。In a polarizer utilizing reflection of a transparent body, as will be described in detail below, the reflection type is not actually used because of its low efficiency, and the transmission type has an advantage. The polarizer has a problem that the size of the entire polarizer increases when an attempt is made to obtain a large-area polarized beam.
【０００５】周知のように、透明な等方媒質の表面に入
射する光には、入射光の波長に対してその透明体の媒質
固有のブルースター角（偏光角）が存在する。すなわ
ち、前記媒質の表面からの反射光が完全な直線偏光とな
るような入射角が存在する。この場合、入射面に垂直な
振動面をもつ偏光成分（ｓ成分）と平行に振動する偏光
成分（ｐ成分）の反射率が異なる。したがって、透明体
の反射を利用した偏光子では、その透明体の表面を光源
に対して前記ブルースター角に置くことにより、反射光
あるいは透過光が偏光される。このｓ成分の反射を利用
した反射型の偏光子は、反射率が小さいために効率が低
く、実際には用いられていない。As is well known, light incident on the surface of a transparent isotropic medium has a Brewster angle (polarization angle) inherent to the medium of the transparent body with respect to the wavelength of the incident light. That is, there is an incident angle at which reflected light from the surface of the medium becomes perfect linearly polarized light. In this case, the reflectance of the polarized light component (p component) vibrating in parallel with the polarized light component (s component) having the vibration plane perpendicular to the incident surface is different. Therefore, in a polarizer utilizing reflection of a transparent body, reflected light or transmitted light is polarized by placing the surface of the transparent body at the Brewster's angle with respect to a light source. The reflection type polarizer using the reflection of the s component has low efficiency because of its low reflectance, and is not actually used.
【０００６】同様な原理を用い反射率を高める方法とし
て、高屈折率物質と低屈折率物質の薄膜からなる交互多
層膜を利用する方法がある。この交互多層膜を用いれ
ば、ｓ偏光の反射率は向上する。しかし、この方法で
は、大面積の交互多層膜を作ることは困難である。As a method of increasing the reflectance using the same principle, there is a method of using an alternating multilayer film composed of thin films of a high-refractive-index substance and a low-refractive-index substance. If this alternate multilayer film is used, the reflectance of s-polarized light is improved. However, in this method, it is difficult to form a large-area alternating multilayer film.
【０００７】これに対して、図１に示すように、多数の
平行平面板（図では簡略化のために２枚の場合を示す）
ａにおいて、隣り合う平行平面板同士を重ね合せること
なく、その間隔を十分に大きくとって（図１では間隔が
不十分であるが、説明上近づけてある。）、この平行平
面板ａに入射する光ｂの入射角度θi がブルースター角
を満足するように、配置してやれば、透過光を利用した
偏光子が得られる。この偏光子は、pile of platesと呼
ばれており、この偏光子を用いれば、偏光度の高いｐ偏
光が得られる。On the other hand, as shown in FIG. 1, a large number of parallel flat plates (two plates are shown for simplification).
In FIG. 1A, the distance between adjacent parallel plane plates is set to be sufficiently large without overlapping each other (the distance is insufficient in FIG. 1, but is close to the explanation), and the parallel plane plates a are incident on the parallel plane plates a. If the light b is arranged so that the incident angle θi of the light b satisfies the Brewster angle, a polarizer utilizing transmitted light can be obtained. This polarizer is called a pile of plates, and if this polarizer is used, p-polarized light having a high degree of polarization can be obtained.
【０００８】しかし、この場合、図１に示すように、各
平行平面板において、後方に反射されたｓ偏光（図中、
丸で囲んだｓで表示）が、前に置かれた平行平面板でさ
らに反射され、もとの入射光ｂと同じ方向に進むと、偏
光度が低下する。このことは、図中の透過光d(s)におい
て典型的である。このd(s)は２枚目の平行平面板の表面
で反射されたｓ偏光の光が１枚目の平行平面板の裏面で
反射され、さらに２枚目の平行平面板を通過した透過光
ｄの光路を示した例である。前述の偏光度の低下を防ぐ
ためには、隣り合う平行平面板の間隔を十分とるように
配置し、ｓ偏光の光を偏光子の外に出すようにしなけれ
ばならない（このように配置したものが上述のpile of
platesといわれているものである）。なお、図１におい
て、丸囲みのp は、ｐ偏光を示す。また、図２では、説
明を簡素化し、理解を容易にするために、平行平面板ａ
を２枚とした場合における入射光θi の反射の様子を示
している。However, in this case, as shown in FIG. 1, in each parallel plane plate, s-polarized light reflected backward (in the figure,
(Indicated by a circled s) is further reflected by the parallel plane plate placed in front, and travels in the same direction as the original incident light b, the degree of polarization decreases. This is typical for the transmitted light d (s) in the figure. This d (s) is a transmitted light in which the s-polarized light reflected on the surface of the second parallel flat plate is reflected on the back surface of the first parallel flat plate and further passed through the second parallel flat plate. It is an example showing the optical path of d. In order to prevent the above-mentioned decrease in the degree of polarization, it is necessary to arrange the parallel plane plates adjacent to each other so as to have a sufficient space therebetween and to emit the s-polarized light out of the polarizer. The pile of above
It is called plates). In FIG. 1, p in a circle indicates p-polarized light. Further, in FIG. 2, in order to simplify the explanation and facilitate understanding,
Shows the state of reflection of the incident light θi when there are two sheets.
【０００９】前述のような構造が必要な透過型の偏光子
において、大面積の偏光ビームを得ようとすると、大面
積の平行平面板を用いることになり、それに伴って、当
然、隣り合う平行平板間の間隔を大きくとらなければな
らず、その結果、偏光子の全長は大変長いものになる。In order to obtain a large-area polarized beam in a transmission-type polarizer requiring the above-described structure, a large-area parallel flat plate is used. The spacing between the plates must be large, resulting in a very long overall polarizer.
【００１０】[0010]
【発明が解決しようとする課題】本発明は、前記事情に
鑑みてなされたもので、高効率で、偏光ビームの断面積
が大きく（大照射面積）、紫外域で用いることができ、
コンパクトで、低コストで安価な偏光子およびその製造
方法を提供することを課題とするものである。SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and has high efficiency, a large cross-sectional area of a polarized beam (large irradiation area), and can be used in an ultraviolet region.
It is an object of the present invention to provide a compact, low-cost and inexpensive polarizer and a method for manufacturing the same.
【００１１】[0011]
【課題を解決するための手段】本発明では、図２に示す
ように、使用する波長域で透明かつ等方な媒質で作られ
た平行平面板ａを複数枚用い、各々の平行平面板ａを間
隔を空けずに重ね合せた構造とすることにより、偏光の
反射光ｃを増大させる偏光子を構成し、この偏光子を該
偏光子への光の入射角θi が該偏光子の媒質に固有なブ
ルースター角となるように置く。これにより、該偏光子
に対するｐ偏光の反射率（以後、反射率とは、注目して
いる偏りを持つ偏光入射光ｂの光量に対する、偏光子全
体で反射された注目している偏りを持った偏光反射光ｃ
の光量との比の百分率と定義することにする）は、零に
近いが、ｓ偏光に対する反射率は向上し、大光量の直線
偏光の反射光を利用することが出来る。すなわち、従
来、実用化されていなかった透明媒質を用いた反射型の
偏光子において、実用に供することのできる高い性能に
改良することが、本発明によって、始めて可能になる。According to the present invention, as shown in FIG. 2, a plurality of parallel flat plates a made of a transparent and isotropic medium in a wavelength range to be used are used. Are superposed without any space therebetween to form a polarizer that increases the reflected light c of the polarized light, and the angle of incidence θi of light on the polarizer is changed to the medium of the polarizer. Place so that it has a unique Brewster's angle. As a result, the reflectance of the p-polarized light with respect to the polarizer (hereinafter, the reflectance refers to the polarization of interest reflected by the entire polarizer with respect to the amount of polarized incident light b having the polarization of interest. Polarized reflected light c
Is defined as a percentage of the ratio to the amount of light), but the reflectance for s-polarized light is improved, and a large amount of reflected light of linearly polarized light can be used. That is, the present invention makes it possible for the first time to improve the performance of a reflective polarizer using a transparent medium, which has not been put into practical use, to a high level that can be put to practical use.
【００１２】なお、該偏光子では、該偏光子を構成する
平行平面板の多くの面で入射光が反射されるので、反射
光のビームは入射方向に本質的に拡がり、隣接平行平面
板間に避け難く生じる間隙に比例してさらに同じ方向に
拡がる。したがって、実用に当たっては、各平行平面板
間の間隙を極力狭めて、ビームサイズの拡がりを抑制す
る必要がある。そのための方法として、該平行平面板群
の上面と下面の両側から複数箇所で機械的に力を加える
か、各々隣り合せの面をシリカガラスで接着する手段を
用いる。In the polarizer, since the incident light is reflected on many surfaces of the parallel flat plate constituting the polarizer, the reflected light beam essentially spreads in the incident direction, and the reflected light beam spreads between the adjacent parallel flat plates. In the same direction in proportion to the unavoidable gap. Therefore, in practical use, it is necessary to reduce the gap between the parallel flat plates as much as possible to suppress the spread of the beam size. As a method therefor, a mechanical force is applied at a plurality of places from both sides of the upper surface and the lower surface of the parallel flat plate group, or a means for bonding the adjacent surfaces with silica glass is used.
【００１３】[0013]
（実施形態例１）本発明の第１の実施の形態例は、図２
に示されているように、使用する波長域で透明で等方媒
質で作られた平行平面板ａを複数個用い、各々の平行平
面板ａを間隙を空けずに重ね合せ、この該平行平面板群
への光源からの光（入射光）ｂの入射角θi がブルース
ター角になるように光源に対して配置することにより、
光源からの入射光θi がこの平行平面板群で高反射率で
反射する。この反射光ｄは高偏光度の直線偏光となって
いる。(Embodiment 1) A first embodiment of the present invention is shown in FIG.
As shown in FIG. 2, a plurality of parallel flat plates a made of an isotropic medium which is transparent in a wavelength range to be used are used, and the respective parallel flat plates a are overlapped with no gap therebetween. By arranging the light (incident light) b from the light source to the face plate group with respect to the light source such that the incident angle θi of the light (incident light) b becomes the Brewster angle,
The incident light .theta.i from the light source is reflected by the parallel flat plate group with high reflectance. This reflected light d is linearly polarized light having a high degree of polarization.
【００１４】本願発明における主要な特徴は、偏光子を
構成する複数の平行平面板を間隙を空けることなく重ね
合せることにあり、この構成によって偏光子の反射率を
高め、かつコンパクトでありながら大きい断面積の偏光
ビームが得られる。The main feature of the present invention is that a plurality of parallel flat plates constituting a polarizer are superposed without leaving a gap, and this configuration increases the reflectivity of the polarizer and is large while being compact. A polarized beam with a cross-sectional area is obtained.
【００１５】（実施形態例２）本発明の第２の実施形態
例は、前記第１の実施形態例において、各々の平行平面
板ａの間隙を狭めるために機械的に力を加える手段を有
することを特徴とする。(Embodiment 2) The second embodiment of the present invention is different from the first embodiment in that it has a means for applying a mechanical force to narrow the gap between the parallel plane plates a. It is characterized by the following.
【００１６】（実施形態例３）本発明の第３の実施形態
例は、前記第１の実施形態例において、各隣接平行平面
板間を、シリカガラスで各隣接平行平面板の平面内の１
箇所以上の場所を接着することによって、各々の平面板
の間隙を狭めたことを特徴とする。(Embodiment 3) The third embodiment of the present invention is the same as the first embodiment, except that the gap between each adjacent parallel plane plate is made of silica glass in the plane of each adjacent parallel plane plate.
It is characterized in that the gaps between the flat plates are narrowed by bonding at more than two places.
【００１７】この実施形態例におけるシリカガラスを用
いた間隙僅少化は、各平行平面板の隣接面に所定の励起
光を照射して、各平面を活性化し、続いて、原料アルコ
キシドを各隣接面または一方の平面に付着させ、原料ア
ルコキシドを平面に吸着させるとともに粘性化させ、そ
の後、各隣接平行平面板を圧着させ、前記粘性化原料に
さらに励起光を照射し、固化させることにより達成され
る。The narrowing of the gap using silica glass in this embodiment is performed by irradiating a predetermined excitation light to the adjacent surface of each parallel plane plate to activate each plane, and subsequently, the raw material alkoxide is placed on each adjacent surface. Alternatively, it is achieved by adhering to one plane, adsorbing the raw material alkoxide on the plane and making the raw material alkoxide viscous, and then pressing each adjacent parallel flat plate, further irradiating the viscous raw material with excitation light, and solidifying. .
【００１８】[0018]
【実施例】以下、本発明の実施例を説明するが、以下の
実施例は、本発明を好適に説明する１例に過ぎず、本発
明をなんら限定するものではない。EXAMPLES Examples of the present invention will be described below. However, the following examples are merely examples for suitably describing the present invention, and do not limit the present invention in any way.
【００１９】（実施例１）偏光子として、約１．５ｃｍ
角で厚さ約０．０５ｃｍの石英ガラス板を間隙を空けず
に５枚重ね合せた。この石英ガラス板のブルースター角
は、５６°であった。そこで、この偏光子を、この偏光
子に、無偏光光源からのほぼ平行な３２５ｎｍの紫外光
が５６°で入射するように、設置した。これにより、こ
の偏光子から、９９．９％以上の偏光度をもつ直線偏光
（ｓ偏光）の反射光が、得られた。ここで、この直線偏
光の偏光度は、回転検光子に光を通し、透過強度の最大
値Ｉｍａｘとこれに直角方向の強度の最小値Ｉmin を測
り、それらの合計量に対する差分量の比（Ｉmax −Ｉmi
n ）／（Ｉmax ＋Ｉmin ）を百分率で表したものによっ
て、定義した。(Example 1) As a polarizer, about 1.5 cm
Five quartz glass plates each having a corner and a thickness of about 0.05 cm were stacked without leaving any gap. The Brewster's angle of this quartz glass plate was 56 °. Therefore, the polarizer was installed such that substantially parallel 325 nm ultraviolet light from a non-polarized light source was incident on the polarizer at 56 °. As a result, reflected light of linearly polarized light (s-polarized light) having a degree of polarization of 99.9% or more was obtained from this polarizer. Here, the degree of polarization of the linearly polarized light is measured by measuring the maximum value Imax of the transmitted intensity and the minimum value Imin of the intensity in the direction perpendicular thereto by passing the light through a rotating analyzer, and determining the ratio (Imax) of the difference amount to the total amount thereof. −Imi
n) / (Imax + Imin) as a percentage.
【００２０】この偏光子のｓ偏光入射光に対する反射率
は、図３に示すように、５６．４％であり、１枚の石英
ガラスの反射率の約２．３倍に向上している。As shown in FIG. 3, the reflectivity of this polarizer with respect to s-polarized incident light is 56.4%, which is about 2.3 times the reflectivity of one piece of quartz glass.
【００２１】（実施例２）先に述べたように、入射光が
偏光子内で多重反射するために、反射光は入射光と同じ
方向に少し拡がる。実用上、この拡がりを抑制する必要
性が生じるが、その場合には、石英ガラスの相対する２
辺の端を各々強く圧力をかける治具を用いることにより
間隙を押さえる。この機械的手段により、光の拡がりが
減少した。 （実施例３）前記実施例２の機械的手段では、ガラス面
の中心の部分での各ガラス間の間隙を抑えることが困難
である。そこで、本実施例では、アルコキシドを原料に
したシリカガラスによる下記のような間隙僅少化方法を
用いた。(Embodiment 2) As described above, since the incident light is multiply reflected in the polarizer, the reflected light slightly spreads in the same direction as the incident light. In practice, it is necessary to suppress this spread. In this case, however, the opposite
The gap is suppressed by using a jig that strongly applies pressure to each end of the side. This mechanical measure reduced the spread of light. (Embodiment 3) With the mechanical means of Embodiment 2, it is difficult to suppress the gap between the glasses at the center of the glass surface. Therefore, in the present embodiment, the following gap reducing method using silica glass using alkoxide as a raw material was used.
【００２２】まず、平行平面板とする石英ガラスにＸｅ
2 *（キセノン）エキシマランプ光（スペクトルは１５５
ｎｍ〜２００ｎｍ、ピーク波長１７２ｎｍ）を１５分間
窒素雰囲気中で照射した。その後、原料アルコキシドと
して、テトラメトキシシラン（ＴＭＯＳ；成分は、ＴＭ
ＯＳモノマー９１．８３％、ＴＭＯＳオリゴマー３．３
２％、水・メタノール４．８４％；しかし、成分比は厳
密にこの通りである必要はない。）の原液の数滴を、前
記石英ガラス面に滴下し、これをスピンコート法により
面上に均一に塗布した。塗布された原料溶液は、粘性塗
膜となり、石英ガラス面に吸着した。この状態で他方の
表面を活性化した石英ガラス板を重ねあわせた。First, Xe is applied to quartz glass used as a plane parallel plate.
2 * (xenon) excimer lamp light (spectrum is 155
nm-200 nm, peak wavelength 172 nm) for 15 minutes in a nitrogen atmosphere. Then, tetramethoxysilane (TMOS; component is TM
OS monomer 91.83%, TMOS oligomer 3.3
2%, water / methanol 4.84%; however, the component ratios need not be exactly this. A few drops of the stock solution of (1) were dropped on the quartz glass surface, and this was uniformly applied on the surface by spin coating. The applied raw material solution became a viscous coating film and was adsorbed on the quartz glass surface. In this state, a quartz glass plate having the other surface activated was overlaid.
【００２３】続いて、前記重ね合せた石英ガラス板をキ
セノンエキシマランプ光の照射によって励起して、石英
ガラス板間の塗膜を固化させた。この時の照射は、光子
数にして１．２×１０20／ｃｍ2 に相当するものであっ
た。石英ガラス間の硬化接着層の赤外線スペクトルを測
定したところ、メチル基、Ｃ−Ｈ結合に帰属されるピー
クは完全に消失しており、残留有機物がないことが確認
された。また、Ｓｉ−Ｏ−Ｓｉに帰属されるピーク（８
００ｃｍ-1）が現れており、スペクトルの形はａ−Ｓｉ
Ｏ2 と同じであった。Subsequently, the superposed quartz glass plates were excited by irradiation with xenon excimer lamp light to solidify the coating between the quartz glass plates. The irradiation at this time was equivalent to 1.2 × 10 20 / cm 2 in terms of the number of photons. When the infrared spectrum of the cured adhesive layer between the quartz glass layers was measured, the peaks attributed to the methyl group and the C—H bond completely disappeared, and it was confirmed that there was no residual organic substance. Further, the peak (8
00 cm -1 ), and the shape of the spectrum is a-Si
Same as O 2 .
【００２４】前述のように重ね合せた石英ガラス間の接
着層であるＳｉＯ2 は、本偏光子を構成する平行平面板
である石英ガラスと同じ材料であり、紫外線領域で透明
で光吸収は生じなかった。このようにして平行平面板間
の間隙をなくした本実施例の偏光子では、前記実施例２
の機械的手段により間隙を僅少化した偏光子に比べて、
光の広がりは、さらに減少した。[0024] SiO 2 is an adhesive layer between the quartz glass superimposed as described above is the same material as quartz glass is a parallel flat plate constituting the present polarizer, light absorbing transparent in the ultraviolet region generated Did not. In the polarizer of this embodiment in which the gap between the parallel plane plates is eliminated as described above, the polarizer according to the second embodiment is used.
Compared to a polarizer whose gap is reduced by the mechanical means of
Light spread was further reduced.
【００２５】なお、前記実施例では、透明な平行平面板
の材料として、石英ガラスを用いたが、透明ＬｉＦ結晶
を用いれば、１０５ｎｍまでの真空紫外線領域の高偏光
度、高効率、大照射面積の直線偏光が得られる。In the above embodiment, quartz glass is used as the material of the transparent plane-parallel plate. However, if transparent LiF crystal is used, a high degree of polarization, high efficiency and a large irradiation area in the vacuum ultraviolet region up to 105 nm can be obtained. Is obtained.
【００２６】[0026]
【発明の効果】以上説明したように、本発明を用いるこ
とにより、大光量で、偏光ビームの断面積が大きい（大
照射面積の）直線偏光紫外線を出力することのできる偏
光子が得られた。偏光子全体の大きさもコンパクトにお
さまった。As described above, by using the present invention, a polarizer capable of outputting linearly polarized ultraviolet light having a large light quantity and a large cross-sectional area of a polarized beam (large irradiation area) can be obtained. . The size of the entire polarizer has also been reduced to a compact size.
【図１】従来の問題点を説明するためのもので、理解し
やすくするために平行平板間の間隔を狭くして示した従
来の偏光子の構成図である。図中の点線で示した光線は
それ以降の光路を省略していることを示しているもので
ある。FIG. 1 is a diagram for explaining a conventional problem, and is a configuration diagram of a conventional polarizer in which a distance between parallel plates is reduced for easy understanding. Light rays indicated by dotted lines in the figure indicate that the subsequent optical paths are omitted.
【図２】本発明にかかる偏光子の実施の形態を示す構成
図である。FIG. 2 is a configuration diagram showing an embodiment of a polarizer according to the present invention.
【図３】本発明の作用を示すグラフで、平行平面板群を
構成している平行平面板の枚数による該平行平面板群の
反射率の増加率を示すものであり、１枚の場合の反射率
を１としている。FIG. 3 is a graph showing the operation of the present invention, showing the rate of increase in the reflectance of the parallel plane plate group according to the number of parallel plane plates constituting the parallel plane plate group, and The reflectance is set to 1.
ａ 光学的に透明・等方媒質の平行平面板 ｂ 入射光 ｃ 反射光 ｄ，ｄ(s) 透過光 θi 入射角 a Parallel plane plate of optically transparent and isotropic medium b Incident light c Reflected light d, d (s) Transmitted light θi Incident angle
───────────────────────────────────────────────────── フロントページの続き (72)発明者 小貫 英雄 茨城県つくば市梅園１丁目１番４ 工業技 術院電子技術総合研究所内 (72)発明者 齊藤 一朗 茨城県つくば市梅園１丁目１番４ 工業技 術院電子技術総合研究所内 ──────────────────────────────────────────────────続 き Continuing from the front page (72) Inventor Hideo Konuki 1-1-4 Umezono, Tsukuba City, Ibaraki Prefecture Within the Institute of Electronics and Technology, Institute of Industrial Technology (72) Inventor Ichiro Saito 1-1-4 Umezono Tsukuba City, Ibaraki Prefecture Inside the Electronic Technology Research Institute, Industrial Technology Institute
Claims (4)
た平行平面板を複数個用い、各々の平行平面板を間隙を
空けずに重ね合せ一体化してなることを特徴とする偏光
子。1. A polarized light characterized by using a plurality of parallel plane plates made of a transparent isotropic medium in a predetermined wavelength range, and laminating and integrating each parallel plane plate without leaving a gap. Child.
段により狭められていることを特徴とする請求項１に記
載の偏光子。2. The polarizer according to claim 1, wherein a gap between the parallel plane plates is narrowed by mechanical means.
各隣接平行平面板の平面内の１箇所以上の場所が接着さ
れることによって、各々の平面板の間隙を狭められてい
ることを特徴とする請求項１に記載の偏光子。3. The method according to claim 1, wherein the gap between the plane plates is narrowed by bonding one or more places in the plane of each adjacent plane plate with silica glass between the parallel plane plates. The polarizer according to claim 1, characterized in that:
た平行平面板を複数個用い、前記各平行平面板の隣接面
に所定の励起光を照射して、各平面を活性化し、続い
て、原料アルコキシドを各隣接面または一方の平面に付
着させ、原料アルコキシドを平面に吸着させるとともに
粘性化させ、その後、各隣接平行平面板を圧着させ、前
記粘性化原料にさらに励起光を照射し、固化させること
により偏光子を得ることを特徴とする偏光子の製造方
法。4. A plurality of parallel plane plates made of a transparent isotropic medium in a predetermined wavelength range are used, and adjacent planes of the respective parallel plane plates are irradiated with predetermined excitation light to activate each plane. Subsequently, the raw material alkoxide is adhered to each adjacent surface or one plane, the raw material alkoxide is adsorbed on the plane, and the raw material alkoxide is made viscous. A method for producing a polarizer, comprising irradiating and solidifying a polarizer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10391597A JP3261409B2 (en) | 1997-04-07 | 1997-04-07 | Reflective polarizer and method of manufacturing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10391597A JP3261409B2 (en) | 1997-04-07 | 1997-04-07 | Reflective polarizer and method of manufacturing the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH10282339A true JPH10282339A (en) | 1998-10-23 |
| JP3261409B2 JP3261409B2 (en) | 2002-03-04 |
Family
ID=14366732
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10391597A Expired - Fee Related JP3261409B2 (en) | 1997-04-07 | 1997-04-07 | Reflective polarizer and method of manufacturing the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3261409B2 (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003055820A1 (en) * | 2001-12-27 | 2003-07-10 | Hideo Onuki | Method for adhering transparent articles and quartz glass plate prepared through adhesion and device using the same |
| WO2004078868A1 (en) * | 2003-03-06 | 2004-09-16 | National Institute Of Advanced Industrial Science And Technology | Vacuum ultraviolt ray bonding apparatus |
| JP2009009075A (en) * | 2006-11-21 | 2009-01-15 | Masataka Murahara | Adhesion method of optical component and manufacturing equipment for element |
| US7911696B1 (en) | 1997-05-28 | 2011-03-22 | Lg Display Co., Ltd. | Large scale polarizer and polarizer system employing it |
| CN104934846A (en) * | 2015-06-16 | 2015-09-23 | 中国科学院光电研究院 | Excimer laser |
| CN112041283A (en) * | 2018-04-18 | 2020-12-04 | 信越石英株式会社 | Quartz glass plate |
-
1997
- 1997-04-07 JP JP10391597A patent/JP3261409B2/en not_active Expired - Fee Related
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7911696B1 (en) | 1997-05-28 | 2011-03-22 | Lg Display Co., Ltd. | Large scale polarizer and polarizer system employing it |
| WO2003055820A1 (en) * | 2001-12-27 | 2003-07-10 | Hideo Onuki | Method for adhering transparent articles and quartz glass plate prepared through adhesion and device using the same |
| CN100341811C (en) * | 2001-12-27 | 2007-10-10 | 小贯英雄 | Method for adhering transparent articles and quartz glass plate prepared through adhesion and device using the same |
| WO2004078868A1 (en) * | 2003-03-06 | 2004-09-16 | National Institute Of Advanced Industrial Science And Technology | Vacuum ultraviolt ray bonding apparatus |
| JP2009009075A (en) * | 2006-11-21 | 2009-01-15 | Masataka Murahara | Adhesion method of optical component and manufacturing equipment for element |
| CN104934846A (en) * | 2015-06-16 | 2015-09-23 | 中国科学院光电研究院 | Excimer laser |
| CN112041283A (en) * | 2018-04-18 | 2020-12-04 | 信越石英株式会社 | Quartz glass plate |
| EP3782964A4 (en) * | 2018-04-18 | 2021-12-29 | Shin-Etsu Quartz Products Co., Ltd. | Quartz glass plate |
| CN112041283B (en) * | 2018-04-18 | 2023-02-21 | 信越石英株式会社 | Quartz glass plate |
| US11927882B2 (en) | 2018-04-18 | 2024-03-12 | Shin-Etsu Quartz Products Co., Ltd. | Quartz glass plate |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3261409B2 (en) | 2002-03-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6542298B1 (en) | Method for manufacturing a polarization beam splitter | |
| US5426532A (en) | Infrared filter | |
| KR101340900B1 (en) | Wire grid polarizer having dual layer structure and method for fabricating the same | |
| JP2002510062A (en) | Inorganic visible light reflective polarizer | |
| JP3261409B2 (en) | Reflective polarizer and method of manufacturing the same | |
| JP2007206225A (en) | Polarization conversion element | |
| JP5209932B2 (en) | Polarization beam splitter and polarization conversion element | |
| JP2006349972A (en) | Polarized light separating sheet and light emitting unit using the same | |
| JP4080198B2 (en) | Polarization conversion element and manufacturing method thereof | |
| JP2004145305A (en) | Polarization conversion element and its manufacturing method | |
| US6351296B1 (en) | Liquid crystal beam polarizer and method for manufacturing thereof | |
| JP4042426B2 (en) | Optical element and spectroscopic device using the same | |
| JP2006064871A (en) | Polarized light converting element and manufacturing method thereof | |
| JP2007279693A (en) | Polarization conversion element and method for manufacturing the same | |
| JP2004045767A (en) | Polarized light converting element and its manufacturing method | |
| JP2862423B2 (en) | Polarizing beam splitter | |
| JPH10282499A (en) | Formation of oriented film and exposure device | |
| JP2004070299A (en) | Polarization conversion element and manufacturing method therefor | |
| JP2002236206A (en) | Optical device and spectroscopic apparatus using the same | |
| JP3616349B2 (en) | Magneto-optic crystal plate with polarizing element | |
| JP4219615B2 (en) | Polarized light separating element and manufacturing method thereof | |
| JP2005037745A (en) | Polarized beam conversion element, its manufacturing method, and liquid crystal display device | |
| JP4841892B2 (en) | Backlight unit | |
| JPH10282337A (en) | Sheet-like polarization separation and transformation polarizing element, and liquid crystal display device using same | |
| JPH1123850A (en) | Surface light emission device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20071221 Year of fee payment: 6 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20071221 Year of fee payment: 6 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20081221 Year of fee payment: 7 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20081221 Year of fee payment: 7 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20091221 Year of fee payment: 8 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20091221 Year of fee payment: 8 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20101221 Year of fee payment: 9 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20111221 Year of fee payment: 10 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121221 Year of fee payment: 11 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121221 Year of fee payment: 11 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20131221 Year of fee payment: 12 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20131221 Year of fee payment: 12 |
|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313117 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313117 |
|
| LAPS | Cancellation because of no payment of annual fees | ||
| R360 | Written notification for declining of transfer of rights |
Free format text: JAPANESE INTERMEDIATE CODE: R360 |
|
| R370 | Written measure of declining of transfer procedure |
Free format text: JAPANESE INTERMEDIATE CODE: R370 |