JPH10277890A - Managing method of manufacturing line and management control system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To make optimum management of a manufacturing process by properly managing complex equipments to process works and the real time information of a processing chamber. SOLUTION: Various specification information and past performance information about a group of complex equipments 2 and 2a are fed to a complex equipments controller 11 from an input means 17 and are subjected to a real time processing by the controller 11, and thereby appropriate instructions of execution of works are made including sampling inspection, equipment maintenance, equipment QC, preceding processing, and cleaning and proper decision of processing chambers 6-6b of the complex equipments 2 and 2a in which objects to be processed are fed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and a system for managing a manufacturing line, and more particularly to a technique effective when applied to a start instruction of a cluster tool or a multi-chamber system or the management of equipment maintenance.

[0002]

2. Description of the Related Art According to studies by the present inventors, in a manufacturing line composed of a plurality of manufacturing facilities, for example, Japanese Patent Laid-Open No.
As shown in JP-A-63-63, the scheduled maintenance work date of each manufacturing facility is calculated based on the maintenance cycle of each facility and the date on which the maintenance work has been performed.

Further, as described in Japanese Patent Application Laid-Open No. Hei 4-361519, for example, a manufacturing facility has a plurality of processing units in a semiconductor wafer processing apparatus, and each processing unit performs a surface treatment of a wafer, and each of the processing units performs a surface treatment. Manufacturing equipment for transferring wafers between processing units has been introduced into manufacturing lines.

[0004]

However, it has been found by the present inventors that the following problems are encountered in the above-described method for maintaining each manufacturing facility.

That is, it is only necessary to calculate the scheduled maintenance work date based on the maintenance cycle and the maintenance work completion date for each facility, and it is possible to manage the real-time information of each processing room of each complex facility. Therefore, there is a problem that it is not possible to appropriately determine the starting equipment for the workpiece, give an instruction for the sampling inspection, give an instruction for the maintenance of the equipment, give an instruction for the equipment QC (Quality Control), give an instruction for the preceding processing, give an instruction for the cleaning, and the like. .

An object of the present invention is to provide a method and system for managing a production line capable of optimally managing a production process by managing real-time information of a complex facility and a processing room capable of processing a workpiece. To provide.

[0007] The above and other objects and novel features of the present invention will become apparent from the description of the present specification and the accompanying drawings.

[0008]

SUMMARY OF THE INVENTION Among the inventions disclosed in the present application, the outline of a representative one will be briefly described.
It is as follows.

That is, the method for managing a production line according to the present invention comprises a step of storing various kinds of standard information and performance information of a plurality of processing chambers for performing at least one of the same kind of processing or a continuous processing on a processing object. , The process of updating the stored performance information to the latest performance information according to the operation status of the processing room, the process of comparing or searching for the latest performance information and standard information, and according to the operation status based on the results Outputting optimal processing instruction information.

[0010] Thereby, the production of the object to be processed and the maintenance of the production line can be performed efficiently.

Further, the method for managing a production line according to the present invention comprises:
A step of searching for a processing chamber in which the search determination means is not operating based on the process module information stored in the storage unit, and determining whether the searched processing chamber is in an operable state based on the process module state information. The method includes a step of selecting a processing chamber in which a search can be started and making a start, and a step of outputting an instruction of the selected processing chamber by an output unit.

[0012] Thus, since a plurality of processing chambers can be managed in real time, it is possible to determine an optimal complex equipment into which an object to be processed is introduced.

Further, the method for managing a production line according to the present invention further comprises the steps of updating the sampling inspection result information stored in the storage unit by the information updating unit each time the processing of the workpiece is completed; A step of comparing the actual performance information of the inspection with the standard information of the sampling inspection previously stored in the storage unit by the comparing unit, a step of the management control unit judging whether or not the sampling inspection is necessary based on the comparison result; Outputting an instruction of a sampling inspection by an output unit when the inspection is necessary.

Thus, it is possible to appropriately issue an instruction for the sampling inspection of the object to be processed.

[0015] The method of managing a production line according to the present invention comprises:
A step of updating the maintenance result information by the information updating unit every time the maintenance work of the processing room is performed, and comparing the updated maintenance result information with the maintenance standard information previously stored in the storage unit by the comparing unit. A step in which the management control unit determines whether or not maintenance work is necessary based on the process and the comparison result, and a step in which, when the maintenance work is required, an instruction of a processing room requiring maintenance is output by an output unit. It has.

Thus, it is possible to appropriately issue a maintenance instruction for equipment such as a processing room provided in the complex equipment.

Further, according to the manufacturing line management method of the present invention, each time a foreign substance inspection in the processing chamber is performed, the QC result information is updated by the information updating unit, and the updated QC result information is stored in advance in the storage unit. Comparing the QC standard information stored in the storage unit with the QC standard information, using the comparison result to determine whether or not the foreign material inspection is required by the management control unit; Outputting an instruction of the processing chamber requiring inspection by an output unit.

[0018] Thereby, the QC instruction of the equipment such as the processing room provided in the complex equipment can be appropriately performed.

Further, the method for managing a production line according to the present invention comprises:
A step of updating the result information of the preceding process by the information updating unit each time the preceding process of the processing chamber is performed, and comparing the updated result information of the preceding process with the standard information of the preceding process previously stored in the storage unit. And a step in which the management control unit determines whether or not the preceding processing is necessary based on the comparison result, and a processing control unit that controls a processing chamber that performs the preceding processing when the preceding processing is required. Outputting a control signal for starting the preceding process by the management control unit.

Thus, the instruction of the preceding processing can be appropriately given.

Further, according to the manufacturing line management method of the present invention, each time the processing chamber is cleaned, the cleaning result information is updated by the information updating section, and the updated cleaning result information is stored in the storage section in advance. A step of comparing the stored cleaning standard information with a comparing unit, a step of determining whether or not cleaning is required by the management control unit based on the comparison result; and a step of requiring cleaning if cleaning is required Outputting a room instruction by an output means.

Thus, it is possible to appropriately issue an instruction for cleaning equipment such as a processing room provided in the complex equipment.

The management control system according to the present invention further comprises: input means for inputting various types of standard information and performance information of a plurality of processing chambers capable of performing at least one of the same type of processing or a continuous processing on an object to be processed; A storage unit for storing the standard information and the performance information input by the input unit,
An information updating unit that updates the latest performance information with the performance information stored in the storage unit in accordance with the operation status of the processing room; and a search determination unit that searches for a processing room that can process the workpiece based on the performance information. A comparison unit for comparing the standard information and the performance information, and a management control unit for controlling the start of construction and the maintenance management according to the operation status of each processing chamber based on the search result of the search determination unit and the determination of the comparison unit. And a composite equipment group management means connected online with the processing control means, and an output means for displaying or printing a construction start instruction output from the management control unit.

[0024] Thereby, the production of the object to be processed and the maintenance of the production line can be performed efficiently.

As described above, the processing of the object to be processed and an appropriate maintenance instruction can be efficiently performed in the shortest time, so that the production line can be operated stably and the quality of the product can be improved.

[0026]

Embodiments of the present invention will be described below in detail with reference to the drawings.

FIG. 1 is a block diagram of a combined facility group management device according to the first embodiment of the present invention, FIG. 2 is a block diagram of a combined facility group controller according to the first embodiment of the present invention, and FIG. FIG. 4 is a table showing performance information of the combined facility / process module stored in the storage unit according to the embodiment of the present invention. FIG. 4 is a table showing the combined facility / process stored in the storage unit according to the embodiment of the present invention. FIG. 5 is a table showing operation information of the complex equipment group controller according to one embodiment of the present invention, and FIG. 6 is a sampling inspection stored in a storage unit according to one embodiment of the present invention. FIG. 7 is a table showing sampling inspection result information stored in the storage unit according to an embodiment of the present invention, and FIG. 8 is a composite table according to an embodiment of the present invention. Operation flowchart of the equipment group controller, FIG. 9 is a table showing the standard information integrity stored in the storage unit according to an embodiment of the present invention, FIG. 10,
FIG. 11 is a table showing maintenance performance information stored in a storage unit according to an embodiment of the present invention, FIG. 11 is an operation flowchart of a complex equipment group controller according to an embodiment of the present invention, and FIG. FIG. 13 is a table showing QC standard information stored in a storage unit according to an embodiment.
FIG. 14 is a table showing operation information of the complex equipment group controller according to an embodiment of the present invention, and FIG. FIG. 16 is a table showing standard information of preceding processing stored in the storage unit according to the embodiment;
FIG. 17 is a table showing performance information of preceding processing stored in the storage unit according to the embodiment of the present invention; FIG. 17 is an operation flowchart of the complex equipment group controller according to the embodiment of the present invention; FIG. 19 is a table showing cleaning standard information stored in the storage unit according to one embodiment of the present invention. FIG. 19 is a table showing cleaning performance information stored in the storage unit according to one embodiment of the present invention. 5 is an operation flowchart of the complex equipment group controller according to the embodiment of the present invention.

In the present embodiment, as shown in FIG. 1, a complex equipment group management apparatus 1 for a semiconductor wafer production line is provided with, for example, multi-chamber complex equipment 2, 2a. . And these compound facilities 2, 2a comprise the compound facility group FS.

Also, the complexing facilities 2 and 2a have at least one
Cassette modules 4 to 4c for mounting a cassette 3 containing a plurality of semiconductor wafers (objects to be processed), and transfer modules (transfer chambers) 5, 5a for transferring the semiconductor wafers
Process modules (processing chambers) 6 to 6b for processing the semiconductor wafer are provided.

Next, the combined equipment group management apparatus 1 is provided with module controllers 7 to 7e for controlling the cassette modules 4, 4a, the transfer module 5, and the process modules 6 to 6b in the combined equipment 2. .

The combined equipment group management apparatus 1 is provided with module controllers 8 to 8e for controlling the cassette modules 4b and 4c, the transfer module 5a and the process modules (processing chambers) 6c to 6e in the combined equipment 2a. Have been.

The complex equipments 2 and 2a and the module controllers 7 to 7e and 8 to 8e are, for example,
Online connection is made by a dedicated line Ls.

The complex equipment group management device 1 is provided with complex equipment controllers 9 and 10 for controlling the module controllers 7 to 7e and 8 to 8e.
connected online.

Further, these module controllers 7
~ 7e, 8 ~ 8e and combined equipment controller 9,1
0 constitutes a processing control means.

Next, the complex equipment group management device 1 is provided with a management control system KS for performing overall control of the complex equipment group management device 1. This management control system KS
Is a complex equipment group controller 11 for controlling all the control of the management control system KS and an input means 1 to be described later.
6. It is constituted by display means 17.

Further, the complex equipment group controller 11 includes:
As shown in FIG. 2, a comparison unit 11a for comparing various standard information and performance information described later, a search determination unit 11b for searching predetermined information in the performance information,
Information update unit 1 that updates the result information according to the operation status of a
1c, a storage unit 11d for storing performance information, standard information, etc.
Is provided.

Further, the integrated equipment group controller 11 has a management control section that controls all controls of the comparison section 11a, the search determination section 11b, the information update section 11c, the storage section 11d, a stocker controller described later, and a transport equipment controller. A part 11e is provided.

The management control unit 11e is electrically connected to the comparison unit 11a, the search judgment unit 11b, the information update unit 11c, and the storage unit 11d.

Further, the complex equipment group management device 1 has
As shown in FIG. 1, a stocker 12 for storing cassettes in a production line and a stocker controller 13 for controlling the stocker 12 are provided. Further, the combined facility group management device 1 includes a transport facility 14 for transporting semiconductor wafers.
A transport equipment controller 15 for controlling the transport equipment 14 is provided.

The combined equipment controllers 9 and 10, the stocker controller 13 and the transport equipment controller 15 are connected to the combined equipment group controller 11 and the line L.
s, connected online,
a is remotely controlled.

Next, the complex equipment group management apparatus 1 is provided with an input means 16 for inputting arbitrary data and a display means (output means) 17 for displaying various data.

The management data stored in the storage unit 11d includes, for example, the result information P1 of the combined facility / process module which can be processed for each lot in the production line, the result information T1 of the state of the combined facility / process module, Standard information K1 of the sampling inspection instruction of each process module 6-6e, process module 6-6e
Of the inspection using the inspection information R1, the maintenance standard information K2 of each of the process modules 6 to 6e, the maintenance performance information R2 of each of the process modules 6 to 6e, and the test wafer in each of the process modules 6 to 6e. QC standard information K3 for checking the status, QC performance information R3 in each of the process modules 6 to 6e, pre-processing standard information K4 for each of the process modules 6 to 6e, and pre-processing performance information R4 for each of the process modules 6 to 6e. , Cleaning standard information K for each of the process modules 6 to 6e
5 and cleaning performance information R5 of each of the process modules 6 to 6e.

Next, the operation of the present embodiment will be described.

First, a method of determining the process modules 6 to 6e in the complex facilities 2, 2a will be described.

FIG. 3 shows the result information P1 of a compound facility / process module capable of starting a lot stored in the storage unit 11d of the complex facility group controller 11.

For example, the lot LOT01 has a product name of PR
D01 indicates that the in-process is FLW01, and that processing can be performed by the process modules 6 and 6a of the combined facility 2 and the process module 6c of the combined facility 2a.

Next, FIG. 4 shows the result information T1 of the real-time state of the complex facility / process module of the complex facility 2, 2a stored in the storage unit 11d managed by the complex facility group controllers 9, 10. Is shown.

This collects the state of the complex equipments 2 and 2a from the complex equipment controllers 9 and 10 via the line Ls.

FIG. 4 shows that the process module 6a of the complex facility 2 is off-line and the process module 6c of the complex facility 2a is off-line.

Here, "on-line" in the "real-time state" of FIG. 4 indicates that the respective facilities of the complex facilities 2 and 2a are operable, and "off-line" refers to the complex facility 2 and 2a. This indicates that each of the facilities 2a cannot operate due to maintenance or the like.

FIG. 5 shows a processing flow in the complex equipment group controller 11 for determining the complex equipment 2, 2a for processing the lot.

First, the search judging unit 11b searches for a lot that is not assigned to a facility based on the actual information P1 of the complex facility / process module that can be constructed as shown in FIG. 3 (step S101), and the construction facility is determined. It is determined whether or not there is a lot that has not been performed (step S102).

Next, in the process of step S102,
When there is a lot for which the start-up facility has not been determined, the search determination unit 10b refers to the start-up start-up complex facilities 2 and 2a of the lot based on the actual information P1 of the start-up startable complex facility / process module ( Step S103). In addition, in the process of step S102, when there is no lot for which the start-up facilities have not been determined, the process ends.

Further, the search judging unit 10b judges whether or not there is a startable facility with reference to the actual information P1 of the startable complex equipment / process module (step S104). In this case, the management control unit 11e fetches the performance information T1 of the corresponding combined facility / process module status from the storage unit 11d and refers to it (Step S105). If there is no startable facility, the process of step S101 is repeated.

Then, the management control unit 11e determines in step S
It is determined whether or not the complex facilities 2 and 2a referred to in the process of 103 are online (step S106),
If offline, the process returns to step S103,
If online, the management control unit 11e determines the process modules 6 to 6e in the complex facilities 2 and 2a to be started, displays them on the display unit 17 as processing instruction information, and gives a start instruction (step S107).

Next, a sampling inspection instruction method in the process modules 6 to 6e of the complex equipments 2 and 2a will be described.

First, FIG. 6 shows the complex equipment group controller 1
1 shows the contents of the standard information K1 of the sampling inspection instruction stored in the storage unit 11d managed by 1.

The standard information K1 of the sampling inspection instruction is:
For example, the process module 6 of the complex equipment 2, 2a
The product name / process to be processed at ~ 6e is the product name PRD01,
When the process is switched to the process FLW01, the inspection of the inspection process FLW10 is performed every four lots such as the first lot and the fifth lot.

FIG. 7 shows a complex equipment group controller 1.
1 shows the contents of the sampling inspection result information R1 stored in the storage unit 11d managed by 1.

The performance information R1 of the sampling inspection indicates, for example, that the process module 6 of the combined facility 2 has completed the processing of the current product name PRD01 and the process FLW01 in three lots continuously.

"Frequency" in FIG. 7 is information indicating how many lots the sampling inspection is performed. For example, if the information of 'frequency' is 4, it indicates that sampling inspection is performed once for every 4 lots.

Next, a processing flow of the sampling inspection instruction is shown in FIG.

First, when the processing of the workpiece is completed in the complex equipment, the management control unit 11e of the complex equipment group controller 11 sends, from the complex equipment controllers 9 and 10, the performance of the complex equipment / process module used. The information P1 is obtained (step S201), and when the product name / process is switched with respect to the actual information R1 of the sampling inspection shown in FIG. 7, the information updating unit 11c sets the product name, process, and frequency as shown in FIG. The standard information K1 of the sampling inspection instruction of the process modules 6 to 6e of the facilities 2 and 2a is updated, and if the product name and the process are the same, only the counter value is updated (step S).
202).

Next, the frequency of the standard information K1 of the sampling inspection instruction of the process modules 6 to 6e of the complex equipments 2 and 2a and the counter of the actual information R1 of the sampling inspection are compared with the comparison unit 1.
1a, the management control unit 11e determines whether sampling inspection is necessary (step S203).

In the process of step S203, when the sampling inspection is necessary, that is, when the frequency of the standard information K1 of the sampling inspection instruction and the counter of the actual information R1 of the sampling inspection become the same, the lot corresponding to the processing instruction information is obtained. The information for performing the sampling inspection is displayed on the display means 17 or the like to give an instruction (step S204).

Further, in the process of step S203,
When the sampling inspection is unnecessary, that is, the frequency of the standard information K1 of the sampling inspection instruction and the actual information R1 of the sampling inspection
Are different, the process returns to step S201.

Here, in the present embodiment, the standard information K1 of the sampling inspection instruction and the actual information R of the sampling inspection are shown.
Although 1 is managed by the number of starts, for example, the elapsed time from the previous start time is managed as standard information for each process module 6 to 6e of each of the complex facilities 2 and 2a,
If the actual elapsed time has been exceeded, a sampling inspection may be performed.

It is also possible to have a data standard value for certain data reported from the complex equipment controllers 9 and 10 and to instruct sampling inspection from the sampling inspection result information R1.

Next, a method for instructing maintenance of the process modules 6 to 6e of the complex facilities 2, 2a will be described.

First, the process module 6 of the complex equipment 2, 2a managed by the complex equipment group controller 11
FIG. 9 shows the standard information K2 of the security in 6 to 6e.

The maintenance standard information K2 is, for example, as a maintenance item of the process module 6 of the complex equipment 2,
This indicates that cleaning is necessary if 30 lots are processed.

FIG. 10 shows the maintenance result information R2 of the maintenance of the complex equipment / process module managed by the complex equipment group controller 11, and shows the processing of the process module 6 of the complex equipment 2 after the previous cleaning. This indicates that the number of processed lots of a product is 10.

The “standard value” in FIGS. 9 and 10 indicates the number of lots, and indicates the standard value for performing the maintenance work of the “maintenance item” for each indicated lot. Further, the "standard value" may indicate a standard value based on time, instead of a standard based on the number of lots.

Next, FIG. 11 shows a processing flow of the maintenance instruction of the complex equipment / process module.

First, when the input of a lot is completed in the complex equipment 2 or 2a, the complex equipment group controller 11
Result information P of combined equipment / process module shown in
1, the search determining unit 11b obtains a process module to be used from among the process modules 6 to 6e (step S301), and the information updating unit 11c selects one of the process modules 6 to 6e of the complex equipment 2, 2a. The counter value of the maintenance performance information R2 in the started process module is updated (step S302).

Next, the comparing unit 11a determines whether the security standard information K2
Is compared with the counter of the maintenance result information R2, and the management control unit 11e determines whether the maintenance is necessary (step S303).

Then, in the process of step S303, when security is required, that is, security standard information K2
If the standard value of the maintenance and the counter of the performance record information R2 of the maintenance are the same, the management control unit 11e sets the process modules 6 to 6e
Among them, the lot supply to the corresponding process module is stopped (step S304), and the processing instruction information, which is the instruction to maintain the process module, is displayed on the display means 17 or the like (step S305).

In the process of step S303,
If the maintenance is unnecessary, that is, if the standard value of the maintenance standard information K2 is different from the counter of the maintenance actual information R2, the process of step S301 is performed.

In the process of step S305, when the maintenance of the process module is instructed, the worker performs maintenance of the corresponding process module. Is input, the management control unit 11e clears the maintenance result information R2 (step S306), and restarts the input of the lot into the process module whose maintenance has been completed (step S307).

Here, in the present embodiment, the maintenance standard information K2 and the maintenance actual information R2 are managed by the number of starts, however, for example, the process module 6 to 6e of the complex equipment 2, 2a is used for the previous time. It is also possible to manage the elapsed time from the maintenance time as standard information, and to carry out equipment maintenance if the actual elapsed time is exceeded. It is also possible to have a data standard value for certain data reported from the complex equipment controllers 9 and 10, and to instruct equipment maintenance from the performance information.

Next, a description will be given of a QC instruction method in the process modules 6 to 6e of the complex equipments 2 and 2a.

First, the QC standard information K3 of the complex equipment / process module stored in the storage unit 11d managed by the complex equipment group controller 11 is shown in FIG.

In the QC standard information K3, for example, when the product name / process to be processed by the process modules 6 to 6e is switched to the product name PRD01 or the process FLW01, the first lot and the eleventh lot are referred to. Process module 6 for every 10 lots
6e indicates that it is necessary to confirm the foreign matter in the area .about.6e.

The process modules 6 to 6 of the complex facilities 2 and 2a managed by the complex facility group controller 11
FIG. 13 shows the result information R3 of the QC of e.

The actual information R3 of the QC is obtained, for example, by the process module 6 of the complex equipment 2 having the product name PR
D01, the process FLW01 indicates that three lots have been continuously supplied.

Next, a processing flow of the QC instruction of the complex equipment / process module is shown in FIG.

First, when the processing of the lot is completed in the complex equipment 2, 2a, the control unit of the complex equipment group controller 11 executes the process module processing based on the actual information P1 of the complex equipment / process module shown in FIG. The process module to be used is obtained from 6-6e (step S4)
01).

Then, the performance information R of the QC shown in FIG.
Regarding item 3, when the product name / process is switched, the information updating unit 11c updates the product name, process, and frequency from the QC standard information K3 shown in FIG. 12, and if the product name and process are the same, only the counter value is updated. Perform (Step S402).

Next, the comparison unit 11a compares the frequency of the QC standard information K3 of the corresponding complex equipment / process module with the counter value of the QC performance information R3, and the management control unit 11e needs the QC. It is determined whether or not this is the case (step S403).

When QC is required, that is, Q
If the frequency of the standard information K3 of C and the counter value of the actual information R3 of QC are the same, the management control unit 11e displays the QC instruction of the corresponding process module among the process modules 6 to 6e as the processing instruction information. 17 (step S404), and the input of the lot using the corresponding process module is stopped (step S40).
5).

In the process of step S403,
If the QC is unnecessary, that is, if the frequency of the QC standard information K3 is different from the counter value of the QC performance information R3, the process of step S401 is performed.

Next, in order to confirm the state of the equipment, a test semiconductor wafer is processed (step S40).
6) Inspection of the test semiconductor wafer is performed by a predetermined inspection device.

Then, the inspection result by the inspection device is output to the management control unit 11e (step S407). If the inspection result is OK, the management control unit 11e clears the QC performance information R3 of the process module that performed the QC. Is performed (step S408), and the input of the lot using the corresponding process module is restarted (step S40).
9). If the inspection result is NG, step S404
Is performed.

Here, according to the present embodiment, the QC standard information K3 and the QC performance information R3 are managed by the number of starts. For example, the last start time is set in units of the process modules 6 to 6e. It is also possible to manage the information as the standard information of the elapsed time from and to implement the equipment QC if the actual elapsed time is exceeded. In addition, it is also possible to have a data standard value for certain data reported from the complex equipment controllers 9 and 10, and to instruct the equipment QC from the performance information.

Next, a method of instructing the preceding processing in the process modules 6 to 6e of the complex facilities 2, 2a will be described.

Here, the preceding process is a process for processing one semiconductor wafer in a lot, performing an inspection, and determining whether or not to continue processing semiconductor wafers of other lots.

First, the standard information K4 of the preceding process of the process modules 6 to 6e of the complex equipments 2 and 2a stored in the storage unit 11d managed by the complex equipment group controller 11
Is shown in FIG.

The standard information K4 of the preceding processing is, for example, the name of the product to be processed by the process modules 6 to 6e.
When the process is switched to the product name PRD01 and the process FLW01, the first lot, the ninth lot, etc.
This indicates that it is necessary to perform a preceding process for processing one copy of the lot for each lot.

FIG. 16 shows the result information R4 of the preceding processing of the combined facility / process module stored in the storage unit 11d managed by the combined facility group controller 11.

The result information R4 of the preceding process indicates, for example, that the process module 6 of the combined equipment group controller 11 has completed the process of the product name PRD01 and the process FLW01 in three lots continuously. .

Next, FIG. 17 shows a processing flow in the instruction of the preceding processing of the complex equipment / process module.

First, the lot input into the complex equipments 2 and 2a is completed, and the management control unit 11e processes the process modules 6 to 6 based on the performance information P1 of the startable complex equipment and process modules shown in FIG. The process module to be used is obtained from 6e (step S501).

When the information updating unit 11c switches the product name / process with respect to the result information R4 of the preceding process shown in FIG. 16, the product name, process, and frequency are updated from the standard information K4 of the preceding process shown in FIG. If the product name and the process are the same, only the counter value is updated (step S502).

Next, the comparison unit 11a compares the frequency of the standard information K4 of the preceding process with the counter value of the performance information R4 of the preceding process, and the management control unit 11e determines whether or not the preceding process is necessary ( Step S503).

In the process of step S503, if the preceding process is required, that is, the standard information K of the preceding process
If the frequency of step 4 and the counter value of the result information R4 of the preceding processing are the same, a control signal for performing the preceding processing is issued to any one of the corresponding complex equipments 2 and 2a via the complex equipment controllers 9 and 10 to process. Output as information (step S50
4) Preceding processing of one semiconductor wafer is started.

Further, in the process of step S503,
If the preceding process is unnecessary, that is, if the frequency of the standard information K4 of the preceding process is different from the counter value of the actual information R4 of the preceding process, the process of step S501 is performed.

When the preceding process is completed (step S505), the processed semiconductor wafer is inspected by a predetermined inspection device, and an OK inspection result is output from the inspection device to the management controller 11e (step S505). S506),
The management control unit 11e clears the performance information R4 of the preceding process (step S507), and outputs the NG inspection result from the inspection device to the management control unit 11e (step S507).
506), the process of step S504 is performed.

After that, the management control unit 11e instructs one of the complex equipment controllers 9 and 10 to continue the corresponding complex equipment 2 and 2a (step S508).

Here, in the present embodiment, the standard information K4 of the preceding process and the result information R4 of the preceding process are managed by the number of starts. For example, each process module 6 to 6e starts the previous process. It is also possible to manage the information as the standard information of the elapsed time from the time, and to instruct the preceding process if the actual elapsed time is exceeded. Further, it is also possible to have a standard value of data with respect to certain data reported from the complex equipment controllers 9 and 10, and to instruct the preceding from the performance information.

Next, a method of instructing cleaning in the process modules 6 to 6e of the complex equipments 2 and 2a will be described.

First, the cleaning standard information K5 for the process modules 6 to 6e of the complex equipment 2, 2a stored in the storage unit 11d managed by the complex equipment group controller 11 is shown in FIG.

The cleaning specification information K5 is, for example, the first lot and the ninth lot when the product name / process to be processed in the process modules 6 to 6e is switched to the product name PRD01 or the process FLW01. Thus, it is indicated that it is necessary to issue a cleaning instruction for the process modules 6 to 6e of the complex equipments 2 and 2a every eight lots.

FIG. 19 shows the actual cleaning result information R5 of the combined facility / process module stored in the storage unit 11d managed by the combined facility group controller 11.

The cleaning performance information R5 indicates that, for example, the process module 6 of the complex equipment 2 has completed the processing of the product name, PRD01, and process FLW01 in three lots continuously.

Next, FIG. 20 shows a processing flow of a cleaning instruction in the process modules 6 to 6e of the complex equipments 2 and 2a.

First, the input of the lot to the complex equipment 2 or 2a is completed, and the management control unit 11e of the complex equipment group controller 11 records the performance information of the startable complex equipment / process module shown in FIG. From P1, the process module to be used among the process modules 6 to 6e is obtained (step S601).

Next, regarding the cleaning result information R5 shown in FIG. 19, when the information updating unit 11c switches the product name / process, the product name, process and frequency are updated from the cleaning standard information K5 shown in FIG. If the product name and the process are the same, only the counter value of the cleaning result information R5 is updated (step S602).

Thereafter, the comparison unit 11a compares the frequency of the cleaning standard information K5 in the process modules 6 to 6e of the corresponding complex equipment 2 and 2a with the counter value of the actual information, and the management control unit 11e needs to perform cleaning. Is determined (step S60).
3).

In the process of step S603, if cleaning is necessary, that is, if the frequency of the cleaning standard information K5 and the counter value of the cleaning result information R5 are the same, the management control unit 11e sets the multifunction equipment controller A control signal for performing cleaning is output as processing instruction information to any of the corresponding complex equipments 2 and 2a through steps 9 and 10 (step S604), and a predetermined cleaning type corresponding to the 'cleaning type' in the cleaning standard information K5 is output. Start cleaning.

Further, in the processing of step S603,
If the preceding process is unnecessary, that is, if the frequency of the cleaning standard information K5 is different from the counter value of the cleaning result information R5, the process of step S601 is performed.

When the cleaning is completed (step S605), the management controller 11e clears the cleaning result information R5 (step S506).

In the present embodiment, the cleaning standard information K5 and the cleaning result information R5 are managed by the number of starts. For example, each process module 6 to 6e is used for each process module 6 to 6e. It is also possible to manage as elapsed time standard information and to execute a cleaning instruction if the actual elapsed time is exceeded. Further, it is also possible to have a standard value of data for certain data reported from the complex equipment controllers 9 and 10, and to instruct a cleaning instruction from the actual information.

Thus, according to the present embodiment, the semiconductor wafer processing and the management of the combined facilities 2 and 2a can be efficiently performed in an optimum state by managing various results information of the combined facilities 2 and 2a. It can be performed.

Further, in the present embodiment, the management control system for managing the two complex facilities 2 and 2a has been described. However, the management control system for managing a production line provided with one or three or more complex facilities is provided. Even in a control system, it is possible to efficiently process semiconductor wafers and manage complex facilities in an optimal state.

Although the invention made by the inventor has been specifically described based on the embodiments of the present invention, the present invention is not limited to the above-described embodiments, and various modifications may be made without departing from the gist of the invention. Needless to say, it can be changed.

For example, in the above-described embodiment, a case has been described in which the management control system is used in a production line for processing semiconductor wafers, but the present invention can be applied to production lines in various fields such as an LCD production process.

[0127]

Advantageous effects obtained by typical ones of the inventions disclosed by the present application will be briefly described as follows.
It is as follows.

(1) According to the present invention, the production line monitoring system outputs appropriate processing instruction information based on various results information and standard information, so that the object to be processed and the production line are efficiently maintained. be able to.

(2) Further, according to the present invention, according to the above (1), the production line can be operated stably, and the quality of products and the work efficiency of workers can be greatly improved.

[Brief description of the drawings]

FIG. 1 is a configuration diagram of a combined facility group management device according to a first embodiment of the present invention.

FIG. 2 is a block diagram of a combined facility group controller according to the first embodiment of the present invention.

FIG. 3 is a table showing performance information of a combined facility / process module stored in a storage unit according to the embodiment of the present invention.

FIG. 4 is a table showing performance information of a combined facility / process module state stored in a storage unit according to the embodiment of the present invention.

FIG. 5 is an operation flowchart of the complex equipment group controller according to the embodiment of the present invention.

FIG. 6 is a table showing standard information of a sampling inspection stored in a storage unit according to the embodiment of the present invention.

FIG. 7 is a table showing sampling inspection result information stored in a storage unit according to the embodiment of the present invention;

FIG. 8 is an operation flowchart of the complex equipment group controller according to the embodiment of the present invention.

FIG. 9 is a table showing security standard information stored in a storage unit according to the embodiment of the present invention.

FIG. 10 is a table showing maintenance performance information stored in a storage unit according to the embodiment of the present invention.

FIG. 11 is an operation flowchart of the complex equipment group controller according to the embodiment of the present invention.

FIG. 12 is a table showing QC standard information stored in a storage unit according to the embodiment of the present invention.

FIG. 13 is a table showing QC performance information stored in a storage unit according to the embodiment of the present invention.

FIG. 14 is an operation flowchart of the complex equipment group controller according to the embodiment of the present invention.

FIG. 15 is a table showing standard information of a preceding process stored in a storage unit according to the embodiment of the present invention.

FIG. 16 is a table showing performance information of preceding processing stored in a storage unit according to the embodiment of the present invention.

FIG. 17 is an operation flowchart of the complex equipment group controller according to the embodiment of the present invention.

FIG. 18 is a table showing cleaning standard information stored in a storage unit according to the embodiment of the present invention.

FIG. 19 is a table showing actual cleaning information stored in a storage unit according to the embodiment of the present invention.

FIG. 20 is an operation flowchart of the complex equipment group controller according to the embodiment of the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Composite equipment group management apparatus (manufacturing line management system) 2, 2a Composite equipment 3 Cassette 4-4c Cassette module 5, 5a Transfer module (transfer room) 6-6e Process module (processing room) 7-7e Module controller 8 -8e Module controller 9, 10 Complex facility controller 11 Complex facility group controller (complex facility group management means) 11a Comparison section 11b Search determination section 11c Information update section 11d Storage section 11e Management control section 12 Stocker 13 Stocker controller 14 Transport Equipment 15 Transport equipment controller 16 Input means 17 Display means (output means) KS management control system FS Complex equipment group Ls line P1 Performance information of complex equipment / process module T1 Performance of complex equipment / process module status Report K1 Sampling inspection instruction standard information R1 Sampling inspection performance information K2 Maintenance standard information R2 Maintenance performance information K3 QC standard information R3 QC performance information K4 Pre-processing standard information R4 Pre-processing performance information K5 Cleaning standard Information R5 Cleaning performance information

Continued on the front page (72) Inventor Toshihiro Morii 5-2-1, Josuihonmachi, Kodaira-shi, Tokyo Inside Semiconductor Division, Hitachi, Ltd. (72) Tomoyuki Masui 5--20, Josuihoncho, Kodaira-shi, Tokyo No. 1 In the Semiconductor Division, Hitachi, Ltd.

Claims (8)

[Claims] 1. A plurality of processing chambers capable of performing at least one of the same kind of processing or a continuous processing on an object to be processed, a transfer chamber for transferring the object to be processed, and the plurality of processing chambers and the respective transfer What is claimed is: 1. A method for managing a production line comprising at least one complex facility provided with processing control means for controlling a processing room, comprising: storing various standard information and performance information of the plurality of processing rooms; Updating the updated performance information to the latest performance information in accordance with the operation status of the processing room; comparing or searching for the latest performance information and standard information; And a step of outputting detailed processing instruction information. 2. The method for managing a manufacturing line according to claim 1, further comprising: searching for the processing chamber in which search determining means is not operating based on the process module information stored in a storage unit. A search determining unit determines whether or not the processing chamber is in an operable state based on the process module state information, and a step of selecting the processing chamber in which construction can be started, and an instruction of the selected processing chamber is output by the output unit. And a step of outputting. 3. The method for managing a production line according to claim 1, wherein the information updating unit updates the sampling inspection result information stored in the storage unit each time the processing of the workpiece is completed. Comparing the actual information of the sampling inspection with the standard information of the sampling inspection previously stored in the storage unit by the comparing unit, and determining whether the management control unit needs the sampling inspection based on the comparison result. And a step of outputting, by an output unit, a sampling inspection instruction when a sampling inspection is required. 4. The method for managing a production line according to claim 1, wherein each time a maintenance operation is performed in the processing chamber, a maintenance result information is updated by an information updating unit. A step of comparing the maintenance standard information stored in the storage unit in advance by the comparing unit, a step of determining whether or not the maintenance work is required by the management control unit based on the comparison result; And outputting, by an output unit, an instruction of the processing chamber requiring maintenance in such a case. 5. The method for managing a production line according to claim 1, wherein each time a foreign substance inspection in the processing chamber is performed, the result updating unit updates the result information of the QC with an information updating unit. A step of comparing the QC standard information stored in the storage unit in advance by the comparing unit, a step of determining whether or not the foreign substance inspection is required by the management control unit based on the management result; Outputting an instruction of the processing chamber which requires foreign substance inspection by an output means in such a case. 6. The method for managing a production line according to claim 1, wherein each time a preceding process of the processing chamber is performed, a result information of the preceding process is updated by an information updating unit; Comparing the information with the standard information of the preceding process previously stored in the storage unit by the comparing unit; and, based on the comparison result, the management control unit determining whether the preceding process is necessary. A process in which a management control unit outputs a control signal for starting a preceding process to a process control unit that controls the processing chamber that performs the preceding process when the process is necessary. 7. The method for managing a manufacturing line according to claim 1, wherein each time the processing chamber is cleaned, a cleaning result information is updated by an information updating unit; A step of comparing the cleaning standard information stored in the storage section with a comparison section, a step of determining whether or not cleaning is necessary by the management control section based on the comparison result; and Outputting an instruction of the processing chamber requiring cleaning by an output unit. 8. A plurality of processing chambers capable of performing at least one of the same kind of processing or a continuous processing on an object to be processed, a transfer chamber for transferring the object to be processed, and each of the plurality of processing chambers and the transfer chamber. A management control system for managing a production line including at least one complex facility provided with processing control means for performing control, an input means for inputting various standard information and performance information of the plurality of processing chambers, A storage unit that stores the standard information and the performance information input by the input unit, and an information update unit that updates the performance information stored in the storage unit with the latest performance information in accordance with the operation state of the processing room. Search determination means for searching for the processing chamber in which the processing of the workpiece can be performed based on performance information,
A comparison unit that compares the standard information and the performance information; and controls a construction start instruction and a maintenance management according to an operation status of the plurality of processing chambers based on a search result of the search determination unit and a comparison result of the comparison unit. A complex control facility group, which is connected to the processing control means online, and an output means for displaying or printing a construction start instruction output from the management control section. Management control system.