JPH10262383A - Magnetic levitation mechanism - Google Patents

Abstract

PROBLEM TO BE SOLVED: To avoid an increase in heating of an electromagnet and an increase in the size of an apparatus by providing a first toothform having repeating convexo-shape in a direction for circulating a float at a part opposed to the electromagnet of a magnetic element of an outer periphery of the levitating body, and providing a second toothform having repeating convexo-concave shape along the convexo-concave shape of the toothform of the levitating body. SOLUTION: An iron plate 12 installed in a levitating body 11 has a toothform 12a having repeating convexo-concave shape in a direction for circulating the levitate body 11 at parts opposed to an electromagnet 15 of the plate 12. The electromagnet 15 disposed in a housing 14 has a toothform 15a having repeating convexo-concave shape along the convexo-concave shape of the toothform 12a of the plate 12 so that the convex parts are opposed to the convex parts of the toothform 12a of the plate 12. here, when a current flows in the electromagnet 15, each convex part of the tooth form 15a of the electromagnet 15 acts as a magnet, and the convex part corresponding to the convex part of the toothform 15a of the electromagnet 15 of the toothform 12a of the plate 12 is attached. Thus, rotation of the levitating body 11 in the circumferental direction is suppressed by a restoring force by an electromagnetic force generated at both ends of the convex part of the toothform 15a of the electromagnet 15.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic levitation mechanism for levitating a floating body by electromagnetic force.

[0002]

2. Description of the Related Art Conventionally, in order to precisely position or move an optical component or the like which requires extremely precise positioning or movement without mechanical backlash or the like, a main component is levitated by an electromagnetic force. Levitation mechanisms are known. FIG.
FIG. 8A is a front view of a conventional magnetic levitation mechanism, and FIG.
FIG. 3B is a cross-sectional view taken along line XX ′ of the magnetic levitation mechanism shown in FIG.

A magnetic levitation mechanism 80 shown in FIG. 8 is provided with a cylindrical levitation body 81. On the surface of the floating body 81, four iron plates 82 are provided. Further, the magnetic levitation mechanism 80 has a floating body arrangement hole 83 into which the floating body 81 is loosely inserted.
Is provided. In the housing 84, the floating body 81 is floated in the floating body placement hole 83 by electromagnetic force at a position facing the iron plate 82 provided in the floating body 81 loosely inserted into the floating body placement hole 83. Electromagnet 85
Are arranged.

[0004] In the magnetic levitation mechanism 80 configured as described above, the iron plate 82 is attracted from four directions by electromagnetic force generated by applying a current to the electromagnet 85, and the levitation body 81 floats on the levitation body arrangement hole 83. Further, the levitation body 81 floats in the levitation body arrangement hole 83, and is provided on the right side of the magnetic levitation mechanism 80 shown in FIG. ) Is driven in the drive axis direction indicated by arrow Z.

[0005]

In the magnetic levitation mechanism 80 described above, a force may be exerted in the direction of orbiting the levitation body 81 due to disturbance or the like, and if the levitation body 81 moves even slightly in the orbital direction. When the levitation body 81 or the magnetic levitation mechanism 80 relates to extremely precise parts,
It may cause undesired results.

FIG. 9 is an enlarged view of the electromagnet and the iron plate within the ellipse A of the magnetic levitation mechanism shown in FIG.
Even if a force acts on the floating body 81 provided with the iron plate 82 shown in FIG. 9 in a direction (R direction shown in the drawing) to make the floating body 81 circulate due to a disturbance or the like, the floating body 81 moves in the direction of the arrow R (R direction). Rotation) is suppressed by the restoring force P due to the electromagnetic force generated at both ends of the electromagnet 85.

However, since the restoring force P is due to the electromagnetic force generated at both ends of the electromagnet 85, the floating body 81
However, the suppressing force for suppressing the rotation in the circling direction is small and is not enough to suppress the movement of the levitation body 81 in the circling direction to an extremely small amount. Therefore, it is necessary to position the magnetic levitation mechanism 80 with extremely high precision. However, there is a problem that it is difficult to apply the present invention to an apparatus that performs the above. In order to solve this problem, the current flowing through the electromagnet 85 is increased, and the electromagnetic force generated at both ends of the electromagnet 85 is increased.
It is conceivable to increase the suppressing force for suppressing the rotation in the circumferential direction. However, this causes a problem that heat generation of the electromagnet 85 increases. It is also conceivable to increase the number of turns of the coil of the electromagnet 85, thereby increasing the suppression force for suppressing the rotation of the floating body 81 in the circumferential direction. However, this causes a problem that the electromagnet 85 becomes large. is there.

In view of the above circumstances, it is an object of the present invention to provide a magnetic levitation mechanism capable of avoiding an increase in heat generation of an electromagnet and an increase in the size of a device, and capable of minimizing the movement of a levitation body in a circling direction. And

[0009]

According to a first magnetic levitation mechanism of the present invention for achieving the above object, a cylindrical or columnar floating body in which at least a part of the outer peripheral surface is made of a magnetic material, While having a floating body arrangement hole to be loosely inserted,
The position where the electromagnet for floating the floating body inserted in the floating body placement hole into the floating body placement hole by electromagnetic force is opposed to the magnetic material on the surface of the floating body loosely inserted in the floating body placement hole. In the magnetic levitation mechanism provided with a housing arranged in the above, the levitation body repeats irregularities in a direction around the levitation body in a portion of the magnetic material on the outer peripheral surface of the levitation body facing the electromagnet. In addition to having a first tooth profile, the electromagnet has a second tooth profile that repeats the irregularities along the irregularities of the tooth profile of the floating body such that the convex part faces the convex part of the tooth profile of the floating body. Characterized in that:

In the first magnetic levitation mechanism of the present invention, the rotation of the levitation body in the circumferential direction is suppressed by the restoring force due to the electromagnetic force generated at both ends of each of the tooth-shaped protrusions of the electromagnet. This restoring force is larger than the conventional restoring force due to the electromagnetic force generated only at both ends of the electromagnet, so that the movement of the levitation body in the revolving direction can be reduced. Further, for example, heat generation of the electromagnet can be suppressed to be smaller than in a case where the current of the electromagnet is increased and the electromagnetic force generated at both ends of the electromagnet is increased to suppress the rotation of the levitating body in the circumferential direction. . Further, the number of windings of the coil of the electromagnet is increased, thereby making it possible to avoid an increase in the size of the device as compared with the case where the rotation of the levitating body in the circumferential direction is suppressed.

According to a second magnetic levitation mechanism of the present invention for achieving the above object, there is provided a levitation body in which at least a part of an outer peripheral surface is made of a magnetic material, and a levitation body into which the levitation body is loosely inserted. An electromagnet having a body placement hole, and an electromagnet that floats the floating body loosely inserted in the floating body placement hole into the floating body placement hole by electromagnetic force, the surface of the floating body loosely inserted into the floating body placement hole A magnetic levitation mechanism comprising a housing arranged at a position facing the magnetic body, wherein the levitation body protrudes from the outer peripheral surface of the levitation body, and at least at a tip portion, a magnetic pole is provided in a circumferential direction of the levitation body. A wing body having a first permanent magnet facing the wing body, wherein the housing loosely fits the wing body tip such that the same magnetic poles are opposed to the first permanent magnet at the wing body tip. Characterized by two permanent magnets To.

[0012] In the second magnetic levitation mechanism of the present invention, the rotation of the levitation body in the revolving direction is provided on the permanent magnet disposed on the wing-like body protruding from the outer peripheral surface of the levitation body and on the housing. It is suppressed by the repulsive force with the permanent magnet. For this reason, the rotation of the levitating body in the revolving direction is suppressed with a large restoring force as compared with the related art. Therefore, the movement of the levitating body in the revolving direction can be reduced.

Further, the third object of the present invention to achieve the above object is as follows.
The magnetic levitation mechanism has a cylindrical or columnar floating body having at least a portion of the outer peripheral surface made of a magnetic material, a floating body arrangement hole into which the floating body is loosely inserted, and a floating body arrangement hole in the floating body arrangement hole. An electromagnet that causes the inserted levitation body to float in the levitation body arrangement hole by electromagnetic force, and a housing that is arranged at a position facing the magnetic body on the surface of the levitation body that is loosely inserted in the levitation body arrangement hole. In the magnetic levitation mechanism, the levitation body includes a wing-shaped body protruding from the outer peripheral surface of the levitation body, and at least a tip portion made of a magnetic material. A sensor that measures the position of the wing and the tip of the wing are loosely fitted from both sides in the circling direction of the floating body, and the feedback of the measurement value by the sensor is received to control the position of the wing in the circling direction of the floating body. With an electromagnet Characterized in that was.

In the third magnetic levitation mechanism of the present invention, the rotation of the levitation body in the circling direction controls the position of the wing body made of a magnetic material projecting from the outer peripheral surface of the levitation body in the circling direction of the levitation body. Suppressed by electromagnets. For this reason, the force acting in the direction of orbiting the levitation body is suppressed by a large restoring force as compared with the related art. Further, the electromagnet for controlling the position of the wing in the circling direction of the levitation body is controlled by receiving feedback of a measurement value from a sensor for measuring the position in the circling direction of the levitation body. Can be kept extremely small.

[0015]

Embodiments of the present invention will be described below. FIG. 1 shows a first magnetic levitation mechanism of the present invention.
FIG. 2A is a front view of the embodiment, and FIG. 1B is a cross-sectional view of the magnetic levitation mechanism shown in FIG. FIG.
FIG. 2 is an enlarged view showing an electromagnet and an iron plate within an ellipse A of the magnetic levitation mechanism shown in FIG.

The magnetic levitation mechanism 10 shown in FIG. 1 includes a cylindrical levitation body 11. On the surface of the floating body 11, four iron plates 12 are provided. The magnetic levitation mechanism 10 has a levitation body arrangement hole 1 into which the levitation body 11 is loosely inserted.
3 is provided. In this case 14, the floating body 11 is floated in the floating body placement hole 13 by electromagnetic force at a position facing the iron plate 12 provided in the floating body 11 loosely inserted into the floating body placement hole 13. Electromagnet 15
Are arranged.

The iron plate 12 provided on the floating body 11 is shown in FIG.
As shown in the figure, a tooth profile 1 that repeats irregularities in a direction of orbiting the levitation body 11 is provided on a portion of the iron plate 12 facing the electromagnet 15.
2a. Also, the electromagnet 15 provided in the housing 14
Has a tooth shape 15a that repeats irregularities along the irregularities of the tooth shape 12a of the iron plate 12 such that the convex portion faces the convex portion of the tooth shape 12a of the iron plate 12.

Here, when a current is applied to the electromagnet 15, each of the protruding portions of the tooth shape 15a of the electromagnet 15 acts as a magnet, and the tooth shape 12a of the iron plate 12
The protrusion corresponding to the protrusion of a is sucked. For this reason, the rotation of the levitating body 11 in the circumferential direction is performed by the tooth shape 15 a of the electromagnet 15.
Are suppressed by the restoring force due to the electromagnetic force generated at both ends of each of the convex portions. This restoring force is larger than the conventional restoring force due to the electromagnetic force generated only at both ends of the electromagnet (see FIG. 9), so that the movement of the levitation body 11 in the revolving direction can be reduced. . Further, for example, heat generation of the electromagnet can be suppressed to be small as compared with the case where the current of the electromagnet is increased to increase the electromagnetic force generated at both ends of the electromagnet to suppress the rotation of the levitating body in the circumferential direction.
Further, it is possible to avoid an increase in the size of the device as compared with a case where the number of turns of the coil of the electromagnet is increased to suppress the rotation of the floating body in the circumferential direction.

In the magnetic levitation mechanism 10 of the present embodiment,
When the total area of the portion where the gap is narrow between the tooth profile 12a of the iron plate 12 and the tooth profile 15a of the electromagnet 15 is constant, the floating body 1 is almost in proportion to the number of irregularities of the tooth profiles 12a and 15a.
1, the suppressing force for suppressing the rotation in the circumferential direction increases. FIG. 3 is a front view (a) of the second embodiment of the first magnetic levitation mechanism of the present invention, and is a cross-sectional view (b) of XX ′ of the magnetic levitation mechanism shown in FIG. 3 (a).

The same components as those of the magnetic levitation mechanism 10 shown in FIG. 1 are denoted by the same reference numerals, and redundant description will be omitted. The magnetic levitation mechanism 30 shown in FIG. 3 includes, in addition to the components of the magnetic levitation mechanism 10 shown in FIG. 1, a vertical position of the levitation body 11 shown in FIG. And a floating gap sensor 31 for measuring left and right positions. The floating gap sensor 31 measures the vertical position and the horizontal position of the floating body 11 in the floating body arrangement hole 13 of the housing 14 and controls the current of the electromagnet 15 based on the measured values. The floating body 11 can be accurately floated in the floating body arrangement hole 13. The fact that the movement of the levitation body 11 in the revolving direction due to the restoring force due to the electromagnetic force generated at each end of each of the protrusions of the tooth shape 15a of the electromagnet 15 described above can be suppressed small is shown in FIGS. This is the same as in the case of the form.

FIG. 4 is a view showing a first embodiment of the second magnetic levitation mechanism of the present invention. Magnetic levitation mechanism 4 shown in FIG.
0 is provided with a cylindrical floating body 41. On the surface of the floating body 41, four iron plates 42 are provided.
The magnetic levitation mechanism 40 includes a housing 44 having a levitation body arrangement hole 43 into which the levitation body 41 is loosely inserted.
In the cylindrical body 44, the floating body 41 is floated in the floating body placement hole 43 by electromagnetic force at a position facing the iron plate 42 provided in the floating body 41 loosely inserted into the floating body placement hole 43. An electromagnet 45 is provided.

The levitation body 41 is provided with a wing-shaped body 47 having a permanent magnet 46 projecting from the outer peripheral surface of the levitation body 41 and having a magnetic pole oriented in the circumferential direction of the levitation body 41 at the tip. I have. Further, the housing 44 is provided with a permanent magnet 48 for loosely fitting the tip of the wing 47 so that the same magnetic poles face the permanent magnet 46 at the tip of the wing 47. A small permanent magnet is fixed to the tip of the wing-shaped body 47 in order to make the floating body 41 light. The permanent magnet 48 is formed to have a length equal to or longer than the driving amount of the floating body 41 (the driving amount in the driving axis Z direction by the voice coil and the like described with reference to FIG. 8).

In the magnetic levitation mechanism 40 configured as described above, the rotation of the levitation body 41 in the circling direction is performed by the permanent magnet 46 provided on the wing body 47 protruding from the outer peripheral surface of the levitation body 41.
And the repulsive force of the permanent magnet magnetic pole 48 provided in the housing 44. Therefore, the force acting in the direction in which the levitation body 41 circulates is suppressed by a large restoring force as compared with the related art, and the movement of the levitation body 41 in the circling direction can be suppressed to a small value. Further, since the permanent magnet 48 provided in the housing 44 is formed to be longer than the driving range of the floating body 41 in the Z direction (see FIG. 8), the repulsive force between the permanent magnet 46 and the permanent magnet 48 is formed. The force for suppressing the rotation of the levitating body 41 in the circumferential direction by the force acts on the entire driving range of the levitating body 41.

FIG. 5 is a front view (a) of a second magnetic levitation mechanism according to a second embodiment of the present invention, and FIG. 5B is a sectional view (b) of FIG. is there. FIG.
The same reference numerals are given to the same components as those of the magnetic levitation mechanism 40 shown in FIG. In the magnetic levitation mechanism 50 shown in FIG. 5, in addition to the components of the magnetic levitation mechanism 40 shown in FIG. 4, the vertical position of the levitation body 41 shown in FIG. And a floating gap sensor 51 for measuring the left and right positions. Further, the floating body 41 is provided with a permanent magnet 52 projecting from an outer peripheral surface of the floating body 41 and having a magnetic pole oriented in a direction in which the floating body 41 rotates. That is, in this embodiment, the permanent magnet 52 constitutes a wing-like body according to the present invention.

In the magnetic levitation mechanism 50 configured as described above, the vertical position and the left and right position of the floating body 41 in the floating body arrangement hole 43 of the housing 44 are measured by the floating gap sensor 51, and the measurement is performed. By controlling the current of the electromagnet 45 based on the value, the floating body 41 can be accurately levitated in the floating body arrangement hole 43. The force for suppressing the rotation of the levitation body 41 in the circumferential direction is the same as that of the magnetic levitation mechanism 40 shown in FIG.

FIG. 6 is a view showing a first embodiment of the third magnetic levitation mechanism of the present invention. Magnetic levitation mechanism 6 shown in FIG.
0 is provided with a cylindrical floating body 61. An iron plate 62 is provided on the circumference of the floating body 61. The magnetic levitation mechanism 60 includes a housing 64 having a levitation body arrangement hole 63 into which the levitation body 61 is loosely inserted. The housing 64 includes a floating body 61 loosely inserted into the floating body arrangement hole 63.
An electromagnet 65 is provided to levitate in the levitating body arrangement hole 63 by electromagnetic force.

The levitation body 61 is provided with a wing-shaped body 67 having a distal end made of a magnetic material, protruding from the outer peripheral surface of the levitation body 61. In addition, the housing 64 includes a circling position sensor 6 that measures the position of the wing 67 in the circling direction of the floating body 61.
8 are provided. Further, the casing 64 includes a winged body 67.
The electromagnet 69 controls the position of the wing body 67 in the circling direction by receiving the feedback of the measurement value from the circling position sensor 68.
Is provided.

In the magnetic levitation mechanism 60 configured as described above, the rotation of the levitation body 61 in the circling direction is performed by rotating the levitation body 67, which protrudes from the outer peripheral surface of the levitation body 61 and has a tip portion made of a magnetic material.
And the interaction between the wing 67 and the electromagnet 68 that controls the position of the floating body 61 in the circumferential direction. Since the electromagnet 69 is controlled by receiving feedback of a measurement value from the orbiting position sensor 68 for measuring the position of the levitating body 61 in the orbital direction, the movement of the levitating body 61 in the orbital direction is accurately controlled. be able to.

FIG. 7 is a front view (a) of a second embodiment of the third magnetic levitation mechanism according to the present invention, and FIG. 7 (b) is a sectional view (b) of the magnetic levitation mechanism shown in FIG. is there. FIG.
The same reference numerals are given to the same components as those of the magnetic levitation mechanism 60 shown in FIG. The levitation 73 constituting the magnetic levitation mechanism 70 shown in FIG. 7 includes four iron plates 72. Also, a floating gap sensor 7 for measuring the vertical position and the horizontal position of the floating body 73 shown in FIG.
1 is provided.

In the magnetic levitation mechanism 70 configured as above, the vertical position and the left and right positions of the floating body 73 in the floating body arrangement hole 63 of the housing 64 are measured by the floating gap sensor 71, and the measurement is performed. By controlling the current of the electromagnet 65 based on the value, the floating body 73 can be accurately levitated in the floating body arrangement hole 63. In addition, the rotation of the floating body 73 in the circumferential direction is performed by rotating the wing-shaped body 67 made of a magnetic material and protruding from the outer peripheral surface of the floating body 73.
And the interaction between the wing 67 and the electromagnet 69 that controls the position of the floating body 73 in the circumferential direction. This electromagnet 69 is similar to the embodiment shown in FIG.
3 is controlled by receiving feedback of a measured value from the orbiting position sensor 68 for measuring the position in the orbiting direction, so that the movement of the levitating body 73 in the orbiting direction is accurately controlled.

Although the present embodiment has been described using a cylindrical floating body having an outer peripheral surface provided with an iron plate, the present invention is not limited to this.
A floating body on a pillar made of iron or another magnetic material may be used.

[0032]

As described above, according to the present invention,
It is possible to avoid an increase in the calorific value of the electromagnet and an increase in the size of the device, and to suppress the movement of the levitating body in the revolving direction to be small.

[Brief description of the drawings]

FIG. 1A is a front view of a first magnetic levitation mechanism according to a first embodiment of the present invention, and FIG. 1B is a cross-sectional view of the magnetic levitation mechanism shown in FIG.

FIG. 2 is an enlarged view showing an electromagnet and an iron plate in an ellipse A of the magnetic levitation mechanism shown in FIG.

3A is a front view of a second embodiment of the first magnetic levitation mechanism of the present invention, and FIG. 3B is a sectional view of the magnetic levitation mechanism shown in FIG.

FIG. 4 is a diagram showing a first embodiment of a second magnetic levitation mechanism of the present invention.

5A is a front view of a second magnetic levitation mechanism according to a second embodiment of the present invention, and FIG. 5B is a cross-sectional view of the magnetic levitation mechanism taken along line XX ′ of FIG. 5A.

FIG. 6 is a view showing a first embodiment of a third magnetic levitation mechanism of the present invention.

7A is a front view of a second embodiment of the third magnetic levitation mechanism of the present invention, and FIG. 7B is a sectional view of the magnetic levitation mechanism taken along line XX ′ of FIG. 7A.

8A is a front view of a conventional magnetic levitation mechanism, and FIG. 8B is a cross-sectional view of the magnetic levitation mechanism shown in FIG.

9 is an enlarged view showing the electromagnet and the iron plate within the ellipse A of the magnetic levitation mechanism shown in FIG. 8A.

[Explanation of symbols]

 10, 30, 40, 50, 60, 70 Magnetic levitation mechanism 11, 41, 61, 73 Floating body 12, 42, 62, 72 Iron plate 12a, 15a Tooth profile 13, 43, 63 Floating body arrangement hole 14, 44, 64 Body 15, 45, 65, 69 Electromagnet 31, 51, 71 Levitating gap sensor 46, 48, 52 Permanent magnet 47, 67 Wing body 68 Orbiting position sensor

Claims (3)

[Claims] 1. A floating body having a cylindrical or columnar shape in which at least a part of the outer peripheral surface is made of a magnetic material, a floating body arrangement hole into which the floating body is loosely inserted, and a loosely inserted body in the floating body arrangement hole. An electromagnet that causes the floated body to float in the floating body arrangement hole by electromagnetic force, and a housing that is disposed at a position facing the magnetic body on the surface of the floating body that is loosely inserted into the floating body arrangement hole. In the magnetic levitation mechanism provided, the levitation body has a first tooth profile that repeats irregularities in a direction around the levitation body in a portion of the magnetic body on the outer peripheral surface of the levitation body facing the electromagnet, The magnet, wherein the electromagnet has a second tooth profile that repeats irregularities along the irregularities of the tooth profile of the floating body such that the convex part faces the convex part of the tooth profile of the floating body. Levitation mechanism. 2. A floating body having a cylindrical or columnar shape in which at least a part of an outer peripheral surface is made of a magnetic material, a floating body arrangement hole into which the floating body is loosely inserted, and a floating body is freely inserted into the floating body arrangement hole. An electromagnet that causes the floated body to float in the floating body arrangement hole by electromagnetic force, and a housing that is disposed at a position facing the magnetic body on the surface of the floating body that is loosely inserted into the floating body arrangement hole. In the magnetic levitation mechanism, the levitation body includes a wing-shaped body having a first permanent magnet projecting from an outer peripheral surface of the levitation body and having, at least at a front end, a magnetic pole oriented in a circumferential direction of the levitation body; A magnetic levitation mechanism, characterized in that the body includes a second permanent magnet that loosely fits the tip of the wing such that the same magnetic poles face the first permanent magnet of the tip of the wing. 3. A floating body having a cylindrical or columnar shape in which at least a part of the outer peripheral surface is made of a magnetic material, a floating body arrangement hole into which the floating body is loosely inserted, and a loosely inserted body in the floating body arrangement hole. An electromagnet that causes the floated body to float in the floating body arrangement hole by electromagnetic force, and a housing that is disposed at a position facing the magnetic body on the surface of the floating body that is loosely inserted into the floating body arrangement hole. In the magnetic levitation mechanism provided, the levitation body includes a wing-shaped body projecting from the outer peripheral surface of the levitation body, and at least a tip end portion of the levitation body is formed of a magnetic material. A sensor for measuring the position and the tip of the wing are loosely fitted from both sides in the circling direction of the levitation body, and the position of the wing in the circling direction of the levitation body is controlled by receiving feedback of a measurement value from the sensor. And an electromagnet. Magnetic levitation mechanism that.