JPH10255206A - Magnetic head for magneto-optical recording, fabricating method thereof, and magneto-optical recording apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To precisely align a center hole of a coil with a magnetic pole providing hole of a slider by providing a spiral-shaped coil composed of a coil pattern which is formed of a conductive material film on a substrate formed of a non- conductive material and providing a positioning section on the substrate as well as a guide pattern formed of a conductive material film in a peripheral portion thereof. SOLUTION: A coil is composed of a thin-plate substrate 23 formed of a non-conductive material, a first coil pattern 24a formed of a conductive material film on a surface of the substrate 23 facing a core, a second coil pattern 24b formed on another surface of the substrate 23 facing a disk, and protection coatings 25a and 25b. A quadrangle center hole 32 is formed at the center, and positioning sections 26, 27, and 28 are formed in the surrounding portion of the coil patterns. The coil is attached onto a slider by engaging the positioning sections 26, 27, and 28 with engaging sections on the slider, and positioned so that the center hole 32 of the coil aligns with a magnetic pole providing hole of the slider.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a magneto-optical recording magnetic head for recording information signals on a magneto-optical recording medium, and a magneto-optical recording apparatus.

[0002]

2. Description of the Related Art Hitherto, a magneto-optical recording apparatus for recording an information signal at a high density on a magneto-optical recording medium such as a magneto-optical disk uses a magnetic field modulation system. This type of apparatus includes an optical head, a magnetic head, and a driving unit for a magneto-optical recording medium, and drives the magneto-optical recording medium, and at the same time, applies a laser beam to the magnetic recording layer of the magneto-optical recording medium by the optical head. And a magnetic head applies a magnetic field modulated by an information signal in a vertical direction to a laser beam irradiated portion of the magneto-optical recording medium by a magnetic head, thereby recording the information signal on the magneto-optical recording medium. It is.

[0003]

The inventor of the present invention has proposed a magnetic head having a novel structure used in such a magneto-optical recording apparatus.

FIG. 8 shows a side sectional view of such a magnetic head, and FIG. 9 shows a configuration of a coil. In FIG.
(A) is a view as viewed from above, (b) is a side sectional view,
(C) is the figure seen from the lower surface direction.

[0005] The core 50 has a square plate shape and is made of a magnetic material such as ferrite. At the center of the core 50, a protruding quadrangular pole-shaped magnetic pole 50a is formed so as to be substantially perpendicular to the magneto-optical recording medium.

The coil 51 is made of a thin plate made of a non-conductive material, for example, a resin such as polyimide, and a film made of a conductive material such as copper. The first coil pattern 54a formed, the second coil pattern 54b formed on the surface of the substrate 53 facing the magneto-optical recording medium, and the first coil pattern 54b made of a non-conductive resin material such as a resin material. It comprises a coil pattern 54a and protective coats 55a and 55b formed so as to cover the second coil pattern 54b. Further, a square center hole 56 is formed in the center of the coil 51. Coil 51
Correspond to the core 5 so as to be substantially parallel to the magneto-optical recording medium.
The magnetic pole 50 a of the core 50 is provided inside the center hole 56.

[0007] The first coil pattern 54a and the second coil pattern 54b are formed in a spiral shape around the center hole 56, and the inner peripheral portion of the first coil pattern 54a and the second coil pattern 54b are formed. The inner peripheral portion is connected in series via a connecting portion 57 formed near the center hole 56.

A first terminal 59a and a second terminal 59b are formed on a surface of the base material 53 facing the core 50, and an outer peripheral portion of the first coil pattern 54a is a first terminal 59a. 59a, the outer peripheral portion of the second coil pattern 54b
It is connected to the second terminal 59b via the connection part 58.

The core 50 and the coil 51 are made of a slider 52 made of a wear-resistant resin material or ceramic material.
Mounted on A magnetic pole arrangement hole 60 is formed in the slider 52, and the coil 51 is attached to the slider 52 such that the center hole 56 overlaps the magnetic pole arrangement hole 60 of the slider 52.

Further, the core 50 is mounted on the coil 51, and the magnetic pole 50 a of the core 50 is disposed in the center hole 56 of the coil 51 and the magnetic pole arrangement hole 60 of the slider 52.

The magnetic head is held by supporting means (not shown) with the bottom surface 52a facing the magneto-optical recording medium, and slides on the magneto-optical recording medium.

The first terminal 59a and the second terminal 59b of the coil 51 are connected to a magnetic head drive circuit (not shown), and the first coil pattern 54a and the second coil When a current is supplied to the pattern 54b, a magnetic field is generated from the end face of the magnetic pole 50a, and this magnetic field is applied vertically to the magneto-optical recording medium.

In recent years, there has been an increasing demand for faster recording of information signals, and accordingly, it has been necessary to increase the modulation frequency of a magnetic field. However, in the above-described magneto-optical recording device, when an attempt is made to increase the modulation frequency of the magnetic field, a high drive voltage proportional to the modulation frequency is applied to the coil 51 of the magnetic head due to the inductance of the coil 51 of the magnetic head. And the power consumption of the device increases. Therefore, in order to speed up the recording of the information signal without increasing the power consumption of the device,
It is essential to reduce the inductance of the coil 51 of the magnetic head.

Incidentally, the inductance of the coil 51 of the magnetic head is reduced as the cross-sectional area of the magnetic pole 50a of the core 50 is reduced and the inner diameters of the first coil pattern 54a and the second coil pattern 54b are reduced. Can be. Therefore, when the maximum modulation frequency of the magnetic field is 8 MHz or more, the cross-sectional area of the magnetic pole is 0.0
4 mm ² or less (for example, when the cross section of the magnetic pole is square, the dimension of each side is 200 μm or less), and the center hole 56 of the coil 51, the first coil pattern 54a, and the second It is necessary to make the inner diameter of the coil pattern 54b as small as possible.

Further, the magnetic pole arrangement hole 6 of the slider 52 is provided.
0 must be as small as possible in accordance with the shape and dimensions of the magnetic pole 50a of the core 50. This is because if the magnetic pole arrangement hole 60 is excessively larger than the magnetic pole 50a and there is a large gap around the magnetic pole 50a, when the slider 52 slides on the magneto-optical recording medium, the slider 52 slides on the magneto-optical recording medium. Dust gradually accumulates in the gap, which increases the frictional force between the slider 52 and the magneto-optical recording medium, and in severe cases, the accumulated dust may damage the magnetic head and the magneto-optical recording medium. Because there is.

However, on the other hand, as the center hole 56 of the coil 51 and the magnetic pole arrangement hole 60 of the slider 52 are made smaller, the center hole 56 of the coil 51 and the magnetic pole arrangement hole 60 of the slider 52 become smaller during the manufacture of the magnetic head. It is difficult to mount the coil 51 on the slider 52 so that the coils overlap exactly. For this reason, there is a limit in reducing the center hole 56 of the coil 51 and the magnetic pole arrangement hole 60 of the slider 52.

When the inner diameters of the first coil pattern 54a and the second coil pattern 54b are reduced to be closer to the size of the center hole 56, the center hole 56 is formed when the coil 51 is manufactured. In the process, the coil 5
Even a slight error in the position of attachment to the first processing apparatus causes the formation position of the center hole 56 to deviate from the center position of the coil 51, and as a result, a situation occurs in which the coil pattern is exposed on the inner wall of the center hole 56. In such a case, the magnetic pole 50a of the core 50 disposed in the center hole 56
Comes into contact with the first coil pattern 54a or the second coil pattern 54b, and the first coil pattern 54a
a and the current to be supplied to the second coil pattern 54b flows out through the core 50 to the outside.

The above problems are particularly serious when the cross-sectional area of the magnetic pole of the core is set to 0.04 mm ² or less and the maximum modulation frequency of the magnetic field is increased to 8 MHz or more.

[0019]

According to the present invention, there is provided a magnetic head for magneto-optical recording, comprising: a base made of a non-conductive material; a coil pattern formed in a spiral shape on the base and made of a film of a conductive material. And a positioning portion is formed on the base material, and a guide pattern made of a film of a conductive material is formed on a peripheral portion of the positioning portion.

Further, a method of manufacturing a magnetic head for magneto-optical recording according to the present invention is characterized in that a base material made of a non-conductive material, a coil pattern made of a film of a conductive material and formed on the base material in a spiral shape. In the manufacture of a magnetic head for magneto-optical recording provided with a coil constituted by, a guide pattern made of a film of a conductive material is formed on the base material, and the laser processing using the guide pattern as a mask is performed. The positioning portion is formed by removing a part of the base material.

The magnetic head for magneto-optical recording according to the present invention comprises: 1. a core made of magnetic material and having protruding magnetic poles; A coil comprising a substrate made of a non-conductive material, and a coil pattern made of a film of a conductive material and formed on the substrate in a spiral shape, and further having a center hole in which the magnetic pole is provided. And a guide pattern formed of a film of a conductive material is formed on a peripheral portion of the center hole.

Further, the guide pattern is not formed in a closed ring surrounding at least the entire periphery of the center hole.

The method of manufacturing a magnetic head for magneto-optical recording according to the present invention comprises: 1. a core made of magnetic material and having protruding magnetic poles; A coil comprising a substrate made of a non-conductive material, and a coil pattern made of a film of a conductive material and formed on the substrate in a spiral shape, and further having a center hole in which the magnetic pole is provided. In the manufacture of a magnetic head for magneto-optical recording comprising: a guide pattern made of a film of a conductive material is formed on the base material, and a portion of the base material is formed by laser processing using the guide pattern as a mask. The center hole is formed by removing the center hole.

The method of manufacturing a magnetic head for magneto-optical recording according to the present invention comprises: 1. a core made of magnetic material and having protruding magnetic poles; A coil comprising a substrate made of a non-conductive material, and a coil pattern made of a film of a conductive material and formed on the substrate in a spiral shape, and further having a center hole in which the magnetic pole is provided. , 3. A slider made of a non-conductive material and provided with a magnetic pole disposition hole for disposing the magnetic pole.In the manufacture of a magnetic head for magneto-optical recording, the coil is attached to the slider, and then the center of the coil is A hole and the magnetic pole arrangement hole of the slider are formed simultaneously.

Further, the magneto-optical recording apparatus according to the present invention comprises a magnetic head for applying a magnetic field in a direction perpendicular to the magneto-optical recording medium, and a light for irradiating a light beam to a portion of the magneto-optical recording medium to which the magnetic field is applied. A head is provided, wherein the magnetic head is a magnetic head for magneto-optical recording having any of the features described above.

As a result, the problems in the conventional magnetic head for magneto-optical recording and the magneto-optical recording apparatus can be satisfactorily solved.

[0027]

BEST MODE FOR CARRYING OUT THE INVENTION

[First Embodiment] FIG. 1 shows a schematic configuration of a magneto-optical recording apparatus according to the present invention. Here, reference numeral 1 denotes a disk as a magneto-optical recording medium on which information signals are recorded, which is composed of a substrate 10 made of a transparent material and a magnetic recording layer 11 formed on the substrate 10 and made of a magnetic material. The disk 1 is driven to rotate by a spindle motor 2. The magnetic head 3 is arranged on the upper surface of the disk 1, and the optical head 4 is arranged on the lower surface so as to face the magnetic head 3.

The magnetic head 3 is made of a magnetic material.
The core 20 is formed of a non-magnetic material and a slider 22 on which the core 21 and the coil 21 are mounted. The magnetic head 3 is held by the support means (not shown) with the bottom surface 22 a of the slider 22 facing the disk 1, and slides on the disk 1 as the disk 1 rotates. The magnetic head drive circuit 7 is connected to the coil 21.

The optical head 4 comprises a laser light source 5, an optical sensor 6, and an optical system (not shown) for converging and irradiating the laser light on the magnetic recording layer 11 of the disk 1. A laser drive circuit 9 is connected to the laser light source 5, and a reproduction circuit 8 is connected to the optical sensor 6.

When an information signal is recorded on the disk 1, the disk 1 is rotated by the spindle motor 2, and the laser light source 5 generates a laser beam by supplying current from the laser drive circuit 9. The laser light is applied to the magnetic recording layer 11 by the optical system while converging on a minute light spot.

On the other hand, the slider 22 of the magnetic head 3
After sliding on the disk 1, a current modulated by an information signal to be recorded is supplied from the magnetic head drive circuit 7 to the coil 21 in this state. As a result, a magnetic field modulated by the information signal is generated from the magnetic pole 20 a of the magnetic head 3, and the magnetic field is applied in a vertical direction to a portion of the magnetic recording layer 11 irradiated with the laser beam.

As a result, a magnetization region in which the direction of magnetization changes in accordance with the change in the direction of the applied magnetic field is formed in the magnetic recording layer 11, thereby recording an information signal.

When reproducing the information signal recorded in this way, the magnetic recording layer 11 is irradiated with a laser beam having a lower power than during recording by the optical head 6 while rotating the disk 1. The plane of polarization of the laser light reflected from the magnetic recording layer 11 rotates in accordance with the direction of the magnetization in the magnetization region. This is detected by the optical sensor 6, and the information signal is reproduced by the reproducing circuit 8 based on the detection signal.

In both recording and reproduction, tracking servo and focus servo are performed based on signals detected by the optical sensor 6 and processed by the reproduction circuit 8.

Next, FIG. 2 shows the configuration of a magnetic head 3 which is a first embodiment of the magnetic head for magneto-optical recording according to the present invention. In FIG. 2, (a) is a diagram viewed from the top direction,
(B) is a side sectional view. FIG. 3 shows the configuration of the coil 21. In FIG. 3, (a) is a diagram viewed from the upper surface direction, (b) is a side sectional view, and (c) is a diagram viewed from the lower surface direction.

The core 20 has a square plate shape and is made of a magnetic material such as ferrite. At the center of the core 20, a protruding quadrangular pole-shaped magnetic pole 20a is formed so as to be substantially perpendicular to the disk 1. The cross-sectional area of the magnetic pole 20a is 0.04 m
m ² or less, for example, the cross section of each side is 100 to
It is a square of 200 μm.

The coil 21 includes a base 23 which is a thin plate made of a nonconductive material, for example, a resin material such as polyimide.
A first coil pattern 24a made of a film of a conductive material such as copper and formed on a surface of the substrate 23 facing the core 20
And a second coil pattern 2 made of a film of a conductive material such as copper and formed on a surface of the base material 23 facing the disk 1.
4b, and protective coats 25a and 25b made of a non-conductive material such as a resin material and formed to cover the first coil pattern 24a and the second coil pattern 24b.

A rectangular center hole 32 is formed in the center of the coil 21 so that the first coil pattern 24a and the second
Is formed in a spiral shape around the center hole 32. The inner peripheral portion of the first coil pattern 24a and the inner peripheral portion of the second coil pattern 24b are connected in series via a connection portion 33 formed near the center hole 32.

A first terminal 35a and a second terminal 35b are formed on the surface of the base member 23 facing the core 20, and an outer peripheral portion of the first coil pattern 24a is 35a, the outer peripheral portion of the second coil pattern 24b
It is connected to the second terminal 35b via the connection part 34.

Positioning portions 26, 27 and 28 are formed around the coil pattern. Positioning part 2
Reference numerals 6, 27, 28 denote circular or oblong holes, and guide patterns 29 made of a film of a conductive material such as copper are provided on both surfaces of the peripheral portions of the positioning portions 26, 27, 28 of the base material 23.
a, 29b, 30a, 30b, 31a, 31b are formed.

The core 20 and the coil 21 are made of a slider 22 made of a wear-resistant resin material or ceramic material.
Mounted on The slider 22 has a magnetic pole arrangement hole 40,
And locking portion 3 protruding from the mounting surface side of coil 21
7, 38, 39 are formed. The coil 21 has positioning portions 26, 27, 28 which are engaged with the locking portions 37 of the slider 22,
By fitting with 38, 39, it is mounted on the slider 22. At this time, the coil 21 is positioned and fixed to the slider 22 such that the center hole 32 of the coil 21 overlaps the magnetic pole arrangement hole 40 of the slider 22.

Further, the core 20 is mounted on the coil 21, and the magnetic pole 20 a of the core 20 is disposed in the center hole 32 of the coil 21 and the magnetic pole arrangement hole 40 of the slider 22. The lower end surface of the magnetic pole 20a has the same height as the bottom surface 22a of the slider 22, or a position slightly higher than the bottom surface 22a (a position further away from the disk 1) as shown in the figure.

The first terminal 35a and the second terminal 35b of the coil 21 are connected to the magnetic head drive circuit 7,
The first coil pattern 24 from the magnetic head drive circuit 7
When a current is supplied in series to a and the second coil pattern 24b, a magnetic field is generated from the end face of the magnetic pole 20a, and the magnetic field is applied vertically to the magneto-optical recording medium.

Here, in order to generate a magnetic field more efficiently, it is necessary to increase the space factor of the coil pattern (the ratio of the cross-sectional area of the coil pattern to the cross-sectional area of the coil). The thickness Ts of 23 should be at least 70 μm or less, preferably 35 μm or less. Therefore, in the present embodiment, the substrate 23 forming the coil 21 is a polyimide film having a thickness Ts of 12 μm. Further, the first coil pattern 24a, the second coil pattern 24b, and the guide patterns 29a,
29b, 30a, 30b, 31a, 31b are all made of a copper film or foil having a thickness H of 50 μm.
The thickness of 5a, 25b is 10 μm.

If the guide patterns 29a, 29
b, 30a, 30b, 31a, 31b are not formed, and the peripheral portions of the positioning portions 26, 27, 28 are
3, and the protection coats 25a and 25b alone, the thickness Tc of the coil 21 is 132 μm (12 μm + 2 × (50 μm + 10) at the portion where the first coil pattern 24a and the second coil pattern 24b are formed.
μm)), whereas the positioning portions 26, 27,
28, the thickness Tc 'of the coil 21 is 3
It is 2 μm (12 μm + 2 × 10 μm), and the strength is insufficient. Not only that, because of this thickness difference between the coil forming part and the positioning part, the positioning part 2
The peripheral portions of 6, 27 and 28 are not tightly fixed to the mounting surface of the slider 22, and a gap is easily generated, so that the strength is further insufficient. In this case, when the magnetic head is manufactured, in the process of attaching the coil 21 to the slider 22, the peripheral portions of the positioning portions 26, 27, and 28 have insufficient strength, so that they cannot fully resist the acting force and are deformed. Occurs.

However, in the present embodiment, since the guide patterns 29a, 29b, 30a, 30b, 31a, 31b are formed on the periphery of the positioning portions 26, 27, 28, the positioning portions 26, 27, 28 The thickness Tc ′ of the coil 21 in the peripheral portion is the same as the thickness Tc in the portion where the first coil pattern 24a and the second coil pattern 24b are formed, and is sufficiently large as 132 μm. Since they are fixed, they have higher strength and do not deform.

Here, the guide patterns 29a, 29
b, 30a, 30b, 31a, and 31b are the thicknesses of the coils 21 around the positioning portions 26, 27, and 28.
Is desirably formed to have a thickness of 70 μm or more. In this embodiment, the thickness Tc ′ is 13
Since it is 2 μm, this condition is satisfied.

Next, the method for fabricating the magnetic head for magneto-optical recording according to the present embodiment will be explained. In the manufacture of the magnetic head, a pattern forming method such as a transfer method can be used to create the coil 21. That is, two substrates made of a conductive material such as a metal plate are prepared, and the first coil pattern 24a made of a film of a conductive material such as copper is formed on one of the substrates by selective plating or the like. And a second coil pattern 24b and guide patterns 29b, 30b, 31b are formed on the other substrate.
After adhering these substrates to both surfaces of a base material 23 made of a resin material, only the substrates are peeled and removed, so that the first coil pattern 24a and the second coil pattern 2
4b, and guide patterns 29a, 29b, 30a,
30b, 31a, and 31b are collectively transferred and formed to form the coil 21. According to such a creation method, the guide patterns 29a, 29b, 30a, 30b,
Since the positions of the coil patterns 31a and 31b with respect to the coil patterns 24a and 24b are constant, there is almost no error or manufacturing variation.

Further, as described above, the guide pattern 29
The coil 21 on which a, 29b, 30a, 30b, 31a, and 31b are formed is irradiated with a beam of a carbon dioxide gas laser or an excimer laser from one direction to perform laser processing, and guide patterns 29a, 29b, 30a, 30b, 31a, 3
1b to form a hole by removing the inner portion of the base material,
These are positioning portions 26, 27, and 28. According to such a processing method, only the resin material is selectively removed, and the guide patterns 29a, 29b, 30a, 30b,
31a and 31b are not affected by the processing and serve as a mask for the laser beam, so that the positioning portions 26, 27,
By irradiating the beam a little wider than 28, the guide patterns 29a, 29b, 30a, 30b, 31a, 31
Only the base material in the inner part surrounded by b can be removed.

Therefore, according to such a manufacturing method, the positions and dimensions of the positioning portions 26, 27, 28 are determined by the guide patterns 29a, 29b, 30a, 3 formed in advance.
0b, 31a, and 31b, and even if an error occurs in the mounting position of the coil 21 to the processing device, it is not affected by the error. , 27,28
Can be formed.

For this reason, according to the method of manufacturing a magnetic head for magneto-optical recording according to the present invention, even if the coil 21
The center hole 32 of the coil 21
And the coil 21 is positioned on the slider 22 such that the magnetic pole arrangement hole 40 of the slider 22 and the magnetic pole arrangement hole 40 overlap exactly.
It can be fixed.

It should be noted that the positioning portion and the guide pattern formed on the periphery thereof are not necessarily limited to the shapes and positions shown in the above-described embodiment. For example, the shapes and positions shown in FIG. 4 or FIG. , May be a position.

In the example shown in FIG.
Numerals 6, 27 and 28 are cutouts formed at the ends of the coil 21, and arcuate guide patterns 29a, 29b, 30a,
30b, 31a and 31b are formed.

In the example shown in FIG. 5, not only the peripheral portions of the positioning portions 26, 27 and 28, which are circular or oblong holes, but also the first coil pattern 24a and the second coil pattern 24b. Coil 2 excluding forming part
Guide patterns 41a, 41 over the entire surface of
b is formed.

[Second Embodiment] Next, a second embodiment of the magnetic head for magneto-optical recording according to the present invention will be described. In the present embodiment, the schematic configurations of the magneto-optical recording device and the magnetic head are the same as those of the first embodiment, and thus detailed description is omitted.

FIG. 6 shows the configuration of the magnetic head 3. In FIG. 6, (a) is a view seen from the top direction, and (b) is a side sectional view. FIG. 7 shows the configuration of the coil 21. Here, (a) is a view as viewed from above, (b) is a side sectional view, and (c) is a view as viewed from below.

In this embodiment, as in the first embodiment, the coil 21 is composed of a base material 23, a first coil pattern 24a, a second coil pattern 24b, and protective coats 25a and 25b. . In addition, the center hole 32,
And positioning patterns 26, 27, 28 and guide patterns 29a, 29b, 30a,
30b, 31a, and 31b are the same as in the first embodiment.

Further, in this embodiment, the coil 2
The guide pattern 4 is also provided on the peripheral portion of the center hole 32 on both sides of the guide pattern 4.
2a and 42b are formed. Guide patterns 42a, 4
2b is formed of four patterns formed along the four sides of the center hole 32, respectively. Guide pattern 42
a and 42b are electrically separated from the first coil pattern 24a and the second coil pattern 24b, and the four patterns constituting each guide pattern are formed so as to be at least electrically separated from each other. Have been.

As described above, it is desirable that the guide patterns 42a and 42b formed on the peripheral portion of the center hole 32 do not form a closed ring surrounding at least the entire periphery of the center hole 32. This is because if the guide pattern is
This is because, if the entire circumference of the magnetic pole 20a is formed in a closed annular shape, an annular current is generated in the guide pattern in a direction that cancels the change in the magnetic flux in the magnetic pole 20a, and it becomes difficult to modulate the magnetic field.

Accordingly, in order to prevent the generation of such an annular current, at least one or more preferably two or more breaks (electrical breaks) are formed in the guide pattern.
Is desirably provided.

The core 20 and the coil 21 are made of a slider 22 made of a wear-resistant resin material or ceramic material.
Mounted on The slider 22 has a magnetic pole arrangement hole 40,
And a locking portion 37 protruding from the mounting surface of the coil 21,
38 and 39 are formed. The coil 21 has the positioning portions 26, 27, 28 as locking portions 37, 3 of the slider 22.
By being fitted with 8, 39, it is mounted on the slider 22. At this time, the coil 21 is positioned and fixed to the slider 22 such that the center hole 32 of the coil 21 overlaps the magnetic pole arrangement hole 40 of the slider 22.

Further, the core 20 is mounted on the coil 21, and the magnetic pole 20 a of the core 20 is disposed in the center hole 32 of the coil 21 and the magnetic pole arrangement hole 40 of the slider 22. The lower end surface of the magnetic pole 20a has the same height as the bottom surface 22a of the slider 22, or a position slightly higher than the bottom surface 22a (a position further away from the disk 1) as shown in the figure.

The first terminal 35a and the second terminal 35b of the coil 21 are connected to the magnetic head drive circuit 7,
The first coil pattern 24 from the magnetic head drive circuit 7
When a current is supplied in series to a and the second coil pattern 24b, a magnetic field is generated from the end face of the magnetic pole 20a, and the magnetic field is applied perpendicular to the magneto-optical recording medium.

Here, in order to generate a magnetic field more efficiently, it is necessary to increase the space factor of the coil pattern (the ratio of the cross-sectional area of the coil pattern to the cross-sectional area of the coil). The thickness Ts of 23 should be at least 70 μm or less, preferably 35 μm or less. Therefore, in the present embodiment, the substrate 23 forming the coil 21 is a polyimide film having a thickness Ts of 12 μm. Further, the first coil pattern 24a, the second coil pattern 24b, and the guide patterns 29a,
29b, 30a, 30b, 31a, 31b, 42a, 4
2b is a copper film having a thickness H of 50 μm,
The thickness of the protective coats 25a and 25b is 10 μm.

If the guide patterns 42a, 42
b is not formed, and the peripheral portion of the center hole 32 is
3 and only the protective coats 25a and 25b, the thickness Tc of the coil 21 is 132 μm in the portion where the first coil pattern 24a and the second coil pattern 24b are formed. In the peripheral portion of the hole 32, the thickness Tc 'of the coil 21 is 32 μm.
m and the strength is insufficient. In addition, due to such a partial thickness difference, the peripheral portion of the center hole 32 is not tightly fixed to the mounting surface of the slider 22, and a gap is easily generated. . For this reason, in the process of mounting the core 20 on the coil 21 at the time of manufacturing the magnetic head, the strength of the peripheral portion of the central hole 32 is insufficient, so that the magnetic pole 20 a is in contact with the peripheral portion of the central hole 32. Also, the coil 21 is deformed.

However, in the present invention, since the guide patterns 42a and 42b are formed in the peripheral portion of the center hole 32, the thickness Tc 'of the coil 21 in the peripheral portion of the center hole 32 is smaller than that of the first coil. The thickness Tc of the portion where the pattern 24a and the second coil pattern 24b are formed
Since it is the same as the above and is sufficiently large as 132 μm, and furthermore, it is tightly fixed to the mounting surface of the slider 22, so that it has higher strength and does not cause deformation.

Since the first coil pattern 24a or the second coil pattern 24b is not exposed on the inner wall of the center hole 32, the magnetic pole 20a of the core 20 disposed in the center hole 32 is A first coil pattern 24a,
Alternatively, the first coil pattern 24a and the second coil pattern 24
The current to be supplied to b is prevented from flowing out through the core 20 to the outside. The guide pattern 42
a and 42b are electrically separated from the first coil pattern 24a and the second coil pattern 24b.
There is no problem even if you come in contact with. If the guide patterns 42a and 42b have only one circumferential cut, if the magnetic pole 20a comes into contact with the cut,
An electric closed circuit around the magnetic pole is formed by the guide pattern and the magnetic pole. However, this can be avoided by making a cut in two or more places, and this is more preferable. In the present embodiment, since there are four cuts, this condition is satisfied.

Here, it is desirable that the thickness of the guide patterns 42a and 42b is formed such that the thickness of the coil 21 in the peripheral portion of the center hole 32 is 70 μm or more. In the present embodiment, since the thickness Tc 'is 132 μm, this condition is satisfied.

Next, the method for fabricating the magnetic head for magneto-optical recording according to the present embodiment will be explained. In the manufacture of the magnetic head described above, a pattern forming technique such as a transfer technique can be used to create the coil 21. That is,
Prepare two substrates made of a conductive material such as a metal plate,
A first coil pattern 24a made of a film of a conductive material such as copper and guide patterns 29a, 30a, 31a and 42a are formed on one substrate by selective plating or the like, and are formed on the other substrate. Are the second coil pattern 24b and the guide patterns 29b, 30b, 31
b and 42b are formed, and these substrates are adhered to both surfaces of a base material 23 made of a resin material. Then, only the substrates are peeled and removed, so that the first coil pattern 24 is formed on the base material 23.
a, the second coil pattern 24b, and the guide patterns 29a, 29b, 30a, 30b, 31a, 31b,
The coils 21a and 42b are collectively transferred and formed to form the coil 21. According to such a creation method, the guide patterns 29a, 29b, 30a, 30b, 31a, 3
The positions of the coil patterns 1b, 42a, and 42b with respect to the coil pattern are constant, and there is almost no error or manufacturing variation.

Further, the guide pattern 29
a, 29b, 30a, 30b, 31a, 31b, 42
The coil 21 on which the a and b are formed is irradiated with a beam of a carbon dioxide gas laser or an excimer laser from one direction to perform laser processing, and guide patterns 29a, 29b, 30a, and
Substrate 23 of the inner part surrounded by 30b, 31a, 31b
Are removed to form holes, and the positioning portions 26, 27, 28
In addition, the central portion 32 is formed by removing the portion of the base material 23 surrounded by the guide patterns 42a and 42b.

According to such a processing method, only the resin material is selectively removed, and the guide pattern 29a,
29b, 30a, 30b, 31a, 31b, 42a, 4
2b is not affected by the processing and serves as a mask for the laser beam. Therefore, if the beam is irradiated to a slightly wider area than the positioning portions 26, 27, 28 and the center hole 32,
Guide patterns 29a, 29b, 30a, 30b, 31
Only the base material in the inner part surrounded by a, 31b, 42a, and 42b can be removed.

Therefore, according to such a manufacturing method, the positions and dimensions of the positioning portions 26, 27, 28 and the center hole 32 are determined by the guide patterns 29a,
29b, 30a, 30b, 31a, 31b, 42a, 4
2b, and even if an error occurs in the mounting position of the coil 21 to the processing device, the position is not affected by the error, so that the positioning portions 26, 27, and 28 have extremely high positional accuracy and dimensional accuracy. And center hole 32
Can be formed.

For this reason, according to the method of manufacturing a magnetic head for magneto-optical recording according to the present invention, even if the coil 21
The center hole 32 of the coil 21
And the coil 21 is positioned on the slider 22 such that the magnetic pole arrangement hole 40 of the slider 22 and the magnetic pole arrangement hole 40 overlap exactly.
It can be fixed.

[Third Embodiment] Next, a third embodiment of the method of manufacturing a magnetic head for magneto-optical recording according to the present invention will be described. In the present embodiment, the schematic configurations of the magneto-optical recording device and the magnetic head are the same as those in the second embodiment, and therefore detailed description is omitted.

In the present embodiment, in the step of attaching the coil 21 to the slider 22, the center hole 32 for disposing the magnetic pole 20a and the magnetic pole disposing hole 40 are formed in the coil 21 and the slider 22, respectively. Before mounting, the coil 21 is previously attached to the slider 22 and integrated, and then the coil 2 is formed by laser processing or the like.
1, and the center hole 32 and the magnetic pole arrangement hole 40 are simultaneously formed in the slider 22. According to such a method,
Even if the center hole 32 of the coil 21 is made small, no positional error occurs between the center hole 32 and the magnetic pole arrangement hole 40 of the slider 22.

Therefore, in this case, the coil 2
It is not necessary to form the positioning patterns 26, 27, 28 and the guide patterns 42a, 42b on the peripheral edge of the center hole 32 in the first position 1. Further, the positioning patterns 26, 27, 28 are formed to improve the accuracy of the mounting position of the coil 21. Alternatively, guide patterns 42a and 42b may be formed on the periphery of the center hole 32 to increase the accuracy of the position where the center hole 32 is formed.

In this embodiment, the medium has been described as a magneto-optical disk. However, the present invention can be applied to other types of magneto-optical media such as cards.

In this embodiment, the magnetic head used in the magneto-optical recording device has been described. However, other recording devices using the magnetic head, such as a hard disk drive which is a magnetic recording device, have been described. A magnetic head having such a configuration can be used.

[0079]

As described above, according to the magnetic head for magneto-optical recording and the method of manufacturing the same according to the present invention,
Even if the cross-sectional area of the magnetic pole of the core is reduced and the center hole of the coil and the magnetic pole arrangement hole of the slider are also reduced accordingly, the coil's central hole and the magnetic pole arrangement hole of the slider exactly overlap. Thus, the coil can be attached to the slider.

Further, it is possible to reduce the size of the magnetic pole arrangement hole of the slider in accordance with the magnetic pole of the core, so that there is no large gap around the magnetic pole of the slider. When the vehicle slides, dust on the magneto-optical recording medium accumulates in the gap, thereby eliminating the possibility that the magnetic head or the magneto-optical recording medium is damaged.

Further, the inner diameter of the coil pattern is reduced,
Even when the coil is brought closer to the size of the center hole, even if an error occurs in the mounting position of the coil to the processing device in the step of forming the center hole in the manufacture of the coil, the formation position of the center hole is the center of the coil. As a result, the coil pattern is exposed to the inner wall of the center hole and comes into contact with the magnetic pole, so that the current to be supplied to the coil pattern can be prevented from flowing out through the core.

As described above, the problem when the cross-sectional area of the magnetic pole of the core is reduced is solved. As a result, in the magnetic head for magneto-optical recording according to the present invention, the inductance of the coil is sufficiently reduced and the modulation frequency of the magnetic field is reduced. Can be increased. In particular, the cross-sectional area of the magnetic pole of the core is 0.04 mm.
When it is set to ² or less, the maximum modulation frequency of the magnetic field is 8 MHz.
z or more.

Further, according to the magneto-optical recording apparatus of the present invention, by using the above-described magnetic head for magneto-optical recording, it is possible to improve the recording frequency of the information signal, and therefore the recording speed, without increasing the power consumption. can do.

[Brief description of the drawings]

FIG. 1 is a diagram showing a schematic configuration of a magneto-optical recording device according to the present invention.

FIG. 2 is a diagram showing a configuration of a first embodiment of a magnetic head for magneto-optical recording according to the present invention.

FIG. 3 is a diagram showing a configuration of a coil in the first embodiment of the magnetic head for magneto-optical recording according to the present invention.

FIG. 4 is a diagram showing an example of another coil of the magnetic head for magneto-optical recording according to the present invention.

FIG. 5 is a diagram showing an example of another coil of the magnetic head for magneto-optical recording according to the present invention.

FIG. 6 is a diagram showing a configuration of a second embodiment of a magnetic head for magneto-optical recording according to the present invention.

FIG. 7 is a diagram showing a configuration of a coil in a second embodiment of the magnetic head for magneto-optical recording according to the present invention.

FIG. 8 is a diagram showing a configuration of a conventional magnetic head for magneto-optical recording.

FIG. 9 is a diagram showing a configuration of a coil of a conventional magnetic head for magneto-optical recording.

[Explanation of symbols]

Reference Signs List 1 disk 2 spindle motor 3 magnetic head 4 optical head 5 laser light source 6 optical sensor 7 magnetic head drive circuit 8 reproduction circuit 9 laser drive circuit 10 substrate 11 magnetic recording layer 20 core 20a magnetic pole 21 coil 22 slider 23 base material 24a first Coil pattern 24b Second coil pattern 25a, 25b Protective coat 29a, 29b, 30a, 30b, 31a, 31b, 4
1a, 41b, 42a, 42b Guide pattern 32 Center hole 33, 34 Connecting part 35a First terminal 35b Second terminal 37, 38, 39 Locking part 40 Magnetic pole arrangement hole

Claims (13)

[Claims] 1. A magnetic head for magneto-optical recording, comprising: a coil comprising: a base made of a non-conductive material; and a coil pattern formed on the base in a spiral and made of a film of a conductive material. A magnetic head for magneto-optical recording, wherein a positioning portion is formed on the base material, and a guide pattern made of a film of a conductive material is formed on a peripheral portion of the positioning portion. 2. The magnetic head for magneto-optical recording according to claim 1, wherein the thickness of the base material is 70 μm or less. 3. The magnetic head for magneto-optical recording according to claim 2, wherein the thickness of the coil at a portion where the guide pattern is formed is 70 μm or more. 4. The magnetic head for magneto-optical recording according to claim 1, further comprising: a slider on which said coil is mounted, wherein said coil is fixed to said slider at said positioning portion. A magnetic head for magneto-optical recording, wherein a locking portion is formed. 5. A magnetic head for magneto-optical recording comprising a coil formed by a base made of a non-conductive material and a coil pattern formed on the base in a spiral and made of a film of a conductive material. In the manufacturing method, a guide pattern formed of a film of a conductive material is formed on the base material, and a portion of the base material is removed by laser processing using the guide pattern as a mask to form a positioning portion. Of manufacturing a magnetic head for magneto-optical recording. 6. A core having a protruding magnetic pole and made of a magnetic material, a base made of a non-conductive material, and a coil pattern formed spirally on the base and made of a film of a conductive material, and A magnetic head for magneto-optical recording, comprising: a coil having a center hole into which the magnetic pole is inserted; a second guide pattern made of a film of a conductive material is formed on a peripheral portion of the center hole. A magnetic head for magneto-optical recording. 7. The magnetic head for magneto-optical recording according to claim 6, wherein the thickness of the base material is 70 μm or less. 8. The magnetic head for magneto-optical recording according to claim 7, wherein the thickness of the coil in a portion where the second guide pattern is formed is 70 μm or more. 9. The magnetic head for magneto-optical recording according to claim 6, wherein the second guide pattern is formed in a non-closed annular shape. 10. In the second guide pattern,
7. The magnetic head for magneto-optical recording according to claim 6, wherein there are two or more cuts in the circumferential direction of the magnetic pole. 11. A core having a protruding magnetic pole and made of a magnetic material, a base made of a non-conductive material, and a coil pattern formed spirally on the base and made of a film of a conductive material, and A method of manufacturing a magnetic head for magneto-optical recording, comprising: a coil having a center hole into which the magnetic pole is inserted, wherein a second guide pattern made of a conductive material film is formed on the base material, A method for manufacturing a magnetic head for magneto-optical recording, wherein a portion of the base material is removed by laser processing using a second guide pattern as a mask to form the center hole. 12. A core having a protruding magnetic pole and made of a magnetic material, a base made of a non-conductive material, and a coil pattern formed spirally on the base and made of a film of a conductive material, and A method of manufacturing a magnetic head for magneto-optical recording, comprising: a coil having a center hole into which the magnetic pole is inserted, and a slider made of a non-conductive material and having a magnetic pole arrangement hole into which the magnetic pole is inserted. Attaching the coil to the slider, and thereafter, simultaneously forming the center hole of the coil and the magnetic pole arrangement hole of the slider. 13. A magneto-optical recording apparatus comprising: a magnetic head for applying a magnetic field in a direction perpendicular to a magneto-optical recording medium; and an optical head for irradiating a light beam to a portion of the magneto-optical recording medium to which the magnetic field is applied. The magnetic head according to any one of claims 1, 2, 3, 4, 6, 7, 8, 9, and 10.
13. A magneto-optical recording apparatus, comprising: the magneto-optical recording magnetic head according to item 8.